High-temperature, high-pressure and high-flow process material controller

Abstract

The invention belongs to the technical field of controllers, and particularly relates to a high-temperature, high-pressure and high-flow process material controller which comprises an air cylinder, a first air hole is formed in the lower end of the air cylinder, a control assembly is arranged at the upper end of the air cylinder, and the control assembly comprises a connecting pipe fixedly connected with the upper end of the air cylinder; the upper end of the connecting pipe fitting is fixedly connected with a connecting piece, the upper end of the connecting piece is fixedly connected with a threaded cylinder, the inner side of the threaded cylinder is fixedly connected with a hydraulic telescopic rod, the upper end of the hydraulic telescopic rod is fixedly connected with a top plate button, a membrane is arranged above the top plate button, a valve body is arranged above the membrane, and the two ends of the valve body are fixedly connected with flow channels. According to the control device, through the control assembly, when the solid-state source bottle is heated to generate a large-flow steam coefficient, conveying control can be conducted on a large amount of steam, and then the control accuracy of the control device is improved.

Description

Technical Field

[0001] The present invention belongs to the technical field of controllers, and in particular relates to a high-temperature, high-pressure, and high-flow process material controller. Background Art

[0002] A solid-state source bottle steam controller is a device used to control parameters related to steam generation from a solid-state source bottle, and usually has the function of precisely controlling parameters such as temperature and pressure.

[0003] By heating the solid source bottle, the solid source material is converted into a vapor state, and the steam is stably output according to the set requirements. For example, in some semiconductor manufacturing processes, specific solid source materials are required to generate steam for process steps such as thin film deposition. The solid source bottle steam controller can ensure the steam generation amount, temperature and pressure parameters, thereby ensuring the consistency and stability of product quality.

[0004] Currently, a controller for controlling steam is installed on the solid-state source bottle. Since the solid-state source bottle needs a higher temperature to reach the required pressure, the source bottle needs to be heated. Currently, there is no controller on the market that is resistant to high temperatures and has a large flow coefficient. Summary of the Invention

[0005] The purpose of the present invention is to provide a high-temperature, high-pressure, high-flow process material controller to solve the technical problem that in the process of solid source bottles being heated by the controller to generate steam, the controller with a large flow coefficient cannot be accurately controlled, so as to achieve the purpose of being able to control steam with a large flow coefficient.

[0006] In order to solve the above technical problems, the present invention provides a high-temperature, high-pressure, and high-flow process material controller, comprising a cylinder: a first air hole is opened at the lower end of the cylinder, and a control assembly is provided at the upper end of the cylinder, the control assembly includes a connecting pipe fixedly connected to the upper end of the cylinder, and the upper end of the connecting pipe is fixedly connected to a connecting piece, the upper end of the connecting piece is fixedly connected to a threaded barrel, and a hydraulic telescopic rod is fixedly connected to the inner side of the threaded barrel, the upper end of the hydraulic telescopic rod is fixedly connected to a top plate button, and a diaphragm is provided above the top plate button, a valve body is provided above the diaphragm, and flow channels are fixedly connected at both ends of the valve body, a valve core is fixedly connected inside the valve body, and a second air hole is opened inside the valve core, and a third air hole is opened at one end of the valve body, and when the gas is not connected, the top plate button presses the diaphragm to seal the valve core, and when the ventilation pressure is between 0.4 and 0.7 MPa, the top plate button retracts into the threaded barrel, the diaphragm is tightly attached to the top plate button, and the valve core opens.

[0007] Furthermore, a sealing gasket is provided at the outer end of the valve core, and the valve core is blocked by the sealing gasket.

[0008] Furthermore, a Velcro surface is fixedly connected to one side of the sealing gasket, and a Velcro adhesive surface is bonded to the end of the Velcro surface away from the sealing gasket. The end of the Velcro adhesive surface away from the Velcro surface is fixedly connected to the valve body. The sealing gasket is installed by fitting the Velcro adhesive surface and the Velcro surface, and is easily removed later.

[0009] Furthermore, a fixing ring is fixedly connected to the inside of one end of the flow channel away from the valve body, and a threaded ring is fixedly connected to one side of the fixing ring. The valve body is installed by engaging the threaded ring in the fixing ring with the thread of the threaded barrel.

[0010] Furthermore, a threaded pipe is threadedly engaged with the outer end of the threaded ring, and a filter is fixedly connected to the inner side of one end of the threaded pipe away from the threaded ring, so that impurities contained in the incoming gas are filtered through the filter.

[0011] Furthermore, mounting plates are fixedly connected to the outer sides of both ends of the threaded tube, and a twisting plate is fixedly connected to the end of the mounting plate away from the threaded tube. The twisting plate can be used to drive the mounting plate to rotate, thereby installing and removing the filter.

[0012] Furthermore, the two groups of flow channels are fixedly connected to both ends of the valve body, and the two groups of flow channels are responsible for air intake and air outlet respectively.

[0013] Furthermore, the outer thread of the threaded barrel is adapted to the inner thread, and the diameter of the diaphragm is smaller than the inner diameter of the sealing gasket.

[0014] The beneficial effects of the present invention are:

[0015] This high-temperature, high-pressure, high-flow process material controller can control the delivery of a large amount of steam when a solid source bottle is heated to generate a large flow steam coefficient through a control component, thereby improving the control accuracy of the control device.

[0016] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the specific embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0018] Figure 1 This is a schematic diagram of the first perspective three-dimensional structure of the present invention;

[0019] Figure 2is a schematic diagram of a second perspective three-dimensional structure of the present invention;

[0020] Figure 3 The present invention Figure 1 A schematic diagram of the structure at center A;

[0021] Figure 4 It is an enlarged schematic diagram of the structure of the sealing gasket, the Velcro surface and the Velcro adhesive surface of the present invention; Figure 5 It is a schematic structural diagram of the flow channel of the present invention; Figure 6 It is a schematic diagram of the internal structure of the flow channel of the present invention.

[0022] In the picture:

[0023] 1. Cylinder; 11. First air hole; 21. Connecting pipe; 22. Connecting piece; 23. Threaded barrel; 24. Hydraulic telescopic rod; 25. Top plate button; 26. Diaphragm; 27. Valve body; 28. Flow channel; 29. Valve core; 210. Second air hole; 211. Third air hole; 212. Sealing gasket; 213. Velcro surface; 214. Velcro surface; 215. Retaining ring; 216. Threaded ring; 217. Threaded pipe; 218. Filter; 219. Mounting plate; 220. Tightening plate. DETAILED DESCRIPTION

[0024] To make the objectives, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of them. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0025] Example:

[0026] like Figures 1 to 4As shown, a high-temperature, high-pressure, and high-flow process material controller includes a cylinder 1: a first air hole 11 is opened at the lower end of the cylinder 1, and a control component is provided at the upper end of the cylinder 1. The control component includes a connecting pipe 21 fixedly connected to the upper end of the cylinder 1, and a connecting piece 22 is fixedly connected to the upper end of the connecting pipe 21, and a threaded barrel 23 is fixedly connected to the upper end of the connecting piece 22. When the solid source bottle is heated to generate a large flow steam coefficient, a large amount of steam can be transported and controlled through the control component, thereby improving the control accuracy of the control device. A hydraulic telescopic rod 24 is fixedly connected to the inner side of the threaded barrel 23, and a top is fixedly connected to the upper end of the hydraulic telescopic rod 24. Plate button 25, a diaphragm 26 is provided above the top plate button 25, and the diaphragm 26 can be used to seal the valve core 29. A valve body 27 is provided above the diaphragm 26, and the two ends of the valve body 27 are fixedly connected to the flow channel 28. The valve core 29 is fixedly connected to the inside of the valve body 27, and a second air hole 210 is opened inside the valve core 29, and a third air hole 211 is opened at one end of the valve body 27. When the gas is not connected, the top plate button 25 presses the diaphragm 26 to seal the valve core 29, and when the ventilation pressure is 0.4~0.7Mpa, the top plate button 25 retracts into the threaded barrel 23, the diaphragm 26 is close to the top plate button 25, and the valve core 29 is opened.

[0027] like Figure 4 As shown, a sealing gasket 212 is provided at the outer end of the valve core 29, and the sealing gasket 212 is used to enhance the sealing effect.

[0028] like Figure 4 As shown, a Velcro surface 213 is fixedly connected to one side of the sealing gasket 212, and a Velcro surface 214 is adhered to the end of the Velcro surface 213 away from the sealing gasket 212, and the end of the Velcro surface 214 away from the Velcro surface 213 is fixedly connected to the valve body 27. By fitting the Velcro surface 213 and the Velcro surface 214, the sealing gasket 212 can be installed, and subsequent removal can also be facilitated.

[0029] like Figure 6 As shown, a fixing ring 215 is fixedly connected to the interior of one end of the flow channel 28 away from the valve body 27 , and a threaded ring 216 is fixedly connected to one side of the fixing ring 215 .

[0030] like Figure 6 As shown, the outer end of the thread ring 216 is threadedly engaged with a threaded tube 217, and the inner side of the threaded tube 217 away from the thread ring 216 is fixedly connected to a filter screen 218, through which impurities contained in the incoming gas are filtered.

[0031] like Figure 6 As shown, mounting plates 219 are fixedly connected to the outer sides of both ends of the threaded tube 217 , and a screwing plate 220 is fixedly connected to one end of the mounting plate 219 away from the threaded tube 217 .

[0032] like Figure 1 As shown, two groups of flow channels 28 are fixedly connected to both ends of the valve body 27, and the two groups of flow channels 28 are responsible for air intake and air outlet respectively.

[0033] like Figure 1 As shown, the outer thread of the threaded barrel 23 is adapted to the inner thread of the threaded barrel 212 , and the diameter of the diaphragm 26 is smaller than the inner diameter of the sealing gasket 212 , making it easy to assemble the valve body 27 and the cylinder 1 by utilizing the threaded engagement of the threaded barrel 23 and the threaded barrel 212 .

[0034] In summary, during installation, first, the sealing gasket 212 drives the Velcro surface 213 to be inserted into the valve body 27 so that the Velcro surface 213 and the Velcro adhesive surface 214 are adhered and fixed, and then the diaphragm 26 is inserted into the valve body 27 and fits with the sealing gasket 212, and then the valve body 27 is screwed to the outside of the threaded barrel 23 through the threaded sleeve for installation. After the installation is completed, in the non-ventilated state, the hydraulic telescopic rod 24 pushes the top plate button 25 to squeeze the diaphragm 26, so that the diaphragm 26 seals the valve core 29 and the second air hole 210. When the ventilation is blocked and the ventilation pressure is between 0.4 and 0.7 MPa, the hydraulic telescopic rod 24 pulls the top plate button 25 back into the threaded cylinder 23. At this time, the valve core 29 and the second air hole 210 are opened, and the steam can be discharged through the flow channel 28. When the steam flows in the flow channel 28, it is filtered through the filter screen 218. Subsequently, the screwing plate 220 can be turned to drive the mounting plate 219 and the threaded tube 217 to rotate, so that the threaded tube 217 can be engaged with the threaded ring 216 to remove and install the filter screen 218.

[0035] The various devices selected in this application are all universal standard parts or components known to those skilled in the art, and their structures and principles can be known to those skilled in the art through technical manuals or conventional experimental methods.

[0036] In the description of the embodiments of the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0037] In the description of the present invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate and simplify the description of the present invention. They are not intended to indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation, and therefore should not be construed as limitations on the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0038] With the above-described preferred embodiments of the present invention as a guide, and with reference to the above description, relevant personnel are fully capable of making various changes and modifications without departing from the technical scope of this invention. The technical scope of this invention is not limited to the contents of the specification and must be determined according to the scope of the claims.

Claims

1. A high temperature, high pressure and high flow process material controller, characterized in that: The invention comprises a cylinder (1): a first air hole (11) is provided at the lower end of the cylinder (1), and a control assembly is provided at the upper end of the cylinder (1), the control assembly comprises a connecting pipe (21) fixedly connected to the upper end of the cylinder (1), and a connecting piece (22) is fixedly connected to the upper end of the connecting pipe (21), the upper end of the connecting piece (22) is fixedly connected to a threaded barrel (23), and a hydraulic telescopic rod (24) is fixedly connected to the inner side of the threaded barrel (23), the upper end of the hydraulic telescopic rod (24) is fixedly connected to a top plate button (25), and a diaphragm (26) is provided above the top plate button (25), and the upper end of the diaphragm (26) is fixedly connected to the upper end of the diaphragm (26). A valve body (27) is provided on the side, and flow channels (28) are fixedly connected to both ends of the valve body (27), a valve core (29) is fixedly connected inside the valve body (27), and a second air hole (210) is opened inside the valve core (29), and a third air hole (211) is opened at one end of the valve body (27), and when the gas is not connected, the top plate button (25) presses the diaphragm (26) to block the valve core (29), and when the ventilation pressure is 0.4-0.7Mpa, the top plate button (25) retracts into the threaded cylinder (23), the diaphragm (26) is tightly attached to the top plate button (25), and the valve core (29) is opened.

2. A high-temperature, high-pressure, high-flow process material controller according to claim 1, characterized in that: A sealing gasket (212) is provided at the outer end of the valve core (29).

3. A high temperature, high pressure, high flow process material controller according to claim 2, characterized in that: One side of the sealing gasket (212) is fixedly connected to a Velcro surface (213), and an end of the Velcro surface (213) away from the sealing gasket (212) is adhered to a Velcro adhesive surface (214), and an end of the Velcro adhesive surface (214) away from the Velcro surface (213) is fixedly connected to the valve body (27).

4. A high-temperature, high-pressure, high-flow process material controller according to claim 3, characterized in that: A fixing ring (215) is fixedly connected to the interior of one end of the flow channel (28) away from the valve body (27), and a threaded ring (216) is fixedly connected to one side of the fixing ring (215).

5. The high-temperature, high-pressure, high-flow process material controller according to claim 4, wherein: The outer end of the threaded ring (216) is threadedly engaged with a threaded pipe (217), and the inner side of one end of the threaded pipe (217) away from the threaded ring (216) is fixedly connected to a filter screen (218).

6. A high-temperature, high-pressure, high-flow process material controller according to claim 5, characterized in that: The outer sides of both ends of the threaded tube (217) are fixedly connected with mounting plates (219), and one end of the mounting plate (219) away from the threaded tube (217) is fixedly connected with a screwing plate (220).

7. The high-temperature, high-pressure, high-flow process material controller according to claim 1, wherein: The two groups of flow channels (28) are respectively fixedly connected to the two ends of the valve body (27), and the two groups of flow channels (28) are responsible for air intake and air outlet respectively.

8. The high-temperature, high-pressure, high-flow process material controller according to claim 2, wherein: The outer thread of the threaded barrel (23) is adapted to the inner thread of 212, and the diameter of the diaphragm (26) is smaller than the inner diameter of the sealing gasket (212).

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