AOI (Automatic Optic Inspection) equipment for detecting copper-clad ceramic substrate

Abstract

The invention discloses AOI detection equipment for copper-clad ceramic substrate detection, and belongs to the technical field of AOI detection equipment, the AOI detection equipment comprises a foundation base, a detection chamber is arranged on the foundation base, a plurality of cover plates are arranged on the outer side of the foundation base, and heat dissipation openings are formed in the cover plates. By arranging the plate turning mechanism, the linkage box is used for linkage, after the copper-clad ceramic substrate is adsorbed by the suction cup, the copper-clad ceramic substrate can be automatically lifted to be in a vertical state, so that when the copper-clad ceramic substrate is subjected to optical detection, double-sided synchronous detection is realized, and the detection efficiency of the copper-clad ceramic substrate is improved; by arranging the sunflower lamp set, multispectral illumination is achieved, the sunflower lamp set integrates RGBW four-color LEDs and ultraviolet and infrared special light sources, multi-angle dynamic illumination is achieved in a high-speed rotation state, when the sunflower lamp set moves at a high speed, the multicolor light sources are matched with multi-angle illumination, and compared with traditional white light, ultraviolet cracks can be recognized more easily, and infrared copper thickness can be observed more easily.

Description

Technical Field

[0001] The present invention belongs to the technical field of AOI detection equipment, and in particular relates to an AOI detection equipment for detecting copper-clad ceramic substrates. Background Art

[0002] The AOI inspection equipment for copper-clad ceramic substrates is an automated inspection system based on optical imaging and artificial intelligence algorithms. It is specifically designed to detect surface defects on copper-clad ceramic substrates (such as DCB and AMB substrates), including copper layer scratches, cracks, uneven thickness, misalignment, ceramic cracks, contaminants, etc. Its core technologies include high-resolution optical imaging (such as linear array CCD or multispectral imaging), deep learning defect classification algorithms, precision motion control systems, and three-dimensional morphology reconstruction technology. Compared to traditional manual visual inspection or two-dimensional AOI, this equipment can adapt to the highly reflective surface characteristics of ceramic substrates, and combines infrared or confocal sensing technology to enhance defect recognition rates. The inspection accuracy can reach the micron level, and it integrates SPC statistical analysis functions to meet the high-reliability quality inspection needs before power semiconductor module packaging. It is widely used in high-end electronic manufacturing fields such as new energy vehicles, photovoltaic inverters, and IGBT modules.

[0003] The existing AOI inspection technology for copper-clad ceramic substrates has the following technical defects: The traditional horizontal placement inspection method requires two independent inspections to complete double-sided inspection, which is inefficient and increases the average inspection time by more than 40%. The fixed-angle white light illumination system has obvious detection blind spots, with a missed detection rate of up to 18% for microcracks (<10μm), and is unable to achieve quantitative detection of key parameters such as copper thickness. Static lighting causes illumination at the edge of the substrate to attenuate by 35%, seriously affecting detection consistency. The mechanical transmission system adopts a horizontal flipping design, the substrate breakage rate generally exceeds 0.1%, and there is a cumulative positioning error. Summary of the Invention

[0004] In order to overcome the above-mentioned defects, the present invention provides an AOI inspection device for inspecting copper-clad ceramic substrates, which solves the problems in the prior art.

[0005] To achieve the above-mentioned object, the present invention provides the following technical solution: an AOI inspection device for inspecting copper-clad ceramic substrates, comprising: A basic base, a detection chamber is provided on the basic base, a plurality of cover plates are provided on the outside of the basic base, a heat dissipation port is provided on each of the cover plates, a discharge cabinet door and a feed cabinet door are provided on the outer wall of the detection chamber, two groups of heat dissipation ports are provided on the top of the detection chamber, an operation panel and multiple groups of operation knobs are provided on one side of the detection chamber, a light-proof observation window is also provided on the outer wall of the detection chamber, and a flip mechanism and a light-filling mechanism are provided in the detection chamber; The fill light mechanism includes two vertical partitions fixedly connected to the detection room, and the area between the two vertical partitions is used as the AOI detection operation area. A reciprocating threaded rod is rotatably connected to the vertical partition, and a servo motor is built into the vertical partition for controlling and driving the reciprocating threaded rod. Two matching sliding rods are also fixedly connected to the vertical partition, and the two matching sliding rods are distributed on both sides of the reciprocating threaded rod and are symmetrical with the axis of the reciprocating threaded rod. A wing nut is threadedly connected to the reciprocating threaded rod, and a sliding sleeve is welded at both ends of the wing nut. The sliding sleeve is slidably connected to the matching sliding rod on the corresponding side, and a high-speed motor is provided on the wing nut, and a sunflower lamp group is provided on the high-speed motor.

[0006] As a further solution of the present invention: four LED fill light panels are provided on the vertical partition, and the four LED fill light panels are located on both sides of the reciprocating threaded rod and are biased towards the two ends of the reciprocating threaded rod.

[0007] As a further solution of the present invention: fixed rails are provided on both sides of the vertical partition, and a light shielding plate is slidably connected to the fixed rails. A three-stage electric telescopic rod is provided at the position corresponding to the light shielding plate in the detection room, and the output end of the three-stage electric telescopic rod is fixedly connected to the light shielding plate.

[0008] As a further solution of the present invention: the sunflower lamp group is composed of multi-color LEDs integrated on a rotating ring structure and connected to a high-speed motor. The sunflower lamp group is powered by a slip ring to achieve continuous rotation at any angle.

[0009] As a further solution of the present invention: the flip mechanism includes two sliding card plates fixedly connected to the detection chamber, a slider is slidably connected in the sliding card plate, the two sliders are fixedly connected to a linkage box on one side close to each other, and the two linkage boxes are fixedly connected to a fan-shaped plate on one side close to each other, an arc groove is provided on the fan-shaped plate, a swing arm is rotatably connected at the geometric center of rotation on the fan-shaped plate, a limit button is provided on the swing arm, the limit button is slidably connected in the arc groove, a suction cup plate is fixedly connected between the two swing arms, and a plurality of suction cups are provided at the bottom of the suction cup plate.

[0010] As a further solution of the present invention: a reversible synchronous motor is provided on one side of the linkage box, a worm gear is rotatably connected inside the linkage box, the output end of the reversible synchronous motor passes through the linkage box and is coaxially fixedly connected to a worm, the worm is engaged with the worm gear, and the worm gear shaft passes through the linkage box and the fan plate and is coaxially fixedly connected to the swing arm.

[0011] As a further solution of the present invention: the worm gear is coaxially fixedly connected to the driving bevel gear, the inner bottom of the linkage box is rotatably connected to the driven bevel gear, the driving bevel gear and the driven bevel gear are meshed with each other, the bottom of the linkage box is rotatably connected to the driving gear, the driven bevel gear is coaxially fixedly connected to the driving gear, and a matching tooth plate is provided in the sliding card plate, and the matching tooth plate is meshed with the driving gear on the corresponding side.

[0012] Compared with the prior art, the present invention has the following beneficial effects: By setting up a flip mechanism and utilizing the linkage box, the suction cup can automatically lift the copper-clad ceramic substrate to put it in an upright state after adsorbing it. In this way, when performing optical inspection on the copper-clad ceramic substrate, double-sided synchronous inspection can be achieved to improve its inspection efficiency. In terms of the optical inspection system, a fill light mechanism is configured. By setting up a sunflower lamp group, multi-spectral lighting is achieved. The sunflower lamp group integrates RGBW four-color LEDs and ultraviolet and infrared special light sources, and realizes multi-angle dynamic lighting under high-speed rotation (2400RPM). When the sunflower lamp group moves at high speed, the multi-color light source is combined with multi-angle lighting. Compared with traditional white light, it can more easily identify ultraviolet cracks and infrared copper thickness. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention; Figure 2 Schematic diagram of the three-dimensional internal structure of the detection chamber of the present invention; Figure 3 Schematic diagram of the three-dimensional structure of the vertical partition part of the present invention; Figure 4 It is a schematic diagram of the three-dimensional structure of the flip mechanism part of the present invention; Figure 5 It is a schematic diagram of the three-dimensional structure of the flip mechanism part of the present invention from another angle; Figure 6 Schematic diagram of the three-dimensional structure of the sliding card part of the present invention; Figure 7 It is a schematic diagram of the three-dimensional structure of the linkage box of the present invention; Figure 8 It is a schematic diagram of the three-dimensional internal structure of the linkage box of the present invention.

[0014] In the figure: 1. Basic base; 2. Inspection chamber; 3. Cover plate; 4. Discharge cabinet door; 5. Feed cabinet door; 6. Heat dissipation port; 7. Operation panel; 8. Operation knob; 9. Light-proof observation window; 10. Vertical partition; 11. Reciprocating threaded rod; 12. Matching slide rod; 13. Wing nut; 14. High-speed motor; 15. Sunflower lamp group; 16. LED fill light board; 17. Fixed track; 18. Sunshade; 19. Three-stage electric telescopic rod; 20. Sliding card plate; 21. Sliding block; 22. Linkage box; 23. Fan plate; 24. Arc groove; 25. Swing arm; 26. Limit button; 27. Suction cup plate; 28. Suction cup; 29. Reversible synchronous motor; 30. Worm gear; 31. Worm; 32. Driving bevel gear; 33. Driven bevel gear; 34. Driving gear; 35. Matching gear plate. DETAILED DESCRIPTION

[0015] The technical solution of this patent is further described in detail below in conjunction with specific implementation methods.

[0016] Example 1 like Figure 1 As shown, the first embodiment of the present invention provides an AOI inspection equipment for copper-clad ceramic substrate inspection, which can realize basic equipment monitoring, autonomous heat dissipation and substrate observation operations and other functions. It includes a basic base 1, on which a detection chamber 2 is arranged, and multiple cover plates 3 are arranged on the outside of the basic base 1, and each cover plate 3 is provided with a heat dissipation port, and a discharge cabinet door 4 and a feed cabinet door 5 are arranged on the outer wall of the detection chamber 2. Two groups of heat dissipation ports 6 are arranged on the top of the detection chamber 2, and an operation panel 7 and multiple groups of operation knobs 8 are arranged on one side of the detection chamber 2. A light-proof observation window 9 is also arranged on the outer wall of the detection chamber 2, and a flip mechanism and a fill light mechanism are arranged in the detection chamber 2.

[0017] Specifically, the basic base 1 provides overall support for the equipment, integrates the core transmission and control system, and ensures stability and accuracy during the inspection process. The inspection room 2 provides a closed optical inspection environment, integrates imaging, lighting and auxiliary mechanisms, and ensures inspection safety and consistency. The multiple cover plates 3 on the basic base 1 correspond to the positions of each transmission system and control system, and provide them with heat dissipation and inspection port positions. The heat dissipation port 6 at the top of the inspection room 2 mainly provides heat dissipation for the power supply components in the inspection room 2. The inspector can turn the equipment on and off and monitor parameters through the operation panel 7 and the operation knob 8. The light-proof observation window 9 is provided with optical glass and coated with infrared / ultraviolet cut-off film to prevent stray light from interfering with camera imaging. At the same time, a sliding sunshade 18 is provided, which is closed during inspection to avoid the influence of ambient light.

[0018] Example 2 like Figure 2-Figure 3As shown, this is the second embodiment of the present invention. Different from the previous embodiment, this embodiment provides a fill light function for the AOI inspection equipment for copper-clad ceramic substrate inspection. The multi-angle dynamic lighting of the copper-clad ceramic substrate is achieved through the high-speed rotating and reciprocating sunflower lamp group 15. It includes two vertical partitions 10 fixedly connected to the inspection chamber 2. The area between the two vertical partitions 10 is used as the AOI inspection operation area. The vertical partition 10 is rotatably connected to a reciprocating threaded rod 11. The vertical partition 10 is provided with a plurality of reciprocating threaded rods. A servo motor is provided for controlling and driving the reciprocating threaded rod 11. Two mating slide rods 12 are also fixedly connected to the vertical partition 10. The two mating slide rods 12 are distributed on both sides of the reciprocating threaded rod 11 and are symmetrical with the axis of the reciprocating threaded rod 11. A wing nut 13 is threadedly connected to the reciprocating threaded rod 11. Both ends of the wing nut 13 are welded with a sliding sleeve, and the sliding sleeve is slidably connected to the mating slide rod 12 on the corresponding side. A high-speed motor 14 is provided on the wing nut 13, and a sunflower lamp group 15 is provided on the high-speed motor 14.

[0019] The sunflower lamp group 15 in this device integrates RGBW four-color LEDs and ultraviolet and infrared special light sources. The traditional lighting method uses a static multi-angle light source, and the camera takes multiple photos to synthesize the image, which is time-consuming and the equipment imaging detection is complicated. The sunflower lamp group 15 is used to scan and take multiple photos at high speed. The high-speed rotation of the light source can cover all lighting angles in a single exposure cycle, greatly improving the efficiency.

[0020] The rotation speed of the sunflower lamp group 15 is limited to 1200RPM to 2400RPM. The encoder is used to trigger the camera exposure every 5°, that is, 72 times / revolution. Using the specified light source in the sunflower lamp group 15 at different angles, different types of surface defects of copper-clad ceramic substrates can be detected. For example, at 90°-180°, the light source mode is adjusted to infrared light and diffuse light to detect whether the thickness of the copper layer is uniform.

[0021] The servo motor in the vertical partition 10 drives the reciprocating threaded rod 11 to rotate, and the wing nut 13 on the reciprocating threaded rod 11 can move along the axial direction of the reciprocating threaded rod 11. Slide sleeves are provided on both sides of the wing nut 13. The purpose of providing the slide sleeve is to cooperate with the slide rod 12 to ensure the stability of the wing nut 13 during movement, and at the same time to alleviate the mechanical vibration of the sunflower lamp group 15 on the entire equipment when it rotates at high speed to a certain extent.

[0022] The rest of the structure is the same as that of Example 1.

[0023] Example 3 like Figure 2-Figure 3As shown, it is the third embodiment of the present invention. Different from the previous embodiment, this embodiment provides the main purpose of the sunshade 18 of the AOI detection equipment for copper-clad ceramic substrate detection and the power supply method of the sunflower lamp group 15, so that the sunflower lamp group 15 can still ensure stable power supply when rotating at high speed. The sunshade 18 can block the ambient light when the sunflower lamp group 15 is reversed to avoid stray light contamination of the image. It includes: fixed rails 17 are set on both sides of the vertical partition 10, and the sunshade 18 is slidably connected in the fixed rail 17. A three-stage electric telescopic rod 19 is set at the position corresponding to the sunshade 18 in the detection room 2, and the output end of the three-stage electric telescopic rod 19 Fixedly connected to the sunshade 18, the sunflower lamp group 15 is integrated with a multi-color LED on a rotating ring structure and is connected to the high-speed motor 14. The sunflower lamp group 15 is powered by a slip ring to achieve continuous rotation at any angle. In order to reduce the wear of components caused by mechanical impact, the sunflower lamp group 15 needs to slow down when it moves to the end of a one-way stroke. During the deceleration process, the high-speed rotation of the sunflower lamp group 15 is paused, and the local area of the substrate loses dynamic multi-angle lighting. At this time, the sunshade 18 is quickly extended under the drive of the three-stage electric telescopic rod 19, and the LED lamp beads on the LED fill light plate 16 are lit to fill the substrate with light to prevent the crack detection from being interrupted.

[0024] The rest of the structure is the same as that of Example 2.

[0025] Example 4 like Figure 4-Figure 8As shown, it is the third embodiment of the present invention. Different from the previous embodiment, this embodiment provides an automatic flipping function of the AOI inspection equipment for copper-clad ceramic substrate inspection, which can automatically flip the copper-clad ceramic substrate to an upright state before AOI inspection. It includes: the flipping mechanism includes two sliding card plates 20 fixedly connected to the inspection chamber 2, and a slider 21 is slidably connected in the sliding card plate 20. The sides of the two sliders 21 close to each other are fixedly connected to a linkage box 22, and the sides of the two linkage boxes 22 close to each other are fixedly connected to a fan-shaped plate 23. An arc groove 24 is provided on the fan-shaped plate 23. A swing arm 25 is rotatably connected at the geometric rotation center of the fan plate 23. A limit button 26 is provided on the swing arm 25. The limit button 26 is slidably connected in the arc groove 24. A suction cup is fixedly connected between the two swing arms 25. The disc plate 27 and the bottom of the suction cup plate 27 are provided with a plurality of suction cups 28. A reversible synchronous motor 29 is provided on one side of the linkage box 22. A worm gear 30 is rotatably connected in the linkage box 22. The output end of the reversible synchronous motor 29 passes through the linkage box 22 and is coaxially fixedly connected with a worm 31. The worm 31 meshes with the worm gear 30. The rotating shaft of the worm gear 30 passes through the linkage box 22 and the sector plate 23 and is coaxially fixedly connected to the swing arm 25. The worm gear 30 is coaxially fixedly connected with a driving bevel gear 32. The inner bottom of the linkage box 22 is rotatably connected to a driven bevel gear 33. The driving bevel gear 32 and the driven bevel gear 33 mesh with each other. The bottom of the linkage box 22 is rotatably connected to a driving gear 34. The driven bevel gear 33 is coaxially fixedly connected to the driving gear 34. A matching tooth plate 35 is provided in the sliding card plate 20. The matching tooth plate 35 meshes with the driving gear 34 on the corresponding side.

[0026] In the initial state, the suction cup plate 27 and the swing arm 25 are in a horizontal state. The suction cup plate 27 provides stable suction for the suction cup 28 by connecting to the internal negative pressure interface of the device, so that the suction cup 28 can stably adsorb the copper-clad ceramic substrate. Compared with the general clamping operation, the control method of the suction cup 28 adsorption can avoid the copper-clad ceramic substrate from cracking due to uneven clamping force. After the suction cup 28 is adsorbed, the reversible synchronous motor 29 drives the worm 31 to rotate, and the worm gear 30 engaged with the worm 31 will rotate. When the worm gear 30 rotates, the swing arm 25 coaxially connected thereto will rotate. Since the sector plate 23 is provided with an arc groove 24, the limit button 26 on the swing arm 25 is located in the arc groove 24. Since the maximum angular deflection of the arc groove 24 is 90°, the maximum rotation angle of the swing arm 25 is also 90°. When the worm gear 30 rotates and causes the swing arm 25 and the suction cup plate 27 to rotate, the copper-clad ceramic substrate will be in a vertical state.

[0027] Since a driving bevel gear 32 is provided at one end of the worm 31, the driving bevel gear 32 will rotate as the worm 31 rotates, and the driven bevel gear 33 meshing with the driving bevel gear 32 will rotate. The driving gear 34 located at the bottom of the linkage box 22 is coaxially fixedly connected to the driven bevel gear 33, and the driving gear 34 is driven synchronously, and because it meshes with the matching tooth plate 35 in the sliding card plate 20, the linkage box 22 as a whole and the copper-clad ceramic substrate will move toward the middle of the sliding card plate 20, thereby ensuring that the copper-clad ceramic substrate can move to the middle position of the sliding card plate 20 while rotating to a vertical state. The purpose of this is to ensure that the copper-clad ceramic substrate is at the same distance from the sunflower lamp groups 15 on both sides during detection.

[0028] The rest of the structure is the same as that of Example 3.

[0029] In summary, the light sources stacked on both sides of the vertical substrate are combined with the camera detection method, and double-sided inspection can be completed with a single clamping, which greatly improves the inspection efficiency compared with traditional inspection methods.

[0030] The preferred embodiments of the present invention are described in detail above, but the present invention is not limited to the above embodiments. Various changes can be made within the knowledge of ordinary technicians in this field without departing from the purpose of the present invention.

Claims

1. An AOI inspection device for copper-clad ceramic substrate inspection, characterized in that: include: A basic base (1), a detection chamber (2) is provided on the basic base (1), a plurality of cover plates (3) are provided on the outside of the basic base (1), and a heat dissipation port is provided on each of the cover plates (3), a discharge cabinet door (4) and a feed cabinet door (5) are provided on the outer wall of the detection chamber (2), two groups of heat dissipation ports (6) are provided on the top of the detection chamber (2), an operation panel (7) and a plurality of groups of operation knobs (8) are provided on one side of the detection chamber (2), a light-proof observation window (9) is also provided on the outer wall of the detection chamber (2), and a flap mechanism and a light-filling mechanism are provided inside the detection chamber (2); The fill light mechanism includes two vertical partitions (10) fixedly connected to the detection room (2), and the area between the two vertical partitions (10) is used as the AOI detection operation area. A reciprocating threaded rod (11) is rotatably connected to the vertical partition (10), and a servo motor is built into the vertical partition (10) for controlling and driving the reciprocating threaded rod (11). Two matching slide rods (12) are also fixedly connected to the vertical partition (10), and the two matching slide rods (12) are distributed on both sides of the reciprocating threaded rod (11) and are symmetrical with the axis of the reciprocating threaded rod (11). A wing nut (13) is threadedly connected to the reciprocating threaded rod (11), and both ends of the wing nut (13) are welded with a sliding sleeve, and the sliding sleeve is slidably connected to the matching slide rod (12) on the corresponding side. A high-speed motor (14) is provided on the wing nut (13), and a sunflower lamp group (15) is provided on the high-speed motor (14).

2. The AOI inspection equipment for copper-clad ceramic substrate inspection according to claim 1, characterized in that: Four LED light-filling panels (16) are provided on the vertical partition (10), and the four LED light-filling panels (16) are located on both sides of the reciprocating threaded rod (11) and are biased towards the two ends of the reciprocating threaded rod (11).

3. The AOI inspection equipment for copper-clad ceramic substrate inspection according to claim 2, characterized in that: Fixed rails (17) are provided on both sides of the vertical partition (10), and a light shielding plate (18) is slidably connected in the fixed rails (17). A three-stage electric telescopic rod (19) is provided in the detection chamber (2) at a position corresponding to the light shielding plate (18), and an output end of the three-stage electric telescopic rod (19) is fixedly connected to the light shielding plate (18).

4. The AOI inspection equipment for copper-clad ceramic substrate inspection according to claim 3, characterized in that: The sunflower light group (15) is composed of multi-color LEDs integrated on a rotating ring structure and connected to a high-speed motor (14). The sunflower light group (15) is powered by a slip ring to achieve continuous rotation at any angle.

5. The AOI inspection equipment for copper-clad ceramic substrate inspection according to claim 4, characterized in that: The flap mechanism comprises two sliding cards (20) fixedly connected to the detection chamber (2), a slider (21) being slidably connected to the sliding card (20), a linkage box (22) being fixedly connected to the sides of the two sliders (21) close to each other, a fan-shaped plate (23) being fixedly connected to the sides of the two linkage boxes (22) close to each other, an arc groove (24) being provided on the fan-shaped plate (23), a swing arm (25) being rotatably connected to the geometric rotation center of the fan-shaped plate (23), a limit button (26) being provided on the swing arm (25), the limit button (26) being slidably connected to the arc groove (24), a suction cup plate (27) being fixedly connected between the two swing arms (25), and a plurality of suction cups (28) being provided at the bottom of the suction cup plate (27).

6. The AOI inspection equipment for copper-clad ceramic substrate inspection according to claim 5, characterized in that: A reversible synchronous motor (29) is provided on one side of the linkage box (22), a worm gear (30) is rotatably connected in the linkage box (22), an output end of the reversible synchronous motor (29) passes through the linkage box (22) and is coaxially fixedly connected to a worm (31), the worm (31) is meshed with the worm gear (30), and a rotating shaft of the worm gear (30) passes through the linkage box (22) and the sector plate (23) and is coaxially fixedly connected to the swing arm (25).

7. The AOI inspection equipment for copper-clad ceramic substrate inspection according to claim 6, characterized in that: The worm gear (30) is coaxially fixedly connected to a driving bevel gear (32); the inner bottom of the linkage box (22) is rotatably connected to a driven bevel gear (33); the driving bevel gear (32) and the driven bevel gear (33) are meshed with each other; the bottom of the linkage box (22) is rotatably connected to a driving gear (34); the driven bevel gear (33) and the driving gear (34) are coaxially fixedly connected; a matching tooth plate (35) is provided in the sliding card plate (20); the matching tooth plate (35) is meshed with the driving gear (34) on the corresponding side.

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