Measurement device and measurement method

Abstract

The invention provides a measurement device and a measurement method. The measuring device comprises: a flow channel having a main inlet and a main outlet; a pump supplying a fluid containing a radical precursor to the main inlet of the flow path; a radical generation unit that generates radicals from the radical precursor in the radical generation region of the flow path; and a measurement unit that measures a measurement value corresponding to the concentration of the radicals at at least one measurement position closer to the main outlet side than the radical generation region in the flow path. In the measurement device, the radical generation unit can generate radicals by applying at least one of voltage, heat, light, and electron beam to the fluid containing the radical precursor.

Description

Technical Field

[0001] The present invention relates to a measuring device and a measuring method. Background Art

[0002] Patent Document 1 describes “a device for observing a transient absorption spectrum or its changes by irradiating a sample excited by pulse light with probe light and detecting intensity changes of the probe light with a streak camera” (Claim 1).

[0003] Patent document 2 states that "the present invention is a device for measuring transient absorption of a substance, comprising: an excitation light source for emitting excitation light that excites a substance; a detection light source for emitting detection light as steady light toward a sample containing a substance excited by the excitation light; a spectrometer for spectrometering the detection light transmitted through the sample and outputting it as output light; and a light detection device for detecting the output light, the light detection device having an avalanche photodiode (APD)." (Paragraph 0010).

[0004] Patent document 3 states that "several embodiments of optical measurement devices include: a first irradiation unit for irradiating excitation light onto a first irradiation area on a moving path of a moving sample; a second irradiation unit for irradiating detection light onto a second irradiation area, the second irradiation area being located on the moving path more to the moving direction of the sample than the first irradiation area; a detection unit for detecting the detection light irradiated on the sample by the second irradiation unit; and a control unit for calculating the optical parameters at the plurality of time points based on the detection intensity of the detection light detected by the detection unit at different times when the sample is present at each of a plurality of different time points in a transient response of the optical parameters of the sample caused by the excitation of the excitation light, and calculating the physical properties of the sample based on the calculated optical parameters." (Paragraph 0007).

[0005] Patent Document 4 describes " Figure 1 0015) and "As shown, the gas sampling detection system 10 includes at least one plasma generator and / or free radical gas generator 12 in fluid communication with at least one process chamber 16 via at least one gas passage 14." Figure 1 As shown, at least one sampling module 32 can be in fluid communication with the radical gas generator 12 via at least one sampling conduit 30. ” (Paragraph 0019). Patent Document 1: Japanese Patent Publication No. 6-17866 Patent Document 2: Japanese Patent Application Laid-Open No. 2007-212145 Patent Document 3: Japanese Patent No. 7298746 Patent Document 4: Japanese Patent Application No. 2021-517638 Summary of the Invention

[0006] In a first embodiment of the present invention, a measuring device is provided, which includes: a flow channel having a main inlet and a main outlet; a pump that supplies a fluid containing a free radical precursor to the main inlet of the flow channel; a free radical generating unit that generates free radicals from the free radical precursor in a free radical generating area of the flow channel; and a measuring unit that measures a measurement value corresponding to the concentration of the free radicals at at least one measurement position in the flow channel that is closer to the main outlet side than the free radical generating area.

[0007] In the above-mentioned measuring device, the radical generating unit may generate the radicals by applying at least one of voltage, heat, light, and electron beam to the fluid containing the radical precursor.

[0008] In any of the above-mentioned measuring devices, the flow channel may have a first sub-inlet, and the radical generating unit may generate the radicals from the radical precursor by supplying an oxidant to the first sub-inlet.

[0009] In any of the above-mentioned measuring devices, the flow channel may have a second secondary inlet, which is connected to the flow channel between the free radical generating area and the at least one measuring position, and is used to introduce other fluids that react with the free radicals in the fluid into the flow channel.

[0010] In any of the above-mentioned measuring devices, the measuring unit may include: an inspection light irradiation unit that irradiates inspection light to the fluid at the at least one measuring position; and a detector that detects the inspection light that has passed through the fluid at the at least one measuring position in the flow channel.

[0011] In any of the above-mentioned measuring devices, the at least one measuring position may include a plurality of measuring positions, and the measuring unit may measure the measurement value for each elapsed time from the generation of the radical corresponding to each of the plurality of measuring positions.

[0012] In any of the above-mentioned measuring devices, the pump may change the flow rate of the fluid in the flow channel, and the measuring unit may measure the measurement value for each elapsed time from the generation of the radical corresponding to a plurality of different flow rates.

[0013] Any of the above-mentioned measuring devices may further include a calculation unit that calculates the lifetime of the radical using the measurement value for each elapsed time from the generation of the radical.

[0014] Any of the above-mentioned measuring devices may further include an excitation light irradiation unit configured to irradiate the fluid with excitation light between the radical generating region and the at least one measuring position in the flow channel.

[0015] In a second embodiment of the present invention, a measurement method is provided, which includes: supplying a fluid containing a free radical precursor to the main inlet of a flow channel having a main inlet and a main outlet; generating free radicals from the free radical precursor in a free radical generation region of the flow channel; and measuring a measurement value corresponding to the concentration of the free radicals at at least one measurement position in the flow channel that is closer to the main outlet side than the free radical generation region.

[0016] The above summary of the invention does not list all the features of the present invention, and subcombinations of these feature groups may also constitute inventions. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 The structure of the measuring device 10 according to this embodiment is shown. Figure 2 A cross-sectional view showing a first example of the flow channel 101 . Figure 3 The following shows the operation flow of the measurement device 10 according to this embodiment. Figure 4 A cross-sectional view showing a second example of the flow channel 101 . Figure 5 A perspective view showing a third example of the flow channel 101 . Figure 6 A cross-sectional view showing a fourth example of the flow channel 101 . Figure 7 A perspective view showing a fifth example of the flow channel 101 . Figure 8 A cross-sectional view showing a sixth example of the flow channel 101 . Figure 9 22 illustrates an example of a computer 2200 that may implement various aspects of the present invention in whole or in part. DETAILED DESCRIPTION

[0018] The present invention will be described below by way of embodiments of the invention, but the following embodiments do not limit the invention as defined in the claims. Furthermore, not all combinations of features described in the embodiments are essential to the solution provided by the invention.

[0019] Figure 1The structure of a measuring device 10 according to this embodiment is shown. The measuring device 10 generates free radicals from a free radical precursor and measures the concentration of the generated free radicals. Here, a free radical precursor is a substance that can be converted into free radicals through one or more stage reactions. The measuring device 10 includes a flow-through cell 100, a pump 120, a free radical generating unit 132, a measuring unit 140, a measurement control unit 150, a calculation unit 160, a storage unit 170, and an output unit 180.

[0020] The flow-through cell 100 is a cell through which a fluid containing free radical precursors and free radicals flows. In this embodiment, the flow-through cell 100 has a plate-like structure. The flow-through cell 100 can be formed of a light-transmitting material. The flow-through cell 100 has a flow channel 101.

[0021] Flow channel 101 is a passageway for the flow of a fluid containing free radical precursors and free radicals. Flow channel 101 can have a constant cross-sectional area. Flow channel 101 can have a polygonal or circular cross-section. Flow channel 101 can have a rectangular or square cross-section. Flow channel 101 includes a main inlet 102, a main outlet 104, a free radical generation region 106, and one or more measurement locations.

[0022] The main inlet 102 is an inlet for supplying a fluid containing free radical precursors to the flow channel 101. The main outlet 104 is an outlet for discharging the measured fluid from the flow channel 101. The main outlet 104 may be connected to a discharge flow channel. Alternatively, the main outlet 104 may be connected to the main inlet 102. That is, the fluid discharged from the main outlet 104 may be repeatedly supplied from the main inlet 102. In this case, the measuring device 10 can repeatedly measure the free radicals discharged from the main outlet 104. In addition, for convenience, in this specification, the path in the flow channel 101 that introduces a fluid containing free radical precursors, measures free radicals, and discharges the measured fluid is referred to as the "main path." For ease of explanation, the inlet and outlet related to the main path are referred to as the "main inlet 102" and the "main outlet 104." Therefore, the terms "main inlet" and "main outlet" do not limit the cross-sectional area of the flow channel, the size of the confluence / divergence angle at the confluence / divergence portion, etc., which are described below as "secondary inlets" and "secondary outlets."

[0023] The radical generating region 106 is a region in the flow channel 101 where radicals are generated from radical precursors. The radical generating region 106 exists between the main inlet 102 and the main outlet 104 in the flow channel 101 .

[0024] The measurement position is a position in the flow channel 101 where a value corresponding to the concentration of free radicals is measured. The measurement position exists in the flow channel 101 on the side closer to the main outlet 104 than the free radical generation region 106. Furthermore, in order to measure a baseline, the measurement position may exist on the side closer to the main inlet 102 than the free radical generation region 106.

[0025] The pump 120 is connected to the main inlet 102. The pump 120 supplies a fluid containing a free radical precursor to the main inlet 102 of the flow channel 101. The pump 120 can be a syringe pump or a diaphragm pump with relatively small pulsation. The pump 120 can be provided with a damper between the pump 120 and the main inlet 102 for reducing the pulsation of the pump 120.

[0026] The free radical generator 132 generates free radicals from a free radical precursor in the free radical generating region 106 of the flow channel 101. The free radical generator 132 can generate free radicals by applying at least one of voltage, heat, light, and an electron beam to a fluid containing the free radical precursor. In this embodiment, the free radical generator 132 generates free radicals by applying a voltage to the free radical generating region 106 of the flow channel 101.

[0027] Alternatively, the free radical generator 132 may generate free radicals by applying heat to the fluid containing the free radical precursor using at least one of a microheater, a heating wire, an induction heater, microwave heating, and a laser. The free radical generator 132 may also generate free radicals by supplying an oxidant to the fluid containing the free radical precursor.

[0028] When a voltage is applied to the radical generator 132, the measuring device 10 includes a current / voltage supply unit 134. The current / voltage supply unit 134 is connected to the radical generator 132. The current / voltage supply unit 134 controls the voltage applied by the radical generator 132 to the fluid containing the radical precursor by supplying at least one of a current and a voltage to the radical generator 132. The current / voltage supply unit 134 can be at least one of a potentiostat and a galvanostat.

[0029] The measurement unit 140 measures a measurement value corresponding to the concentration of free radicals at one or more measurement locations. The one or more measurement locations can be regularly or irregularly located along the direction of fluid flow in the flow channel 101. If there are multiple measurement locations, the measurement unit 140 measures a measurement value corresponding to each of the multiple measurement locations for each elapsed time period from the generation of free radicals. The measurement unit 140 can also measure a measurement value including the intensity of the inspection light. The measurement unit 140 includes an inspection light irradiation unit 142, a light beam adjustment unit 144, and one or more detectors 146.

[0030] The inspection light irradiation unit 142 includes any light source, such as a semiconductor laser. The inspection light irradiation unit 142 irradiates the fluid with inspection light at one or more measurement locations. The inspection light irradiation unit 142 irradiates inspection light having a wavelength absorbed by free radicals of the measurement target. The inspection light irradiation unit 142 can irradiate inspection light having one or more wavelengths. When the inspection light irradiation unit 142 irradiates inspection light having multiple wavelengths, the measurement device 10 can simultaneously measure multiple substances.

[0031] The beam adjuster 144 is positioned in the optical path of the inspection light. It is positioned between the measurement location and the inspection light irradiation unit 142. The beam adjuster 144 adjusts the diameter of the inspection light so that the inspection light is irradiated onto the measurement location. If the flow channel 101 has multiple measurement locations, the beam adjuster 144 can adjust the diameter of the inspection light so that all of the measurement locations are evenly irradiated.

[0032] The detector 146 is arranged on the optical path of the inspection light. The detector 146 is arranged on the opposite side of the inspection light irradiation unit 142 relative to the measurement position. In the case where there are multiple detectors 146, the multiple detectors 146 can be arranged in a row along the direction of fluid flow in the flow channel 101. The detector 146 detects the inspection light that passes through the fluid at at least one measurement position in the flow channel 101. The detector 146 measures the light intensity of the detected inspection light (intensity of inspection light). Since the inspection light contains light of a wavelength absorbed by free radicals, the inspection light intensity decreases if the concentration of free radicals in the fluid is high, and increases if the concentration of free radicals in the fluid is low.

[0033] The measurement control unit 150 is connected to the pump 120 , the current / voltage supply unit 134 , and the calculation unit 160 . The measurement control unit 150 controls the operations of the pump 120 and the current / voltage supply unit 134 .

[0034] Calculation unit 160 is connected to detector 146 and storage unit 170. Calculation unit 160 calculates the lifetime of free radicals using the measured values for each elapsed time period since the generation of free radicals. Calculation unit 160 receives the measured values at the corresponding measurement positions from detector 146. Calculation unit 160 can also receive the inspection light intensity at the corresponding measurement positions from detector 146. Calculation unit 160 receives information related to the flow rate in flow channel 101 from measurement control unit 150. Calculation unit 160 writes measurement data to storage unit 170. The measurement data includes at least one of the measurement values received from detector 146, information related to the flow rate received from measurement control unit 150, and information obtained by processing this information by measurement control unit 150.

[0035] The storage unit 170 stores the measurement data and may be an electronic storage medium, a magnetic storage medium, an optical storage medium, an electromagnetic storage medium, or a semiconductor storage medium.

[0036] The output unit 180 is connected to the calculation unit 160. The output unit 180 outputs the free radical lifetime calculated by the calculation unit 160. At least one of the measurement control unit 150, the calculation unit 160, the storage unit 170, and the output unit 180 can be a computer such as a personal computer (PC), a tablet computer, a smartphone, a workstation, a server computer, or a general-purpose computer, or a computer system composed of multiple connected computers. Such a computer system is also a computer in the broad sense. In addition, at least one of the measurement control unit 150, the calculation unit 160, the storage unit 170, and the output unit 180 can also be implemented within a computer using one or more executable virtual computer environments. Alternatively, at least one of the measurement control unit 150, the calculation unit 160, the storage unit 170, and the output unit 180 can be a dedicated computer designed for measuring free radical concentration, or dedicated hardware implemented using dedicated circuits.

[0037] Figure 2 A cross-sectional view of a first example of a flow channel 101 is shown. In this example, a radical generator 132 having a pair of first and second electrodes 200 and 202 is disposed in the radical generation region 106 of the flow channel 101. The first electrode 200 is disposed on the inner wall of the flow channel 101, and the second electrode 202 is disposed on the inner wall of the flow channel 101 opposite the first electrode 200. The pair of first and second electrodes 200 and 202 is connected to a current / voltage supply unit 134 and receives at least one of current and voltage from the current / voltage supply unit 134. The first and second electrodes 200 and 202 have different polarities, with one functioning as an anode and the other as a cathode. The radical generator 132 can generate free radicals by applying a voltage to free radical precursors, thereby accelerating the free radical precursors and causing them to collide with each other and ionize.

[0038] Figure 3 The following is a flow chart of the operation of the measurement device 10 according to this embodiment. In step S302, the measurement control unit 150 turns on the pump 120, causing the pump 120 to start operating. This causes the pump 120 to continuously supply a fluid containing a free radical precursor to the flow channel 101. The pump 120 can supply the fluid containing the free radical precursor at a predetermined ratio to the flow channel 101.

[0039] In S304, the inspection light irradiation unit 142 irradiates inspection light at one or more measurement locations in the flow channel 101. The measurement control unit 150 controls the current / voltage supply unit 134 to not supply current and voltage to the free radical generator 132. In this case, since no voltage is applied to the free radical generating region 106, the fluid at the measurement location contains no free radicals. In S306, the one or more detectors 146 detect the intensity of the inspection light passing through the fluid at one or more measurement locations. The calculation unit 160 writes the inspection light intensity detected by the one or more detectors 146 into the storage unit 170 as a baseline.

[0040] In S308, the measurement control unit 150 instructs the current / voltage supply unit 134 to supply current or voltage to the radical generator 132, thereby applying voltage to the fluid in the radical generation region 106. The radical generator 132 thereby generates radicals from radical precursors contained in the fluid.

[0041] In S310 , the inspection light irradiation unit 142 irradiates inspection light onto the flow channel 101 . The one or more detectors 146 detect the intensity of the inspection light passing through the fluid at the corresponding measurement position. The calculation unit 160 receives the inspection light intensity detected by each detector 146 from the one or more detectors 146 .

[0042] The calculation unit 160 obtains positional information of each measurement position, the inspection light intensity at each measurement position, and the flow rate of the fluid in the flow channel 101. The calculation unit 160 may store the positional information of each measurement position in advance or read the positional information of each measurement position from the storage unit 170. The positional information may be the distance from the end of the radical generation region 106 on the main outlet 104 side to the measurement position.

[0043] The calculation unit 160 receives information on the flow rate of the fluid from the measurement control unit 150. The flow rate can represent the volume of the fluid flowing per unit time.

[0044] Based on the distance from the free radical generation region 106 to each measurement location and the flow rate, the calculation unit 160 calculates the elapsed time from the free radical generation region 106 to each measurement location—that is, the elapsed time from free radical generation to measurement. For example, if the flow rate represents the volume of fluid flowing per unit time, the calculation unit 160 can calculate the elapsed time by calculating (cross-sectional area of the flow channel 101) × (distance from the free radical generation region 106 to the measurement location) / (fluid flow rate). The calculation unit 160 stores the measurement data in the storage unit 170, including the inspection light intensity, fluid flow rate, and elapsed time at one or more measurement locations.

[0045] In S312, the measurement control unit 150 determines whether all flow rates corresponding to the test light intensity have been measured. If the measurement control unit 150 determines that all flow rates have not been measured ("No" in S312), the measurement device 10 proceeds to S314. In S314, the measurement control unit 150 controls the pump 120. The pump 120 changes the flow rate of the fluid in the flow channel 101 to a value corresponding to the next flow rate to be measured.

[0046] In S310, which returns from S314, the inspection light irradiation unit 142 irradiates inspection light onto the flow channel 101 through which the fluid whose flow rate has changed flows. One or more detectors 146 detect the intensity of the inspection light passing through the fluid at corresponding measurement positions. The calculation unit 160 receives the inspection light intensity detected by each of the one or more detectors 146. The calculation unit 160 receives information about the changed flow rate of the fluid from the measurement control unit 150 and calculates the elapsed time at the one or more measurement positions. The calculation unit 160 stores the measurement data in the storage unit 170. The measurement data includes the inspection light intensity at the one or more measurement positions, the flow rate of the fluid, and the elapsed time.

[0047] If the measurement control unit 150 determines that measurement of all flow rates has been completed ("YES" in S312), the measurement device 10 proceeds to S316. In this case, the measurement unit 140 measures the measured value for each elapsed time period from the generation of free radicals, corresponding to each of a plurality of different flow rates. In S316, the calculation unit 160 calculates the optical density based on the test light intensity stored in the storage unit 170. The calculation unit 160 obtains a two-dimensional plot of the calculated optical density and elapsed time.

[0048] In S318, the calculation unit 160 calculates the lifespan of the free radical based on the two-dimensional graph obtained in S316. The calculation unit 160 can calculate the time constant as the lifespan of the free radical by fitting the most suitable function representing the two-dimensional graph to the two-dimensional graph obtained in S316. The most suitable function can be an exponential function. In the case of fitting an exponential function to the two-dimensional graph, the time constant can be calculated based on the exponential function obtained. For example, in the case of obtaining an exponential function represented by x=x0exp(-t / τ) (x0 is an arbitrary constant) relative to time t by fitting, the time constant of the free radical is τ. Instead of this, the calculation unit 160 can also calculate the half-life of the free radical as the lifespan of the free radical. In S320, the output unit 180 outputs the lifespan of the free radical calculated by the calculation unit 160.

[0049] According to the measuring device 10 shown above, since the lifespan of free radicals is calculated based on the inspection light intensity at different elapsed times, it is possible to measure the lifespan of free radicals with long lifespans in a short period of time. In addition, since the system structure of the measuring device 10 shown above is simple, experiments with high reproducibility can be performed. Moreover, according to the measuring device 10 shown above, since the flow rate of the fluid can be varied, even in the case of only one measuring position and one corresponding detector 146, it is possible to measure free radicals with different elapsed times by varying the flow rate. In this case, since the measuring device 10 only has one detector 146, it has an inexpensive structure.

[0050] Figure 4 A cross-sectional view of a second example of the flow channel 101 is shown. In this example, multiple sets of first electrodes 200 and second electrodes 202 are arranged in the free radical generating region 106 of the flow channel 101 along the direction of fluid flow in the flow channel 101. Each set of first electrodes 200 and second electrodes 202 can be Figure 2 The first electrode 200 and the second electrode 202 have the same configuration and structure. The first electrode 200 and the second electrode 202 are each connected to the current / voltage supply unit 134, and each pair receives at least one of current and voltage from the current / voltage supply unit 134. The measurement device 10 including the flow channel 101 of this figure can control the amount of free radical generation by changing the number of pairs of the first electrode 200 and the second electrode 202 to which the current / voltage supply unit 134 supplies at least one of current and voltage.

[0051] Figure 5 A stereoscopic diagram showing a third example of the flow channel 101. In the example of this figure, the measuring device 10 further includes an excitation light irradiation unit 500, and includes one or more detectors 510 instead of one or more detectors 146. The excitation light irradiation unit 500 irradiates excitation light onto the fluid between the free radical generating region 106 in the flow channel 101, in which the first electrode 200 and the second electrode 202 are arranged, and one or more measuring positions. The excitation light irradiation unit 500 can irradiate ultraviolet light as the excitation light. The substance irradiated with the excitation light (measurement substance) becomes excited and emits light in the process of returning to the ground state. The measurement substance can be a free radical contained in the fluid, or a substance other than the free radical that interacts with the free radical contained in the fluid.

[0052] The detector 510 is connected to the calculation unit 160. The detector 510 detects luminescence from the measured substance. The detector 510 can be set at a location other than the optical path of the excitation light so as not to detect the excitation light. Instead, the detector 510 can set a filter capable of separating the excitation light and the luminescence between the detector 510 and the measurement position in the flow channel 101 so as not to detect the excitation light. In this case, the detector 510 can be set on the optical path of the excitation light. In the case where there are multiple detectors 510, the multiple detectors 510 can be arranged in a row along the direction of fluid flow in the flow channel 101. In the example of this figure, the detector 510 detects luminescence perpendicular to the optical path of the excitation light.

[0053] The calculation unit 160 receives the luminous intensity detected by each detector 510 from one or more detectors 510. The calculation unit 160 receives the position information of each measurement position from the storage unit 170. The position information of each measurement position can be the distance from the position in the flow channel 101 where the excitation light is irradiated by the excitation light irradiation unit 500 to each measurement position. The calculation unit 160 calculates the elapsed time based on the position information of each measurement position and the information related to the flow rate of the fluid. The calculation unit 160 can calculate the elapsed time by Figure 3 The measurement control unit 150 can calculate the elapsed time in the same manner as in S310. Figure 3 The calculation unit 160 obtains a two-dimensional graph of luminescence intensity and elapsed time. The calculation unit 160 calculates the lifetime of the excited state of the measured substance based on the two-dimensional graph of luminescence intensity and elapsed time. The calculation unit 160 can calculate the lifetime of the excited state of the measured substance by Figure 3 The lifetime of the excited state of the measurement substance is calculated in the same manner as in S318. According to the measurement device 10 including the flow channel 101 described above, the lifetime of the excited state of the measurement substance can be measured based on changes in luminescence from the measurement substance.

[0054] Figure 6 This is a cross-sectional view showing a fourth example of the flow channel 101. In this example, the flow channel 101 has a bent shape. In addition, the measuring device 10 includes a micro heater 600 instead of Figure 1 The microheater 600 is connected to and controlled by the measurement control unit 150. The microheater 600 generates free radicals by applying heat to the fluid containing free radical precursors in the free radical generation region 106 of the flow channel 101. By setting the angle θ between the inflow and outflow directions of the fluid at the bend in the flow channel 101 close to 180°, pressure loss caused by the fluid colliding with the wall of the flow channel 101 can be reduced.

[0055] Figure 7A perspective view of a fifth example of a flow channel 101 is shown. In this example, the flow channel 101 is formed into a Y shape and has a main inlet 102 and a first secondary inlet 700. The free radical generator 132 generates free radicals from a free radical precursor by supplying an oxidant to the first secondary inlet 700. The free radical generator 132 can supply the oxidant to the first secondary inlet 700, causing the oxidant to merge with the fluid containing the free radical precursor supplied from the main inlet 102 in the free radical generation region 106, thereby oxidizing the free radical precursor. The free radical generator 132 can supply hydrogen peroxide or brominated hydroperoxide as the oxidant.

[0056] Figure 8 This figure shows a cross-sectional view of a sixth example of flow channel 101. In this example, flow channel 101 has a second secondary inlet 800 between free radical generating region 106 and one or more measurement locations. Second secondary inlet 800 can introduce another fluid that reacts with free radicals in the fluid into flow channel 101. Second secondary inlet 800 can introduce a fluid containing a substance that reacts with free radicals in the fluid as the other fluid that reacts with free radicals in the fluid into flow channel 101.

[0057] The measuring device 10 having the flow channel 101 of this figure is Figure 3 Using the method shown in S310-316, a two-dimensional plot of optical density and elapsed time is obtained. Here, the positional information for each measurement location can be the distance from the connection point between the flow channel 101 and the second secondary inlet 800 to each measurement location. The measurement device 10 equipped with the flow channel 101 described above allows for the reaction of free radicals generated in the free radical generation region 106 with other fluid introduced from the second secondary inlet 800, and measures the concentration of free radicals at each elapsed time from the start of the reaction. This allows for analysis of reactions involving free radicals.

[0058] Various embodiments of the present invention may be described with reference to flowcharts and block diagrams, where a module may represent (1) a stage of a process for performing an operation or (2) a portion of a device having the function of performing an operation. Specific stages and portions may be implemented by dedicated circuits, programmable circuits provided together with computer-readable instructions stored on a computer-readable medium, and / or processors provided together with computer-readable instructions stored on a computer-readable medium. Dedicated circuits may include digital and / or analog hardware circuits, and may also include integrated circuits (ICs) and / or discrete circuits. Programmable circuits may include reconfigurable hardware circuits that include logical AND, logical OR, logical XOR, logical NAND, logical NOR, and other logical operations, flip-flops, registers, field programmable gate arrays (FPGAs), programmable logic arrays (PLAs), and other memory elements.

[0059] Computer-readable media may include any tangible device capable of storing instructions for execution by an appropriate device. Consequently, a computer-readable medium having instructions stored therein includes an article containing instructions that can be executed in order to produce a means for performing the operations specified by the flowchart or block diagram. Examples of computer-readable media may include electronic storage media, magnetic storage media, optical storage media, electromagnetic storage media, semiconductor storage media, and the like. More specific examples of computer-readable media may include floppy (registered trademark) disks, magnetic disks, hard disks, random access memory (RAM), read-only memory (ROM), erasable programmable read-only memory (EPROM or flash memory), electrically erasable programmable read-only memory (EEPROM), static random access memory (SRAM), compact disc read-only memory (CD-ROM), digital versatile disc (DVD), Blu-ray (registered trademark) discs, memory sticks, integrated circuit cards, and the like.

[0060] Computer-readable instructions may include any of source code and object code described by any combination of one or more programming languages including assembly instructions, instruction set architecture (ISA) instructions, machine instructions, machine-dependent instructions, microcode, firmware instructions, state setting data, or object-oriented programming languages such as Smalltalk (registered trademark), JAVA (registered trademark), C++, and existing procedural programming languages such as the "C" programming language or similar programming languages.

[0061] The computer-readable instructions may be provided to a processor or programmable circuit of a programmable data processing device such as a general-purpose computer, a special-purpose computer, or other computer via a local area network (LAN) or a wide area network (WAN) such as the Internet, and the computer-readable instructions may be executed to create a means for performing the operations specified by the flowchart or block diagram. Examples of processors include computer processors, processing units, microprocessors, digital signal processors, controllers, microcontrollers, and the like.

[0062] Figure 9 This figure illustrates an example of a computer 2200 capable of implementing various aspects of the present invention in whole or in part. Programs installed on computer 2200 enable computer 2200 to perform operations associated with devices according to embodiments of the present invention or functions of one or more components of such devices, or to execute such operations or such one or more components, and / or enable computer 2200 to perform processes according to embodiments of the present invention or stages of such processes. Such programs can be executed by CPU 2212 to cause computer 2200 to perform specific operations associated with some or all of the modules in the flowcharts and block diagrams described in this specification.

[0063] The computer 2200 of this embodiment includes a CPU 2212, a RAM 2214, a graphics controller 2216, and a display device 2218, which are interconnected via a main controller 2210. The computer 2200 also includes input / output units such as a communication interface 2222, a hard disk drive 2224, a DVD-ROM drive 2226, and an IC card drive, which are connected to the main controller 2210 via an input / output controller 2220. The computer also includes conventional input / output units such as a ROM 2230 and a keyboard 2242, which are connected to the input / output controller 2220 via an input / output chip 2240.

[0064] The CPU 2212 controls each unit by operating according to programs stored in the ROM 2230 and the RAM 2214. The graphics controller 2216 acquires image data generated by the CPU 2212 from a frame buffer or the like provided in the RAM 2214 or from the graphics controller itself, and displays the image data on the display device 2218.

[0065] The communication interface 2222 enables communication with other electronic devices via a network. The hard disk drive 2224 stores programs and data used by the CPU 2212 in the computer 2200. The DVD-ROM drive 2226 reads programs or data from the DVD-ROM 2201 and provides the programs or data to the hard disk drive 2224 via the RAM 2214. The IC card drive reads programs and data from an IC card and / or writes programs and data to an IC card.

[0066] The ROM 2230 stores therein a boot program or the like executed by the computer 2200 upon activation and / or programs that depend on the hardware of the computer 2200. The input / output chip 2240 can also connect various input / output units to the input / output controller 2220 via a parallel port, a serial port, a keyboard port, a mouse port, and the like.

[0067] The program is provided on a computer-readable medium such as a DVD-ROM 2201 or an IC card. The program is read from the computer-readable medium, installed in the hard disk drive 2224, RAM 2214, or ROM 2230, also examples of computer-readable media, and executed by the CPU 2212. The information processing described in these programs is read into the computer 2200, thereby enabling the program to cooperate with the various types of hardware resources described above. An apparatus or method can be constructed by implementing information manipulation or processing with the use of the computer 2200.

[0068] For example, when the computer 2200 communicates with an external device, the CPU 2212 executes a communication program loaded in the RAM 2214 and instructs the communication interface 2222 to perform communication processing based on the processing described in the communication program. Under the control of the CPU 2212, the communication interface 2222 reads transmission data stored in a transmission buffer area provided in the RAM 2214, the hard disk drive 2224, the DVD-ROM 2201, or a recording medium such as an IC card, and transmits the read transmission data to the network, or writes reception data received from the network to the reception buffer area provided on the recording medium.

[0069] Furthermore, the CPU 2212 can read all or a necessary portion of a file or database stored in an external recording medium such as the hard disk drive 2224, the DVD-ROM drive 2226 (DVD-ROM 2201), or an IC card into the RAM 2214, and perform various types of processing on the data in the RAM 2214. The CPU 2212 then writes the processed data back to the external recording medium.

[0070] Various types of information such as various types of programs, data, tables, and databases can be stored in a recording medium and subjected to information processing. The CPU 2212 performs various types of processing described in various places of this disclosure on the data read from the RAM 2214 and writes the results back to the RAM 2214. The various types of processing include various types of operations specified by the instruction sequence of the program, information processing, conditional judgment, conditional branching, unconditional branching, information retrieval / replacement, etc. In addition, the CPU 2212 can retrieve information in files, databases, etc. in the recording medium. For example, in the case where a plurality of entries each having an attribute value of a first attribute associated with an attribute value of a second attribute are stored in the recording medium, the CPU 2212 can retrieve an entry that is consistent with the condition specifying the attribute value of the first attribute from the plurality of entries, and read the attribute value of the second attribute stored in the entry, thereby obtaining the attribute value of the second attribute associated with the first attribute that meets the predetermined condition.

[0071] The programs or software modules described above can be stored in a computer-readable medium on or near the computer 2200. In addition, a recording medium such as a hard disk or RAM provided in a server system connected to a dedicated communication network or the Internet can be used as the computer-readable medium, thereby providing the program to the computer 2200 via the network.

[0072] While the present invention has been described above using embodiments, the technical scope of the present invention is not limited to the scope described in the above embodiments. It is apparent to those skilled in the art that various modifications or improvements can be made to the above embodiments. As can be seen from the claims, embodiments with such modifications or improvements are also included in the technical scope of the present invention.

[0073] The order of execution of actions, processes, steps, and stages, etc., in the apparatus, system, program, and method described in the claims, specifications, and drawings is not specifically indicated as "before," "before," or the like. Furthermore, it should be noted that the actions, processes, steps, and stages may be executed in any order as long as the output of the previous process is not used in the subsequent process. Even if the action flow in the claims, specifications, and drawings is described using the phrases "first," "next," or the like for ease of explanation, it does not necessarily mean that the actions must be executed in that order. Description of Reference Numerals

[0074] 10. Measurement device 100 Flow-through Cell 101 Runner 102 Main entrance 104 Main Exit 106 Free Radical Generation Area 120 pumps 132 Free Radical Generation Unit 134 current / voltage supply unit 140 Measurement Department 142 Check the light irradiation part 144 Beam Adjustment Unit 146 Detector 150 Measurement control unit 160 Computing Department 170 Storage Department 180 Output 200 first electrode 202 second electrode 500 Excitation light irradiation unit 510 detector 600 Micro Heater 700 First secondary entrance 800 Second secondary entrance 2200 Computer 2201DVD-ROM 2210 main controller 2212CPU 2214RAM 2216 Graphics Controller 2218 Display Device 2220 Input / Output Controller 2222 Communication Interface 2224 Hard Drive 2226 DVD-ROM drive 2230ROM 2240 input / output chip 2242 keyboard.

Claims

1. A measuring device, characterized in that: include: a flow channel having a main inlet and a main outlet; a pump for supplying a fluid containing a radical precursor to the main inlet of the flow channel; a radical generating unit that generates radicals from the radical precursor in a radical generating region of the flow channel; as well as The measuring unit measures a measurement value corresponding to the concentration of the radicals at at least one measurement position in the flow channel that is closer to the main outlet than the radical generating region.

2. The measuring device according to claim 1, wherein The radical generating unit generates the radicals by applying at least one of voltage, heat, light, and electron beams to the fluid containing the radical precursor.

3. The measuring device according to claim 1, wherein The flow channel has a first secondary inlet, The radical generating unit generates the radicals from the radical precursor by supplying an oxidant to the first sub-inlet.

4. The measuring device according to claim 1, wherein The flow channel has a second secondary inlet connected to the flow channel between the free radical generating region and the at least one measurement position, and is used to introduce other fluid that reacts with the free radicals in the fluid into the flow channel.

5. The measuring device according to claim 1, wherein The measuring unit includes: an inspection light irradiation unit configured to irradiate inspection light toward the fluid at the at least one measurement position; and A detector detects the inspection light transmitted through the fluid at the at least one measurement position in the flow channel.

6. The measuring device according to claim 1, wherein The at least one measurement location comprises a plurality of measurement locations, The measuring unit measures the measurement value corresponding to each of the plurality of measurement positions for each elapsed time from the generation of the radical.

7. The measuring device according to claim 1, wherein The pump changes the flow rate of the fluid in the flow channel, The measuring unit measures the measurement value corresponding to each of a plurality of flow rates different from each other for each elapsed time from the generation of the radical.

8. The measuring device according to claim 6 or 7, characterized in that The system further includes a calculation unit that calculates the lifetime of the radical using the measured value for each elapsed time from the generation of the radical.

9. The measuring device according to claim 1, wherein The system further includes an excitation light irradiation unit configured to irradiate excitation light onto the fluid between the radical generation region and the at least one measurement position in the flow channel.

10. A determination method, characterized in that: include: supplying a fluid comprising a free radical precursor to a main inlet of a flow channel having a main inlet and a main outlet; generating free radicals from the free radical precursor in a free radical generating region of the flow channel; as well as A measurement value corresponding to the concentration of the radicals is measured at at least one measurement position in the flow channel that is closer to the main outlet than the radical generation region.

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