Support table apparatus and method of supporting substrate using same

Abstract

The present disclosure provides a support table apparatus in which each of a plurality of support bars can be individually moved by a movable pickup, and a method of supporting a substrate using the same. The support table apparatus includes: a plurality of pin support bars having a plurality of support pins, extending in a first direction, and arranged in a second direction intersecting the first direction; a movable pickup selectively coupled to and separated from each of the plurality of pin support bars, and coupled to a selected one or more of the plurality of pin support bars to be movable in a second direction together with the coupled one or more pin support bars; and a picker driver configured to move the movable picker in the second direction. The movable picker is configured to move the one or more pin support bars in a second direction according to driving of the picker driver to adjust a gap between the plurality of pin support bars in the second direction.

Description

Technical Field

[0001] The present disclosure relates to a support stage apparatus and a method of supporting a substrate using the same, and more particularly, to a support stage apparatus in which each of a plurality of support rods can be individually moved by a movable picker, and a method of supporting a substrate using the same. Background Art

[0002] Generally, the term “substrate” refers to a flat panel display (FPD) such as a plasma display panel (PDP), a liquid crystal display (LCD), and an organic light emitting diode (OLED), a semiconductor wafer, and glass used for a photomask.

[0003] Here, the substrate of a flat panel display (FPD) and the substrate of a semiconductor wafer differ in terms of materials and uses, but the series of processing processes performed on the substrate (for example, exposure, development, etching, stripping, rinsing, cleaning, etc.) are essentially very similar to each other, and the substrate is manufactured by performing the processes in sequence.

[0004] In order to sequentially perform the processes or each of the processes, a substrate transfer device is set between the production lines connecting each process to receive the substrate from the previous process and transfer the substrate to the next process, and each transfer device is provided with a supporting table for supporting the substrate to perform the corresponding process.

[0005] The support table according to the related art can be provided in a fixed form, wherein the plurality of support pins supporting the substrate do not move. However, recently, as displays have become larger (and / or smaller), substrates have various sizes, and therefore, there is a limitation that the support table must be manufactured separately according to the size of the substrate.

[0006] That is, in the related art, the support table has been separated and replaced according to the size of the substrate to be processed in order to perform the processing process on the substrate, and in addition, since each support table must be manufactured according to the size of the substrate, the manufacturing cost of the support table is high, and as the substrate becomes larger, the weight of the support table increases, making it difficult to replace and store the support table.

[0007] [Prior art literature]

[0008] [Patent Document]

[0009] Korean Patent Publication No. 10-2012-0100016 Summary of the Invention

[0010] The present disclosure provides a support stage apparatus that adjusts a gap between a plurality of pin support bars by individually moving each of the pin support bars through a movable picker, and a method of supporting a substrate using the same.

[0011] In an embodiment, a support table device includes: a plurality of pin support rods having a plurality of support pins, extending in a first direction and arranged in a second direction intersecting the first direction; a movable picker, selectively coupled to and separated from each of the plurality of pin support rods, and coupled to one or more pin support rods selected from the plurality of pin support rods so as to be movable in a second direction together with the coupled one or more pin support rods; and a picker driver configured to move the movable picker in the second direction, wherein the movable picker is configured to move the one or more pin support rods in the second direction according to the drive of the picker driver to adjust the gap between the plurality of pin support rods in the second direction.

[0012] The support table apparatus may further include a first rail portion extending in the second direction, the movable picker being movably coupled to the first rail portion, wherein the movable picker is movable along the first rail portion in the second direction by the picker driver.

[0013] The support table apparatus may further include a second rail portion extending in the second direction, each of the plurality of pin support bars being independently movably connected to the second rail portion.

[0014] The support table apparatus may further include a plurality of fixing members respectively provided on the plurality of pin support bars to fix a position of each of the plurality of pin support bars.

[0015] The support table device may further include: a scale arranged along the extension direction of the second rail portion; and a plurality of linear encoders respectively arranged on the plurality of pin support rods and configured to read the scale to confirm the position of each of the plurality of pin support rods.

[0016] The plurality of linear encoders may include absolute encoders.

[0017] The support table device may also include a lifting portion, which is configured to lift and lower at least one of the one or more pin support rods or the movable picker in a vertical direction, wherein the lifting portion may be configured to enable the movable picker or the one or more pin support rods to rise or fall so that the one or more pin support rods and the movable picker are coupled to each other.

[0018] The lifting portion may be configured to enable the one or more pin supporting rods to descend when the one or more pin supporting rods are moved, and the movable picker may be coupled to the descending one or more pin supporting rods to move the one or more pin supporting rods.

[0019] The plurality of support pins may be aligned in a first direction, and each of the plurality of pin support bars may include a gap adjusting portion configured to adjust a gap between the plurality of support pins in the first direction.

[0020] The plurality of supporting pins may be configured to support a substrate on which a patterned thin film is formed, and support portions between cells of the thin film by adjusting gaps between the plurality of pin supporting bars in a second direction.

[0021] In another embodiment, a method for supporting a substrate is provided, wherein the substrate is supported on a support table device, the support table device including a plurality of pin support rods, the plurality of pin support rods extending in a first direction, arranged in a second direction intersecting the first direction, and having a plurality of support pins, the method comprising: adjusting the gap between the plurality of pin support rods in the second direction according to a pattern of a thin film formed on the substrate; and supporting the substrate on the plurality of support pins, wherein adjusting the gap between the plurality of pin support rods in the second direction comprises moving the one or more pin support rods in the second direction by selecting one or more pin support rods from the plurality of pin support rods.

[0022] Moving the one or more pin support bars in the second direction may include: enabling the selected one or more pin support bars to descend; coupling a movable picker to the descended one or more pin support bars; and enabling the movable picker to move in the second direction.

[0023] The adjusting the gap between the plurality of pin support bars in the second direction may further include: separating a movable picker from the one or more pin support bars; and enabling the one or more pin support bars to rise and return to a supporting position.

[0024] The adjusting the gap between the plurality of pin support bars in the second direction may further include fixing a position of each of the plurality of pin support bars. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The exemplary embodiments may be understood in more detail by reading the following description in conjunction with the accompanying drawings, in which:

[0026] Figure 1 is a perspective view of a support table apparatus according to an embodiment.

[0027] Figure 2 is a plan view of a support table apparatus according to an embodiment.

[0028] Figure 3 is a side sectional view of a support table apparatus according to an embodiment.

[0029] Figure 4 is a flowchart illustrating a method for supporting a substrate according to another embodiment.

[0030] Explanation of Figure Numbers

[0031] 10: substrate

[0032] 11: First Direction

[0033] 12: Second direction

[0034] 13: Vertical direction

[0035] 50: Base plate

[0036] 100: Support table equipment

[0037] 110: Pin support rod

[0038] 111: Support pin

[0039] 115: Coupling protrusion

[0040] 120: Movable pickup

[0041] 130: Pickup drive

[0042] 141: First Track Department

[0043] 142: Second track section

[0044] 145: Fixed frame

[0045] 150: Fixed components

[0046] 161: Ruler

[0047] 162: Linear encoder

[0048] 170: Lifting Department DETAILED DESCRIPTION

[0049] Specific embodiments will be described in more detail below with reference to the accompanying drawings. However, the present invention may be implemented in various forms and should not be construed as limited to the embodiments described herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete and will fully convey the scope of the invention to those skilled in the art. In the description, identical elements are represented by the same reference numerals. In the figures, the dimensions of layers and regions are exaggerated for clarity. Identical reference numerals refer to identical elements throughout.

[0050] Figure 1 is a perspective view of a support table apparatus according to an embodiment, and Figure 2 is a plan view of a support table apparatus according to an embodiment.

[0051] Reference Figure 1 and Figure 2 According to an embodiment, the support table device 100 may include: a plurality of pin support rods 110, having a plurality of support pins 111, extending in a first direction 11, and arranged in a second direction 12 intersecting the first direction 11; a movable picker 120, capable of selectively coupling to and separating from each of the plurality of pin support rods 110, and coupled to one or more pin support rods 110 selected from the plurality of pin support rods 110 to move in the second direction 12 together with the one or more pin support rods 110 to which it is coupled; and a picker driver 130, moving the movable picker 120 in the second direction 12.

[0052] The plurality of pin support rods 110 may have the plurality of support pins 111 for supporting a support object, extending in a first direction 11 and arranged parallel to the first direction 11 in a second direction 12 intersecting the first direction 11. The plurality of support pins 111 may support a support object, protrude in a third direction (e.g., a vertical direction) intersecting the first direction 11 and the second direction 12 (both), and contact the support object to support the support object. Here, the support object may be configured as a (flat) plate type and may include a substrate 10, and the substrate 10 may include glass for a display, a semiconductor wafer such as silicon (Si), an organic substrate, a printed circuit board (PCB), etc. For example, the support table device 100 according to the embodiment may be a support member (device) for a substrate.

[0053] The movable picker 120 can be selectively coupled to and detached from each of the plurality of pin support bars 110, coupled to and detached from any of the plurality of pin support bars 110 (i.e., any of the pin support bars 110), and coupled to more than one of the pin support bars (i.e., one or more) at a time (or simultaneously). That is, the movable picker 120 can be coupled by selecting one or more pin support bars 110 from the plurality of pin support bars 110, and coupled to the one or more pin support bars 110 selected from the plurality of pin support bars 110 to move in the second direction 12 together with the one or more pin support bars 110 to which it is coupled, and further, after moving (to a desired position), the movable picker 120 can be detached from the one or more pin support bars 110 to individually (or selectively) move the position of each of the plurality of pin support bars 110 (in the second direction). Here, the movable picker 120 may select (pick up) the one or more pin support bars 110 to be moved among the plurality of pin support bars 110 to move the position in the second direction 12, and may also move the position of the one or more pin support bars 110 by picking up the one or more pin support bars 110 to move the one or more pin support bars 110 in the second direction 12 through the picker driver 130. For example, a coupling protrusion 115 may be provided on each of the plurality of pin support bars 110, and the movable picker 120 may be coupled to the coupling protrusion 115 of the one or more pin support bars 110 and may include a clamper or the like to clamp and move the coupling protrusion 115 of the one or more pin support bars 110.

[0054] The pickup driver 130 can move the movable pickup 120 in the second direction 12, for example, to a position corresponding to the one or more pin support rods 110 (or a position where the movable pickup 120 can be coupled to the one or more pin support rods), and the movable pickup 120 can move in a state coupled to the one or more pin support rods 110 to move the positions of the one or more pin support rods 110 while moving the movable pickup 120 in the second direction 12. For example, the pickup driver 130 may include a servo motor, and the movable pickup 120 may also be moved linearly in the second direction 12 by the servo motor, and may reciprocate in one direction and another direction relative to the second direction 12, but is not particularly limited thereto.

[0055] Here, the movable picker 120 can move the one or more pin support rods 110 in the second direction 12 according to the drive of the picker driver 130 to adjust the gap between the plurality of pin support rods 110 in the second direction 12. In addition, the movable picker 120 can be moved to a position corresponding to the one or more pin support rods 110 by the picker driver 130 and coupled to the one or more pin support rods 110 (or clamp the one or more pin support rods) to move in the second direction 12. When the one or more pin support rods 110 are moved to an appropriate position by the movable picker 120, the gap between the plurality of pin support rods 110 in the second direction can be adjusted. Here, the gap between the plurality of pin support rods 110 in the second direction can be adjusted to correspond to the size and shape of the supported object, so as to effectively and appropriately support the supported object.

[0056] Therefore, the support table apparatus 100 according to the embodiment can enable each of the plurality of pin support bars 110 to be selectively coupled to (only) the pin support bar to be moved among the plurality of pin support bars 110 through the movable picker 120 to individually move each of the plurality of pin support bars 110. Therefore, the picker driver 130 can be mounted only on the picker driver to be moved, rather than having to mount a driver such as a servo motor to each of the plurality of pin support bars 110, thereby minimizing the driver and simplifying the structure of the support table apparatus 100 with an optimal design. In addition, when supporting the substrate 10, the gaps between the plurality of pin support bars 110 can be adjusted to correspondingly support support objects of various sizes and also to support increasingly larger substrates 10 of various sizes, thereby preventing the substrate 10 from sagging or deflecting due to its own weight even when the substrate 10 becomes larger, and improving flatness.

[0057] The support table apparatus 100 according to the embodiment may further include a first rail portion 141 extending in the second direction 12 , and the movable picker 120 is movably coupled to the first rail portion 141 .

[0058] The first rail portion 141 may extend in the second direction 12 and may be movably coupled (or connected) to the movable pickup 120, providing a movement path (or travel path) for the movable pickup 120 and enabling the movable pickup 120 to move (or be driven) along a predetermined path without deviating from the path. For example, the first rail portion 141 may allow the movable pickup 120 to move (only) in a straight line in the second direction 12, and therefore, each of the plurality of pin support rods 110 may move in a straight line only in the second direction 12, and even after each of the plurality of pin support rods 110 is moved by the movable pickup 120, the plurality of pin support rods 110 may be (always) aligned in a straight line. Here, the plurality of pin support rods 110 may have their respective centers aligned in a straight line, or at least one side (e.g., one side) of each of the plurality of pin support rods 110 may be aligned in a straight line, but is not particularly limited thereto.

[0059] Here, the movable picker 120 can be moved in the second direction 12 along the first rail portion 141 by the picker driver 130, and can be movably connected (or coupled) to the first rail portion 141 to move in a straight line along the first rail portion 141 by the drive of the picker driver 130, and can also pick up the one or more pin support rods 110 to move in a straight line (move in position) along the second direction 12 (or in a direction parallel to the extension direction of the first rail portion). Therefore, the one or more pin support rods 110 only move in a straight line, and therefore, even if the one or more pin support rods 110 move (move in position), the alignment between the plurality of pin support rods 110 in the second direction 12 can be maintained.

[0060] In addition, the support table apparatus 100 according to the embodiment may further include a second rail portion 142 extending in the second direction 12 , and each of the plurality of pin support bars 110 is independently and movably connected to the second rail portion 142 .

[0061] Each of the plurality of pin support rods 110 can be independently and movably coupled to the second rail portion 142, and the second rail portion 142 can provide a movement path for each of the plurality of pin support rods 110, so that each of the plurality of pin support rods 110 does not twist (or deform) or deviate from the path, but maintains alignment between the plurality of pin support rods 110 in the second direction 12 (or parallelism between the plurality of pin support rods) to move along a specific path. Here, the second rail portion 142 can also extend in the second direction 12, be spaced apart from the first rail portion 141 in the first direction 11, and be arranged parallel to the first rail portion 141 (in the second direction). Here, since the multiple pin support rods 110 extend in the first direction 11 and have a long rod shape, the second rail portion 142 can be set to a plurality of second rail portions 142 that are spaced apart (spaced apart from each other) in the first direction 11 and parallel to each other (in the second direction) so that each of the multiple pin support rods 110 moves while stably maintaining the alignment between the multiple pin support rods 110 in the second direction 12.

[0062] For example, two second rail portions 142 may be provided so as to be arranged in parallel in the second direction 12, and furthermore, one side of each of the plurality of pin support bars 110 may be connected to the second rail portion 142 provided on one side in the first direction 11, and the other side of each of the plurality of pin support bars 110 may be connected to the second rail portion 142 provided on the other side in the first direction 11. Here, each of the plurality of pin support bars 110 may be connected to the second rail portion 142 and picked up by the movable picker 120 to move in a straight line along the second rail portion 142, move in the second direction 12 while stably maintaining alignment between the plurality of pin support bars 110 in the second direction 12, and adjust the gap between the plurality of pin support bars 110 in the second direction 12 to correspond to the size (or shape) of the supported object, thereby supporting the supported object on the plurality of support pins 111. Here, each of the multiple pin support rods 110 can be connected to the second rail portion 142 via a moving body, etc. so as to be able to move along the second rail portion 142, and as the moving body moves along the second rail portion 142, each of the multiple pin support rods 110 can move together along the second rail portion 142.

[0063] A divider, cutting line, groove, etc. may be provided in the middle (or between) of the second rail portion 142 to limit the moving section (or range) of each of the pin support bars 110 to isolate and / or divide the second rail portion 142 into multiple parts (or several parts).

[0064] In addition, the first rail portion 141 and the second rail portion 142 can be set on the base plate 50 and set to be non-tilted (flattened) at a specific height (or the same height) so that the multiple pin support rods 110 move in the second direction 12 without tilting and support the supported object stably in a flat manner.

[0065] Figure 3 is a sectional side view of a support table apparatus according to an embodiment, wherein Figure 3 (a) shows the fixed position of the pin support rod, and Figure 3 (b) shows preparation for moving the pin support rod.

[0066] Reference Figure 3 The support table apparatus 100 according to the embodiment may further include a plurality of fixing members 150 respectively provided on the plurality of pin support bars 110 to fix the plurality of pin support bars 110 at appropriate positions on the second rail portion 142 .

[0067] The plurality of fixing members 150 may be respectively provided on each of the plurality of pin support rods 110, and each of the plurality of pin support rods 110 may be fixed at an appropriate position on the second rail portion 142. When supporting an object, the second direction 12 may fix the position of each of the plurality of pin support rods 110 while adjusting the gap between the plurality of pin support rods 110 in the second direction 12 to correspond to the size of the supported object, thereby stably supporting the supported object without shaking. Here, each of the plurality of fixing members 150 may directly fix each of the plurality of pin support rods 110 on the second rail portion 142, and be coupled (or fastened) to another structure (e.g., a fixing frame) different from the second rail portion 142 to fix each of the plurality of pin support rods 110, thereby indirectly fixing the position of each of the plurality of pin support rods 110 on the second rail portion 142.

[0068] For example, each of the plurality of fixing members 150 may correspond to the center of each of the plurality of pin support bars 110 to be coupled (or fastened) to and separated from the fixing frame 145 provided in parallel with the second rail portion 142, and furthermore, the fixing frame 145 may extend in the second direction 12 and be provided on the bottom plate 50, and the second rail portion 142 may be provided at each of both sides of the fixing frame 145 in the first direction 11. Here, as Figure 3 As shown in (a) of FIG. 1 , each of the plurality of fixing members 150 may be coupled and fixed while being bent toward the fixing frame 145 at both sides in the first direction 11, and when each of the pin support bars 110 moves, as shown in FIG. Figure 3As shown in (b) of FIG. 1 , each of the plurality of fixing members 150 may be separated while being extended to both sides in the first direction 11 .

[0069] When electric power is applied electromagnetically, the plurality of fixing members 150 can generate a magnetic force to fix the plurality of pin support rods 110 (in an appropriate position) by magnetic force, and for example, the plurality of pin support rods 110 can be fixed to a fixing frame 145 made of a magnetic material such as metal by magnetic force.

[0070] The support table device 100 according to the embodiment may further include: a scale 161, which is arranged along the extension direction of the second rail portion 142; and a plurality of linear encoders 162, which are respectively arranged to the plurality of pin support rods 110 and are configured to read the scale 161 to confirm the position of each of the plurality of pin support rods 110.

[0071] The scale 161 may be provided to extend in the second direction 12 along the extension direction of the second rail portion 142, and may encode position information (e.g., position value) such as a calibration or barcode to provide position information corresponding to each position of the second rail portion 142. For example, the scale 161 may be provided (or placed) on the side surface of the second rail portion 142 and / or the first rail portion 141, or may be provided parallel to the second rail portion 142 and spaced apart from the second rail portion 142, but is not particularly limited thereto, and it is sufficient if the scale 161 provides position information corresponding to each position of the second rail portion 142.

[0072] The plurality of linear encoders 162 can measure linear movement (e.g., position or speed) and are disposed (or mounted) on each of the plurality of pin support rods 110 to read the scale 161 to read the position (value), thereby understanding or confirming the position of each of the plurality of pin support rods 110. Therefore, each of the plurality of pin support rods 110 can be placed (or positioned) at an accurate position to correspond to the size, shape, etc. of the supported object, and the gaps between the plurality of pin support rods 110 in the second direction 12 can be precisely adjusted (or controlled). For example, each linear encoder 162 can read the scale on (or engraved on) the scale 161 using a sensor or similar component to detect (or identify) the position of each corresponding (or mounted) pin support rod 110.

[0073] Here, the plurality of linear encoders 162 may be absolute encoders and may be configured to generate and output a specific code, such as a digital code corresponding to a current position (value) (e.g., a binary code, a binary coded decimal (BCD) code, a Gray code), rather than a pulse form, and therefore, when the core is interpreted, the core may be in a form that knows the current absolute position, and the scale 161 may be divided at a specific ratio (or divided on the scale at a specific ratio) to specify (generate) an electrical signal for each divided position, and then detect the electrical signal generated according to the position according to the movement of an object moving in a straight line, thereby detecting the (absolute) position.

[0074] A general linear encoder according to the related art can only measure relative movement (or position) from a starting point and measure an absolute position after power is turned on, and thus has a limitation in that the initial position must be redetected when power is turned off.

[0075] However, according to an embodiment, absolute encoders may be used for the plurality of linear encoders 162 , and thus, absolute position values may always be maintained regardless of a power state, and previous positions may be remembered even when power is turned off.

[0076] Therefore, the support table device 100 according to the embodiment can read the absolute position value information from the scale 161 by using the absolute encoder of the multiple linear encoders 162 set for each of the multiple pin support rods 110, and therefore, even when the power of the linear encoder 162 is turned off or the position is forcibly changed by physical force, the current position value of each of the multiple pin support rods 110 can be identified without losing the current position of each of the multiple pin support rods 110, thereby being able to control the precise position of the multiple pin support rods 10.

[0077] The support table apparatus 100 according to the embodiment may further include a lifting portion 170 that lifts and lowers at least one of the one or more pin support bars 110 or the movable picker 120 in the vertical direction 13 .

[0078] The lifting portion 170 can lift and lower at least one of the one or more pin support rods 110 or the movable picker 120 in the vertical direction 13, and when the one or more pin support rods 110 and the movable picker 120 are coupled to each other, the height of the one or more pin support rods 110 or the height of the movable picker 120 (in each state) can be different in the picking-up preparation state (or standby state) of the movable picker 120 (or in the case where the one or more pin support rods and the movable picker are separated from each other), and can prevent the movable picker 120 from interfering with the multiple pin support rods 110 arranged in the second direction 12 when moving in the second direction 12. In particular, the movable picker 120 can be moved to pick up the one or more pin support rods 110 without interfering with the remaining (or other) pin support rods 110, and the height of the one or more pin support rods 110 or the height of the movable picker 120 can be different in each condition (or process) between normal time (or when supporting a supported object) and the situation in which the one or more pin support rods 110 are moved.

[0079] That is, the lifting portion 170 can enable the movable picker 120 or the one or more pin support rods 110 to rise or fall to achieve coupling between the one or more pin support rods 110 and the movable picker 120, and (only) when the one or more pin support rods 110 are coupled to the movable picker 120, the height of the one or more pin support rods 110 and the height of the movable picker 120 can be aligned to couple with each other, and when the movable picker 120 is not coupled to the multiple pin support rods 110 and is separated from the multiple pin support rods 110, the height of the multiple pin support rods 110 and the height of the movable picker 120 can be different from each other so that the movable picker 120 does not interfere with the multiple pin support rods 110 even when moving in the second direction 12.

[0080] For example, the plurality of pin support rods 110 may have different support heights for supporting objects and different moving heights achieved by the movable picker 120. The lifting portion 170 may enable the one or more pin support rods 110 to descend when the one or more pin support rods 110 move, and the movable picker 120 may be coupled to the descending one or more pin support rods 110 to move the one or more pin support rods 110. That is, the one or more pin support rods 110 may descend to match the height of the movable picker 120, so that when the movable picker 120 moves to a corresponding position for picking up, the one or more pin support rods 110 move by being coupled to the movable picker 120. The one or more pin support rods 110 may be coupled to (or pick up) the movable picker 120 and may move in the second direction 12 in the descending state according to the movement of the movable picker 120. Here, the one or more pin support bars 110 may be coupled to the movable picker 120 while being lowered, or may be picked up (or coupled) to the movable picker 120 in a lowered state. Here, a lifting unit 170 may be provided for each of the plurality of pin support bars 110, and the lifting unit 170 may independently lift each of the plurality of pin support bars 110 and may enable (only) the one or more pin support bars 110 that are moved by being coupled to the movable picker 120 to be lowered to a height corresponding to the movable picker 120. In addition, the multiple pin support rods 110 may be lower than the support height of the supported object in terms of the moving height achieved by the movable picker 120, and only when moved by the movable picker 120 after the support height of the supported object at normal time (or when the one or more pin support rods are moved), they can be lowered to the height corresponding to the movable picker 120 by the lifting part 170, and the movable picker 120 can be set at a height lower than the support height of the multiple pin support rods 110 to move in the second direction 12 without interfering with the multiple pin support rods 110, and can pick up the lowered one or more pin support rods 110 to move the one or more pin support rods 110 in the second direction 12.

[0081] In this case, when the support object is supported (or after the support object is supported on the multiple pin support rods), some of the multiple pin support rods 110 (or the one or more pin support rods) can be moved, and when the substrate 10 sags after the support object is supported on the multiple pin support rods 110, some of the pin support rods 110 (or the one or more pin support rods) can be moved in the second direction 12 to adjust the gap between the multiple pin support rods 110 in the second direction 12, thereby compensating (or correcting) the sag of the substrate 10. That is, the one or more pin support bars 110 that need to be moved can be lowered to move without contacting the supported object at a height (or position) lower than the other (or remaining) pin support bars 110, and therefore, the one or more pin support bars 110 can be moved without contacting the supported object at the lower portion of the supported object to adjust (or control) the (supported) position of the supported object supported by the multiple support pins 111 of the one or more pin support bars 110, and sagging of the substrate 10 can be corrected (or controlled) by controlling the gaps in the second direction 12 between the multiple pin support bars 110. If the one or more pin support bars 110 move without being lowered, the supported object may be damaged, such as scratches, by the support pins 111. However, in an embodiment, this limitation can be resolved by enabling the one or more pin support bars 110 to be lowered as well as moved.

[0082] The plurality of support pins 111 may be arranged in a first direction 11, and each of the plurality of pin support bars 110 may include a gap adjustment portion (not shown) for adjusting a gap between the plurality of support pins 111 in the first direction 11. The plurality of support pins 111 may be arranged in the first direction 11, and the plurality of pin support bars 110 including the plurality of support pins 111 may be arranged in a second direction 12, and thus, the support pins 111 may be arranged in a two-dimensional (or planar) matrix in the first direction 11 and the second direction 12 to stably support a support object, and in particular, a support object in a (flat) plate shape such as the substrate 10 may be more stably supported.

[0083] The gap adjusting portion (not shown) can adjust the gaps between the plurality of support pins 111 in the first direction 11, and can adjust the gaps between the plurality of support pins 111 in the first direction 11 so that the plurality of support pins 111 are evenly (or densely) arranged in the lower portion of the support object. In addition, although the length of the support object in the second direction 12 is generally relatively long, if the length of the support object in the first direction 11 is also long, sagging of the substrate 10 in the first direction 11 may also occur. Therefore, the gap adjusting portion (not shown) can be used to adjust the gaps between the plurality of support pins 111 in the first direction 11 to correct (or compensate) for the sagging of the substrate 10 in the first direction 11. In particular, the gap adjusting portion (not shown) may be more necessary in the following situations.

[0084] The plurality of support pins 111 can support the substrate 10 on which the patterned thin film is formed, and support the portion between the cells of the thin film by adjusting the gap between the plurality of pin support rods 110 in the second direction 12. A thin film can be formed on the substrate 10, the thin film can have a pattern including cells (or a cell pattern), and the substrate 10 can be supported by the plurality of support pins 111. If the cells are directly supported by contacting the plurality of support pins 111, the cells may be damaged, resulting in defects, such as damage to the cells in the thin film. Therefore, the plurality of support pins 111 can avoid the cells and contact the substrate 10, can contact and support the portion between the cells (or the portion without the cells) in the thin film (or pattern), and can contact and support the portion between the cells of the thin film by adjusting the gap between the plurality of pin support rods 110 in the second direction 12.

[0085] Therefore, the support table apparatus 100 according to the embodiment can prevent and / or suppress defects (or failures) in the thin film, such as cell damage, by positioning the plurality of support rods 111 while avoiding cells in the pattern when supporting the substrate 10 on which the patterned thin film is formed, and can prevent defects (or failures) from occurring during the process. In addition, the gaps between the plurality of pin support rods 110 can be adjusted according to various thin film patterns, and the support pins 111 can support the substrate 10 by avoiding cells without causing cell damage.

[0086] Figure 4 is a flowchart illustrating a method for supporting a substrate according to another embodiment.

[0087] Reference Figure 4 , a method for supporting a substrate according to another embodiment will be described in more detail. However, details regarding the support table apparatus according to the embodiment that are repeated above will be omitted.

[0088] According to another embodiment, a method for supporting a substrate may be a method for supporting a substrate, wherein a substrate 10 is supported on a support table device 100 including a plurality of pin support rods 110, wherein the plurality of pin support rods 110 extend in a first direction 11, are arranged in a second direction 12 intersecting the first direction, and have a plurality of support pins 111, and the method may include a process (S100) of adjusting a gap between the plurality of pin support rods 110 in the second direction 12 according to a pattern of a thin film formed on the substrate 10 and a process (S200) of supporting the substrate 10 on the plurality of support pins 111.

[0089] First, the gaps between the plurality of pin support bars 110 in the second direction 12 are adjusted according to the pattern of the thin film formed on the substrate 10 (S100). The gaps between the plurality of pin support bars 110 in the second direction 12 can be adjusted according to the pattern of the thin film formed on the substrate 10, and thus, the plurality of support pins 111 can be arranged while avoiding cells in the pattern, thereby preventing and / or suppressing defects (or failures) of the thin film, such as cell damage, and preventing defects (or failures) from occurring during the process. Here, the gaps between the plurality of pin support bars 110 can be adjusted according to various thin film patterns, and the plurality of support pins 111 can support the substrate 10 by avoiding cells without damaging the cells.

[0090] Next, the substrate 10 is supported on the plurality of support pins 111 (S200). The substrate 10 may be supported by the plurality of support pins 111, and the substrate 10 may be supported by contacting the plurality of support pins 111. In addition, the substrate 10 may be supported by avoiding cells on the substrate 10 and supported by the plurality of support pins 111.

[0091] Here, the process ( S100 ) of adjusting the gap between the plurality of pin support bars 110 in the second direction 12 may include a process ( S110 ) of moving the one or more pin support bars 110 in the second direction 12 by selecting one or more of the plurality of pin support bars 110 .

[0092] One or more of the plurality of pin support rods 110 may be selected to move in the second direction 12 (S110). One or more of the plurality of pin support rods 110 may be selected (picked up) to move in the second direction 12 by a movable picker 120. The movable picker 120 may be selectively coupled to and detached from each of the plurality of pin support rods 110, and may be coupled to the one or more pin support rods 110 selected from the plurality of pin support rods 110 to move in the second direction 12 together with the coupled one or more pin support rods 110. Therefore, each of the multiple pin support rods 110 can be moved individually (or selectively) (in the second direction), and the movable picker 120 can select the one or more pin support rods 110 to be moved among the multiple pin support rods 110 to move the position in the second direction 12, and can also move the position of the one or more pin support rods 110 by picking up the one or more pin support rods 110 to move the one or more pin support rods 110 in the second direction 12 through the picker driver 130.

[0093] Here, the process (S110) of moving the one or more pin support rods 110 in the second direction 12 may include a process (S111) of enabling the selected one or more pin support rods 110 to descend, a process (S112) of coupling the movable picker 120 to the descended one or more pin support rods 110, and a process (S113) of moving the movable picker 120 in the second direction 12.

[0094] The selected one or more pin support bars 110 may be lowered (S111). Here, the lifting unit 170 provided for each of the plurality of pin support bars 110 may independently lift each of the plurality of pin support bars 110, and may enable the selected (only) one or more pin support bars 110, which are moved by being coupled to the movable picker 120, to be lowered to a height corresponding to the movable picker 120. Here, the multiple pin support rods 110 may be lower than the support height of the substrate 10 in terms of the moving height achieved by the movable pickup 120, and only when moved by the movable pickup 120 after the support height of the substrate 10 at normal time (or when the one or more pin support rods are moved), can they be lowered to the height corresponding to the movable pickup 120 by the lifting part 170, and the movable pickup 120 may be set at a height lower than the support height of the multiple pin support rods 110 for the substrate 10 to move in the second direction 12 without interfering with the multiple pin support rods 110, and the lowered one or more pin support rods 110 can be picked up to move the one or more pin support rods 110 in the second direction 12. For example, the one or more pin support rods 110 can be lowered to match the height of the movable picker 120 so that when the movable picker 120 moves to the corresponding position for picking up, the one or more pin support rods 110 move by being coupled to the movable picker 120, and the one or more pin support rods 110 can be coupled to (or pick up) the movable picker 120, and can move in the second direction 12 according to the movement of the movable picker 120 in the lowered state.

[0095] Next, the movable picker 120 may be coupled to the one or more pin support rods 110 that are lowered (S112). The movable picker 120 may be coupled to the one or more pin support rods 110 that are lowered, and the one or more pin support rods 110 may be coupled to the movable picker 120 while lowered, or may be coupled to the movable picker 120 (or picked up by the movable picker 120) in a lowered state.

[0096] In addition, the movable picker 120 can move in the second direction 12 (S113). The one or more pin support bars 110 that are lowered can be picked up to move in the second direction 12, and the movable picker 20 coupled to the one or more pin support bars 110 can be moved in the second direction 12 by the picker driver 130. Therefore, the one or more pin support bars 110 coupled to the movable picker 120 can also be moved to an appropriate position in the second direction 12.

[0097] In this case, when supporting the substrate 10 (or after supporting the substrate 10 on the multiple pin support rods), some of the multiple pin support rods 110 (or the one or more pin support rods) can be moved, and when sag of the substrate 10 occurs after supporting the substrate 10 on the multiple pin support rods 110, some of the pin support rods 110 (or the one or more pin support rods) can be moved in the second direction 12 to adjust the gap between the multiple pin support rods 110 in the second direction 12, thereby compensating (or correcting) the sag of the substrate 10. That is, the one or more pin support rods 110 that need to be moved can be lowered to move without contacting the supported object at a height (or position) lower than other (or remaining) pin support rods 110, and therefore, one or more pin support rods 110 can be moved without contacting the supported object at the lower part of the substrate 10 to adjust (or control) the (support) position of the substrate 10 supported by the multiple support pins 111 of the one or more pin support rods 110, and the sagging of the substrate 10 can be corrected (or controlled) by controlling the gap in the second direction 12 between the multiple pin support rods 110.

[0098] In addition, the process (S100) of adjusting the gap 12 between the multiple pin support rods 110 in the second direction 12 may also include a process (S120) of separating the movable picker 120 from the one or more pin support rods 110, and a process (S130) of enabling the one or more pin support rods 110 to rise to return to the supporting position.

[0099] The movable picker 120 can be separated from the one or more pin support bars 110 (S120). When the one or more pin support bars 110 are moved to an appropriate position by the movable picker 120, the gap between the plurality of pin support bars 110 in the second direction can be adjusted. Here, the gap between the plurality of pin support bars 110 in the second direction can be adjusted to correspond to the size and shape of the substrate 10, so as to effectively and appropriately support the substrate 10 to correspond to the size and shape of the substrate 10. After the one or more pin support bars 110 are moved to a position (or desired position) in which the gap between the plurality of pin support bars 110 in the second direction 12 is adjusted to an optimal (or desired) position, the movable picker 120 can be separated from the one or more pin support bars 110, and the movable picker 120 can be simply separated so that the one or more pin support bars 110 rise to return to the supporting position, or can be separated from the one or more pin support bars 110 and then (moved to) coupled to another pin support bar 110.

[0100] In addition, the one or more pin support bars 110 may be raised to return to the supporting position (S130). The one or more pin support bars 110 may be raised to return to the supporting position (or supporting height), and (all) the pin support bars 110 selected in the process of moving in the second direction 12 (S110) may be moved in the second direction 12 to adjust the gap between the plurality of pin support bars 110 in the second direction 12 (or after the process of adjusting the gap between the plurality of pin support bars in the second direction 12 (S100)), the one or more pin support bars 110 may be raised so that (all) the plurality of pin support bars 110 are provided (or set) at the supporting position, and the process of supporting the substrate 10 (S200) may be performed so that the substrate 10 is supported by the plurality of support pins 111.

[0101] Therefore, it is possible to stably support substrates 10 of various sizes according to substrates 10 of various sizes, support substrates 10 of various sizes that are becoming larger and larger, and improve (support) flatness, while preventing the substrate 10 from sagging or deflecting due to its own weight even when the substrate 10 becomes larger and larger.

[0102] The process of adjusting the gap between the plurality of pin support bars 110 in the second direction 12 ( S100 ) may further include a process of fixing a position of each of the plurality of pin support bars 110 ( S140 ).

[0103] Next, each of the plurality of pin support bars 110 may be fixed to an appropriate position (S140). Before supporting the substrate 10 on the plurality of support pins 111 (or before the process of supporting the substrate (S200)), each of the plurality of pin support bars 110 may be fixed to an appropriate position, and each of the plurality of pin support bars 110 may be fixed to an appropriate position by the plurality of fixing members 150 respectively provided on the plurality of pin support bars 110. When supporting the substrate 10, the gap between the plurality of pin support bars 110 in the second direction 12 may be adjusted according to the size of the substrate 10, and the positions of the plurality of pin support bars 110 may be fixed, thereby stably supporting the substrate 10 without shaking.

[0104] In addition, the method for supporting a substrate according to an embodiment can correspond to various thin film patterns by equipping an external recipe operation, and since the support table device can be operated externally, the particle problem factor that may cause product defects can be reduced, and since each of the multiple pin support rods moves automatically, there is no risk factor that personnel (or workers) must work directly.

[0105] As described above, in the present disclosure, a movable pickup can be selectively coupled to a pin support rod to be moved among a plurality of pin support rods to move each of the plurality of pin support rods individually. Therefore, it is only necessary to install a pickup driver for moving the movable pickup, without having to install a driver such as a servo motor on each of the plurality of pin support rods, and therefore, the driver can be minimized, thereby simplifying the structure with an optimal design. In addition, the gaps between the plurality of pin support rods can be adjusted to correspondingly support increasingly larger support objects of various sizes and substrates of various sizes, thereby preventing the substrate from sagging or deflecting due to its own weight even when the substrate becomes increasingly larger, and improving flatness. In addition, when supporting a substrate on which a patterned thin film is formed, the support pins can be arranged to avoid the unit of the pattern to prevent and / or suppress defects in the film and prevent defects from occurring in the process. In addition, the gaps between the plurality of pin support rods can be adjusted to correspond to various film patterns so that the support pins avoid and support the substrate without damaging the unit. In addition, an absolute encoder can be used for the plurality of linear encoders respectively provided on the plurality of pin support rods to read absolute position value information from a scale, thereby turning off the power supply of the linear encoder, or identifying the current position of the plurality of pin support rods without losing the current position value of each of the plurality of pin support rods even when the linear encoder is forced to change position by physical force, thereby enabling precise control of the positions of the plurality of pin support rods. When a support table device is used to support the substrate, various film patterns can be responded to by operating a recipe outside the equipment, and the support table device can be manipulated from the outside. Therefore, the particle problem factor that may cause product defects can be reduced, and each of the plurality of pin support rods can be automatically moved, and therefore, there can be no risk factor that a person (or worker) must directly work.

[0106] The support table apparatus according to the embodiment can move each of the plurality of pin support bars individually by selectively connecting (only) the plurality of pin support bars to be moved by the movable picker. Therefore, it is only necessary to install a picker driver for moving the movable picker, without installing a driver such as a servo motor on each of the plurality of pin support bars. Therefore, the drivers can be minimized, thereby simplifying the structure with an optimal design.

[0107] In addition, the gaps between the plurality of pin support rods can be adjusted to correspondingly support increasingly larger support objects of various sizes and substrates of various sizes, thereby preventing the substrate from sagging or deflecting due to its own weight even when the substrate becomes increasingly larger, and improving flatness. In addition, when supporting a substrate on which a patterned thin film is formed, the support pins can be arranged to avoid the cells of the pattern to prevent and / or suppress defects (or failures) in the film and prevent defects (or failures) from occurring during the process. In addition, the gaps between the plurality of pin support rods can be adjusted to correspond to various film patterns, so that the support pins avoid and support the substrate without damaging the cells.

[0108] In addition, an absolute encoder can be used for the multiple linear encoders respectively arranged on the multiple pin support rods to read absolute position value information from the scale, thereby turning off the power supply of the linear encoder, or identifying the current positions of the multiple pin support rods without losing the current position value of each of the multiple pin support rods even if the linear encoder is forced to change position by physical force, thereby enabling precise control of the positions of the multiple pin support rods.

[0109] In the method of using a support table apparatus to support a substrate, various thin film patterns can be produced by operating a recipe outside the apparatus, and the support table apparatus can be operated from the outside. Therefore, particle problems that can cause product defects can be reduced, and each of the plurality of pin support bars can be automatically moved, thereby eliminating the risk of personnel (or workers) having to work directly.

[0110] Although the preferred embodiments of the present invention have been described with reference to several exemplary embodiments thereof, the embodiments of the present invention are not limited to the aforementioned embodiments, and it should be understood that those skilled in the art may devise many other modifications and embodiments that fall within the spirit and scope of the principles of the present disclosure. Therefore, the true scope of protection of the present invention will be determined by the technical scope of the appended claims.

Claims

1. A support table device, comprising: a plurality of pin support bars having a plurality of support pins extending in a first direction and arranged in a second direction intersecting the first direction; a movable picker selectively coupled to and detached from each of the plurality of pin support bars, and coupled to selected one or more pin support bars of the plurality of pin support bars so as to be movable in the second direction together with the coupled one or more pin support bars; as well as a pickup driver configured to move the movable pickup in the second direction, The movable picker is configured to move the one or more pin support bars in the second direction according to driving of the picker driver to adjust gaps between the plurality of pin support bars in the second direction.

2. The support table apparatus according to claim 1, further comprising a first rail portion extending in the second direction, the movable pickup being movably coupled to the first rail portion, The movable pickup is moved in the second direction along the first rail portion by the pickup driver. 3 . The support table apparatus according to claim 1 , further comprising a second rail portion extending in the second direction, each of the plurality of pin support bars being independently movably connected to the second rail portion. 4 . The support table apparatus according to claim 3 , further comprising a plurality of fixing members respectively provided on the plurality of pin supporting bars to fix a position of each of the plurality of pin supporting bars.

5. The support table device according to claim 3, further comprising: a ruler, arranged along an extending direction of the second track portion; as well as A plurality of linear encoders are respectively provided on the plurality of pin support rods and are configured to read the scale to confirm a position of each of the plurality of pin support rods. The support table apparatus according to claim 5 , wherein the plurality of linear encoders include absolute encoders.

7. The support table apparatus according to claim 1 , further comprising a lifting portion configured to lift and lower at least one of the one or more pin support bars or the movable picker in a vertical direction, The lifting portion is configured to enable the movable picker or the one or more pin supporting rods to rise or fall so that the one or more pin supporting rods and the movable picker are coupled to each other.

8. The support table apparatus according to claim 7, wherein the lifting portion is configured to allow the one or more pin support rods to descend when the one or more pin support rods are moved, and The movable picker is coupled to the lowered one or more pin support bars to move the one or more pin support bars.

9. The support table apparatus according to claim 1, wherein the plurality of support pins are arranged in the first direction, and Each of the plurality of pin support bars includes a gap adjustment portion configured to adjust a gap between the plurality of support pins in the first direction.

10. The support table apparatus according to claim 1, wherein the plurality of support pins are configured to support a substrate on which a patterned thin film is formed, and to support portions between units of the thin film by adjusting the gaps between the plurality of pin support rods in the second direction.

11. A method for supporting a substrate, wherein the substrate is supported on a support table device, the support table device including a plurality of pin support rods, the plurality of pin support rods extending in a first direction, arranged in a second direction intersecting the first direction, and having a plurality of support pins, the method comprising: adjusting a gap between the plurality of pin support bars in the second direction according to a pattern of a thin film formed on the substrate; as well as supporting the substrate on the plurality of support pins, The adjusting the gap between the plurality of pin support bars in the second direction includes moving the one or more pin support bars in the second direction by selecting one or more pin support bars from the plurality of pin support bars.

12. The method of claim 11, wherein said moving said one or more pin support rods in said second direction comprises: enabling the selected one or more pin support rods to be lowered; coupling a movable pickup to the lowered one or more pin support bars; as well as The movable pickup is enabled to move in the second direction.

13. The method of claim 12, wherein adjusting the gap between the plurality of pin support rods in the second direction further comprises: separating the movable picker from the one or more pin support bars; as well as The one or more pin support rods are enabled to rise and return to a support position. 14 . The method of claim 12 , wherein said adjusting the gap between the plurality of pin support bars in the second direction further comprises fixing a position of each of the plurality of pin support bars.

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