An energy-saving double-furnace vacuum sintering furnace for quartz waste liquid bottles for semiconductors

Abstract

The invention relates to the field of semiconductor processing technology and discloses an energy-saving double-furnace vacuum sintering furnace for quartz waste liquid bottles for semiconductors. The double-furnace vacuum sintering furnace comprises a nested structure of a heat-insulating drying furnace and a high-temperature sintering furnace, with a rotary drying rack provided between the two. The opening and closing of the furnace doors are controlled by a guide rail driving mechanism respectively. The heat-insulating drying furnace is covered with a ceramic fiber heat-insulating layer, and the high-temperature sintering furnace adopts a molybdenum alloy lining. A vacuum pump combination realizes high vacuum, the furnace door adopts a triple seal of perfluoroether rubber, the rotary drying rack and the sintering rack are respectively equipped with a quartz boat, and a screw guide rail driving mechanism ensures high-precision positioning. When working, the two furnace bodies operate in coordination, first completing the drying and preheating of the waste liquid bottles in the heat-insulating drying furnace, and then transferring them to the high-temperature sintering furnace for sintering. The vacuum interlayer heat insulation reduces energy consumption and improves the impurity volatilization rate, thereby effectively realizing efficient and energy-saving recycling of the quartz waste liquid bottles.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor processing, in particular to an energy-saving double-furnace vacuum sintering furnace for a quartz waste liquid bottle for semiconductors. Background Art

[0002] The semiconductor manufacturing process generates a large amount of waste liquid containing waste acid, waste alkali and other corrosive substances. Quartz waste liquid bottles, as special containers for storing such waste liquids, can effectively prevent waste liquid leakage and pollution due to the excellent high temperature resistance, corrosion resistance and chemical stability of quartz materials. However, after use, the inner wall of the quartz waste liquid bottles will retain pollutants such as photoresist, metal ions, and organic matter. Direct disposal will cause resource waste and environmental pollution. Therefore, it is necessary to remove moisture and low-boiling point impurities through drying, and then volatilize and decompose the pollutants through vacuum sintering, so as to achieve the recycling of quartz materials, reduce production costs and meet the semiconductor industry's demand for high-cleanliness consumables.

[0003] At present, most traditional quartz waste liquid bottle treatment equipment has a single furnace structure, which has problems such as low heating efficiency and high energy consumption. It is also unable to achieve efficient connection between the drying and sintering processes, resulting in a long treatment cycle. At the same time, the thermal insulation performance of the single furnace is limited, and heat loss is serious, which further increases energy consumption. Summary of the Invention

[0004] The technical problem to be solved by the present invention is that the conventional quartz waste liquid bottle processing equipment in the prior art has the disadvantages of low heating efficiency and high energy consumption. To this end, we propose an energy-saving double-furnace vacuum sintering furnace for semiconductor quartz waste liquid bottles.

[0005] In order to achieve the above-mentioned purpose, the present application adopts the following technical solution: an energy-saving double-furnace vacuum sintering furnace for quartz waste liquid bottles for semiconductors, comprising: an insulation and drying furnace and a high-temperature sintering furnace. The insulation and drying furnace is arranged on the outside of the high-temperature sintering furnace to form a double-furnace nested structure. The insulation and drying furnace is made of 316L stainless steel with a wall thickness of 8 to 10 mm and an inner surface roughness of Ra ≤ 0.8 μm. It is covered with an 80 to 100 mm thick ceramic fiber insulation layer with a thermal conductivity of ≤ 0.03 W / (m・K); the high-temperature sintering furnace is lined with a molybdenum alloy with a wall thickness of 5 to 6 mm, a high temperature resistance of up to 1800°C, and a ZrO2 ceramic coating is coated on the surface to enhance thermal shock resistance. A rotary drying rack is installed between the high-temperature sintering furnace and the holding and drying furnace. The holding and drying furnace is connected to a vacuum pump via piping. The vacuum pump utilizes a combination of a two-stage rotary vane pump and a Roots pump, with a pumping rate of ≥150 L / s and a vacuum limit of ≤6 × 10⁻²Pa. It is equipped with a condensation trap and activated carbon filter to trap acidic gases and particulate matter. One side of the rotary drying rack is rotatably connected to the first furnace door, which is driven by a first guide rail drive mechanism. The rotary sintering rack is installed within the high-temperature sintering furnace. A second furnace door is fixedly connected to one side of the high-temperature sintering furnace, which is driven by a second guide rail drive mechanism.

[0006] Preferably, the first furnace door and the second furnace door are respectively located on both sides of the heat-insulating drying furnace, and the first furnace door and the second furnace door are sealed with the heat-insulating drying furnace by high-temperature resistant rubber. The sealing rubber ring is made of perfluoroether rubber with a temperature resistance range of -20°C to 260°C, a compression permanent deformation rate of ≤10%, a sealing surface width of ≥25mm, and a triple seal is achieved by cooperating with the tongue and groove structure at the furnace door flange.

[0007] Preferably, the rotary drying rack includes a rotating frame, which is rotatably connected to the first furnace door. Four groups of drying quartz boats for holding quartz waste liquid bottles to be dried are rotatably connected to the rotating frame. The drying quartz boats are located below the rotating axis. The rotating frame is welded with 316L stainless steel square tubes with a wall thickness of 3mm and a polished surface. The drying quartz boats are made of 99.99% purity fused quartz.

[0008] Preferably, the first guide rail driving mechanism includes a first screw guide rail, a first screw nut is connected to the first screw guide rail through a threaded transmission, the first screw nut is fixedly connected to a first fixed bracket, the first fixed bracket is fixedly connected to the first furnace door, and one end of the first screw guide rail is connected to a first servo motor through a synchronous belt transmission. The first screw guide rail adopts a trapezoidal screw with a nominal diameter of 40mm, a lead of 10mm, an accuracy grade of C7, and a maximum stroke of 800mm; the first servo motor has a power of 1.5kW, a rated speed of 1500r / min, is equipped with an absolute encoder, a positioning accuracy of ±0.1mm, and a repeat positioning accuracy of ±0.05mm.

[0009] Preferably, four first screw guide rails are provided, and the four first screw guide rails are parallel to each other. The four first screw guide rails are respectively located above and below the first furnace door. Two groups of first fixed brackets are provided, one group of first fixed brackets is fixedly connected to the two first screw nuts above the first furnace door, and the other group of first fixed brackets is fixedly connected to the two first screw nuts below the first furnace door. The first fixed brackets are made of cast aluminum with a yield strength ≥200MPa, anodized surface, and a thickness of 20mm. They are connected to the first screw nuts by M12 high-strength bolts with a pre-tightening force ≥30kN.

[0010] Preferably, two first servo motors are provided, and the two first screw guide rails located above the first furnace door are connected to one of the first servo motors through a synchronous pulley drive, and the two first screw guide rails located below the first furnace door are connected to the other first servo motor through a synchronous pulley drive. The synchronous belt adopts an HTD-8M toothed belt with a bandwidth of 50mm, a belt length of 1200mm, a transmission efficiency of ≥95%, and is equipped with a tensioning pulley to automatically adjust the tensioning force to ensure transmission accuracy; the two first servo motors are synchronously controlled by PLC, with a speed deviation of ≤0.5% and a torque balance accuracy of ±2%.

[0011] Preferably, the high-temperature sintering furnace includes a first sintering furnace body and a second sintering furnace body, the first sintering furnace body is rotatably connected to the second furnace door, and the second sintering furnace body is rotatably connected to the first sintering furnace body through a hinge. The first sintering furnace body and the second sintering furnace body both adopt a double-layer water-cooling structure, the inner layer is made of molybdenum alloy, the outer layer is 316L stainless steel, and cooling water is passed through the interlayer. The water inlet temperature is ≤25°C, the water outlet temperature is ≤45°C, and the water pressure is ≥0.5MPa; the hinge is made of high-temperature resistant alloy, the pin shaft diameter is 30mm, the surface is nitrided, the hardness is ≥65HRC, and it can withstand the furnace body weight ≥2000kg.

[0012] Preferably, the rotating sintering rack is rotatably connected to the second sintering furnace body, and four groups of sintered quartz boats for holding quartz waste liquid bottles to be sintered are rotatably connected to the rotating sintering rack. The center of gravity of the sintered quartz boats is located below the rotating axis. The rotating sintering rack is made of molybdenum alloy, coated with SiC anti-oxidation coating on the surface, and is resistant to high temperatures of up to 1600°C; the sintered quartz boats are made of 99.999% ultra-high purity fused quartz.

[0013] Preferably, the second guide rail driving mechanism includes a second screw guide rail, a second screw nut is connected to the second screw guide rail through a threaded transmission, the second screw nut is fixedly connected to a second fixed bracket, the second fixed bracket is fixedly connected to the second furnace door, and one end of the second screw guide rail is connected to a second servo motor through a synchronous pulley transmission. The second screw guide rail adopts a ball screw with a nominal diameter of 50mm, a lead of 16mm, an accuracy grade of C5, and a maximum stroke of 1000mm; the second servo motor has a power of 2.2kW, a rated speed of 1500r / min, is equipped with a 23-bit absolute encoder, a positioning accuracy of ±0.05mm, a repeat positioning accuracy of ±0.02mm, a power-off braking function, and a braking torque ≥10N·m.

[0014] Preferably, four second screw guide rails are provided, and the four second screw guide rails are parallel to each other, and the four second screw guide rails are respectively located above and below the second furnace door, and two groups of second fixed brackets are provided, one group of second fixed brackets is fixedly connected to the two second screw nuts above the second furnace door, and the other group of second fixed brackets is fixedly connected to the two second screw nuts below the second furnace door. Two second servo motors are provided, and the two second screw guide rails located above the second furnace door are connected to one of the second servo motors through a synchronous pulley drive, and the two second screw guide rails located below the second furnace door are connected to the other second servo motor through a synchronous pulley drive. The second fixed bracket adopts a high-strength steel welded structure with a wall thickness of 15mm and a reinforcing rib plate inside, with a yield strength of ≥345MPa; the synchronous belt drive system is equipped with a tension sensor to monitor the tensioning force in real time to ensure transmission accuracy; the two second servo motors adopt a master-slave control mode, the master motor is responsible for speed control, and the slave motor is responsible for torque compensation, with a synchronization accuracy of ±0.03mm.

[0015] The technical effects and advantages of the present invention are as follows:

[0016] The double-furnace nested structure design of the heat-insulating drying furnace and the high-temperature sintering furnace in this solution has significant advantages. On the one hand, by placing the heat-insulating drying furnace on the outside of the high-temperature sintering furnace, a natural vacuum insulation layer is formed. The ceramic fiber insulation layer covering the heat-insulating drying furnace works synergistically with the vacuum environment, greatly improving the insulation efficiency and effectively blocking the heat conduction and loss of the high-temperature sintering furnace. Compared with the traditional single-furnace structure, the energy consumption is lower, achieving energy-saving production. On the other hand, this structure makes the spatial layout of the two processes compact, and uses the waste heat emitted by the high-temperature sintering furnace during operation to pre-dry the quartz waste liquid bottles in the heat-insulating drying furnace, thereby improving the drying efficiency without additional energy consumption; and during the vacuuming process, since the two furnace bodies are not completely sealed, they can be evacuated synchronously, reducing the vacuuming time and energy consumption. In addition, the double-furnace nested design achieves a seamless connection between the drying and sintering processes, avoiding heat loss and the risk of secondary pollution during material transfer, and significantly improving the processing efficiency and regeneration quality of the quartz waste liquid bottles. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The disclosure of the present invention is illustrated with reference to the accompanying drawings. It should be understood that the drawings are for illustrative purposes only and are not intended to limit the scope of protection of the present invention. In the drawings, the same reference numerals are used to refer to the same components:

[0018] Figure 1 This is a schematic diagram of the appearance structure of the present invention;

[0019] Figure 2 Schematic diagram of the internal structure of the present invention;

[0020] Figure 3 Schematic diagram of the structure of the first guide rail driving mechanism of the present invention;

[0021] Figure 4 It is a structural schematic diagram of the rotary drying rack of the present invention;

[0022] Figure 5 It is a schematic structural diagram of a high-temperature sintering furnace according to the present invention;

[0023] Figure 6 It is a schematic structural diagram of the second guide rail driving mechanism of the present invention.

[0024] Legend: 1. Insulated drying furnace; 2. High-temperature sintering furnace; 201. First sintering furnace body; 202. Second sintering furnace body; 3. Rotating drying rack; 301. Rotating frame; 302. Drying quartz boat; 4. Vacuum pump; 5. First furnace door; 6. First guide rail drive mechanism; 601. First screw guide rail; 602. First screw nut; 603. First fixed bracket; 604. First servo motor; 7. Rotating sintering rack; 8. Sintering quartz boat; 9. Second furnace door; 10. Second guide rail drive mechanism; 1001. Second screw guide rail; 1002. Second screw nut; 1003. Second fixed bracket; 1004. Second servo motor. DETAILED DESCRIPTION

[0025] It is easy to understand that according to the technical solution of the present invention, without changing the essential spirit of the present invention, a person skilled in the art can propose a variety of interchangeable structural modes and implementation modes. Therefore, the following specific embodiments and drawings are only exemplary descriptions of the technical solution of the present invention and should not be regarded as the entire invention or as a limitation or restriction of the technical solution of the present invention.

[0026] Reference Figures 1-6 As shown, the present invention provides a technical solution: an energy-saving double-furnace vacuum sintering furnace for quartz waste liquid bottles for semiconductors, comprising: a heat-insulating drying furnace 1 and a high-temperature sintering furnace 2, wherein the heat-insulating drying furnace 1 is sleeved on the outside of the high-temperature sintering furnace 2 to form a double-furnace nested structure, the heat-insulating drying furnace 1 is made of 316L stainless steel with a wall thickness of 8 to 10 mm and an inner surface roughness of Ra ≤ 0.8 μm, and is covered with an 80 to 100 mm thick ceramic fiber insulation layer with a thermal conductivity of ≤ 0.03 W / (m·K).

[0027] The high-temperature sintering furnace 2 is lined with a molybdenum alloy with a wall thickness of 5-6mm, capable of withstanding temperatures up to 1800°C. A ZrO2 ceramic coating is applied to the surface to enhance thermal shock resistance. The high-temperature sintering furnace 2 comprises a first sintering furnace body 201 and a second sintering furnace body 202. The first sintering furnace body 201 is pivotally connected to the second furnace door 9, and the second sintering furnace body 202 is pivotally connected to the first sintering furnace body 201 via a hinge. Both the first sintering furnace body 201 and the second sintering furnace body 202 utilize a double-layer water-cooling structure, with an inner layer made of molybdenum alloy and an outer layer of 316L stainless steel. Cooling water flows through the interlayer, with an inlet temperature of ≤25°C, an outlet temperature of ≤45°C, and a water pressure of ≥0.5MPa. The hinges are made of a high-temperature resistant alloy, with a pin diameter of 30mm, a nitrided surface, a hardness of ≥65HRC, and a load capacity of ≥2000kg. The heating system in the high-temperature sintering furnace 2 uses molybdenum wire heating elements with a rated power of 80kW, a maximum operating temperature of 1600℃, zone control, and a temperature uniformity of 1200℃ with a deviation of ±5℃; it is equipped with S-type thermocouple temperature measurement, with a response time of ≤0.5s and a temperature control accuracy of ±1℃.

[0028] A rotating drying rack 3 is provided between the high-temperature sintering furnace 2 and the heat-insulating drying furnace 1. One side of the rotating drying rack 3 is rotatably connected to the first furnace door 5. The rotating drying rack 3 includes a rotating frame 301, which is rotatably connected to the first furnace door 5. Four groups of drying quartz boats 302 for holding quartz waste liquid bottles to be dried are rotatably connected to the rotating frame 301. The drying quartz boats 302 are located below the rotating axis. The rotating frame 301 is welded with 316L stainless steel square tubes with a wall thickness of 3 mm and a polished surface. The drying quartz boats 302 are made of 99.99% pure fused quartz.

[0029] The heat-insulating drying furnace 1 is connected to a vacuum pump 4 via a pipeline. This vacuum pump 4 utilizes a combination of a two-stage rotary vane pump and a Roots pump, with a pumping rate of ≥150 L / s and a vacuum limit of ≤6 × 10⁻²Pa. It is equipped with a condensation trap and an activated carbon filter to trap acidic gases and particulate matter. The heat-insulating drying furnace 1 is connected to the high-temperature sintering furnace 2 via an 80 mm diameter stainless steel pipeline. A pneumatic damper valve is installed within the pipeline, with a leakage rate of ≤1 × 10⁻ when closed. 6 Pa・m³ / s; equipped with vacuum gauge, measuring range 1×10 5 Pa~1×10⁻ 5 Pa, with a resolution of 0.1 Pa. The control system adopts PLC control and has temperature curve programming, vacuum monitoring, fault diagnosis, and data storage functions; it supports Ethernet communication, allowing remote monitoring and operation; it has a three-level safety protection setting, and the over-temperature alarm threshold is the set temperature + 50°C.

[0030] The first furnace door 5 is transmission-connected to a first guide rail drive mechanism 6, which includes a first screw guide rail 601. The first screw guide rail 601 is connected to a first screw nut 602 via a threaded transmission. The first screw nut 602 is fixedly connected to a first fixed bracket 603. The first fixed bracket 603 is fixedly connected to the first furnace door 5. One end of the first screw guide rail 601 is transmission-connected to a first servo motor 604 via a synchronous belt. The first screw guide rail 601 adopts a trapezoidal screw with a nominal diameter of 40 mm, a lead of 10 mm, an accuracy grade of C7, and a maximum stroke of 800 mm. The first servo motor 604 has a power of 1.5 kW, a rated speed of 1500 r / min, and is equipped with an absolute encoder with a positioning accuracy of ±0.1 mm and a repeat positioning accuracy of ±0.05 mm. Four first screw guide rails 601 are provided, and the four first screw guide rails 601 are parallel to each other. The four first screw guide rails 601 are respectively located above and below the first furnace door 5. Two groups of first fixing brackets 603 are provided, one group of first fixing brackets 603 is fixedly connected to the two first screw nuts 602 above the first furnace door 5, and the other group of first fixing brackets 603 is fixedly connected to the two first screw nuts 602 below the first furnace door 5. The first fixing brackets 603 are made of cast aluminum with a yield strength of ≥200 MPa, an anodized surface, and a thickness of 20 mm. They are connected to the first screw nuts 602 by M12 high-strength bolts with a pre-tightening force of ≥30 kN. Two first servo motors 604 are provided, and the two first screw guide rails 601 located above the first furnace door 5 are connected to one of the first servo motors 604 through a synchronous pulley transmission, and the two first screw guide rails 601 located below the first furnace door 5 are connected to the other first servo motor 604 through a synchronous pulley transmission. The synchronous belt adopts an HTD-8M toothed belt with a bandwidth of 50mm, a belt length of 1200mm, a transmission efficiency of ≥95%, and is equipped with a tensioning pulley to automatically adjust the tension to ensure transmission accuracy; the two first servo motors 604 are synchronously controlled by PLC, with a speed deviation of ≤0.5% and a torque balance accuracy of ±2%.

[0031] A rotating sintering rack 7 is rotatably connected to the high-temperature sintering furnace 2, and the rotating sintering rack 7 is rotatably connected to the second sintering furnace body 202. Four groups of sintered quartz boats 8 for holding quartz waste liquid bottles to be sintered are rotatably connected to the rotating sintering rack 7. The center of gravity of the sintered quartz boats 8 is located below the rotating axis. The rotating sintering rack 7 is made of molybdenum alloy and coated with SiC anti-oxidation coating on the surface, which is resistant to high temperatures of 1600°C; the sintered quartz boats 8 are made of 99.999% ultra-high purity fused quartz.

[0032] A second furnace door 9 is fixedly connected to one side of the high-temperature sintering furnace 2. This second furnace door 9 is in driving connection with a second guide rail drive mechanism 10. This second guide rail drive mechanism 10 comprises a second screw guide 1001, to which a second screw nut 1002 is threadedly connected. This second screw nut 1002 is fixedly connected to a second fixing bracket 1003, which is fixedly connected to the second furnace door 9. One end of the second screw guide 1001 is connected to a second servo motor 1004 via a synchronous pulley. The second screw guide 1001 utilizes a ball screw with a nominal diameter of 50 mm, a lead of 16 mm, an accuracy grade of C5, and a maximum travel of 1000 mm. The second servo motor 1004 has a power of 2.2 kW, a rated speed of 1500 r / min, and is equipped with a 23-bit absolute encoder. It offers a positioning accuracy of ±0.05 mm and a repeatability of ±0.02 mm. It also features a power-off braking function with a braking torque of ≥10 N·m. There are four second screw guide rails 1001, and the four second screw guide rails 1001 are parallel to each other. The four second screw guide rails 1001 are respectively located above and below the second furnace door 9. There are two groups of second fixing brackets 1003, one of which is fixedly connected to the two second screw nuts 1002 above the second furnace door 9, and the other group of second fixing brackets 1003 is fixedly connected to the two second screw nuts 1002 below the second furnace door 9. There are two second servo motors 1004, and the two second screw guide rails 1001 located above the second furnace door 9 are driven by synchronous pulleys. It is dynamically connected to one of the second servo motors 1004, and the two second screw guide rails 1001 located below the second furnace door 9 are transmission-connected to the other second servo motor 1004 through synchronous pulley transmission. The second fixed bracket 1003 adopts a high-strength steel Q345 welded structure with a wall thickness of 15mm and a reinforcing rib plate inside. The yield strength is ≥345MPa; the synchronous belt transmission system is equipped with a tension sensor to monitor the tension in real time to ensure transmission accuracy; the two second servo motors 1004 adopt a master-slave control mode, the master motor is responsible for speed control, and the slave motor is responsible for torque compensation, with a synchronization accuracy of ±0.03mm.

[0033] Specifically, the first furnace door 5 and the second furnace door 9 are respectively located on both sides of the heat-insulating drying furnace 1. The first furnace door 5 and the second furnace door 9 are sealed with the heat-insulating drying furnace 1 through high-temperature resistant rubber. The sealing rubber ring is made of perfluoroether rubber with a temperature resistance range of -20°C to 260°C, a compression permanent deformation rate of ≤10%, a sealing surface width of ≥25mm, and a triple seal is achieved in conjunction with the tongue and groove structure at the furnace door flange.

[0034] Specifically, the rotary sintering rack 7 and the rotary drying rack 3 can be driven to rotate by a servo motor, thereby increasing the uniformity of heating.

[0035] Working Principle: When using this energy-saving dual-furnace vacuum sintering furnace, first, the first and second furnace doors 5, 9 are opened separately via two sets of guide rail drive mechanisms. The rotary drying rack 3 and high-temperature sintering furnace 2 are then withdrawn from the heat-insulating drying furnace 1. The synchronous motion accuracy of the first and second guide rail drive mechanisms 6, 10 is controlled to within ±0.1mm, ensuring a smooth and seamless opening of the furnace doors. The high-temperature sintering furnace 2 is then opened, and the quartz waste liquid bottle, which has completed a previous round of heating and drying on the rotary drying rack 3, is transferred to the sintering quartz boat 8. Then, the cleaned quartz waste liquid bottle to be dried is placed on the rotary drying rack 3, and then the first furnace door 5 and the second furnace door 9 are closed respectively by two sets of guide rail drive mechanisms. After the furnace door is closed, the sealing pressure is detected by the pressure sensor to ensure that the sealing pressure is ≥0.8MPa, and the heat-insulating drying furnace 1 is evacuated to vacuum through the vacuum pump 4. The vacuuming process is divided into two stages: rough pumping and fine pumping. The rough pumping stage takes ≤10min, and the fine pumping stage takes ≤20min. Since the first sintering furnace body 201 and the second sintering furnace body 202 are not completely sealed, the high-temperature sintering furnace 2 will also be evacuated to vacuum. The difference between the vacuum degree in the high-temperature sintering furnace 2 and the vacuum degree in the heat-insulating drying furnace 1 is ≤10%, ensuring that pollutants are effectively volatilized during the sintering process. The high-temperature sintering furnace 2 is then heated by electric heating. The heating process is carried out according to a preset three-stage heating curve: low temperature section: room temperature to 400°C, heating rate 5°C / min, medium temperature section: 400°C to 800°C, heating rate 8°C / min, high temperature section: 800°C to 1200°C, heating rate 3°C / min. The entire heating process takes about 4.5 hours to volatilize the impurities on the quartz waste liquid bottle in the high-temperature sintering furnace 2. During the 1200°C insulation stage, the rotary sintering rack 7 is driven by a motor and rotates slowly at a speed of 0.5r / min to ensure that the waste liquid bottle is heated evenly and the impurity volatilization rate is ≥99.5%. After the high-temperature sintering furnace 2 is heated, the vacuum environment in the heat-insulating and drying furnace 1 will prevent the heat of the high-temperature sintering furnace 2 from being lost through conduction. The heat insulation efficiency of the vacuum interlayer is ≥90%, which saves more than 30% energy compared with the traditional single furnace structure and plays a good heat preservation role. At the same time, the temperature increase in the heat-insulating and drying furnace 1 will also dry and preheat the quartz waste liquid bottle therein. During the drying stage, the temperature in the heat-insulating and drying furnace 1 is controlled at 150-200°C, and the rotary drying rack 3 rotates at a speed of 1r / min to ensure that the water evaporation rate on the surface of the waste liquid bottle is ≥0.5kg / h. The vacuum environment is also conducive to the rapid evaporation of liquid impurities on the surface of the quartz waste liquid bottle.

[0036] The technical scope of the present invention is not limited to the contents of the above description. Those skilled in the art can make various deformations and modifications to the above embodiments without departing from the technical idea of ​​the present invention, and these deformations and modifications should all fall within the protection scope of the present invention.

Claims

1. An energy-saving double-furnace vacuum sintering furnace for semiconductor quartz waste liquid bottles, characterized in that: include: A heat-insulating drying furnace (1) and a high-temperature sintering furnace (2), wherein the heat-insulating drying furnace (1) is sleeved outside the high-temperature sintering furnace (2), a rotating drying rack (3) is provided between the high-temperature sintering furnace (2) and the heat-insulating drying furnace (1), the heat-insulating drying furnace (1) is connected to a vacuum pump (4) through a pipeline, one side of the rotating drying rack (3) is rotatably connected to a first furnace door (5), the first furnace door (5) is transmission-connected to a first guide rail driving mechanism (6), a rotating sintering rack (7) is provided in the high-temperature sintering furnace (2), one side of the high-temperature sintering furnace (2) is fixedly connected to a second furnace door (9), and the second furnace door (9) is transmission-connected to a second guide rail driving mechanism (10).

2. The energy-saving double-furnace vacuum sintering furnace for semiconductor quartz waste liquid bottles according to claim 1, characterized in that: The first furnace door (5) and the second furnace door (9) are respectively located on both sides of the heat-insulating drying furnace (1), and the first furnace door (5) and the second furnace door (9) are sealed with the heat-insulating drying furnace (1) via high-temperature resistant rubber.

3. The energy-saving double-furnace vacuum sintering furnace for semiconductor quartz waste liquid bottles according to claim 1 is characterized in that: The rotary drying rack (3) comprises a rotary frame (301), the rotary frame (301) is rotatably connected to the first furnace door (5), and four groups of drying quartz boats (302) are rotatably connected to the rotary frame (301).

4. The energy-saving double-furnace vacuum sintering furnace for semiconductor quartz waste liquid bottles according to claim 1, characterized in that: The first guide rail driving mechanism (6) comprises a first screw guide rail (601), a first screw nut (602) being connected to the first screw guide rail (601) via a threaded transmission, a first fixing bracket (603) being fixedly connected to the first screw nut (602), the first fixing bracket (603) being fixedly connected to the first furnace door (5), and one end of the first screw guide rail (601) being connected to a first servo motor (604) via a synchronous belt transmission.

5. The energy-saving double-furnace vacuum sintering furnace for semiconductor quartz waste liquid bottles according to claim 4, characterized in that: Four first screw guide rails (601) are provided, and the four first screw guide rails (601) are parallel to each other. The four first screw guide rails (601) are respectively located above and below the first furnace door (5). Two groups of first fixing brackets (603) are provided, one group of first fixing brackets (603) is fixedly connected to the two first screw nuts (602) above the first furnace door (5), and the other group of first fixing brackets (603) is fixedly connected to the two first screw nuts (602) below the first furnace door (5).

6. The energy-saving double-furnace vacuum sintering furnace for semiconductor quartz waste liquid bottles according to claim 5 is characterized in that: Two first servo motors (604) are provided, and the two first screw guide rails (601) located above the first furnace door (5) are connected to one of the first servo motors (604) through a synchronous belt pulley transmission, and the two first screw guide rails (601) located below the first furnace door (5) are connected to the other first servo motor (604) through a synchronous belt pulley transmission.

7. The energy-saving double-furnace vacuum sintering furnace for semiconductor quartz waste liquid bottles according to claim 6, characterized in that: The high-temperature sintering furnace (2) comprises a first sintering furnace body (201) and a second sintering furnace body (202), wherein the first sintering furnace body (201) is rotatably connected to the second furnace door (9), and the second sintering furnace body (202) is rotatably connected to the first sintering furnace body (201) via a hinge.

8. The energy-saving double-furnace vacuum sintering furnace for semiconductor quartz waste liquid bottles according to claim 7, characterized in that: The rotating sintering frame (7) is rotatably connected to the second sintering furnace body (202), and four groups of sintering quartz boats (8) are rotatably connected to the rotating sintering frame (7).

9. The energy-saving double-furnace vacuum sintering furnace for semiconductor quartz waste liquid bottles according to claim 1, characterized in that: The second guide rail driving mechanism (10) comprises a second screw guide rail (1001), the second screw guide rail (1001) is connected to a second screw nut (1002) via a threaded transmission, the second screw nut (1002) is fixedly connected to a second fixed bracket (1003), the second fixed bracket (1003) is fixedly connected to the second furnace door (9), and one end of the second screw guide rail (1001) is connected to a second servo motor (1004) via a synchronous pulley transmission.

10. The energy-saving double-furnace vacuum sintering furnace for semiconductor quartz waste liquid bottles according to claim 9, characterized in that: Four second screw guide rails (1001) are provided, and the four second screw guide rails (1001) are parallel to each other. The four second screw guide rails (1001) are respectively located above and below the second furnace door (9). Two groups of second fixed brackets (1003) are provided, one group of second fixed brackets (1003) is fixedly connected to the two second screw nuts (1002) above the second furnace door (9), and the other group of second fixed brackets (1003) is fixedly connected to the two second screw nuts (1002) below the second furnace door (9). Two second servo motors (1004) are provided, and the two second screw guide rails (1001) located above the second furnace door (9) are transmission-connected to one of the second servo motors (1004) through a synchronous pulley drive, and the two second screw guide rails (1001) located below the second furnace door (9) are transmission-connected to the other second servo motor (1004) through a synchronous pulley drive.

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