An EBL feeding and discharging component and an EBL operation system

Abstract

The present application relates to the field of semiconductor manufacturing technology, and specifically discloses an EBL loading and unloading assembly and an EBL operating system. Among them, the EBL loading and unloading assembly includes a first chamber, a second chamber, a transplanting mechanism, and a first operating robot. The first chamber is provided with a first door body and a second door body that can be opened and closed; the second chamber is arranged adjacent to the first chamber, and a cleaning mechanism is provided in the second chamber. When the first door body is opened, the first chamber is connected to the outside, and the sample can be sent into the first chamber. When the second door body is opened, the first chamber is connected to the second chamber, and the sample can enter the second chamber from the first chamber. In the process of transferring the sample between the first chamber and the second chamber, only the second door body is opened and the first door body is kept in a closed state, so that the second chamber does not need to be directly connected to the outside during the sample injection and sample output process, thereby reducing the adjustment pressure of the cleaning mechanism in the second chamber and reducing its adjustment time.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, and in particular to an EBL inlet and outlet assembly and an EBL operating system. Background Art

[0002] Electron beam lithography (EBL) equipment is a nanofabrication technology that uses a focused electron beam to draw fine patterns on a substrate coated with electron-sensitive materials (such as photoresist). Its core principle is to achieve high-resolution graphic definition through the interaction between electrons and photoresist. It plays a key role in semiconductor manufacturing, nanodevice preparation and other fields.

[0003] EBL equipment is a nanoscale processing device, and the stability of its working environment has a significant impact on it. For example, when ambient temperature fluctuations cause the equipment's metal components to expand and contract, the position of the sample and the electron beam focal length can be affected. Furthermore, if the cleanliness level of the environment does not meet the required standards, there is a high risk that airborne particles will land on the sample surface, blocking the electron beam and causing localized under- or overexposure, resulting in pattern defects. Therefore, the workrooms used for EBL equipment are generally equipped with temperature and humidity control components and air purification systems.

[0004] In existing EBL equipment operating rooms, the process of delivering samples to the EBL is typically done manually. After the sample inlet door is opened, a worker transports the sample into the EBL room using a cart. After the sample is delivered, the worker must wait for the temperature, humidity, and cleanliness levels in the room to meet the required levels before continuing. This method, because opening the sample inlet door allows particles from the outside air to enter the room, affecting the temperature and humidity inside, requires high pressure and time for the temperature, humidity, and cleanliness control components, resulting in low efficiency. Summary of the Invention

[0005] In view of this, the purpose of this application is to provide an EBL feeding and discharging assembly and an EBL operation system, which are used to solve the problem that the existing method of delivering samples to EBL equipment has a great impact on the studio environment and affects the operation efficiency.

[0006] To achieve the above technical objectives, the present application provides, in a first aspect, an EBL feeding and discharging assembly, comprising: a first chamber, a second chamber, a transplanting mechanism, and a first operating manipulator;

[0007] The first chamber is provided with a first door body and a second door body that can be opened and closed;

[0008] The second chamber is arranged adjacent to the first chamber, and a cleaning mechanism is arranged in the second chamber;

[0009] When the first door is opened, the first chamber is connected to the outside;

[0010] When the second door is opened, the first chamber is connected to the second chamber;

[0011] When the first chamber is loaded with a sample, the first door is opened and the second door is closed, so that the sample enters the first chamber from the first door;

[0012] When the second chamber is loaded with a sample, the second door is opened and the first door is closed, so that the sample enters the second chamber from the first chamber;

[0013] When the sample is taken out of the second chamber, the second door is opened and the first door is closed, so that the sample enters the first chamber from the second chamber;

[0014] When the sample is taken out of the first chamber, the first door is opened and the second door is closed, so that the sample leaves the first chamber through the first door;

[0015] The transplanting mechanism is disposed in the first chamber and is used to transfer the sample between the first chamber and the second chamber;

[0016] The first operating robot is disposed in the second chamber and is used to remove the sample from the transplanting mechanism or place the sample on the transplanting mechanism.

[0017] Furthermore, the transplanting mechanism includes: a support base and a tray;

[0018] The support seat is arranged in the first cavity;

[0019] The tray is arranged on the support base so as to be reciprocatingly movable along a first direction;

[0020] The first chamber and the second chamber are arranged along the first direction.

[0021] Furthermore, the transplanting mechanism includes: a horizontal telescopic track;

[0022] The horizontal telescopic track is arranged on the support seat;

[0023] The horizontal telescopic track is capable of extending and retracting along the first direction;

[0024] The tray is arranged on the horizontal telescopic rail.

[0025] Furthermore, the horizontal telescopic track includes: a first-level horizontal platform, a second-level horizontal platform, a third-level horizontal platform and a horizontal driving member;

[0026] The third-level horizontal platform is slidably arranged on the second-level horizontal platform along the first direction;

[0027] The secondary horizontal platform is slidably arranged on the primary horizontal platform along the first direction;

[0028] The horizontal driving member is arranged on the first-level horizontal platform and is used to drive the third-level horizontal platform and the second-level horizontal platform to slide.

[0029] Furthermore, the horizontal telescopic track includes: a first conveyor belt and a second conveyor belt;

[0030] The first conveyor belt is operably arranged on the first-level horizontal platform;

[0031] The secondary horizontal platform is fixedly connected to the first conveyor belt;

[0032] A fixed block is provided on the first-level water platform;

[0033] The second conveyor belt is operably arranged on the secondary horizontal platform;

[0034] The second conveyor belt is fixedly connected to the fixed block and the third-level horizontal platform;

[0035] The output end of the horizontal driving member is connected to the first conveyor belt;

[0036] When the horizontal driving member is started, the first conveyor belt drives the secondary horizontal platform to slide along the first direction, and at the same time, the second conveyor belt drives the tertiary horizontal platform to slide along the first direction.

[0037] Furthermore, the support base can drive the tray to rise and fall.

[0038] Furthermore, the support base includes: a base, a first-level lifting platform, a second-level lifting platform and a lifting drive component;

[0039] The first-level lifting platform is slidably arranged on the base in a vertical direction;

[0040] The secondary lifting platform is slidably arranged on the primary lifting platform in a vertical direction;

[0041] The tray is connected to the secondary lifting platform;

[0042] The lifting drive member is arranged on the base and is used to drive the first-level lifting platform and the second-level lifting platform to slide.

[0043] Furthermore, the support base further comprises: a screw rod and a vertical conveyor belt;

[0044] The screw rod is rotatably arranged on the base and is engaged with the first-level lifting platform;

[0045] The vertical conveyor belt is operably arranged on the first-level lifting platform;

[0046] The vertical conveyor belt is fixedly connected to the base and the secondary lifting platform;

[0047] The output end of the lifting drive member is connected to the screw rod;

[0048] When the lifting drive member is started, the screw rod rotates to drive the first-level lifting platform to slide in the vertical direction, and at the same time, the vertical conveyor belt drives the second-level lifting platform to slide in the vertical direction.

[0049] Furthermore, a sample rack is provided in the first chamber;

[0050] The sample rack is used to place the sample;

[0051] The transfer mechanism is used to transfer the sample on the sample rack into the second chamber, or to transfer the sample from the second chamber to the sample rack.

[0052] Furthermore, the sample rack is provided with a plurality of sample support plates;

[0053] The sample support plate is used for placing the sample;

[0054] A plurality of the sample support plates are arranged at intervals along the vertical direction;

[0055] A hollow groove is provided in the middle of the sample support plate;

[0056] The tray can pass through the hollow slot.

[0057] Furthermore, it also includes: a changing table;

[0058] The changing table is used to place multiple robotic grippers;

[0059] The execution end of the first operating robot can be detachably connected to any of the robot claws.

[0060] Further, the plurality of said robotic grippers include: a tray gripper;

[0061] The sample is placed on a tray;

[0062] The first operating robot is used to clamp the tray after being connected to the tray clamp.

[0063] Furthermore, the tray clamp comprises: a first connecting seat and two supporting plates;

[0064] The two supporting plates are foldably arranged on the first connecting seat, and are used to clamp and hold up the material tray;

[0065] The first connecting seat is used to connect the execution end of the first operating robot.

[0066] Furthermore, the tray clamp comprises: a pressing plate;

[0067] The pressing plate is movably arranged on the first connecting seat, and the moving direction of the pressing plate is perpendicular to the opening and closing direction of the two supporting plates;

[0068] The pressing plate is used to press the material trays on the two supporting plates.

[0069] Furthermore, the plurality of said robotic grippers include: a film-taking gripper;

[0070] The first operating robot is used to obtain the sample from the material tray after being connected to the film-taking gripper.

[0071] Furthermore, the film-taking clamp comprises: a second connecting seat and a first suction cup;

[0072] The second connecting seat is used to connect to the execution end of the first operating robot;

[0073] The first suction cup is arranged on the second connecting seat, and is used for sucking the sample from the material tray.

[0074] Furthermore, the film-taking gripper includes a plurality of the first suction cups;

[0075] A plurality of the first suction cups are spaced apart and distributed around the second connecting seat;

[0076] Different first suction cups have suction openings of different sizes.

[0077] Furthermore, a slide rail is provided on the second connecting seat;

[0078] The first suction cup is slidably disposed on the slide rail;

[0079] An elastic buffer is connected between the first suction cup and the second connecting seat.

[0080] Furthermore, the film-taking clamp comprises: two clamping fingers;

[0081] The two clamping fingers are arranged on the second connecting seat in an openable and closable manner;

[0082] The ends of the clamping fingers are pointed.

[0083] A second aspect of the present application provides an EBL operation system, comprising any of the above-mentioned EBL loading and unloading components.

[0084] Furthermore, it also includes: a positioning workbench, an optical microscope workbench and an electron beam device;

[0085] The positioning workbench, the optical microscope workbench and the electron beam device are arranged in the second chamber;

[0086] The first operating robot in the EBL feeding and discharging assembly is arranged on the positioning working platform;

[0087] The positioning workbench is used to perform a fixing operation on the sample so that the sample is fixed on the sample tray;

[0088] The optical microscope workbench is used to perform inspection operations on the samples on the sample tray;

[0089] The electron beam device is used to perform an exposure operation on the sample on the sample disk after the inspection operation.

[0090] Furthermore, it also includes a second operating manipulator and a third operating manipulator;

[0091] The second operating robot is used to transfer the sample tray between the optical microscope operating table and the positioning operating table;

[0092] The third operating robot is used to transfer the sample tray between the positioning operating platform and the electron beam device.

[0093] As can be seen from the above technical solutions, the present application provides an EBL feed and discharge assembly and an EBL operating system. Among them, the EBL feed and discharge assembly includes a first chamber, a second chamber, a transplanting mechanism, and a first operating robot. The first chamber is provided with a first door body and a second door body that can be opened and closed; the second chamber is arranged adjacent to the first chamber, and a cleaning mechanism is provided in the second chamber. When the first door body is opened, the first chamber is connected to the outside, and the sample can be sent into the first chamber. When the second door body is opened, the first chamber is connected to the second chamber, and the sample can enter the second chamber from the first chamber.

[0094] During sample transfer between the first and second chambers, only the second door is opened, while the first door remains closed. This eliminates the need for direct external communication between the second chamber and the sample during the sample loading and unloading process. Consequently, after each sample loading or unloading, the only factors affecting the temperature, humidity, and cleanliness within the second chamber are those in the first chamber, reducing the pressure and time required to regulate the cleaning mechanism within the second chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0095] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0096] Figure 1 A schematic diagram of the overall structure of an EBL inlet and outlet assembly provided in an embodiment of the present application;

[0097] Figure 2 A schematic diagram of the first chamber-related components of an EBL loading and unloading assembly provided in an embodiment of the present application;

[0098] Figure 3 A schematic diagram of a positioning workbench in an EBL operation system provided in an embodiment of the present application;

[0099] Figure 4 A schematic diagram of a transplanting mechanism of an EBL inlet and outlet assembly provided in an embodiment of the present application;

[0100] Figure 5 A schematic diagram of an EBL inlet and outlet assembly in an extended state provided in an embodiment of the present application;

[0101] Figure 6 Another schematic diagram of an EBL inlet and outlet assembly in an extended state provided in an embodiment of the present application;

[0102] Figure 7 A schematic diagram of a tray clamp of an EBL inlet and outlet assembly provided in an embodiment of the present application;

[0103] Figure 8 A schematic diagram of a sheet-taking clamp of an EBL feeding and discharging assembly provided in an embodiment of the present application;

[0104] Figure 9 Another schematic diagram of a sheet-taking clamp of an EBL feeding and discharging assembly provided in an embodiment of the present application;

[0105] Figure 10 A schematic diagram of a film-taking clamp of an EBL feeding and discharging assembly provided in an embodiment of the present application when a protective housing is provided;

[0106] Figure 11 A schematic diagram of a suction port of an EBL inlet and outlet assembly provided in an embodiment of the present application;

[0107] Figure 12 A schematic diagram of the internal equipment of an EBL operating system provided in an embodiment of the present application;

[0108] In the picture:

[0109] 100, first chamber; 110, first door; 120, second door; 130, sample rack; 131, sample support plate; 132, hollow groove;

[0110] 200, second chamber;

[0111] 300, transplanting mechanism; 310, support base; 311, base; 312, first lifting platform; 313, second lifting platform; 314, lifting drive member; 315, screw rod; 316, vertical conveyor belt; 320, tray; 330, horizontal telescopic track; 331, first horizontal platform; 332, second horizontal platform; 333, horizontal drive member; 334, fixing block; 335, first conveyor belt; 336, second conveyor belt; 337, rotating shaft;

[0112] 410, first operating manipulator; 420, second operating manipulator; 430, third operating manipulator;

[0113] 500, changing table; 510, material tray clamp; 511, first connecting seat; 512, supporting plate; 513, pressing plate; 520, sheet removal clamp; 521, second connecting seat; 522, first suction cup; 523, slide rail; 524, elastic buffer; 525, clamping finger; 526, material suction port; 527, sealing ring; 528, protective housing;

[0114] 600, tray;

[0115] 700, positioning workbench; 710, sample tray;

[0116] 800, optical microscope workbench;

[0117] 900. Electron beam equipment;

[0118] X-axis direction: first direction. DETAILED DESCRIPTION

[0119] The following will clearly and completely describe the technical solutions of the embodiments of this application in conjunction with the accompanying drawings. Obviously, the embodiments described are part of the embodiments of this application, not all of them. Based on the embodiments in this specification, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection requested by this application.

[0120] In the description of the embodiments of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation. Therefore, they should not be understood as limiting the embodiments of the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and should not be understood as indicating or implying relative importance.

[0121] In the description of the embodiments of the present application, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, replaceable connections, or integral connections. They can also refer to mechanical connections or electrical connections. They can also refer to direct connections or indirect connections through an intermediate medium. They can also refer to internal connections between two components. For those skilled in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific circumstances.

[0122] See also Figures 1 to 3 In a first aspect, embodiments of the present application provide an EBL loading and unloading assembly capable of automating sample loading and unloading operations in a workroom equipped with an EBL device, while minimizing disturbances to the EBL device environment during loading and unloading. The sample refers to a wafer, chip, or silicon wafer placed on a tray 600. During loading and unloading, the wafer, chip, or silicon wafer is transported along the tray 600.

[0123] In this embodiment, the EBL loading and unloading assembly includes a first chamber 100, a second chamber 200, a transplanting mechanism 300, and a first operating robot 410. The first chamber 100 is equipped with a first door 110 and a second door 120 that can be opened and closed. The second chamber 200 is located adjacent to the first chamber 100 and contains a cleaning mechanism.

[0124] The second chamber 200 can serve as the chamber for EBL equipment operations, meaning that electron beam exposure operations can be performed within the second chamber 200. Accordingly, equipment related to EBL operations can also be located within the second chamber 200. The cleaning mechanism can utilize the temperature and humidity control and air purification components found in existing EBL workstations, specifically enabling the cleaning mechanism to regulate the air quality within the second chamber 200 to meet EBL operating requirements. The first chamber 100 serves as a transfer chamber for loading and unloading materials from the second chamber 200. When the first door 110 is open, the first chamber 100 communicates with the outside. When the second door 120 is open, the first chamber 100 communicates with the second chamber 200. When both the first door 110 and the second door 120 are closed, the first chamber 100 forms a sealed space that is not connected to the outside. The second chamber 200 can be provided with a door; when the door is open, personnel can enter the second chamber 200. When both the second door 120 and the door are closed, the second chamber 200 forms a sealed space, facilitating EBL equipment operation. A transfer mechanism 300 is located within the first chamber 100 and is used to transfer samples between the first chamber 100 and the second chamber 200. A first manipulator 410 is located within the second chamber 200 and is used to remove samples from or place them on the transfer mechanism 300.

[0125] Specifically, when loading the first chamber 100, the first door 110 is opened and the second door 120 is closed. The sample can then be transferred from the first door 110 into the first chamber 100, for example, by being placed on the transfer mechanism 300 within the first chamber 100. The loading of the first chamber 100 can be performed by an AGV located outside the first chamber 100 and the second chamber 200, or by a staff member manually transporting the sample into the first chamber 100.

[0126] When loading a sample into the second chamber 200, the second door 120 is open and the first door 110 is closed. The transfer mechanism 300 can then move the sample from the first chamber 100 into the second chamber 200. Because the first door 110 remains closed during the loading process, the external environment cannot directly disturb the second chamber 200. In other words, the only disturbances to the second chamber 200 come from the first chamber 100.

[0127] When unloading samples from the second chamber 200, the second door 120 opens and the first door 110 closes, allowing the samples to enter the first chamber 100 from the second chamber 200. The specific process may be, for example, that the transfer mechanism 300 extends into the second chamber 200, and then the first manipulator 410 transfers the samples to the transfer mechanism 300. The transfer mechanism 300 then retracts into the first chamber 100, completing the unloading of samples from the second chamber 200.

[0128] When the first chamber 100 takes out the sample, the first door 110 is opened and the second door 120 is closed, so that the sample leaves the first chamber 100 from the first door 110. The specific process may be that the manipulator on the AGV or the staff removes the sample from the transfer mechanism 300.

[0129] As can be seen from the above process, the second chamber 200 also does not need to be directly connected to the external environment during the process of discharging the sample from the second chamber 200. In the absence of re-injection of the sample, no new disturbance factors will be introduced into the second chamber 200.

[0130] In actual application, the first chamber 100 can be configured to have a width slightly larger than the size of the tray 600, for example, 35 cm, and its height can be configured to be slightly longer than the width, for example, 40-50 cm. One or more first operating manipulators 410, optical mirror equipment, electron beam equipment and other equipment need to be placed in the second chamber 200, and its width and length often need to be configured to be more than 4 m. Therefore, the internal space of the second chamber 200 is much larger than the first chamber 100. In this embodiment, the first chamber 100 can serve as a transfer room for samples to enter and exit, so that the environment in the second chamber 200 will not be directly disturbed by the external environment during the sampling process, thereby reducing interference with the samples and equipment in the second chamber 200 and improving the accuracy and stability of the operation. In addition, since the disturbance factor only comes from the first chamber 100, the disturbance amount of each sampling can be controlled within a certain range, so that the cleaning mechanism can more accurately adjust the internal environment of the second chamber 200, thereby reducing the adjustment pressure of the cleaning mechanism to adjust the temperature, humidity and cleanliness and improving the adjustment efficiency.

[0131] As an embodiment, when the first door 110 is closed, this solution can continue to use the cleaning mechanism in the second chamber 200 to adjust the internal environment of the first chamber 100 and the second chamber 200, so that the temperature, humidity and cleanliness of the two chambers are consistent. This method allows the solution to be applied to the existing EBL studio with minimal changes to the existing EBL studio, thereby reducing the cost of transformation. At the same time, during the operation, the samples after the operation is completed can be sent to the first chamber 100 for temporary placement until the operation of multiple samples is completed, and then the second door 120 is closed and the first door 110 is opened, so that the samples can be taken out from the first chamber 100 in turn, avoiding environmental fluctuations caused by frequent opening and closing of the door.

[0132] As an embodiment, the first door body 110 and the second door body 120 can be existing sliding door bodies. The opening and closing of the first door body 110 and the second door body 120 can be achieved by an electric drive device, and the first door body 110 and the second door body 120 can be provided with a seal to ensure the sealing when the door body is closed.

[0133] In this embodiment, the EBL loading and unloading assembly is connected to a central control processor. The central control processor is electrically connected to the first door 110, the second door 120, the transplanting mechanism 300, the first operating robot 410, and other electronic control devices. The automated operation of the EBL loading and unloading assembly can be controlled by the central control processor.

[0134] The EBL loading and unloading assembly provided in this embodiment enables automated sample loading and unloading operations for the second chamber 200, reducing staff involvement, thereby saving staff time and energy, and minimizing interference with samples and equipment. Furthermore, during the loading and unloading process, the first chamber 100 minimally disturbs the second chamber 200, effectively reducing the pressure and time required to regulate the cleaning mechanism, thereby improving operational efficiency and stability.

[0135] For more specific examples, see Figures 1 to 6 The transplanting mechanism 300 includes: a support base 310 and a tray 320; the tray 320 is used to hold the sample; the support base 310 is arranged in the first chamber 100; the tray 320 is arranged on the support base 310 so as to be reciprocatingly movable along the first direction; the first chamber 100 and the second chamber 200 are arranged along the first direction.

[0136] In this embodiment, the first direction can be Figure 1 The tray 320 can slide along the first direction into the second chamber 200, or it can slide along the first direction back into the first chamber 100. When loading samples into the first chamber 100, the sample tray 600 can be placed directly on the tray 320. Similarly, when unloading samples from the second chamber 200, the finished tray 600 can be transferred to the tray 320 by the robot.

[0137] In one embodiment, see Figures 1 to 6 The transplanting mechanism 300 includes: a horizontal telescopic rail 330; the horizontal telescopic rail 330 is arranged on the support base 310; the horizontal telescopic rail 330 can be telescoped along the first direction; and the tray 320 is arranged on the horizontal telescopic rail 330.

[0138] In this embodiment, the telescopic movement of the horizontal telescopic track 330 can be controlled by an electric drive device to ensure the precise movement of the tray 320. Correspondingly, the horizontal telescopic track 330 is electrically connected to the central control processor so that the central control processor can control the telescopic movement of the horizontal telescopic track 330.

[0139] As a further improvement, the horizontal telescopic rail 330 includes: a first-level horizontal platform 331, a second-level horizontal platform 332 and a horizontal driving member 333; the tray 320 is slidably arranged on the second-level horizontal platform 332 along the first direction; the second-level horizontal platform 332 is slidably arranged on the first-level horizontal platform 331 along the first direction; the horizontal driving member 333 is arranged on the first-level horizontal platform 331, for driving the tray 320 and the second-level horizontal platform 332 to slide.

[0140] The horizontal driving member 333 is electrically connected to the central control processor. When the horizontal driving member 333 is activated, it can drive the tray 320 and the secondary horizontal platform 332 to slide, thereby increasing the speed at which the tray 320 slides out in the first direction.

[0141] As an embodiment, the horizontal telescopic rail 330 includes: a first conveyor belt 335 and a second conveyor belt 336; the first conveyor belt 335 is operably arranged on the first horizontal platform 331; the second horizontal platform 332 is fixedly connected to the first conveyor belt 335; a fixed block 334 is provided on the first horizontal platform 331; the second conveyor belt 336 is operably arranged on the second horizontal platform 332; the second conveyor belt 336 is fixedly connected to the fixed block 334 and the tray 320; the output end of the horizontal driving member 333 is connected to the first conveyor belt 335; when the horizontal driving member 333 is started, the first conveyor belt 335 drives the second horizontal platform 332 to slide along the first direction, and at the same time, the second conveyor belt 336 drives the tray 320 to slide along the first direction.

[0142] In this embodiment, the first conveyor belt 335 being operably disposed on the first horizontal platform 331 means that the first conveyor belt 335 is capable of operating on the first horizontal platform 331. Specifically, two rotating shafts 337 may be provided on the first horizontal platform 331, and the first conveyor belt 335 is mounted on the two rotating shafts 337. Similarly, the second conveyor belt 336 is capable of operating on the second horizontal platform 332 and may be mounted on the two rotating shafts 337 on the second horizontal platform 332. The horizontal drive member 333 may be a servo motor, the output end of which is connected to the first conveyor belt 335 via the rotating shaft 337 on the first horizontal platform 331.

[0143] In this embodiment, when the horizontal drive member 333 is activated, the secondary horizontal platform 332 and the tray 320 slide out in the same direction. Specifically, when the horizontal drive member 333 rotates forward, it drives the first conveyor belt 335 to operate via the rotating shaft 337. Because the first conveyor belt 335 is fixedly connected to the secondary horizontal platform 332, the secondary horizontal platform 332 can slide out along the first direction following the first conveyor belt 335. At the same time, because the fixed block 334 on the first horizontal platform 331 is fixedly connected to the second conveyor belt 336, when the secondary horizontal platform 332 slides out, the second conveyor belt 336 that slides out along the secondary horizontal platform 332 will operate due to the action of the fixed block 334, causing it to drive the tray 320 to slide out synchronously. Similarly, when the horizontal drive member 333 is reversed, it can drive the secondary horizontal platform 332 and the tray 320 to slide back in the opposite direction into the first chamber 100.

[0144] This embodiment can improve the sliding speed of the tray 320 through the above structure, thereby improving the sample injection and sample removal rates.

[0145] In one embodiment, the support base 310 has a lifting function, so that it can drive the tray 320 to move up and down, so as to lift the tray 320 and realize the transportation of the tray 320 along multiple dimensions.

[0146] As an embodiment, the support seat 310 includes: a base 311, a first-level lifting platform 312, a second-level lifting platform 313 and a lifting drive 314; the first-level lifting platform 312 is slidably arranged on the base 311 along the vertical direction; the second-level lifting platform 313 is slidably arranged on the first-level lifting platform 312 along the vertical direction; the tray 320 is connected to the second-level lifting platform 313; the lifting drive 314 is arranged on the base 311, for driving the first-level lifting platform 312 and the second-level lifting platform 313 to slide.

[0147] In this embodiment, the lifting drive 314 is electrically connected to the central control processor. When the lifting drive 314 is activated, it can drive the first lifting platform 312 and the second lifting platform 313 to slide in the vertical direction, thereby increasing the lifting speed of the tray 320.

[0148] In a more specific embodiment, the support base 310 also includes: a screw rod 315 and a vertical conveyor belt 316; the screw rod 315 can be rotatably set on the base 311 and engaged with the first-level lifting platform 312; the vertical conveyor belt 316 can be operably set on the first-level lifting platform 312; the vertical conveyor belt 316 is fixedly connected to the base 311 and the second-level lifting platform 313; the output end of the lifting drive 314 is connected to the screw rod 315; when the lifting drive 314 is started, the screw rod 315 rotates and drives the first-level lifting platform 312 to slide in the vertical direction, and at the same time the vertical conveyor belt 316 drives the second-level lifting platform 313 to slide in the vertical direction.

[0149] The lifting drive 314 can be a servo motor; the lifting drive 314 can be connected to the screw 315 through a transmission structure such as a belt. When the output end of the lifting drive 314 rotates forward, it drives the screw 315 to rotate forward, and then the rotating screw 315 drives the first-level lifting platform 312 to rise in the vertical direction, while the vertical conveyor belt 316 rises synchronously with the first-level lifting platform 312. Since the vertical conveyor belt 316 is fixedly connected to the second-level lifting platform 313 and the base 311, the vertical conveyor belt 316 will run on the first-level lifting platform 312 during the rising process and drive the second-level lifting platform 313 to rise synchronously. Similarly, when the lifting drive 314 is reversed, it can drive the first-level lifting platform 312 and the second-level lifting platform 313 to slide down in the vertical direction.

[0150] In this embodiment, the cooperation of the above components can increase the lifting speed of the tray 320 when the lifting drive member 314 is started.

[0151] On the basis of the above embodiment, a sample rack 130 (such as Figure 4 As shown); the sample rack 130 is used to place samples; specifically, the sample rack 130 can be used to place the material tray 600; the transplanting mechanism 300 is used to transfer the samples on the sample rack 130 to the second chamber 200, or to transfer the samples from the second chamber 200 to the sample rack 130.

[0152] As an embodiment, the sample rack 130 is provided with a plurality of sample support plates 131; the sample support plates 131 are used for placing samples; the plurality of sample support plates 131 are arranged at intervals along the vertical direction; a hollow groove 132 is provided in the middle of the sample support plate 131; the tray 320 can pass through the hollow groove 132 along the vertical direction, while the material tray 600 cannot pass through the hollow groove 132 along the vertical direction.

[0153] During the sample loading and unloading process, the material tray 600 for placing samples can be stored on the sample rack 130, and multiple material trays 600 can be placed through multiple sample support plates 131.

[0154] The transfer mechanism 300 is located below the sample rack 130. When the tray 320 is ready to lift the material tray 600, the support base 310 drives the tray 320 upward until it passes through the hollow slot 132, lifting the material tray 600 located at the bottom of the sample rack 130. The tray 320 then slides out in the first direction, transferring the material tray 600 to the second chamber 200. Similarly, when transferring the material tray 600 from the second chamber 200 to the sample rack 130, the tray 320 extends into the second chamber 200, and the first operating robot 410 places the material tray 600 on the tray 320. The tray 320 then slides back in the opposite direction to above the sample support plate 131, driving the material tray 600 down to be placed on the empty and topmost sample support plate 131.

[0155] In one embodiment, see Figures 1 to 7 This solution also includes: a changeover table 500; the changeover table 500 is used to place multiple robotic claws; the execution end of the first operating robot 410 can be detachably connected to any robotic claw.

[0156] When the first operation manipulator 410 is replaced with a different manipulator claw, different operations can be performed. Each manipulator claw is provided with a quick-change interface that can be quickly replaced with the execution end.

[0157] In one embodiment, see Figure 7 , multiple robot claws include: a tray clamp 510; the first operating robot 410 is used to clamp the tray 600 after connecting to the tray clamp 510.

[0158] In this embodiment, an opening and closing drive member is provided on the tray clamping jaw 510. The opening and closing drive member can be, for example, a cylinder. The opening and closing drive member can control the tray clamping jaw 510 to open and close the clamping.

[0159] Furthermore, the tray clamp 510 includes: a first connecting seat 511 and two supporting plates 512; the two supporting plates 512 can be opened and closed on the first connecting seat 511, for clamping and supporting the tray 600; the first connecting seat 511 is used to connect to the execution end of the first operating robot 410.

[0160] In this embodiment, the side of the support plate 512 is L-shaped, so that the support plate 512 can lift the lower part of the material tray 600 when clamping the material tray 600, thereby improving the stability of the clamping. The two support plates 512 are connected to the above-mentioned opening and closing drive member to control the opening and closing of the two support plates 512 through the opening and closing drive member.

[0161] Optionally, the tray clamp 510 includes: a pressure plate 513; the pressure plate 513 is movably arranged on the first connecting seat 511, and the moving direction of the pressure plate 513 is perpendicular to the opening and closing direction of the two support plates 512; the pressure plate 513 is used to press the tray 600 on the two support plates 512.

[0162] Correspondingly, a pressure plate driver is provided on the first connecting base 511; this driver drives the pressure plate 513 upward and downward. In this embodiment, assuming the support plate 512 opens and closes horizontally, the pressure plate 513 can move vertically. After the support plate 512 clamps the two sides of the tray 600, the pressure plate 513 can press down to press the top surface of the tray 600, improving the stability of the tray 600 during transportation.

[0163] In this embodiment, pressure posts may be provided at the corners of the bottom surface of the pressure plate 513. When the pressure plate 513 is pressed downward, the pressure posts abut against the side edges of the top surface of the tray 600, thereby pressing the tray 600 tightly without damaging the wafers, chips, or silicon chips on the tray 600.

[0164] In one embodiment, see Figures 8 to 11 , multiple robot claws include: a film-taking claw 520; the first operating robot 410 is used to obtain the sample from the material tray 600 after connecting to the film-taking claw 520.

[0165] The chip-taking gripper 520 can obtain the wafer, disk or silicon chip on the tray 600 after the tray 600 is placed.

[0166] As an embodiment, the film-picking clamp 520 includes: a second connecting seat 521 and a first suction cup 522; the second connecting seat 521 is used to connect to the execution end of the first operating robot 410; the first suction cup 522 is arranged on the second connecting seat 521, and is used to suck the sample from the material tray 600.

[0167] The damage to the sample can be reduced by suction. In this embodiment, a small vacuum pump is provided on the first suction cup 522. When the vacuum pump is started, the first suction cup 522 can generate a vacuum adsorption force. Among them, the suction cup structure with a vacuum pump belongs to the prior art and is not described in detail in this embodiment. It should be noted that the vacuum pump can be electrically connected to the above-mentioned central control processor.

[0168] Optionally, the film-taking clamping claw 520 includes a plurality of first suction cups 522 ; the plurality of first suction cups 522 are spaced apart and distributed around the second connecting seat 521 ; and different first suction cups 522 have suction ports 526 of different sizes.

[0169] In this embodiment, please refer to Figure 8 Taking the case where there are two first suction cups 522 as an example, the two first suction cups 522 can be arranged at a 90° interval.

[0170] In this embodiment, the front view of the suction port 526 is as follows Figure 11 As shown; a sealing ring 527 is provided on the outer periphery of the suction port 526 to enhance its adsorption effect.

[0171] The plurality of first suction cups 522 can enable the film taking gripper 520 to take samples of various sizes.

[0172] In one embodiment, a slide rail 523 is provided on the second connecting seat 521 ; the first suction cup 522 is slidably provided on the slide rail 523 ; and an elastic buffer 524 is connected between the first suction cup 522 and the second connecting seat 521 .

[0173] The slide rail 523 enables the first suction cup 522 to slide. After the first suction cup 522 contacts the sample, it can slide along the slide rail 523 away from the sample, reducing the impact on the sample when contacting it and preventing damage to the sample. At the same time, the elastic buffer 524 allows the first suction cup 522 to return to the state of contacting the sample after sliding away from the sample, ensuring the adsorption of the sample.

[0174] As an implementation, the elastic buffer 524 may be an elastic column.

[0175] As an implementation, see Figure 9 and Figure 10 A protective shell 528 may be provided on the outer periphery of the first suction cup 522 to protect the components on the first suction cup 522 .

[0176] In one embodiment, the film-taking clamping claw 520 includes two clamping fingers 525 . The two clamping fingers 525 are disposed on the second connecting seat 521 in an openable and closable manner. The ends of the clamping fingers 525 are pointed.

[0177] A second opening and closing drive may be provided on the second connecting seat 521. The opening and closing of the clamping finger 525 is controlled by the second opening and closing drive. After the sample is introduced, the first operating manipulator 410 needs to remove the sample from the material tray 600 and then transfer it to the sample tray 710. This part of the transfer work can be performed by the first suction cup 522. After the sample is placed on the sample tray 710, it is necessary to operate the components on the sample tray 710 (the sample tray is the prior art) to fix the sample. To this end, in this embodiment, the clamping finger 525 can clamp and push and pull the components on the sample tray 710 to control the components on the sample tray 710, thereby realizing the sample loading and fixing operations without replacing the manipulator claws.

[0178] Specifically, the sample tray 710 is generally provided with a fixed first stopper and a movable second stopper. After the sample is loaded, one side of the sample abuts the first stopper, and then the second stopper moves to abut the other side of the sample. Then the first operating manipulator 410 replaces the manipulator claw to tighten the bolts on the second stopper to fix the second stopper. After the operation is completed, the sample is fixedly clamped between the first stopper and the second stopper. Before tightening the second stopper, the position of the sample after loading often needs to be fine-tuned, and the position of the second stopper needs to be moved. In this embodiment, the clamping finger 525 can push the sample to move slightly to fine-tune the position of the sample, and at the same time can push, pull, clamp, and press the second stopper to adjust the position of the second stopper.

[0179] In one embodiment, the first operating manipulators 410 include multiple, for example, two, first operating manipulators 410. After one first operating manipulator 410 adjusts the position of the sample and the second stopper, the other first operating manipulator 410 can replace the manipulator claw capable of tightening the bolt, and then the gripper finger 525 presses the second stopper while the other first operating manipulator 410 tightens the bolt.

[0180] The second aspect of the present application provides an EBL operating system. Figures 1 to 12 , which includes any of the above EBL inlet and outlet components.

[0181] In a more specific embodiment, the EBL operating system also includes: a positioning workbench 700, an optical microscope workbench 800 and an electron beam device 900; the positioning workbench 700, the optical microscope workbench 800 and the electron beam device 900 are arranged in the second chamber 200; the first operating robot 410 in the EBL feeding and unloading assembly is arranged on the positioning workbench 700; the positioning workbench 700 is used to perform a fixing operation on the sample so that the sample is fixed on the sample tray 710; the optical microscope workbench 800 is used to perform a detection operation on the sample on the sample tray 710; the electron beam device 900 is used to perform an exposure operation on the sample on the sample tray 710 after the detection operation.

[0182] Furthermore, it also includes a second operating robot 420 and a third operating robot 430; the second operating robot 420 is used to transfer the sample tray 710 between the optical microscope workbench 800 and the positioning workbench 700; the third operating robot 430 is used to transfer the sample tray 710 between the positioning workbench 700 and the electron beam device 900.

[0183] In this embodiment, a flower basket can be provided on the positioning workbench 700. After the sample plate is inspected, the first operation robot 410 can transfer the sample plate 710 to the flower basket, distributing it vertically. The third operation robot 430 then transfers the flower basket to the electron beam device 900 for exposure.

[0184] In the EBL operation system provided in this embodiment, the staff does not need to enter the clean room. They only need to hand over the material tray 600 loaded with samples to the mobile cart robot outside the laboratory. All subsequent operations are completed automatically by the system, which can improve the scientific research efficiency of the staff and at the same time improve the stability of the internal environment in the system.

[0185] The above are only preferred embodiments of the present application and are not intended to limit the present invention. Although the present application has been described in detail with reference to examples, those skilled in the art can still modify the technical solutions described in the aforementioned examples or make equivalent replacements for some of the technical features therein. However, any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present application should be included in the scope of protection of the present application.

Claims

1. An EBL inlet and outlet assembly, characterized in that: include: A first chamber (100), a second chamber (200), a transplanting mechanism (300), and a first operating manipulator (410); The first chamber (100) is provided with a first door (110) and a second door (120) that can be opened and closed; The second chamber (200) is arranged adjacent to the first chamber (100), and a cleaning mechanism is provided in the second chamber (200); When the first door (110) is opened, the first chamber (100) is in communication with the outside; When the second door (120) is opened, the first chamber (100) is communicated with the second chamber (200); When the first chamber (100) is filled with a sample, the first door (110) is opened and the second door (120) is closed, so that the sample enters the first chamber (100) from the first door (110); When the second chamber (200) is filled with a sample, the second door (120) is opened and the first door (110) is closed, so that the sample piece enters the second chamber (200) from the first chamber (100); When the sample is taken out of the second chamber (200), the second door (120) is opened and the first door (110) is closed, so that the sample enters the first chamber (100) from the second chamber (200); When the sample is taken out of the first chamber (100), the first door (110) is opened and the second door (120) is closed, so that the sample leaves the first chamber (100) through the first door (110); The transplanting mechanism (300) is disposed in the first chamber (100) and is used to transfer the sample between the first chamber (100) and the second chamber (200); The first operating manipulator (410) is disposed in the second chamber (200) and is used to remove the sample from the transplanting mechanism (300) or place the sample on the transplanting mechanism (300); The transplanting mechanism (300) comprises: a support base (310) and a tray (320); The tray (320) is used to hold the sample; The support seat (310) is disposed in the first chamber (100); The tray (320) is arranged on the support seat (310) so as to be reciprocally movable along a first direction; The first chamber (100) and the second chamber (200) are arranged along the first direction; The support base (310) can drive the tray (320) to rise and fall; A sample rack (130) is provided in the first chamber (100); The sample rack (130) is used to place the sample; The transfer mechanism (300) is used to transfer the sample on the sample rack (130) into the second chamber (200), or to transfer the sample from the second chamber (200) to the sample rack (130); The sample rack (130) is provided with a plurality of sample support plates (131); The sample support plate (131) is used for placing the sample; A plurality of sample support plates (131) are arranged at intervals along the vertical direction; A hollow groove (132) is provided in the middle of the sample support plate (131); The tray (320) is capable of passing through the hollow slot (132).

2. The EBL inlet and outlet assembly according to claim 1, characterized in that: The transplanting mechanism (300) comprises: a horizontal telescopic track (330); The horizontal telescopic rail (330) is arranged on the support seat (310); The horizontal telescopic track (330) is telescopic along the first direction; The tray (320) is arranged on the horizontal telescopic rail (330).

3. The EBL inlet and outlet assembly according to claim 2, characterized in that: The horizontal telescopic track (330) comprises: a first-level horizontal platform (331), a second-level horizontal platform (332) and a horizontal driving member (333); The tray (320) is slidably disposed on the secondary horizontal platform (332) along the first direction; The secondary horizontal platform (332) is slidably arranged on the primary horizontal platform (331) along the first direction; The horizontal driving member (333) is provided on the first-level horizontal platform (331) and is used to drive the tray (320) and the second-level horizontal platform (332) to slide.

4. The EBL inlet and outlet assembly according to claim 3, characterized in that: The horizontal telescopic track (330) comprises: a first conveyor belt (335) and a second conveyor belt (336); The first conveyor belt (335) is operably arranged on the first-level horizontal platform (331); The secondary horizontal platform (332) is fixedly connected to the first conveyor belt (335); A fixing block (334) is provided on the first-level horizontal platform (331); The second conveyor belt (336) is operably arranged on the secondary horizontal platform (332); The second conveyor belt (336) is fixedly connected to the fixed block (334) and the tray (320); The output end of the horizontal driving member (333) is connected to the first conveyor belt (335); When the horizontal driving member (333) is started, the first conveyor belt (335) drives the secondary horizontal platform (332) to slide along the first direction, and at the same time, the second conveyor belt (336) drives the tray (320) to slide along the first direction.

5. The EBL inlet and outlet assembly according to claim 1, characterized in that: The support base (310) comprises: a base (311), a first-level lifting platform (312), a second-level lifting platform (313) and a lifting drive member (314); The first-level lifting platform (312) is slidably arranged on the base (311) in a vertical direction; The secondary lifting platform (313) is slidably arranged on the primary lifting platform (312) in a vertical direction; The tray (320) is connected to the secondary lifting platform (313); The lifting drive member (314) is arranged on the base (311) and is used to drive the first-level lifting platform (312) and the second-level lifting platform (313) to slide.

6. The EBL inlet and outlet assembly according to claim 5, characterized in that: The support base (310) further includes: a screw rod (315) and a vertical conveyor belt (316); The screw rod (315) is rotatably arranged on the base (311) and is engaged and connected with the first-level lifting platform (312); The vertical conveyor belt (316) is operably arranged on the first-level lifting platform (312); The vertical conveyor belt (316) is fixedly connected to the base (311) and the secondary lifting platform (313); The output end of the lifting drive member (314) is connected to the screw rod (315); When the lifting drive member (314) is started, the screw rod (315) rotates to drive the first-level lifting platform (312) to slide in the vertical direction, and at the same time, the vertical conveyor belt (316) drives the second-level lifting platform (313) to slide in the vertical direction.

7. The EBL inlet and outlet assembly according to claim 1, characterized in that: Also includes: Changing table (500); The changing table (500) is used to place a plurality of robotic grippers; The execution end of the first operating robot (410) can be detachably connected to any one of the robot claws.

8. The EBL inlet and outlet assembly according to claim 7, characterized in that: The plurality of mechanical grippers include: a tray gripper (510); The sample is placed on a tray (600); The first operating robot (410) is used to clamp the material tray (600) after being connected to the material tray clamp (510).

9. The EBL inlet and outlet assembly according to claim 8, characterized in that: The tray clamp (510) comprises: a first connecting seat (511) and two supporting plates (512); The two supporting plates (512) are foldably arranged on the first connecting seat (511) and are used to clamp and hold up the material tray (600); The first connecting seat (511) is used to connect to the execution end of the first operating robot (410).

10. The EBL inlet and outlet assembly according to claim 9, characterized in that: The tray clamp (510) comprises: a pressing plate (513); The pressing plate (513) is movably arranged on the first connecting seat (511), and the moving direction of the pressing plate (513) is perpendicular to the opening and closing direction of the two supporting plates (512); The pressing plate (513) is used to press the material tray (600) on the two supporting plates (512).

11. The EBL inlet and outlet assembly according to any one of claims 8 to 10, characterized in that: The plurality of mechanical grippers include: a film-taking gripper (520); The first operating robot (410) is used to obtain the sample from the material tray (600) after being connected to the film-taking gripper (520).

12. The EBL inlet and outlet assembly according to claim 11, characterized in that: The film-taking clamping claw (520) comprises: a second connecting seat (521) and a first suction cup (522); The second connecting seat (521) is used to connect to the execution end of the first operating robot (410); The first suction cup (522) is arranged on the second connecting seat (521) and is used to suck the sample from the material tray (600).

13. The EBL inlet and outlet assembly according to claim 12, characterized in that: The film-taking clamp (520) comprises a plurality of the first suction cups (522); A plurality of the first suction cups (522) are distributed at intervals around the second connecting seat (521); Different first suction cups (522) have suction ports (526) of different sizes.

14. The EBL inlet and outlet assembly according to claim 12, characterized in that: A slide rail (523) is provided on the second connecting seat (521); The first suction cup (522) is slidably disposed on the slide rail (523); An elastic buffer (524) is connected between the first suction cup (522) and the second connecting seat (521).

15. The EBL inlet and outlet assembly according to claim 12, characterized in that: The film-taking clamping claw (520) comprises: two clamping fingers (525); The two clamping fingers (525) are arranged on the second connecting seat (521) in an openable and closable manner; The end of the clamping finger (525) is a pointed end.

16. An EBL operation system, characterized in that: The EBL inlet and outlet assembly comprises the EBL inlet and outlet assembly according to any one of claims 1 to 10.

17. The EBL operation system according to claim 16, characterized in that: Also includes: A positioning workbench (700), an optical microscope workbench (800), and an electron beam device (900); The positioning workbench (700), the optical microscope workbench (800), and the electron beam device (900) are arranged in the second chamber (200); The first operating robot (410) in the EBL feeding and discharging assembly is arranged on the positioning operation platform (700); The positioning operation table (700) is used to perform a fixing operation on the sample, so that the sample is fixed on the sample plate (710); The optical microscope workbench (800) is used to perform inspection operations on the sample on the sample tray (710); The electron beam device (900) is used to perform an exposure operation on the sample on the sample disk (710) after the detection operation.

18. The EBL operation system according to claim 17, characterized in that: Also includes a second operating robot (420) and a third operating robot (430); The second operating robot (420) is used to transfer the sample tray (710) between the optical microscope operating table (800) and the positioning operating table (700); The third operating robot (430) is used to transfer the sample tray (710) between the positioning operating platform (700) and the electron beam device (900).

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