Light-transmitting substrate and glass substrate surface treatment method

Abstract

The invention provides a light-transmitting substrate and a glass substrate surface treatment method. The glass substrate surface treatment method comprises the following steps: providing a glass substrate; coating the surface of the glass substrate with an alkyl compound to form a protective film, wherein the alkyl compound comprises polyethylene glycol or polytetrahydrofuran; and curing the protective film to form a cured film. Correspondingly, the invention also provides a light-transmitting substrate prepared by adopting the surface treatment method of the glass substrate, and the technical problems that the glass substrate in the prior art is easy to pollute in the long-term storage or transportation process, and even the surface of the glass substrate is easy to scratch in the transportation process can be effectively solved.

Description

Technical Field

[0001] The present invention relates to the technical field of integrated circuit manufacturing, and in particular to a light-transmitting substrate and a surface treatment method for a glass substrate. Background Art

[0002] Glass substrates are widely used in integrated circuit manufacturing due to their excellent transparency, chemical stability, and high-temperature resistance. However, their surfaces are susceptible to airborne contaminants, such as dust, moisture, and chemical gases. These contaminants adhere to the glass substrate, causing surface contamination or curing reactions with the substrate, impacting product quality.

[0003] In general, existing technologies commonly use physical and chemical cleaning methods to remove contaminants from the surface of glass substrates, such as ultrasonic cleaning, acid cleaning, and alkaline cleaning. However, while these cleaning methods can remove contaminants from the surface of glass substrates to a certain extent, they cannot completely prevent the adhesion of contaminants. During long-term storage or transportation, the presence of hydroxyl groups on the surface of the glass substrates makes the surface hydrophilic, making the glass substrates susceptible to airborne contaminants and prone to re-contamination. Adherent particles can even cause surface scratches during transportation, seriously affecting product quality.

[0004] Therefore, there is a technical problem in the prior art that the glass substrate is easily contaminated during long-term storage or transportation, and even easily scratched during transportation. Summary of the Invention

[0005] The object of the present invention is to provide a light-transmitting substrate and a surface treatment method for a glass substrate, so as to solve the technical problem in the prior art that the glass substrate is easily contaminated during long-term storage or transportation, and even easily causes surface scratches during transportation.

[0006] In order to solve the above technical problems, the present invention provides a light-transmitting substrate, comprising: A glass substrate and a cured film are provided. The cured film is formed on the surface of the glass substrate. The cured film is formed of an alkyl compound. The alkyl compound includes polyethylene glycol or polytetramethylene glycol.

[0007] Based on the same inventive concept, the present invention also provides a method for treating the surface of a glass substrate, comprising the following steps: providing a glass substrate; Coating an alkyl compound on the surface of a glass substrate to form a protective film, wherein the alkyl compound includes polyethylene glycol or polytetrahydrofuran; The protective film is cured to form a cured film.

[0008] Optionally, in the glass substrate surface treatment method, the step of coating an alkyl compound on the surface of the glass substrate to form a protective film includes: Add a drop of alkyl compound solution to the center of the glass substrate; The glass substrate is rotated to spread the alkyl compound solution, thereby forming a protective film on the surface of the glass substrate.

[0009] Optionally, in the glass substrate surface treatment method, the step of coating an alkyl compound on the surface of the glass substrate to form a protective film includes: The alkyl compound solution is sprayed onto the surface of the glass substrate to form a protective film on the surface of the glass substrate.

[0010] Optionally, in the glass substrate surface treatment method, the step of coating an alkyl compound on the surface of the glass substrate to form a protective film includes: Disperse the alkyl compound solution in a dispersant and maintain a constant temperature of 30°C to 35°C; The glass substrate is immersed in the dispersed alkyl compound solution for 1 to 3 minutes and then taken out to form a protective film on the surface of the glass substrate.

[0011] Optionally, in the glass substrate surface treatment method, the step of curing the protective film includes: The glass substrate with the protective film is subjected to heat treatment and constant temperature drying at a temperature of 85°C to 95°C for 3 minutes to 5 minutes; or, The surface of the glass substrate with the protective film formed thereon is continuously irradiated with UV light for 5 to 8 minutes.

[0012] Optionally, in the glass substrate surface treatment method, the thickness of the protective film is 100 nm to 600 nm.

[0013] Optionally, in the glass substrate surface treatment method, after the step of curing the protective film, the method further includes: removing the cured film using a strong oxidant.

[0014] Optionally, in the glass substrate surface treatment method, before the step of removing the cured film with a strong oxidant, the method further includes: cleaning the glass substrate with an organic solvent to remove contaminants attached to the cured film.

[0015] Optionally, in the glass substrate surface treatment method, after the step of removing the cured film using a strong oxidant, the method further comprises: The glass substrate is rinsed with deionized water; The glass substrate is dried.

[0016] The above-mentioned glass substrate surface treatment method forms a cured film on the surface of the glass substrate to produce the above-mentioned light-transmitting substrate. The cured film is formed on the surface of the glass substrate, which prevents the surface of the glass substrate from direct contact with pollutants in the air, effectively reduces the possibility of contamination of the glass substrate surface, and thus improves product quality. At the same time, the cured film is composed of an alkyl compound, and the alkyl chain in the alkyl compound is non-polar. The cured film of the alkyl compound has good hydrophobicity, which can effectively block the invasion of pollutants in the air and prevent the occurrence of a curing reaction on the substrate surface. Therefore, the difficulty and frequency of cleaning pollutants on the surface of the glass substrate can be reduced, the use of cleaning equipment and chemicals can be reduced, the cleaning cost and time can be reduced, and production efficiency can be improved. At the same time, it also avoids damage to the glass substrate caused by using acidic or alkaline chemicals to clean it, and effectively protects the integrity of the glass substrate surface.

[0017] Furthermore, the cured film is composed of an alkyl compound. The van der Waals force between the alkyl chains in the alkyl compound gives the film a certain mechanical strength, and after being heated to strengthen the curing, it can protect the glass substrate from being scratched by pollutants during transportation, effectively avoid physical damage such as scratches, and further protect the integrity of the glass substrate surface. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 is a schematic structural diagram of a light-transmitting substrate according to an embodiment; Figure 2 FIG. 1 is a schematic diagram of a process for treating a surface of a glass substrate according to an embodiment of the present invention.

[0019] Description of reference numerals: 100 - light-transmitting substrate, 101 - glass substrate, 102 - cured film. DETAILED DESCRIPTION

[0020] In the following description, numerous specific details are provided to provide a more thorough understanding of the present invention. However, it will be apparent to those skilled in the art that the present invention can be practiced without one or more of these details. In other instances, certain technical features known in the art have not been described to avoid confusion with the present invention. It should be understood that the present invention can be implemented in various forms and should not be construed as limited to the embodiments presented herein. Rather, these embodiments are provided to make the disclosure thorough and complete and to fully convey the scope of the present invention to those skilled in the art. Throughout, the same reference numerals represent the same elements. It should be understood that when a layer is referred to as being formed on another layer, it may be formed directly on the other layer or with an intervening film layer. Terms such as "upper," "lower," "front," and "back" indicate orientations or positional relationships based on those shown in the accompanying drawings and are intended solely for ease of description and simplification of the present invention. They are not intended to indicate or imply that the device or element referred to must have, be constructed, or operate in a specific orientation and are not intended to limit the present invention. "Longitudinal" refers to a direction perpendicular to the substrate surface, and "transverse" refers to a direction parallel to the substrate surface. When used herein, the singular forms "a", "an" and "said / the" are also intended to include the plural forms, unless the context clearly indicates otherwise. It should also be understood that the term "including" is used to determine the presence of possible features, steps, operations, elements and / or parts, but does not exclude the presence or addition of one or more other features, steps, operations, elements, parts and / or groups. When used herein, the term "and / or" includes any and all combinations of the relevant listed items. The terms "same", "equal" and "consistent" include the meanings of completely equal and identical, and may also include the meanings of approximately the same or approximately equal under allowed process errors. The terms "first" "second" and the like in the specification are used to distinguish between similar elements and are not necessarily used to describe a specific order or time sequence. It is to be understood that, where appropriate, these terms used in this way are interchangeable, for example, allowing the embodiments of the present invention described herein to operate in an order other than that described or shown herein. Similarly, if a method described herein includes a series of steps, the order in which the steps are presented herein is not necessarily the only order in which the steps may be performed, and some of the steps described may be omitted and / or other steps not described herein may be added to the method. If components in one figure are identical to components in other figures, these components are readily identifiable in all figures, but for the sake of clarity in the description of the figures, this specification will not label all identical components in every figure.

[0021] The present invention will be described more clearly and completely below by way of examples in conjunction with the accompanying drawings, but the present invention is not limited to the scope of the following examples.

[0022] See also Figure 1 In one embodiment, a light-transmitting substrate 100 includes a glass substrate 101 and a cured film 102 . The cured film 102 is formed on a surface of the glass substrate 101 and is formed of an alkyl compound. The alkyl compound includes polyethylene glycol or polytetrahydrofuran.

[0023] Specifically, the glass substrate 101 may be various transparent substrates (such as sapphire glass, glass, etc.). Preferably, the glass substrate 101 is a quartz glass substrate used in semiconductor and LCD processes.

[0024] The light-transmitting substrate of this embodiment forms a cured film on the surface of the glass substrate. The cured film formed on the surface of the glass substrate prevents the surface of the glass substrate from direct contact with pollutants in the air, effectively reducing the possibility of contamination of the glass substrate surface, thereby improving product quality. At the same time, the cured film is composed of an alkyl compound. The alkyl chain in the alkyl compound is non-polar. The cured film of the alkyl compound has good hydrophobic properties, which can effectively block the intrusion of pollutants in the air and prevent the occurrence of a curing reaction on the substrate surface. This can reduce the difficulty and frequency of cleaning contaminants on the glass substrate surface, reduce the use of cleaning equipment and chemicals, reduce cleaning costs and time, and improve production efficiency. At the same time, it also avoids damage to the glass substrate caused by cleaning with chemical substances such as acid or alkaline, effectively protecting the integrity of the glass substrate surface.

[0025] Furthermore, the cured film is composed of an alkyl compound. The van der Waals force between the alkyl chains in the alkyl compound gives the film a certain mechanical strength, and after being heated to strengthen the curing, it can protect the glass substrate from being scratched by pollutants during transportation, effectively avoid physical damage such as scratches, and further protect the integrity of the glass substrate surface.

[0026] In summary, compared with the prior art, the light-transmitting substrate of this embodiment can effectively solve the technical problems in the prior art that the glass substrate is easily contaminated during long-term storage or transportation, and even easily causes surface scratches during transportation. It has the beneficial effects of effectively protecting the integrity of the glass substrate surface, improving the quality of the glass substrate product, reducing cleaning costs, and improving production efficiency.

[0027] See also Figure 2 The present invention also provides a method for treating the surface of a glass substrate, comprising the following steps: Step S1: providing a glass substrate.

[0028] Specifically, the glass substrate is used as a bottom plate for photomask bases of various sizes. The shape of the glass substrate is not limited and can be square, round, etc.

[0029] Step S2: coating an alkyl compound on the surface of the glass substrate to form a protective film, wherein the alkyl compound includes polyethylene glycol or polytetrahydrofuran.

[0030] Specifically, the alkyl compound is dissolved in an organic solvent (such as acetone, tetrahydrofuran, etc.) to prepare an alkyl compound solution, and then the alkyl compound solution is coated on the surface of the glass substrate to form a protective film on the surface of the glass substrate.

[0031] Step S3: curing the protective film to form a cured film.

[0032] The glass substrate surface treatment method of this embodiment forms a cured film on the surface of a glass substrate to produce the aforementioned light-transmitting substrate. The cured film formed on the surface of the glass substrate prevents direct contact between the glass substrate surface and pollutants in the air, effectively reducing the possibility of surface contamination of the glass substrate, thereby improving product quality. Furthermore, the cured film is composed of an alkyl compound, in which the alkyl chain is non-polar. The cured film of the alkyl compound has excellent hydrophobic properties, effectively blocking the intrusion of pollutants in the air and preventing a curing reaction from occurring on the substrate surface. This reduces the difficulty and frequency of cleaning contaminants from the glass substrate surface, reduces the use of cleaning equipment and chemicals, reduces cleaning costs and time, and improves production efficiency. Furthermore, the cured film avoids damage to the glass substrate caused by cleaning with acidic or alkaline chemicals, effectively protecting the integrity of the glass substrate surface.

[0033] Furthermore, the cured film is composed of an alkyl compound. The van der Waals force between the alkyl chains in the alkyl compound gives the film a certain mechanical strength, and after being heated to strengthen the curing, it can protect the glass substrate from being scratched by pollutants during transportation, effectively avoid physical damage such as scratches, and further protect the integrity of the glass substrate surface.

[0034] Therefore, the light-transmitting substrate of this embodiment can effectively solve the technical problems in the prior art that the glass substrate is easily contaminated during long-term storage or transportation, and even easily causes surface scratches during transportation. It has the beneficial effects of effectively protecting the integrity of the glass substrate surface, improving the quality of the glass substrate product, reducing cleaning costs, and improving production efficiency.

[0035] In one embodiment, the protective film has a thickness of 100 nm to 600 nm. Specifically, to ensure a stable protective film, the protective film has a thickness of no less than 100 nm. Furthermore, considering material costs, the protective film has a thickness of no more than 600 nm. More preferably, the protective film has a thickness of 100 nm to 130 nm. A protective film of this thickness provides excellent mechanical protection and chemical stability. Furthermore, after the protective film is cured on the surface of the glass substrate, the risk of stress cracking due to shrinkage is reduced, thereby improving the quality of the cured film.

[0036] In one embodiment, step S2 includes: dripping an alkyl compound solution into the center of the glass substrate; rotating the glass substrate to spread the alkyl compound solution and form a protective film on the surface of the glass substrate.

[0037] Specifically, 3ml~5ml of alkyl compound solution is dripped into the center of a 6-inch square glass substrate, and then the glass substrate is rotated at a speed of 3000r / min~5000r / min. As the glass substrate rotates, the alkyl compound solution diffuses outward from the center of the glass substrate, forming an alkyl compound film with a thickness of 100nm~130nm on the surface of the glass substrate. In this embodiment, the alkyl compound is coated on the surface of the glass substrate by spin coating to form a protective film. When the glass substrate rotates, the alkyl compound solution diffuses outward from the center of the glass substrate. The centrifugal force will push the alkyl compound solution to spread evenly toward the edge, reducing the thickness difference caused by the initial uneven distribution and ensuring uniform film formation of the protective film. Furthermore, for a 6-inch substrate, 3ml~5ml of alkyl compound solution can ensure that the solution sufficiently covers the substrate while avoiding excessive waste. Excess liquid will be thrown out during high-speed rotation.

[0038] In one embodiment, step S2 includes: spraying an alkyl compound solution onto the surface of the glass substrate to form a protective film on the surface of the glass substrate.

[0039] Specifically, the present embodiment adopts a spraying method to coat an alkyl compound on the surface of a glass substrate to form a protective film. Preferably, the spraying uses a 4-6 hole continuous spraying and then atomization method, the spray flow rate is 3mL / min~5mL / min, the spray pressure is 10MPa~15MPa, the spray time is 10s~30s, and the spray thickness is about 100nm~130nm. The present embodiment adopts a spraying method to coat an alkyl compound on the surface of a glass substrate to form a protective film. The spraying operation is flexible and simple, and can reduce solution waste, which is conducive to cost saving. Furthermore, the synchronous spraying of 4 to 6 nozzles can cover a wider area, reduce the flow fluctuation of a single nozzle through the superposition effect, and make the thickness of the alkyl compound film more uniform. At the same time, the post-atomization technology further breaks the solution into micron or nanometer-sized particles, reduces the surface tension of the glass substrate, enhances the spreadability on the glass substrate, and reduces pinholes or cracks.

[0040] In one embodiment, step S2 includes: dispersing the alkyl compound solution in a dispersant and maintaining a constant temperature of 30° C. to 35° C.; immersing the glass substrate in the dispersed alkyl compound solution for 1 to 3 minutes and then removing the glass substrate to form a protective film on the surface of the glass substrate.

[0041] Specifically, this embodiment uses an immersion method to coat an alkyl compound on the surface of a glass substrate to form a protective film. First, the alkyl compound solution is dispersed in a dispersant such as acetone or isopropyl alcohol and maintained at a constant temperature between 30°C and 35°C. The glass substrate is then immersed in the dispersed alkyl compound solution for 1 minute to 3 minutes and then taken out. A layer of alkyl compound film is evenly adhered to the surface of the substrate, and an alkyl compound film with a thickness of 500nm to 600nm can be formed. This embodiment uses an immersion method to coat an alkyl compound on the surface of a glass substrate to form a protective film. The film-forming operation is simple and helps save costs. Furthermore, this embodiment disperses the alkyl compound solution in a dispersant, which can prevent the aggregation of alkyl compound molecules and ensure that they exist in the solution in the form of single molecules or micro-micelles, thereby forming a uniform film on the surface of the substrate. At the same time, the surface of the glass substrate usually has silanol groups. The polarity of the dispersant helps the alkyl compound to form chemical bonds through hydrolysis-condensation reactions, thereby enhancing the adhesion of the film. Furthermore, the boiling point of the dispersant acetone is 56° C., and the boiling point of isopropyl alcohol is 82° C. In this embodiment, maintaining a constant temperature of 30° C. to 35° C. can prevent the boiling of dispersants such as acetone and isopropyl alcohol to generate bubbles and damage the alkyl compound film, thereby improving the film quality.

[0042] In one embodiment, step S3 includes: performing a heat treatment and constant temperature drying on the glass substrate with the protective film formed thereon, wherein the heat treatment temperature is constant at 85°C to 95°C for 3 to 5 minutes. Specifically, to avoid internal stress caused by rapid thermal expansion, the heat treatment temperature is controlled to rise at 3°C / s to 5°C / s.

[0043] In this embodiment, a glass substrate having a protective film formed thereon is subjected to a constant temperature heat treatment to solidify the protective film. The glass substrate having the protective film formed thereon is placed in a constant temperature dry environment at 85°C to 95°C for 3 to 5 minutes. The treatment is stopped after the surface of the glass substrate is dry and no significant color difference is observed, thereby forming a solidified film on the surface of the glass substrate. Heat treatment of the glass substrate having the protective film formed thereon can effectively promote the solidification reaction of the alkyl compound protective film, causing the alkyl compound protective film and the glass substrate to be completely cross-linked or polymerized, thereby forming a stable solidified film on the surface of the glass substrate. The solidified film has a certain mechanical strength, can protect the surface of the glass substrate from physical damage such as scratches, and thus protect the integrity of the glass substrate.

[0044] In another embodiment, step S3 includes: irradiating the surface of the glass substrate with the protective film with UV light for 5 to 8 minutes. Specifically, to ensure the curing speed and curing effect, the surface of the glass substrate with the protective film is continuously irradiated with UV light in a constant temperature and dry environment of 15°C to 35°C, with the light power controlled at 50W to 100W and the unit luminous flux controlled at 10mJ / cm2. The irradiation is maintained for 5 to 8 minutes, and the irradiation is stopped when the surface is dry and there is no obvious color difference, thereby forming a cured film on the surface of the glass substrate.

[0045] In this embodiment, UV light irradiation of a glass substrate with a protective film can effectively promote the curing reaction of the alkyl compound protective film, causing the alkyl compound protective film and the glass substrate to completely crosslink or polymerize, forming a stable cured film on the surface of the glass substrate. This cured film has a certain mechanical strength, can protect the glass substrate surface from physical damage such as scratches, and can maintain the integrity of the glass substrate. Preferably, during UV light irradiation, the glass substrate can be translated or rotated to ensure uniform heating of the glass substrate and avoid local overheating of the substrate surface.

[0046] In one embodiment, step S3 is followed by the following step: removing the cured film using a strong oxidant. Specifically, while a glass substrate with a cured film effectively protects the glass substrate during storage and transportation, the cured film on the surface of the glass substrate needs to be removed before the glass substrate is put into production. This embodiment utilizes a strong oxidant to remove the cured film. The glass substrate with the cured film is immersed in a strong oxidizing solution, such as ozone water or SPM (H2SO4 / H2O2), with the solution flowing, for 2-4 minutes to remove the cured film. The use of a strong oxidant in this embodiment can rapidly oxidize and decompose the alkyl compound, reducing the immersion time of the glass substrate. Furthermore, the strong oxidant has minimal impact on the glass substrate, effectively ensuring the integrity of the glass substrate.

[0047] In one embodiment, the step of removing the cured film with a strong oxidant further includes the following step: cleaning the glass substrate with an organic solvent to remove contaminants attached to the cured film. Specifically, after long-term storage or transportation, a small amount of contaminants may adhere to the surface of the cured film on the glass substrate with the cured film. These contaminants can be easily cleaned away using conventional organic cleaning methods, such as ethanol and acetone, allowing the surface of the glass substrate to be easily restored to a clean state. This step not only reduces the difficulty and frequency of cleaning, reduces the use of cleaning equipment and chemicals, and reduces cleaning costs and time, but also avoids damage to the substrate surface caused by the use of harmful chemicals such as strong acids and strong bases. Furthermore, cleaning before using a strong oxidant to remove the cured film can reduce cross-contamination and improve the cleanliness of the glass substrate.

[0048] In one embodiment, after the step of removing the cured film using a strong oxidant, the method further includes: rinsing the glass substrate with deionized water; and drying the glass substrate.

[0049] Specifically, after the glass substrate is soaked in a strong oxidant to remove the cured film, it is rinsed with deionized water and then dried using hot air or spin drying to completely remove the residual strong oxidant and reaction byproducts to avoid secondary contamination.

[0050] The above description is only a description of the preferred embodiment of the present invention and does not limit the scope of the present invention. Any changes and modifications made by ordinary technicians in the field of the present invention based on the above disclosure are within the scope of the technical solution of the present invention.

Claims

1. A light-transmitting substrate, characterized in that: include: A glass substrate and a cured film, wherein the cured film is formed on a surface of the glass substrate and is formed of an alkyl compound, wherein the alkyl compound includes polyethylene glycol or polytetramethylene glycol.

2. A method for treating the surface of a glass substrate, characterized in that: The following steps are involved: providing a glass substrate; Coating an alkyl compound on the surface of the glass substrate to form a protective film, wherein the alkyl compound includes polyethylene glycol or polytetrahydrofuran; The protective film is cured to form a cured film.

3. The glass substrate surface treatment method according to claim 2, wherein: The step of coating the surface of the glass substrate with an alkyl compound to form a protective film comprises: Adding an alkyl compound solution dropwise to the center of the glass substrate; The glass substrate is rotated to spread the alkyl compound solution, thereby forming the protective film on the surface of the glass substrate.

4. The method for treating the surface of a glass substrate according to claim 2, wherein: The step of coating the surface of the glass substrate with an alkyl compound to form a protective film comprises: The alkyl compound solution is sprayed onto the surface of the glass substrate to form the protective film on the surface of the glass substrate.

5. The glass substrate surface treatment method according to claim 2, wherein: The step of coating the surface of the glass substrate with an alkyl compound to form a protective film comprises: Disperse the alkyl compound solution in a dispersant and maintain a constant temperature of 30°C to 35°C; The glass substrate is immersed in the dispersed alkyl compound solution for 1 to 3 minutes and then taken out to form the protective film on the surface of the glass substrate.

6. The method for treating the surface of a glass substrate according to claim 2, wherein: The step of curing the protective film comprises: The glass substrate formed with the protective film is subjected to heat treatment and constant temperature drying, the heat treatment temperature is constant at 85° C. to 95° C., and the heat treatment time is 3 min to 5 min; or, The surface of the glass substrate having the protective film formed thereon is continuously irradiated with UV light for 5 to 8 minutes.

7. The method for treating the surface of a glass substrate according to any one of claims 2 to 6, wherein: The thickness of the protective film is 100nm~600nm.

8. The method for treating the surface of a glass substrate according to claim 2, wherein: After the step of curing the protective film, the method further includes removing the cured film using a strong oxidant.

9. The method for treating the surface of a glass substrate according to claim 8, wherein: Before the step of removing the cured film using a strong oxidant, the method further includes: cleaning the glass substrate with an organic solvent to remove contaminants attached to the cured film.

10. The glass substrate surface treatment method according to claim 8, wherein: After the step of removing the cured film using a strong oxidizing agent, the following steps are further included: Rinse the glass substrate with deionized water; The glass substrate is dried.

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