Variable-pressure and stable-pressure type gas mass flow controller

Abstract

The invention provides a variable pressure and stable pressure type gas mass flow controller which comprises a shell assembly, and a gas inlet is formed in the outer wall of the shell assembly. The electric proportional valve is connected with the gas inlet; the air cylinder body is connected with the electric proportional valve through a first connecting assembly, an area A, an area B and a piston plate are arranged in the air cylinder body, and the area A and the area B are separated through the piston plate; the pressure detection assembly, the infrared detection assembly and the temperature detection assembly are arranged on the area A and the area B; and the air inlet assembly and the exhaust assembly are connected with the area A and the area B through the second connecting assembly in sequence. According to the electric proportional valve, the air inlet pressure is adjusted through the pressure numerical value, the purpose of accurately controlling the pressure is achieved, gas in the area A and the area B is exhausted and introduced through the piston plate moving in the air cylinder body, the pressure in the area A and the pressure in the area B can be more accurately controlled, and the pressure control efficiency is improved. And through the air inlet assembly, air can be conveniently introduced for drying.

Description

Technical Field

[0001] The present invention relates to the technical field of flow controllers, in particular to a variable-pressure stabilizing gas mass flow controller. Background Art

[0002] A bioreactor is a culture system that provides a growth environment for microorganisms or cells. During the culture process, gases such as oxygen, nitrogen, and carbon dioxide need to be introduced into the reactor to maintain the environment. The flow rate and quality of the introduced gases need to be manually controlled to maintain conditions conducive to culture. This requires controlling the gas input rate. Mass flow controllers (MFCs) are generally used to control the gas mass flow rate.

[0003] Existing technologies lack reliable control devices other than the MFC. However, due to differences in MFC manufacturers, the factory-calibrated CF (Conversion Factor) varies. This can cause the displayed value to differ from the actual value when different gas types are input, requiring further conversion. Furthermore, when the input gas is humid or corrosive, it can damage the MFC channels. In this case, the gas and MFC piping system must be dried, which is a complex and cumbersome process. Summary of the Invention

[0004] Based on this, the purpose of the present invention is to provide a variable pressure and stabilized gas mass flow controller to solve the above-mentioned deficiencies in the prior art.

[0005] The present invention provides a variable pressure stabilizing gas mass flow controller, comprising:

[0006] A shell assembly, wherein a gas inlet is provided on an outer wall of the shell assembly;

[0007] an electric proportional valve connected to the gas inlet;

[0008] A cylinder body is connected to the electric proportional valve via a first connecting assembly, wherein an A zone, a B zone, and a piston plate are provided in the cylinder body, and the A zone and the B zone are separated by the piston plate;

[0009] The pressure detection component, the infrared detection component and the temperature detection component are all arranged on the area A and the area B;

[0010] The air intake assembly and the exhaust assembly are connected to the area A and the area B in sequence through the second connecting assembly;

[0011] The detection value of the pressure detection component is linked to the electrical proportional valve so that the electrical proportional valve adjusts the intake pressure, and the piston plate is used to adjust the size of the A area and the B area.

[0012] Compared with the prior art, the beneficial effects of the present invention are: the pressure detection component detects the pressure values ​​in area A and area B, the electric proportional valve adjusts the intake pressure according to the pressure value, so as to achieve the purpose of more precise pressure control, and the piston plate moving in the cylinder body makes the volumes of area A and area B different, so that the gas in area A and area B can be discharged and introduced respectively, and the movement distance of the piston plate is monitored by the infrared detection component, and the temperature detection component detects the temperature value of area A and area B, so that the pressure in area A and area B can be controlled more accurately according to the temperature value and the movement distance of the piston plate, and the gas can be conveniently introduced for drying through the intake component.

[0013] Furthermore, the housing assembly includes an upper housing and a lower housing, the upper housing is arranged above the lower housing, and the electrical proportional valve, the cylinder body, the gas inlet, the air intake assembly and the exhaust assembly are all arranged on the lower housing.

[0014] Furthermore, the first connecting assembly includes a first solenoid valve and a first one-way valve, and the cylinder body is connected to the electrical proportional valve through the first solenoid valve and the first one-way valve in sequence, and the first solenoid valve is connected to the A area and the B area of ​​the cylinder body.

[0015] Furthermore, the electric proportional valve is connected to the first one-way valve through a filter.

[0016] Furthermore, the pressure detection assembly includes two groups of pressure probes, and the two groups of pressure probes are respectively arranged on the A area and the B area.

[0017] Furthermore, the infrared detection component includes two groups of infrared probes, which are respectively arranged on the area A and the area B to detect the moving distance of the piston plate.

[0018] Furthermore, the temperature detection component includes two temperature probes, and the two groups of temperature probes are respectively arranged on the A area and the B area.

[0019] Furthermore, the air intake assembly includes an air intake and a second one-way valve. The air intake is provided on the outer wall of the shell assembly. The air intake is connected to the second connecting assembly through the second one-way valve.

[0020] Furthermore, the exhaust assembly includes an exhaust port and a third one-way valve. The exhaust port is arranged on the outer wall of the shell assembly, and the air inlet is connected to the second connecting assembly through the third one-way valve.

[0021] Furthermore, the second connecting assembly includes a second solenoid valve and a third solenoid valve, and the cylinder body is connected to the intake assembly and the exhaust assembly respectively through the second solenoid valve and the third solenoid valve. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 Schematic diagram of the three-dimensional structure of the variable pressure stabilizing gas mass flow controller in the embodiment of the present invention Figure 1 ;

[0023] Figure 2 Schematic diagram of the working structure of a variable pressure stabilizing gas mass flow controller in an embodiment of the present invention;

[0024] Figure 3 Schematic diagram of the three-dimensional structure of the variable pressure stabilizing gas mass flow controller in the embodiment of the present invention Figure 2 ;

[0025] Figure 4 Schematic diagram of the three-dimensional structure of the variable pressure stabilizing gas mass flow controller in the embodiment of the present invention Figure 3 ;

[0026] Figure 5 1 is a top view of the internal structure of a variable pressure stabilizing gas mass flow controller in an embodiment of the present invention.

[0027] Description of main component symbols:

[0028] 10. Shell assembly; 11. Upper shell; 12. Lower shell; 13. Gas inlet;

[0029] 20. Electric proportional valve; 21. Filter;

[0030] 30. Cylinder body; 31. Piston plate; 32. Area A; 33. Area B;

[0031] 40. First connecting assembly; 41. First one-way valve; 42. First solenoid valve;

[0032] 50. Pressure detection component; 51. Pressure probe;

[0033] 60. Infrared detection component; 61. Infrared probe;

[0034] 70. Temperature detection component; 71. Temperature probe;

[0035] 80. Air intake assembly; 81. Air intake port; 82. Second one-way valve;

[0036] 90. Exhaust assembly; 91. Exhaust port; 92. Third one-way valve;

[0037] 100. Second connecting assembly; 110. Second solenoid valve; 120. Third solenoid valve.

[0038] The following specific embodiments will further illustrate the present invention in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION

[0039] To facilitate understanding of the present invention, the present invention will be described more fully below with reference to the accompanying drawings. The drawings illustrate several embodiments of the present invention. However, the present invention may be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to provide a more thorough and comprehensive understanding of the present invention.

[0040] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly on the other element or there may be an intermediate element. When an element is referred to as being "connected to" another element, it may be directly connected to the other element or there may be an intermediate element. The terms "vertical," "horizontal," "left," "right," and similar expressions used herein are for illustrative purposes only.

[0041] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which this invention pertains. The terms used in this specification of the present invention are for the purpose of describing specific embodiments only and are not intended to limit the present invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0042] See also Figures 1 to 5 , shown is a variable pressure stabilizing gas mass flow controller in an embodiment of the present invention, including a housing assembly 10, an electric proportional valve 20, a cylinder body 30, a pressure detection assembly 50, an infrared detection assembly 60, a temperature detection assembly 70, an air intake assembly 80 and an exhaust assembly 90.

[0043] A gas inlet 13 is provided on the outer wall of the shell assembly 10, and the electric proportional valve 20 is connected to the gas inlet 13. The cylinder body 30 is connected to the electric proportional valve 20 through a first connecting assembly 40. An A zone 32, a B zone 33 and a piston plate 31 are provided in the cylinder body 30, and the A zone 32 and the B zone 33 are separated by the piston plate 31. The pressure detection assembly 50, the infrared detection assembly 60 and the temperature detection assembly 70 are all arranged on the A zone 32 and the B zone 33. The air intake assembly 80 and the exhaust assembly 90 are connected to the A zone 32 and the B zone 33 in turn through the second connecting assembly 100, wherein the detection value of the pressure detection assembly 50 is linked with the electric proportional valve 20 so that the electric proportional valve 20 adjusts the intake pressure, and the piston plate 31 is used to adjust the size of the A zone 32 and the B zone 33.

[0044] It can be understood that external gas enters through the gas inlet 13, and the intake pressure is adjusted by the electric proportional valve 20, and the gas is inflated to the A area 32 and the B area 33 of the cylinder body 30 through the first connecting component 40 and the electric proportional valve 20. The piston plate 31 isolates the A area and the B area 33, and the piston plate 31 can move left and right in the cylinder body 30 to adjust the size of the A area 32 and the B area 33, so that the gas in the A area 32 and the B area 33 can be discharged and introduced respectively. In this process, the pressure detection group Component 50 detects the pressure value in area A 32 and area B 33, the infrared detection component 60 detects the left and right displacement of the piston plate 31, the temperature detection component 70 detects the temperature in area A 32 and area B 33, and the air intake component 80 can input gas to area A 32 and area B 33 through the second connecting component 100. The input gas can dry the pipeline, thereby preventing moisture or corrosive gas from damaging the pipeline. The exhaust component 90 can discharge the gas in area A 32 and area B 33 through the second connecting component 100.

[0045] Specifically, in this embodiment, the housing assembly 10 includes an upper housing 11 and a lower housing 12, the upper housing 11 is arranged above the lower housing 12, and the electrical proportional valve 20, the cylinder body 30, the gas inlet 13, the air intake assembly 80 and the exhaust assembly 90 are all arranged on the lower housing 12.

[0046] It should be explained that the gas inlet 13 is provided on the outer wall of the lower shell 12 , and the upper shell 11 is covered on the lower shell 12 to protect various components on the lower shell 12 .

[0047] Specifically, in this embodiment, the first connecting component 40 includes a first solenoid valve 42 and a first one-way valve 41. The cylinder body 30 is connected to the electrical proportional valve 20 through the first solenoid valve 42 and the first one-way valve 41 in sequence. The first solenoid valve 42 is connected to the A zone 32 and the B zone 33 of the cylinder body 30. The electrical proportional valve 20 is connected to the first one-way valve 41 through the filter 21.

[0048] It can be understood that the filter 21 can filter impurities in the gas, and the first one-way valve 41 can prevent the gas from flowing back and causing damage to the equipment and pipelines. In this embodiment, the first solenoid valve 42 is a two-position three-way solenoid valve. The first one-way valve 41 is divided into two paths through the two-position three-way first solenoid valve 42, which are respectively connected to area A 32 and area B 33 of the cylinder body 30 to inflate area A 32 and area B 33.

[0049] Specifically, in this embodiment, the pressure detection assembly 50 includes two sets of pressure probes 51, which are respectively disposed on the A zone 32 and the B zone 33. The infrared detection assembly 60 includes two sets of infrared probes 61, which are respectively disposed on the A zone 32 and the B zone 33 to detect the movement distance of the piston plate 31. The temperature detection assembly 70 includes two temperature probes 71, which are respectively disposed on the A zone 32 and the B zone 33.

[0050] It can be understood that the two pressure probes 51 respectively detect the gas pressure in area A 32 and area B 33, the two infrared probes 61 are used to detect the displacement of the piston plate 31 in area A 32 and the displacement of the piston plate 31 in area B 33, and the two temperature probes 71 respectively detect the gas temperature on area A 32 and area B 33. Among them, the pressure probe 51 detects the gas pressure value in area A 32 and area B 33, and the electric proportional valve 20 adjusts the intake pressure according to the gas pressure value to avoid excessive or insufficient pressure.

[0051] Specifically, in this embodiment, the air intake assembly 80 includes an air intake port 81 and a second one-way valve 82. The air intake port 81 is disposed on the outer wall of the housing assembly 10 and is connected to the second connecting assembly 100 via the second one-way valve 82. The exhaust assembly 90 includes an exhaust port 91 and a third one-way valve 92. The exhaust port 91 is disposed on the outer wall of the housing assembly 10 and is connected to the second connecting assembly 100 via the third one-way valve 92. The second connecting assembly 100 includes a second solenoid valve 110 and a third solenoid valve 120. The cylinder body 30 is connected to the air intake assembly 80 and the exhaust assembly 90, respectively, via the second solenoid valve 110 and the third solenoid valve 120.

[0052] It should be noted that the air inlet 81 and the exhaust port 91 are both arranged on the outer wall of the lower shell 12. The air inlet 81 is connected to area A 32 and area B 33 through the second one-way valve 82, the third solenoid valve 120, and the second solenoid valve 110 in sequence, so that gas can be input into the equipment. The input gas can dry the pipeline, thereby preventing moisture or corrosive gas from damaging the pipeline. The exhaust port 91 is connected to area A 32 and area B 33 through the third one-way valve 92, the third solenoid valve 120, and the second solenoid valve 110 in sequence, so that the gas in area A 32 and area B 33 can be discharged.

[0053] During specific implementation, the gas enters the electrical proportional valve 20 from the gas interface 13, reaches a suitable pressure, passes through the filter 21 to filter out impurities in the gas, and then enters the first one-way valve 41. The first one-way valve 41 prevents gas backflow from causing equipment damage and errors. By opening the interface of the first solenoid valve 42 connected to area A 32, the interface of the second solenoid valve 110 connected to area B 33 is opened, and the interface of the third solenoid valve 120 and area A 32 is opened, the target gas is connected to the cylinder body 30 and injected into area A 32. At this time, the piston plate 31 pushes toward area B 33, so that the impurity gas in area B 33 can be pushed out from area B 33, and in turn from the third solenoid valve 120, the third one-way valve 92 and the exhaust port 91 is discharged. During this process, when the infrared probe 61 in area B 33 detects that the distance between the piston plate 31 and the inner wall of area B 33 is 0, the exhaust of area B 33 is completed, the interface of the first solenoid valve 42 connected to area A 32 is closed, and the interface connected to area B is opened, the interface of the second solenoid valve 110 connected to area B 33 is closed, and the interface connected to area A 32 is opened, the target gas is injected from area B 33, and pushes the piston plate 31 to move toward area A 32, the impurity air in area A 32 is pushed out from area A 32, and is discharged from the third solenoid valve 120, the third one-way valve 92 and the exhaust port 91 in sequence, and when the infrared probe 61 in area A 32 detects that the distance between the piston plate 31 and the inner wall of area A 32 is 0, the exhaust is completed.

[0054] During ventilation operation, when the infrared probe 61 of area A 32 detects that the distance between the piston plate 31 and the inner wall of area A 32 is 0, the required pressure of area B 33 of the gas cylinder is determined according to the input gas flow rate. This process can be regarded as an isothermal flow model. For horizontal isothermal flow, the pressure drop formula is: in, M represents the molar mass of the gas, Z and R represent two gas constants respectively. The simplification step is to substitute the ρ expression: Eliminating Z, R, and T, we get: in, Bring it in and sort it out: Dividing both sides by (P1+P1) yields: Solve for P1: P2 is the atmospheric pressure. When the atmospheric pressure is known, the gas pressure P1 corresponding to the required flow rate Q can be calculated by this formula. After the area B is inflated until the calculated pressure is reached, the interface between the first solenoid valve 42 and the area B 33 is closed, and the interface with the area A 32 is opened. The second solenoid valve 110 and the interface between the area A 32 are closed, and the interface between the area B 33 is opened. The third solenoid valve 120 and the interface between the area A 32 are closed, and the interface with the area B 33 is opened. At this time, the gas reaches the gas pressure p corresponding to the calculated required flow rate Q through the electrical proportional valve 20 and then enters the area A 32 through the first solenoid valve 42. At this time, the pressures in the areas A 32 and B 33 are the same, and the gas in the area B 33 is discharged from the exhaust port 92. (Under constant pressure, the exhaust port 92 remains unchanged, and the gas flow rate is the same) When the gas in the area B 33 decreases, the gas in the area A 32 will push the piston plate 31 to move toward the area B 33, so that the pressures in the areas A 32 and B 33 are always equal. When When the infrared probe 61 of area B 33 detects that the distance between the piston plate 31 and the inner wall of area B 33 is 0, the interface of the first solenoid valve 42 and area B 33 is opened, and the interface with area A 32 is closed. The second solenoid valve 110 and the interface of area A 32 are opened, and the interface with area B 33 is closed. The third solenoid valve 120 and the interface of area A 32 are opened, and the interface with area B 33 is closed. At this time, the gas passes through the electrical proportional valve 20 to reach the gas pressure p corresponding to the calculated required flow rate Q, and then enters area B 33 through the first solenoid valve 42. At this time, the pressures in areas A 32 and B 33 are the same, and the gas in area A 32 is discharged from the exhaust port 92. (Under constant pressure, the exhaust port 92 remains unchanged, and the gas flow rate is the same) When the gas in area A 32 decreases, the gas in area B 33 will push the piston plate 31 toward area A 32, so that the pressures in areas A 32 and B 33 are always equal. The mass of the gas can be calculated by the formula m=ρL, and ρ can be calculated by the formula L is the distance traveled by the piston plate 31, which can be calculated using the infrared probe 61. The volume of the input gas can be calculated using the volume calculation formula, thereby calculating the mass of the input gas. If the required flow rate is to be changed, the value of p can be calculated using the formula.

[0055] In summary, in the variable-voltage and pressure-stabilized gas mass flow controller in the above-mentioned embodiment of the present invention, the pressure detection component detects 50 the pressure values ​​in area A 32 and area B 33, and the electric proportional valve 20 adjusts the intake pressure according to the pressure value to achieve the purpose of more precise pressure control, and the piston plate 31 moving in the cylinder body 30 makes the volumes of area A 32 and area B 33 different, so that the gas in area A 32 and area B 33 can be discharged and introduced respectively, and the moving distance of the piston plate 31 is monitored by the infrared detection component 60, and the temperature detection component 70 detects the temperature values ​​of area A 32 and area B 33, so that the pressure in area A 32 and area B 33 can be more accurately controlled according to the temperature value and the moving distance of the piston plate 31, and the gas can be conveniently introduced for drying through the intake component 80.

[0056] Throughout this specification, reference to terms such as "one embodiment," "some embodiments," "examples," "specific examples," or "some examples" means that a specific feature, structure, material, or characteristic described in conjunction with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0057] The above-described embodiments merely illustrate several implementations of the present invention, and while their descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that a person skilled in the art would be able to make numerous variations and improvements without departing from the spirit of the present invention, all of which fall within the scope of protection of the present invention. Therefore, the scope of protection of the present invention shall be determined by the appended claims.

Claims

1. A variable pressure stabilizing gas mass flow controller, characterized in that: include: A shell assembly, wherein a gas inlet is provided on an outer wall of the shell assembly; an electric proportional valve connected to the gas inlet; A cylinder body is connected to the electric proportional valve via a first connecting assembly, wherein an A zone, a B zone, and a piston plate are provided in the cylinder body, and the A zone and the B zone are separated by the piston plate; The pressure detection component, the infrared detection component and the temperature detection component are all arranged on the area A and the area B; The air intake assembly and the exhaust assembly are connected to the area A and the area B in sequence through the second connecting assembly; The detection value of the pressure detection component is linked to the electrical proportional valve so that the electrical proportional valve adjusts the intake pressure, and the piston plate is used to adjust the size of the A area and the B area.

2. The variable pressure stabilizing gas mass flow controller according to claim 1, characterized in that: The housing assembly includes an upper housing and a lower housing. The upper housing is arranged above the lower housing. The electrical proportional valve, the cylinder body, the gas inlet, the air intake assembly and the exhaust assembly are all arranged on the lower housing.

3. The variable pressure stabilizing gas mass flow controller according to claim 1, characterized in that: The first connecting assembly includes a first solenoid valve and a first one-way valve. The cylinder body is connected to the electrical proportional valve through the first solenoid valve and the first one-way valve in sequence. The first solenoid valve is connected to the A area and the B area of ​​the cylinder body.

4. The variable pressure stabilizing gas mass flow controller according to claim 3, characterized in that: The electric proportional valve is connected to the first one-way valve through a filter.

5. The variable pressure stabilizing gas mass flow controller according to claim 1, characterized in that: The pressure detection assembly includes two groups of pressure probes, which are respectively arranged on the A area and the B area.

6. The variable pressure stabilizing gas mass flow controller according to claim 1, characterized in that: The infrared detection assembly includes two groups of infrared probes, which are respectively arranged on the A area and the B area to detect the moving distance of the piston plate.

7. The variable pressure stabilizing gas mass flow controller according to claim 1, characterized in that: The temperature detection component includes two temperature probes, and the two groups of temperature probes are respectively arranged on the A area and the B area.

8. The variable pressure stabilizing gas mass flow controller according to claim 1, characterized in that: The air intake assembly includes an air intake port and a second one-way valve. The air intake port is arranged on the outer wall of the shell assembly. The air intake port is connected to the second connecting assembly through the second one-way valve.

9. The variable pressure stabilizing gas mass flow controller according to claim 1, characterized in that: The exhaust assembly includes an exhaust port and a third one-way valve. The exhaust port is arranged on the outer wall of the shell assembly. The air inlet is connected to the second connecting assembly through the third one-way valve.

10. The variable pressure stabilizing gas mass flow controller according to claim 1, characterized in that: The second connecting assembly includes a second solenoid valve and a third solenoid valve, and the cylinder body is connected to the intake assembly and the exhaust assembly respectively through the second solenoid valve and the third solenoid valve.

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