A vacuum valve for optical field
By designing a vacuum valve suitable for the optical field and adopting a structure with support columns to connect the sealing plate and the pressure plate, lightweight and vibration resistance are achieved, sealing is ensured, and the rapid replacement of light-transmitting glass is supported, which solves the insufficient use of traditional vacuum valves in optical equipment.
Patent Information
- Application Number
- CN202511066958.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2025-07-31
- Publication Date
- 2025-09-26
- Estimated Expiration
- 2045-07-31
AI Technical Summary
Traditional vacuum valves in the optical field are heavy, long in one direction, and have weak vibration resistance, and cannot meet the requirements of optical equipment.
A vacuum valve for the optical field is designed, including a valve core assembly, a lower shell assembly, an upper shell assembly and a drive assembly. A support column is used to connect the sealing plate and the pressure plate. The sealing is ensured by a mechanical self-locking mechanism, and the light-transmitting glass can be replaced to adapt to different needs.
It achieves lightweight, enhanced vibration resistance, good sealing in optical equipment, and simple and convenient replacement of light-transmitting glass to adapt to different environmental requirements.
Smart Images

Figure CN120557378B_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of vacuum valves, in particular to a vacuum valve used in the optical field. Background Art
[0002] Vacuum valves are components used to change the direction of airflow, adjust airflow, and cut or connect pipelines in vacuum systems. Currently, demand for vacuum valves in the traditional vacuum industry is decreasing. Emerging sectors such as new energy, semiconductors, and optics offer a vast domestic market for vacuum valves, placing higher demands on these valves.
[0003] Currently, in the traditional vacuum field, different types of vacuum valves can be selected according to different usage environments and working conditions, such as vacuum gate valves, vacuum butterfly valves, vacuum swing valves, etc.; however, in the optical field, a piece of light-transmitting glass needs to be designed at the valve port, mainly for debugging, verification and maintenance of the environment of the internal equipment, and some optical test equipment needs to be transported to different environments for testing using work vehicles. Therefore, there are high requirements for the weight, size, vibration resistance and corrosion resistance of the vacuum valve. Traditional vacuum valves are heavy, have long single-direction dimensions, and have weak vibration resistance, and cannot meet the usage requirements of the optical field. Summary of the Invention
[0004] In order to solve the above problems, the technical solution adopted by the present invention is:
[0005] A vacuum valve for use in the optical field, comprising a valve core assembly, a lower housing assembly, an upper housing assembly and a drive assembly, wherein the upper housing assembly is connected to the lower housing assembly up and down, a valve port adapted to the valve core assembly is provided in the middle portion of the lower housing assembly, the valve core assembly is rotatably mounted inside the lower housing assembly, the drive assembly is connected to the valve core assembly, the valve core assembly comprises a valve core seat, the upper and lower end surfaces of the valve core seat are respectively provided with a sealing plate and a support plate, the support plate is connected to the valve core seat via a positioning shaft, the end surfaces of the sealing plate and the support plate are both provided with a sealing ring adapted to the lower housing assembly and a through hole adapted to the valve port, and the sealing plate and the support plate are connected via a connecting structure;
[0006] One end of the valve core seat is rotatably connected to the bearing seat, and the other end is provided with a light-transmitting glass, which is located in the through-hole of the sealing plate, and the upper and lower end surfaces of the light-transmitting glass respectively abut against the first pressing plate and the second pressing plate, the first pressing plate and the second pressing plate are both fixedly connected to the sealing plate, and the first pressing plate is connected to the sealing plate through a support column;
[0007] The bearing seat is fixedly connected to the rotating wheel, and the other end of the rotating wheel is hinged to the transmission rod through a positioning ring. The other end of the transmission rod is hinged to the sealing structure. The sealing structure is located between the sealing plate and the support plate. The sealing structure is used to adjust the distance between the sealing plate and the support plate.
[0008] Furthermore, the connecting structure includes a connecting sleeve, an auxiliary sleeve and a support spring. The connecting sleeve is adapted to engage with the support plate. The auxiliary sleeve is sleeved inside the connecting sleeve. The auxiliary sleeve can slide back and forth in the connecting sleeve. A connecting shaft is provided at one end of the auxiliary sleeve. One end of the connecting shaft is connected to the auxiliary sleeve by a bolt, and the other end is inserted into the sealing plate and interference fits with the sealing plate. The support spring is located between the inner wall of the connecting sleeve and the outer wall of the auxiliary sleeve, and one end of the support spring abuts against the connecting sleeve, and the other end abuts against the auxiliary sleeve.
[0009] Furthermore, the sealing structure includes a connecting plate, which is externally mounted on the light-transmitting glass. The end face of the connecting plate is provided with a plurality of positioning columns, and the positioning column sleeve is provided with a first bearing, one of which is connected to the transmission rod, and the outer walls of the remaining first bearings are rollingly adapted to the inner walls of the valve core seat.
[0010] Furthermore, the end face of the connecting plate is provided with a plurality of mounting columns, and the upper and lower ends of the mounting columns are embedded with steel ball sleeves, and the steel ball is rolled and adapted in the steel ball sleeves, wherein the steel ball at the upper end of the mounting column abuts against the end face of the sealing plate, and the steel ball at the lower end of the mounting column abuts against the end face of the support plate, and the end faces of the sealing plate and the support plate are both provided with steel ball grooves adapted to the steel balls.
[0011] Furthermore, it also includes an indicator meter, which is used to display the rotation angle of the valve core assembly and the open or closed state of the valve core assembly. The indicator meter is installed on the lower housing assembly, and the input shaft of the indicator meter is fixedly connected to the bearing seat.
[0012] Furthermore, the lower shell assembly includes a lower shell, one end face of the lower shell is provided with a lower shell cover, the lower shell cover is installed with the indicator, and the other end face of the lower shell is provided with a transmission member for connecting the bearing seat and the drive assembly.
[0013] Furthermore, the transmission member includes a lower shell fixing seat, a lower shell connecting seat, a rotating wheel transmission seat, a rotating shaft and a transmission wheel seat, the lower shell fixing seat is fixedly connected to the end face of the lower shell, the lower shell connecting seat is fixedly connected to the upper end face of the lower shell fixing seat, the rotating shaft is rotatably connected to the lower shell fixing seat and the lower shell connecting seat through the rotating shaft fixing seat and the second bearing, one end of the rotating shaft is used to connect the drive assembly, and the other end is connected to the rotating wheel transmission seat and the transmission wheel seat through a locking screw, the transmission wheel seat is used to connect the rotating wheel, and the rotating shaft is connected to the bearing seat through a connecting bolt.
[0014] Furthermore, the drive assembly includes a motor, a motor connecting plate and a motor seat. The upper end of the lower shell connecting seat is connected to the motor seat. The motor is installed on the motor seat through the motor connecting plate and bolts. The output shaft of the motor is connected to a rotating shaft adapter plate, and the rotating shaft adapter plate is connected to the rotating shaft.
[0015] Beneficial effects of the present invention:
[0016] When the vacuum valve is closed, the clear glass blocks the valve opening, reducing light intensity and allowing weak light to pass through, enhancing the environment for debugging, verification, and maintenance of the equipment inside. The sealing rings between the sealing plate and the support plate are tightly attached to the inner wall of the lower housing assembly, experiencing a certain degree of compression to ensure a tight seal at the valve opening. When the vacuum valve is open, the clear glass does not block the valve opening, allowing strong light to pass directly through.
[0017] The present invention connects the first pressing plate and the sealing plate through a support column. The support column can not only provide support for the first pressing plate to avoid stress concentration and prevent the first pressing plate from deformation, but also effectively prevent the first pressing plate from over-pressing the light-transmitting glass to avoid damage to the light-transmitting glass.
[0018] Without disassembling other parts of the vacuum valve, the new light-transmitting glass can be replaced by disassembling the second pressure plate. Of course, according to actual needs, the light-transmitting glass of different thicknesses and diameters ≤ D can be replaced by replacing the first pressure plate and the second pressure plate of different sizes. The replacement is simple, convenient and fast.
[0019] When the valve is in the closed state, the center line of the rotating wheel and the center line of the transmission rod have an angle a less than °. The angle a can achieve self-locking of the transmission rod. That is, if the transmission rod is pushed through the sealing structure at this time, the transmission rod will only push the rotating wheel clockwise. However, due to the obstruction of the valve core seat, the rotating wheel cannot rotate, forming a mechanical self-locking. When the valve is in the closed state, it can overcome the influence of power failure or large vibration of the drive component and ensure the sealing performance. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the application and, together with the description, serve to explain the principles of the invention.
[0021] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.
[0022] Figure 1 It is a front view structural schematic diagram of the present invention;
[0023] Figure 2 It is a rear view structural schematic diagram of the present invention;
[0024] Figure 3 for Figure 2 A magnified view of part A;
[0025] Figure 4 This is a front view of the valve core assembly in the closed state;
[0026] Figure 5 This is the rear view of the valve core assembly in the closed state;
[0027] Figure 6 is a cross-sectional view of the valve core assembly;
[0028] Figure 7 for Figure 5 An enlarged cross-sectional view of part B;
[0029] Figure 8 It is a schematic diagram of the sealing position structure of the valve core assembly;
[0030] Figure 9 It is a structural diagram of the valve core assembly in the valve opening state;
[0031] Figure 10 It is a structural diagram of the valve core seat;
[0032] Figure 11 is a structural schematic diagram of the lower shell assembly;
[0033] Figure 12 Schematic diagram of the structure of the transmission rod;
[0034] Figure 13 Schematic diagram of different installation states of the locating ring;
[0035] Figure 14 Cross-section of the lower housing assembly Figure 1 ;
[0036] Figure 15 Cross-section of the lower housing assembly Figure 2 .
[0037] In the figure: 1-valve core assembly; 2-lower housing assembly; 3-drive assembly; 4-upper housing assembly; 5-valve port; 6-sealing ring; 7-indicator; 8-connecting bolt; 101-bearing seat; 102-bearing cover; 103-valve core back cover; 104-connecting sleeve; 105-auxiliary sleeve; 106-support spring; 107-sealing plate; 108-positioning shaft; 109-connecting shaft; 110-light-transmitting glass; 111-first pressure plate; 112-support column; 113-second pressure plate; 114-connecting plate; 115-steel ball sleeve; 116-support plate; 117-transmission rod; 118-positioning ring; 119-rotating wheel; 120-valve core Seat; 121-sleeve; 122-steel ball; 123-mounting column; 124-first bearing; 125-positioning column; 126-steel ball groove; 127-connecting column; 128-third bearing; 129-guide rail groove; 201-lower shell; 202-lower shell cover; 203-lower shell fixing seat; 204-pressure ring; 205-rotating wheel transmission seat; 206-rotating shaft; 207-rotating shaft fixing seat; 208-transmission wheel seat; 209-locking screw; 210-lower shell connecting seat; 211-second bearing; 301-motor; 302-motor connecting plate; 303-motor seat; 304-rotating shaft adapter plate; 701-input shaft. DETAILED DESCRIPTION
[0038] To make the purpose, technical solutions, and advantages of the embodiments of the present disclosure more clear, the technical solutions of the embodiments of the present disclosure will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, not all of the embodiments. Based on the described embodiments of the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.
[0039] Unless otherwise defined, the technical or scientific terms used in this disclosure should have the usual meanings understood by people with ordinary skills in the field to which this disclosure belongs. The words "first", "second" and similar words used in this disclosure do not indicate any order, quantity or importance, but are only used to distinguish different components. Words such as "include" or "comprise" mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the object being described changes, the relative positional relationship may also change accordingly.
[0040] like Figures 1-15As shown, a vacuum valve for use in the optical field includes a valve core assembly 1, a lower shell assembly 2, an upper shell assembly 4 and a drive assembly 3. The upper shell assembly 4 is connected to the lower shell assembly 2 up and down, and a valve port 5 adapted to the valve core assembly 1 is provided in the middle of the lower shell assembly 2. The valve core assembly 1 is rotatably installed inside the lower shell assembly 2, and the drive assembly 3 is connected to the valve core assembly 1.
[0041] The valve core assembly 1 can rotate back and forth between the lower housing assembly 2 and the upper housing assembly 4. When the valve core assembly 1 is in contact with the valve port 5 in the lower housing assembly 2, the vacuum valve is in the closed state, and the valve port 5 allows weak light to pass through, which is used for debugging, verifying, and maintaining the environment of the internal equipment. The valve core assembly 1 can be rotated from the lower housing assembly 2 to the upper housing assembly 4, at which point the vacuum valve is in the open state, and the valve port 5 allows strong light to pass through. The drive assembly 3 provides power for the rotation of the valve core assembly 1.
[0042] like Figure 4 、 Figure 5 、 Figure 8 、 Figure 9 and Figure 10 As shown, the valve core assembly 1 includes a valve core seat 120. The valve core seat 120 is a water drop-shaped disc structure, one end of which is a small arc of r, corresponding to the tail of the water drop for rotating and connecting the bearing seat 101, and a bearing cover 102 and a valve core back cover 103 for protecting the bearing seat 101 are also provided at this end, and the other end is a large arc of R, corresponding to the head of the water drop for installing the light-transmitting glass 110, wherein a valve port 5 is opened at the large arc end, and the diameter of the valve port 5 is D2. The upper and lower end surfaces are respectively provided with a sealing plate 107 and a support plate 116. The diameters of the sealing plate 107 and the support plate 116 are slightly smaller than the diameter of the large arc, and the large arc end of the valve core seat 120 is a concave structure, so that the sealing plate 107 and the support plate 116 can be engaged in the inner side of the large arc, and the concave structure plays a role in quickly positioning the installation of the sealing plate 107 and the support plate 116. At the same time, the concave structure ensures the coaxiality of the sealing plate 107 and the support plate 116 with the valve port 5 after installation.
[0043] In the present invention, in order to further realize the rapid positioning and installation of the support plate 116 and improve the installation accuracy of the support plate 116, the support plate 116 is connected to the valve core seat 120 through the positioning shaft 108, as shown in FIG. Figure 6 and Figure 10As shown, mounting holes are provided at the left and right ends of the large arc end of the valve core seat 120, and an adaptive mounting groove is opened on the support plate 116, and the mounting hole and the mounting groove are used to install the positioning shaft 108; when installing the support plate 116 on the valve core seat 120, first put the shaft sleeve 121 into the mounting hole of the valve core seat 120, and then insert one end of the positioning shaft 108 into the mounting groove of the support plate 116, and the positioning shaft 108 and the mounting groove are interference fit to ensure the stability of the connection between the positioning shaft 108 and the support plate 116, and then insert the other end of the positioning shaft 108 into the mounting hole of the valve core seat 120 and the positioning shaft 108 can slide back and forth in the mounting hole, which can realize the rapid positioning and installation of the support plate 116, and can prevent the support plate 116 from rotating on the valve core seat 120, thereby ensuring the stability of the support plate 116.
[0044] Specifically, the end surfaces of the sealing plate 107 and the support plate 116 are each provided with a sealing ring 6 adapted for the lower housing assembly 2 and a through hole adapted for the valve port 5. The sealing plate 107 and the support plate 116 are connected via a connecting structure. The through hole of the sealing plate 107 is used to install a light-transmitting glass 110, while the through hole of the support plate 116 is adapted to accommodate the valve port 5. When the vacuum valve is closed, the light-transmitting glass 110 blocks the valve port 5, reducing the light intensity and allowing weak light to pass through the valve port 5 for debugging, verification, and maintenance of the internal equipment environment. Furthermore, the sealing ring 6 mounted on the sealing plate 107 and the support plate 116 is tightly attached to the inner wall of the lower housing assembly 2, and is compressed to ensure sealing at the valve port 5. When the vacuum valve is open, the light-transmitting glass 110 does not block the valve port 5, allowing strong light to pass directly through the valve port 5.
[0045] Specifically, such as Figure 6As shown, the light-transmitting glass 110 is installed on the through hole of the sealing plate 107 through the first pressure plate 111 and the second pressure plate 113, and the upper and lower end surfaces of the light-transmitting glass 110 are respectively abutted against the first pressure plate 111 and the second pressure plate 113, wherein the second pressure plate 113 is fixedly connected to the sealing plate 107 by bolts, and the first pressure plate 111 is connected to the sealing plate 107 through a support column 112, one end of the support column 112 is fixedly connected to the first pressure plate 111 by bolts, and the other end of the support column 112 is inserted into the end surface of the sealing plate 107 and has an interference fit with the sealing plate 107. Due to the thickness of the light-transmitting glass 110, when the first pressure plate 111 is attached to the light-transmitting glass 110, there is still a certain distance between the first pressure plate 111 and the end face of the sealing plate 107. At this time, if the traditional bolt connection method is used to connect the first pressure plate 111 and the sealing plate 107, a long bolt is required to connect them. Due to the small contact area of the bolt connection, the pre-tightening force generated by the bolt is likely to cause stress concentration on the first pressure plate 111. Moreover, since the end face of the first pressure plate 111 is not in contact with the end face of the sealing plate 107 and the thickness of the first pressure plate 111 is relatively thin, the first pressure plate 111 is prone to deformation. In addition, when the bolt connection is made, it is easy to over-tighten the first pressure plate 111, causing excessive pressure on the light-transmitting glass 110, thereby damaging the light-transmitting glass 110. The present invention connects the first pressure plate 111 and the sealing plate 107 through the support column 112. The support column 112 not only provides support for the first pressure plate 111 to avoid stress concentration and prevent the first pressure plate 111 from deformation, but also effectively prevents the first pressure plate 111 from over-pressing the light-transmitting glass 110, thereby avoiding damage to the light-transmitting glass 110.
[0046] Specifically, a sealing ring 6 is provided between the first pressing plate 111 and the light-transmitting glass 110 and between the second pressing plate 113 and the light-transmitting glass 110 . The sealing ring 6 ensures the sealing between the first pressing plate 111 , the second pressing plate 113 and the light-transmitting glass 110 .
[0047] In the present invention, the diameter of the light-transmitting glass 110 is D1, the diameter of the valve port 5 is D2, and the outer diameter and inner diameter of the second pressure plate 113 are D2 and D3, respectively. D2>D3>D1, and preferably, D1:D2=4:5. This allows the light-transmitting glass 110 to be replaced with a new one simply by disassembling the second pressure plate 113 without disassembling other parts of the vacuum valve. Of course, depending on actual needs, the light-transmitting glass 110 of different thicknesses and diameters ≤ D1 can be replaced by replacing the first and second pressure plates 111, 113 of different sizes. This makes replacement simple, convenient, and quick.
[0048] Specifically, the bearing seat 101 is fixedly connected to the rotating wheel 119. The other end of the rotating wheel 119 is hingedly connected to the transmission rod 117 through the positioning ring 118. The other end of the transmission rod 117 is hingedly connected to the sealing structure. The sealing structure is located between the sealing plate 107 and the support plate 116. The sealing structure is used to adjust the distance between the sealing plate 107 and the support plate 116. When the distance between the sealing plate 107 and the support plate 116 increases, the sealing ring 6 thereon will closely contact the inner wall of the lower housing assembly 2, thereby enhancing the seal.
[0049] like Figure 4 、 Figure 8 and Figure 9 As shown, the rotating wheel 119 is a teardrop-shaped disc structure, similar in structure to an eccentric wheel. The large arc end of the rotating wheel 119 is externally mounted on the bearing seat 101, and the small arc end is interference-fitted with the connecting column 127. The other end of the connecting column 127 is connected to the third bearing 128. The positioning ring 118 is externally mounted on the third bearing 128. One end of the transmission rod 117 is a clamp structure, which is externally mounted on the positioning ring 118 through the clamp structure, and the other end is hinged to a sealing structure. The present invention drives the bearing seat 101 to rotate through the drive assembly 3. When the bearing seat 101 rotates, the rotating wheel 119 rotates. When the rotating wheel 119 rotates, it rotates eccentrically around its large arc end, thereby driving the positioning ring 118 at the small arc end and the transmission rod 117 to move up and down. When the vacuum valve changes from the open state to the closed state, the drive assembly 3 rotates forward, providing a clockwise torque force to the bearing seat 101 and the rotating wheel 119. At this time, the transmission rod 117 cannot push the sealing structure, so the rotating wheel 119 and the transmission rod 117 cannot rotate. However, under the action of the torque force, the valve core seat 120 can be driven to rotate clockwise downward. When the valve core seat 120 rotates to the sealing position, the positional relationship of the rotating wheel 119, the transmission rod 117 and other components is as follows: Figure 8 As shown, at this time, one end of the valve core seat 120 is close to the inner wall of the lower housing assembly 2. At this time, since the valve core seat 120 cannot continue to rotate and will provide a support, the transmission rod 117 can push the sealing structure under the action of the torque force, and the transmission rod 117 and the rotating wheel 119 can continue to rotate until Figure 9 As shown, the transmission rod 117 is combined with the end face of the valve core seat 120. At this time, the center line of the rotating wheel 119 and the center line of the transmission rod 117 have an angle a less than 5°. The angle a can realize the self-locking of the transmission rod 117. That is, if the transmission rod 117 is pushed by the sealing structure at this time, the transmission rod 117 will only push the rotating wheel 119 clockwise. However, due to the obstruction of the valve core seat 120, the rotating wheel 119 cannot rotate, forming a mechanical self-locking, which can overcome the influence of power failure or large vibration of the drive component 3 in the closed valve state, thereby ensuring the sealing performance.
[0050] In the present invention, the angle a can be adjusted by adjusting the installation of the positioning ring 118, as shown in FIG. Figure 13As shown, the positioning ring 118 is eccentrically mounted on the third bearing 128, i.e., the axis of the positioning ring 118 is not coaxial with the axis of the third bearing 128, and the connecting column 127 is coaxial with the third bearing 128. Therefore, when the positioning ring 118 is rotated, the axis position of the third bearing 128 will change to a certain extent. This will cause the angle between the rotating wheel 119 and the transmission rod 117 to change to a certain extent when the vacuum valve reaches the sealing position, thereby causing the angle a of the vacuum valve to change when the vacuum valve is in the closed state. In the present invention, the range of angle a is 2°-5° and can be adjusted according to actual needs to ensure that the vacuum valve can form a good mechanical self-locking performance after the valve is closed.
[0051] Specifically, such as Figure 7 The connecting structure includes a connecting sleeve 104, an auxiliary sleeve 105 and a support spring 106. The connecting sleeve 104 is adapted to engage with the support plate 116. The auxiliary sleeve 105 is sleeved inside the connecting sleeve 104. The auxiliary sleeve 105 can slide back and forth in the connecting sleeve 104. A connecting shaft 109 is provided at one end of the auxiliary sleeve 105. One end of the connecting shaft 109 is connected to the auxiliary sleeve 105 by a bolt, and the other end is inserted into the sealing plate 107 and interference fits with the sealing plate 107. The support spring 106 is located between the inner wall of the connecting sleeve 104 and the outer wall of the auxiliary sleeve 105, and one end of the support spring 106 abuts against the connecting sleeve 104, and the other end abuts against the auxiliary sleeve 105.
[0052] Specifically, such as Figure 6 、 Figure 8 and Figure 9 As shown, the sealing structure includes a connecting plate 114, which is externally mounted on the light-transmitting glass 110. The end face of the connecting plate 114 is provided with a plurality of positioning columns 125, and the positioning columns 125 are provided with first bearings 124, one of which is connected to the transmission rod 117, and the outer walls of the remaining first bearings 124 are rollingly adapted to the inner walls of the valve core seat 120.
[0053] In the present invention, a guide rail groove 129 is provided on the inner wall of the valve core seat 120, and the outer wall of the first bearing 124 fits in the guide rail groove 129. The present invention preferably uses four first bearings 124 to support the entire connecting plate 114. Of course, three, five, etc. first bearings 124 can also be selected to support the connecting plate 114 according to actual conditions.
[0054] Specifically, the end face of the connecting plate 114 is provided with a plurality of mounting columns 123, and the upper and lower ends of the mounting columns 123 are both embedded with steel ball sleeves 115, and the steel ball 122 is rolling-adapted in the steel ball sleeve 115, wherein the steel ball 122 at the upper end of the mounting column 123 abuts against the end face of the sealing plate 107, and the steel ball at the lower end of the mounting column 123 abuts against the end face of the support plate 116, and the end faces of the sealing plate 107 and the support plate 116 are both provided with steel ball grooves 126 adapted to the steel ball 122.
[0055] In the present invention, the transmission rod 117 can drive the connecting plate 114 to rotate, and when the connecting plate 114 rotates, the position of the steel ball 122 can also be changed. Figure 6 and Figure 8 As shown, when the vacuum valve is not in the closed state, that is, in the open state and the sealing position, the steel ball 122 is located in the steel ball groove 126. The connecting plate 114 rotates to push the steel ball 122 out of the steel ball groove 126, and the steel ball 122 pushes the sealing plate 107 and the support plate 116 to move, thereby increasing the distance between the sealing plate 107 and the support plate 116.
[0056] When the distance between the support plate 116 and the sealing plate 107 increases, as shown in FIG. Figure 7 As shown, the sealing plate 107 moves downward and drives the auxiliary sleeve 105 downward through the connecting shaft 109; the support plate 116 moves upward and drives the connecting sleeve 104 upward; at this time, the support spring 106 is compressed by the extrusion of the auxiliary sleeve 105 and the connecting sleeve 104.
[0057] Working principle of the present invention:
[0058] From the open valve state to the closed valve state:
[0059] The driving assembly 3 rotates forward, providing a clockwise torque to the bearing seat 101 and the rotating wheel 119 and transmitting it to the transmission rod 117. At this time, since the steel ball 122 is located in the steel ball groove 126 and due to the action of the support spring 106, if the steel ball 122 is to be moved out of the steel ball groove 126, the steel ball 122 will generate a friction torque on the steel ball groove 126 and transmit the torque to the valve core seat 120 through the sealing plate 107 and the support plate 116. At this time, since the valve core seat 120 is rotationally connected to the bearing seat 101, the valve core seat 120 will start to rotate. When the valve core seat 120 rotates to the position shown in FIG. Figure 8After the sealing position is shown, the lower end surface of the valve core seat 120 will fit with the inner wall of the lower shell assembly 2 and cannot continue to rotate. At this time, the friction torque generated by the steel ball 122 cannot continue to be transmitted. Under the action of the driving torque of the driving assembly 3, the steel ball 122 is pushed out of the steel ball groove 126. After the steel ball 122 moves out of the steel ball groove 126, it pushes the sealing plate 107 and the support plate 116 to move, so that the sealing ring 6 between the sealing plate 107 and the lower shell assembly 2 and the sealing ring 6 between the support plate 116 and the lower shell assembly 2 are squeezed to achieve the sealing of the valve port 5; at the same time, the transmission rod 117 drives the connecting plate 114 to continue to rotate. When the transmission rod 117 drives the connecting plate 114 to continue to rotate, the connecting plate 114 is rotated ... When the rod 117 rotates to fit with the valve core seat 120, the transmission rod 117 cannot continue to rotate. At this time, the center line of the transmission rod 117 and the center line of the rotating wheel 119 have an angle a less than 5°. The angle a can achieve self-locking of the transmission rod 117, that is, at this time, if the transmission rod 117 is pushed by the light-transmitting glass 110, the sealing plate 107 and other components, the transmission rod 117 will only push the rotating wheel 119 clockwise. However, due to the obstruction of the valve core seat 120, the rotating wheel 119 cannot rotate, forming a mechanical self-locking. At this time, the valve is in the closed state, which can overcome the influence of power failure or large vibration of the drive component 3 and ensure the sealing performance.
[0060] From valve closed state to valve open state:
[0061] When the valve is closed, the steel ball 122 is not in the steel ball groove 126, and the driving assembly 3 rotates in the opposite direction, providing a counterclockwise torque force for the bearing seat 101 and the rotating wheel 119. At this time, the torque force is transmitted to the steel ball 122. Since there is rolling friction between the steel ball 122 and the sealing plate 107 and the support plate 116, the friction is small. Under the action of the valve core seat 120's own gravity, the valve core seat 120 will not be driven to rotate counterclockwise upward. At this time, the rotating wheel 119 drives the transmission rod 117 and the connecting plate 114 to rotate. When it rotates to the sealing position, the steel ball 122 moves again. Into the steel ball groove 126; at this time, the rotating wheel 119 continues to rotate counterclockwise upward. If you want to move the steel ball 122 out of the steel ball groove 126 at this time, you need to overcome the friction torque generated by the steel ball 122 and the extrusion force required for the compression support spring 106. Since this overcoming force is provided by the weight of the valve core seat 120 itself, and the weight of the valve core seat 120 itself is much smaller than the extrusion force required for the compression support spring 106, the steel ball 122 cannot be pushed out of the steel ball groove 126, and the valve core seat 120 is driven to move counterclockwise upward and move into the upper shell assembly 4.
[0062] Specifically, the present invention also includes an indicator gauge 7, which is used to display the rotation angle of the valve core assembly 1 and the open or closed state of the valve core assembly 1. The indicator gauge 7 is installed on the lower housing assembly 2, and the input shaft 701 of the indicator gauge 7 is fixedly connected to the bearing seat 101.
[0063] Indicator gauge 7 is used for mechanical indication. When the vacuum valve is in the closed state, the pointer of indicator gauge 7 points to the 0 position on the dial, which displays CLOSE; when the vacuum valve is in the open state, the pointer of indicator gauge 7 points to the 10 position on the dial, which displays OPEN; of course, the 2-8 positions on the dial of indicator gauge 7 can also indicate the current degree of rotation of the valve core assembly 1.
[0064] Specifically, such as Figure 11 、 Figure 14 and Figure 15 As shown, the lower shell assembly 2 includes a lower shell 201, one end face of the lower shell 201 is provided with a lower shell cover 202, the lower shell cover 202 is installed with the indicator 7, and the other end face of the lower shell 201 is provided with a transmission member, which is used to connect the bearing seat 101 and the drive assembly 3.
[0065] In order to ensure the sealing of the vacuum valve, the lower shell 201 is formed in one piece.
[0066] Specifically, the transmission member includes a lower shell fixing seat 203, a lower shell connecting seat 210, a rotating wheel transmission seat 205, a rotating shaft 206 and a transmission wheel seat 208. The lower shell fixing seat 203 is fixedly connected to the end face of the lower shell 201, and the lower shell connecting seat 210 is fixedly connected to the upper end face of the lower shell fixing seat 203. The rotating shaft 206 is rotatably connected to the lower shell fixing seat 203 and the lower shell connecting seat 210 through the rotating shaft fixing seat 207 and the second bearing 211, wherein there are two second bearings 211, and a pressure ring 204 is also provided between the two second bearings 211. One end of the rotating shaft 206 is used to connect the drive component 3, and the other end is connected to the rotating wheel transmission seat 205 and the transmission wheel seat 208 through a locking screw 209. The transmission wheel seat 208 is used to connect the rotating wheel 119, and the rotating shaft 206 is connected to the bearing seat 101 through a connecting bolt 8.
[0067] Specifically, such as Figure 15 As shown, the drive assembly 3 includes a motor 301, a motor connecting plate 302 and a motor base 303. The upper end of the lower shell connecting base 210 is connected to the motor base 303. The motor 301 is installed on the motor base 303 through the motor connecting plate 302 and bolts. The output shaft of the motor 301 is connected to the rotating shaft adapter plate 304, and the rotating shaft adapter plate 304 is connected to the rotating shaft 206.
[0068] Unless otherwise defined, in the embodiments of the present disclosure and the accompanying drawings, the same reference numerals represent the same meanings.
[0069] In the drawings of the embodiments of the present disclosure, only the structures related to the embodiments of the present disclosure are involved, and other structures can refer to general designs.
[0070] For the sake of clarity, in the drawings used to describe the embodiments of the present disclosure, parts or regions are enlarged. It will be understood that when an element is referred to as being "on" or "under" another element, the element can be "directly" "on" or "under" the other element, or intervening elements may be present.
[0071] The above description is merely a specific embodiment of the present disclosure, but the scope of protection of the present disclosure is not limited thereto. Any changes or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in this disclosure should be included in the scope of protection of the present disclosure. Therefore, the scope of protection of the present disclosure should be based on the scope of protection of the claims.
Claims
1. A vacuum valve for use in the optical field, comprising a valve core assembly (1), a lower housing assembly (2), an upper housing assembly (4) and a drive assembly (3), wherein the upper housing assembly (4) is connected to the lower housing assembly (2) in an upper and lower manner, a valve port (5) adapted to the valve core assembly (1) is provided in the middle of the lower housing assembly (2), the valve core assembly (1) is rotatably mounted inside the lower housing assembly (2), and the drive assembly (3) is connected to the valve core assembly (1), characterized in that: The valve core assembly (1) includes a valve core seat (120), and the upper and lower end surfaces of the valve core seat (120) are respectively provided with a sealing plate (107) and a support plate (116), and the support plate (116) is connected to the valve core seat (120) via a positioning shaft (108). The end surfaces of the sealing plate (107) and the support plate (116) are both provided with a sealing ring (6) adapted to the lower housing assembly (2) and a through hole adapted to the valve port (5), and the sealing plate (107) and the support plate (116) are connected via a connecting structure. One end of the valve core seat (120) is rotatably connected to the bearing seat (101), and the other end is provided with a light-transmitting glass (110), the light-transmitting glass (110) is located in the through hole of the sealing plate (107), and the upper and lower end surfaces of the light-transmitting glass (110) respectively abut against the first pressing plate (111) and the second pressing plate (113), the first pressing plate (111) and the second pressing plate (113) are both fixedly connected to the sealing plate (107), and the first pressing plate (111) is connected to the sealing plate (107) via a support column (112); The bearing seat (101) is fixedly connected to the rotating wheel (119), the other end of the rotating wheel (119) is hinged to the transmission rod (117) through the positioning ring (118), and the other end of the transmission rod (117) is hinged to the sealing structure, and the sealing structure is located between the sealing plate (107) and the support plate (116). The sealing structure is used to adjust the distance between the sealing plate (107) and the support plate (116); The sealing structure comprises a connecting plate (114), the connecting plate (114) being outer-mounted on the light-transmitting glass (110), a plurality of positioning columns (125) being provided on the end surface of the connecting plate (114), the positioning columns (125) being sleeved with first bearings (124), one of the first bearings (124) being connected to the transmission rod (117), and the outer walls of the remaining first bearings (124) being rollingly adapted to the inner walls of the valve core seat (120); The end surface of the connecting plate (114) is provided with a plurality of mounting columns (123), and the upper and lower ends of the mounting columns (123) are both embedded with steel ball sleeves (115), and the steel ball (122) is rolling-adapted in the steel ball sleeve (115), wherein the steel ball (122) at the upper end of the mounting column (123) abuts against the end surface of the sealing plate (107), and the steel ball (122) at the lower end of the mounting column (123) abuts against the end surface of the support plate (116), and the end surfaces of the sealing plate (107) and the support plate (116) are both provided with steel ball grooves (126) adapted to the steel ball (122).
2. The vacuum valve for use in the optical field according to claim 1, characterized in that: The connecting structure comprises a connecting sleeve (104), an auxiliary sleeve (105) and a support spring (106), wherein the connecting sleeve (104) is adapted to be engaged with the support plate (116), the auxiliary sleeve (105) is sleeved inside the connecting sleeve (104), and the auxiliary sleeve (105) can slide back and forth in the connecting sleeve (104), and a connecting shaft (109) is provided at one end of the auxiliary sleeve (105), one end of the connecting shaft (109) is connected to the auxiliary sleeve (105) by a bolt, and the other end is inserted into the sealing plate (107) and is interference-fitted with the sealing plate (107), and the support spring (106) is located between the inner wall of the connecting sleeve (104) and the outer wall of the auxiliary sleeve (105), and one end of the support spring (106) abuts against the connecting sleeve (104), and the other end abuts against the auxiliary sleeve (105).
3. The vacuum valve for use in the optical field according to claim 1, characterized in that: The device further comprises an indicator (7), the indicator (7) being used to display the rotation angle of the valve core assembly (1) and the valve opening or closing state of the valve core assembly (1). The indicator (7) is mounted on the lower housing assembly (2), and the input shaft (701) of the indicator (7) is fixedly connected to the bearing seat (101).
4. The vacuum valve for use in the optical field according to claim 3, characterized in that: The lower housing assembly (2) comprises a lower housing (201), one end surface of the lower housing (201) is provided with a lower housing cover (202), the lower housing cover (202) is mounted with the indicator (7), and the other end surface of the lower housing (201) is provided with a transmission member, the transmission member being used to connect the bearing seat (101) and the drive assembly (3).
5. The vacuum valve for use in the optical field according to claim 4, characterized in that: The transmission member comprises a lower shell fixing seat (203), a lower shell connecting seat (210), a rotating wheel transmission seat (205), a rotating shaft (206) and a transmission wheel seat (208), wherein the lower shell fixing seat (203) is fixedly connected to the end surface of the lower shell (201), the lower shell connecting seat (210) is fixedly connected to the upper end surface of the lower shell fixing seat (203), the rotating shaft (206) is rotatably connected to the lower shell fixing seat (203) and the lower shell connecting seat (210) via a rotating shaft fixing seat (207) and a second bearing (211), one end of the rotating shaft (206) is used to connect to the driving component (3), and the other end is connected to the rotating wheel transmission seat (205) and the transmission wheel seat (208) via a locking screw (209), the transmission wheel seat (208) is used to connect to the rotating wheel (119), and the rotating shaft (206) is connected to the bearing seat (101) via a connecting bolt (8).
6. The vacuum valve for use in the optical field according to claim 5, characterized in that: The drive assembly (3) comprises a motor (301), a motor connecting plate (302) and a motor base (303); the upper end of the lower shell connecting base (210) is connected to the motor base (303); the motor (301) is mounted on the motor base (303) via the motor connecting plate (302) and bolts; the output shaft of the motor (301) is connected to a rotating shaft adapter plate (304); and the rotating shaft adapter plate (304) is connected to the rotating shaft (206).
Citation Information
Patent Citations
Workpiece loading and unloading trolley of large optical coating machine
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