Test device

Abstract

A test apparatus includes: a test chamber; the first bracket is used for supporting a plurality of first burn-in boards which are stacked in a first direction; the second bracket is positioned on the first bracket and is configured to support a plurality of second burn-in boards which are stacked in the first direction; and a supply duct located on a first wall of the test chamber in the second direction. The supply duct includes a first flow distributor including at least one first inclined plate overlapping the plurality of first burn-in plates and extending in an inclined manner toward the bottom of the first bracket. The second flow distributor includes at least one second inclined plate spaced apart from the at least one first inclined plate in the first direction, overlapping the plurality of second burn-in plates in the second direction, and extending in an inclined manner toward the bottom of the second bracket.

Description

Technical Field

[0001] Various example embodiments relate to a testing apparatus, and more particularly, to a testing apparatus that performs a burn-in test on a semiconductor package. Background Art

[0002] The substrate or wafer on which a specific integrated circuit is formed is divided into semiconductor chips, which are then assembled into semiconductor packages through an assembly process. The completed semiconductor packages undergo various tests and can be classified as either normal products or defective products. This process maintains product reliability. Testing can include burn-in testing, which checks the lifespan and / or presence of faults of semiconductor packages in extreme environments outside of normal operating conditions.

[0003] In a typical burn-in test process, thermal stress is applied to a semiconductor package to be inspected by circulating high-temperature air or low-temperature air as an inspection fluid into a test chamber that receives the semiconductor package to be inspected.

[0004] Variation in the flow rate of air as the inspection fluid in a heated state over and around the package to be inspected may cause variation in the inspection temperature, thereby reducing the accuracy of the burn-in test.

[0005] Additionally or alternatively, to improve test reliability, uniformity of the internal temperature of the test chamber should be assumed. Within a single test chamber, multiple burn-in boards are arranged vertically along the chamber. Therefore, when the internal temperature of the test chamber is non-uniform, different test environments are locally generated within the same test chamber, thereby reducing the reliability of the inspection results.

[0006] Therefore, a test chamber that can reduce temperature and flow rate deviations in the test chamber is being sought. Summary of the Invention

[0007] The technical purpose of the inventive concept is to provide a testing device with reduced internal temperature deviation and / or improved air flow uniformity.

[0008] The objects according to the inventive concept are not limited to the objects mentioned above. Other objects and / or advantages not mentioned according to the inventive concept can be understood based on the following description and can be more clearly understood based on various exemplary embodiments. In addition, it can be easily understood that the objects and advantages according to the present disclosure can be achieved using the means shown in the claims or their combination.

[0009] According to some example embodiments, a testing device includes: a testing chamber; a first bracket, the first bracket being located within the testing chamber and configured to support a plurality of first burn-in boards stacked in a first direction; a second bracket, the second bracket being located within the testing chamber and above the first bracket and configured to support a plurality of second burn-in boards stacked in the first direction; and a supply duct, the supply duct being located on a first wall of the testing chamber in a second direction, wherein the supply duct includes a first flow distributor corresponding to the first bracket and a second flow distributor corresponding to the second bracket, wherein the first flow distributor includes at least one first inclined plate, the at least one first inclined plate being configured to at least partially overlap with the plurality of first burn-in boards in the second direction, and the at least one first inclined plate extending in an inclined manner toward a bottom of the first bracket in an interior space of the supply duct, wherein the second flow distributor includes at least one second inclined plate spaced apart from the at least one first inclined plate in the first direction, the at least one second inclined plate being configured to at least partially overlap with the plurality of second burn-in boards in the second direction, and the at least one second inclined plate extending in an inclined manner toward the bottom of the second bracket in an interior space of the supply duct.

[0010] Alternatively or additionally, according to various example embodiments, a testing device includes: a testing chamber; a first bracket positioned within the testing chamber and configured to support a plurality of first burn-in panels stacked in a first direction; a second bracket positioned within the testing chamber and above the first bracket and configured to support a plurality of second burn-in panels stacked in the first direction; and a supply conduit disposed on a first wall of the testing chamber in a second direction. The supply conduit includes a first flow distributor corresponding to the first bracket and a second flow distributor corresponding to the second bracket. The first flow distributor includes at least one first flow distribution structure, each of which defines a first interior space. The width of the first interior space in the second direction increases as the first interior space extends along the first direction. The second flow distributor includes a plurality of second flow distribution structures arranged along a third direction intersecting the first and second directions. Each of the plurality of second flow distribution structures defines a second interior space. The width of the second interior space in the second direction increases as the second interior space extends along the first direction.

[0011] Alternatively or additionally, according to various example embodiments, a testing apparatus includes: a testing chamber; a first rack positioned within the testing chamber and configured to support a plurality of first burn-in panels stacked in a first direction; a second rack positioned within the testing chamber and above the first rack and configured to support a plurality of second burn-in panels stacked in the first direction; a first wall of the testing chamber extending in a second direction and including or defining a plurality of inlets; and a supply conduit positioned on the first wall of the testing chamber. The supply conduit includes a first flow distributor corresponding to the first rack and a second flow distributor corresponding to the second rack. The testing apparatus further includes a second wall of the testing chamber extending in a second direction and defining a first drain hole corresponding to the first rack and a second drain hole corresponding to the second rack. The first flow distributor includes at least one first inclined plate. The distance between the at least one first inclined plate and the first wall increases as the at least one first inclined plate extends along the first direction. The second flow distributor includes a plurality of second inclined plates spaced apart from one another along a third direction intersecting the first and second directions. A distance between each of the plurality of second inclined plates and the first wall increases as each of the plurality of second inclined plates extends along the first direction.

[0012] Specific details of these and other example embodiments are included in the detailed description and drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] The above and other aspects and features of the inventive concept will become more apparent by describing in detail some example embodiments of the inventive concept with reference to the accompanying drawings, in which:

[0014] Figure 1 is a diagram illustrating a test device according to some example embodiments;

[0015] Figure 2 Is used for illustration Figure 1 Diagram of the supply pipeline in;

[0016] Figure 3 Is used for illustration Figure 1 FIGURE 10 of the supply duct and the first wall;

[0017] Figure 4 Is used for illustration Figure 1 a diagram of a first wall of a test chamber in FIG.

[0018] Figures 5 to 8 Is used for illustration Figure 2 FIG of the second inclined plate in FIG;

[0019] Figures 9 to 12 Is used for illustration Figure 2 FIG. 1 of the first inclined plate;

[0020] Figure 13 is a diagram illustrating a test device according to some example embodiments;

[0021] Figure 14 Is used for illustration Figure 13 FIGURE 10 of the supply duct and the first wall;

[0022] Figure 15 Is used for illustration Figure 13 Figure 1 of the first wall;

[0023] Figure 16 Is used for illustration Figure 1 Diagram of the supply pipeline in;

[0024] Figure 17 Is used for illustration Figure 1 FIGURE 10 of the supply duct and the first wall;

[0025] Figure 18 Is used for illustration Figure 1 a diagram of a first wall of a test chamber in FIG.

[0026] Figure 19 and Figure 20 is a diagram illustrating a test device according to some example embodiments;

[0027] Figure 21 and Figure 22 is a diagram illustrating a test device according to some example embodiments;

[0028] Figure 23 Is used for illustration Figure 21 and Figure 22 Figure 1 shows a diagram of a first guide structure and a second guide structure. DETAILED DESCRIPTION

[0029] Figure 1 is a diagram illustrating a test device according to some example embodiments. Figure 2 Is used for illustration Figure 1 Diagram of the supply pipeline in. Figure 3 Is used for illustration Figure 1 Figure 4 shows a diagram of the supply duct and the first wall.

[0030] Figure 4 Is used for illustration Figure 1 Figure 2 shows a diagram of the first wall of the test chamber. Figure 2 is a diagram showing a supply pipeline, and Figure 4 is a diagram showing the supply duct and the first wall of the test chamber.

[0031] refer to Figures 1 to 4 , a testing apparatus according to some example embodiments may include a testing chamber 100 , a supply pipe 200 , a discharge pipe 300 , and a circulator 400 .

[0032] In some exemplary embodiments, the test chamber 100 is provided as a burn-in test chamber for testing thermal stress and / or moisture stress on an inspection target P. The burn-in test chamber operates in accordance with a scheme that controls test temperature conditions using heated or cooled air. The test chamber 100 can be adapted for various devices that can perform various thermal damage tests on the inspection target P at high and low temperatures to test the strength, stability, and / or reliability of the product.

[0033] For example, each of the first burn-in board B1 and the second burn-in board B2 may be composed of or include a printed circuit board having an electronic circuit pattern printed thereon. One burn-in board B1 or B2 may be equipped with a plurality of fixed sockets to simultaneously accommodate a plurality of inspection targets P. For example, the test chamber 100 accommodates the burn-in boards B1 and B2 on which the plurality of inspection targets P are placed, and applies an inspection signal to the burn-in boards B1 and B2.

[0034] The inspection targets P may include semiconductor packages completed through chip manufacturing processes and packaging processes; however, example embodiments are not limited thereto. The inspection targets P may be arranged in a matrix on the test board B. There may be more or fewer inspection units arranged in the first burn-in board B1 and / or the second burn-in board B2. In some examples, the inspection targets P may be or include bare chips that have not yet undergone a packaging process.

[0035] The inspection target P can be inserted into a fixed socket provided on the upper surface of each of the burn-in boards B1 and B2 and can be connected to the electronic circuit pattern inside each of the burn-in boards B1 and B2. A connection terminal provided on one side of each of the burn-in boards B1 and B2 and connected to the electronic circuit pattern can be inserted into a connection socket provided at one axis of a wall constituting the test chamber 100. Therefore, an inspection signal applied to the connection socket of the test chamber 100 can be applied to the inspection target P via the connection terminal and the electronic circuit pattern.

[0036] The test chamber 100 has an inspection space defined therein. The test chamber 100 can be opened or closed by one or more doors. The first burn-in board B1 and the second burn-in board B2 can be placed in or removed from the test chamber 100 through the doors. When the test chamber 100 is closed, the test equipment performs a test on the inspection object P.

[0037] The first rack 10 and the second rack 20 are provided in the test chamber 100. The racks 10 and 20 are provided in the inspection space of the test chamber 100. For example, two racks 10 and 20 are stored in the test chamber 100. The following description will be based on an example in which two racks 10 and 20 are provided in the test chamber 100. However, example embodiments are not limited thereto. Three or more racks may be provided in the test chamber 100.

[0038] The first bracket 10 supports the first aging boards B1 stacked in the third direction Z. The first aging boards B1 are placed on first guide rails 13 installed in the first bracket 10. The inspection object P is placed on the first aging boards B1. The space between the first guide rails 13 adjacent to each other in the third direction Z is provided as a first slot S1 for accommodating the first aging boards B1 therein. The first bracket 10 includes a plurality of first slots S1, and each first aging board B1 is accommodated in each first slot S1.

[0039] In this regard, the third direction Z is perpendicular to the upper surface of the first burn-in board B1. As used herein, the terms "upper, top, lower, and bottom" are defined based on the third direction Z. The first direction X and the second direction Y are directions parallel to the upper surface of the first burn-in board B1. The first direction X and the second direction Y are perpendicular to the third direction Z, and the first direction X is perpendicular to the second direction Y.

[0040] The first bracket 10 includes or defines a plurality of first through-holes 12 and 14. The first through-holes 12 and 14 may correspond to the first slots S1. The first through-holes 12 and 14 may correspond to spaces between first burn-in boards B1 adjacent to each other in the third direction Z. The first through-holes 12 may be formed in a wall of the first bracket 10 facing the supply pipe 200, and the first through-holes 14 may be formed in a wall of the first bracket 10 facing the exhaust pipe 300.

[0041] The second bracket 20 is arranged above the first bracket 10. The first bracket 10 and the second bracket 20 are stacked in the third direction Z. The second bracket 20 supports the second aging board B2 stacked in the third direction Z. The second aging board B2 can be placed on a second guide rail 23 installed in the second bracket 20. The inspection target P is placed on the second aging board B2. The space between the second guide rails 23 adjacent to each other in the third direction Z is set as a second slot S2 for accommodating the second aging board B2 therein. The second bracket 20 includes a plurality of second slots S2, and each second aging board B2 is accommodated in each second slot S2.

[0042] The second bracket 20 includes or defines a plurality of second through-holes 22 and 24. The second through-holes 22 and 24 may correspond to the second slots S2. The second through-holes 22 and 24 may correspond to spaces between the second burn-in boards B2 adjacent to each other in the third direction Z. The second through-holes 22 may be formed in a wall of the second bracket 20 facing the supply pipe 200, and the second through-holes 24 may be formed in a wall of the second bracket 20 facing the exhaust pipe 300.

[0043] The test chamber 100 includes a first wall 110 and a second wall 120. The first wall 110 is opposite to the second wall 120 in a first direction X. The first wall 110 includes or defines at least one first inlet 111 and at least one second inlet 112. The first inlet 111 corresponds to the first rack 10, and the second inlet 112 corresponds to the second rack 20. In some example embodiments, the first wall 110 includes or defines one first inlet 111 and one second inlet 112. The second wall 120 includes or defines a first drain hole 121 and a second drain hole 122. The first drain hole 121 corresponds to the first rack 10, and the second drain hole 122 corresponds to the second rack 20.

[0044] The supply duct 200 is formed on the first wall 110 of the test chamber 100. The supply duct 200 is provided to cover the first wall 110. The exhaust duct 300 is formed on the second wall 120 of the test chamber 100. The exhaust duct 300 is provided to cover the second wall 120.

[0045] The first flow distributor 210 and the second flow distributor 220 are provided in the supply pipe 200. The first flow distributor 210 corresponds to the first bracket 10, and the second flow distributor 220 corresponds to the second bracket 20.

[0046] The first flow distributor 210 includes at least one first flow distribution structure 211. The first flow distribution structure 211 includes a first inclined plate 216. In some example embodiments, the first flow distributor 210 includes one first flow distribution structure 211 and one first inclined plate 216.

[0047] The first inclined plate 216 may extend in an inclined manner from a portion of the inner wall of the supply duct 200 corresponding to the top of the first bracket 10 toward the bottom of the first bracket 10. The angle of the first inclined plate 216 relative to the plane defined by the first direction X and the second direction Y may be between 45 degrees and 90 degrees, such as 70 degrees; however, example embodiments are not limited thereto. The first inclined plate 216 may have a negative slope relative to the third direction Z. The distance W1 between the first wall 110 of the test chamber 100 and the first inclined plate 216 may increase as the first inclined plate extends in the third direction Z. The first internal space IS1 may be defined by the first inclined plate 216 and two opposing sidewalls 201 and 202 of the supply duct 200 in the second direction Y. The width W1 of the first internal space IS1 in the first direction X may increase as the first internal space IS1 extends in the third direction Z.

[0048] The first inclined plate 216 may overlap or at least partially overlap the first bracket 10 in the first direction X. The first inclined plate 216 may overlap the entire first inlet 111 in the first direction X. The first inclined plate 216 may overlap the plurality of first burn-in plates B1 in the first direction X.

[0049] The second flow distributor 220 is spaced apart from the first flow distributor 210 in the third direction Z. The second flow distributor 220 includes a plurality of second flow distribution structures 221, 222, 223, 224, and 225. The plurality of second flow distribution structures 221, 222, 223, 224, and 225 are arranged along the second direction Y. The plurality of second flow distribution structures 221, 222, 223, 224, and 225 are spaced apart from one another along the second direction Y. The second flow distributor 220 includes a plurality of second inclined plates 226. The dimensions of each of the second flow distribution structures 221, 222, 223, 224, and 225 can be the same as one another, or at least one can be different from the other second flow distribution structures; example embodiments are not limited thereto.

[0050] Each of the second flow distribution structures 221, 222, 223, 224, and 225 includes a second inclined plate 226. The second inclined plate 226 may extend in an inclined manner from a portion of the inner wall of the supply pipe 200 corresponding to the top of the second bracket 20 toward the bottom of the second bracket 20. The second inclined plate 226 may overlap or at least partially overlap with the second bracket 20 in the first direction X. The second inclined plate 226 may have a negative slope with respect to the third direction Z. The distance W2 between the first wall 110 of the test chamber 100 and the second inclined plate 226 may increase as the second inclined plate extends in the third direction Z.

[0051] Each of the second flow distribution structures 221, 222, 223, 224, and 225 may define a second internal space IS2. For example, the second flow distribution structure 224 may include a second inclined plate 226 and first and second sidewalls 227 and 228, respectively, disposed on opposite sides of the second inclined plate 226 in the second direction Y. The width W2 of each of the first and second sidewalls 227 and 228 in the first direction X may increase as each of the first and second sidewalls 227 and 228 extends in the third direction Z. An end of each of the first and second sidewalls 227 and 228 in the first direction X may align with an end of the supply pipe 200 in the first direction X. The second internal space IS2 may be defined by the second inclined plate 226 and the first and second sidewalls 227 and 228. The second internal space IS2 may be defined by the sidewall of each of the second flow distribution structures 221 and 225 that contacts the supply pipe 200, the second inclined plate 226, and one sidewall of the supply pipe 200. For example, the second flow distribution structure 221 may include a second inclined plate 226 defining the second internal space IS2, the sidewall 201 of the supply duct 200, and a second sidewall 228. The second flow distribution structure 225 may include a second inclined plate 226 defining the second internal space IS2, the sidewall 202 of the supply duct 200, and a first sidewall 227. The width W2 of the second internal space IS2 in the first direction X may increase as it extends in the third direction Z.

[0052] The second inclined plate 226 may overlap or at least partially overlap with the second bracket 20 in the first direction X. The second inclined plate 226 may overlap with the entire second inlet 112 in the first direction X. The second inclined plate 226 may overlap or at least partially overlap with the plurality of second aging plates B2 in the first direction X. The second inclined plate 226 may overlap or at least partially overlap with the first inclined plate 216 in the third direction Z. The second inclined plate 226 may be spaced apart from the first inclined plate 216 in the third direction Z.

[0053] In a plan view including the first direction X and the second direction Y, an area A1 of the first region in which the second flow distributor 220 is formed may be different from an area A2 of the second region in which the second flow distributor 220 is not formed. The area A1 of the first region in which the second flow distributor 220 is formed may be smaller than an area A2 of the second region in which the second flow distributor 220 is not formed.

[0054] In some example embodiments, the first wall 110 includes a first inlet 111 and a plurality of second inlets 112 defined therethrough.

[0055] The first inlet 111 may correspond to the first flow distribution structure 211. For example, the first inlet 111 may correspond to an opening of the first flow distribution structure 211 on a plane including the second direction Y and the third direction Z. The air F1 supplied to the first flow distribution structure 211 may be supplied to the first bracket 10 through the first inlet 111. The air F1 may be supplied from a fan (not shown) and / or a heater (not shown); example embodiments are not limited thereto.

[0056] The second inlets 112 may be spaced apart from each other along the second direction Y. The second inlets 112 may be arranged along the second direction Y. Each second inlet 112 may correspond to the second flow distribution structures 221, 222, 223, 224, and 225, respectively. For example, on a plane including the second direction Y and the third direction Z, the second inlets 112 may be connected to the openings of the second flow distribution structures 221, 222, 223, 224, and 225, respectively. The air F2 provided to each of the second flow distribution structures 221, 222, 223, 224, and 225 can be provided to the second bracket 20 through each second inlet 112. The air F2 may be provided from a fan (not shown) and / or a heater (not shown); example embodiments are not limited thereto.

[0057] The second wall 120 may include a first discharge hole 121 and a second discharge hole 122 defined therethrough. The first discharge hole 121 may correspond to the first bracket 10. The first discharge hole 121 may expose the entire first through-hole 14 of the first bracket 10. The second discharge hole 122 may correspond to the second bracket 20. The second discharge hole 122 may expose the entire second through-hole 24 of the second bracket 20. Therefore, the air F supplied from the first bracket 10 and the second bracket 20 can flow smoothly into the discharge duct 300.

[0058] The air F supplied to the supply duct 200 can be provided to the test chamber 100 through the first inlet 111 and the second inlet 112 of the first wall 110. The air F can be discharged from the test chamber 100 through the first discharge hole 121 and the second discharge hole 122 of the second wall 120. The air F is collected in the discharge duct 300 and then supplied back to the circulator 400. Therefore, the circulation path of the air F can extend along the supply duct 200, the test chamber 100, the discharge duct 300, and the circulator 400.

[0059] The circulator 400 may be provided on the top of the test chamber 100. The circulator 400 may be connected to the supply duct 200 and the exhaust duct 300 and may circulate the air F toward the supply duct 200, the test chamber 100, and the exhaust duct 300. For example, the circulator 400 may include a temperature controller 410 that controls the temperature of the air F so as to have an appropriate temperature according to the aging test process, and a blower 420 that enables the air F to flow toward the supply duct 200.

[0060] The temperature controller 410 may be provided at the top of the test chamber 100. The temperature controller 410 may control the temperature of the air supplied to the test chamber 100. The temperature controller 410 may be composed of or may include various heating and cooling devices. For example, the temperature controller 410 may be configured as a heater and a cooler, the heater being connected to an external power source to heat the air F, and the cooler using an appropriate refrigerant to cool the air F. Thus, the air F having a temperature within a specific range is supplied to the supply duct 200.

[0061] The blower 420 is provided at the top of the test chamber 100. The blower 420 drives the air F discharged from the temperature controller 410 to flow toward the supply duct 200. For example, the blower 420 may be implemented as an air blower that blows the air F toward the supply duct 200.

[0062] The air F is discharged to the exhaust duct 300 via the test chamber 100. The air F flows toward the exhaust duct 300 while performing an aging test on the inspection object P through heat exchange with the inspection object P. The air F is collected through the exhaust duct 300 and then supplied back to the circulator 400. While the air F flows through the circulator 400, the temperature of the air can be controlled by the temperature controller 410 to an appropriate temperature for the aging test. When the temperature of the air F is maintained at an appropriate temperature for the test, the temperature controller 410 may not operate. The temperature controller 410 may function as a thermostat; example implementations are not limited thereto.

[0063] The exhaust duct 300 may further include a driving member capable of sucking in the air F collected in the exhaust duct 300 so as to supply the air F collected in the exhaust duct 300 to the circulator 400. For example, the exhaust duct 300 may be equipped with a vacuum pressure generator capable of applying vacuum pressure. The vacuum pressure generator may be a vacuum pump; example embodiments are not limited thereto.

[0064] The testing apparatus according to some example embodiments includes, inside a supply pipe 200 , a first flow distributor 210 corresponding to the first rack 10 and a second flow distributor 220 corresponding to the second rack 20 .

[0065] The first flow distributor 210 and the second flow distributor 220 are configured to uniformly or more uniformly supply air F to the first bracket 10 and the second bracket 20, respectively. The first flow distributor 210 controls the flow rate of air F1 so that the flow rate of air F1 along the third direction Z is uniformly distributed in the area corresponding to the first bracket 10. The second flow distributor 220 controls the flow rate of air F so that the flow rate of air F2 along the third direction Z is uniformly distributed in the area corresponding to the second bracket 20. Therefore, the flow uniformity of the air F1 supplied to the first bracket 10 by the first flow distributor 210 can be improved and / or enhanced, and the flow uniformity of the air F2 supplied to the second bracket 20 by the second flow distributor 220 can be improved and / or enhanced.

[0066] Additionally or alternatively, in a test apparatus according to some example embodiments, the second flow distributor 220 includes a plurality of second flow distribution structures 221, 222, 223, 224, and 225 arranged to be spaced apart from one another in the second direction Y. The second flow distribution structures 221, 222, 223, 224, and 225 may guide a portion F1 of the air F supplied to the second flow distributor 220 to the first bracket 10, and may guide the remaining portion F2 thereof to the second bracket 20. In some examples, the flow path of the air F1 supplied to the first bracket 10 and the flow path of the air F2 supplied to the second bracket 20 may be separated from each other. In a plan view including the first direction X and the second direction Y, at least one of the area A1 of the first region in which the second flow distribution structures 221, 222, 223, 224, and 225 are formed, the spacing between adjacent ones of the second flow distribution structures 221, 222, 223, 224, and 225, and / or the number of the second flow distribution structures 221, 222, 223, 224, and 225 can be adjusted so that the flow rate of the air F1 supplied to the first bracket 10 and the flow rate of the air F2 supplied to the second bracket 20 can be controlled. In some examples, the ratio of the flow rate of the air F1 supplied to the first bracket 10 and the flow rate of the air F2 supplied to the second bracket 20 can be optimized or improved.

[0067] Therefore, inside the test chamber 100, the temperature difference between the first slots S1 arranged in the third direction Z and the temperature difference between the second slots S2 arranged in the third direction Z can be reduced, and the temperature variation within a single slot S1 or S2 can be reduced. In some examples, a uniform or more uniform thermal atmosphere can be created within the test chamber 100.

[0068] Additionally or alternatively, the flow of the air F supplied from the circulator 400 may be uneven. In this case, in a plan view including the first direction X and the second direction Y, at least one of the area A1 of the first region in which the second flow distribution structures 221, 222, 223, 224, and 225 are formed, the spacing between adjacent ones of the second flow distribution structures 221, 222, 223, 224, and 225, and the number of the second flow distribution structures 221, 222, 223, 224, and 225 may be controlled so that the flow of the air F can be uniform. For example, as the flow of the air F supplied from the circulator 400 becomes more uneven, the spacing between adjacent ones of the second flow distribution structures 221, 222, 223, 224, and 225 may be smaller.

[0069] Part (part F1 ) of the air F provided from the supply duct 200 may be provided to the first slot S1 through the first inlet 111 and the first through-hole 12 , and the remaining part F2 thereof may be provided to the second slot S2 through the second inlet 112 and the second through-hole 22 .

[0070] Figures 5 to 8 Is used for illustration Figure 2 FIG. 2 shows a diagram of a second inclined plate in FIG. Hereinafter, the second flow distribution structure 221 will be described by way of example. However, the description of the second flow distribution structure 221 can be equally applied to each of the second flow distribution structures 222, 223, 224, and 225. The shapes of the second inclined plates 226 of the second flow distribution structures 221, 222, 223, 224, and 225 can be the same as or different from each other.

[0071] refer to Figures 5 to 8 , the second inclined plate 226 may have various shapes so that the air ( Figure 1 A) in the second bracket ( Figure 1 In 20), the flow distribution along the third direction Z is uniform.

[0072] refer to Figure 5 In some example embodiments, the second inclined plate 226 has a straight line shape. A surface of the second inclined plate 226 may have a straight shape.

[0073] refer to Figure 6 and Figure 7 In some example embodiments, the second inclined plate 226 has a curved shape. A surface of the second inclined plate 226 may have a curved shape.

[0074] refer to Figure 6In some example embodiments, the second inclined plate 226 has a concave shape. The second inclined plate 226 may be convex in a direction opposite to the third direction Z. In some cases, the concave shape may have a parabolic profile, which may facilitate manufacturing in some cases; example embodiments are not limited thereto.

[0075] refer to Figure 7 In some example embodiments, the second inclined plate 226 has a convex shape. The second inclined plate 226 may be convex in the third direction Z. In some cases, the convex shape may have a parabolic profile, which may be easier to manufacture in some cases; the example embodiments are not limited thereto.

[0076] refer to Figure 8 In some example embodiments, the second inclined plate 226 includes a first sub-inclined plate 226a and a second sub-inclined plate 226b having different inclinations. The first sub-inclined plate 226a may be formed at the lower end of the second sub-inclined plate 226b. The second sub-inclined plate 226b may have a negative slope relative to the third direction Z. The first sub-inclined plate 226a may extend from the lower end of the second sub-inclined plate 226b in the first direction X. The first sub-inclined plate 226a extending from the lower end of the second sub-inclined plate 226b in the first direction X may be formed to prevent the air guided into the second internal space IS2 from flowing downward.

[0077] Figures 9 to 12 Is used for illustration Figure 2 Figure 1 of the first inclined plate.

[0078] refer to Figures 9 to 12 , the first inclined plate 216 has various shapes so that the air ( Figure 1 A) in the first bracket ( Figure 2 In 10), the flow distribution along the third direction Z is uniform.

[0079] refer to Figure 9 In some example embodiments, the first inclined plate 216 has a straight line shape. A surface of the first inclined plate 216 may have a straight shape.

[0080] refer to Figure 10 and Figure 11 In some example embodiments, the first inclined plate 216 has a curved shape. A surface of the first inclined plate 216 may have a curved shape.

[0081] refer to Figure 10 In some example embodiments, the first inclined plate 216 is concave. The first inclined plate 216 may be convex in a direction opposite to the third direction Z.

[0082] refer to Figure 11In some example embodiments, the first inclined plate 216 is convex. The second inclined plate 226 may be convex in the third direction Z.

[0083] refer to Figure 12 In some example embodiments, the first inclined plate 216 includes a third sub-inclined plate 216a and a fourth sub-inclined plate 216b having different inclinations. The third sub-inclined plate 216a may be formed at the lower end of the fourth sub-inclined plate 216b. The fourth sub-inclined plate 216b may have a negative slope relative to the third direction Z, and the third sub-inclined plate 216a may extend from the lower end of the fourth sub-inclined plate 216b in the first direction X. The third sub-inclined plate 216a, extending from the lower end of the fourth sub-inclined plate 216b in the first direction X, may be formed to prevent the air guided into the first internal space IS1 from flowing downward.

[0084] The example embodiments described above are not necessarily mutually exclusive. For example, in some cases, some example embodiments may include one or more features described above with reference to one or more figures, and may also include one or more other features described above with reference to one or more other figures.

[0085] Figure 13 is a diagram illustrating a test device according to some example embodiments. Figure 14 Is used for illustration Figure 13 Figure 4 shows a diagram of the supply duct and the first wall. Figure 15 Is used for illustration Figure 13 For ease of description, the following description is based on the same Figures 1 to 12 The differences in the descriptions elaborated.

[0086] refer to Figures 13 to 15 In a testing apparatus according to some example embodiments, the first wall 110 includes a plurality of first inlets 111 and a plurality of second inlets 112 .

[0087] refer to Figure 13 and Figure 14 In a test apparatus according to some example embodiments, a plurality of first inlets 111 may be arranged to be spaced apart from each other along a third direction Z. Each first inlet 111 may correspond to each first slot S1. Each first inlet 111 may correspond to a space between first burn-in boards B1 adjacent to each other in the third direction Z.

[0088] A plurality of second inlets 112 may be arranged in the second direction Y and the third direction Z. Each second inlet 112 arranged along the third direction Z may correspond to each second slot S2. Each second inlet 112 may correspond to a space between second burn-in boards B2 adjacent to each other in the third direction Z.

[0089] refer to Figure 15 In a test device according to some example embodiments, the first inlet 111 and / or the second inlet 112 of the first wall 110 may be arranged in a honeycomb structure (e.g., a hexagonal structure such as a regular hexagonal structure). For example, the first inlet 111 may be arranged in a honeycomb structure, and the second inlet 112 may be arranged in a honeycomb structure. Each of the first inlet 111 and the second inlet 112 may be hexagonal in shape. The first inlet 111 may be arranged in a first direction X and a second direction Y, and the second inlet 112 may be arranged in the first direction X and the second direction Y.

[0090] Figure 16 Is used for illustration Figure 1 Diagram of the supply pipeline in. Figure 17 Is used for illustration Figure 1 Figure 4 shows a diagram of the supply duct and the first wall. Figure 18 Is used for illustration Figure 1 For ease of description, the following description is based on the same method as above. Figures 1 to 15 The differences in the descriptions elaborated.

[0091] refer to Figures 16 to 18 In a test apparatus according to some example embodiments, a first flow distributor 210 includes a plurality of first flow distribution structures 211, 212, 213, and 214. The plurality of first flow distribution structures 211, 212, 213, and 214 are arranged along a second direction Y. The plurality of first flow distribution structures 211, 212, 213, and 214 are spaced apart from one another along the second direction Y. The first flow distributor 210 includes a plurality of first inclined plates 216.

[0092] Each of the first flow distribution structures 211, 212, 213, and 214 includes a first inclined plate 216. Each of the first flow distribution structures 211, 212, 213, and 214 may define a first internal space IS1.

[0093] For example, the first flow distribution structure 214 may include a first inclined plate 216 and a first sidewall 217 and a second sidewall 218, respectively, disposed on two opposing sides of the first inclined plate 216 in the second direction Y. The width W1 of each of the first sidewall 217 and the second sidewall 218 in the first direction X may increase as each of the first sidewall 217 and the second sidewall 218 extends in the third direction Z. An end of each of the first sidewall 217 and the second sidewall 218 in the first direction X may be aligned with an end of the supply pipe 200 in the first direction X. The first internal space IS1 may be defined by the first inclined plate 216 and the first sidewall 217 and the second sidewall 218. The width W1 of the first internal space IS1 in the first direction X may increase as it extends in the third direction Z.

[0094] The first flow distribution structures 211 , 212 , 213 , and 214 and the second flow distribution structures 221 , 222 , 223 , 224 , and 225 may be misaligned with each other in the third direction Z. The first inclined plate 216 and the second inclined plate 226 may be misaligned with each other in the third direction Z.

[0095] In a plan view including the first direction X and the second direction Y, the first flow distribution structures 211, 212, 213, and 214 and the second flow distribution structures 221, 222, 223, 224, and 225 may be arranged alternately with each other along the second direction Y. The first inclined plates 216 and the second inclined plates 226 may be arranged alternately with each other along the second direction Y.

[0096] In a plan view including the first direction X and the second direction Y, an area A3 of the third region in which the first flow distribution structures 211, 212, 213, and 214 are formed may be different from an area A4 of the fourth region in which the second flow distribution structures 221, 222, 223, 224, and 225 are formed. An area A3 of the third region in which the first flow distribution structures 211, 212, 213, and 214 are formed may be smaller than an area A4 of the fourth region in which the second flow distribution structures 221, 222, 223, 224, and 225 are formed.

[0097] In some example embodiments, the first wall 110 includes a plurality of first inlets 111 and a plurality of second inlets 112 .

[0098] The first inlets 111 may be spaced apart from each other along the second direction Y. Each first inlet 111 may correspond to each of the first flow distribution structures 211, 212, 213, and 214. For example, in a plan view including the second direction Y and the third direction Z, each first inlet 111 may correspond to an opening of each of the first flow distribution structures 211, 212, 213, and 214. The first inlets 111 may be arranged along the second direction Y.

[0099] In a plan view including the first direction X and the second direction Y, the first inlet 111 and the second inlet 112 may be alternately arranged with each other along the second direction Y. The first inlet 111 and the second inlet 112 may be misaligned with each other in the third direction Z.

[0100] For use Figures 9 to 12 The description of the first inclined plate 216 can also be applied to Figure 16 The shapes of the first inclined plates 216 of each of the first flow distribution structures 211, 212, 213 and 214 may be the same as or different from each other.

[0101] Figure 19 and Figure 20 is a diagram for illustrating a test device according to some example embodiments. For ease of description, the following description is based on the same Figures 1 to 18 The differences in the descriptions elaborated.

[0102] refer to Figure 19 and Figure 20 The testing apparatus according to some example embodiments further includes first to fourth guide structures 610 , 620 , 630 , and 640 .

[0103] The first guide structure 610 is disposed between the first wall 110 of the test chamber 100 and the first rack 10. The first guide structure 610 provides a passage between the first inlet 111 and the first rack 10. The first guide structure 610 includes at least one first opening 611. In some example embodiments, the first guide structure 610 includes a first opening 611 corresponding to the first inlet 111.

[0104] The second guide structure 620 is disposed between the first wall 110 of the test chamber 100 and the second rack 20. The second guide structure 620 provides a passage between the second inlet 112 and the second rack 20. The second guide structure 620 includes at least one second opening 621. In some example embodiments, the second guide structure 620 includes a second opening 621 corresponding to the second inlet 112.

[0105] The third guide structure 630 is disposed between the second wall 120 of the test chamber 100 and the first rack 10. The third guide structure 630 provides a passage between the first drain hole 121 and the first rack 10. The third guide structure 630 includes at least one third opening 631. In some example embodiments, the third guide structure 630 includes a third opening 631 corresponding to the first drain hole 121.

[0106] The fourth guide structure 640 is disposed between the second wall 120 of the test chamber 100 and the second bracket 20. The fourth guide structure 640 provides a passage between the second drain hole 122 and the second bracket 20. The fourth guide structure 640 includes at least one fourth opening 641. In some example embodiments, the fourth guide structure 640 includes the fourth opening 641 corresponding to the second drain hole 122.

[0107] The first to fourth guide structures 610, 620, 630, and 640 can prevent air from being supplied to or discharged from a non-storage space in the test chamber 100 in which the burn-in boards B1 and B2 are not stored (such as a space located on top of the first rack 10, a space located below the second rack 20, or a space located between the first rack 10 and the second rack 20). In other words, air can be prevented from diffusing into spaces other than the first slot S1 and the second slot S2, so that the control accuracy of the air F within the test chamber 100 can be improved and inspection efficiency can be improved.

[0108] The first guide structure 610 and the second guide structure 620 may be provided at Figures 1 to 18 The third guide structure 630 and the fourth guide structure 640 may be provided on the first wall 110 of the test chamber 100. Figures 1 to 18 On the second wall 120 of the test chamber 100.

[0109] Figure 21 and Figure 22 is a diagram illustrating a test device according to some example embodiments. Figure 23 Is used for illustration Figure 21 and Figure 22 For ease of description, the following description is based on the first guide structure and the second guide structure as used above. Figures 1 to 20 The differences in the descriptions elaborated.

[0110] refer to Figures 21 to 23 In the testing apparatus according to some example embodiments, the first guide structure 610 includes a plurality of first openings 611 , and the second guide structure 620 includes a plurality of second openings 621 .

[0111] refer to Figure 21 and Figure 22 In the test device according to some example embodiments, a plurality of first openings 611 are arranged to be spaced apart from each other in the third direction Z. The first openings 611 may extend in the second direction Y. Each first opening 611 corresponds to a first slot S1. The first guide structure 610 extends in the second direction Y and includes a plurality of first supports arranged to be spaced apart from each other in the third direction Z. Each first opening 611 may be defined by first supports adjacent to each other in the third direction Z. Each first support may be formed at a position corresponding to the position of the first aging board B1. In some examples, each or at least one of the second guide structure 620 and the plurality of second openings 621 may be arranged vertically and / or diagonally; example embodiments are not limited thereto.

[0112] The plurality of second openings 621 are arranged to be spaced apart from each other in the third direction Z. The second openings 621 may extend in the second direction Y. Each second opening 621 corresponds to a second slot S2. The second guide structure 620 extends in the second direction Y and includes a plurality of second support members arranged to be spaced apart from each other in the third direction Z. Each second opening 621 may be defined by second support members adjacent to each other in the third direction Z. Each second support member may be formed at a position corresponding to the position of the second burn-in board B2.

[0113] The third guide structure 630 includes a third opening 631 corresponding to the first discharge hole 121 , and the fourth guide structure 640 includes a fourth opening 641 corresponding to the second discharge hole 122 .

[0114] The first guide structure 610 and the second guide structure 620 may be provided at Figures 1 to 18 The third guide structure 630 and the fourth guide structure 640 may be provided on the first wall 110 of the test chamber 100. Figures 1 to 18 On the second wall 120 of the test chamber 100.

[0115] refer to Figure 23 In a test device according to some example embodiments, the first openings 611 and / or the second openings 621 of the first wall 110 may be arranged in a honeycomb structure. For example, the first openings 611 may be arranged in a honeycomb structure, and the second openings 621 may be arranged in a honeycomb structure. Each of the first openings 611 and the second openings 621 may have a hexagonal shape. The first openings 611 may be arranged in a first direction X and a second direction Y. The second openings 621 may be arranged in the first direction X and the second direction Y.

[0116] The first guide structure 610 and the second guide structure 620 may be provided at Figures 1 to 18The third guide structure 630 and the fourth guide structure 640 may be provided on the first wall 110 of the test chamber 100. Figures 1 to 18 On the second wall 120 of the test chamber 100.

[0117] Although various example embodiments have been described with reference to the accompanying drawings, the present disclosure is not limited to the above embodiments, but can be implemented in various different forms. It will be understood by those skilled in the art that the present disclosure can be practiced in other specific forms without changing the technical spirit and / or essential features of the inventive concept. Therefore, it should be understood that the embodiments described above are not restrictive in all aspects, but illustrative. In addition, the example embodiments are not necessarily mutually exclusive. For example, some example embodiments may include one or more features described with reference to one or more figures, and may also include one or more other features described with reference to one or more other figures.

Claims

1. A testing device, comprising: Testing room; a first bracket located within the test chamber and configured to support a plurality of first burn-in boards stacked in a first direction; a second bracket located in the test chamber and above the first bracket, and configured to support a plurality of second burn-in boards stacked in the first direction; as well as a supply conduit located on a first wall of the test chamber in a second direction, wherein the supply conduit comprises a first flow distributor corresponding to the first bracket and a second flow distributor corresponding to the second bracket, wherein, The first flow distributor includes at least one first inclined plate, the at least one first inclined plate being configured to at least partially overlap with the plurality of first aging plates in the second direction, and the at least one first inclined plate extending in an inclined manner toward a bottom of the first bracket in an inner space of the supply duct, and The second flow distributor includes at least one second inclined plate spaced apart from the at least one first inclined plate in the first direction, the at least one second inclined plate being configured to at least partially overlap with the plurality of second aging plates in the second direction, and the at least one second inclined plate extending in an inclined manner toward a bottom of the second bracket in an internal space of the supply pipe.

2. The test device according to claim 1, wherein: In a plan view of the test apparatus including the second direction and a third direction, an area of ​​a first region in which the at least one first inclined plate is arranged is different from an area of ​​a second region in which the at least one second inclined plate is arranged, and the third direction intersects the first direction and the second direction.

3. The test device according to claim 2, wherein: The area of ​​the first region is smaller than the area of ​​the second region.

4. The testing device according to claim 1, wherein: The at least one second inclined plate includes a plurality of second inclined plates spaced apart from each other in a third direction intersecting the first direction and the second direction.

5. The test device according to claim 4, wherein: The at least one first inclined plate includes a plurality of first inclined plates spaced apart from each other in the third direction, and The plurality of second inclined plates are not aligned with the plurality of first inclined plates in the first direction, respectively.

6. The testing device according to claim 1, wherein: At least one of the at least one first inclined plate or the at least one second inclined plate has a convex shape in the first direction.

7. The testing device according to claim 1, wherein: At least one of the at least one first inclined plate or the at least one second inclined plate has a concave shape in the first direction.

8. The testing device according to claim 1, wherein: At least one of the at least one first inclined plate or the at least one second inclined plate includes a first sub-inclined plate having a first inclination and a second sub-inclined plate having a second inclination different from the first inclination.

9. The testing device according to claim 1, wherein: The first wall of the test chamber defines at least one first inlet and at least one second inlet, Each of the at least one first inlet corresponds to each of the at least one first inclined plate, and Each of the at least one second inlet corresponds to each of the at least one second inclined plate.

10. The testing device according to claim 1, wherein: The first wall of the test chamber defines a plurality of first inlets and a plurality of second inlets, Each of the plurality of first inlets corresponds to a space between the first burn-in plates adjacent to each other in the first direction, and Each of the plurality of second inlets corresponds to a space between the second burn-in plates adjacent to each other in the first direction.

11. The testing device according to claim 1, wherein: The first wall of the test chamber defines a plurality of inlets arranged in a honeycomb configuration.

12. A testing device, comprising: Testing room; a first bracket located within the test chamber and configured to support a plurality of first burn-in boards stacked in a first direction; a second bracket located in the test chamber and above the first bracket, and configured to support a plurality of second burn-in boards stacked in the first direction; as well as a supply conduit located on a first wall of the test chamber in a second direction, wherein the supply conduit comprises a first flow distributor corresponding to the first bracket and a second flow distributor corresponding to the second bracket, wherein, The first flow distributor includes at least one first flow distribution structure, each first flow distribution structure defines a first interior space, and a width of the first interior space in the second direction increases as the first interior space extends along the first direction, The second flow distributor includes a plurality of second flow distribution structures arranged along a third direction intersecting the first direction and the second direction, and Each of the plurality of second flow distribution structures defines a second interior space, and a width of the second interior space in the second direction increases as the second interior space extends along the first direction.

13. The testing device according to claim 12, wherein: In a plan view of the test apparatus including the second direction and the third direction, an area of ​​a first region in which the plurality of second flow distribution structures are arranged is different from an area of ​​a second region in which the plurality of second flow distribution structures are not formed.

14. The testing device according to claim 12, wherein: The at least one first flow distribution structure comprises a plurality of first flow distribution structures, and The plurality of first flow distribution structures are arranged along the third direction.

15. The testing device according to claim 14, wherein: In a plan view of the test apparatus including the second direction and the third direction, the plurality of first flow distribution structures and the plurality of second flow distribution structures are arranged alternately with each other along the third direction.

16. The testing device according to claim 12, wherein: The at least one first flow distribution structure comprises a first flow distribution structure, The first wall of the test chamber defines a first inlet and a plurality of second inlets, The first inlet is in communication with the first internal space, Each of the plurality of second inlets communicates with the second interior space of each of the plurality of second flow distribution structures.

17. The testing device according to claim 16, further comprising: a first guide structure, the first guide structure being located between the first wall and the first bracket and providing a passage between the first inlet and the first bracket; as well as A second guide structure is located between the first wall and the second bracket and provides a passage between the plurality of second inlets and the second bracket.

18. The testing device according to claim 17, wherein: The first bracket includes a plurality of first slots, and each of the plurality of first slots is configured to receive a corresponding one of the plurality of first burn-in boards therein, The second bracket includes a plurality of second slots, and each of the plurality of second slots is configured to receive a corresponding one of the plurality of second burn-in boards therein, The first guide structure includes a plurality of first openings, and each of the plurality of first openings corresponds to a respective one of the plurality of first slots, and The second guide structure includes a plurality of second openings, and each of the plurality of second openings corresponds to a respective one of the plurality of second slots.

19. A testing device, comprising: Testing room; a first bracket located within the test chamber and configured to support a plurality of first burn-in boards stacked in a first direction; a second bracket located in the test chamber and above the first bracket, and configured to support a plurality of second burn-in boards stacked in the first direction; as well as a first wall of the test chamber, the first wall of the test chamber extending in a second direction and defining a plurality of inlets; a supply conduit located on the first wall of the test chamber, wherein the supply conduit includes a first flow distributor corresponding to the first bracket and a second flow distributor corresponding to the second bracket; and The second wall of the test chamber extends in the second direction and defines a first drain hole corresponding to the first bracket and a second drain hole corresponding to the second bracket, wherein The first flow distributor includes at least one first inclined plate, and a distance between the at least one first inclined plate and the first wall increases as the at least one first inclined plate extends along the first direction. The second flow distributor includes a plurality of second inclined plates spaced apart from each other along a third direction intersecting the first direction and the second direction, and A distance between each of the plurality of second inclined plates and the first wall increases as each of the plurality of second inclined plates extends along the first direction.

20. The testing device of claim 19, further comprising: a first guide structure, the first guide structure being located between the second wall and the first bracket and providing a passage between the first discharge hole and the first bracket; as well as The second guide structure is located between the second wall and the second bracket and provides a passage between the second discharge hole and the second bracket.

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