A fully automatic femtosecond laser focused ion beam micromachining system

Abstract

The present application relates to the field of semiconductor manufacturing technology, and specifically discloses a fully automatic femtosecond laser focused ion beam micromachining system, including: an ion beam device, a workbench, an operating component and an auxiliary operating component. The auxiliary operating component includes: a first carrier, a second carrier, a first adjustment mechanism and a second adjustment mechanism; the first carrier is used to place a first sample; the second carrier is used to place a second sample; the first adjustment mechanism is used to adjust the first carrier; the second adjustment mechanism is used to adjust the second carrier. The ion beam device is used to detect samples on the first carrier or the second carrier. In this solution, the operating component can transfer the first sample to the first carrier and the second sample to the second carrier, and cooperate with the first adjustment mechanism and the second adjustment mechanism to fix the first sample and the second sample, so as to realize the full automation of the ion beam device loading and sampling process, thereby reducing human operation errors and improving operation efficiency.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, and in particular to a fully automatic femtosecond laser focused ion beam micromachining system. Background Art

[0002] The focused ion beam micromachining system can use a focused ion beam to observe, etch, deposit and modify materials with nanometer-level precision, achieving comprehensive functions from microscopic morphology characterization to fine structure processing. Before the focused ion beam microscope is tested, the sample needs to be mounted on a sample carrier. In actual applications, samples come in a variety of sizes, such as 2-8 inch wafers and 1-inch small chips. Different sizes of samples require different carriers, so during the sample installation process, staff need to select a carrier according to the sample size, then place the sample on the carrier, and then adjust the carrier to fix the sample.

[0003] During the R&D process, preliminary work such as selecting a carrier and loading the sample is a low-skilled and tedious task. Furthermore, because chips, wafers, and silicon wafers are easily damaged when not positioned accurately, this requires a high level of attentiveness from the staff. This makes preliminary work time-consuming and inefficient. Furthermore, the consistency and reliability of sample loading affect the repeatability and accuracy of the focused ion beam micromachining system. Operations performed by different staff members, or by the same person at different times, can lead to differences in the tightness and spatial position of the sample loading, increasing the possibility of biased experimental results. Summary of the Invention

[0004] In view of this, the purpose of this application is to provide a fully automatic femtosecond laser focused ion beam micromachining system for realizing fully automated operation of focused ion beam microscopy equipment to solve some or all of the above problems.

[0005] To achieve the above technical objectives, the present application provides a fully automatic femtosecond laser focused ion beam micromachining system, comprising: an ion beam device, a workbench, an operating component, and an auxiliary operating component;

[0006] The workbench is arranged beside the ion beam device;

[0007] The auxiliary operation assembly includes: a first carrier, a second carrier, a first adjustment mechanism and a second adjustment mechanism;

[0008] The workbench is provided with a first boss for placing the first carrier and a second boss for placing the second carrier;

[0009] The first carrier is provided with a first placement slot with adjustable size;

[0010] The first adjustment mechanism is provided beside the first boss and is used to adjust the size of the first placement groove to fix the first sample;

[0011] The second carrier is provided with a second placement slot with adjustable size;

[0012] The second adjustment mechanism is provided beside the second boss and is used to adjust the size of the second placement groove to fix the second sample;

[0013] The ion beam device is provided with a detection cavity and an inlet and outlet cavity which are interconnected;

[0014] The detection chamber is used to place the first carrier and is equipped with a first door;

[0015] The entry and exit cavity is used to place the second carrier and is equipped with a second door;

[0016] The first door body is provided with a sliding rod that can slide and rotate;

[0017] The inner end of the sliding rod is provided with a threaded end;

[0018] The second carrier is provided with a threaded hole;

[0019] The operating assembly is provided on the workbench and is used to perform sheet loading, transfer, opening and closing, and pushing operations;

[0020] The loading operation is to transfer the first sample to the first carrier or to transfer the second sample to the second carrier;

[0021] The opening and closing operation is to open and close the first door body and the second door body;

[0022] The transfer operation is to transfer the first carrier to the detection chamber or to transfer the second carrier to the inlet and outlet chamber;

[0023] The pushing and turning operation is to rotate the sliding rod so that the threaded end is connected to the threaded hole, and then move the sliding rod to drive the second carrier to move to the detection cavity.

[0024] Furthermore, the operating assembly includes: a multi-degree-of-freedom operating arm, a first manipulator, a second manipulator, and a third manipulator;

[0025] The multi-degree-of-freedom operating arm is arranged on the workbench;

[0026] The multi-degree-of-freedom manipulator arm is used to clamp and transport the first sample or the second sample when connected to the first manipulator;

[0027] The multi-degree-of-freedom operating arm is used to open and close the first door body and the second door body, and to clamp and transport the first carrier or the second carrier when connected to the second manipulator;

[0028] The multi-degree-of-freedom operating arm is used to rotate the sliding rod so that the threaded end is connected to the threaded hole when connected to the third operator, and to move the sliding rod to drive the second carrier to move between the detection cavity and the entry and exit cavity.

[0029] Furthermore, a mold changing seat is provided on the workbench;

[0030] The change seat is used for placing the first operator, the second operator and the third operator.

[0031] Furthermore, the first operator includes: two first clamping rods capable of performing a clamping action;

[0032] The clamping end of the first clamping rod is provided with an extension block extending along the first direction;

[0033] The first direction is perpendicular to the length direction of the first clamping rod and the opening and closing direction of the first clamping rod;

[0034] A buffer pad is provided on the inner side of the extension block.

[0035] Furthermore, the second operator includes: two second clamping rods capable of performing a clamping action;

[0036] The end of the second clamping rod is provided with a first notch for clamping the first carrier or the second carrier;

[0037] A second notch is provided at the middle portion of the second clamping rod for clamping the door handle of the first door body or the door handle of the second door body;

[0038] The first notch opens toward the second direction, the third direction, and the fourth direction;

[0039] The second notch opens toward the third direction;

[0040] The second direction is the length direction of the second clamping rod;

[0041] The third direction is the opening and closing direction of the second clamping rod;

[0042] The fourth direction is perpendicular to the second direction and the third direction.

[0043] Furthermore, the third operator includes a rotating platform and two third clamping rods;

[0044] The rotating table is capable of rotating;

[0045] The two third clamping rods are arranged on the rotating platform in an openable and closable manner.

[0046] Furthermore, the third clamping rod is in the shape of an arc-shaped sheet, and friction lines are provided on the inner side of the third clamping rod.

[0047] Furthermore, the first carrier is provided with an elastic locking member;

[0048] The elastic clamping member is movable and elastic, and the size of the first placement groove can be adjusted by moving the elastic clamping member, and the elastic clamping member can clamp the first sample in the first placement groove by elasticity;

[0049] The first adjusting mechanism is used to clamp the elastic locking member to drive the elastic locking member to move.

[0050] Furthermore, the first adjustment mechanism includes: a positioning fixture, a first support platform and a first cylinder;

[0051] The first support platform is arranged beside the first boss;

[0052] The positioning fixture is slidably disposed on the first supporting platform in a direction approaching or away from the first boss;

[0053] The first cylinder is arranged on the first supporting platform, and the output end of the first cylinder is connected to the clamping fixture, so as to drive the clamping fixture to slide;

[0054] The clamping member is used to clamp the elastic clamping member;

[0055] When the first carrier is placed on the first protrusion, the elastic locking member is located on a side of the first carrier close to the first supporting platform.

[0056] Furthermore, the second carrier is provided with a support block and an adjustment block;

[0057] The adjusting block is provided with a pressing piece;

[0058] The pressing piece is threadedly connected to the adjusting block;

[0059] A second placement groove for placing the second sample is formed between the support block and the pressing member;

[0060] The second adjusting mechanism is used to rotate the pressing member so that the pressing member presses or releases the second sample in the second placement groove.

[0061] Furthermore, the second adjustment mechanism includes: a second support platform, a second cylinder and a rotating motor;

[0062] The second supporting platform is arranged beside the second boss;

[0063] The rotary motor is slidably disposed on the second boss in a direction approaching or moving away from the second carrier;

[0064] The second cylinder is provided on the second boss and is used to drive the rotary motor to slide;

[0065] After the output end of the rotating motor is connected to the pressing member, the rotating motor is used to drive the pressing member to rotate.

[0066] Furthermore, the second carrier is provided with a plurality of parallel and spaced adjustment slots;

[0067] The supporting block and the adjusting block can be detachably inserted into the adjusting groove.

[0068] Furthermore, the auxiliary operation assembly further includes: a third carrier and a third adjustment mechanism;

[0069] The third carrier is provided with an intermediate plate and two clamping plates;

[0070] The two clamping plates are slidably arranged on both sides of the middle plate;

[0071] The clamping plate is elastically connected to the middle plate so that an elastic clamping cavity is formed between the clamping plate and the middle plate;

[0072] The elastic clamping cavity is used to clamp the second sample;

[0073] The inlet and outlet cavity is also used to place the third carrier;

[0074] The third adjusting mechanism is provided with a placement seat for placing the third carrier, and the third adjusting mechanism is used to drive the two clamping plates to slide.

[0075] Furthermore, the third adjustment mechanism includes: a third support platform, a third cylinder, a fourth cylinder, two slide blocks and two clamping fingers;

[0076] The two sliding blocks are slidably arranged on the third support platform along a fifth direction;

[0077] The two finger clamping members are respectively arranged on the two sliders;

[0078] The clamping finger member includes two clamping columns, and the two clamping columns are slidably arranged on the slider along a sixth direction;

[0079] The third cylinder is arranged on the third supporting platform, and the output end of the third cylinder is connected to the two sliders, so as to drive the two sliders to move toward or away from each other;

[0080] The fourth cylinder is provided on the slider, and an output end of the fourth cylinder is connected to the two clamping columns, so as to drive the two clamping columns to move closer to or away from each other;

[0081] The side of the splint is provided with a splint groove;

[0082] The clamping column is used to be clamped into the clamping plate slot;

[0083] The fifth direction is the sliding direction of the splint;

[0084] The sixth direction is located on a horizontal plane and is perpendicular to the fifth direction.

[0085] Furthermore, the splint groove is a semicircular groove body;

[0086] The clamping column is a cylinder.

[0087] Furthermore, the auxiliary operation component further includes: a first sample stage;

[0088] The first sample stage is arranged on the workbench;

[0089] The first carrier is used for placing the first sample horizontally;

[0090] The first sample stage is used for vertically placing the first sample, so that the operating component can clamp the first sample in a vertical direction.

[0091] Furthermore, the auxiliary operation component further includes: a third sample stage;

[0092] The third sample stage is arranged on the working table;

[0093] The third sample stage is provided with a plurality of sample slots;

[0094] The sample slot is used for placing the second sample.

[0095] Furthermore, the auxiliary operation component further includes: a second sample stage;

[0096] The second sample stage is arranged on the workbench;

[0097] The second sample stage is used for tilting the second sample.

[0098] Furthermore, the third sample stage comprises: a lifting cylinder, a first track and a second track;

[0099] A lifting plate capable of sliding in a vertical direction is provided in the sample tank;

[0100] The second track is slidably arranged on the first track;

[0101] The lifting cylinder is slidably arranged on the second track, and the sliding direction is perpendicular to the sliding direction of the second track;

[0102] The lifting cylinder is used to drive the lifting plate to move up and down in a vertical direction.

[0103] Furthermore, the detection cavity is provided with a first positioning seat;

[0104] A plurality of first connecting seats are provided at the bottom of the first carrier;

[0105] The first connecting seat is used for clamping the first positioning seat.

[0106] Furthermore, the second carrier is provided with a plurality of positioning holes;

[0107] The inner end of the sliding rod is provided with a positioning boss;

[0108] The positioning boss is used to be inserted into the positioning hole.

[0109] Furthermore, the ion beam device is provided with a laser processing component;

[0110] The laser processing head of the laser processing assembly is arranged in the detection cavity.

[0111] Furthermore, the first door body and the second door body are both flip doors.

[0112] Furthermore, a translation seat is provided on the workbench;

[0113] The operating assembly can be slidably arranged on the translation seat.

[0114] As can be seen from the above technical solution, this application provides a fully automated femtosecond laser focused ion beam micromachining system, comprising: an ion beam device, a workbench, an operating assembly, and an auxiliary operation assembly. The auxiliary operation assembly includes: a first carrier, a second carrier, a first adjustment mechanism, and a second adjustment mechanism; the first carrier is used to hold a first sample; the second carrier is used to hold a second sample; the first adjustment mechanism is used to adjust the first carrier; and the second adjustment mechanism is used to adjust the second carrier. The ion beam device is used to inspect samples on the first carrier or the second carrier.

[0115] In this solution, the operating component can transfer the first sample to the first carrier and the second sample to the second carrier, and cooperate with the first adjustment mechanism and the second adjustment mechanism to fix the first and second samples. Then, the door is opened to place the first and second carriers into the ion beam device and adjust the position of the second carrier, thus achieving full automation of the ion beam device loading and unloading process, thereby reducing human operational errors and ensuring the accuracy and consistency of experimental data. In addition, through the coordinated action of the auxiliary operation component and the operating component, different samples can be quickly positioned and fixed, thereby optimizing the automated operation process, improving operational efficiency, and reducing experimental deviations caused by differences in sample installation positions. BRIEF DESCRIPTION OF THE DRAWINGS

[0116] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0117] Figure 1 A schematic diagram of the overall structure of a fully automatic femtosecond laser focused ion beam micromachining system provided in an embodiment of the present application;

[0118] Figure 2 A schematic diagram of an ion beam device for a fully automatic femtosecond laser focused ion beam micromachining system provided in an embodiment of the present application;

[0119] Figure 3 A schematic diagram of an ion beam device of a fully automatic femtosecond laser focused ion beam micromachining system provided in an embodiment of the present application removing a first door body and a second door body;

[0120] Figure 4 A schematic diagram of a second door and a sliding rod and other components of a fully automatic femtosecond laser focused ion beam micromachining system provided in an embodiment of the present application;

[0121] Figure 5 A partial enlarged view of the second door and sliding rod and other components of a fully automatic femtosecond laser focused ion beam micromachining system provided in an embodiment of the present application;

[0122] Figure 6 An enlarged view of components on a workbench of a fully automatic femtosecond laser focused ion beam micromachining system provided in an embodiment of the present application;

[0123] Figure 7 A front perspective view of a first carrier of a fully automatic femtosecond laser focused ion beam micromachining system provided in an embodiment of the present application;

[0124] Figure 8 A schematic diagram of a first adjustment mechanism and a first carrier of a fully automatic femtosecond laser focused ion beam micromachining system provided in an embodiment of the present application;

[0125] Figure 9 A schematic diagram of a second adjustment mechanism and a second carrier of a fully automatic femtosecond laser focused ion beam micromachining system provided in an embodiment of the present application;

[0126] Figure 10 A schematic diagram of a third adjustment mechanism and a third carrier of a fully automatic femtosecond laser focused ion beam micromachining system provided in an embodiment of the present application;

[0127] Figure 11 An internal structural diagram of a third adjustment mechanism of a fully automatic femtosecond laser focused ion beam micromachining system provided in an embodiment of the present application;

[0128] Figure 12 A schematic diagram of a third sample stage of a fully automatic femtosecond laser focused ion beam micromachining system provided in an embodiment of the present application;

[0129] Figure 13 A schematic diagram of the interior of a third sample stage of a fully automatic femtosecond laser focused ion beam micromachining system provided in an embodiment of the present application;

[0130] Figure 14 A schematic diagram of a mold changer for a fully automatic femtosecond laser focused ion beam micromachining system provided in an embodiment of the present application;

[0131] Figure 15 A schematic diagram of a first manipulator of a fully automatic femtosecond laser focused ion beam micromachining system provided in an embodiment of the present application;

[0132] Figure 16 A schematic diagram of a second manipulator of a fully automatic femtosecond laser focused ion beam micromachining system provided in an embodiment of the present application;

[0133] Figure 17 A schematic diagram of a third manipulator of a fully automatic femtosecond laser focused ion beam micromachining system provided in an embodiment of the present application;

[0134] Figure 18 A bottom perspective view of a first carrier of a fully automatic femtosecond laser focused ion beam micromachining system provided in an embodiment of the present application;

[0135] In the picture:

[0136] 10. First sample;

[0137] 20. Second sample;

[0138] 100, ion beam device; 110, detection chamber; 111, first door; 120, access chamber; 121, second door; 122, sliding rod; 123, threaded end; 124, positioning boss; 125, access block; 126, guide rod; 127, support plate; 128, second support plate; 130, laser processing assembly;

[0139] 200, working table; 210, first boss; 220, second boss; 230, translation seat; 240, change seat;

[0140] 300, operating assembly; 310, multi-degree-of-freedom operating arm; 320, first manipulator; 321, first clamping rod; 322, extension block; 330, second manipulator; 331, second clamping rod; 332, first notch; 333, second notch; 340, third manipulator; 341, rotating platform; 342, third clamping rod;

[0141] 400, auxiliary operation assembly; 410, first carrier; 411, first placement groove; 412, elastic clamping member; 420, second carrier; 421, threaded hole; 422, adjustment block; 423, support block; 424, second placement groove; 425, positioning hole; 426, adjustment groove; 427, pressing member; 430, first adjustment mechanism; 431, clamping member; 432, first support platform; 433, first cylinder; 440, second adjustment mechanism; 441, second support platform; 442, second cylinder; 443, Rotating motor; 450, third carrier; 451, middle plate; 452, clamping plate; 453, elastic clamping cavity; 454, clamping plate groove; 460, third adjustment mechanism; 461, placement seat; 462, third support platform; 463, third cylinder; 464, fourth cylinder; 465, slider; 466, clamping finger; 467, clamping column; 470, first sample stage; 480, second sample stage; 490, third sample stage; 491, sample slot; 492, lifting cylinder; 493, lifting plate; 413, first connecting seat; DETAILED DESCRIPTION

[0142] The following will clearly and completely describe the technical solutions of the embodiments of this application in conjunction with the accompanying drawings. Obviously, the embodiments described are part of the embodiments of this application, not all of them. Based on the embodiments in this specification, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection requested by this application.

[0143] In the description of the embodiments of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation. Therefore, they should not be understood as limiting the embodiments of the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and should not be understood as indicating or implying relative importance.

[0144] In the description of the embodiments of the present application, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, replaceable connections, or integral connections. They can also refer to mechanical connections or electrical connections. They can also refer to direct connections or indirect connections through an intermediate medium. They can also refer to internal connections between two components. For those skilled in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific circumstances.

[0145] See also Figure 1 A fully automatic femtosecond laser focused ion beam micromachining system provided in an embodiment of the present application includes: an ion beam device 100, a workbench 200, an operating component 300 and an auxiliary operating component 400.

[0146] In existing working environments where focused ion beam microscopy equipment is used for inspection, the inspection objects commonly involved are large-sized wafers of 6 inches and small-sized wafers of 1-2 inches. For ease of explanation, in the embodiments provided in this application, a large-sized wafer of 6 inches is used as the first sample 10, and a small-sized wafer of 1-2 inches is used as the second sample 20.

[0147] In this embodiment, the ion beam device 100 may include the same detection components as the existing focused ion beam microscope to implement the detection operation of the sample. Figures 2 to 5 In addition to the above-mentioned existing detection operating components, the ion beam device 100 also includes: a detection chamber 110 and an entry and exit chamber 120 located inside the ion beam device 100 and interconnected; the detection chamber 110 is equipped with a first door body 111; and the entry and exit chamber 120 is equipped with a second door body 121. The opening and closing of the detection chamber 110 can be controlled by the first door body 111; the opening and closing of the entry and exit chamber 120 can be controlled by the second door body 121. Among them, the detection chamber 110 can be used as a chamber for the above-mentioned detection operating components to operate. After the sample enters the detection chamber 110, the detection operating components can detect defects and critical dimensions of the sample.

[0148] In actual application, the inventors found that the size of the first sample 10 is relatively large, so it can be directly placed in the detection chamber 110 for detection, while the size of the second sample 20 is relatively small, so when placing the second sample 20, the second sample 20 needs to be placed in a deeper position. For this reason, in this embodiment, an entry and exit chamber 120 is provided on the ion beam device 100. A second door body 121 is provided on the entry and exit chamber 120. A sliding rod 122 that can slide is provided through the second door body 121. Among them, when loading the sample, the first sample 10 can be directly sent into the detection chamber 110. The second sample 20 can be sent into the entry and exit chamber 120 first. Afterwards, the second sample 20 is pushed into the detection chamber 110 by the sliding rod 122, and after the detection is completed, the second sample 20 is driven back to the entry and exit chamber 120 for sampling.

[0149] Through the sliding rod 122 and the inlet and outlet chamber 120, the operating component 300 can control the position of the second sample 20 outside the ion beam device 100 without extending deep into the interior of the ion beam device 100, which helps to simplify the mechanical structure of the operating component 300 and thus reduce the manufacturing cost of the equipment.

[0150] This embodiment provides an implementation method for moving the second sample 20 by the sliding rod 122 as follows. Figures 1 to 9 The auxiliary operation assembly 400 includes: a first carrier 410 and a second carrier 420, wherein the first carrier 410 is used to place the first sample 10; the second carrier 420 is used to place the second sample 20. And, as Figure 5 As shown, the second carrier 420 is provided with a threaded hole 421; the sliding rod 122 is rotatably connected to the second door body 121; the inner end of the sliding rod 122 is provided with a threaded end 123. The inner end of the sliding rod 122 refers to the end located inside the access cavity 120 when the second door body 121 is closed.

[0151] In the inlet and outlet chamber 120, an inlet and outlet block 125 for the second carrier 420 to be placed and stuck can be provided. The inlet and outlet block 125 can slide in the inlet and outlet chamber 120. Among them, a slide rail for the inlet and outlet block 125 to slide can be provided in the inlet and outlet chamber 120. When the second carrier 420 is loaded with samples, it is placed on the inlet and outlet block 125. After placement, the second carrier 420 is configured so that the position of its threaded hole 421 is aligned with the position of the threaded end 123 when the second door body 121 is in the closed state. After that, after pushing the sliding rod 122 to abut the threaded hole 421, the sliding rod 122 is rotated to realize the threaded end 123 being turned into the threaded hole 421, thereby realizing the synchronous sliding connection between the two. Afterwards, pushing or pulling the sliding rod 122 can drive the second carrier 420 to move in the inlet and outlet chamber 120. Specifically, the second carrier 420 can be pushed into the detection chamber 110 or pulled to the cavity opening area of ​​the inlet and outlet chamber 120.

[0152] See also Figure 1 、 Figures 6 to 9 In this embodiment, the operating component 300 and the auxiliary operating component 400 can work together on the operating table 200 to realize automated loading and sampling of the first sample 10 or the second sample 20 .

[0153] Specifically, in this embodiment, the workbench 200 is arranged beside the ion beam device 100. The auxiliary work assembly 400 also includes: a first adjustment mechanism 430 and a second adjustment mechanism 440; the workbench 200 is provided with a first boss 210 for placing the first carrier 410 and a second boss 220 for placing the second carrier 420; the first carrier 410 is provided with a first placement groove 411 with an adjustable size. The second carrier 420 is provided with a second placement groove 424 with an adjustable size. The first adjustment mechanism 430 is arranged beside the first boss 210 and is used to adjust the size of the first placement groove 411 to fix the first sample 10. The second adjustment mechanism 440 is arranged beside the second boss 220 and is used to adjust the size of the second placement groove 424 to fix the second sample 20. Among them, the first boss 210 and the second boss 220 are respectively provided with a holder adapted to the first carrier 410 and the second carrier 420, so that the first carrier 410 and the second carrier 420 can be stably placed.

[0154] Before testing, the first carrier 410 is placed on the first boss 210. The second carrier 420 is placed on the second boss 220. The first and second samples 10 and 20 can be transported to the workbench 200 manually or by an automated guided vehicle (AGV). For example, the AGV can use its onboard manipulator to transfer a carrier (such as the third sample stage 490 described below) containing multiple second samples 20 to the workbench 200. Furthermore, the manipulator can transfer the first sample 10 to the workbench 200 (such as the first sample stage 470 described below).

[0155] During the operation, the operating assembly 300 disposed on the operating table 200 can be used to perform sheet loading operation, transfer operation, opening and closing operation, and pushing operation.

[0156] The loading operation refers to transferring the first sample 10 to the first carrier 410 or transferring the second sample 20 to the second carrier 420. The loading operation for the first sample 10 may involve the operating assembly 300 gripping the first sample 10, lifting the first sample 10, and transferring it to the top of the first carrier 410. Simultaneously, the first adjustment mechanism 430 enlarges the first placement slot 411 to facilitate placement of the first sample 10. After placement, the first adjustment mechanism 430 contracts the first placement slot 411 to secure the first sample 10. The loading operation for the second sample 20 may involve the operating assembly 300 gripping the second sample 20, lifting the second sample 20, and transferring it to the top of the second carrier 420. Simultaneously, the second adjustment mechanism 440 enlarges the second placement slot 424 to facilitate placement of the second sample 20. After placement, the second adjustment mechanism 440 contracts the first placement slot 411 to secure the second sample 20.

[0157] The opening and closing operation refers to opening and closing the first door 111 and the second door 121. The transfer operation refers to transferring the first carrier 410 to the detection chamber 110 or transferring the second carrier 420 to the access chamber 120.

[0158] Specifically, before the first carrier 410 needs to be placed in the detection chamber 110, the operating assembly 300 moves to open the first door 111, then transfers the first carrier 410 into the detection chamber 110, and finally closes the first door 111. Before the second carrier 420 needs to be placed in the access chamber 120, the operating assembly 300 moves to open the second door 121, then transfers the second carrier 420 into the access chamber 120, and finally closes the second door 121. It should be noted that during the detection operation, both the first door 111 and the second door 121 are in a closed state.

[0159] The push-turn operation involves rotating the sliding rod 122 so that the threaded end 123 connects to the threaded hole 421, and then moving the sliding rod 122 to drive the second carrier 420 into the detection chamber 110. The push-turn operation occurs after the second sample 20 is loaded. Specifically, the operating assembly 300 clamps the sliding rod 122 and moves the sliding rod 122 until it abuts the outer edge of the threaded hole 421. The sliding rod 122 is then rotated and a thrust is applied to the sliding rod 122, causing the threaded end 123 of the sliding rod 122 to gradually rotate into the threaded hole 421, achieving a threaded connection between the threaded end 123 and the threaded hole 421. The sliding rod 122 can then be moved to drive the second carrier 420 to move.

[0160] When it is necessary to remove a sample from the second carrier 420, the operating assembly 300 pulls the sliding rod 122 to move the second carrier 420 to the opening of the inlet / exit chamber 120. The operating assembly 300 then rotates the sliding rod 122 and applies a pulling force to the sliding rod 122, releasing the threaded connection between the sliding rod 122 and the threaded hole 421. After the threaded connection is released, the operating assembly 300 opens the second door 121 to remove the second carrier 420.

[0161] As an embodiment, a central control processor is provided in the operating component 300. The execution of the above-mentioned actions of the operating component 300 is controlled by the central control processor.

[0162] As an embodiment, the entry and exit block 125 and the slide rail can be configured so that the entry and exit block 125 can only slide when a force exceeding a preset force is applied thereto. The configuration method is the existing technology. For example, a bolt that can adjust the tightness can be provided on the entry and exit block 125 to adjust the contact area between it and the slide rail, thereby adjusting the sliding friction force of the entry and exit block 125. For example, a self-locking mechanism of a marble can be provided between the entry and exit block 125 and the cavity area. When the thrust applied to the entry and exit block 125 is greater than the preset force, the marble releases the self-locking state so that the entry and exit block 125 can be pushed.

[0163] A force sensor is provided on the operating assembly 300. The force sensor can determine whether the threaded end 123 contacts the threaded hole 421, whether the threaded connection is in place, and whether the threaded connection is released, so that the operating assembly 300 can determine when to rotate, push, and pull the sliding rod 122. In addition, before the threaded end 123 is threadedly connected to the threaded hole 421, the thrust applied by the operating assembly 300 to the sliding rod 122 is less than the above-mentioned preset force, so that the operating assembly 300 cannot push the entry and exit block 125 to slide. After the operating assembly 300 determines through the force sensor that the threaded connection between the threaded end 123 and the threaded hole 421 is in place, a thrust greater than the above-mentioned preset force is applied to the sliding rod 122, allowing the sliding rod 122 to drive the entry and exit block 125 to slide. Similarly, during the process of unscrewing the threaded end 123, the pulling force applied by the operating assembly 300 to the sliding rod 122 is less than the above-mentioned preset force. It should be noted that the method of using a force sensor to determine whether the threaded end 123 contacts the end edge of the threaded hole 421, whether the threaded end 123 is connected to the threaded hole 421, and whether the threaded end 123 is released from the threaded hole 421 can all be achieved through existing force sensors, so it will not be described in detail in this embodiment.

[0164] As an embodiment, the sliding rod 122 may be connected to a guide rod 126. The guide rod 126 is connected to the second door body 121 and is used to provide guidance and support for the sliding of the sliding rod 122. At the same time, the sliding rod 122 does not affect or interfere with the guide rod 126 during rotation.

[0165] For details, please refer to Figure 4 The guide rod 126 is slidably connected to the second door body 121. The outer end of the sliding rod 122 is rotatably connected to the guide rod 126 via a support plate 127, so that the rotation of the sliding rod 122 does not interfere with the guide rod 126. The inner end of the sliding rod 122 is connected to the second support plate 128, and the sliding rod 122 passes through the second support plate 128 and is rotatably connected thereto. The inner end of the guide rod 126 is fixedly connected to the second support plate 128.

[0166] Through the above structure, the guide rod 126 can provide support for the sliding of the sliding rod 122, so that the sliding rod 122 can slide relative to the second door body 121. At the same time, the sliding rod 122 can rotate relative to the second door body 121.

[0167] In practical applications, the support plate 127 and the second support plate 128 may be connected to the sliding rod 122 via a bearing.

[0168] As an embodiment, a plurality of positioning holes 425 are provided on the second carrier 420 ; a positioning boss 124 is provided at the inner end of the sliding rod 122 ; the positioning boss 124 is used to be inserted into the positioning hole 425 .

[0169] The positioning holes 425 and the positioning bosses 124 assist in aligning the sliding rod 122 with the second carrier 420. In practice, the positioning bosses 124 can be disposed on the second support plate 128. Furthermore, after placement, the second carrier 420 is configured such that the positions of its positioning holes 425 align with the positions of the positioning bosses 124 when the second door 121 is closed.

[0170] Optionally, two positioning bosses 124 may be provided and located on both sides of the threaded end 123 .

[0171] In application, the operating component 300 needs to perform operations such as clamping and transporting the first sample 10 and the second sample 20, clamping and transporting the first carrier 410 and the second carrier 420, opening and closing the first door body 111 and the second door body 121, moving and rotating the sliding rod 122, etc. Therefore, the operating component 300 needs to have a moving function with multiple degrees of freedom, and at the same time, it needs to occupy a large production cost and management control cost during the production process.

[0172] In this embodiment, the auxiliary operation assembly 400, through the first adjustment mechanism 430 and the second adjustment mechanism 440, assists the operating assembly 300 in controlling the first carrier 410 and the second carrier 420, thereby securing the sample after placement. Therefore, the first adjustment mechanism 430 and the second adjustment mechanism 440 can serve as actuators for specialized actions, requiring fewer degrees of freedom to execute them, effectively reducing costs. This eliminates the need for the system to incorporate two operating assemblies 300, which would otherwise increase costs.

[0173] Based on the above, it can be seen that in the fully automatic femtosecond laser focused ion beam micromachining system provided by this embodiment, through the cooperation of the operating component 300 and the auxiliary operation component 400, it is possible to realize the fully automatic operation process of loading the first sample 10 and the second sample 20, transporting, opening and closing the door, loading, moving the sliding rod 122, sampling, etc., thereby reducing the participation of staff, improving work efficiency and saving the time that staff need to spend on tedious work. At the same time, after the program setting is completed and the placement positions of the first sample 10, the second sample 20, the first carrier 410, and the second carrier 420 are fixed each time, the placement position of the first sample 10 on the first carrier 410 and the placement position of the second sample 20 on the second carrier 420 can be fixed, thereby reducing the detection differences caused by the differences in sample positions in different batches of operations and improving the consistency of detection conditions.

[0174] For more specific examples, see Figures 14 to 17 The operating assembly 300 includes a multi-degree-of-freedom operating arm 310 , a first manipulator 320 , a second manipulator 330 and a third manipulator 340 ; the multi-degree-of-freedom operating arm 310 is disposed on the workbench 200 .

[0175] When the multi-DOF manipulator 310 is connected to the first manipulator 320 , it can be used to perform a loading operation, specifically, to clamp the first sample 10 or the second sample 20 and transfer it to the first carrier 410 or the second carrier 420 .

[0176] When the multi-DOF manipulator 310 is connected to the second manipulator 330, it can be used to perform opening and closing operations and transfer operations. Specifically, the opening and closing operation involves opening and closing the first door 111 and the second door 121 via the second manipulator 330. Specifically, the transfer operation involves gripping and transferring the first carrier 410 or the second carrier 420 into the detection chamber 110 or the access chamber 120.

[0177] When the multi-degree-of-freedom operating arm 310 is connected to the third operator 340, it can be used to perform a turning and pushing operation, specifically rotating and pushing the sliding rod 122 so that the threaded end 123 is connected to the threaded hole 421, and after the threaded end 123 is threadedly connected to the threaded hole 421, moving the sliding rod 122 drives the second carrier 420 to move between the detection chamber 110 and the entry and exit chamber 120.

[0178] During use, the first sample 10, the second sample 20, the first carrier 410, and the second carrier 420 are fixed in position at all times, so the operating assembly 300 can grasp and transfer these components according to a pre-set procedure. In other embodiments, the operating assembly 300 can also be equipped with a visual sensor to assist in determining the position of these components through existing image recognition methods.

[0179] In use, the operating end of the multi-DOF manipulator 310 is equipped with a quick-change connector. The first manipulator 320, the second manipulator 330, and the third manipulator 340 are also equipped with quick-change connectors. These quick-change connectors enable rapid model changes. The quick connection and disconnection methods of these quick-change connectors are known in the art and will not be described in detail in this embodiment.

[0180] In this embodiment, during the operation of the multi-DOF manipulator 310, different operations require the use of different manipulators, i.e., a reconfiguration operation is required. However, the use of the first manipulator 320, the second manipulator 330, and the third manipulator 340 can reduce the number of reconfigurations required for the multi-DOF manipulator 310 throughout the entire process, thereby optimizing the fully automated operation process and improving efficiency.

[0181] In one embodiment, a die-changing seat 240 is provided on the workbench 200 ; the die-changing seat 240 is used to place the first manipulator 320 , the second manipulator 330 , and the third manipulator 340 . The die-changing operation of the multi-DOF manipulator 310 is performed on the die-changing seat 240 .

[0182] In one embodiment, see Figure 15The first operator 320 includes: two first clamping rods 321 capable of clamping; the clamping end of the first clamping rod 321 is provided with an extension block 322 extending along the first direction; the first direction is perpendicular to the length direction of the first clamping rod 321 and the opening and closing direction of the first clamping rod 321; the inner side of the extension block 322 is provided with a buffer pad.

[0183] For ease of explanation, Figure 14 For example, taking the azimuth view in FIG. 1 as an example, that is, taking the view in which the first operator 320, the second operator 330 and the third operator 340 are all placed horizontally downward as an example, the first direction can be Figure 14 The x-axis direction in . Correspondingly, the opening and closing direction is Figure 14 The y-axis direction in the vertical direction is Figure 14 The z-axis direction.

[0184] The two first clamping rods 321 are capable of clamping, meaning they can move closer together to clamp an object between them or move farther apart to release the object. The opening and closing of the two first clamping rods 321 can be driven by an opening and closing actuator within the first manipulator 320. Because the methods for implementing the opening and closing actuator are known in the art, the connection method of the opening and closing actuator will not be described in detail in this embodiment.

[0185] The extension block 322 can increase the connection area between the first clamping rod 321 and the sample, so that the first operator 320 can clamp both the first sample 10 and the second sample 20, avoiding the need to change the operating component 300 during the process of clamping the first sample 10 and the second sample 20.

[0186] In one embodiment, see Figure 14 and Figure 16 The second operator 330 includes: two second clamping rods 331 capable of clamping; the end of the second clamping rod 331 is provided with a first notch 332 for clamping the first carrier 410 or the second carrier 420; the middle part of the second clamping rod 331 is provided with a second notch 333 for clamping the door handle of the first door body 111 or the door handle of the second door body 121; the first notch 332 is open in the second direction, the third direction and the fourth direction; the second notch 333 is open in the third direction; the second direction is the length direction of the second clamping rod 331; the third direction is the opening and closing direction of the second clamping rod 331; the fourth direction is perpendicular to the second direction and the third direction.

[0187] Likewise Figure 14 For example, the second direction can be Figure 14 The z-axis direction in the Figure 14 The y-axis direction in the fourth direction can be Figure 14 The x-axis direction in .

[0188] In this embodiment, the second notch 333 can be in the shape of a semicircular arc. After the two second notches 333 are combined, they can be adapted to a circular door handle to achieve clamping of the door handle. Thereafter, under the operation of the multi-degree-of-freedom operating arm 310, the door body can be opened. The first notch 332 can be in the shape of a quarter-circular arc, which opens in the second direction (i.e., the z-axis direction), which can facilitate the two second clamping rods 331 to extend into the top and bottom of the carrier during clamping. Therefore, in this embodiment, the multi-degree-of-freedom operating arm 310 can perform opening and closing operations and transfer operations through the second operator 330, thereby further reducing the number of changeovers during the operation process.

[0189] In one embodiment, see Figure 14 and Figure 17 The third operator 340 includes a rotating platform 341 and two third clamping rods 342 ; the rotating platform 341 can rotate; the two third clamping rods 342 can be opened and closed and are arranged on the rotating platform 341 .

[0190] The third manipulator 340 may be provided with a rotation driver, and connected to the rotating platform 341 via the rotation driver to control the rotation of the rotating platform 341. The rotating platform 341 may be provided with an opening and closing driver, and connected to the two third clamping rods 342 via the opening and closing driver to control the opening and closing of the two third clamping rods 342.

[0191] The multi-degree-of-freedom operating arm 310 can clamp the sliding rod 122 through the third operator 340 , and drive the sliding rod 122 to rotate and push or pull the sliding rod 122 to move.

[0192] As an embodiment, the third clamping rod 342 is in the shape of an arc-shaped sheet, and friction grooves are provided on the inner side of the third clamping rod 342 so as to facilitate the third clamping rod 342 to clamp the sliding rod 122 .

[0193] In one embodiment, see Figure 7 An elastic locking member 412 is provided on the first carrier 410; the elastic locking member 412 is movable and elastic, and the size of the first placement groove 411 can be adjusted by moving the elastic locking member 412, and the elastic locking member 412 can elastically clamp the first sample 10 in the first placement groove 411.

[0194] Specifically, the first carrier 410 may be provided with a stationary positioning member. A first placement slot 411 is formed between the positioning member and an elastic retaining member 412. The elastic retaining member 412 may be connected to the first carrier 410 via a spring (not shown), imparting an elastic force to move the first carrier 410 toward the center. When the elastic retaining member 412 is pulled away from the center of the first carrier 410, the first placement slot 411 expands.

[0195] See also Figure 8 The first adjustment mechanism 430 is used to clamp the elastic retaining member 412 to drive the elastic retaining member 412 to move. As an embodiment, the first adjustment mechanism 430 includes: a retaining member clamp 431, a first support platform 432 and a first cylinder 433; the first support platform 432 is arranged beside the first boss 210; the retaining member clamp 431 is slidably arranged on the first support platform 432 in the direction of approaching or moving away from the first boss 210; the first cylinder 433 is arranged on the first support platform 432, and the output end is connected to the retaining member clamp 431, which is used to drive the retaining member clamp 431 to slide; the retaining member clamp 431 is used to clamp the elastic retaining member 412; when the first carrier 410 is placed on the first boss 210, the elastic retaining member 412 is located on the side of the first carrier 410 close to the first support platform 432.

[0196] In this embodiment, the opening and closing of the clamping member 431 can also be controlled by an existing opening and closing driver. The first adjusting mechanism 430 can clamp and pull the elastic clamping member 412 to move, so as to adjust the size of the first placement slot 411.

[0197] In one embodiment, see Figure 9 The second carrier 420 is provided with a support block 423 and an adjustment block 422; the adjustment block 422 is provided with a pressing piece 427; the pressing piece 427 is threadedly connected to the adjustment block 422; a second placement groove 424 for the second sample 20 to be placed is formed between the support block 423 and the pressing piece 427; the second adjustment mechanism 440 is used to rotate the pressing piece 427 so that the pressing piece 427 can press or loosen the second sample 20 in the second placement groove 424.

[0198] In use, the support block 423 and the adjustment block 422 are arranged opposite to each other, so that a gap is formed between them for placing the second sample 20. In addition, since the support block 423 and the adjustment block 422 can play an auxiliary supporting role, the pressing force required for placing the second sample 20 in the gap is small.

[0199] As an embodiment, the inner end of the pressing member 427 (the end extending into the gap) can be connected to a sheet structure (not shown), which can be provided with a cushion. This sheet structure can increase the contact area between the pressing member 427 and the second sample 20.

[0200] After the second sample 20 is placed in the gap, the size of the second placement groove 424 can be adjusted by rotating the pressing member 427 .

[0201] In one embodiment, the second adjustment mechanism 440 includes: a second support platform 441, a second cylinder 442 and a rotating motor 443; the second support platform 441 is arranged next to the second boss 220; the rotating motor 443 is slidably arranged on the second boss 220 in the direction of approaching or moving away from the second carrier 420; the second cylinder 442 is arranged on the second boss 220, and is used to drive the rotating motor 443 to slide; after the output end of the rotating motor 443 is connected to the clamping member 427, the rotating motor 443 is used to drive the clamping member 427 to rotate.

[0202] In one embodiment, the output end of the rotary motor 443 can be provided with a first connection structure, such as a screwdriver or hexagonal socket; the outer end of the compression member 427 can be provided with a corresponding second connection structure, such as a screw head or hexagonal socket. The second cylinder 442 drives the rotary motor 443 to move, controlling the docking or separation of the first and second connection structures. During docking, activating the rotary motor 443 drives the compression member 427 to rotate.

[0203] In the embodiment provided herein, both the first adjustment mechanism 430 and the second adjustment mechanism 440 can be controlled by existing drive components such as cylinders and motors, and their control and manufacturing costs are lower than those of the operating assembly 300. Furthermore, with the coordinated action of the first adjustment mechanism 430 and the second adjustment mechanism 440, the first sample 10 and the second sample 20 can be transported and secured using a single operating assembly 300, eliminating the need for multiple operating assemblies 300 and effectively reducing costs.

[0204] In one embodiment, the second carrier 420 is provided with a plurality of parallel and spaced adjustment slots 426 ; the support block 423 and the adjustment block 422 can be detachably inserted into the adjustment slots 426 .

[0205] The multiple adjustment slots 426 allow for direct adjustment of the relative position between the support block 423 and the adjustment block 422, allowing the second carrier 420 to accommodate samples of varying sizes. Furthermore, in practical applications, samples may require both frontal and side inspections. When inspecting the front, the support block 423 and the adjustment block 422 can be placed separately in the two adjustment slots 426 that are farther apart, allowing the second sample 20 to be positioned horizontally. When inspecting the front, the support block 423 and the adjustment block 422 can be placed separately in the two adjustment slots 426 that are closer together, allowing the second sample 20 to be positioned vertically.

[0206] In a further improved embodiment, see Figure 6 、 Figure 10 and Figure 11The auxiliary operation component 400 also includes: a third carrier 450 and a third adjustment mechanism 460; an intermediate plate 451 and two clamping plates 452 are provided on the third carrier 450; the two clamping plates 452 can be slidably arranged on both sides of the intermediate plate 451; the clamping plates 452 are elastically connected to the intermediate plate 451 to form an elastic clamping cavity 453 between the clamping plates 452 and the intermediate plate 451; the elastic clamping cavity 453 is used to clamp the second sample 20; the inlet and outlet cavity 120 is also used to place the third carrier 450; the third adjustment mechanism 460 is provided with a placement seat 461 for placing the third carrier 450, and the third adjustment mechanism 460 is used to drive the two clamping plates 452 to slide.

[0207] In this embodiment, the clamping plate 452 and the middle plate 451 can be connected by a spring (not shown in the figure). The third carrier 450 can be used to clamp two second samples 20 at the same time, improving the applicability to different testing requirements.

[0208] As an embodiment, the third adjustment mechanism 460 includes: a third support platform 462, a third cylinder 463, a fourth cylinder 464, two sliders 465 and two clamping fingers 466. The two sliders 465 are slidably arranged on the third support platform 462 along the fifth direction; the fifth direction can be Figure 11 The two clamping fingers 466 are respectively provided on the two sliders 465; the clamping fingers 466 include two clamping posts 467, and the two clamping posts 467 are slidably provided on the slider 465 along the sixth direction; the sixth direction can be Figure 11 The b-axis direction.

[0209] The third cylinder 463 is arranged on the third support platform 462, and the output end is connected to the two sliders 465, which is used to drive the two sliders 465 to move closer to or away from each other; the fourth cylinder 464 is arranged on the slider 465, and the output end is connected to the two clamping columns 467, which is used to drive the two clamping columns 467 to move closer to or away from each other; a clamping plate groove 454 is provided on the side of the clamping plate 452; the clamping column 467 is used to be clamped into the clamping plate groove 454; the fifth direction is the sliding direction of the clamping plate 452; the sixth direction is located on the horizontal plane and is perpendicular to the fifth direction.

[0210] In this embodiment, the number of third cylinders 463 and fourth cylinders 464 can be multiple. For example, two third cylinders 463 can be provided to respectively drive the two sliders 465 to slide, so that the two sliders 465 can slide different distances to clamp second samples 20 of different sizes. The fourth cylinder 464 can include two, each corresponding to the two clamping fingers 466. The fourth cylinder 464 can drive the two clamping columns 467 toward or away from each other. The driving method can adopt existing technologies, such as using an inclined wedge structure with an elastic return mechanism.

[0211] In this embodiment, clamping plates 452 are provided with clamping plate grooves 454 on both sides along the sixth direction. After the fourth cylinder 464 drives the two clamping columns 467 away from each other in the sixth direction, the third carrier 450 can be placed into the placement seat 461. The fourth cylinder 464 then drives the two clamping columns 467 toward each other until they engage within the clamping plate grooves 454, thereby clamping the two clamping plates 452. After clamping, the third cylinder 463 can drive the two clamping plates 452 to move in the fifth direction to adjust the size of the elastic clamping cavity 453.

[0212] In this embodiment, the loading operation of the operating assembly 300 also includes transferring the second sample 20 to the top of the third carrier 450. At this time, the third carrier 450 can be preset on the placement seat 461. The third adjustment mechanism 460 then drives one elastic clamping cavity 453 to expand, allowing the second sample 20 to be placed in one elastic clamping cavity 453. After placement, the operating assembly 300 moves to transfer another second sample 20 to the top of the third carrier 450. The third adjustment mechanism 460 then drives the other elastic clamping cavity 453 to expand, allowing the second sample 20 to be placed in the other elastic clamping cavity 453.

[0213] The transfer operation of the operating component 300 further includes transferring the third carrier 450 to be placed into the access cavity 120 , and adjusting the position of the third carrier 450 through a push-turn operation after closing the second door 121 .

[0214] As an embodiment, the clamping plate groove 454 is a semicircular groove body; the clamping column 467 is a cylinder, so that the clamping column 467 can be easily inserted into the clamping plate groove 454.

[0215] In one embodiment, see Figure 6 The auxiliary operation component 400 also includes: a first sample table 470; the first sample table 470 is arranged on the operation table 200; the first carrier 410 is used for placing the first sample 10 horizontally; the first sample table 470 is used for placing the first sample 10 vertically, so that the operation component 300 can clamp the first sample 10 in the vertical direction.

[0216] In this embodiment, the first sample stage 470 can be configured to place one first sample 10 at a time. The vertical placement of the first sample 10 can facilitate the operation component 300 to clamp it.

[0217] Furthermore, the auxiliary operation component 400 further includes: a second sample stage 480 ; the second sample stage 480 is disposed on the operation table 200 ; the second sample stage 480 is used for tilting the first sample 10 .

[0218] In one embodiment, see Figure 6 、 Figure 12 and Figure 13The auxiliary operation component 400 further includes: a third sample stage 490 ; the third sample stage 490 is disposed on the operation table 200 ; a plurality of sample slots 491 are disposed on the third sample stage 490 ; the sample slots 491 are used for placing the second sample 20 .

[0219] In application, the third sample table 490 can be transported synchronously with multiple second samples 20, or it can be fixed on the workbench 200, and the operating robot of the AGV car can place multiple pieces of second samples 20 into multiple sample slots 491 one by one.

[0220] In one embodiment, the third sample stage 490 includes: a lifting cylinder 492, a first rail and a second rail (the first rail and the second rail are not shown in the figure); a lifting plate 493 that can slide in a vertical direction is provided in the sample slot 491; the second rail can be slidably provided on the first rail; the lifting cylinder 492 can be slidably provided on the second rail, and the sliding direction is perpendicular to the sliding direction of the second rail; the lifting cylinder 492 is used to drive the lifting plate 493 to rise and fall in the vertical direction.

[0221] In practice, the sliding movement of the second track can be controlled by a sliding actuator (e.g., a pneumatic cylinder). Similarly, the sliding movement of the fixed lift cylinder 492 can be controlled by a sliding actuator (e.g., a pneumatic cylinder). In this embodiment, multiple sample slots 491 are arranged in a rectangular array. The first and second tracks allow the lift cylinder 492 to slide under any sample slot 491, thereby lifting the corresponding lift plate 493 and the second sample 20 thereon, facilitating the clamping of the operating assembly 300.

[0222] The inventors discovered that when placing the second sample 20 on the third sample stage 490, the second sample 20 needs to be in a horizontal state. After the second sample 20 is lifted up, the operating component 300 generally clamps the second sample 20 from the vertical downward direction on both sides. This makes it inconvenient to place the second sample 20 when it is needed to be placed vertically (when observing the side of the second sample 20). To avoid this situation, the operating component 300 is required to clamp the second sample 20 from a horizontal direction, which requires a large operating space for the operating component 300 and is not conducive to the compactness of the overall structure. At the same time, it is necessary to ensure that the operating component 300 and the various components on the workbench 200 avoid each other, which requires a large range of movement of the operating component 300 and a high degree of precision in the movement.

[0223] To this end, in this embodiment, a second sample stage 480 is provided for tilting the second sample 20. After being picked up, the second sample 20 can be temporarily tilted and placed on the second sample stage 480. The operating assembly 300 can then independently adjust the orientation of the manipulator and pick up the tilted second sample 20, facilitating the operating assembly 300 to place the second sample 20 onto the second carrier 420 or the third carrier 450 in different orientations.

[0224] In one embodiment, see Figure 18 The detection chamber 110 is provided with a first positioning seat; a plurality of first connecting seats 413 are provided at the bottom of the first carrier 410; the first connecting seat 413 is used to clamp the first positioning seat.

[0225] When different first connecting seats 413 are connected to the first positioning seat, the position of the first carrier 410 relative to the first positioning seat will change, thereby adapting to the detection requirements of different areas of the first sample 10.

[0226] In one embodiment, a laser processing assembly 130 is provided on the ion beam device 100 ; a laser processing head of the laser processing assembly 130 is disposed in the detection cavity 110 .

[0227] The laser processing assembly 130 may include an ion beam column. This column utilizes a liquid gallium (Ga) ion source, combined with a multi-stage electromagnetic lens and deflection system to form an ion optical system. Combined with a gas injection system and a 3D imaging module, it can achieve beam current control over a wide range from 1pA to 100nA, enabling nanometer-level precision material cutting, milling, and deposition. It also supports high-resolution imaging, 3D reconstruction, and in-situ composition analysis in conjunction with an electron beam.

[0228] In one embodiment, the first door body 111 and the second door body 121 are both flip doors.

[0229] Specifically, the first door body 111 and the second door body 121 are connected to the main body of the ion beam device 100 through hinges. Compared with the existing completely separated door bodies, they have better sealing and structural strength and are more suitable for scenarios that require processing.

[0230] Further, see Figure 6 A translation seat 230 is provided on the workbench 200 ; the operating assembly 300 is slidably provided on the translation seat 230 .

[0231] The translation seat 230 can increase the degree of freedom of the operating assembly 300 , making it easier to adjust its position on the workbench 200 .

[0232] The above are only preferred embodiments of the present application and are not intended to limit the present invention. Although the present application has been described in detail with reference to examples, those skilled in the art can still modify the technical solutions described in the aforementioned examples or make equivalent replacements for some of the technical features therein. However, any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present application should be included in the scope of protection of the present application.

Claims

1. A fully automatic femtosecond laser focused ion beam micromachining system, characterized in that: include: Ion beam equipment (100), an operating table (200), an operating component (300), and an auxiliary operating component (400); The workbench (200) is arranged beside the ion beam device (100); The auxiliary operation assembly (400) comprises: a first carrier (410), a second carrier (420), a first adjustment mechanism (430), and a second adjustment mechanism (440); The workbench (200) is provided with a first boss (210) for placing the first carrier (410) and a second boss (220) for placing the second carrier (420); The first carrier (410) is provided with a first placement slot (411) with adjustable size; The first adjustment mechanism (430) is arranged beside the first boss (210) and is used to adjust the size of the first placement groove (411) to fix the first sample (10); The second carrier (420) is provided with a second placement slot (424) with adjustable size; The second adjustment mechanism (440) is arranged beside the second boss (220) and is used to adjust the size of the second placement groove (424) to fix the second sample (20); The ion beam device (100) is provided with a detection cavity (110) and an inlet and outlet cavity (120) that are communicated with each other; The detection chamber (110) is used to place the first carrier (410) and is provided with a first door (111); The inlet and outlet cavity (120) is used to place the second carrier (420) and is provided with a second door (121); The second door body (121) is provided with a sliding rod (122) that can slide and rotate; The inner end of the sliding rod (122) is provided with a threaded end (123); The second carrier (420) is provided with a threaded hole (421); The operating component (300) is arranged on the operating table (200) and is used to perform sheet loading operation, transfer operation, opening and closing operation, and pushing operation; The loading operation is to transfer the first sample (10) to the first carrier (410) or to transfer the second sample (20) to the second carrier (420); The opening and closing operation is to open and close the first door body (111) and the second door body (121); The transfer operation is to transfer the first carrier (410) to the detection chamber (110) or to transfer the second carrier (420) to the inlet and outlet chamber (120); The pushing and turning operation is to rotate and push the sliding rod (122) so that the threaded end (123) is connected to the threaded hole (421), and then move the sliding rod (122) to drive the second carrier (420) to move to the detection chamber (110).

2. The fully automatic femtosecond laser focused ion beam micromachining system according to claim 1, characterized in that: The operating assembly (300) comprises: a multi-degree-of-freedom operating arm (310), a first manipulator (320), a second manipulator (330), and a third manipulator (340); The multi-degree-of-freedom operating arm (310) is arranged on the workbench (200); The multi-degree-of-freedom operating arm (310) is used to clamp and transport the first sample (10) or the second sample (20) when connected to the first manipulator (320); The multi-degree-of-freedom operating arm (310) is used to open and close the first door body (111) and the second door body (121), and to clamp and transport the first carrier (410) or the second carrier (420) when connected to the second operator (330); The multi-degree-of-freedom operating arm (310) is used to rotate and push the sliding rod (122) when connected to the third operator (340) so that the threaded end (123) is connected to the threaded hole (421), and is used to move the sliding rod (122) to drive the second carrier (420) to move between the detection cavity (110) and the entry and exit cavity (120).

3. The fully automatic femtosecond laser focused ion beam micromachining system according to claim 2, characterized in that: A mold changing seat (240) is provided on the workbench (200); The change seat (240) is used for placing the first operator (320), the second operator (330) and the third operator (340).

4. The fully automatic femtosecond laser focused ion beam micromachining system according to claim 2, characterized in that: The first operator (320) comprises: two first clamping rods (321) capable of performing a clamping action; The clamping end of the first clamping rod (321) is provided with an extension block (322) extending along the first direction; The first direction is perpendicular to the length direction of the first clamping rod (321) and the opening and closing direction of the first clamping rod (321); A buffer pad is provided on the inner side of the extension block (322).

5. The fully automatic femtosecond laser focused ion beam micromachining system according to claim 2, characterized in that: The second operator (330) comprises: two second clamping rods (331) capable of performing a clamping action; The end of the second clamping rod (331) is provided with a first notch (332) for clamping the first carrier (410) or the second carrier (420); A second notch (333) is provided in the middle of the second clamping rod (331) for clamping the door handle of the first door body (111) or the door handle of the second door body (121); The first notch (332) opens towards the second direction, the third direction and the fourth direction; The second notch (333) opens toward the third direction; The second direction is the length direction of the second clamping rod (331); The third direction is the opening and closing direction of the second clamping rod (331); The fourth direction is perpendicular to the second direction and the third direction.

6. The fully automatic femtosecond laser focused ion beam micromachining system according to claim 2, characterized in that: The third operator (340) comprises a rotating platform (341) and two third clamping rods (342); The rotating platform (341) is capable of rotating; The two third clamping rods (342) are arranged on the rotating platform (341) in an openable and closable manner.

7. The fully automatic femtosecond laser focused ion beam micromachining system according to claim 6, characterized in that: The third clamping rod (342) is in the shape of an arc-shaped sheet, and friction lines are provided on the inner side of the third clamping rod (342).

8. The fully automatic femtosecond laser focused ion beam micromachining system according to claim 1, characterized in that: The first carrier (410) is provided with an elastic locking member (412); The elastic clamping member (412) is movable and elastic, and the size of the first placement groove (411) can be adjusted by moving the elastic clamping member (412), and the elastic clamping member (412) can clamp the first sample (10) in the first placement groove (411) by elasticity; The first adjustment mechanism (430) is used to clamp the elastic locking member (412) to drive the elastic locking member (412) to move.

9. The fully automatic femtosecond laser focused ion beam micromachining system according to claim 8, characterized in that: The first adjustment mechanism (430) comprises: a positioning member fixture (431), a first support platform (432) and a first cylinder (433); The first support platform (432) is arranged beside the first boss (210); The positioning member fixture (431) is slidably disposed on the first support platform (432) in a direction approaching or moving away from the first boss (210); The first cylinder (433) is arranged on the first support platform (432), and the output end is connected to the positioning fixture (431) and is used to drive the positioning fixture (431) to slide; The clamping member (431) is used to clamp the elastic clamping member (412); When the first carrier (410) is placed on the first boss (210), the elastic locking member (412) is located on a side of the first carrier (410) close to the first support platform (432).

10. The fully automatic femtosecond laser focused ion beam micromachining system according to claim 1, characterized in that: The second carrier (420) is provided with a support block (423) and an adjustment block (422); The adjusting block (422) is provided with a pressing member (427); The pressing member (427) is threadedly connected to the adjusting block (422); A second placement groove (424) for placing the second sample (20) is formed between the pressing member (427) and the supporting block (423); The second adjustment mechanism (440) is used to rotate the pressing member (427) so that the pressing member (427) presses or releases the second sample (20) in the second placement groove (424).

11. The fully automatic femtosecond laser focused ion beam micromachining system according to claim 10, characterized in that: The second adjustment mechanism (440) comprises: a second support platform (441), a second cylinder (442) and a rotating motor (443); The second support platform (441) is arranged beside the second boss (220); The rotary motor (443) is slidably disposed on the second boss (220) in a direction approaching or moving away from the second carrier (420); The second cylinder (442) is disposed on the second boss (220) and is used to drive the rotating motor (443) to slide; After the output end of the rotating motor (443) is connected to the pressing member (427), the rotating motor (443) is used to drive the pressing member (427) to rotate.

12. The fully automatic femtosecond laser focused ion beam micromachining system according to claim 10, characterized in that: The second carrier (420) is provided with a plurality of parallel and spaced adjustment slots (426); The supporting block (423) and the adjusting block (422) can both be detachably snapped into the adjusting groove (426).

13. The fully automatic femtosecond laser focused ion beam micromachining system according to claim 1, characterized in that: The auxiliary operation assembly (400) further includes: a third carrier (450) and a third adjustment mechanism (460); The third carrier (450) is provided with an intermediate plate (451) and two clamping plates (452); The two clamping plates (452) are slidably arranged on both sides of the middle plate (451); The clamping plate (452) is elastically connected to the intermediate plate (451), so that an elastic clamping cavity (453) is formed between the clamping plate (452) and the intermediate plate (451); The elastic clamping cavity (453) is used to clamp the second sample (20); The inlet and outlet cavity (120) is also used to place the third carrier (450); The third adjustment mechanism (460) is provided with a placement seat (461) for placing the third carrier (450), and the third adjustment mechanism (460) is used to drive the two clamping plates (452) to slide.

14. The fully automatic femtosecond laser focused ion beam micromachining system according to claim 13, characterized in that: The third adjustment mechanism (460) comprises: a third support platform (462), a third cylinder (463), a fourth cylinder (464), two sliders (465) and two clamping finger members (466); The two sliding blocks (465) are slidably arranged on the third support platform (462) along a fifth direction; The two clamping finger members (466) are respectively arranged on the two sliding blocks (465); The clamping finger (466) includes two clamping columns (467), and the two clamping columns (467) are slidably arranged on the slider (465) along a sixth direction; The third cylinder (463) is arranged on the third support platform (462), and the output end is connected to the two sliders (465), and is used to drive the two sliders (465) to move closer to each other or away from each other; The fourth cylinder (464) is provided on the slider (465), and an output end thereof is connected to the two clamping columns (467), and is used to drive the two clamping columns (467) to move closer to or farther from each other; A splint groove (454) is provided on the side of the splint (452); The clamping column (467) is used to be clamped into the clamping plate groove (454); The fifth direction is the sliding direction of the clamping plate (452); The sixth direction is located on a horizontal plane and is perpendicular to the fifth direction.

15. The fully automatic femtosecond laser focused ion beam micromachining system according to claim 14, characterized in that: The splint groove (454) is a semicircular groove body; The clamping column (467) is a cylinder.

16. The fully automatic femtosecond laser focused ion beam micromachining system according to claim 1, characterized in that: The auxiliary operation component (400) further includes: a first sample stage (470); The first sample stage (470) is arranged on the workbench (200); The first carrier (410) is used for placing the first sample (10) horizontally; The first sample stage (470) is used for vertically placing the first sample (10), so that the operating component (300) can clamp the first sample (10) in a vertical direction.

17. The fully automatic femtosecond laser focused ion beam micromachining system according to claim 1, characterized in that: The auxiliary operation component (400) further includes: a third sample stage (490); The third sample stage (490) is arranged on the workbench (200); The third sample stage (490) is provided with a plurality of sample slots (491); The sample slot (491) is used for placing the second sample (20).

18. The fully automatic femtosecond laser focused ion beam micromachining system according to claim 17, characterized in that: The auxiliary operation component (400) further includes: a second sample stage (480); The second sample stage (480) is arranged on the workbench (200); The second sample stage (480) is used for tilting the second sample (20).

19. The fully automatic femtosecond laser focused ion beam micromachining system according to claim 18, characterized in that: The third sample stage (490) comprises: a lifting cylinder (492), a first track and a second track; A lifting plate (493) capable of sliding in a vertical direction is provided in the sample tank (491); The second track is slidably arranged on the first track; The lifting cylinder (492) is slidably arranged on the second track, and the sliding direction is perpendicular to the sliding direction of the second track; The lifting cylinder (492) is used to drive the lifting plate (493) to move up and down in a vertical direction.

20. The fully automatic femtosecond laser focused ion beam micromachining system according to claim 1, characterized in that: The detection cavity (110) is provided with a first positioning seat; A plurality of first connecting seats (413) are provided at the bottom of the first carrier (410); The first connecting seat (413) is used for clamping the first positioning seat.

21. The fully automatic femtosecond laser focused ion beam micromachining system according to claim 1, characterized in that: The second carrier (420) is provided with a plurality of positioning holes (425); The inner end of the sliding rod (122) is provided with a positioning boss (124); The positioning boss (124) is used to be inserted into the positioning hole (425).

22. The fully automatic femtosecond laser focused ion beam micromachining system according to claim 1, characterized in that: The ion beam device (100) is provided with a laser processing component (130); The laser processing head of the laser processing assembly (130) is arranged in the detection cavity (110).

23. The fully automatic femtosecond laser focused ion beam micromachining system according to claim 22, characterized in that: The first door body (111) and the second door body (121) are both flip doors.

24. The fully automatic femtosecond laser focused ion beam micromachining system according to any one of claims 1 to 23, characterized in that: A translation seat (230) is provided on the workbench (200); The operating assembly (300) can be slidably arranged on the translation seat (230).

Images