Silicon carbide seed crystal bonding accurate alignment and rapid drying mechanism

Abstract

The application discloses a silicon carbide seed crystal bonding accurate alignment fast drying mechanism, and particularly relates to the technical field of silicon carbide seed crystal bonding, which comprises a base, wherein an adhesive assembly is arranged on the base; the adhesive assembly comprises a supporting frame arranged on the top of the base; the bottom of the supporting frame is provided with an electric heating cylinder; and the top of the electric heating cylinder is provided with a pressing disc. Through the cooperation of the second spring and the elastic seed crystal holder, the pressure is dynamically adjusted, the slight unevenness between the seed crystal and the holder is automatically adapted, the local excessive pressure caused by rigid pressing is avoided, the consistency and uniformity of the bonding layer are significantly improved, the adhesive is moderately flowed by the heating of the electric heating cylinder, the gap between the seed crystal and the holder is effectively filled, a uniform thin layer is formed, the local over-thickness or over-thinness is avoided, the uniform spreading of the adhesive is ensured, and the bonding quality is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of silicon carbide seed crystal bonding, and more particularly to a silicon carbide seed crystal bonding accurate alignment and rapid drying mechanism. BACKGROUND

[0002] As a third-generation semiconductor material, compared with the first and second generation semiconductor materials, the third-generation semiconductor material such as silicon carbide has a wider band gap, a higher breakdown field strength, a higher thermal conductivity, a higher electron saturation rate and a higher radiation resistance, and is more suitable for manufacturing high-temperature, high-frequency, large-frequency and radiation-resistant devices, and can be widely applied to high-voltage, high-frequency, high-temperature and high-reliability fields. As an initial step of growing silicon carbide crystals, the quality of seed crystal bonding directly affects the quality of silicon carbide single crystal.

[0003] Among them, the patent with the publication number CN221028787U discloses a silicon carbide seed crystal bonding device, which comprises a main body mechanism, a heating mechanism and a control mechanism. The heating mechanism is located inside the main body mechanism, and the control mechanism is located at the right end of the main body mechanism. The main body mechanism comprises a box body, a graphite support is arranged inside the box body, a pressure head is arranged at the upper end of the graphite support, a hydraulic cylinder is fixedly connected to the upper surface of the pressure head, a fixed rod is fixedly connected to the upper surface of the pressure head, a limiting block is fixedly connected to the end of the fixed rod away from the pressure head, and a sleeve rod is fixedly connected to the inner top wall of the box body.

[0004] When the structure is in use, the hydraulic cylinder moves downward, driving the fixed rod to slide downward on the inner wall of the sleeve rod, so that the pressure head moves downward to extrude the silicon seed crystal, and the silicon seed crystal is firmly bonded to the surface of the graphite support. While extruding the silicon seed crystal, the generation of microtubules is reduced. However, the mutual extrusion of the graphite support and the pressure head can easily cause high silicon seed crystals to accumulate on one side and form a high silicon seed crystal cake, which is not easy to disperse each silicon seed crystal, resulting in poor subsequent growth quality. SUMMARY

[0005] In order to overcome the above-mentioned defects of the prior art, the present application provides a silicon carbide seed crystal bonding accurate alignment and rapid drying mechanism, which aims to solve the problems raised in the above background.

[0006] The present application provides the following technical scheme: a silicon carbide seed crystal bonding accurate alignment and rapid drying mechanism, comprising a base, wherein the base is provided with a bonding assembly;

[0007] The bonding assembly comprises a support frame arranged at the top of the base, an electric heating cylinder arranged at the bottom of the support frame, a pressure disc arranged at the top of the electric heating cylinder, a limiting disc fixedly arranged at the bottom of the pressure disc, a plurality of flow guide grooves formed in the outer side of the limiting disc, a plurality of spiral through holes formed in the limiting disc, and a plurality of elastic seed crystal supports slidably connected in the spiral through holes.

[0008] The top of the pressing disc is provided with a tray, the middle of the tray is provided with a vertical shaft, the elastic seed crystal holder and the spiral through hole are both provided with a spiral shape, and the top of the tray is provided with a groove, and the groove is slidably connected with a first spring, the first spring is sleeved on the outside of the vertical shaft, the top of the support frame is provided with a gear box through bolts, the both sides of the gear box are provided with a deflection rod, and one end of each deflection rod is rotatably connected with a connecting block, the bottom of the two connecting blocks is clamped with a second spring, the bottom end of the second spring is fixedly provided with a downward rod, the both sides of the top of the downward rod are fixedly provided with a guide rod, the top end of the guide rod penetrates through the connecting block and is slidably connected with the connecting block, the bottom side of the downward rod is rotatably connected with a sliding seat, the both ends of the sliding seat are embedded with a sliding sleeve, the two sliding sleeves are sleeved on the support frame and are slidably connected with the support frame, and the sliding seat is located at the bottom of the electric heating cylinder and is detachably connected with the electric heating cylinder through bolts.

[0009] It can be seen that, in the above technical solution, the elastic pulling of the second spring itself drives the displacement of the electric heating cylinder, which can automatically adapt to the slight unevenness between the seed crystal and the elastic seed crystal holder, avoid excessive local pressure caused by rigid pressing, improve the consistency of the bonding layer, make the thickness of the adhesive more uniform, dynamically adjust the pressure through elastic pressing, and at the same time, through the heating and drying of the electric heating cylinder, appropriate heating can make the adhesive flow moderately, fill the small gap between the seed crystal and the elastic seed crystal holder, form a uniform thin layer, ensure uniform spreading of the adhesive, avoid local over-thickness or under-thickness, and through the spiral shape of the spiral through hole and the elastic seed crystal holder, the silicon carbide seed crystal in the electric heating cylinder is easily bonded to the elastic seed crystal holder on the limiting disc, at the same time, when the elastic seed crystal holder is displaced upward and pushes the tray to compress the first spring, the elastic seed crystal holder stops extending upward after the first spring is compressed together, and the continuous upward displacement of the electric heating cylinder causes the elastic seed crystal holder to be stressed and deformed and pressed together, realizing the function of shortening the length of the elastic seed crystal holder and making the elastic seed crystal holder penetrate into the silicon carbide seed crystal layer.

[0010] Optionally, in a possible implementation, the top end of each of the plurality of elastic seed crystal holders extends to the bottom of the tray and is slidably connected with the tray, the vertical shaft is located on the bottom surface of the support frame and is rotatably connected with the support frame, the inner wall top and bottom of the gear box are rotatably connected with a first bevel gear, a second bevel gear is arranged between the two first bevel gears, the second bevel gear is engaged with the first bevel gear, a horizontal shaft is installed on the second bevel gear through a flange, the horizontal shaft penetrates through the gear box and the support frame and extends to the end of the deflection rod and is fixedly connected with the deflection rod, the horizontal shaft is rotatably connected with the gear box and the support frame, the top of the gear box is provided with a motor through bolts, the output end of the motor extends to the first bevel gear on the top inner wall of the gear box, and the first bevel gear on the bottom inner wall of the gear box is detachably connected with the vertical shaft through bolts.

[0011] It can be seen that in the above technical scheme, the second bevel gear rotates to drive the horizontal shaft to rotate, the horizontal shaft rotates to make the deflection rod deflect along the axial direction of the horizontal shaft and adjust the angle, when the deflection rod deflects, the connecting block is displaced to pull the second spring, then the second spring is stretched to drive the lower extension rod to pull the sliding block to displace on the support frame through the guide of the sliding sleeve, then the electric heating cylinder is displaced upward and the limiting disc can extend into the electric heating cylinder, the first bevel gear is driven to rotate by the second bevel gear, the vertical shaft can drive the pressing disc and the limiting disc to rotate, and the elastic seed crystal holder can rotate in the electric heating cylinder, which not only can scatter the silicon carbide seeds deposited together, but also can make the silicon carbide seeds fully adhere to the elastic seed crystal holder by the rotating mode of the elastic seed crystal holder, so as to improve the adhesion quality and effect.

[0012] The technical effects and advantages of the present application are as follows:

[0013] 1. The deflection rod deflects along the axial direction of the horizontal shaft and adjusts the angle, the second spring pulls the electric heating cylinder to displace upward, and through the elasticity of the second spring itself and the cooperation with the elastic seed crystal holder, the slight unevenness between the seed crystal and the elastic seed crystal holder is automatically adapted, the local excessive pressure caused by rigid pressing is avoided, the adhesion layer consistency is improved, the thickness of the adhesive is more uniform, and the elastic pressing can dynamically adjust the pressure.

[0014] 2. The electric heating cylinder is heated and dried, appropriate heating can make the adhesive flow moderately, fill the slight gap between the seed crystal and the elastic seed crystal holder, form a uniform thin layer, ensure the uniform spreading of the adhesive, and avoid local over-thickness or over-thin.

[0015] 3. In the present application, the elastic seed crystal holder can rotate on the limiting disc and extend upward through the spiral through hole and the spiral shape of the elastic seed crystal holder, the silicon carbide seeds in the electric heating cylinder can be fully adhered to the elastic seed crystal holder, the elastic seed crystal holder is deformed and pressed together, the function of shortening the length of the elastic seed crystal holder is realized, the elastic seed crystal holder is deeply into the silicon carbide seed layer, and the adhesion effect is ensured.

[0016] 4. In the present application, the first bevel gear is driven to rotate by the second bevel gear in the adhesion process, the vertical shaft can drive the pressing disc and the limiting disc to rotate, and the elastic seed crystal holder can rotate in the electric heating cylinder, which not only can scatter the silicon carbide seeds deposited together, but also can make the silicon carbide seeds fully adhere to the elastic seed crystal holder by the rotating mode of the elastic seed crystal holder, so as to improve the adhesion quality and effect.

[0017] In summary, this invention, through the synergistic effect of the second spring and the elastic seed crystal holder, dynamically adjusts the pressure, automatically adapts to minor unevenness between the seed crystal and the holder, avoids excessive local pressure caused by rigid pressurization, and significantly improves the consistency and uniformity of the adhesive layer. The electric heating cylinder heats the adhesive to allow it to flow appropriately, effectively filling the gap between the seed crystal and the holder, forming a uniform thin layer, avoiding local thicknesses or thinness, ensuring uniform spread of the adhesive, and improving bonding quality. The elastic seed crystal holder rotates and extends through the spiral through-hole, breaking up the deposited silicon carbide seed crystal and ensuring its full adhesion. At the same time, the elastic seed crystal holder can shorten its length after being deformed under force, penetrating deeper into the seed crystal layer, further enhancing the bonding effect. Furthermore, the motor-driven gear system drives the vertical and horizontal shafts to rotate, realizing the synchronous movement of the pressure plate and the elastic seed crystal holder, automating the seed crystal dispersion, pressurization, and bonding, significantly improving production efficiency and consistency. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in this disclosure, the accompanying drawings used in some embodiments will be briefly described below. Obviously, the drawings described below are only drawings of some embodiments of this disclosure, and those skilled in the art can obtain other drawings based on these drawings. In addition, the drawings described below can be regarded as schematic diagrams and are not intended to limit the actual size of the product, the actual flow of the method, the actual timing of the signals, etc. involved in the embodiments of this disclosure.

[0019] Figure 1 This is a front view of the overall structure of the present invention.

[0020] Figure 2 This is a side view of the overall structure of the present invention.

[0021] Figure 3 For the present invention Figure 2 Schematic diagram of the structure on the right.

[0022] Figure 4 This is a schematic diagram of the deflection rod, connecting block, second spring, lower extension rod, slide block and sliding sleeve of the present invention.

[0023] Figure 5 This is a schematic diagram of the support frame, pressure plate, limiting plate, electric heating cylinder and elastic seed crystal holder of the present invention.

[0024] Figure 6 This is a schematic diagram of the elastic seed crystal holder, vertical axis, pressure plate, and limiting plate of the present invention.

[0025] Figure 7 For the present invention Figure 6 Exploded view.

[0026] The attached diagram is labeled as follows: 1. Base; 2. Support frame; 3. Electric heating cylinder; 4. Pressure plate; 5. Limiting plate; 6. Spiral through hole; 7. Elastic seed crystal holder; 8. Tray; 9. First spring; 10. Vertical shaft; 11. Gearbox; 12. Deflection rod; 13. Connecting block; 14. Second spring; 15. Lower extension rod; 16. Slide seat; 17. Sliding sleeve; 18. First bevel gear; 19. Second bevel gear; 20. Motor; 21. Guide groove; 22. Horizontal shaft. Detailed Implementation

[0027] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0028] As attached Figure 1 - Appendix Figure 7 The diagram illustrates a precise alignment and rapid drying mechanism for bonding silicon carbide seed crystals. Through a bonding component mounted on a base 1, and the synergistic action of a second spring 14 and an elastic seed crystal holder 7, the pressure is dynamically adjusted to automatically adapt to minor unevenness between the seed crystal and the holder, avoiding excessive local pressure caused by rigid pressurization. This significantly improves the consistency and uniformity of the bonding layer. The electric heating cylinder 3 heats the adhesive to allow it to flow appropriately, effectively filling the gap between the seed crystal and the holder, forming a uniform thin layer. This avoids localized excessive thickness or thinness, ensuring uniform adhesive spread and improving bonding quality. The elastic seed crystal holder 7 rotates and extends through the spiral through-hole 6, breaking up the deposited silicon carbide seed crystals for thorough bonding. Simultaneously, the elastic seed crystal holder 7 can shorten its length after deformation under force, penetrating deeper into the seed crystal layer to further enhance the bonding effect. Furthermore, the motor 20 drives a gear system to rotate the vertical shaft 10 and the horizontal shaft 22, achieving synchronous movement of the pressure plate 4 and the elastic seed crystal holder 7. This automates the seed crystal dispersion, pressurization, and bonding, significantly improving production efficiency and consistency. The specific structural configuration of the components is as follows.

[0029] The bonding assembly includes a support frame 2 set on the top of the base 1, an electric heating cylinder 3 set at the bottom of the support frame 2, a pressure plate 4 set on the top of the electric heating cylinder 3, a limiting plate 5 fixedly set at the bottom of the pressure plate 4, a number of guide grooves 21 opened on the outer side of the limiting plate 5, a number of spiral through holes 6 opened through the limiting plate 5, and an elastic seed crystal holder 7 slidably connected in each spiral through hole 6.

[0030] The pressure plate 4 has a tray 8 on its top, a vertical shaft 10 in the middle of the tray 8, and both the elastic seed crystal holder 7 and the spiral through hole 6 are spiral in shape. The top of the tray 8 has a groove, and a first spring 9 is slidably connected within the groove. The first spring 9 is sleeved on the outside of the vertical shaft 10. A gearbox 11 is bolted to the top of the support frame 2. Deflection rods 12 are provided on both sides of the gearbox 11, and one end of each deflection rod 12 is rotatably connected to a connecting block 13. The bottom of both connecting blocks 13... A second spring 14 is snapped in place. A lower extension rod 15 is fixedly installed at the bottom end of the second spring 14. Guide rods are fixedly installed on both sides of the top of the lower extension rod 15. The top of the guide rod passes through the connecting block 13 and is slidably connected to the connecting block 13. A slide block 16 is rotatably connected to one side of the bottom of the lower extension rod 15. Sliding sleeves 17 are embedded at both ends of the slide block 16. Both sliding sleeves 17 are fitted on the support frame 2 and are slidably connected to the support frame 2. The slide block 16 is located at the bottom of the electric heating cylinder 3 and is detachably connected to the electric heating cylinder 3 by bolts.

[0031] The tops of multiple elastic seed crystal holders 7 extend to the bottom of tray 8 and are slidably connected to tray 8. The vertical shaft 10 is located on the bottom surface of the support frame 2 and is rotatably connected to the support frame 2. The top and bottom of the inner wall of the gearbox 11 are rotatably connected to the first bevel gears 18, and a second bevel gear 19 is provided between the two first bevel gears 18. The second bevel gear 19 meshes with the first bevel gears 18. A horizontal shaft 22 is installed on the second bevel gear 19 through a flange. The horizontal shaft 22 passes through the gearbox 11 and the support frame 2 and extends to the end of the deflection rod 12 and is fixedly connected to the deflection rod 12. The horizontal shaft 22 is rotatably connected to the gearbox 11 and the support frame 2 respectively. The top of the gearbox 11 is bolted to a motor 20. The output end of the motor 20 extends to the first bevel gear 18 located at the top of the inner wall of the gearbox 11, and the first bevel gear 18 at the bottom of the inner wall of the gearbox 11 is detachably connected to the vertical shaft 10 through bolts.

[0032] The specific working principle is as follows: the raw material is added into the electric heating cylinder 3, and the first bevel gear 18 is driven to rotate by the motor 20. The first bevel gear 18 meshes with the second bevel gear 19, which in turn causes the first bevel gear 18 to rotate, and the second bevel gear 19 to rotate. When the second bevel gear 19 rotates, it drives the horizontal shaft 22 to rotate. When the horizontal shaft 22 rotates, the deflection rod 12 deflects along the axial direction of the horizontal shaft 22 and the angle is adjusted.

[0033] When the deflection rod 12 deflects, it will cause the connecting block 13 to move and pull the second spring 14. The second spring 14 is stretched and drives the lower extension rod 15 to pull the slide block 16 to move on the support frame 2 through the guide of the sliding sleeve 17. Then, the electric heating cylinder 3 moves upward and the limiting plate 5 can extend into the electric heating cylinder 3. The way in which the slide block 16 is pulled by the elasticity of the second spring 14 and the electric heating cylinder 3 moves can automatically adapt to the slight unevenness between the seed crystal and the elastic seed crystal support 7, avoid excessive local pressure caused by rigid pressure, improve the consistency of the adhesive layer, and make the thickness of the adhesive more uniform. The elastic pressure can dynamically adjust the pressure. At the same time, the electric heating cylinder 3 heats and dries the adhesive. Appropriate heating can allow the adhesive to flow moderately, fill the small gap between the seed crystal and the elastic seed crystal support 7, form a uniform thin layer, ensure that the adhesive is evenly spread, and avoid local excessive thickness or thinness.

[0034] Furthermore, when the limiting disk 5 extends into the electric heating cylinder 3, each elastic seed crystal holder 7 is pulled upward by the upward displacement of the electric heating cylinder 3 and moves upward through the spiral through hole 6. At the same time, it can rotate on the limiting disk 5 through the spiral through hole 6 and the spiral shape of the elastic seed crystal holder 7, which makes it easy for the silicon carbide seed crystal in the electric heating cylinder 3 to fully adhere to the elastic seed crystal holder 7. At the same time, when the elastic seed crystal holder 7 moves upward and pushes the tray 8 to compress the first spring 9, when the first spring 9 is squeezed together, the elastic seed crystal holder 7 stops extending upward, while the electric heating cylinder 3 continues to move upward, which causes the elastic seed crystal holder 7 to be deformed by force and squeezed together, thereby shortening the length of the elastic seed crystal holder 7 and allowing the elastic seed crystal holder 7 to penetrate deep into the silicon carbide seed crystal layer.

[0035] Simultaneously, the second bevel gear 19 drives the first bevel gear 18 to rotate, which enables the vertical shaft 10 to drive the pressure plate 4 and the limiting plate 5 to rotate, allowing the elastic seed crystal holder 7 to rotate inside the electric heating cylinder 3. This not only breaks up the silicon carbide seed crystals deposited together, but also allows the silicon carbide seed crystals to fully adhere to the elastic seed crystal holder 7 through the rotation of the elastic seed crystal holder 7, improving the bonding quality and effect.

[0036] Unlike existing technologies, this application discloses a precise alignment and rapid drying mechanism for bonding silicon carbide seed crystals. Through the synergistic action of the second spring 14 and the elastic seed crystal holder 7, the pressure is dynamically adjusted to automatically adapt to minor unevenness between the seed crystal and the holder, avoiding excessive local pressure caused by rigid pressurization. This significantly improves the consistency and uniformity of the bonding layer. The electric heating cylinder 3 heats the adhesive to allow it to flow appropriately, effectively filling the gap between the seed crystal and the holder, forming a uniform thin layer, avoiding local over-thickness or under-thinness, ensuring uniform spread of the adhesive, and improving bonding quality. The elastic seed crystal holder 7 rotates and extends through the spiral through-hole 6, breaking up the deposited silicon carbide seed crystals and ensuring full bonding. At the same time, the elastic seed crystal holder 7 can shorten its length after being deformed by force, penetrating deeper into the seed crystal layer, further enhancing the bonding effect. Furthermore, the motor 20 drives the gear system to rotate the vertical shaft 10 and the horizontal shaft 22, realizing the synchronous movement of the pressure plate 4 and the elastic seed crystal holder 7. This automates the seed crystal dispersion, pressurization, and bonding, significantly improving production efficiency and consistency.

[0037] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A precise alignment and rapid drying mechanism for bonding silicon carbide seed crystals, comprising a base (1), characterized in that: An adhesive component is provided on the base (1); The bonding assembly includes a support frame (2) set on the top of the base (1), an electric heating cylinder (3) set at the bottom of the support frame (2), a pressure plate (4) set on the top of the electric heating cylinder (3), a limiting plate (5) fixedly set at the bottom of the pressure plate (4), a plurality of guide grooves (21) opened on the outer side of the limiting plate (5), a plurality of spiral through holes (6) opened through the limiting plate (5), and an elastic seed crystal holder (7) slidably connected in each of the spiral through holes (6); The pressure plate (4) is provided with a tray (8) on its top, and a vertical shaft (10) is provided in the middle of the tray (8). The top of the support frame (2) is bolted with a gearbox (11), and deflection rods (12) are provided on both sides of the gearbox (11), and one end of each deflection rod (12) is rotatably connected to a connecting block (13). The bottom of each of the two connecting blocks (13) is engaged with a second spring (14), and the bottom end of the second spring (14) is fixedly provided with a lower extension rod (15). The top two sides of the lower extension rod (15) are fixedly provided with guide rods, and the top of the guide rods passes through the connecting block (13) and is slidably connected to the connecting block (13). The lower extension rod (15) is rotatably connected to a slide block (16) on one side of its bottom, and both ends of the slide block (16) are fitted with slide sleeves (17). Both of the sliding sleeves (17) are fitted on the support frame (2) and slidably connected to the support frame (2), and the sliding seat (16) is located at the bottom of the electric heating cylinder (3) and is detachably connected to the electric heating cylinder (3) by bolts.

2. The silicon carbide seed crystal bonding precise alignment and rapid drying mechanism according to claim 1, characterized in that: The elastic seed crystal holder (7) and the spiral through hole (6) are both spiral in shape, and the top of the tray (8) is provided with a groove, and a first spring (9) is slidably connected in the groove. The first spring (9) is sleeved on the outside of the vertical shaft (10).

3. The silicon carbide seed crystal bonding precise alignment and rapid drying mechanism according to claim 1, characterized in that: The tops of the multiple elastic seed crystal holders (7) extend to the bottom of the tray (8) and are slidably connected to the tray (8). The vertical shaft (10) is located on the bottom surface of the support frame (2) and is rotatably connected to the support frame (2).

4. The silicon carbide seed crystal bonding precise alignment and rapid drying mechanism according to claim 1, characterized in that: The gearbox (11) has a first bevel gear (18) rotatably connected to the top and bottom of its inner wall, and a second bevel gear (19) is provided between the two first bevel gears (18), the second bevel gear (19) meshing with the first bevel gear (18).

5. The silicon carbide seed crystal bonding precise alignment and rapid drying mechanism according to claim 4, characterized in that: A horizontal shaft (22) is mounted on the second bevel gear (19) via a flange. The horizontal shaft (22) passes through the gearbox (11) and the support frame (2) and extends to the end of the deflection rod (12) and is fixedly connected to the deflection rod (12). The horizontal shaft (22) is rotatably connected to the gearbox (11) and the support frame (2) respectively.

6. The silicon carbide seed crystal bonding precise alignment and rapid drying mechanism according to claim 4, characterized in that: A motor (20) is bolted to the top of the gearbox (11). The output end of the motor (20) extends to the first bevel gear (18) located at the top of the inner wall of the gearbox (11). The first bevel gear (18) at the bottom of the inner wall of the gearbox (11) is detachably connected to the vertical shaft (10) by bolts.

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