PCR (Polymerase Chain Reaction) fluorescence signal detection device based on MEMS (Micro Electro Mechanical System) semiconductor chip

Abstract

The invention discloses an MEMS semiconductor chip-based PCR fluorescent signal detection device, which comprises a top electrode, glass is fixedly installed on the lower surface of the top electrode, a bottom electrode is fixedly installed on the lower surface of the glass, lower glass is fixedly installed at the peripheral position of the lower surface of the bottom electrode, and the bottom electrode is fixedly installed at the peripheral position of the lower surface of the bottom electrode. A film is fixedly installed on the lower surface of the bottom electrode and located on the inner side of the lower glass, a cavity is formed below the film, and a light source is arranged below the cavity. According to the PCR fluorescence signal detection device based on the MEMS semiconductor chip, customization of filtering performance can be realized by changing characteristics such as the size, the shape and the material of a micro-nano structure; light filtering of multiple wave bands can be achieved through one MEMS module, so that the original light filtering and receiving functions are replaced through one module at the same time, the size is small, and the price is low.

Description

Technical Field

[0001] The present invention relates to the field of variable temperature fluorescent microelectronics, and in particular to a PCR fluorescent signal detection device based on a MEMS semiconductor chip. Background Art

[0002] PCR, short for polymerase chain reaction, is based on the in vitro amplification of DNA. The standard PCR process consists of three steps: DNA denaturation: Heat breaks hydrogen bonds in the double-stranded DNA template, forming single-stranded DNA; annealing: The system temperature is lowered, allowing the primers to bind to the DNA template, forming a partially double-stranded DNA strand; and extension: Under the action of the Taq enzyme (optimally active at around 72°C), using dNTPs as raw materials, the primers are extended from the 3′ end to the 5′ end, synthesizing a DNA strand complementary to the template. Each cycle of denaturation, annealing, and extension doubles the DNA content. The PCR optical detection system mainly relies on optical technology to detect nucleic acids, including components such as lighting, imaging, filtering, lenses, detectors, and the use of different scanning methods to obtain information. PCR optical detection systems are an indispensable part of the medical industry. Its core is to capture and analyze signals during the nucleic acid amplification process using optical technology. However, we found that traditional fluorescence detection mostly uses charge-coupled device detectors, which can lead to insufficient stability of the test sample during detection and variations in optical pathlength. This results in uneven distribution of light energy across multiple reaction wells, leading to differences in the excitation light energy received by the fluorescent groups, ultimately affecting the accuracy of experimental results. Traditional PCR instruments rely on bulky optical modules (such as lasers and photomultiplier tubes) for fluorescence detection, resulting in large and expensive equipment and difficulty in achieving portability. Existing MEMS-PCR chips often use external optical detection, which has low signal acquisition efficiency and makes it difficult to achieve simultaneous multi-channel fluorescence detection. To this end, we propose a PCR fluorescence signal detection device based on a MEMS semiconductor chip. Summary of the Invention

[0003] The main purpose of the present invention is to provide a PCR fluorescence signal detection device based on a MEMS semiconductor chip, which can effectively solve the problems in the background technology.

[0004] To achieve the above object, the technical solution adopted by the present invention is: A PCR fluorescence signal detection device based on a MEMS semiconductor chip comprises a top electrode, glass is fixedly mounted on the lower surface of the top electrode, a bottom electrode is fixedly mounted on the lower surface of the glass, lower glass is fixedly mounted around the lower surface of the bottom electrode, a membrane is fixedly mounted on the lower surface of the bottom electrode and located inside the lower glass, a cavity is provided below the membrane, and a light source is provided below the cavity.

[0005] Preferably, during operation, the top electrode and the bottom electrode are electrically connected to the positive and negative electrodes of the driving power supply, respectively.

[0006] Preferably, the driving power supply selects a corresponding band voltage to provide a suitable voltage.

[0007] Preferably, the position to be inspected is arranged above the top electrode.

[0008] Compared with the prior art, the present invention has the following beneficial effects: In the present invention, the filtering and imaging module manufactured based on MEMS technology uses the principle of micro-nanostructures to control optical parameters such as interference, diffraction and dispersion to achieve filtering effect. By changing the characteristics of the micro-nanostructures such as size, shape and material, the filtering performance can be customized. In this invention, MEMS filtering uses a voltage applied to a driving electrode to drive the membrane, causing it to deform. Adjusting the voltage adjusts the membrane deformation, thereby tunable spectral filtering. This method enables a single MEMS module to filter multiple wavelengths, such as FAM, VIC, ROX, and CY5 (not limited to four, but expandable to ten). In this invention, the light source is located below the MEMS. After passing through the MEMS module, if light with a wavelength in the FAM band is to be emitted, the voltage on the MEMS electrode is adjusted to allow the FAM band light to pass. If light with a wavelength in the VIC band is to be emitted, the voltage on the MEMS electrode is adjusted to allow the VIC band light to pass, and so on. This is equivalent to replacing the several excitation filters required for the original fluorescence channel with a single MEMS module. In the present invention, the MEMS module also has a light sensor detection function, which can replace the CMOS camera in the original fluorescence channel imaging part. One module replaces the original light filtering and receiving functions at the same time, and is small in size and low in price. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 This is a schematic diagram of the overall structure of a PCR fluorescence signal detection device based on a MEMS semiconductor chip according to the present invention; Figure 2 This is a schematic diagram of the optical bands of a PCR fluorescence signal detection device based on a MEMS semiconductor chip according to the present invention.

[0010] In the figure: 1. Top electrode; 2. Glass; 3. Bottom electrode; 4. Membrane; 5. Light source; 6. Cavity; 7. Lower glass; 8. Driving power supply. DETAILED DESCRIPTION

[0011] In order to make the technical means, creative features, objectives and effects achieved by the present invention easier to understand, the present invention is further described below in conjunction with specific implementation methods.

[0012] Example 1: like Figure 1-2 As shown, a PCR fluorescence signal detection device based on a MEMS semiconductor chip includes a top electrode 1, a glass 2 is fixedly mounted on the lower surface of the top electrode 1, a bottom electrode 3 is fixedly mounted on the lower surface of the glass 2, a lower glass 7 is fixedly mounted on the periphery of the lower surface of the bottom electrode 3, a membrane 4 is fixedly mounted on the lower surface of the bottom electrode 3 and located inside the lower glass 7, a cavity 6 is provided below the membrane 4, and a light source 5 is provided below the cavity 6; During operation, the top electrode 1 and the bottom electrode 3 are electrically connected to the positive and negative electrodes of the driving power supply 8 respectively; Specifically, the driving power supply 8 supplies power by connecting the top electrode 1 and the bottom electrode 3 through a wire, and the driving power supply 8 can select a corresponding band voltage according to demand.

[0013] The driving power supply 8 selects the corresponding band voltage according to the demand to provide the appropriate voltage; Specifically, the voltage applied to the driving power supply 8 is used to drive the membrane 4 to deform, and the voltage is adjusted to adjust the deformation amount of the membrane 4, thereby adjusting the spectral filtering function.

[0014] The position to be inspected is set above the top electrode 1; Specifically, after the object to be inspected is placed in the inspection position, light of filtered wavelengths enters the object to be inspected. After the object to be inspected absorbs the corresponding wavelength, energy transition occurs, and the MEMS detection mode starts working to detect the light intensity and position after the energy transition, thereby judging the performance of the object to be inspected.

[0015] It should be noted that the present invention is a PCR fluorescence signal detection device based on a MEMS semiconductor chip. When in use, the product to be inspected is placed above the top electrode 1, the light source 5 is turned on, and the driving power supply 8 is connected to a suitable voltage (the corresponding band voltage is selected according to demand). At this time, light of the filtered wavelength enters the product to be inspected. After the product to be inspected absorbs the corresponding wavelength, it undergoes energy transition, and the MEMS detection mode starts working to detect the light intensity and position after the energy transition, thereby judging the performance of the product to be inspected.

[0016] The basic principles, main features, and advantages of the present invention are shown and described above. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are merely illustrative of the principles of the present invention. Various changes and modifications may be made to the present invention without departing from the spirit and scope of the present invention. Such changes and modifications are intended to fall within the scope of the present invention. The scope of protection claimed in the present invention is defined by the appended claims and their equivalents.

Claims

1. A PCR fluorescence signal detection device based on a MEMS semiconductor chip, characterized by: The invention comprises a top electrode (1), a glass (2) is fixedly mounted on the lower surface of the top electrode (1), a bottom electrode (3) is fixedly mounted on the lower surface of the glass (2), a lower glass (7) is fixedly mounted on the peripheral position of the lower surface of the bottom electrode (3), a film (4) is fixedly mounted on the lower surface of the bottom electrode (3) and located inside the lower glass (7), a cavity (6) is provided below the film (4), and a light source (5) is provided below the cavity (6).

2. The PCR fluorescence signal detection device based on a MEMS semiconductor chip according to claim 1, characterized in that: During operation, the top electrode (1) and the bottom electrode (3) are electrically connected to the positive and negative electrodes of the driving power supply (8), respectively.

3. The PCR fluorescence signal detection device based on a MEMS semiconductor chip according to claim 2, characterized in that: The driving power supply (8) selects a corresponding band voltage according to demand to provide a suitable voltage.

4. The PCR fluorescence signal detection device based on a MEMS semiconductor chip according to claim 3, characterized in that: The position to be inspected is arranged above the top electrode (1).

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