Furnace body device for preparing isostatic pressing graphite crucible for third-generation semiconductor crystal growth

Abstract

The invention relates to the technical field of graphite crucibles, in particular to a furnace body device for preparing an isostatic pressing graphite crucible for third-generation semiconductor crystal growth, which comprises a heating furnace, a graphite crucible and a crucible cover, the side wall of the heating furnace is fixedly connected with a preparation table, a support frame is fixedly connected between the preparation table and the top end of the heating furnace, and the top end of the support frame is provided with a chute; a crucible base is fixedly connected into the heating furnace through four supports, a U-shaped sliding block is slidably connected into a sliding groove, an adjusting frame is arranged below the sliding block, a vertical groove is formed in the bottom end of the adjusting frame in a penetrating mode, and a pair of vertical rods is transversely and slidably connected to the inner side of the vertical groove. The graphite crucible can be automatically taken out of the heating furnace and placed on the preparation table, and then the graphite crucible to be heated on the preparation table can be transferred and placed into the heating furnace, so that automatic taking and placing of the graphite crucible on the furnace body are achieved, the phenomenon that workers are touched and scalded is avoided, and the convenience performance of the device is greatly improved.

Description

Technical Field

[0001] The invention relates to the technical field of graphite crucibles, in particular to a furnace body device prepared by using an isostatically pressed graphite crucible for growing third-generation semiconductor crystals. Background Art

[0002] The third generation of semiconductors is represented by semiconductor materials such as gallium nitride, silicon carbide, zinc oxide and diamond. Among them, silicon carbide has relatively mature technology and is widely used. It is a material with conductivity between that of a conductor and an insulator at room temperature. Silicon carbide is a type of single crystal silicon with a basically complete lattice structure. The isostatic pressing mold is a very important factor in the isostatic pressing effect of graphite powder. A good mold can bring good molding and long service life, thereby improving product quality and reducing production costs. The isostatically pressed graphite crucible has good thermal conductivity and high temperature resistance, and is widely used in the smelting of the above-mentioned single crystal silicon.

[0003] With the rapid development of the third-generation semiconductor industry, the demand for graphite crucible processing continues to increase, and the continuity and efficiency of production and processing are required to be higher and higher. In the frequent continuous processing process, manual picking and placing of graphite crucibles is not only inefficient, but also prone to errors, resulting in delays in processing progress and making it difficult to meet the growing production requirements.

[0004] On the other hand, the temperature of the graphite crucible is extremely high during the processing process. Its surface temperature and the surrounding environment temperature are both in a dangerous high temperature range. When workers manually release the material, they are very likely to suffer burns due to the high temperature, which poses a serious safety hazard. This not only threatens the physical and mental health of the workers, but also brings tremendous pressure to the company's production safety management and increases the risk cost of the company's operations.

[0005] Therefore, a furnace device prepared by isostatically pressed graphite crucible for third-generation semiconductor crystal growth is proposed to solve the above problems. Summary of the Invention

[0006] The purpose of the present invention is to solve the shortcomings of the background technology and propose a furnace device prepared by isostatically pressed graphite crucible for third-generation semiconductor crystal growth.

[0007] To achieve the above objectives, the technical solution adopted by the present invention is as follows: a furnace body device for preparing isostatically pressed graphite crucibles for third-generation semiconductor crystal growth, comprising a heating furnace, a graphite crucible and a crucible cover, wherein the side wall of the heating furnace is fixedly connected to a preparation table, a support frame is fixedly connected between the preparation table and the top of the heating furnace, a slide groove is provided on the top of the support frame, a crucible seat is fixedly connected to the furnace of the heating furnace through four brackets, a U-shaped slider is slidably connected in the slide groove, an adjustment frame is provided below the slider, a vertical groove is provided through the bottom end of the adjustment frame, a pair of vertical rods are laterally slidably connected to the inside of the vertical groove, grooves are provided on the sides of the bottom of the vertical rods, and right-angle blocks with inclined surfaces are slidably connected to the inside of the grooves, an upper spring is fixedly connected between the inner side of the groove and the side wall of the right-angle block, U-shaped blocks are provided on both sides of the outer wall of the graphite crucible, upper slots are provided on both sides of the outer wall of the crucible cover, a moving mechanism for driving the slider and the adjustment frame to move is provided on the support frame, and an extrusion plate is slidably connected to the inside of the vertical groove.

[0008] In the above technical solution, further, the moving mechanism includes a driving motor, the driving motor is fixedly connected to the side wall of the support frame, a threaded rod is rotatably connected to the inner side of the slide groove, and the threaded rod is threadedly connected to the inner wall of the slider, and a pair of upper electric telescopic cylinders are fixedly connected to the top of the slider, and the output ends of the upper electric telescopic cylinders are both fixedly connected to the top of the adjustment frame through the bottom end of the slider.

[0009] In the above technical solution, further, the two sides of the extrusion plate are tilted, the top of the vertical rod is tilted, the inclined surface of the top of the vertical rod is in contact with the inclined surface of the extrusion plate, the top of the adjustment frame is fixedly connected to the lower electric telescopic cylinder, and the output end of the lower electric telescopic cylinder is fixedly connected to the top of the extrusion plate.

[0010] In the above technical solution, further, two pairs of placement blocks are fixedly connected to the top of the preparation table, and upper circular holes are provided on the tops of the placement blocks. A cross is fixedly connected to the top of the preparation table relative to the position between the two pairs of placement blocks, and a circular groove adapted to the crucible cover is provided on the top of the cross. A pair of top plates are fixedly connected to the outer wall of the graphite crucible, and upper insertion rods are fixedly connected to the bottom ends of the top plates, and upper positioning grooves adapted to the upper insertion rods are provided on the top of the crucible seat.

[0011] In the above technical solution, further, the bottom end of the crucible cover is fixedly connected to a pair of lower insertion rods, the top of the graphite crucible is provided with a lower positioning groove relative to the position below the lower insertion rods, the top of the cross is provided with a pair of lower slots adapted to the lower insertion rods, and a second touch sensor is fixedly connected through the top of the cross.

[0012] In the above technical solution, further, a lower spring is fixedly connected between the inner side of the vertical groove and the side wall of the vertical rod, a guide groove is opened through the side wall of the vertical groove, and the side wall of the vertical rod is fixedly connected with a guide rod, and the guide rod is slidably connected to the inner side of the guide groove.

[0013] In the above technical solution, further, an upper touch sensor is fixedly connected to the top of the crucible seat relative to the position below one of the vertical rods, a touch rod is fixedly connected to the top of the preparation table, and a lower touch sensor is fixedly connected to the top of the touch rod, and the upper touch sensors are electrically connected to the lower electric telescopic cylinder through the controller, and the bottom end of the vertical slot is fixedly connected to the first touch sensor, and the first touch sensor is electrically connected to the moving mechanism and the lower electric telescopic cylinder through the controller.

[0014] In the above technical solution, further, three travel switches are fixedly connected to the top of the support frame, and the top of the slider is rotatably connected to a straight rod for touching the travel switch, and the side wall of the straight rod is tilted and fixedly connected to an inclined rod, and the top of the slider is fixedly connected to a stop block, and the side wall of the inclined rod is in contact with the side wall of the stop block. A hinge groove is provided at the top of the rotating end of the straight rod, and a spiral spring is provided in the hinge groove. One end of the spiral spring is fixedly connected to the inner side of the hinge groove, and the other end of the spiral spring is fixedly connected to the top of the slider, an upper position sensor is fixedly connected through the straight rod, and a lower position sensor is fixedly connected to the top of the support frame relative to the position directly above the heating furnace, and the upper position sensor and the travel switch are both electrically connected between the controller and the moving mechanism.

[0015] Compared with the prior art, the present invention has the following beneficial effects: 1. The present invention can automatically take out the graphite crucible from the heating furnace and place it on the preparation table through the arrangement of structures such as vertical rods, right-angle blocks and moving mechanisms. Then, the graphite crucible to be heated on the preparation table can be transferred into the heating furnace, thereby realizing automatic taking and placing of the graphite crucible on the furnace body, avoiding the phenomenon of workers being burned by touching, and greatly improving the convenience performance of the device.

[0016] 2. The present invention, through the arrangement of structures such as the extrusion plate and the lower electric telescopic cylinder, can automatically take out the crucible cover and place it on the cross after the graphite crucible is placed on the preparation table, thereby realizing automatic opening of the crucible cover and further improving the convenience of the device. In addition, through the arrangement of structures such as the upper touch sensor, the lower touch sensor and the travel switch, the device can be automatically controlled and operated, thereby eliminating the need for workers to operate the device, greatly improving the convenience of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram of the front three-dimensional structure of the furnace device of the present invention; Figure 2This is a schematic diagram of the front three-dimensional structure of the furnace device of the present invention when it is opened; Figure 3 The appended Figure 2 A schematic diagram of the partially enlarged structure at center A; Figure 4 The appended Figure 2 A schematic diagram of the partially enlarged structure at point B in the middle; Figure 5 This is a schematic diagram of the front three-dimensional structure of the heating furnace cover, graphite crucible and crucible cover separated from each other according to the present invention; Figure 6 The appended Figure 5 A schematic diagram of the partially enlarged structure at point C in the middle; Figure 7 This is a schematic diagram of a partial top view of the three-dimensional structure of the preparation table of the present invention; Figure 8 This is a schematic diagram of the overall appearance of the drive motor, slider, and adjustment frame of the present invention when they are opened; Figure 9 This is a schematic diagram of the overall appearance structure of the extruded plate and the vertical plate of the present invention; Figure 10 Schematic diagram of the control system of the present invention.

[0018] In the figure: 1. Heating furnace; 2. Graphite crucible; 3. Crucible cover; 4. Preparation table; 5. Support frame; 6. Crucible seat; 7. Slider; 8. Adjustment frame; 9. Vertical rod; 10. Right-angle block; 11. Upper spring; 12. U-shaped block; 13. Vertical slot; 14. Extrusion plate; 15. Drive motor; 16. Threaded rod; 17. Lower electric telescopic cylinder; 18. Placement block; 19. Cross; 20. Round slot; 21. Top plate; 22. Upper insertion rod; 23. Upper positioning slot; 24. Lower insertion rod. 25. Lower positioning slot; 26. Lower slot; 27. Lower spring; 28. Guide slot; 29. ​​Guide rod; 30. Upper touch sensor; 31. Lower touch sensor; 32. First touch sensor; 33. Second touch sensor; 34. Travel switch; 35. Straight rod; 36. Oblique rod; 37. Stop block; 38. Volute spring; 39. Upper position sensor; 40. Lower position sensor; 41. Upper round hole; 42. Touch rod; 43. Upper electric telescopic cylinder; 44. Upper slot. DETAILED DESCRIPTION

[0019] In order to more clearly understand the above-mentioned objects, features and advantages of the present invention, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0020] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0021] In actual use, it is found that in the frequent continuous processing process, manual removal and placement of the graphite crucible 2 is not only inefficient but also prone to errors, resulting in processing delays and difficulty in meeting the growing production requirements. To solve the above problems, the following structure is specially invented.

[0022] like Figures 1-10 The furnace body device shown in the figure is used to prepare the isostatically pressed graphite crucible for the third-generation semiconductor crystal growth, including a heating furnace 1, a graphite crucible 2 and a crucible cover 3. The side wall of the heating furnace 1 is fixedly connected to a preparation table 4, and a support frame 5 is fixedly connected between the preparation table 4 and the top of the heating furnace 1. It should be noted that the furnace cover of the heating furnace 1 is opened by an upward rotation, and the support frame 5 will not affect the normal opening of the furnace cover. A slide groove is provided on the top of the support frame 5. The furnace of the heating furnace 1 is fixedly connected to a crucible seat 6 through four brackets. A U-shaped slider 7 is slidably connected in the slide groove, and a slider 7 is provided below the slider 7. An adjusting frame 8 is provided with a vertical slot 13 running through the bottom end of the adjusting frame 8, a pair of vertical rods 9 are slidably connected to the inside of the vertical slot 13, a groove is provided on the side close to the bottom of the vertical rod 9, a right-angle block 10 with an inclined surface is slidably connected to the inside of the groove, an upper spring 11 is fixedly connected between the inner side of the groove and the side wall of the right-angle block 10, U-shaped blocks 12 are provided on both sides of the outer wall of the graphite crucible 2, upper slots 44 are provided on both sides of the outer wall of the crucible cover 3, a moving mechanism for driving the slider 7 and the adjusting frame 8 to move is provided on the support frame 5, and an extrusion plate 14 is slidably connected to the inside of the vertical slot 13; The moving mechanism includes a drive motor 15, which is fixedly connected to the side wall of the support frame 5. A threaded rod 16 is rotatably connected to the inner side of the slide groove, and the threaded rod 16 is threadedly connected to the inner side wall of the slider 7. The top of the slider 7 is fixedly connected to a pair of upper electric telescopic cylinders 43. The output ends of the upper electric telescopic cylinders 43 pass through the bottom end of the slider 7 and are fixedly connected to the top of the adjustment frame 8. The two sides of the extrusion plate 14 are tilted, the top of the vertical rod 9 is tilted, the inclined surface of the top of the vertical rod 9 is in contact with the inclined surface of the extrusion plate 14, the top of the adjustment frame 8 is fixedly connected to the lower electric telescopic cylinder 17, and the output end of the lower electric telescopic cylinder 17 is fixedly connected to the top of the extrusion plate 14; Two pairs of placement blocks 18 are fixedly connected to the top of the preparation table 4, and upper circular holes 41 are provided on the tops of the placement blocks 18. A cross 19 is fixedly connected to the top of the preparation table 4 relative to the position between the two pairs of placement blocks 18. A circular groove 20 adapted to the crucible cover 3 is provided on the top of the cross 19. A pair of top plates 21 are fixedly connected to the outer wall of the graphite crucible 2, and upper insertion rods 22 are fixedly connected to the bottom ends of the top plates 21. Upper positioning grooves 23 adapted to the upper insertion rods 22 are provided on the tops of the crucible seats 6. By setting the upper insertion rods 22, the upper positioning grooves 23 and the upper circular holes 41, the placement position of the graphite crucible 2 can be positioned, thereby ensuring that the right-angle block 10 is accurately inserted into the U-shaped block 12, thereby ensuring the normal operation of the device and improving the stability of the device during operation; The bottom end of the crucible cover 3 is fixedly connected to a pair of lower insertion rods 24, and the top of the graphite crucible 2 is provided with a lower positioning groove 25 below the lower insertion rod 24. The top of the cross 19 is provided with a pair of lower slots 26 adapted to the lower insertion rods 24. The arrangement of the lower insertion rods 24, the lower positioning grooves 25 and the lower slots 26 can play a positioning role in the placement of the crucible cover 3, ensuring that the right-angle block 10 can be accurately inserted into the upper slot 44, thereby improving the stability of the device during operation; A lower spring 27 is fixedly connected between the inner side of the vertical slot 13 and the side wall of the vertical rod 9. A guide groove 28 is formed through the side wall of the vertical slot 13. A guide rod 29 is fixedly connected to the side wall of the vertical rod 9, and the guide rod 29 is slidably connected to the inner side of the guide groove 28. The setting of the guide rod 29 and the guide groove 28 can guide the sliding of the vertical rod 9, ensuring that the vertical rod 9 will not move downward under the extrusion of the extrusion plate 14, thereby improving the stability of the device during operation; During the preparation of the graphite crucible 2, the graphite crucible 2 to be placed in the heating furnace 1 is first placed between the placement blocks 18 on the side away from the heating furnace 1, and the upper insertion rod 22 is inserted into the corresponding upper circular hole 41. Then the device can be controlled to start, and the controller controls the upper electric telescopic cylinder 43 to start and drive the adjustment frame 8 to move downward, so that the vertical rod 9 moves to both sides of the graphite crucible 2. In this process, when the right-angle block 10 moves above the graphite crucible 2, the outer wall of the graphite crucible 2 squeezes the inclined surface of the right-angle block 10. , and then as the vertical rod 9 gradually moves downward, the right-angle block 10 will be squeezed into the groove and the upper spring 11 will be compressed. Then, when the right-angle block 10 moves into the U-shaped block 12, the squeezing of the right-angle block 10 will be released, and then the right-angle block 10 will be pushed into the U-shaped block 12 under the elastic force of the upper spring 11. At this time, the upper electric telescopic cylinder 43 is fully extended, and the controller will control the upper electric telescopic cylinder 43 to retract. Then, because the right-angle block 10 is inserted into the U-shaped block 12, the graphite crucible 2 will be driven to rise together; After the upper electric telescopic cylinder 43 is fully retracted, the controller will control the driving motor 15 to start and drive the threaded rod 16 to rotate, thereby driving the threaded slider 7 to move, and at the same time driving the adjustment frame 8 and the graphite crucible 2 to move. Then the graphite crucible 2 moves to the top of the heating furnace 1, and the upper electric telescopic cylinder 43 can be controlled to start and put the graphite crucible 2 into the crucible seat 6, and then the lower electric telescopic cylinder 17 can be controlled to start and drive the extrusion plate 14 to move downward, and the inclined surface of the extrusion plate 14 is squeezed by the inclined surface of the vertical rod 9. Since the vertical rod 9 can only slide horizontally, Under the pressure of the extrusion plate 14, the vertical rod 9 is pushed to slide to both sides, thereby driving the right-angle block 10 to slide out of the U-shaped block 12 and compressing the lower spring 27. Then, the upper electric telescopic cylinder 43 can be controlled to retract, and the lower electric telescopic cylinder 17 can be controlled to drive the extrusion plate 14 to reset, and the furnace cover of the heating furnace 1 is closed. Then, the heating furnace 1 is controlled to start processing the material of the graphite crucible 2. During this process, the staff can put another set of materials into the new graphite crucible 2 and place the graphite crucible 2 between the placement blocks 18 away from the heating furnace 1. Then, when the semiconductor material processing is completed, the cover of the heating furnace 1 is controlled to open, and the upper electric telescopic cylinder 43 is controlled to start and repeat the above operation, and the graphite crucible 2 is hooked up by the right-angle block 10, and then the drive motor 15 is controlled to reverse, and the adjustment frame 8 is driven in reverse to move the graphite crucible 2 to another set of placement blocks 18, and then the lower electric telescopic cylinder 17 is controlled to start the same operation as above, and the right-angle block 10 is taken out of the U-shaped block 12. At this time, the upper electric telescopic cylinder 43 is controlled to move one end distance upward at a fixed distance, and the right-angle block 10 is moved to the side of the upper slot 44, and then the lower electric telescopic cylinder 17 can be controlled to start and retract, thereby releasing the squeeze on the vertical rod 9. , then, under the elastic force of the lower spring 27, the vertical rod 9 is pushed to reset, and the right-angle block 10 is inserted into the upper slot 44. Then, the upper electric telescopic cylinder 43 is controlled to start to hook up the crucible cover 3, and then the drive motor 15 is controlled to start to move the crucible cover 3 above the cross 19. Then, the upper electric telescopic cylinder 43 is controlled to start to move downward, and the crucible cover 3 is placed in the circular groove 20. The lower electric telescopic cylinder 17 can be controlled to start to drive the extrusion plate 14 to move downward, and then the vertical rod 9 is squeezed to both sides to pull the right-angle block 10 out of the upper slot 44. Finally, the above operation is repeated in reverse, and the prepared graphite crucible 2 is placed in the heating furnace 1 to complete the preparation process.

[0023] In summary, through the design of the above structure, the graphite crucible 2 can be automatically taken out of the heating furnace 1 and placed on the preparation table 4. Then, the graphite crucible 2 to be heated on the preparation table 4 can be transferred into the heating furnace 1, thereby realizing the automatic taking and placing of the graphite crucible 2 on the furnace body, avoiding the phenomenon of workers being burned by touching it, and after the graphite crucible 2 is placed on the preparation table 4, the crucible cover 3 can be automatically taken out and placed on the cross 19, thereby realizing the automatic opening of the crucible cover 3, further improving the convenience performance of the device.

[0024] On the basis of the above embodiment, it was found during use that although the graphite crucible 2 can be automatically taken and placed, the operation process is cumbersome and requires workers to manipulate to ensure that the right-angle block 10 is accurately inserted into the U-shaped block 12 and the upper slot 44. The whole process is relatively cumbersome. In order to solve the above problem, the above structure has been further improved.

[0025] A second touch sensor 33 is fixedly connected through the top of the cross 19, and the second touch sensor 33 is electrically connected to the lower electric telescopic cylinder 17 through the controller. An upper touch sensor 30 is fixedly connected through the top of the crucible seat 6 relative to the position below one of the vertical rods 9. It should be noted here that the upper touch sensor 30 adopts a double-sided contact capacitive pressure sensor. When the pressure-bearing diaphragm of the sensor is very close to the base, the diaphragm contacts the base after being compressed. When the pressure changes, the capacitance is changed by changing the size of the contact area. When designing the control algorithm, a capacitance change threshold for two presses is set. When the first press reaches a certain value, the sensor records but does not send a signal. When the second press is pressed, the capacitance changes further. When it exceeds the preset second press threshold, the sensor transmits a signal to the controller to ensure that the graphite crucible 2 is taken out. When the button is pressed, the two conductive layers maintain a certain distance between them and are in a disconnected state. No current flows through the circuit. When the button is pressed by an external force, the two conductive layers contact each other under pressure, forming an electrical circuit, and current flows through the circuit. For a micro switch, pressing the button overcomes the elastic force of the spring, connecting the two conductive contacts. This current change or level change (from high level to low level or vice versa) is detected by the controller, thereby judging that the button has been pressed. The controller processes the signal and performs the corresponding operation. The upper touch sensors 30 are electrically connected to the lower electric telescopic cylinder 17 through the controller. The bottom end of the vertical slot 13 is fixedly connected to the first touch sensor 32. The first touch sensor 32 is electrically connected to the moving mechanism and the lower electric telescopic cylinder 17 through the controller. Three travel switches 34 are fixedly connected to the top of the support frame 5. It should be noted that the travel switch 34 adopts strong resistance to prevent the straight rod 35 without limit from pushing the travel switch 34, and the travel switches 34 are respectively arranged above the cross 19 and the two pairs of placement blocks 18. The top of the slider 7 is rotatably connected to a straight rod 35 for touching the travel switch 34. The side wall of the straight rod 35 is tilted and fixedly connected to an inclined rod 36. The top of the slider 7 is fixedly connected to a stop block 37. The side wall of the inclined rod 36 contacts the side wall of the stop block 37. A hinge groove is provided at the top of the rotating end of the straight rod 35, and a spiral spring 38 is provided in the hinge groove. One end of the spiral spring 38 is fixedly connected to the inner side of the hinge groove, and the other end of the spiral spring 38 is fixedly connected to the top of the slider 7. The upper position is fixedly connected through the straight rod 35. Sensor 39, the top of the support frame 5 is fixedly connected to a lower position sensor 40 relative to the position directly above the heating furnace 1. The upper position sensor 39 and the limit switch 34 are electrically connected between the controller and the moving mechanism. The upper position sensor 39 and the lower position sensor 40 mainly use photoelectric position sensors to detect the position by using the obstruction or reflection of light. The signal docking method is usually to directly connect the high and low level signals output by the photoelectric sensor to the digital input terminal of the controller. In the furnace body device, the photoelectric position sensor can be used to detect the position of the graphite crucible 2 on the preparation table 4. When the graphite crucible 2 moves to a specific position, the photoelectric sensor detects the change of the light signal and outputs a high or low level signal to the controller, thereby realizing the precise positioning and automatic operation of the crucible; During the operation of the equipment, when the vertical rod 9 takes out the graphite crucible 2 on the preparation table 4 and transfers it to the heating furnace 1, the straight rod 35 on the slider 7 will pass by the limit switch 34. Since there is no restriction on the other side of the straight rod 35, the thrust of the end touching the limit switch 34 will push the straight rod 35 to rotate around the hinge, and at the same time drive the inclined rod 36 to rotate. Moreover, since one end of the volute spring 38 is fixed to the inner side of the hinge groove and the other end is fixed to the top of the slider 7, the volute spring 38 will be gradually compressed when the straight rod 35 rotates, and then When the straight rod 35 moves away from the limit switch 34, the pressure on the straight rod 35 is released, and the straight rod 35 and the inclined rod 36 are reset under the elastic force of the spiral spring 38, thereby not triggering the limit switch 34, and the drive motor 15 is controlled to stop running. Subsequently, when the graphite crucible 2 is moved to the top of the heating furnace 1, the upper position sensor 39 moves to the side of the lower position sensor 40, and the photoelectric sensor detects the change in the light signal and outputs a high or low level signal to the controller. The controller controls the drive motor 15 to stop running, thereby realizing automatic start and stop of the device. After the equipment stops, the controller will continue to control the upper electric telescopic cylinder 43 of the moving mechanism to start, thereby automatically placing the graphite crucible 2 into the crucible seat 6. Then, when the graphite crucible 2 is completely placed, the vertical rod 9 will touch the upper touch sensor 30, and then transmit a signal to the controller. The controller controls the upper electric telescopic cylinder 43 to stop running, and controls the lower electric telescopic cylinder 17 to move downward. Then, the extrusion plate 14 touches the first touch sensor 32, and then transmits a signal to the controller. The controller controls the upper electric telescopic cylinder 43 to retract, and then controls the lower electric telescopic cylinder 17 to start fixed-distance movement (it should be noted that the movement distance of the lower electric telescopic cylinder 17 can be set each time, so that the vertical rod 9 is squeezed into three positions, namely the minimum spacing, the middle spacing and the maximum spacing, and the vertical rod 9 is respectively located at the upper position outside the crucible cover 3, the upper position outside the graphite crucible 2 and the upper position outside the crucible seat 6. At this time, the fixed-distance movement of the lower electric telescopic cylinder 17 will move the vertical rod 9 to the middle position of the three positions); Finally, in the process of taking out the graphite crucible 2, since the upper touch sensor 30 sets the capacitance change threshold of double pressing, in the process of taking out the graphite crucible 2, the vertical rod 9 touches the upper touch sensor 30 and no signal is transmitted, and it is set by the program here that when the upper electric telescopic cylinder 43 is fully extended, it will automatically reset, thereby automatically taking out the graphite crucible 2, and after the upper electric telescopic cylinder 43 is reset, the controller will control the drive motor 15 to reverse and move the graphite crucible 2 onto the placement block 18. In this process, when the graphite crucible 2 is moved above the placement block 18, since the other side of the straight rod 35 is against the abutment 37 through the inclined rod 36, the rotation of the straight rod 35 is restricted, so that the straight rod 35 will touch the corresponding travel switch 34, and then transmit the signal to the controller, the controller controls the drive motor 15 to stop running, and then controls the upper electric telescopic cylinder 43 to move downward, automatically placing the graphite crucible 2 on the placement block 18; After being put in, the vertical rod 9 will touch the lower touch sensor 31 on the touch rod 42, and then transmit the signal to the controller. The controller controls the lower electric telescopic cylinder 17 to move downward to release the clamping of the graphite crucible 2, and then controls the upper electric telescopic cylinder 43 to move upward a fixed distance, and then controls the lower electric telescopic cylinder 17 to start resetting, inserting the right-angle block 10 directly into the upper slot 44, and then controls the upper electric telescopic cylinder 43 to rise. The controller can control the drive motor 15 to continue moving, and move the crucible cover 3 to the cross 19, and touch the corresponding travel switch 34 through the straight rod 35 to control the equipment to start and stop accurately and automatically. Then the controller controls the upper electric telescopic cylinder 43 to place the crucible cover 3 on the cross 19, and the vertical rod 9 will touch the second touch sensor 33, and then the controller controls the lower electric telescopic cylinder 17 to move downward, squeezing the vertical rod 9 to the middle position of the three positions, and then the controller controls the reset to complete the automatic operation of the device.

[0026] In summary, through the design of the above structure, the automatic control operation of the device can be achieved, thereby eliminating the need for workers to operate it, greatly improving the convenience of the device.

[0027] The basic principles, main features and advantages of the present invention are shown and described above.

[0028] Those skilled in the art should understand that the present invention is not limited to the above-mentioned embodiments. The above-mentioned embodiments and the specification only describe the principles of the present invention. Various changes and improvements may be made to the present invention without departing from the spirit and scope of the present invention. These changes and improvements all fall within the scope of the present invention to be protected.

Claims

1. A furnace body device prepared by isostatically pressing graphite crucible for growing third-generation semiconductor crystals, comprising a heating furnace (1), a graphite crucible (2) and a crucible cover (3), characterized in that: The side wall of the heating furnace (1) is fixedly connected with a preparation table (4), a support frame (5) is fixedly connected between the preparation table (4) and the top of the heating furnace (1), a slide groove is provided at the top of the support frame (5), a crucible seat (6) is fixedly connected to the furnace of the heating furnace (1) through four brackets, a U-shaped slider (7) is slidably connected in the slide groove, an adjustment frame (8) is provided below the slider (7), a vertical groove (13) is provided through the bottom end of the adjustment frame (8), a pair of vertical rods (9) are slidably connected to the inner side of the vertical groove (13), and the crucible seat (6) is fixedly connected to the furnace of the heating furnace (1) through four brackets, a U-shaped slider (7) is slidably connected in the slide groove, and an adjustment frame (8) is provided below the slider (7). A groove is provided on one side of the bottom of each vertical rod (9), and a right-angle block (10) with an inclined surface is slidably connected to the inner side of each groove. An upper spring (11) is fixedly connected between the inner side of the groove and the side wall of the right-angle block (10). U-shaped blocks (12) are provided on both sides of the outer wall of the graphite crucible (2), and upper slots (44) are provided on both sides of the outer wall of the crucible cover (3). A moving mechanism for driving the slider (7) and the adjustment frame (8) to move is provided on the support frame (5), and an extrusion plate (14) is slidably connected to the inner side of the vertical groove (13).

2. The furnace device prepared by isostatically pressed graphite crucible for third-generation semiconductor crystal growth according to claim 1, characterized in that: The moving mechanism includes a driving motor (15), the driving motor (15) is fixedly connected to the side wall of the support frame (5), the inner side of the slide groove is rotatably connected to a threaded rod (16), and the threaded rod (16) is threadedly connected to the inner side wall of the slider (7), and the top of the slider (7) is fixedly connected to a pair of upper electric telescopic cylinders (43), and the output ends of the upper electric telescopic cylinders (43) are both fixedly connected to the top of the adjustment frame (8) through the bottom end of the slider (7).

3. The furnace device prepared by isostatically pressed graphite crucible for third-generation semiconductor crystal growth according to claim 1, characterized in that: The two sides of the extrusion plate (14) are inclined, the top of the vertical rod (9) is inclined, the inclined surface of the top of the vertical rod (9) fits the inclined surface of the extrusion plate (14), the top of the adjustment frame (8) is fixedly connected to a lower electric telescopic cylinder (17), and the output end of the lower electric telescopic cylinder (17) is fixedly connected to the top of the extrusion plate (14).

4. The furnace device prepared by isostatically pressing graphite crucible for growing third-generation semiconductor crystals according to claim 1, characterized in that: The top of the preparation table (4) is fixedly connected to two pairs of placement blocks (18), and the tops of the placement blocks (18) are each provided with an upper circular hole (41). The top of the preparation table (4) is fixedly connected to a cross (19) at a position relative to the two pairs of placement blocks (18), and the top of the cross (19) is provided with a circular groove (20) adapted to the crucible cover (3). The outer wall of the graphite crucible (2) is fixedly connected to a pair of top plates (21), and the bottom ends of the top plates (21) are each fixedly connected to an upper insertion rod (22). The top of the crucible seat (6) is provided with an upper positioning groove (23) adapted to the upper insertion rod (22).

5. The furnace device prepared by isostatically pressing graphite crucible for growing third-generation semiconductor crystals according to claim 4, characterized in that: The bottom end of the crucible cover (3) is fixedly connected to a pair of lower insertion rods (24), the top end of the graphite crucible (2) is provided with a lower positioning groove (25) relative to the lower position of the lower insertion rod (24), the top end of the cross (19) is provided with a pair of lower slots (26) adapted to the lower insertion rods (24), and the top end of the cross (19) is fixedly connected to a second touch sensor (33).

6. The furnace device prepared by isostatically pressing graphite crucible for growing third-generation semiconductor crystals according to claim 1, characterized in that: A lower spring (27) is fixedly connected between the inner side of the vertical slot (13) and the side wall of the vertical rod (9). A guide slot (28) is provided through the side wall of the vertical slot (13). A guide rod (29) is fixedly connected to the side wall of the vertical rod (9), and the guide rod (29) is slidably connected to the inner side of the guide slot (28).

7. The furnace device prepared by isostatically pressing graphite crucible for growing third-generation semiconductor crystals according to claim 1, characterized in that: An upper touch sensor (30) is fixedly connected to the top of the crucible seat (6) relative to a position below one of the vertical rods (9), a touch rod (42) is fixedly connected to the top of the preparation table (4), and a lower touch sensor (31) is fixedly connected to the top of the touch rod (42), and the upper touch sensors (30) are electrically connected to the lower electric telescopic cylinder (17) through the controller, and a first touch sensor (32) is fixedly connected to the bottom of the vertical slot (13), and the first touch sensor (32) is electrically connected to the moving mechanism and the lower electric telescopic cylinder (17) through the controller.

8. The furnace device made of isostatically pressed graphite crucible for third-generation semiconductor crystal growth according to claim 1, characterized in that: The top of the support frame (5) is fixedly connected to three travel switches (34), the top of the slider (7) is rotatably connected to a straight rod (35) for touching the travel switch (34), the side wall of the straight rod (35) is tilted and fixedly connected to an inclined rod (36), the top of the slider (7) is fixedly connected to a stop block (37), the side wall of the inclined rod (36) contacts the side wall of the stop block (37), a hinge groove is provided at the top of the rotating end of the straight rod (35), a spiral spring (38) is provided in the hinge groove, one end of the spiral spring (38) is fixedly connected to the inner side of the hinge groove, and the other end of the spiral spring (38) is fixedly connected to the top of the slider (7), an upper position sensor (39) is fixedly connected through the straight rod (35), and a lower position sensor (40) is fixedly connected to the top of the support frame (5) relative to the position directly above the heating furnace (1), and the upper position sensor (39) and the travel switch (34) are both electrically connected between the controller and the moving mechanism.

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