Method for measuring interval of optical elements in non-contact mode

Abstract

The invention discloses a non-contact method for measuring the interval of optical elements, and particularly relates to the technical field of optical element measurement. Comprising the steps of S01, non-contact measurement, S02, acquisition of an original optical element interval, S03, structural stability data acquisition of the optical element, S04, thermal stability data processing of the optical element, S05, vibration resistance data processing of the optical element, S06, stability evaluation of a non-contact measurement structure, and S07, original interval correction of the optical element. The optical element thermal stability data and the optical element anti-vibration performance data in each time period are collected, the thermal stability evaluation index and the anti-vibration performance evaluation index are calculated, and the original optical element interval is corrected through the structural stability monitoring coefficient, so that the influence of the measurement environment disturbance on the optical element interval precision is compensated, and the accuracy of the optical element interval is improved. The measurement efficiency and quality are improved, and measurement errors caused by measurement environment interference are reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of optical element measurement, and more particularly to a method for non-contact measurement of optical element intervals. Background Art

[0002] In the construction and application of modern optical systems, accurate measurement and stable operation of optical components are crucial. As the core component of the optical system, the performance of optical components is directly related to key indicators such as the imaging quality and signal transmission accuracy of the entire system. At high temperatures, optical materials may experience thermal expansion and changes in refractive index, while at low temperatures, they may become brittle, affecting the stability of light transmission. Furthermore, if optical components are subjected to long-term stress, mechanical vibration, and impact, they are prone to displacement, deformation, and even cracking, reducing the stability of the optical structure.

[0003] However, it still has some shortcomings in actual use. For example, traditional optical component measurement methods are mostly manual measurement, which can easily cause scratches on the surface of optical components. In addition, the measurement accuracy is greatly affected by human factors and measurement tools, resulting in large differences in measurement results. Existing measurement technologies lack real-time monitoring of the structural stability of optical components when analyzing light propagation. The structural stability of optical components is closely related to light propagation. However, traditional measurement methods only focus on the numerical measurement of component spacing, ignoring the impact of changes in component structure during the actual measurement process on light propagation, resulting in large fluctuations in the measurement results of optical component spacing. Summary of the Invention

[0004] In order to overcome the above-mentioned defects of the prior art, an embodiment of the present invention provides a method for non-contact measurement of the interval between optical elements, which is used to solve the problems raised in the above-mentioned background technology.

[0005] To achieve the above object, the present invention provides the following technical solution: a method for non-contact measurement of the spacing between optical elements, comprising the following steps: Step S01: non-contact measurement: the laser wavelength and interference fringe phase of the optical element to be measured are obtained by non-contact measurement technology, and the data are transmitted to step S02.

[0006] Step S02: obtaining the original optical element spacing: calculating the original optical element spacing of the optical element to be measured.

[0007] Step S03: optical element structural stability data collection: used to collect structural stability data of the optical element to be measured in the measurement environment every t time periods. The step S03: optical element structural stability data collection includes an optical element thermal stability data collection sub-step and an optical element vibration resistance performance data collection sub-step.

[0008] Step S04: Optical element thermal stability data processing: Based on the optical element thermal stability data collected in the optical element thermal stability data collection sub-step, the thermal stability evaluation index of the optical element to be measured in the measurement environment in each time period is calculated.

[0009] Step S05: Optical element vibration resistance performance data processing: Based on the optical element vibration resistance performance data collected in the optical element vibration resistance performance data collection sub-step, the vibration resistance performance evaluation index of the optical element to be measured in the measurement environment in each time period is calculated.

[0010] Step S06: non-contact measurement structural stability evaluation: the structural stability monitoring coefficient of the optical element to be measured in the measurement environment in each time period is calculated by using the thermal stability evaluation index and the vibration resistance evaluation index of the optical element to be measured in the measurement environment in each time period.

[0011] Step S07: Correcting the original optical element spacing: Based on the structural stability monitoring coefficient of the optical element to be measured in the measurement environment in each time period, correct the original optical element spacing data of the optical element to be measured to obtain the optical element spacing measurement correction value of the optical element to be measured.

[0012] Preferably, the step S01: non-contact measurement is specifically as follows: Step S11: The laser emits a laser beam, which is expanded by a beam expander and split by a beam splitter to form a measuring light and a reference light. The measuring light is directed toward the optical element to be measured, and the reference light is directed toward a fixed reflector. The two beams of light are reflected and interfere with each other at the detector. Step S12: The interference fringe image is collected by a detector. The detector converts the interference light signal into an electrical signal to obtain the original data of the optical element to be measured. The original data includes the laser wavelength and the phase change of the interference fringe, which are marked as cb and cw respectively.

[0013] Preferably, the calculation formula for the original optical element spacing is:

[0014] in, is the original optical element spacing, cb is the laser wavelength, cw is the phase change of the interference fringes, and C is the calibration constant. Expressed as pi.

[0015] Preferably, the step S03: collecting optical element structural stability data is specifically as follows: Optical element thermal stability data collection sub-step: collect the ambient temperature, ambient humidity, maximum wall thickness and minimum wall thickness of the optical element in the measurement environment at every t time period, and mark them as 、 、 、 , where i=1,2,...n, i represents the number of the i-th sub-period; Optical component vibration resistance performance data collection sub-step: collect the vibration amplitude, vibration frequency, and optical component displacement of the optical component to be tested in the measurement environment every t time period, and mark them as 、 、 .

[0016] Preferably, the step S04: processing the optical element thermal stability data is specifically as follows: Step S41: Extracting the thermal expansion coefficient of the optical element material to be measured , coefficient of wet expansion ; Step S42: The calculation formula of the thermal stability evaluation index is:

[0017] in, Expressed as the thermal stability evaluation index of the i-th sub-period, Expressed as the ambient temperature of the ith sub-period, It is represented as the ambient temperature of the i-1th sub-period, Expressed as the ambient humidity of the ith sub-period, It is represented as the ambient humidity of the i-1th sub-period, Expressed as the maximum wall thickness of the optical element, Expressed as the minimum wall thickness of the optical element, 、 They represent the thermal expansion coefficient and moisture expansion coefficient of the optical component material to be tested respectively.

[0018] Preferably, the step S05: processing the optical element anti-vibration performance data is specifically as follows: Step S51: Arrange q laser displacement sensors on the optical element to be measured, measure the displacement by the change of the laser point imaging position, and output the optical element displacement vector of each laser displacement sensor. ; Step S52: Calculate the vibration deviation similarity:

[0019] Among them, SD represents the vibration deviation similarity, q represents the number of laser displacement sensors, Represented as a preset optical element displacement vector; Step S53: The calculation formula of the vibration resistance performance evaluation index is:

[0020] in, Expressed as the vibration resistance performance evaluation index of the i-th sub-period, Expressed as the vibration amplitude of the ith sub-period, Expressed as the vibration frequency of the ith sub-period, Expressed as the mean vibration amplitude, It is expressed as the mean value of the vibration frequency, and e is expressed as a natural constant; in , , n represents the number of sub-periods.

[0021] Preferably, the calculation formula of the structural stability monitoring coefficient is:

[0022] in, Expressed as the structural stability monitoring coefficient of the i-th sub-period, Expressed as the thermal stability evaluation index of the i-th sub-period, Expressed as the vibration resistance performance evaluation index of the i-th sub-period, Expressed as the thermal stability evaluation index of the i-1th sub-period, Expressed as the vibration resistance performance evaluation index of the i-1th sub-period, 、 are respectively expressed as the weight coefficients of thermal stability evaluation index and vibration resistance evaluation index, and + =1.

[0023] Preferably, the calculation formula of the optical element spacing measurement correction value is:

[0024] in, Expressed as the optical element spacing measurement correction value of the i-th sub-period, is represented as the original optical element spacing, Expressed as the structural stability monitoring coefficient of the i-th sub-period, It is expressed as the preset structural stability monitoring coefficient, and e is expressed as a natural constant; Specifically, when the structural stability monitoring coefficient of a certain time period is greater than the preset structural stability monitoring coefficient, it indicates that the interference of the optical element to be measured in the measurement environment during the time period is large, resulting in large differences in the measurement results of the original optical element intervals. The original optical element interval data of the optical element to be measured should be corrected. When the structural stability monitoring coefficient of a certain time period is less than or equal to the preset structural stability monitoring coefficient, it indicates that the more stable the original optical element interval measurement results of the optical element to be measured in the measurement environment during the time period, the original optical element interval measurement value of the time period should be maintained.

[0025] Technical effects and advantages of the present invention: 1. The present invention provides a method for non-contact measurement of the spacing between optical elements. The method comprises collecting the ambient temperature, ambient humidity, maximum wall thickness, and minimum wall thickness of the optical element to be measured in the measurement environment at intervals of t time periods, and calculating a thermal stability evaluation index of the optical element to be measured in the measurement environment at each time period. The method further collects the vibration amplitude, vibration frequency, and displacement of the optical element to be measured in the measurement environment at each time period, and calculates a vibration resistance evaluation index of the optical element to be measured in the measurement environment at each time period. The method further analyzes and obtains a structural stability monitoring coefficient of the optical element to be measured in the measurement environment at each time period. The method evaluates the thermal stability and vibration resistance of the optical element at different times, and thus comprehensively evaluates the stability change trend of the optical element in the actual measurement environment. The method further calculates the thermal stability evaluation index, the vibration resistance evaluation index, and the structural stability monitoring coefficient, and quantifies the structural stability of the optical element in the measurement environment, which facilitates comparison and analysis, and provides a basis for reducing the deviation of the measurement results of the spacing between optical elements. 2. The present invention provides a method for non-contact measurement of the spacing between optical elements. The method obtains the laser wavelength and interference fringe phase of the optical element to be measured through non-contact measurement technology, calculates the original optical element spacing of the optical element to be measured, and corrects the original optical element spacing data of the optical element to be measured based on the structural stability monitoring coefficient of the optical element to be measured in the measurement environment in each time period. When the structural stability monitoring coefficient of a certain time period is greater than a preset structural stability monitoring coefficient, it indicates that the interference of the optical element to be measured in the measurement environment in the time period is large, resulting in a large difference in the measurement results of the original optical element spacing, and the original optical element spacing data of the optical element to be measured should be corrected. When the structural stability monitoring coefficient of a certain time period is less than or equal to the preset structural stability monitoring coefficient, it indicates that the original optical element spacing measurement result of the optical element to be measured in the measurement environment in the time period is more stable, and the original optical element spacing measurement value of the time period is maintained. By introducing the structural stability monitoring coefficient, the correction formula can compensate for the influence of the measurement environment disturbance on the accuracy of the optical element spacing, significantly improve the measurement accuracy, and is conducive to improving measurement efficiency and quality, and reducing measurement errors and the number of repeated measurements caused by measurement environment interference. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 The figure is a flow chart of a method for non-contact measurement of optical element spacing according to the present invention.

[0027] Figure 2 This is a structural diagram of step S03 of the present invention: collecting data on the structural stability of an optical element. DETAILED DESCRIPTION

[0028] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0029] See also Figure 1 As shown, the present invention provides a method for non-contact measurement of optical element spacing, comprising the following steps: The step S01: non-contact measurement: obtaining the laser wavelength and interference fringe phase of the optical element to be measured by non-contact measurement technology, and transmitting the data to step S02.

[0030] In a possible design, the step S01: non-contact measurement is specifically as follows: Step S11: The laser emits a laser beam, which is expanded by a beam expander and split by a beam splitter to form a measuring light and a reference light. The measuring light is directed toward the optical element to be measured, and the reference light is directed toward a fixed reflector. The two beams of light are reflected and interfere with each other at the detector. Step S12: The interference fringe image is collected by a detector. The detector converts the interference light signal into an electrical signal to obtain the original data of the optical element to be measured. The original data includes the laser wavelength and the phase change of the interference fringe, which are marked as cb and cw respectively.

[0031] The step S02: obtaining the original optical element spacing: is used to receive the data transmitted in the non-contact measurement step and calculate the original optical element spacing of the optical element to be measured.

[0032] In one possible design, the calculation formula for the original optical element spacing is:

[0033] in, is the original optical element spacing, cb is the laser wavelength, cw is the phase change of the interference fringes, and C is the calibration constant. Expressed as pi.

[0034] See also Figure 2 As shown, the step S03: optical element structural stability data acquisition: is used to acquire the structural stability data of the optical element to be measured in the measurement environment every t time periods, and the step S03: optical element structural stability data acquisition includes an optical element thermal stability data acquisition sub-step and an optical element anti-vibration performance data acquisition sub-step, and the structural stability data includes optical element thermal stability data and optical element anti-vibration performance data.

[0035] In a possible design, the step S03: collecting optical element structural stability data is specifically as follows: Optical element thermal stability data collection sub-step: collect the ambient temperature, ambient humidity, maximum wall thickness and minimum wall thickness of the optical element in the measurement environment at every t time period, and mark them as 、 、 、 , where i=1,2,...n, i represents the number of the i-th sub-period; Optical component vibration resistance performance data collection sub-step: collect the vibration amplitude, vibration frequency, and optical component displacement of the optical component to be tested in the measurement environment every t time period, and mark them as 、 、 .

[0036] The step S04: optical element thermal stability data processing is used to receive the structural stability data transmitted by the optical element structural stability data acquisition step, and calculate the thermal stability evaluation index of the optical element to be measured in the measurement environment in each time period based on the optical element thermal stability data acquired in the optical element thermal stability data acquisition sub-step.

[0037] In a possible design, the step S04: processing the optical element thermal stability data is specifically as follows: Step S41: Extracting the thermal expansion coefficient of the optical element material to be measured , coefficient of wet expansion ; Step S42: The calculation formula of the thermal stability evaluation index is:

[0038] in, Expressed as the thermal stability evaluation index of the i-th sub-period, Expressed as the ambient temperature of the ith sub-period, It is represented as the ambient temperature of the i-1th sub-period, Expressed as the ambient humidity of the ith sub-period, It is represented as the ambient humidity of the i-1th sub-period, Expressed as the maximum wall thickness of the optical element, Expressed as the minimum wall thickness of the optical element, 、 They represent the thermal expansion coefficient and moisture expansion coefficient of the optical element material to be measured respectively; Specifically, The effect of temperature fluctuations on light propagation in the measurement environment is quantified through temperature changes and thermal expansion coefficients. The greater the temperature fluctuation during a certain period, the worse the thermal stability of the optical element in the measurement environment, resulting in a larger deviation in the measured optical element spacing during that period. The smaller the temperature fluctuation during a certain period, the better the thermal stability of the optical element in the measurement environment, resulting in a smaller deviation in the measured optical element spacing during that period. The effect of humidity fluctuations on light propagation in the measurement environment was quantified through humidity changes and the coefficient of expansion. The greater the humidity fluctuation during a certain period of time, the worse the thermal stability of the optical components in the measurement environment, resulting in a larger deviation in the measured intervals of the optical components during that period. The smaller the humidity fluctuation during a certain period of time, the better the thermal stability of the optical components in the measurement environment, resulting in a smaller deviation in the measured intervals of the optical components during that period. The stress concentration effect under thermal gradient was quantified by the difference in wall thickness of optical components. The greater the difference in wall thickness of optical components in a certain period, the more significant the stress concentration under thermal gradient, resulting in a larger deviation in the measurement of the optical component spacing during that period. The smaller the difference in wall thickness of optical components in a certain period, the less significant the stress concentration under thermal gradient, resulting in a smaller deviation in the measurement of the optical component spacing during that period.

[0039] The present invention provides another specific embodiment, which is as follows: Step S41: The thermal expansion coefficient of the material of the optical element to be tested is , the coefficient of moisture expansion is ; Step S42: The ambient temperature of the optical element to be measured in the measurement environment collected during a certain period of time , ambient humidity , maximum wall thickness of optical element , minimum wall thickness of optical element , the ambient temperature at the last moment ; Step S43: Calculate the thermal stability evaluation index:

[0040] The step S05: processing the vibration resistance data of the optical element is used to receive the structural stability data transmitted by the optical element structural stability data acquisition step, and calculate the vibration resistance evaluation index of the optical element to be measured in the measurement environment in each time period based on the vibration resistance data of the optical element acquired in the optical element vibration resistance data acquisition sub-step.

[0041] In one possible design, the step S05: processing the optical element anti-vibration performance data is specifically as follows: Step S51: Arrange q laser displacement sensors on the optical element to be measured, measure the displacement by the change of the laser point imaging position, and output the optical element displacement vector of each laser displacement sensor. ; Step S52: Calculate the vibration deviation similarity:

[0042] Where SD represents the vibration deviation similarity, q represents the number of laser displacement sensors, Represented as a preset optical element displacement vector; Specifically, when the optical element displacement of the optical element to be measured in the measurement environment is closer to the preset displacement, the SD value is closer to zero, indicating that the vibration resistance of the optical element to be measured is good; when the optical element displacement of the optical element to be measured in the measurement environment deviates further from the preset displacement, the SD value is much greater than zero, indicating that the vibration resistance of the optical element to be measured is insufficient; Step S53: The calculation formula of the vibration resistance performance evaluation index is:

[0043] in, Expressed as the vibration resistance performance evaluation index of the i-th sub-period, Expressed as the vibration amplitude of the ith sub-period, Expressed as the vibration frequency of the ith sub-period, Expressed as the mean vibration amplitude, It is expressed as the mean value of the vibration frequency, and e is expressed as a natural constant; in , , n represents the number of sub-periods.

[0044] The step S06: non-contact measurement structural stability evaluation: calculating the structural stability monitoring coefficient of the optical element to be measured in the measurement environment in each time period through the thermal stability evaluation index and the vibration resistance evaluation index of the optical element to be measured in the measurement environment in each time period.

[0045] In a possible design, the calculation formula of the structural stability monitoring coefficient is:

[0046] in, Expressed as the structural stability monitoring coefficient of the i-th sub-period, Expressed as the thermal stability evaluation index of the i-th sub-period, Expressed as the vibration resistance performance evaluation index of the i-th sub-period, Expressed as the thermal stability evaluation index of the i-1th sub-period, Expressed as the vibration resistance performance evaluation index of the i-1th sub-period, 、 are respectively expressed as the weight coefficients of thermal stability evaluation index and vibration resistance evaluation index, and + =1.

[0047] The step S07: correcting the original optical element interval: based on the structural stability monitoring coefficient of the optical element to be measured in the measurement environment in each time period, correcting the original optical element interval data of the optical element to be measured to obtain the optical element interval measurement correction value of the optical element to be measured.

[0048] In one possible design, the calculation formula for the optical element spacing measurement correction value is:

[0049] in, Expressed as the optical element spacing measurement correction value of the i-th sub-period, is represented as the original optical element spacing, Expressed as the structural stability monitoring coefficient of the i-th sub-period, It is expressed as the preset structural stability monitoring coefficient, and e is expressed as a natural constant; Specifically, when the structural stability monitoring coefficient of a certain time period is greater than the preset structural stability monitoring coefficient, it indicates that the interference of the optical element to be measured in the measurement environment during the time period is large, resulting in large differences in the measurement results of the original optical element intervals. The original optical element interval data of the optical element to be measured should be corrected. When the structural stability monitoring coefficient of a certain time period is less than or equal to the preset structural stability monitoring coefficient, it indicates that the more stable the original optical element interval measurement results of the optical element to be measured in the measurement environment during the time period, the original optical element interval measurement value of the time period should be maintained.

[0050] In this embodiment, it should be specifically explained that the present invention collects the ambient temperature, ambient humidity, maximum wall thickness and minimum wall thickness of the optical element to be measured in the measurement environment every t time periods, and calculates the thermal stability evaluation index of the optical element to be measured in the measurement environment in each time period. The vibration amplitude, vibration frequency and displacement of the optical element to be measured in the measurement environment are collected every t time periods, and the vibration resistance evaluation index of the optical element to be measured in the measurement environment in each time period is calculated. The structural stability monitoring coefficient of the optical element to be measured in the measurement environment in each time period is further analyzed. By evaluating the thermal stability and vibration resistance of the optical element at different times, the stability change trend of the optical element in the actual measurement environment is comprehensively evaluated. By calculating the thermal stability evaluation index, the vibration resistance evaluation index and the structural stability monitoring coefficient, the structural stability of the optical element in the measurement environment is quantified, which is convenient for comparison and analysis, and provides a basis for reducing the deviation of the measurement results of the optical element interval.

[0051] The present invention obtains the laser wavelength and interference fringe phase of the optical element to be measured through non-contact measurement technology, calculates the original optical element spacing of the optical element to be measured, and corrects the original optical element spacing data of the optical element to be measured based on the structural stability monitoring coefficient of the optical element to be measured in the measurement environment in each time period. When the structural stability monitoring coefficient of a certain time period is greater than a preset structural stability monitoring coefficient, it indicates that the interference of the optical element to be measured in the measurement environment in the time period is large, resulting in a large difference in the measurement results of the original optical element spacing, and the original optical element spacing data of the optical element to be measured should be corrected. When the structural stability monitoring coefficient of a certain time period is less than or equal to the preset structural stability monitoring coefficient, it indicates that the original optical element spacing measurement result of the optical element to be measured in the measurement environment in the time period is more stable, and the original optical element spacing measurement value of the time period is maintained. By introducing the structural stability monitoring coefficient, the correction formula can compensate for the influence of the measurement environment disturbance on the accuracy of the optical element spacing, significantly improve the measurement accuracy, and is conducive to improving measurement efficiency and quality, and reducing measurement errors and the number of repeated measurements caused by measurement environment interference.

[0052] Finally: The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A method for non-contact measurement of optical element spacing, characterized in that: The following steps are involved: Step S01: non-contact measurement: obtaining the laser wavelength and interference fringe phase of the optical element to be measured by non-contact measurement technology, and transmitting the data to step S02; Step S02: obtaining the original optical element spacing: calculating the original optical element spacing of the optical element to be measured; Step S03: optical element structural stability data collection: used to collect structural stability data of the optical element to be measured in the measurement environment every t time periods, said step S03: optical element structural stability data collection includes optical element thermal stability data collection sub-step and optical element anti-vibration performance data collection sub-step; Step S04: Optical element thermal stability data processing: Calculating the thermal stability evaluation index of the optical element to be measured in the measurement environment in each time period based on the optical element thermal stability data collected in the optical element thermal stability data collection sub-step; Step S05: Optical element vibration resistance performance data processing: Based on the optical element vibration resistance performance data collected in the optical element vibration resistance performance data collection sub-step, the vibration resistance performance evaluation index of the optical element to be measured in the measurement environment in each time period is calculated; Step S06: non-contact measurement structural stability evaluation: calculating the structural stability monitoring coefficient of the optical element to be measured in the measurement environment at each time period by using the thermal stability evaluation index and the vibration resistance evaluation index of the optical element to be measured in the measurement environment at each time period; Step S07: Correcting the original optical element spacing: Based on the structural stability monitoring coefficient of the optical element to be measured in the measurement environment in each time period, correct the original optical element spacing data of the optical element to be measured to obtain the optical element spacing measurement correction value of the optical element to be measured.

2. The method for non-contact measurement of optical element spacing according to claim 1, wherein: The step S01: non-contact measurement is specifically as follows: Step S11: The laser emits a laser beam, which is expanded by a beam expander and split by a beam splitter to form a measuring light and a reference light. The measuring light is directed toward the optical element to be measured, and the reference light is directed toward a fixed reflector. The two beams of light are reflected and interfere with each other at the detector. Step S12: The interference fringe image is collected by a detector. The detector converts the interference light signal into an electrical signal to obtain the original data of the optical element to be measured. The original data includes the laser wavelength and the phase change of the interference fringe, which are marked as cb and cw respectively.

3. The method for non-contact measurement of optical element spacing according to claim 1, wherein: The calculation formula of the original optical element spacing is: in, is the original optical element spacing, cb is the laser wavelength, cw is the phase change of the interference fringes, and C is the calibration constant. Expressed as pi.

4. The method for non-contact measurement of optical element spacing according to claim 1, wherein: The step S03: collecting optical element structural stability data is specifically as follows: Optical element thermal stability data collection sub-step: collect the ambient temperature, ambient humidity, maximum wall thickness and minimum wall thickness of the optical element in the measurement environment at every t time period, and mark them as 、 、 、 , where i=1,2,...n, i represents the number of the i-th sub-period; Optical component vibration resistance performance data collection sub-step: collect the vibration amplitude, vibration frequency, and optical component displacement of the optical component to be tested in the measurement environment every t time period, and mark them as 、 、 .

5. The method for non-contact measurement of optical element spacing according to claim 1, wherein: The step S04: processing the optical element thermal stability data is specifically as follows: Step S41: Extracting the thermal expansion coefficient of the optical element material to be measured , coefficient of wet expansion ; Step S42: The calculation formula of the thermal stability evaluation index is: in, Expressed as the thermal stability evaluation index of the i-th sub-period, Expressed as the ambient temperature of the ith sub-period, It is represented as the ambient temperature of the i-1th sub-period, Expressed as the ambient humidity of the ith sub-period, It is represented as the ambient humidity of the i-1th sub-period, Expressed as the maximum wall thickness of the optical element, Expressed as the minimum wall thickness of the optical element, 、 They represent the thermal expansion coefficient and moisture expansion coefficient of the optical component material to be tested respectively.

6. The method for non-contact measurement of optical element spacing according to claim 1, wherein: The step S05: processing the optical element anti-vibration performance data is specifically as follows: Step S51: Arrange q laser displacement sensors on the optical element to be measured, measure the displacement by the change of the laser point imaging position, and output the optical element displacement vector of each laser displacement sensor. ; Step S52: Calculate the vibration deviation similarity: Among them, SD represents the vibration deviation similarity, q represents the number of laser displacement sensors, Represented as a preset optical element displacement vector; Step S53: The calculation formula of the vibration resistance performance evaluation index is: in, Expressed as the vibration resistance performance evaluation index of the i-th sub-period, Expressed as the vibration amplitude of the ith sub-period, Expressed as the vibration frequency of the ith sub-period, Expressed as the mean vibration amplitude, It is expressed as the mean value of the vibration frequency, and e is expressed as a natural constant; in , , n represents the number of sub-periods.

7. The method for non-contact measurement of optical element spacing according to claim 1, characterized in that: The calculation formula of the structural stability monitoring coefficient is: in, Expressed as the structural stability monitoring coefficient of the i-th sub-period, Expressed as the thermal stability evaluation index of the i-th sub-period, Expressed as the vibration resistance performance evaluation index of the i-th sub-period, Expressed as the thermal stability evaluation index of the i-1th sub-period, Expressed as the vibration resistance performance evaluation index of the i-1th sub-period, 、 are respectively expressed as the weight coefficients of thermal stability evaluation index and vibration resistance evaluation index, and + =1.

8. The method for non-contact measurement of optical element spacing according to claim 1, wherein: The calculation formula of the optical element spacing measurement correction value is: in, Expressed as the optical element spacing measurement correction value of the i-th sub-period, is represented as the original optical element spacing, Expressed as the structural stability monitoring coefficient of the i-th sub-period, It is expressed as the preset structural stability monitoring coefficient, and e is expressed as a natural constant; Specifically, when the structural stability monitoring coefficient of a certain time period is greater than the preset structural stability monitoring coefficient, it indicates that the interference of the optical element to be measured in the measurement environment during the time period is large, resulting in large differences in the measurement results of the original optical element intervals. The original optical element interval data of the optical element to be measured should be corrected. When the structural stability monitoring coefficient of a certain time period is less than or equal to the preset structural stability monitoring coefficient, it indicates that the more stable the original optical element interval measurement results of the optical element to be measured in the measurement environment during the time period, the original optical element interval measurement value of the time period should be maintained.

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