Raw material sorting device for electronic material preparation
Through the innovation of the dynamic deformation of the filter and the mechanical transmission structure, the impurity separation efficiency and equipment reliability in the polysilicon pickling process are improved, the problems of synchronization and low efficiency in the existing technology are solved, and efficient impurity separation and waste liquid recycling are achieved.
Patent Information
- Application Number
- CN202511095449.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-08-06
- Publication Date
- 2025-09-12
- Estimated Expiration
- Not applicable · inactive patent
AI Technical Summary
In the existing polysilicon pickling process, filtration, waste liquid recovery and raw material collection cannot be carried out simultaneously, resulting in low efficiency, high cost and insufficient process continuity.
The dynamic deformation of the filter and the mechanical transmission structure are adopted to integrate the pickling and impurity removal process into a closed-loop self-regulating system. The impact force of the water flow and the gear ring transmission are used to automatically tighten the filter to ensure the efficiency of impurity separation. The filter crystals are automatically cleaned by the liquid pump to achieve integrated pickling, filtration and collection.
The efficiency of polysilicon pickling and equipment reliability are improved, the impurity separation efficiency is ensured, filter damage is avoided, and efficient impurity separation and waste liquid recycling are achieved.
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Figure CN120618940A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of raw material impurity removal, and in particular to a raw material sorting device for preparing electronic materials. Background Art
[0002] Polycrystalline silicon, the primary raw material for electronic chips, is characterized by its ultrapure nature. Acid pickling (commonly using mixed acids such as HF-HNO₃) is a key step in the refining process. It dissolves metallic impurities (such as Fe, Al, Ca, Ti, Cr, Ni, and Cu) and their silicides, as well as some non-metallic inclusions (such as SiC and Si₃N₄). Acid pickling is primarily used in the refining and purification of metallic raw materials (especially bulk, granular, and powdered metals) and certain compound raw materials (such as oxides and carbonates). Its purpose is to remove surface oxide layers, included / adsorbed impurities, and machining residues.
[0003] After searching, the existing publication number CN220779597U discloses a polysilicon pickling waste gas emission treatment device, including a pickling tank and a spray tower, the pickling tank is provided with a pickling device inside, the pickling device includes a pickling unit and a feed and discharge unit, the spray tower is provided with a spray purification device inside, the spray purification device includes a conveying unit and a purification unit. The polysilicon pickling waste gas emission treatment device puts the polysilicon into the pickling roller in the pickling unit through the feed and discharge unit, and seals the pickling tank and the pickling roller to prevent the harmful gases generated during the pickling process from overflowing and endangering people's health. The alkaline solution is transported to the spray head inside the purification unit through the conveying unit for spraying, thereby purifying the pickling waste gas. The SDG adsorbent inside the exhaust pipe further adsorbs and purifies the residual harmful gases in the waste gas, thereby improving the purification effect. The existing mainstream polysilicon pickling method is generally static immersion or stirred tank pickling. The filtration, waste liquid recovery and raw material collection in this method need to be distributed operations, and it is impossible to achieve simultaneous pickling, filtration and waste liquid recovery. There are defects such as delayed waste liquid recovery, low pickling efficiency and insufficient process continuity. Summary of the Invention
[0004] The purpose of the present invention is to provide a raw material sorting device for electronic material preparation. This application utilizes innovations in the dynamic deformation of the filter and the mechanical transmission structure to integrate the chemical process and physical process of pickling and impurity removal into a closed-loop self-regulating system, solving the key problems of efficiency, cost and equipment reliability in polysilicon pickling.
[0005] To achieve the above-mentioned object, the present invention provides the following technical solution: a device for sorting raw materials for electronic material preparation, comprising: A raw material concentration mechanism, comprising an annular housing, a mixed raw material concentration hopper, a waste liquid circulation pipe, a gear ring, and a discharge channel, wherein the mixed raw material concentration hopper, the waste liquid circulation pipe, the gear ring, and the discharge channel are all fixedly connected to the annular housing, and the waste liquid circulation pipe is connected to the preheating device; A drive mechanism, comprising a drive assembly and a rotating housing, the drive assembly comprising a drive motor, a first transmission gear, and a magnetic adjustment portion, the drive motor and the magnetic adjustment portion being fixedly connected to the rotating housing, the first transmission gear being connected to the drive motor, the magnetic adjustment portion being magnetically connected to the first transmission gear, and the gear ring being transmission-connected to the first transmission gear; The rotating housing includes a rotating ring and a bidirectional scraper, wherein the bidirectional scraper is fixedly connected between the two rotating rings, and the outer sides of the rotating ring and the bidirectional scraper are in sliding contact with the inner wall of the annular housing; A material collecting mechanism, comprising a pressurized transmission assembly and a flexible filter element, wherein the pressurized transmission assembly comprises a mesh tube, a second transmission gear, and a third transmission gear. The ends of the three mesh tubes are fixedly connected to the third transmission gear, and one end of the mesh tube is fixedly connected to the second transmission gear. The mesh tube is connected between the two rotating rings, and the first transmission gear is in transmission connection with the second transmission gear. The flexible filter element includes a mesh belt and a tooth groove. The edge of the mesh belt is provided with a tooth groove. The third transmission gear is transmission-connected to the tooth groove. The inner side of the bidirectional scraper is in sliding contact with the surface of the mesh belt.
[0006] As a further solution of the present invention, the pressurized transmission assembly also includes a liquid pump, a drainage pipe and a branch pipe. The liquid pump is fixedly connected to the drainage pipe, the end of the mesh tube is movably connected to one end of the branch pipe, and the other end of the branch pipe is movably connected to the drainage pipe.
[0007] The beneficial effects of the present invention are: the design of the mesh belt actively concave when the water flow impacts can not only buffer the impact force and avoid damage to the filter screen, but the temporary storage space formed by the concave structure can also increase the single filtration volume compared to the flat filter screen. When the mesh belt is concave, the transmission between the gear ring and the third transmission gear can automatically tighten the filter screens on both sides to prevent filtration failure caused by relaxation, ensure the impurity separation efficiency, and have the characteristics of integrated pickling, filtration and collection and high impurity separation efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0008] Figure 1 It is a three-dimensional diagram of the raw material concentration mechanism according to an embodiment of the present invention.
[0009] Figure 2 It is a three-dimensional diagram of the waste liquid collection mechanism according to an embodiment of the present invention.
[0010] Figure 3It is a three-dimensional diagram of the material collecting mechanism according to an embodiment of the present invention.
[0011] Figure 4 It is a perspective view of the present invention.
[0012] Figure 5 For the present invention Figure 5 A partial enlarged view of point a in the middle.
[0013] Figure 6 It is a cross-sectional view of the present invention.
[0014] Figure 7 It is a first planar cross-sectional view of the present invention.
[0015] Figure 8 It is a second planar cross-sectional view of the present invention.
[0016] Reference numerals: 1-mixed raw material concentration bucket, 2-raw material concentration mechanism, 21-annular housing, 22-waste liquid circulation pipe, 23-base, 24-first bracket, 25-opening, 26-gear ring, 27-discharge channel; 3-driving mechanism, 31-driving assembly, 311-driving motor, 312-driving pin, 313-first transmission gear, 314-electromagnet, 315-return spring, 32-rotating housing, 321-rotating ring, 322-bidirectional scraper, 323-deflector, 324-center hole, 325-liquid outlet, 326-third bracket; 4-Material collecting mechanism, 41-Pressure transmission assembly, 411-Mesh tube, 412-Second transmission gear, 413-Third transmission gear, 414-Liquid pump, 415-Drain pipe, 416-Branch pipe, 42-Flexible filter element, 421-Mesh belt, 422-Tooth groove. DETAILED DESCRIPTION
[0017] In order to make the purpose, technical solutions and advantages of the present invention clearer, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.
[0018] The specific implementation of the present invention is described in detail below with reference to specific embodiments.
[0019] See also Figures 1 to 8 In one embodiment of the present invention, a device for sorting raw materials for preparing electronic materials includes: The raw material concentration mechanism 2 includes an annular housing 21, a mixed raw material concentration hopper 1, a waste liquid circulation pipe 22, a gear ring 26, and a discharge channel 27. The mixed raw material concentration hopper 1, the waste liquid circulation pipe 22, the gear ring 26, and the discharge channel 27 are all fixedly connected to the annular housing 21. The waste liquid circulation pipe 22 is connected to the preheating device. The side wall of the mixed raw material concentration hopper 1 is provided with an acid washing liquid inlet pipe and a gas discharge pipe. The drive mechanism 3 includes a drive assembly 31 and a rotating housing 32. The drive assembly 31 includes a drive motor 311, a first transmission gear 313, a return spring 315, and an electromagnet 314. The drive motor 311 and the electromagnet 314 are both fixedly connected to the rotating housing 32. The first transmission gear 313 is connected to the drive motor 311. The electromagnet 314 can be in magnetic contact with the first transmission gear 313. The gear ring 26 is in transmission connection with the first transmission gear 313. The return spring 315 is connected between the first transmission gear 313 and the electromagnet 314. The rotating shell 32 includes a rotating ring 321 and a bidirectional scraper 322. The bidirectional scraper 322 is fixedly connected between the two rotating rings 321. The outer sides of the rotating ring 321 and the bidirectional scraper 322 are in sliding contact with the inner wall of the annular shell 21. The material collecting mechanism 4 includes a pressurized transmission assembly 41 and a flexible filter element 42. The pressurized transmission assembly 41 includes a mesh tube 411, a second transmission gear 412, and a third transmission gear 413. The ends of the three mesh tubes 411 are fixedly connected to the third transmission gear 413, and the end of one mesh tube 411 is fixedly connected to the second transmission gear 412. The mesh tube 411 is connected between the two rotating rings 321, and the first transmission gear 313 is in transmission connection with the second transmission gear 412. The flexible filter element 42 includes a mesh belt 421 and a tooth groove 422 . The mesh belt 421 has a tooth groove 422 at its edge. The third transmission gear 413 is in transmission connection with the tooth groove 422 . The inner side of the bidirectional scraper 322 is in sliding contact with the surface of the mesh belt 421 .
[0020] See also Figure 3 and 6 Furthermore, the three mesh tubes 411 are symmetrical about the center of the annular shell 21 , and the total length of the distance between the centers of the three mesh tubes 411 is less than the length of the mesh belt 421 .
[0021] See also Figure 1 and Figure 4Furthermore, the raw material concentration mechanism 2 also includes a base 23, a first bracket 24 and an opening 25. The annular shell 21 and the gear ring 26 are fixedly connected to the first bracket 24. The first bracket 24 is fixedly connected to the base 23. An opening 25 is provided above the waste liquid circulation pipe 22.
[0022] See also Figures 3 to 6 Furthermore, the rotating shell 32 also includes a guide plate 323, a center hole 324, a liquid drop port 325 and a third bracket 326. Three guide plates 323 are fixedly connected between the two rotating rings 321. The liquid drop port 325 is between two adjacent guide plates 323. A center hole 324 is provided on the surface of the two rotating rings 321. The waste liquid circulation pipe 22 is located in the center hole 324. The opening 25 is aligned with the liquid drop port 325 above. The third bracket 326 is fixedly connected to the rotating ring 321. The drive motor 311 and the electromagnet 314 are both fixedly connected to the third bracket 326. The inner wall of the waste liquid circulation pipe 22 is an inclined surface or its cross-section is a conical structure, which is used to ensure that the liquid can flow in the direction away from the opening 25.
[0023] In an embodiment of the present invention, the angle between the center line of the mixed raw material concentration bucket 1 and the center line of the discharge channel 27 is 120 degrees or 150 degrees. When the raw materials in the discharge channel 27 need to be discharged quickly, the driving motor 311 is used to increase the rotation speed of the rotating shell 32. As the rotation speed of the rotating shell 32 increases, the wastewater cannot be filtered in time before reaching the discharge channel 27. Therefore, the mesh belt 421 and the two-way scraper 322 rotating around the annular shell 21 can discharge part of the wastewater into the discharge channel 2, so that the impact force of the water can be used to quickly discharge the raw materials from the discharge channel 27 to prevent blockage problems.
[0024] See also Figures 3 to 8 In one embodiment of the present invention, the pressurized transmission assembly 41 also includes a liquid pump 414, a drainage pipe 415 and a branch pipe 416. The liquid pump 414 is fixedly connected to the drainage pipe 415, the end of the mesh tube 411 is movably connected to one end of the branch pipe 416, and the other end of the branch pipe 416 is movably connected to the drainage pipe 415.
[0025] In an embodiment of the present invention, the liquid pump 414 is connected to the pickling solution storage tank. As time goes by, some crystals (copper sulfate, rust) precipitated in the waste liquid will adhere to the surface of the mesh belt 421, thereby reducing the filtration efficiency of the mesh belt 421 for the waste liquid. In order to solve this problem, the present application controls the electromagnet 314 to be powered off. Since the electromagnet 314 loses its magnetic attraction to the first transmission gear 313 after the power is turned off, the elastic force of the return spring 315 drives the first transmission gear 313 to move to a position where it is connected to the second transmission gear 412. The drive motor 311 controls the mesh tube 411 and the third transmission gear 412 through the first transmission gear 313 and the second transmission gear 412. The transmission gear 413 rotates, and the rotating third transmission gear 413 drives the mesh belt 421 to move through the tooth groove 422. The inner side of the two-way scraper 322 slides in contact with the surface of the mesh belt 421 to automatically clean the salt crystals on the surface of the mesh belt 421. The liquid pump 414 discharges the pickling solution into the mesh pipe 411 through the discharge pipe 415 and the branch pipe 416, and then the mesh pipe 411 evenly sprays it onto the surface of the mesh belt 421. The pickling solution can further dissolve the salt crystals. Finally, the pickling solution is discharged into the discharge channel 27 by sliding contact between the outer side of the two-way scraper 322 and the annular shell 21, thereby obtaining higher purity polysilicon raw materials.
[0026] See also Figure 5 In one embodiment of the present invention, the driving assembly 31 further includes a driving pin 312, the driving motor 311 is connected to the driving pin 312, the driving pin 312 and the first transmission gear 313 are slidably fitted through a keyway and a key bar, and the end of the driving pin 312 facing away from the driving motor 311 serves to axially limit the first transmission gear 313.
[0027] The electromagnet 314 is connected to a control power supply, which is used to control the power on and off of the electromagnet 314. The location of the control power supply is not marked. When energized, the electromagnet 314 is magnetically attracted to the first transmission gear 313 (the first transmission gear 313 is made of metal or has a magnetic core embedded in its surface). At this time, the first transmission gear 313 is in transmission connection with the gear ring 26. When the drive motor 311 controls the rotation of the first transmission gear 313 via the drive pin 312, the rotating first transmission gear 313 is in transmission connection with the gear ring 26, thereby achieving the purpose of rotating the drive mechanism 3 and the material collection mechanism 4 about the axis of the annular housing 21. When the electromagnet 314 is de-energized, the magnetic attraction force on the first transmission gear 313 is lost. Therefore, the elastic force of the return spring 315 drives the first transmission gear 313 to move to the end of the drive pin 312. At this time, the first transmission gear 313 is in transmission connection with the second transmission gear 412. The drive motor 311 controls the rotation of the mesh tube 411 and the third transmission gear 413 via the first transmission gear 313 and the second transmission gear 412.
[0028] Working principle: pickling liquid and raw material particles enter the annular shell 21 through the mixed raw material concentration bucket 1, and the raw material particles are sprayed and rinsed by pickling. The electromagnet 314 is controlled to be energized. The electromagnet 314 after being energized is magnetically attracted to the first transmission gear 313. At this time, the first transmission gear 313 is connected to the gear ring 26. When the driving motor 311 drives the first transmission gear 313 to rotate through the driving pin 312 and the key bar 3114, the rotating first transmission gear 313 is connected to the gear ring 26 to achieve the purpose of rotating the driving mechanism 3 and the material collecting mechanism 4 around the axis of the annular shell 21. When the mesh belt 421 passes under the mixed raw material concentration bucket 1, the mixed The impact force generated by the water flow falling from the raw material collection bucket 1 drives the mesh belt 421 to bend downward. The displacement caused by the downward bending of the mesh belt 421 straightens the mesh belts 421 on both sides through the gear ring 26 and the third transmission gear 413. The downward bending of the mesh belt 421 can not only weaken the impact force of the water flow, but also can accommodate more polysilicon raw material at a time. As the rotating shell 32 rotates, the wastewater passing through the mesh belt 42 flows along the guide plate 323, the liquid outlet 325 and the opening 25 into the waste liquid circulation pipe 22. The wastewater in the waste liquid circulation pipe 22 enters the preheating device for recycling, while the polysilicon raw material in the wastewater is filtered on the surface of the mesh belt 421. When the mesh belt 421 carrying the polysilicon raw material moves toward the discharge channel 27, as the impact force of the water flow hits the mesh belt 421 on the other side, the mesh belt 421 is stretched straight by the impact force and can use inertia to throw off the polysilicon raw material. The outer side of the two-way scraper 322 can push the thrown polysilicon raw material into the discharge channel 27 by sliding contact with the annular shell 21. Compared with the manual cleaning method, it has the characteristics of high work efficiency.
[0029] To sum up, the design of the mesh belt actively concave when the water flow impacts can not only buffer the impact force and avoid damage to the filter screen, but the temporary storage space formed by the concave structure can also increase the single filtration volume compared to the flat filter screen. When the mesh belt is concave, the transmission of the gear ring 26 and the third transmission gear 413 can automatically tighten the filter screens on both sides to prevent filtration failure caused by relaxation, ensure the impurity separation efficiency, and have the characteristics of integrated pickling, filtration and collection, and high impurity separation efficiency.
[0030] For those skilled in the art, although several embodiments and examples of the present invention have been described, these embodiments and examples are provided as examples and are not intended to limit the scope of the invention. These new embodiments can be implemented in various other ways, and various omissions, substitutions, and changes can be made without departing from the scope of the invention.
[0031] In addition, it should be understood that although this specification is described in terms of implementation methods, not every implementation method contains only one independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other implementation methods that can be understood by those skilled in the art.
Claims
1. A device for sorting raw materials for preparing electronic materials, characterized in that: include: A raw material concentration mechanism (2), the raw material concentration mechanism (2) comprising an annular shell (21), a mixed raw material concentration bucket (1), a waste liquid circulation pipe (22), a gear ring (26) and a discharge channel (27), the mixed raw material concentration bucket (1), the waste liquid circulation pipe (22), the gear ring (26) and the discharge channel (27) are all fixedly connected to the annular shell (21), and the waste liquid circulation pipe (22) is communicated with a preheating device; A drive mechanism (3), the drive mechanism (3) comprising a drive assembly (31) and a rotating housing (32), the drive assembly (31) comprising a drive motor (311), a first transmission gear (313) and an electromagnet (314), the drive motor (311) and the electromagnet (314) both being fixedly connected to the rotating housing (32), the first transmission gear (313) being connected to the drive motor (311), the electromagnet (314) being magnetically connected to the first transmission gear (313), and the gear ring (26) being transmission-connected to the first transmission gear (313); The rotating shell (32) comprises a rotating ring (321) and a bidirectional scraper (322), wherein the bidirectional scraper (322) is fixedly connected between the two rotating rings (321), and the outer sides of the rotating ring (321) and the bidirectional scraper (322) are in sliding contact with the inner wall of the annular shell (21); A material collecting mechanism (4), the material collecting mechanism (4) comprising a pressurizing transmission assembly (41) and a flexible filter element (42), the pressurizing transmission assembly (41) comprising a mesh tube (411), a second transmission gear (412) and a third transmission gear (413), the ends of the three mesh tubes (411) being fixedly connected to the third transmission gear (413), the end of one mesh tube (411) being fixedly connected to the second transmission gear (412), the mesh tube (411) being connected between the two rotating rings (321), and the first transmission gear (313) being transmission-connected to the second transmission gear (412); The flexible filter element (42) comprises a mesh belt (421) and a tooth groove (422); the edge of the mesh belt (421) is provided with a tooth groove (422); the third transmission gear (413) is in transmission connection with the tooth groove (422); and the inner side of the bidirectional scraper (322) is in sliding contact with the surface of the mesh belt (421).
2. The electronic material preparation raw material sorting device according to claim 1, characterized in that: The pressurizing transmission assembly (41) further comprises a liquid pump (414), a liquid discharge pipe (415) and a branch pipe (416); the liquid pump (414) is fixedly connected to the liquid discharge pipe (415); the end of the mesh tube (411) is movably connected to one end of the branch pipe (416); and the other end of the branch pipe (416) is movably connected to the liquid discharge pipe (415).
3. The electronic material preparation raw material sorting device according to claim 1, characterized in that: The three mesh tubes (411) are symmetrical about the center of the annular shell (21), and the total length of the distance between the centers of the three mesh tubes (411) is less than the length of the mesh belt (421).
4. The electronic material preparation raw material sorting device according to claim 2, characterized in that: The driving assembly (31) further comprises a driving pin shaft (312), the driving motor (311) is connected to the driving pin shaft (312), and the first transmission gear (313) is movably sleeved on the surface of the driving pin shaft (312).
5. The electronic material preparation raw material sorting device according to claim 4, characterized in that: The driving assembly (31) further includes a return spring (315), the electromagnet (314) is capable of magnetically contacting the first transmission gear (313), and the return spring (315) is connected between the first transmission gear (313) and the electromagnet (314).
6. The electronic material preparation raw material sorting device according to claim 5, characterized in that: The raw material concentration mechanism (2) further comprises a base (23), a first bracket (24) and an opening (25); the annular shell (21) and the gear ring (26) are both fixedly connected to the first bracket (24); the first bracket (24) is fixedly connected to the base (23); and an opening (25) is provided above the waste liquid circulation pipe (22).
7. The electronic material preparation raw material sorting device according to claim 6, characterized in that: The rotating shell (32) further comprises a guide plate (323), a center hole (324), a liquid drop outlet (325) and a third bracket (326). Three guide plates (323) are fixedly connected between the two rotating rings (321). A liquid drop outlet (325) is provided between two adjacent guide plates (323). The surfaces of the two rotating rings (321) are provided with a center hole (324). The waste liquid circulation pipe (22) is located in the center hole (324). The opening (25) is aligned with the liquid drop outlet (325) above. The third bracket (326) is fixedly connected to the rotating ring (321). The driving motor (311) and the electromagnet (314) are both fixedly connected to the third bracket (326).
8. The electronic material preparation raw material sorting device according to claim 1, characterized in that: The angle between the center line of the mixed raw material concentration bucket (1) and the center line of the discharge channel (27) is 120 degrees.
Citation Information
Patent Citations
Polycrystalline silicon pickling waste gas emission treatment device
CN220779597U