Hydrostatic guideway and method of machining

Abstract

The application discloses a kind of static pressure guide rail and processing method thereof, static pressure guide rail base both sides are equipped with gap arrangement first support part and second support part, first support part supports vertical slider, second support part supports horizontal slider, vertical slider supports slide plate, the center slider of the bottom of slide plate is equipped with gap for accommodating horizontal slider between the two sides of slide plate, horizontal slider and base are relatively fixed, and vertical slider, slide plate and center slider are relatively fixed.Processing method includes: selecting datum plane, measuring the flatness error topography of datum plane, using controlled time grinding technology according to the flatness error topography of datum plane is processed;Measure the flatness error topography of other machining surface, and measure the parallelism error of other machining surface relative to datum plane, the parallelism error is superimposed with flatness error to obtain the error topography with parallelism error, using controlled time grinding technology according to the error topography of other machining surface is processed.The application is easy to process and improves machining precision.

Description

Technical Field

[0001] The present invention relates to ultra-precision machining technology, and in particular to a hydrostatic guide rail and a machining method thereof. Background Art

[0002] Hydrostatic guideways are core components of ultra-precision machine tools. According to the theory of oil film homogenization for hydrostatic guideways, achieving high-precision linear accuracy requires that the flatness, parallelism, and perpendicularity of the core components meet both oil film accuracy and assembly requirements. Currently, the main high-precision manufacturing methods for hydrostatic guideways include ultra-precision grinding and manual lapping. Ultra-precision grinding requires that the ultra-precision grinder has high motion accuracy. In order to ensure the processing accuracy of the workpiece, the processing accuracy of the machine tool is generally required to be one order of magnitude higher than the accuracy index of the workpiece. Therefore, the use of grinding processing methods to process high-precision guide rails will undoubtedly increase the manufacturing cost of the guide rails, and as the stroke of ultra-precision guide rails continues to increase, the processing difficulty and processing cost will further increase; compared with ultra-precision grinding, manual grinding has lower requirements for processing equipment and relatively low costs. However, manual grinding requires operators to have rich experience, skilled operating techniques and accurate judgment ability. Therefore, this processing method has more human uncertainties, the processing accuracy is difficult to accurately guarantee, the production cycle is long, and as the size of the processing object increases, the production cycle will increase exponentially. Therefore, manual grinding is not only time-consuming and labor-intensive, but also difficult to apply to mass production. Summary of the Invention

[0003] The technical problem to be solved by the present invention is as follows: In view of the above-mentioned problems of the prior art, a hydrostatic guide rail and a processing method thereof are provided, in which each core working surface is easy to process, and the time-controlled grinding technology is used to realize the processing of the flatness, parallelism and verticality of the working surface, so that the straightness of the hydrostatic guide rail meets the requirements.

[0004] In order to solve the above technical problems, the technical solution adopted by the present invention is:

[0005] A hydrostatic guide rail comprises a base, and both sides of the base are provided with a first support portion and a second support portion arranged with a gap, the first support portion is supported under the vertical slider, the second support portion is supported under the horizontal slider, the vertical slider is supported under the slide, a center slider is provided at the bottom of the slide, and a gap for accommodating the horizontal slider is provided between the center slider and the two sides of the slide, the horizontal slider and the base are relatively fixed, and the vertical slider, the slide and the center slider are relatively fixed, there is an oil film gap between the vertical working surface of the horizontal slider and the center slider, there is an oil film gap between the horizontal working surface of the horizontal slider and the upper surface of the vertical slider, and there is an oil film gap between the first support portion and the lower surface of the vertical slider.

[0006] Furthermore, the horizontal slider includes an upper side plate, a lower side plate, a left side plate and a right side plate, and adjacent side plates among the upper side plate, the lower side plate, the left side plate and the right side plate are detachably connected.

[0007] Furthermore, a gap between the first supporting portion and the second supporting portion is greater than 10 mm.

[0008] The present invention provides a method for machining a hydrostatic guide rail, which is applied to the hydrostatic guide rail. The method includes the steps of machining a machining surface of a first support portion and a machining surface of a second support portion, wherein the machining surface of the first support portion is specifically the upper surface of the first support portion, and the machining surface of the second support portion is specifically the upper surface of the second support portion. The steps include:

[0009] Selecting a working surface of the first support part as a reference surface, measuring the flatness error profile of the reference surface, and machining the reference surface according to the flatness error profile using a time-controlled grinding technique until the machining accuracy of the reference surface meets the requirements;

[0010] The flatness error profiles of the upper surface of the other first support part and the upper surface of each second support part are measured respectively, and the parallelism errors of the upper surface of the other first support part and the upper surface of each second support part relative to the reference plane are measured, and the parallelism error is superimposed on the corresponding flatness error to obtain an error profile with parallelism error. The upper surface of the other first support part and the upper surface of each second support part are processed according to the corresponding error profiles using time-controlled grinding technology until the processing accuracy of the upper surfaces meets the requirements.

[0011] Furthermore, the method further includes the step of processing a processing surface of the horizontal slider, wherein the processing surface of the horizontal slider specifically includes a horizontal working surface and a vertical working surface, and the step specifically includes:

[0012] The horizontal working surface of each horizontal slider is used as the reference surface, and the flatness error profile of the reference surface is measured. The reference surface is processed according to the flatness error profile using time-controlled grinding technology until the processing accuracy of the reference surface meets the requirements;

[0013] Measure the flatness error profile of the vertical working surface corresponding to each reference surface, and measure the perpendicularity error of the vertical working surface relative to the corresponding reference surface. Superimpose the perpendicularity error with the corresponding flatness error to obtain the error profile with perpendicularity error. Use time-controlled grinding technology to process each vertical working surface according to the corresponding error profile until the processing accuracy of each vertical working surface meets the requirements.

[0014] Furthermore, measuring the parallelism error of the upper surface of the other first support portion and the upper surface of each second support portion relative to the reference plane includes:

[0015] Measure the line profile in the long side direction of the reference plane, then measure the line profile in the long side direction of the current upper surface, calculate the slope error of the line profile in the long side direction of the reference plane and the slope error of the line profile in the long side direction of the current upper surface respectively, subtract the slope error corresponding to the reference plane from the slope error corresponding to the current upper surface to obtain the parallelism error of the current upper surface relative to the reference plane.

[0016] Furthermore, when measuring the perpendicularity error of the vertical working surface relative to the corresponding reference surface, it includes:

[0017] Measure the line profile in the short side direction of the reference surface, and then measure the line profile in the short side direction of the corresponding vertical working surface. Calculate the slope error of the line profile in the short side direction of the reference surface and the slope error of the line profile in the short side direction of the vertical working surface respectively. Subtract the slope error corresponding to the reference surface from the slope error corresponding to the vertical working surface and add the specified value to obtain the perpendicularity error of the vertical working surface relative to the corresponding reference surface.

[0018] Furthermore, when calculating the slope error of the line profile, m contour lines are measured on the entire processing surface, and the measurement results of the m contour lines are fitted into a measurement plane. Finally, the slope error of the entire fitted plane is calculated as the slope error of the line profile. The slope error formula of the line profile is as follows:

[0019]

[0020] in, is the jth contour line of the line profile at the i-th measurement position in the long side direction or the short side direction, is the i-th measurement position of the j-th contour line in the height direction, is the total number of measurement points on a contour line, and m is the total number of measured contour lines.

[0021] Furthermore, the calculation formula of the error morphology with parallelism error is as follows:

[0022]

[0023] in, Z_P(x,y) is the flatness error profile of the upper surface of the first support portion or the upper surface of the second support portion, P is the parallelism error of the upper surface of the first support portion or the upper surface of the second support portion relative to the reference plane, x It is the X-direction position of the hydrostatic guide rail.

[0024] Furthermore, the calculation formula of the error shape with verticality error is as follows:

[0025]

[0026] in, Z_P2 (x,y) is the flatness error profile of the vertical working surface, is the perpendicularity error of the vertical working surface relative to the reference surface, y It is the Y direction position of the hydrostatic guide rail.

[0027] Compared with the prior art, the advantages of the present invention are:

[0028] The hydrostatic guide rail of the present invention adopts a split design, and a gap is set between the first support part and the second support part to ensure that the working surfaces of the first support part and the second support part can be processed using time-controlled grinding technology. At the same time, the horizontal slider also adopts a split structural design to ensure that its working surface is easy to process.

[0029] The hydrostatic guideway machining method of the present invention first measures the flatness error of the machined surface. It then generates an error profile with parallelism or perpendicularity based on the slope error between the machined surface and a reference surface. Finally, it uses time-controlled grinding technology to reduce the error profile, achieving the flatness, parallelism, and perpendicularity of the key working surfaces of the hydrostatic guideway. This significantly improves machining accuracy and provides certainty. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 Schematic diagram of the structure of the hydrostatic guide rail according to an embodiment of the present invention.

[0031] Figure 2 This is a flow chart of a method for processing a hydrostatic guide rail according to an embodiment of the present invention.

[0032] Figure 3 Schematic diagram of verticality measurement in an embodiment of the present invention.

[0033] Figure 4 This is the principle diagram of verticality error processing.

[0034] Legend: 1-base, 2-vertical slider, 3-horizontal slider, 4-slide plate, 5-center slider, 101-first support part, 102-second support part. DETAILED DESCRIPTION

[0035] The present invention will be further described below in conjunction with the accompanying drawings and specific preferred embodiments, but the scope of protection of the present invention is not limited thereby.

[0036] Example 1

[0037] Time-controlled grinding technology, combined with precise measurement methods, can achieve machining accuracy of mechanical parts with better than sub-micron flatness. However, traditional hydrostatic guide rail structures cannot be machined using time-controlled grinding technology, and structural improvements are needed.

[0038] Therefore, this embodiment proposes a hydrostatic guide rail, which adopts a split structure, such as Figure 1 As shown, it includes a base 1, a vertical slider 2, a horizontal slider 3 and a slide 4. A first support part 101 and a second support part 102 are provided on both sides of the base 1. The first support part 101 is supported under the vertical slider 2, and the second support part 102 is supported under the horizontal slider 3. The vertical slider 2 is supported under the slide 4. A center slider 5 is provided at the bottom of the slide 4. A gap is provided between the center slider 5 and both sides of the slide 4 for accommodating the horizontal slider 3. The horizontal slider 3 and the base 1 are relatively fixed by bolt connection, and the vertical slider 2, the slide 4 and the center slider 5 are also relatively fixed by bolt connection. There is an oil film gap between the vertical working surface of the horizontal slider 3 and the center slider 5, and there is an oil film gap between the horizontal working surface of the horizontal slider 3 and the upper surface of the vertical slider 2. There is an oil film gap between the first support part 101 and the lower surface of the vertical slider 2, so that when the static pressure moves, the motor drives the center slider 5, the slide 4 and the vertical slider 2 to move relative to the base 1 and the horizontal slider 3.

[0039] In order to ensure that the flatness, parallelism and verticality of the core components of the hydrostatic guide rail meet the oil film accuracy requirements, the core working surface needs to be processed. The core working surface of the hydrostatic guide rail of this embodiment includes the first support parts 101 on the left and right sides and the working surfaces of the horizontal sliders 3 on the left and right sides, wherein:

[0040] The working surface of the first support portion 101 is specifically the upper surface of the first support portion 101 . For distinction, the working surfaces of the left and right first support portions 101 are marked as surface A and surface B, respectively.

[0041] The working surface of the horizontal slider 3 specifically includes a horizontal working surface corresponding to the upper surface of the vertical slider 2 and a vertical working surface corresponding to the side wall of the center slider 5. In this embodiment, in order to distinguish, the horizontal working surfaces of the left and right horizontal sliders 3 are marked as E surface and F surface respectively, and the vertical working surfaces of the left and right horizontal sliders 3 are marked as G surface and H surface respectively.

[0042] It should be noted that in order to ensure assembly accuracy, the upper surface of the second support part 102 also needs to be processed. The upper surfaces of the left and right second support parts 102 are marked as C surface and D surface respectively. It can be seen that A surface, B surface, C surface, D surface, E surface, F surface, G surface, and H surface are all processed surfaces.

[0043] In order to ensure that the machining surfaces A, B, C, and D can be machined using time-controlled grinding technology, in this embodiment, a gap is set between the first support part 101 and the second support part 102 on the same side, and the gap distance d between the first support part 101 and the second support part 102 is greater than 10 mm.

[0044] In order to ensure that the processing surfaces E, F, G, and H can be processed using time-controlled grinding technology and are easy to process, in this embodiment, the horizontal slider 3 is designed with a split structure. Specifically, the horizontal slider 3 includes an upper side plate, a lower side plate, a left side plate, and a right side plate. The adjacent side plates in the upper side plate, the lower side plate, the left side plate, and the right side plate are detachably connected, specifically through a threaded connection, so that the horizontal slider 3 becomes a tubular structure with openings at both ends, and then the horizontal slider 3 is installed on the corresponding second support part 102 of the base 1 by bolts.

[0045] In summary, this embodiment designs a split-type hydrostatic guide rail structure so that each core working surface meets the processing requirements of time-controlled grinding technology.

[0046] Example 2

[0047] This embodiment proposes a method for processing a hydrostatic guide rail, which is applied to the hydrostatic guide rail described in the first embodiment. By processing the complete flatness, parallelism and perpendicularity, the error morphology of the hydrostatic guide rail is effectively reduced and the straightness of the hydrostatic guide rail is improved. Figure 2 As shown, the method includes the following steps:

[0048] S1) Reference surface machining: A machined surface of the first support portion 101 is selected as the reference surface. In this embodiment, surface A is selected as the reference surface. The flatness error profile of the reference surface is measured. The reference surface is machined using a time-controlled grinding technique according to the flatness error profile until the machining accuracy of the reference surface meets the requirements.

[0049] S2) Parallelism Machining: Measure the flatness error profiles of the machined surface of the other first support portion 101 and each machined surface of the second support portion 102 (i.e., surfaces B, C, and D), and measure the parallelism errors of surfaces B, C, and D relative to the reference surface (i.e., surface A). Superimpose the parallelism errors with the corresponding flatness errors to obtain an error profile with parallelism errors. Use time-controlled grinding technology to machine surfaces B, C, and D according to the corresponding error profiles until the machining accuracy of each machined surface meets the requirements;

[0050] S3) Verticality Machining: Using the horizontal working surface (i.e., surface E or surface F) of each horizontal slider 3 as the reference surface, measure the flatness error profile of the reference surface, and use time-controlled grinding technology to machine the reference surface according to the flatness error profile until the machining accuracy of the reference surface meets the requirements;

[0051] Measure the flatness error profile of the vertical working surface (G surface or H surface) corresponding to the reference surface, and measure the perpendicularity error of the G surface or H surface relative to the corresponding reference surface. Superimpose the perpendicularity error with the corresponding flatness error to obtain the error profile with perpendicularity error. Use time-controlled grinding technology to process the G surface or H surface according to the corresponding error profile until the processing accuracy of each vertical working surface meets the requirements.

[0052] The following is a detailed description of each step.

[0053] Step S1 of this embodiment includes the following steps:

[0054] S11) Measure the flatness error profile of the reference surface. Specifically, use a precision profilometer to measure the profile error of the working surface A and generate a time-controlled grinding profile H(x,y).

[0055] S12) When using time-controlled grinding technology to process the reference surface according to the flatness error profile, the time-controlled grinding profile H(x,y) is substituted into the convolution formula to calculate the dwell time. The dwell time represents the time the time-controlled grinding device stays at the error peak point. The time-controlled grinding code can be generated based on the dwell time. The convolution formula is as follows:

[0056] (1)

[0057] Where H(x, y) is the time-controlled grinding topography, R(x, y) is the removal function topography, and T(x, y) is the dwell time.

[0058] S13) Measure the flatness error profile of the processed reference surface again, and compare the flatness error profiles of the reference surface before and after processing to determine whether the processing accuracy of the reference surface meets the requirements. If it does not meet the requirements, iteratively execute steps S11 to S13. When comparing the flatness error profiles of the reference surface before and after processing, specifically calculate the ratio n of the flatness error profile of the reference surface after this processing to the flatness error profile of the reference surface before this processing. If the ratio n is less than 0.8, it is considered that the processing limit is reached, and it is determined that the processing accuracy of the reference surface meets the requirements.

[0059] Step S2 of this embodiment includes the following steps:

[0060] S21) measuring the line profile of the reference surface in the long side direction, and then measuring the line profile of the current processing surface (i.e., the upper surface of the other first support portion 101 or the upper surface of one second support portion 102) in the long side direction, specifically measuring the line profile z1(x) of the reference surface A in the long side direction using a profilometer, ensuring that the temperature drift error is less than 0.1 μm before measurement, and then measuring the line profile z2(x) of the current processing surface in the long side direction;

[0061] S22) Calculate the slope error of the line profile in the long side direction of the reference surface and the slope error of the line profile in the long side direction of the current processing surface respectively. In this embodiment, to avoid the measurement error of the slope of a single contour line, the slope error of the line profile is calculated by measuring m contour lines on the entire processing surface, fitting the measurement results of the m contour lines into a measurement plane, and finally calculating the slope error of the entire fitted plane as the slope error of the line profile of the entire processing surface. The slope error formula of the line profile is as follows:

[0062] (2)

[0063] in, is the jth contour line of the line profile at the i-th measurement position in the X direction. The X direction is the measurement direction of the line profile, that is, the long side direction of the reference plane or the processing surface. is the i-th measurement position in the z direction, the z direction is the height direction, and the height direction is perpendicular to the reference plane or the plane where the processing surface is located. is the total number of measurement points on a contour line, and m is the total number of measured contour lines;

[0064] S23) Subtract the slope error corresponding to the reference plane from the slope error corresponding to the current machining surface to obtain the parallelism error of the current machining surface relative to the reference plane. The formula is as follows:

[0065] (3)

[0066] Where P is the parallelism error of the current machining surface relative to the reference plane A, k 1 is the line profile z 1 （x） The slope error, k 2 is the line profile z 2 (x) The slope error of

[0067] S24) Measure the flatness error profile of the current processing surface. Specifically, use a precision profilometer to measure the contour error of the current processing surface and generate the flatness error profile. Z_P(x,y) , the parallelism error is superimposed on the corresponding flatness error to obtain the error morphology with parallelism error. The formula is as follows:

[0068] (4)

[0069] in, Z_P(x,y) is the flatness error profile of the current processing surface (surface B or surface C or surface D), x is the X-direction position of the static pressure guide rail being measured. In this embodiment, the X-direction of the static pressure guide rail being measured is designated as the long side direction of the static pressure guide rail being measured;

[0070] S25) will be the error shape with parallelism error Z_E(x,y) Substitute formula (1) to calculate the dwell time, and generate the time-controlled grinding processing code to perform time-controlled grinding processing, remove the high point of the error morphology, and execute steps S21 to S24 again to obtain the error morphology with parallelism error after processing. Compare the error morphology with the preset threshold to determine whether the processing accuracy of the current processing surface meets the requirements. If it does not meet the requirements, the error morphology with parallelism error is again compared. Z_E (x,y) Substitute into formula (1) to calculate the dwell time, and generate the time-controlled grinding processing code to perform the time-controlled grinding processing, so as to iteratively execute steps S21 to S25. In this embodiment, the preset threshold is 2μm. If the error morphology is less than 2μm, it is considered that the processing accuracy meets the requirements.

[0071] Step S3 of this embodiment includes the following steps:

[0072] S31) disassembling the horizontal slider 3, measuring the flatness error profile of the side plate where the horizontal working surface (E surface or F surface) is located, and processing the side plate using a time-controlled grinding technique according to the flatness error profile until the processing accuracy meets the requirements. The specific implementation steps are basically the same as steps S11 to S13 and will not be repeated here;

[0073] S32) Use an optical hexahedron to calibrate the verticality error of the profilometer itself, such as Figure 3 As shown, the sensor is moved in the X and Y directions respectively to obtain the verticality errors of the device in the X and Y directions. The profilometer is calibrated based on the verticality errors in the X and Y directions. The accuracy of the optical hexahedron is 0.5", which can ensure that the calibrated instrument has high verticality measurement accuracy.

[0074] S33) Using the side head of the calibrated profilometer, measure the line profile z3(x) in the short side direction of the reference surface. Also, ensure that the temperature drift error is less than 0.1 μm before measurement. Simultaneously, for the side plate where the vertical working surface (G surface or H surface) is located, measure the line profile z4(x) in the short side direction of the reference surface corresponding to the vertical working surface.

[0075] S34) Calculate the slope error of the line profile in the short side direction of the reference surface and the slope error of the line profile in the short side direction of the vertical working surface respectively. Specifically, according to formula (2), with the short side direction of the reference surface or the vertical working surface as the X direction, calculate the slope errors corresponding to the line profiles z3 (x) and z4 (x) k 3 and k 4;

[0076] S35) Figure 4As shown, the slope error corresponding to the vertical working surface is subtracted from the slope error corresponding to the reference surface and then added to the specified value to obtain the perpendicularity error of the vertical working surface relative to the corresponding reference surface. The calculation formula is as follows:

[0077] (5)

[0078] In the formula It is the perpendicularity error between the vertical working surface (G surface or H surface) and the reference surface (E surface or F surface);

[0079] S36) Measure the flatness error profile of the vertical working surface (G surface or H surface). Specifically, use a precision profilometer to measure the profile error of the G surface or H surface and generate the flatness error profile. Z_P 2 (x,y) , the error profile with perpendicularity error is obtained by superimposing the perpendicularity error with the corresponding flatness error. The formula is as follows:

[0080] (6)

[0081] in, Z_P 2 (x,y) is the flatness error profile of the vertical working surface (G surface or H surface), y is the Y-direction position of the static pressure guide rail being measured. In this embodiment, the Y-direction of the static pressure guide rail being measured is designated as the short side direction of the static pressure guide rail being measured;

[0082] S37) will be the error shape with verticality error Z_E 2 (x,y ) is substituted into formula (1) to calculate the dwell time, and a time-controlled grinding processing code is generated to perform time-controlled grinding processing, and the high point of the error morphology is removed. Steps S33 to S36 are executed again to obtain the error morphology of the verticality error after processing, and the error morphology is compared with the preset threshold to determine whether the processing accuracy of the vertical working surface meets the requirements. If it does not meet the requirements, the error morphology with parallelism error is again obtained. Z_E 2 （x, y ) is substituted into formula (1) to calculate the dwell time, and a time-controlled grinding processing code is generated to perform time-controlled grinding processing, so as to iteratively execute steps S33 to S37. In this embodiment, the preset threshold value is 2μm. If the error morphology is less than 2μm, it is considered that the processing accuracy meets the requirements.

[0083] In summary, this embodiment realizes the time-controlled grinding of the proposed hydrostatic guide rail through the above steps, and the flatness, parallelism and perpendicularity are all better than 2 μm, thereby making the final hydrostatic guide rail straightness better than 0.2 μm.

[0084] The above description is merely a preferred embodiment of the present invention. The scope of protection of the present invention is not limited to the above embodiment. All technical solutions based on the concept of the present invention are within the scope of protection of the present invention. It should be noted that for those skilled in the art, various improvements and modifications that do not depart from the principles of the present invention should also be considered within the scope of protection of the present invention.

Claims

1. A method for processing a hydrostatic guide rail, characterized in that: The hydrostatic guide rail comprises a base (1), and both sides of the base (1) are provided with a first support portion (101) and a second support portion (102) arranged with a gap, the first support portion (101) is supported below the vertical slider (2), and the second support portion (102) is supported below the horizontal slider (3), the vertical slider (2) is supported below the slide (4), a central slider (5) is provided at the bottom of the slide (4), and a gap for accommodating the horizontal slider (3) is provided between the central slider (5) and both sides of the slide (4), the horizontal slider (3) and the base (1) are relatively fixed, and the vertical slider (2), the slide (4) and the central slider are relatively fixed. The blocks (5) are relatively fixed, an oil film gap exists between the vertical working surface of the horizontal slider (3) and the central slider (5), an oil film gap exists between the horizontal working surface of the horizontal slider (3) and the upper surface of the vertical slider (2), and an oil film gap exists between the first support portion (101) and the lower surface of the vertical slider (2). The method includes the steps of machining the machining surface of the first support portion (101) and the machining surface of the second support portion (102), the machining surface of the first support portion (101) being specifically the upper surface of the first support portion (101), and the machining surface of the second support portion (102) being specifically the upper surface of the second support portion (102), and the steps include: Selecting an upper surface of a first support portion (101) as a reference surface, measuring the flatness error profile of the reference surface, and machining the reference surface according to the flatness error profile using a time-controlled grinding technique until the machining accuracy of the reference surface meets the requirements; Measuring the flatness error profiles of the upper surface of the other first support portion (101) and the upper surface of each second support portion (102) respectively, and measuring the parallelism errors of the upper surface of the other first support portion (101) and the upper surface of each second support portion (102) relative to the reference plane, superimposing the parallelism errors with the corresponding flatness errors to obtain error profiles with parallelism errors, and machining the upper surface of the other first support portion (101) and the upper surface of each second support portion (102) according to the corresponding error profiles using a time-controlled grinding technique until the machining accuracy of the upper surfaces meets the requirements; The method further comprises the step of machining a machining surface of the horizontal slider (3), wherein the machining surface of the horizontal slider (3) specifically comprises a horizontal working surface and a vertical working surface, and the step specifically comprises: Taking the horizontal working surface of each horizontal slider (3) as a reference surface, measuring the flatness error profile of the reference surface, and using the time-controlled grinding technology to process the reference surface according to the flatness error profile until the processing accuracy of the reference surface meets the requirements; Measure the flatness error profile of the vertical working surface corresponding to each reference surface, and measure the perpendicularity error of the vertical working surface relative to the corresponding reference surface. Superimpose the perpendicularity error with the corresponding flatness error to obtain the error profile with perpendicularity error. Use time-controlled grinding technology to process each vertical working surface according to the corresponding error profile until the processing accuracy of each vertical working surface meets the requirements.

2. The method for processing a hydrostatic guide rail according to claim 1, wherein: Measuring the parallelism error of the upper surface of another first support portion (101) and the upper surface of each second support portion (102) relative to the reference plane includes: Measure the line profile in the long side direction of the reference plane, then measure the line profile in the long side direction of the current upper surface, calculate the slope error of the line profile in the long side direction of the reference plane and the slope error of the line profile in the long side direction of the current upper surface respectively, subtract the slope error corresponding to the reference plane from the slope error corresponding to the current upper surface to obtain the parallelism error of the current upper surface relative to the reference plane.

3. The method for processing a hydrostatic guide rail according to claim 1, wherein: When measuring the perpendicularity error of a vertical working surface relative to the corresponding reference surface, it includes: Measure the line profile in the short side direction of the reference surface, and then measure the line profile in the short side direction of the corresponding vertical working surface. Calculate the slope error of the line profile in the short side direction of the reference surface and the slope error of the line profile in the short side direction of the vertical working surface respectively. Subtract the slope error corresponding to the reference surface from the slope error corresponding to the vertical working surface and add the specified value to obtain the perpendicularity error of the vertical working surface relative to the corresponding reference surface.

4. The method for processing a hydrostatic guide rail according to claim 2 or 3, characterized in that: When calculating the slope error of the line profile, m contour lines are measured on the entire processing surface, and the measurement results of the m contour lines are fitted into a measurement plane. Finally, the slope error of the entire fitted plane is calculated as the slope error of the line profile. The slope error formula of the line profile is as follows: in, is the jth contour line of the line profile at the i-th measurement position in the long side direction or the short side direction, is the i-th measurement position of the j-th contour line in the height direction, is the total number of measurement points on a contour line, and m is the total number of measured contour lines.

5. The method for processing a hydrostatic guide rail according to claim 1, wherein: The calculation formula for the error profile with parallelism error is as follows: in, Z_P(x,y) is the flatness error profile of the upper surface of the first support portion (101) or the upper surface of the second support portion (102), P is the parallelism error of the upper surface of the first support portion (101) or the upper surface of the second support portion (102) relative to the reference plane, x It is the X-direction position of the hydrostatic guide rail.

6. The method for processing a hydrostatic guide rail according to claim 1, wherein: The calculation formula for the error profile with verticality error is as follows: in, Z_P 2 (x,y) is the flatness error profile of the vertical working surface, is the perpendicularity error of the vertical working surface relative to the reference surface, y It is the Y direction position of the hydrostatic guide rail.

7. A hydrostatic guide rail, characterized in that: The invention comprises a base (1), wherein both sides of the base (1) are provided with a first support portion (101) and a second support portion (102) arranged with a gap, wherein the first support portion (101) is supported below a vertical slider (2), and the second support portion (102) is supported below a horizontal slider (3), wherein the vertical slider (2) is supported below a slide plate (4), and a central slider (5) is provided at the bottom of the slide plate (4), and a gap for accommodating the horizontal slider (3) is provided between the central slider (5) and both sides of the slide plate (4), and the horizontal slider (3) and the base (1) are relatively close to each other. The vertical slider (2), the slide (4) and the center slider (5) are fixed relative to each other, an oil film gap exists between the vertical working surface of the horizontal slider (3) and the center slider (5), an oil film gap exists between the horizontal working surface of the horizontal slider (3) and the upper surface of the vertical slider (2), an oil film gap exists between the first support portion (101) and the lower surface of the vertical slider (2), and the first support portion (101), the second support portion (102) and the horizontal slider (3) are processed by the processing method of the hydrostatic guide rail according to any one of claims 1 to 6.

8. The hydrostatic guide rail according to claim 7, characterized in that: The horizontal sliding block (3) comprises an upper side plate, a lower side plate, a left side plate and a right side plate, and adjacent side plates among the upper side plate, the lower side plate, the left side plate and the right side plate are detachably connected.

9. The hydrostatic guide rail according to claim 7, characterized in that: The gap between the first supporting portion (101) and the second supporting portion (102) is greater than 10 mm.

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