Radio frequency superconducting cavity groove cavity processing tool and radio frequency superconducting cavity groove cavity processing method

Through the design of RF superconducting cavity slot processing tooling, the frequency variation and precision inaccuracy problems caused by clamping in the processing of niobium RF superconducting cavity are solved, and high-precision and low-cost processing effects are achieved.

CN120619880APending Publication Date: 2025-09-12NINGXIA ORIENT SUPERCONDUCTOR TECH
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Patent Information

Application Number
CN202510882891.6
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-06-28
Publication Date
2025-09-12

AI Technical Summary

Technical Problem

In the existing technology of niobium radio frequency superconducting cavity processing, the clamping method causes the frequency of the entire cavity to change and the shape and position tolerances to be inaccurate, making it difficult to ensure processing accuracy and consistency.

Method used

A radio frequency superconducting cavity slot processing tooling is used, including components such as a base, a long support, a short support, an adjustment support and a pressure plate. Through screw connection and arc-shaped groove design, stable clamping and coaxial positioning of the radio frequency superconducting cavity are achieved, ensuring the consistency of the processing datum and the measurement datum.

Benefits of technology

It improves processing accuracy and consistency, reduces bellows deformation, simplifies processing procedures, reduces production costs, and improves production efficiency.

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Abstract

The invention discloses a radio frequency superconducting cavity groove cavity machining tool and a radio frequency superconducting cavity groove cavity machining method. The radio frequency superconducting cavity groove cavity machining tool comprises a base, a long support, a long pressing plate, a short pressing plate, a short support, an adjusting support and a jacket pressing plate. The base and the long support are arranged oppositely, the short support is fixed to the top of the base, the adjusting support is installed on the top of the base and parallel to the short support, the adjusting support can move up and down and left and right along the base, and arc-shaped grooves are formed in the tops of the long support, the short support and the adjusting support. The long pressing plate, the short pressing plate and the jacket pressing plate are arranged over the long support, the short support and the adjusting support, the long pressing plate and the short support, the short pressing plate and the short support, and the jacket pressing plate and the adjusting support are connected through screws, and the lower end face of the long pressing plate, the lower end face of the short pressing plate and the lower end face of the jacket pressing plate are provided with arc-shaped pressing grooves matched with the arc-shaped grooves. When the device is used, one-time installation and one-time machining are completed, it is guaranteed that the machining benchmark and the measuring benchmark are consistent, and the requirements for the flatness and size precision of a machined part are met.
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Description

Technical Field

[0001] The present invention relates to the technical field of radio frequency superconducting cavities, and in particular to a radio frequency superconducting cavity slot processing tool and a radio frequency superconducting cavity slot processing method. Background Art

[0002] During the manufacturing process of the niobium radio frequency superconducting cavity, stringent requirements are imposed on ensuring the product's acceleration gradient performance. Key indicators include strict control of dimensional accuracy, positional precision, and overall cavity frequency. The superconducting cavity primarily consists of a superconducting bare cavity consisting of nine accelerating cavities and two end cavity assemblies, along with a pure titanium helium tank assembly welded to the end cavity assemblies. The helium tank assembly provides the superconducting bare cavity with a cryogenic operating environment of liquid helium and provides mounting interfaces for suspension supports, collimation, and tuners. It comprises a pure titanium cylinder, pure titanium bellows, and a pure titanium transition piece. The machining of the lugs and tuners is the final step in the overall helium tank processing. Its precision significantly impacts the overall performance of the product, including operation and installation, and therefore holds high standards during factory inspection.

[0003] The current method for machining the 1.3GHz-9Cell superconducting cavity slot is to directly clamp the slot's titanium jacket using a rigid clamping method to prevent rotation of the entire cavity during machining and ensure machining accuracy. While this solution prevents rotation and vibration of the entire cavity during machining, it can easily cause jacket deformation. When the tooling is removed, the frequency of the entire cavity changes, and the form and position tolerances are altered. The 1.3GHz-9Cell superconducting cavity slot is connected at one end using a 0.3mm-thick titanium bellows flexible connection assembly (the bellows is 40mm long). This connection method results in a loose connection between the helium tank and the bare cavity, making it difficult to ensure the final dimensions after machining. The tooling only secures the titanium jacket and does not align the measurement and machining benchmarks, making it impossible to prevent jacket deformation. Summary of the Invention

[0004] In order to solve the technical problems existing in the above technologies, it is necessary to provide a radio frequency superconducting cavity slot processing tool.

[0005] A radio frequency superconducting cavity slot processing tool, comprising a base, a long support, a long pressure plate, a short pressure plate, a short support, an adjustment support, and a jacket pressure plate; the base and the long support are arranged opposite to each other, the short support is fixed on the top of the base, the adjustment support is installed on the top of the base, the adjustment support is parallel to the short support, and the adjustment support can move up and down and left and right along the base; the tops of the long support, the short support, and the adjustment support all have arc-shaped grooves; the long pressure plate, the short pressure plate, and the jacket pressure plate are correspondingly arranged directly above the long support, the short support, and the adjustment support; the long pressure plate and the short support, the short pressure plate and the short support, and the jacket pressure plate and the adjustment support are all connected by screws, and the lower end faces of the long pressure plate, the short pressure plate, and the jacket pressure plate have arc-shaped pressure grooves that are adapted to the shape and size of the arc-shaped grooves.

[0006] Preferably, a mounting groove is provided on the top of the base to allow the lower end of the adjustment support to be inserted.

[0007] Preferably, a rotating rod is threadedly installed on the bottom of the installation groove, and the upper end of the rotating rod contacts the lower end surface of the adjustment support. When the rotating rod is rotated, the rotating rod can drive the adjustment support to move up and down along the installation groove.

[0008] Preferably, push rods are symmetrically threaded on both sides of the base, and the ends of the push rods can extend into the installation grooves. When the push rods are rotated, the ends of the push rods can push the adjustment support to move left and right along the installation grooves.

[0009] Preferably, the long support and the short support have a first semi-conical hole concentric with the arc-shaped groove on the side facing the adjustment support, and the small diameter end of the first semi-conical hole is connected to the arc-shaped groove through a first positioning groove concentric with the arc-shaped groove.

[0010] Preferably, the long pressing plate and the short pressing plate have a second semi-conical hole concentric with the arc pressing groove on the side facing the adjustment support, and the small diameter end of the second semi-conical hole is connected to the arc pressing groove through a second positioning groove concentric with the arc groove.

[0011] Preferably, the mutually arcuate groove on the long support is concentric with the arcuate groove on the short support, and the arcuate pressing groove on the long pressing plate is concentric with the arcuate pressing groove on the short pressing plate.

[0012] Preferably, the base and the long support are connected by a pull rod.

[0013] It is also necessary to provide a method for machining a radio frequency superconducting cavity slot.

[0014] A method for machining a radio frequency superconducting cavity slot is provided, using the radio frequency superconducting cavity slot machining tool described above for machining, comprising the following steps: Step S1: Wipe the work surface clean, install the long support and short support according to the assembly relationship and the size of the slot cavity, and use a height gauge to adjust the height difference between the long and short support fixing reference rings to within the specified error range; Step S2: Place the RF superconducting cavity to be processed on the long support and the short support, observe the installation position of the reference ring, and ensure that it fits well with the tooling installation surface; Step S3: Place the reference rings on both sides of the groove cavity into the positioning positions of the supports on both sides, and use a dial indicator to adjust the groove cavity reference ring (X axis) and the coupling flange (Y axis) to within the specified error range according to the measurement requirements; Step S4: Install the long pressure plate and the short pressure plate, use a dial indicator to align the coupling flange to the workbench vertically and the center axis of the groove cavity to the horizontal, tighten the nut on the screw to tighten the long pressure plate and the short pressure plate, keep the reference ring concentric, and tighten the screw to fix the reference ring; Step S5: Adjust the adjustment support so that the support surface of the adjustment support is in good contact with the surface of the titanium jacket, adjust the rotating rod and the push rod so that the support force of the adjustment support is appropriate to prevent the titanium jacket from being deformed due to excessive force, install the jacket pressure plate, use a dial indicator to monitor the force change value of the jacket and the reference ring, and fix the adjustment support and the titanium jacket; Step S6: Use a height gauge to measure the left and right heights of the reference ring, the welding position of the lifting lugs, and the height before processing, mark them, and make a record; Step S7: During processing, use a dial indicator to monitor the lifting lugs to ensure that the scale remains unchanged during the processing. Use self-locking adjustment support blocks to support the four mounting lifting lugs, with full support as the standard. Step S8: Processing is performed on a horizontal machining center using the machining parameters F120, S2200, and M0.4. Each lifting lug is processed once, and the platform is rotated 180 degrees to process the lifting lug on the opposite side. Step S9: Use an outside micrometer to measure and determine the machining feed amount and ensure the final machining size.

[0015] Preferably, the error range is specified to be within 0.1 mm.

[0016] Compared with the prior art, the RF superconducting cavity slot processing tooling and RF superconducting cavity slot processing method provided by the present invention transfer the support point to the reference ring, that is, the long support and the short support, and change the clamping of the helium tank to support, that is, the adjustment support, which can minimize the deformation of the helium tank and ensure the consistency of the state before and after processing; it can ensure that the long support and the short support make the centers of the reference rings at both ends at the same height. Because the bellows are relatively soft, the cavity is prone to deformation. The use of the adjustment support can ensure that the cavity and the helium tank are coaxial, and the alignment time is reduced. When in use, the tooling is clamped and fixed to the platform at one time, and there is no need to remove the middle of the same batch of slots, which improves the consistency of product dimensions, reduces workload, and is conducive to better protection of the bellows. The tooling is used to ensure the parallelism of the axis and achieve direct measurement of height and position dimensions to ensure accuracy. At the same time, the processing benchmark and the measurement benchmark are consistent, the product process accuracy and position accuracy are guaranteed, the installation is simple and reliable, and the clamping and processing requirements of the 1.3GHz-9Cell slot are guaranteed. The bellows fixing and protection components are reduced, and the processing process is streamlined. Four-axis horizontal machining center processing, one-time installation and one-time processing, process size controllable, ensuring the flatness and dimensional accuracy requirements of the processed parts, improving production efficiency, reducing work intensity and lowering production costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0018] Figure 1 It is a structural schematic diagram of the present invention.

[0019] Figure 2 For the present invention Figure 1 Schematic diagram of the structure from another angle.

[0020] Figure 3 It is a structural schematic diagram of the connection between the short pressure plate, short support, adjustment support and jacket pressure plate of the present invention.

[0021] Figure 4 For the present invention Figure 3 Schematic diagram of the structure from another angle.

[0022] Figure 5 It is a structural schematic diagram of the base of the present invention.

[0023] Figure 6 It is a structural schematic diagram of the short pressure plate of the present invention.

[0024] Figure 7 For the present invention Figure 6 Schematic diagram of the cross-sectional structure of AA.

[0025] Figure 8 For the present invention Figure 6 Schematic diagram of the structure from another angle.

[0026] Figure 9 This is a schematic diagram of the structure after the present invention is assembled with the groove cavity.

[0027] Figure 10 For the present invention Figure 9 Schematic diagram of the structure from another angle.

[0028] Figure 11 Schematic diagram of the reference ring of the present invention.

[0029] In the figure: base 01, long support 02, long pressure plate 03, short pressure plate 04, short support 05, adjustment support 06, jacket pressure plate 07, arc groove 08, arc pressure groove 09, mounting groove 10, rotating rod 20, push rod 30, first semi-conical hole 40, first positioning groove 50, second semi-conical hole 60, second positioning groove 70, pull rod 80, groove cavity 90. DETAILED DESCRIPTION

[0030] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts shall fall within the scope of protection of the present invention.

[0031] In the description of the present invention, it should be understood that the terms "upper", "middle", "outer", "inner", "lower" and the like indicating directions or positional relationships are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the components or elements referred to must have a specific direction, be constructed and operate in a specific direction, and therefore should not be understood as limiting the present invention.

[0032] Please see Figures 1 to 8 In one embodiment, the present invention provides a radio frequency superconducting cavity slot processing tool, including a base 01, a long support 02, a long pressure plate 03, a short pressure plate 04, a short support 05, an adjustment support 06, and a jacket pressure plate 07; the base 01 and the long support 02 are arranged opposite to each other, the short support 05 is fixed on the top of the base 01, and the adjustment support 06 is installed on the top of the base 01, the adjustment support 06 is parallel to the short support 05, and the adjustment support 06 can move up and down and left and right along the base 01, the long support 02 and the short support 0 5. The top of the long pressure plate 03 and the adjusting support 06 all have an arc-shaped groove 08. The long pressure plate 03, the short pressure plate 04, and the jacket pressure plate 07 are correspondingly arranged directly above the long support 02, the short support 05, and the adjusting support 06. The long pressure plate 03 and the short support 05, the short pressure plate 04 and the short support 05, and the jacket pressure plate 07 and the adjusting support 06 are all connected by screws. The lower end surfaces of the long pressure plate 03, the short pressure plate 04, and the jacket pressure plate 07 have an arc-shaped pressure groove 09 that is adapted to the shape and size of the arc-shaped groove 08.

[0033] In one embodiment, a mounting groove 10 is provided on the top of the base 01 to allow the lower end of the adjustment support 06 to be inserted.

[0034] To further explain in detail, a rotating rod 20 is installed on the bottom of the mounting groove 10 through a longitudinal thread, and the upper end of the rotating rod 20 is in contact with the lower end surface of the adjustment support 06. When the rotating rod 20 is rotated, the upper end of the rotating rod 20 can be moved upward or downward, and then the adjustment support 06 is driven to move upward or downward along the mounting groove 10 through the rotating rod 20.

[0035] To further elaborate, push rods 30 are symmetrically threaded onto both sides of base 01. The ends of push rods 30 can extend into mounting slot 10. Rotating push rods 30 changes the distance between the ends of push rods 30 and the side of the adjustment support. For example, when the end of push rod 30 on the left side of adjustment support 06 presses against the side of adjustment support 06, push rod 30 can be used to push adjustment support 06 to the right along mounting slot 10. Conversely, when the end of push rod 30 on the right side presses against the side of adjustment support 06, push rod 30 will push adjustment support 06 to the left along mounting slot 10. Using rotating rod 20 and push rod 30, adjustment support 06 can be kept coaxial and concentric with the grooves supported by long support 02 and short support 05.

[0036] In one embodiment, a first semi-conical hole 40 concentric with the arc-shaped groove 08 is provided on the side of the long support 02 and the short support 05 facing the adjustment support 06, and the small diameter end of the first semi-conical hole 40 is connected to the arc-shaped groove 08 through a first positioning groove 50 concentric with the arc-shaped groove 08.

[0037] Correspondingly, a second semi-conical hole 60, concentric with the arcuate groove 09, is formed on both the long pressing plate 03 and the short pressing plate 04 on the side facing the adjustment support 06. The smaller diameter end of the second semi-conical hole 60 communicates with the arcuate groove 09 via a second positioning groove 70 concentric with the arcuate groove 08. The first semi-conical hole 40 and the second semi-conical hole 60 form a tapered hole that better matches the two end surfaces of the cavity. The first positioning groove 50 and the second positioning groove 70 form a positioning hole that better positions the reference ring on the cavity and, in conjunction with the hole formed by the arcuate groove 08 and the arcuate groove 09, ensures the cavity is coaxial and concentric.

[0038] In one embodiment, the mutually arcuate groove 08 on the long support 02 is concentric with the arcuate groove 08 on the short support 05 , and the arcuate pressing groove 09 on the long pressing plate 03 is concentric with the arcuate pressing groove 09 on the short pressing plate 04 .

[0039] In one embodiment, the base 01 and the long support 02 are connected by a pull rod 80. The length of the pull rod 80 can be adjusted according to the use requirements, thereby adjusting the distance between the base 01 and the long support 02.

[0040] Please see Figures 9 to 11 In one embodiment, in order to more clearly express the technical solution of the present invention, taking the 1.3GHz-9Cell superconducting cavity helium slot processing as an example, the RF superconducting cavity slot processing tool is used for processing, including the following steps: Clean the work surface, install the long support 02 and short support 05 according to the assembly relationship and the size of the slot cavity, and use a height gauge to adjust the height difference between the long and short supports 05 at the fixed reference ring to within 0.1mm; Place the RF superconducting cavity to be processed on the long support 02 and the short support 05, observe the installation position of the reference ring, and ensure that it fits well with the tooling installation surface; Place the reference rings on both sides of the groove cavity into the positioning positions of the supports on both sides, and use a dial indicator to adjust the groove cavity reference ring (X axis) and coupling flange (Y axis) to within 0.1mm according to the measurement requirements; Install the long pressure plate 03 and the short pressure plate 04, use a dial indicator to align the coupling flange to the workbench vertically and the center axis of the groove cavity to the horizontal, tighten the nut on the screw to tighten the long pressure plate 03 and the short pressure plate 04, keep the reference ring concentric, and tighten the screw to fix the reference ring; Adjust the support 06 so that the support surface of the support 06 fits well with the surface of the titanium jacket. Adjust the rotating rod 20 and the push rod 30 so that the support force of the support 06 is appropriate to prevent the titanium jacket from being deformed due to excessive force. Install the jacket pressure plate 07 and use a dial indicator to monitor the force changes of the jacket and the reference ring. Fix the support 06 and the titanium jacket. Use a height gauge to measure the left and right heights of the reference ring, the welding position of the lifting lugs, and the height before processing, mark them, and make a record; During processing, use a dial indicator to monitor the lifting lugs to ensure that the scale remains unchanged during the processing. Use self-locking adjustment support blocks to support the four mounting lifting lugs, with full support as the standard (verify with a dial indicator); The machining parameters are F120, S2200, and M0.4. Each lifting lug is machined in one go, and the platform rotates 180 degrees to machine the lifting lug on the opposite side. Use an outside micrometer to measure and determine the machining feed amount and ensure the final machining size.

[0041] Through the above solution, tooling is used to ensure the horizontality of the 9Cell cavity axis, and the height of the 9Cell cavity axis can be directly and accurately measured, ensuring that the measurement datum and the processing datum are consistent. The titanium jacket can be adjusted to its natural state after welding, and the slot cavity fixation and lug processing and fixation are separated. Through tooling clamping, the measurement datum and processing datum are unified, improving product dimensional consistency. This solves the problems of inconsistent coaxiality and jacket deformation after the 1.3GHz-9Cell superconducting cavity slot cavity processing, resulting in inaccurate dimensional accuracy, form and position accuracy, and changes in the entire cavity frequency. Using a four-axis horizontal machining center for clamping and processing, it can ensure that the clamping is completed in one go after 180-degree rotation, ensuring the flatness and parallelism of the slot cavity lug and the coplanarity of the tuner surface.

[0042] The above disclosure is only a preferred embodiment of the present invention, and it is certainly not intended to limit the scope of the present invention. A person skilled in the art can understand that all or part of the processes of the above embodiment and equivalent changes made in accordance with the claims of the present invention are still within the scope of the invention.

Claims

1. A radio frequency superconducting cavity slot processing tool, characterized by: The cam is adapted to move the cam face up and down along the longitudinal axis of the base, the cam being adapted to move the cam face up and down along the longitudinal axis of the base, the cam being adapted to move the cam face up and down along the longitudinal axis of the base, the cam being adapted to move the cam face up and down along the longitudinal axis of the base, the cam being adapted to move the cam face up and down along the longitudinal axis of the base, the cam being adapted to move the cam face up and down along the longitudinal axis of the base, the cam being adapted to move the cam face 2. The radio frequency superconducting cavity slot processing tool according to claim 1, characterized in that: The top of the base is provided with a mounting groove capable of allowing the lower end of the adjustment support to be inserted.

3. The radio frequency superconducting cavity slot processing tool according to claim 2, characterized in that: The bottom of the installation groove is threadedly installed with a rotating rod, the upper end of the rotating rod contacts the lower end surface of the adjustment support, and when the rotating rod is rotated, the rotating rod can drive the adjustment support to move up and down along the installation groove.

4. The radio frequency superconducting cavity slot machining tool according to claim 3, characterized in that: Push rods are symmetrically threaded on both sides of the base, and the ends of the push rods can extend into the installation grooves. When the push rods are rotated, the ends of the push rods can push the adjustment support to move left and right along the installation grooves.

5. The radio frequency superconducting cavity slot machining tool according to any one of claims 1 to 4, characterized in that: The long support and the short support have a first semi-conical hole concentric with the arc groove on one side facing the adjustment support, and the small diameter end of the first semi-conical hole is connected to the arc groove through a first positioning groove concentric with the arc groove.

6. The radio frequency superconducting cavity slot machining tool according to claim 5, characterized in that: The long pressing plate and the short pressing plate have a second semi-conical hole concentric with the arc-shaped pressing groove on one side facing the adjustment support, and the small diameter end of the second semi-conical hole is connected to the arc-shaped pressing groove through a second positioning groove concentric with the arc-shaped groove.

7. The radio frequency superconducting cavity slot machining tool according to claim 1, characterized in that: The mutually arcuate grooves on the long support are concentric with the arcuate grooves on the short support, and the arcuate pressing grooves on the long pressing plate are concentric with the arcuate pressing grooves on the short pressing plate.

8. The radio frequency superconducting cavity slot machining tool according to claim 1, characterized in that: The base and the long support are connected via a pull rod.

9. A method for machining a radio frequency superconducting cavity slot, using the radio frequency superconducting cavity slot machining tool according to any one of claims 1 to 8, characterized in that: The following steps are included: Step S1: Wipe the work surface clean, install the long support and short support according to the assembly relationship and the size of the slot cavity, and use a height gauge to adjust the height difference between the long and short support fixing reference rings to within the specified error range; Step S2: Place the RF superconducting cavity to be processed on the long support and the short support, observe the installation position of the reference ring, and ensure that it fits well with the tooling installation surface; Step S3: Place the reference rings on both sides of the groove cavity into the positioning positions of the supports on both sides, and use a dial indicator to adjust the groove cavity reference ring (X axis) and the coupling flange (Y axis) to within the specified error range according to the measurement requirements; Step S4: Install the long pressure plate and the short pressure plate, use a dial indicator to align the coupling flange to the workbench vertically and the center axis of the groove cavity to the horizontal, tighten the nut on the screw to tighten the long pressure plate and the short pressure plate, keep the reference ring concentric, and tighten the screw to fix the reference ring; Step S5: Adjust the adjustment support so that the support surface of the adjustment support is in good contact with the surface of the titanium jacket, adjust the rotating rod and the push rod so that the support force of the adjustment support is appropriate to prevent the titanium jacket from being deformed due to excessive force, install the jacket pressure plate, use a dial indicator to monitor the force change value of the jacket and the reference ring, and fix the adjustment support and the titanium jacket; Step S6: Use a height gauge to measure the left and right heights of the reference ring, the welding position of the lifting lugs, and the height before processing, mark them, and make a record; Step S7: During processing, use a dial indicator to monitor the lifting lugs to ensure that the scale remains unchanged during the processing. Use self-locking adjustable support blocks to support the four mounting lifting lugs, with full support as the standard. Step S8: Processing is performed on a horizontal machining center using the machining parameters F120, S2200, and M0.

4. Each lifting lug is processed once, and the platform is rotated 180 degrees to process the lifting lug on the opposite side. Step S9: Use an outside micrometer to measure and determine the machining feed amount and ensure the final machining size.

10. The method for machining a radio frequency superconducting cavity according to claim 9, characterized in that: The specified error range is within 0.1mm.

Citation Information

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