Heat treatment method of 6061 aluminum alloy and gas distribution disc

Abstract

The invention relates to a 6061 aluminum alloy heat treatment method and a gas distribution disc, in particular to the technical field of vapor deposition, and the heat treatment method comprises the steps of vibration heat treatment, water cooling, heat preservation treatment and air cooling which are sequentially carried out; the heat preservation temperature of the vibration heat treatment is lower than that of the heat preservation treatment. According to the heat treatment method provided by the invention, the specific heat treatment process is designed to be matched with the cooling process, so that the stress of the 6061 aluminum alloy is efficiently released, the deformation after machining can be obviously reduced, good planeness and parallelism are ensured, and the service life of the 6061 aluminum alloy is prolonged. Therefore, a film layer obtained when the obtained gas distribution disc is used for vapor deposition film coating has good thickness uniformity.

Description

Technical Field

[0001] The present invention relates to the technical field of vapor deposition, and in particular to a heat treatment method for 6061 aluminum alloy and a gas distribution plate. Background Art

[0002] The gas distribution plate is a commonly used semiconductor component used in the reaction chamber of semiconductor equipment. After passing through the gas distribution plate, the film-forming gas can reach the surface of the workpiece evenly. Under the influence of temperature, electric field and pressure, chemical reactions occur between the gas and the workpiece to form a new thin film material that is deposited on the surface of the wafer.

[0003] For example, CN113584465A discloses a chemical vapor deposition device, which belongs to the field of semiconductor technology. The chemical vapor deposition device includes a reaction chamber, a gas supply component, a gas distribution plate, and a gas control component. Among them, the reaction chamber has multiple carriers for carrying wafers. The gas supply component is used to provide reaction gas. The gas distribution plates are multiple and are arranged in a one-to-one correspondence with the multiple carriers. The gas control components are multiple and are arranged in a one-to-one correspondence with the multiple gas distribution plates. The gas distribution plate and the gas supply component are connected through corresponding gas control components.

[0004] At present, the gas distribution plates used are basically made of aluminum alloy. By selecting suitable aluminum alloy materials, and going through processes such as processing, forming, surface treatment, and cleaning, and coordinating certain inspection operations, they are finally processed into qualified semiconductor gas distribution plate products. However, the product obtained after selecting suitable aluminum alloy materials for processing has certain deformation due to the stress in the aluminum alloy material, which makes the uniformity of the deposited film layer poor, which is not conducive to the preparation of high-quality film layers. Summary of the Invention

[0005] In view of the problems existing in the prior art, the purpose of the present invention is to provide a heat treatment method and a gas distribution plate for 6061 aluminum alloy, so as to solve the defect that the product obtained after the current aluminum alloy material is processed has a certain deformation of the gas distribution plate due to the stress of the aluminum alloy material, resulting in poor uniformity of the deposited film layer, which is not conducive to the preparation of high-quality film layers.

[0006] To achieve this object, the present invention adopts the following technical solutions:

[0007] In a first aspect, the present invention provides a heat treatment method for a 6061 aluminum alloy, the heat treatment method comprising:

[0008] Vibration heat treatment, water cooling, insulation treatment and air cooling are carried out in sequence;

[0009] The holding temperature of the vibration heat treatment is less than the holding temperature of the heat preservation treatment.

[0010] The heat treatment method provided by the present invention realizes the efficient release of stress of 6061 aluminum alloy by designing a specific heat treatment process and a cooling process, which can significantly reduce the deformation after machining, ensure good flatness, parallelism and consistency of the roughness Ra of small holes (hole diameter ≤ 0.7mm), thereby ensuring that the film layer obtained when the obtained gas distribution plate is subjected to vapor deposition coating has good thickness uniformity.

[0011] As a preferred technical solution of the present invention, the vibration frequency of the vibration heat treatment is 160-180 Hz.

[0012] As a preferred technical solution of the present invention, the heating rate of the vibration heat treatment is 10-20°C / min.

[0013] As a preferred technical solution of the present invention, the holding temperature of the vibration heat treatment is 250-300°C.

[0014] As a preferred technical solution of the present invention, the treatment time of the vibration heat treatment is 30-90 minutes, and the vibration maintenance time is 60-80% of the treatment time.

[0015] As a preferred technical solution of the present invention, the end temperature of the water cooling is ≤40°C.

[0016] As a preferred technical solution of the present invention, the heating rate of the heat preservation treatment is 7-15°C / min.

[0017] As a preferred technical solution of the present invention, the heat preservation treatment is carried out at 330-340° C. for 120-240 minutes.

[0018] As a preferred technical solution of the present invention, the air cooling end point temperature is ≤40°C.

[0019] In a second aspect, the present invention provides a gas distribution plate, which is prepared using 6061 aluminum alloy obtained by the heat treatment method described in the first aspect.

[0020] Compared with the existing technical solutions, the present invention has the following beneficial effects:

[0021] The heat treatment method provided by the present invention achieves efficient stress elimination of 6061 aluminum alloy by utilizing a specific heat treatment system in combination with a cooling system, so that the machined gas distribution plate has good flatness, parallelism and small hole (hole diameter ≤ 0.7mm) roughness Ra consistency, flatness ≤ 0.01mm, parallelism ≤ 0.01mm, and roughness Ra of all small holes (hole diameter ≤ 0.7mm) ≤ 0.4μm, which can ensure that the thickness uniformity of the deposited film layer is ≥ 98%.

[0022] The present invention is further described in detail below. However, the following examples are merely simplified examples of the present invention and do not represent or limit the scope of protection of the present invention. The scope of protection of the present invention shall be subject to the claims. DETAILED DESCRIPTION

[0023] To better illustrate the present invention and facilitate understanding of the technical solutions of the present invention, typical but non-limiting embodiments of the present invention are as follows:

[0024] 1. This embodiment provides a heat treatment method for 6061 aluminum alloy, the heat treatment method comprising:

[0025] Vibration heat treatment, water cooling, insulation treatment and air cooling are carried out in sequence;

[0026] The holding temperature of the vibration heat treatment is less than the holding temperature of the heat preservation treatment.

[0027] The vibration frequency of the vibration heat treatment is 160-180 Hz, for example, it can be 160 Hz, 162 Hz, 164 Hz, 166 Hz, 168 Hz, 170 Hz, 172 Hz, 174 Hz, 176 Hz, 178 Hz or 180 Hz, but is not limited to the listed values. Other values ​​not listed within this range also meet the requirements.

[0028] Wherein, the heating rate of the vibration heat treatment is 10-20°C / min, for example, it can be 10°C / min, 11°C / min, 12°C / min, 13°C / min, 14°C / min, 15°C / min, 16°C / min, 17°C / min, 18°C / min, 19°C / min or 20°C / min, etc., but is not limited to the listed values. Other values ​​not listed in this range also meet the requirements.

[0029] The holding temperature of the vibration heat treatment is 250-300°C, for example, it can be 250°C, 255°C, 260°C, 265°C, 270°C, 275°C, 280°C, 285°C, 290°C, 295°C or 300°C, but is not limited to the listed values. Other values ​​not listed within this range also meet the requirements.

[0030] Wherein, the treatment time of the vibration heat treatment is 30-90min, for example, it can be 30min, 35min, 40min, 45min, 50min, 55min, 60min, 65min, 70min, 75min, 80min, 85min or 90min, etc., and the vibration maintenance time is 60-80% of the treatment time, for example, it can be 60%, 62%, 64%, 66%, 68%, 70%, 72%, 74%, 76%, 78% or 80%, etc., but is not limited to the listed values, and other values ​​not listed within this range also meet the requirements.

[0031] Among them, the end temperature of the water cooling is ≤40℃, for example, it can be 40℃, 35℃, 30℃, 25℃, 20℃, 15℃, 10℃ or 5℃, etc., but is not limited to the listed values. Other unlisted values ​​within this range also meet the requirements.

[0032] Wherein, the heating rate of the heat preservation treatment is 7-15°C / min, for example, it can be 7°C / min, 7.5°C / min, 8°C / min, 8.5°C / min, 9°C / min, 9.5°C / min, 10°C / min, 10.5°C / min, 11°C / min, 11.5°C / min, 12°C / min, 12.5°C / min, 13°C / min, 13.5°C / min, 14°C / min, 14.5°C / min or 15°C / min, etc., but is not limited to the listed values. Other values ​​not listed in this range also meet the requirements.

[0033] The heat preservation treatment is carried out at 330-340°C for 120-240 min. The heat preservation temperature of the heat preservation treatment can be, for example, 330°C, 331°C, 332°C, 333°C, 334°C, 335°C, 336°C, 337°C, 338°C, 339°C or 340°C, and the heat preservation time of the heat preservation treatment can be, for example, 120 min, 130 min, 140 min, 150 min, 160 min, 170 min, 180 min, 190 min, 200 min, 210 min, 220 min, 230 min or 240 min, but is not limited to the listed values. Other values ​​not listed within the range also meet the requirements.

[0034] Among them, the air cooling end temperature is ≤40℃, for example, it can be 40℃, 35℃, 30℃, 25℃, 20℃, 15℃, 10℃ or 5℃, but is not limited to the listed values. Other unlisted values ​​within this range also meet the requirements.

[0035] 2. This embodiment provides a gas distribution plate, which is made by processing 6061 aluminum alloy obtained by heat treatment;

[0036] The heat treatment method includes vibration heat treatment, water cooling, insulation treatment and air cooling in sequence;

[0037] The holding temperature of the vibration heat treatment is less than the holding temperature of the heat preservation treatment.

[0038] The vibration frequency of the vibration heat treatment is 160-180 Hz, for example, it can be 160 Hz, 162 Hz, 164 Hz, 166 Hz, 168 Hz, 170 Hz, 172 Hz, 174 Hz, 176 Hz, 178 Hz or 180 Hz, but is not limited to the listed values. Other values ​​not listed within this range also meet the requirements.

[0039] Wherein, the heating rate of the vibration heat treatment is 10-20°C / min, for example, it can be 10°C / min, 11°C / min, 12°C / min, 13°C / min, 14°C / min, 15°C / min, 16°C / min, 17°C / min, 18°C / min, 19°C / min or 20°C / min, etc., but is not limited to the listed values. Other values ​​not listed in this range also meet the requirements.

[0040] The holding temperature of the vibration heat treatment is 250-300°C, for example, it can be 250°C, 255°C, 260°C, 265°C, 270°C, 275°C, 280°C, 285°C, 290°C, 295°C or 300°C, but is not limited to the listed values. Other values ​​not listed within this range also meet the requirements.

[0041] Wherein, the treatment time of the vibration heat treatment is 30-90min, for example, it can be 30min, 35min, 40min, 45min, 50min, 55min, 60min, 65min, 70min, 75min, 80min, 85min or 90min, etc., and the vibration maintenance time is 60-80% of the treatment time, for example, it can be 60%, 62%, 64%, 66%, 68%, 70%, 72%, 74%, 76%, 78% or 80%, etc., but is not limited to the listed values, and other values ​​not listed within this range also meet the requirements.

[0042] Among them, the end temperature of the water cooling is ≤40℃, for example, it can be 40℃, 35℃, 30℃, 25℃, 20℃, 15℃, 10℃ or 5℃, etc., but is not limited to the listed values. Other unlisted values ​​within this range also meet the requirements.

[0043] Wherein, the heating rate of the heat preservation treatment is 7-15°C / min, for example, it can be 7°C / min, 7.5°C / min, 8°C / min, 8.5°C / min, 9°C / min, 9.5°C / min, 10°C / min, 10.5°C / min, 11°C / min, 11.5°C / min, 12°C / min, 12.5°C / min, 13°C / min, 13.5°C / min, 14°C / min, 14.5°C / min or 15°C / min, etc., but is not limited to the listed values. Other values ​​not listed in this range also meet the requirements.

[0044] The heat preservation treatment is carried out at 330-340°C for 120-240 min. The heat preservation temperature of the heat preservation treatment can be, for example, 330°C, 331°C, 332°C, 333°C, 334°C, 335°C, 336°C, 337°C, 338°C, 339°C or 340°C, and the heat preservation time of the heat preservation treatment can be, for example, 120 min, 130 min, 140 min, 150 min, 160 min, 170 min, 180 min, 190 min, 200 min, 210 min, 220 min, 230 min or 240 min, but is not limited to the listed values. Other values ​​not listed within the range also meet the requirements.

[0045] Among them, the air cooling end temperature is ≤40℃, for example, it can be 40℃, 35℃, 30℃, 25℃, 20℃, 15℃, 10℃ or 5℃, but is not limited to the listed values. Other unlisted values ​​within this range also meet the requirements.

[0046] Furthermore, in order to illustrate the effects that can be achieved by the heat treatment method for 6061 aluminum alloy provided by the present invention, the following actual examples are used for illustration, as follows:

[0047] Example 1

[0048] This embodiment provides a heat treatment method for 6061 aluminum alloy, the heat treatment method comprising:

[0049] Vibration heat treatment, water cooling, insulation treatment and air cooling are carried out in sequence;

[0050] The vibration heat treatment has a vibration frequency of 170 Hz, a heating rate of 15°C / min, a holding temperature of 280°C, a treatment time of 50 min, and a vibration maintenance time of 70% of the treatment time;

[0051] The end temperature of the water cooling is 20°C;

[0052] The heat preservation treatment is carried out by heating the temperature to 335°C at a heating rate of 10°C / min and keeping the temperature for 200 minutes;

[0053] The air cooling end point temperature is 20°C.

[0054] Example 2

[0055] This embodiment provides a heat treatment method for 6061 aluminum alloy, the heat treatment method comprising:

[0056] Vibration heat treatment, water cooling, insulation treatment and air cooling are carried out in sequence;

[0057] The vibration heat treatment has a vibration frequency of 175 Hz, a heating rate of 14°C / min, a holding temperature of 260°C, a treatment time of 70 min, and a vibration maintenance time of 75% of the treatment time;

[0058] The end point temperature of the water cooling is 30°C;

[0059] The heat preservation treatment is carried out by heating the temperature to 338°C at a heating rate of 12°C / min and keeping the temperature for 150 minutes;

[0060] The air cooling end point temperature is 30°C.

[0061] Example 3

[0062] This embodiment provides a heat treatment method for 6061 aluminum alloy, the heat treatment method comprising:

[0063] Vibration heat treatment, water cooling, insulation treatment and air cooling are carried out in sequence;

[0064] The vibration heat treatment has a vibration frequency of 180 Hz, a heating rate of 10°C / min, a holding temperature of 250°C, a treatment time of 90 minutes, and a vibration maintenance time of 60% of the treatment time.

[0065] The end temperature of the water cooling is 25°C;

[0066] The heat preservation treatment is carried out by heating the temperature to 340°C at a heating rate of 15°C / min and keeping the temperature for 120 minutes;

[0067] The air cooling end point temperature is 30°C.

[0068] Example 4

[0069] This embodiment provides a heat treatment method for 6061 aluminum alloy, the heat treatment method comprising:

[0070] Vibration heat treatment, water cooling, insulation treatment and air cooling are carried out in sequence;

[0071] The vibration frequency of the vibration heat treatment is 160 Hz, the heating rate is 20 ° C / min, the holding temperature is 300 ° C, the treatment time of the vibration heat treatment is 30 minutes, and the vibration maintenance time is 80% of the treatment time;

[0072] The end temperature of the water cooling is 10°C;

[0073] The heat preservation treatment is carried out by heating the temperature to 330°C at a heating rate of 7°C / min and keeping the temperature for 240 minutes;

[0074] The air cooling end point temperature is 25°C.

[0075] Comparative Example 1

[0076] The only difference from Example 1 is that the vibration heat treatment is replaced by the non-vibration heat treatment with the same parameters.

[0077] Comparative Example 2

[0078] The only difference from Example 1 is that no heat preservation treatment is performed.

[0079] Comparative Example 3

[0080] The only difference from Example 1 is that no vibration heat treatment is performed.

[0081] Comparative Example 4

[0082] The only difference from Example 1 is that water cooling is replaced by furnace cooling.

[0083] Comparative Example 5

[0084] The only difference from Example 1 is that air cooling is replaced by water cooling.

[0085] Example 5

[0086] The only difference from Example 1 is that the holding temperature of the vibration heat treatment is 320°C.

[0087] Example 6

[0088] The only difference from Example 1 is that the holding temperature of the vibration heat treatment is 220°C.

[0089] Example 7

[0090] The only difference from Example 1 is that the vibration maintenance time in the vibration heat treatment is 50% of the treatment time.

[0091] Example 8

[0092] The only difference from Example 1 is that the vibration maintenance time in the vibration heat treatment is 90% of the treatment time.

[0093] Example 9

[0094] The only difference from Example 1 is that the holding temperature of the heat preservation treatment is 310°C.

[0095] Example 10

[0096] The only difference from Example 1 is that the holding temperature of the heat preservation treatment is 360°C.

[0097] The 6061 aluminum alloy plates with purity obtained in the above embodiments and comparative examples were machined using the same parameters to obtain gas distribution plates, and the flatness and parallelism were tested. Then, the corresponding gas distribution plates were used for the coating process with the same parameters. The thickness uniformity of the silicon film obtained by coating was measured and calculated based on the 49-point measurement method in the prior art (Wang Tiequ. Research on thickness uniformity within metal interlayer dielectric film sheets [D]. Shanghai Jiaotong University, 2020.). The results are shown in Table 1 below.

[0098] Table 1

[0099]

[0100] As can be seen from Table 1, the heat treatment method provided by the present invention achieves efficient stress elimination of 6061 aluminum alloy by utilizing a specific heat treatment system in combination with a cooling system, so that the machined gas distribution plate has good flatness, parallelism and consistency of small hole (hole diameter ≤ 0.7 mm) roughness Ra, with flatness ≤ 0.01 mm, parallelism ≤ 0.01 mm, and roughness Ra of all small holes (hole diameter ≤ 0.7 mm) ≤ 0.4 μm, which can ensure that the thickness uniformity of the deposited film layer is ≥ 98%.

[0101] The preferred embodiments of the present invention are described in detail above. However, the present invention is not limited to the specific details in the above embodiments. Within the technical concept of the present invention, various simple modifications can be made to the technical solution of the present invention, and these simple modifications all fall within the scope of protection of the present invention.

[0102] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any appropriate manner without contradiction. In order to avoid unnecessary repetition, the present invention will not further describe various possible combinations.

[0103] In addition, the various embodiments of the present invention may be arbitrarily combined, and as long as they do not violate the concept of the present invention, they should also be regarded as the contents disclosed by the present invention.

Claims

1. A heat treatment method for 6061 aluminum alloy, characterized in that: The heat treatment method comprises: Vibration heat treatment, water cooling, insulation treatment and air cooling are carried out in sequence; The holding temperature of the vibration heat treatment is less than the holding temperature of the heat preservation treatment.

2. The heat treatment method according to claim 1, wherein The vibration frequency of the vibration heat treatment is 160-180 Hz.

3. The heat treatment method according to claim 1, wherein The heating rate of the vibration heat treatment is 10-20°C / min.

4. The heat treatment method according to claim 1, wherein The holding temperature of the vibration heat treatment is 250-300°C.

5. The heat treatment method according to claim 1, wherein The treatment time of the vibration heat treatment is 30-90 minutes, and the vibration maintenance time is 60-80% of the treatment time.

6. The heat treatment method according to claim 1, wherein The end point temperature of the water cooling is ≤40°C.

7. The heat treatment method according to claim 1, wherein The heating rate of the heat preservation treatment is 7-15°C / min.

8. The heat treatment method according to claim 1, wherein The heat preservation treatment is carried out at 330-340° C. for 120-240 minutes.

9. The heat treatment method according to claim 1, wherein The air cooling end point temperature is ≤40°C.

10. A gas distribution plate, characterized in that: The gas distribution plate is made of 6061 aluminum alloy obtained by the heat treatment method according to any one of claims 1 to 9.

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