Conveying device of electrolytic copper foil surface treatment equipment

Abstract

The invention relates to a transmission device of electrolytic copper foil surface treatment equipment, which comprises a roller body assembly, the roller body assembly comprises an inner side roller body and an outer side roller body, the side wall of the inner side roller body is provided with a vacuum groove, the outer side roller body is cylindrical and rotatably and coaxially sleeves the outer side of the inner side roller body, and the side wall of the outer side roller body dynamically seals a groove opening of the vacuum groove to form a vacuum cavity; a roller surface hydrophobic layer is arranged on the outer surface of the outer side roller body, a plurality of vacuum adsorption holes are uniformly distributed in the side wall of the outer side roller body, and the vacuum adsorption holes are communicated with the vacuum cavity when passing through a notch of the vacuum groove; the vacuumizing assembly comprises a gas-liquid separator and a vacuum pump, the gas-liquid separator is connected with the vacuum cavity and used for separating liquid in gas exhausted from the vacuum cavity, and the vacuum pump is connected with the gas-liquid separator and used for vacuumizing the vacuum cavity; and the heating assembly is used for heating the outer roller body. According to the invention, a compression roller can be omitted, the copper foil is prevented from being damaged while slipping, the anti-pollution capability is extremely high, and the foil surface pollution and the staff cleaning frequency can be reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of circuit copper foil, in particular to a transmission device of electrolytic copper foil surface treatment equipment. Background Art

[0002] Electrolytic copper foil is a crucial material in the manufacture of copper-clad laminates (CCLs), printed circuit boards (PCBs), and lithium-ion batteries. In today's rapidly developing electronics industry, electrolytic copper foil has been called the "neural network" for signal and power transmission and communication in electronic products. In the surface treatment process of electrolytic copper foil, guide rollers are key components that support and guide the foil through the various processing steps. Traditional processes rely on mechanical pressure from pressure rollers to increase the contact force between the guide rollers and the foil, but this approach has significant drawbacks when processing copper foils of specialized specifications. For HVLP copper foil (rough foil Rz ≤ 1.0μm) with minimal surface roughness or ultra-thin copper foil with a thickness of ≤12μm, the excessively smooth surface significantly reduces the coefficient of friction, making it highly susceptible to slippage under high-speed operation (line speeds ≥ 15m / min). This slippage not only causes tension fluctuations during production but can also lead to a range of quality issues, such as scratches on the foil surface and uneven adhesion of the treatment solution.

[0003] To solve the problem of copper foil slippage, existing technologies mainly use two methods: one is to increase the roller surface roughness of the guide roller through a mechanical grinding process. Although this method can improve the friction coefficient, it will form obvious plow-shaped damage on the surface of the copper foil, seriously affecting product quality; the other is to compensate for insufficient friction by optimizing the tension control system. However, this method is limited by the tensile strength of the copper foil itself. Excessive tension can easily cause the copper foil to break, which cannot meet actual production needs. In addition, neither of these two methods can fundamentally solve the stability problem of extremely thin copper foil during high-speed processing. Therefore, how to effectively prevent slippage while ensuring the surface quality of the copper foil has become a technical problem that needs to be solved urgently in the current electrolytic copper foil surface treatment process. Summary of the Invention

[0004] To this end, the present invention provides a transmission device for electrolytic copper foil surface treatment equipment, which prevents the copper foil from slipping without damaging the copper foil and has strong anti-pollution ability.

[0005] In order to solve the above technical problems, the present invention provides a transmission device for electrolytic copper foil surface treatment equipment, comprising: The roller assembly comprises an inner roller body and an outer roller body, wherein a vacuum groove is provided on the side wall of the inner roller body, the notch of the vacuum groove passes through the outer side surface of the inner roller body, the outer roller body is cylindrical and rotatably and coaxially sleeved on the outer side of the inner roller body, the side wall of the outer roller body dynamically seals the notch of the vacuum groove to form a vacuum cavity, the outer surface of the outer roller body is provided with a roller surface hydrophobic layer, and the side wall of the outer roller body is uniformly distributed with a plurality of vacuum adsorption holes, the vacuum adsorption holes pass through the outer side surface and the inner side surface of the outer roller body, and the vacuum adsorption holes are connected to the vacuum cavity when passing through the notch of the vacuum groove; a vacuum pumping assembly comprising a gas-liquid separator and a vacuum pump, wherein the gas-liquid separator is connected to the vacuum chamber and is used to separate liquid from the gas exhausted from the vacuum chamber, and the vacuum pump is connected to the gas-liquid separator and is used to vacuum the vacuum chamber; The heating component is used to heat the outer roller body.

[0006] Furthermore, the roller surface hydrophobic layer is deposited by co-sputtering a carbon target and CF4 using PVD magnetron sputtering deposition, forming a nano-scale fluorinated diamond-like carbon film on the surface of the outer roller body, wherein the atomic percentage of fluorine is between 10% and 20%, and the carbon is mainly in an sp³ bond diamond structure.

[0007] Furthermore, the vacuum adsorption hole is a conical hole, the small port of the conical hole is located on the outer side of the outer roller body, and the large port of the conical hole is located on the inner side of the outer roller body. The aperture of the large port of the conical hole is 75-85μm, the aperture of the small port of the conical hole is 37-43μm, and the hole depth of the conical hole is 15-20mm.

[0008] Furthermore, the inner wall of the vacuum adsorption hole is provided with an inner hydrophobic layer.

[0009] Furthermore, the hydrophobic layer in the pores is formed as a diamond-like coating by chemical vapor deposition, with a thickness of 2-3 μm and a surface roughness Ra≤0.2 μm.

[0010] Furthermore, a heating cavity is provided on the side wall of the outer roller body, the heating cavity is staggered with the vacuum adsorption hole, and the heating component includes a heating wire provided in the heating cavity.

[0011] Furthermore, the heating chambers extend along the axial direction of the outer roller body and are evenly distributed along the circumference of the outer roller body.

[0012] Furthermore, the inner roller body is a stepped shaft, and the stepped shaft is provided with a hollow channel extending in the axial direction, the two ends of the hollow channel respectively pass through the two end surfaces of the stepped shaft, and the bottom of the vacuum groove is connected to the hollow channel; The roller assembly also includes a vacuum pipe, which is connected to the hollow channel. One end of the vacuum pipe is closed, and the other end of the vacuum pipe is connected to the gas-liquid separator. The side wall of the vacuum pipe is provided with a side wall opening, and the side wall opening is connected to the bottom of the vacuum tank.

[0013] Furthermore, one end of the outer roller body along the axial direction is provided with a belt groove extending along the circumferential direction thereof.

[0014] Furthermore, the vacuum pumping assembly further includes a pressure sensor and a proportional flow valve, and the pressure sensor and the proportional flow valve are connected between the gas-liquid separator and the vacuum pump.

[0015] The above technical solution of the present invention has the following advantages over the existing technology: the transmission device of the electrolytic copper foil surface treatment equipment disclosed in the present invention can, first, eliminate the need for a pressure roller; second, by providing vacuum adsorption holes, a uniform negative pressure field is formed on the roller surface of the outer roller, increasing the positive pressure at the interface between the outer roller and the copper foil, thereby improving its friction, solving the problem of slipping of low-roughness / ultra-thin copper foil during surface treatment, while avoiding surface damage caused by traditional mechanical contact, and breaking through the strength limit of the copper foil; third, by providing a roller surface hydrophobic layer on the surface of the outer roller, liquid infiltration and residue on the roller surface can be reduced, preventing liquid residue from contaminating the copper foil, reducing the frequency of cleaning and the workload of maintenance. Fourth, by providing a heating component to heat the outer roller, electrolyte crystallization brought by the foil surface can be avoided, which can lead to blockage of the adsorption holes. Fourth, by chemically depositing a diamond-like coating on the inner wall of the vacuum adsorption hole, crystallized droplets easily roll off after contact, and the amount of crystallization attached to the hole wall can be reduced by 90%, with extremely strong anti-pollution ability. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to make the contents of the present invention more clearly understood, the present invention is further described in detail below based on specific embodiments of the present invention in conjunction with the accompanying drawings.

[0017] Figure 1 A schematic diagram of a transmission device disclosed in the present invention; Figure 2 Schematic diagram of the outer roller body disclosed in the present invention; Figure 3 A partial cross-sectional view of the outer roller body disclosed in the present invention; Figure 4 This is a schematic diagram of the connection between the inner roller body and the vacuum pipe disclosed in the present invention; Figure 5 This is a schematic diagram of the vacuum pipeline disclosed in the present invention.

[0018] Explanation of the reference numerals in the specification: 1. Roller assembly; 11. Inner roller; 111. Vacuum groove; 12. Outer roller; 121. Hydrophobic layer on roller surface; 122. Vacuum adsorption hole; 123. Hydrophobic layer in hole; 124. Heating chamber; 125. Belt groove; 13. Vacuum pipe; 131. Side wall opening; 2. Vacuum assembly; 21. Gas-liquid separator; 22. Vacuum pump; 23. Pressure sensor; 24. Proportional flow valve. DETAILED DESCRIPTION

[0019] The present invention will be further described below with reference to the accompanying drawings and specific embodiments so that those skilled in the art can better understand the present invention and implement it. However, the embodiments are not intended to limit the present invention.

[0020] See also Figures 1 to 5 As shown, an embodiment of the transmission device of the electrolytic copper foil surface treatment equipment provided by the present invention.

[0021] The transmission device includes: The roller assembly 1 includes an inner roller body 11 and an outer roller body 12. The inner roller body 11 is provided with a vacuum groove 111. The groove of the vacuum groove 111 passes through the outer side of the inner roller body 11. The outer roller body 12 is cylindrical and rotatably and coaxially sleeved on the outer side of the inner roller body 11. The side wall of the outer roller body 12 dynamically seals the groove of the vacuum groove 111 to form a vacuum chamber. The outer surface of the outer roller body 12 is provided with a roller surface hydrophobic layer 121. The side wall of the outer roller body 12 is uniformly distributed with a plurality of vacuum adsorption holes 122. The vacuum adsorption holes 122 pass through the outer and inner sides of the outer roller body 12. The vacuum adsorption holes 122 are connected to the vacuum chamber when passing through the groove of the vacuum groove 111. The vacuum pumping assembly 2 includes a gas-liquid separator 21 and a vacuum pump 22. The gas-liquid separator 21 is connected to the vacuum chamber and is used to separate the liquid from the gas discharged from the vacuum chamber. The vacuum pump 22 is connected to the gas-liquid separator 21 and is used to evacuate the vacuum chamber. The heating component is used to heat the outer roller body 12 .

[0022] In the above description, the inner roller 11 and outer roller 12 are coaxially sleeved. The dynamic sealing structure means that when the outer roller 12 rotates and sleeves onto the inner roller 11, the sidewall of the outer roller 12 continuously covers the notch of the vacuum groove 111, forming a space that is connected only to the vacuum assembly 2 and the vacuum suction holes 122. The roller surface hydrophobic layer 121 repels water molecules (hydrophobicity). Its surface energy is low, and its contact angle with water is typically greater than 90° (the larger the contact angle, the stronger the hydrophobicity). This property, derived from the chemical composition and microstructure of the material surface, makes it less susceptible to water wetting and even allows water droplets to roll across the surface and carry away stains (e.g., the "lotus effect"). The gas-liquid separator 21 separates gas and liquid mixtures based on the differences in their physical properties (such as density, inertia, and surface tension). The vacuum pump 22 physically expels the gas from the enclosed space, reducing the pressure within the space to below atmospheric pressure, creating a vacuum. The aforementioned heating assembly heats the outer roller 12 to a set temperature.

[0023] Specifically, multiple roller assemblies 1 support and guide the copper foil along a preset path. The area where the roller assemblies 1 contact the copper foil is configured to have vacuum suction. Specifically, the area where the outer roller 12 passes through the notch of the vacuum slot 111 is configured to contact the copper foil. When residual electrolyte on the copper foil passes through the roller surface hydrophobic layer 121, the vast majority of the electrolyte is intercepted before entering the vacuum chamber due to the layer's ability to prevent liquid intrusion. The residual electrolyte is less likely to adhere to the outer roller 12 and will continue to move along with the copper foil or quickly exit the vacuum suction holes 122.

[0024] Through the above technical solution, first, by providing vacuum adsorption holes, a uniform negative pressure field is formed on the roller surface of the outer roller, increasing the positive pressure at the interface between the outer roller and the copper foil, thereby improving its friction, solving the problem of slipping of low-roughness / ultra-thin copper foil during surface treatment, while avoiding surface damage caused by traditional mechanical contact, and breaking through the strength limit of copper foil; second, by providing a roller surface hydrophobic layer on the surface of the outer roller, the roller surface can be reduced. Liquid infiltration and residue can be reduced, preventing liquid residue from contaminating the copper foil, reducing the frequency of cleaning and maintenance workload. Third, by providing a heating component to heat the outer roller, electrolyte crystallization caused by the foil surface can be prevented from clogging the adsorption holes. Fourth, by chemically depositing a diamond-like coating on the inner wall of the vacuum adsorption hole, crystallized droplets easily roll off after contact, and the amount of crystallization attached to the hole wall can be reduced by 90%. The provision of a roller surface hydrophobic layer and an adsorption hole hydrophobic layer reduces the amount of liquid intrusion, enhances anti-pollution capabilities, and prevents the vacuum adsorption hole 122 from being clogged.

[0025] In this embodiment, the roller surface hydrophobic layer 121 is deposited by co-sputtering a carbon target and CF4 using PVD magnetron sputtering, thereby forming a nano-scale fluorinated diamond-like carbon film on the surface of the outer roller body 12, wherein the atomic percentage of fluorine is between 10% and 20%, and the carbon is mainly in an sp³ bond diamond structure.

[0026] Sputtering, as mentioned above, involves bombarding a target surface with high-energy ions (such as Ar), causing target atoms / molecules to escape and deposit on a substrate to form a thin film. Co-sputtering, on the other hand, involves using multiple targets (or combined with a gas source) simultaneously in a single deposition environment to produce multicomponent thin films, enabling precise control of film composition and structure. The carbon target is a diamond target, serving as a carbon source and providing a carbon skeleton with sp² or sp³ bonds. CF₄ gas decomposes in the plasma into reactive species such as CF₄ (x = 1-3), C, and F, which co-deposit with carbon atoms generated by sputtering the carbon target to form fluorinated carbon films (such as CF films and fluorinated diamond-like carbon films). The introduction of CF₄ not only provides fluorine, but the high-energy particles produced by its decomposition also influence surface etching and atomic rearrangement during deposition, thereby regulating the film's chemical composition (such as the C / F ratio) and physical properties (such as hardness and coefficient of friction). The atomic percentage of fluorine is 10%, 11%, 12%, 13%, 14%, 15%, 16%, 17%, 18%, 19%, or 20%.

[0027] The hydrophobic layer on the roller surface prepared through the above technical solution contains an amorphous composite structure of sp³ carbon bonds and CF bonds, which combines the high hardness of DLC (10-30 GPa) and the low friction coefficient of fluoride.

[0028] In this embodiment, the above-mentioned vacuum adsorption hole 122 is a conical hole, the small port of the above-mentioned conical hole is located on the outer surface of the above-mentioned outer roller body 12, and the large port of the above-mentioned conical hole is located on the inner side surface of the above-mentioned outer roller body 12. The aperture of the large port of the above-mentioned conical hole is 75-85μm, the aperture of the small port of the above-mentioned conical hole is 37-43μm, and the hole depth of the above-mentioned conical hole is 15-20mm.

[0029] In the foregoing, a tapered hole refers to a through-hole structure with a gradually decreasing diameter along the radial direction of the outer roller body 12. This can be achieved through machining or laser drilling. Specifically, the diameter of the large end of the tapered hole is 75 μm, 80 μm, or 85 μm, the diameter of the small end of the tapered hole is 37 μm, 40 μm, or 43 μm, and the depth of the tapered hole is 15 mm, 16 mm, 17 mm, 16 mm, 19 mm, or 20 mm.

[0030] Specifically, the vacuum adsorption hole 122 is a tapered hole with an outer end smaller than an inner end. While ensuring the adsorption force, the electrolyte is not easy to enter the vacuum adsorption hole 122 .

[0031] Through the above technical solution, by setting the vacuum adsorption hole 122 as a tapered hole, the adsorption force is ensured while further reducing the amount of liquid entering the vacuum adsorption hole 122.

[0032] In this embodiment, an inner hole wall of the vacuum adsorption hole 122 is provided with an inner hole hydrophobic layer 123 .

[0033] In the above, the intra-pore hydrophobic layer 123 has a property of repelling water molecules (hydrophobicity).

[0034] Through the above technical solution, a smooth non-polar surface is formed in the vacuum adsorption hole 122, and the crystal droplets are easy to roll off after contact, and the amount of crystal attachment is reduced by 80%.

[0035] In this embodiment, the hydrophobic layer 123 in the pores is formed by chemical vapor deposition to form a diamond-like coating with a thickness of 2-3 μm and a surface roughness Ra≤0.2 μm.

[0036] In the above description, chemical vapor deposition (CVD) was used to form the aforementioned hydrophobic layer within the pores. Compared to sputtering, chemical vapor deposition (CVD) is more suitable for deposition within the pores due to its excellent gas diffusion, high film uniformity, and ability to achieve conformal coverage on surfaces with complex geometries through precursor decomposition. The aforementioned diamond-like coating has a thickness of 2μm, 2.5μm, or 3μm. The thickness of the diamond-like coating ensures a hydrophobic effect without affecting the aperture of the vacuum adsorption pores. The diamond-like coating also has a low surface roughness, which reduces the adhesion of the electrolyte.

[0037] Through the above technical solution, a hydrophobic layer is provided in the vacuum adsorption hole to prevent the electrolyte from adhering to the vacuum adsorption hole, making it easier for the electrolyte to be sucked into the gas-liquid separator for treatment.

[0038] In this embodiment, a heating cavity 124 is provided on the side wall of the outer roller body 12 . The heating cavity 124 is staggered with the vacuum adsorption hole 122 . The heating component includes a heating wire provided in the heating cavity 124 .

[0039] As described above, the heating chamber 124 is defined in the sidewall of the outer roller 12 and contains a built-in heating wire for temperature control. The heating chamber 124 is staggered from the vacuum holes 122 to avoid spatial overlap, prevent interference between the heating wire and the vacuum holes, and minimize the effects of high temperatures on the vacuum system (negative pressure fluctuations caused by thermal expansion of the gas).

[0040] Through the above technical solution, the outer roller body 12 is directly heated by the heating wire, the structure is compact, and the heating effect is good.

[0041] In this embodiment, the heating chambers 124 extend along the axial direction of the outer roller body 12 and are evenly distributed along the circumference of the outer roller body 12 .

[0042] In the above description, the heating chamber 124 extends axially along the outer roller body 12. The heating chamber 124 extends through or in sections along the roller axis (lengthwise), covering the entire length of the roller body or a designated area, ensuring axial temperature uniformity. Multiple heating chambers 124 are evenly distributed along the circumference of the outer roller body, and are spaced at equal angles around the circumference of the outer roller body 12 (e.g., n heating chambers spaced 360° / n apart), achieving symmetrical circumferential temperature field.

[0043] Through the above technical solution, axial extension solves the temperature difference in the longitudinal direction, and circumferential uniform distribution eliminates circumferential thermal deviation, which is suitable for processes with high requirements for temperature consistency.

[0044] In this embodiment, the inner roller body 11 is a stepped shaft, which is provided with a hollow channel extending in the axial direction. The two ends of the hollow channel respectively penetrate the end surfaces of the stepped shaft, and the bottom of the vacuum groove 111 is connected to the hollow channel. The roller assembly 1 further includes a vacuum pipe 13, which is connected to the hollow channel. One end of the vacuum pipe 13 is closed, and the other end of the vacuum pipe 13 is connected to the gas-liquid separator 21. The side wall of the vacuum pipe 13 is provided with a side wall opening 131, and the side wall opening 131 is connected to the bottom of the vacuum tank 111.

[0045] In the above description, a stepped shaft refers to an integral structure consisting of shaft segments of varying diameters, with a stepped transition separating the shaft body from the shaft head. The shaft body, the larger diameter middle section of the stepped shaft, serves as the central location for the vacuum slots 111 and the adsorption area. The shaft head, the smaller diameter support segments at each end of the stepped shaft, serves to connect to external equipment and transmit torque. The vacuum conduit 13 can be a rigid conduit.

[0046] Specifically, the stepped shaft structure designates the shaft body and shaft head as separate functional areas. The shaft body serves as the core carrier of the vacuum adsorption system, forming a dynamic sealed cavity with the outer roller body 12 through the vacuum groove 111. A hollow channel extends from the inner wall of the vacuum groove 111 to the end face of the shaft head, allowing the vacuum assembly 2 to be directly connected to the hollow channel through the end face of the shaft head.

[0047] Through the above technical solution, the hollow channel and the vacuum pipe 13 are provided to achieve the connection between the vacuum assembly 2 and the vacuum tank 111, thereby reducing the risk of gas leakage.

[0048] In this embodiment, a belt groove 125 extending along the circumferential direction is provided at one end of the outer roller body 12 along the axial direction.

[0049] As mentioned above, belt groove 125 refers to an annular groove structure circumferentially extending along the axial end of the outer roller body. The groove bottom diameter matches the cross-sectional dimensions of the transmission belt. This structure provides a stable contact surface for the transmission belt, increasing friction and preventing slippage during transmission.

[0050] Specifically, after the drive belt is inserted into the belt groove 125, the groove wall constrains the belt side to form a stable power transmission path. When the external drive device drives the belt to rotate, the friction between the belt and the groove wall evenly transmits the rotational torque to the outer roller body 12.

[0051] Through the above technical solution, a belt groove 125 is set. Since the belt drive has elastic deformation ability, it can absorb instantaneous load fluctuations during high-speed rotation, avoid the impact generated by the rigid connection from being transmitted to the roller surface, and achieve stepless speed change.

[0052] In this embodiment, the vacuum pumping assembly 2 further includes a pressure sensor 23 and a proportional flow valve 24 . The pressure sensor 23 and the proportional flow valve 24 are connected between the gas-liquid separator 21 and the vacuum pump 22 .

[0053] In the preceding illustration, the gas-liquid separator 21 first separates the pumped medium (a mixture of gas and liquid) to prevent liquid from entering the vacuum pump and causing damage. A pressure sensor 23 monitors the vacuum pressure between the gas-liquid separator outlet and the vacuum pump inlet in real time. The proportional flow valve 24 dynamically adjusts the gas flow rate based on feedback from the pressure sensor, thereby controlling the pressure stability of the vacuum system. The vacuum pump 22 ultimately generates vacuum suction, driving the entire system.

[0054] Through the above technical solution, the pressure sensor 23 and the proportional flow valve 24 are provided to monitor the pressure changes and adjust the pressure in real time.

[0055] The specific structure of the above transmission device is as follows: Outer roller body Roller body structure: Φ300mm×1500mm cylindrical hollow structure, made of 316L stainless steel (implementing ASTM A240 standard, corrosion resistance grade ≥NSS 1000h).

[0056] Belt Groove: A belt groove is designed on one end of the outer roller. A motor is installed next to the roller assembly, and another pulley is mounted on the motor output shaft. The outer roller and motor are connected by a belt. When the motor is started, the friction of the belt drives the outer roller to rotate, achieving stepless speed change.

[0057] Vacuum adsorption hole array: The roller surface of the outer roller body is laser-processed with micron-level conical vacuum adsorption holes. The vacuum adsorption holes are distributed in a ring array (circumferential hole spacing Pθ=2mm, axial hole spacing Pz=2mm), the number of holes in a single circle N=π×(Φ300-2×L×sinα) / Pθ (α=cone angle 20°), and the effective opening area length is 1300mm (100mm hole-free area is reserved at both ends).

[0058] Inner roller body: Made of SS304 stainless steel, the center shaft is fixed to the bearing seat through flanges at both ends (bolt specification M12×60, pre-tightening torque 40N·m), ensuring static support stiffness ≥50N / μm.

[0059] The vacuum chamber is formed by the outer roller's inner wall, the inner roller's vacuum groove (gap δ = 0.2mm), and a vacuum pipe. The connection features an R5mm arc transition (surface roughness Ra ≤ 1.6μm) and is equipped with a double-lip fluororubber seal (compression rate 15%-20%) to ensure a leakage rate of ≤ 5L / min. One end of the vacuum pipe is closed, and the other end, through a flexible hose, is equipped with a gas-liquid separator (centrifugal separator, separation efficiency ≥ 99.5%), a pressure sensor (accuracy ±0.1kPa, range -100kPa to 0kPa), a proportional flow valve (response time ≤ 50ms), and a rotary vane vacuum pump (ultimate vacuum -95kPa, pumping rate 20m³ / h).

[0060] Vacuum tank: formed by the inner roller body, the adsorption area is 1300mm long and the effective adsorption area is about 0.12m 2 , inner wall roughness Ra≤0.8μm.

[0061] Intelligent control system: integrated PLC controller (sampling period 10ms), real-time acquisition of pressure sensor data, adjustment of vacuum pump power through PID algorithm, and dynamic control of vacuum degree from -20kPa to -80kPa.

[0062] Safety protection module: When the vacuum degree is lower than -85kPa or the adsorption hole blockage rate is ≥10%, the sound and light alarm will be automatically triggered and the line speed will be reduced to 5m / min.

[0063] The dynamic and static coupling structure of the outer roller and the inner roller is adopted to decouple the transmission function from the vacuum adsorption function. The outer roller is rotated by a synchronous belt with an adjustable speed. The inner roller is integrated with a vacuum cavity to ensure that the adsorption area is fixed and the vacuum path is sealed, avoiding the distortion and leakage of the vacuum pipeline caused by the traditional overall rotating structure, and the vacuum holding efficiency is improved by 92%.

[0064] The adsorption pore adopts a truncated cone structure with an inlet diameter of 80μm and an outlet diameter of 40μm. The inner wall of the pore is coated with a 2μm thick PTFE hydrophobic coating (surface energy ≤18mN / m), and the capillary effect is used to prevent liquid water from intruding (critical intrusion pressure ≥65kPa).

[0065] The specific advantages are: non-contact friction increase: vacuum adsorption increases the positive pressure of the interface by 5-8 times, and the friction force is increased to 3-5 times that of the traditional process, breaking through the strength limit of copper foil; zero surface damage: roller surface roughness Ra≤0.6μm, adsorption force is evenly distributed (deviation ≤±5%), avoiding scratches caused by mechanical contact; strong anti-pollution ability: the combination of tapered holes + hydrophobic coating reduces liquid intrusion by more than 90%, adapting to high-impurity electrolyte environments; intelligent dynamic control: vacuum adjustment response time ≤1s, supporting rapid switching of copper foils of multiple specifications (thickness 8-35μm, roughness Rz0.5-2.0μm).

[0066] Example 1: Standard working condition application Parameter configuration: Roller material 316L stainless steel, adsorption pore density 250 pores / cm², vacuum pump power 2.2kW, processing 12μm HVLP copper foil (raw foil Rz=0.8μm), line speed 17m / min, set vacuum degree -50kPa.

[0067] Performance data: The positive pressure N at the roller-foil interface is increased from 5N in the traditional process to 35N (vacuum adsorption force F = ΔP・S = 50kPa × 0.07m² = 35N), the friction force F = μ・N = 0.15 × 35 = 5.25N (meeting the ≥3N requirement), the slip frequency is reduced from 15 times / hour to 0, the copper foil surface roughness Rz is maintained at 1.2μm (±0.1μm fluctuation), and the treatment liquid adhesion uniformity CV value is ≤3%.

[0068] Obviously, the above embodiments are merely examples for clarity of explanation and are not intended to limit the implementation methods. Those skilled in the art will readily appreciate that other variations or modifications based on the above descriptions are possible. It is not necessary and impossible to enumerate all implementation methods here. Obvious variations or modifications arising therefrom remain within the scope of protection of the present invention.

Claims

1. A transmission device for electrolytic copper foil surface treatment equipment, characterized in that: include: The roller assembly comprises an inner roller body and an outer roller body, wherein a vacuum groove is provided on the side wall of the inner roller body, the notch of the vacuum groove passes through the outer side surface of the inner roller body, the outer roller body is cylindrical and rotatably and coaxially sleeved on the outer side of the inner roller body, the side wall of the outer roller body dynamically seals the notch of the vacuum groove to form a vacuum cavity, the outer surface of the outer roller body is provided with a roller surface hydrophobic layer, and the side wall of the outer roller body is uniformly distributed with a plurality of vacuum adsorption holes, the vacuum adsorption holes pass through the outer side surface and the inner side surface of the outer roller body, and the vacuum adsorption holes are connected to the vacuum cavity when passing through the notch of the vacuum groove; a vacuum pumping assembly comprising a gas-liquid separator and a vacuum pump, wherein the gas-liquid separator is connected to the vacuum chamber and is used to separate liquid from the gas exhausted from the vacuum chamber, and the vacuum pump is connected to the gas-liquid separator and is used to vacuum the vacuum chamber; The heating component is used to heat the outer roller body.

2. The transmission device according to claim 1, characterized in that The roller surface hydrophobic layer is deposited by PVD magnetron sputtering to co-sputter a carbon target and CF4, forming a nano-scale fluorinated diamond-like carbon film on the surface of the outer roller body, wherein the atomic percentage of fluorine is between 10% and 20%, and the carbon is mainly in an sp³ bond diamond structure.

3. The transmission device according to claim 1, characterized in that The vacuum adsorption hole is a conical hole, the small end of the conical hole is located on the outer side of the outer roller body, and the large end of the conical hole is located on the inner side of the outer roller body. The aperture of the large end of the conical hole is 75-85μm, the aperture of the small end of the conical hole is 37-43μm, and the depth of the conical hole is 15-20mm.

4. The transmission device according to claim 1, characterized in that The inner hole wall of the vacuum adsorption hole is provided with an inner hole hydrophobic layer.

5. The transmission device according to claim 4, characterized in that The hydrophobic layer in the pores is formed into a diamond-like coating by chemical vapor deposition, with a thickness of 2-3 μm and a surface roughness Ra≤0.2 μm.

6. The transmission device according to claim 1, characterized in that A heating cavity is provided on the side wall of the outer roller body. The heating cavity is staggered with the vacuum adsorption hole. The heating component includes a heating wire provided in the heating cavity.

7. The transmission device according to claim 6, characterized in that The heating chambers extend along the axial direction of the outer roller body and are evenly distributed along the circumference of the outer roller body.

8. The transmission device according to claim 1, characterized in that The inner roller body is a stepped shaft, and the stepped shaft is provided with a hollow channel extending in the axial direction. The two ends of the hollow channel respectively penetrate the two end surfaces of the stepped shaft, and the bottom of the vacuum groove is connected to the hollow channel; The roller assembly also includes a vacuum pipe, which is connected to the hollow channel. One end of the vacuum pipe is closed, and the other end of the vacuum pipe is connected to the gas-liquid separator. The side wall of the vacuum pipe is provided with a side wall opening, and the side wall opening is connected to the bottom of the vacuum tank.

9. The transmission device according to claim 1, characterized in that One end of the outer roller body along the axial direction is provided with a belt groove extending along the circumferential direction thereof.

10. The transmission device according to claim 1, characterized in that The vacuum pumping assembly further includes a pressure sensor and a proportional flow valve, wherein the pressure sensor and the proportional flow valve are connected between the gas-liquid separator and the vacuum pump.

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