Coating roller structure and coating equipment thereof

Abstract

The invention relates to the technical field of vacuum coating, and discloses a coating roller structure and coating equipment thereof.The coating roller structure comprises a roller body, a first dielectric layer and a second dielectric layer, and the first dielectric layer and the second dielectric layer are sequentially attached to the roller body from inside to outside in the radial direction; the first dielectric layer comprises a first porous ceramic material and an insulating high polymer material, and the second dielectric layer comprises a second porous ceramic material, so that a porous ceramic and insulating high polymer material compounded double-layer dielectric structure is constructed; a double-layer dielectric structure compounded by a porous ceramic material and an insulating high polymer material is constructed, so that the heat resistance and the insulating strength of the surface of the coating roller can be effectively improved under the working conditions of high-temperature evaporation and high-energy sputtering, and the problem that the performance of a dielectric layer is reduced due to local melting or breakdown of a ceramic meltallizing layer in the prior art is solved; and the continuity of the coating process and the consistency of products are guaranteed, and good industrial application prospects are achieved.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum coating, and in particular to a coating roller structure and coating equipment thereof. Background Art

[0002] Roll-to-roll vacuum coating processes are widely used in optoelectronic displays, functional thin films, and other fields. Double-sided magnetron sputtering or evaporation coating of ultra-thin base films, in particular, places high demands on stable film transport and positioning accuracy. As a key component in this process, the coating roller must not only carry and transport the ultra-thin base film but also provide effective cooling and electrostatic adsorption to ensure coating quality and uniformity.

[0003] Currently, the commonly used technical solution is to form a dielectric ceramic spray layer on the surface of the coating roller to achieve electrical insulation and electrostatic adsorption functions. To further improve its insulation performance, it is usually necessary to use epoxy resin sealing treatment on the surface of the ceramic spray layer to reduce porosity and improve insulation resistance and voltage resistance. The above structure can achieve support and stable adsorption of ultra-thin base films to a certain extent, and is suitable for various vacuum coating processes. However, with the continuous development of high-performance ultra-thin base film applications, this type of structure still has the following defects:

[0004] In the magnetron sputtering process, due to the high operating voltage and dense plasma energy, arc discharge on the cold drum surface can easily cause local insulation breakdown in the dielectric ceramic melt-sprayed layer, or lead to degradation of the insulation resistance. The arc discharge voltage can reach 3000V to 5000V. If the dielectric layer's withstand voltage is insufficient, localized thermal damage can easily occur in the arcing area, causing the epoxy resin sealing material to melt and evaporate, thereby destroying the insulation layer structure. In this case, leakage paths may form between the conductive film and the dielectric layer, ultimately leading to surface defects in the film layer and compromising product quality.

[0005] During the evaporation coating process, high-temperature material emitted by the evaporation source forms splashes and deposits on the surface of the cooling drum. This can also cause localized melting and evaporation of the sealing material on the surface of the ceramic spray coating, degrading the insulation performance of the dielectric layer. In particular, areas where high-temperature splashes are concentrated can easily cause thermal damage to the sealing material, resulting in reduced insulation resistance and the formation of conductive paths. This can cause surface anomalies or defects in the film, seriously affecting the consistency and reliability of the coating. Summary of the Invention

[0006] In view of this, the present invention provides a coating roller structure and a coating equipment thereof to solve the problem that a dielectric ceramic sprayed layer is formed on the surface of the coating roller in the prior art. When arc discharge occurs on the surface of the cold drum, it is easy to cause local insulation breakdown of the dielectric ceramic sprayed layer, and the high-temperature material emitted by the evaporation source forms splash deposition on the surface of the cold drum, which is easy to cause local melting and evaporation of the sealing material on the surface of the dielectric ceramic sprayed layer, resulting in a decrease in the insulation performance of the dielectric layer, thereby affecting the consistency and reliability of the coating.

[0007] In order to solve the above technical problems, the technical solutions of the present invention are as follows:

[0008] In a first aspect, the present invention provides a coating roller structure, comprising: a roller body and a first dielectric layer and a second dielectric layer attached to the roller body in sequence from the inside to the outside in a radial direction; the first dielectric layer comprises a first porous ceramic material and an insulating polymer material, in which the volume proportion of the first porous ceramic material is 97% to 99.8%, and the volume proportion of the insulating polymer material is 0.2% to 3%; the second dielectric layer comprises a second porous ceramic material.

[0009] It has the following advantages:

[0010] The coating roller structure provided by the present invention sequentially arranges a first dielectric layer and a second dielectric layer on the surface of the roller body, and the first dielectric layer includes a first porous ceramic material and an insulating polymer material, and the second dielectric layer includes a second porous ceramic material, thereby constructing a double-layer dielectric structure of a composite of porous ceramic and insulating polymer materials; during the base film evaporation process, high-temperature splashes released by the evaporation source can only enter and be retained in the pore structure of the porous ceramic material in the second dielectric layer, thereby preventing the high-temperature material from directly contacting and melting the insulating polymer material in the first dielectric layer, significantly improving the thermal stability and insulation performance of the composite dielectric layer structure in a high-temperature environment, and effectively suppressing the degradation of insulation resistance and withstand voltage performance; in addition, during the base film magnetron sputtering process, when arc discharge occurs and breaks through the base film, the porous ceramic material of the second dielectric layer can absorb and disperse the arc energy, so that the arc discharge cannot penetrate into the first dielectric layer, effectively preventing the insulating polymer material in the first dielectric layer from being broken down or carbonized, thereby enhancing the electrical insulation stability of the overall dielectric structure and improving the reliability and consistency of the coating process.

[0011] The present invention constructs a double-layer dielectric structure composed of porous ceramic materials and insulating polymer materials, which can effectively improve the heat resistance and insulation strength of the coating roller surface under high-temperature evaporation and high-energy sputtering conditions, overcomes the problem of dielectric layer performance degradation caused by local melting or breakdown of the ceramic spray layer in the existing technology, ensures the continuity of the coating process and the consistency of the product, and has good industrial application prospects.

[0012] According to an embodiment of the first aspect of the present invention, the first porous ceramic material and the second porous ceramic material are both aluminum oxide, and the insulating polymer material is epoxy resin or silicone resin.

[0013] According to an embodiment of the first aspect of the present invention, the first porous ceramic material and the second porous ceramic material both include alumina and titanium dioxide. In the first porous ceramic material and the second porous ceramic material, the mass proportion of alumina is 90% to 97%, and the mass proportion of titanium dioxide is 3% to 10%; the insulating polymer material is epoxy resin or silicone resin.

[0014] According to an embodiment of the first aspect of the present invention, the first porous ceramic material includes alumina and titanium dioxide, and the second porous ceramic material includes alumina. In the first porous ceramic material, the mass proportion of alumina is 90% to 97%, and the mass proportion of titanium dioxide is 3% to 10%; the insulating polymer material is epoxy resin or silicone resin.

[0015] According to an embodiment of the first aspect of the present invention, the first porous ceramic material includes alumina, and the second porous ceramic material includes alumina and titanium dioxide. In the second porous ceramic material, the mass proportion of the alumina is 90% to 97%, and the mass proportion of the titanium dioxide is 3% to 10%; the insulating polymer material is epoxy resin or silicone resin.

[0016] According to an embodiment of the first aspect of the present invention, the thickness of the first dielectric layer and the second dielectric layer are both 50 μm-200 μm.

[0017] According to the first embodiment of the present invention, the roller body is made of metal or alloy material, specifically titanium or stainless steel.

[0018] According to an embodiment of the first aspect of the present invention, the roller body is provided with a cooling channel, and the cooling channel is suitable for allowing a cooling medium to pass through to cool the roller body.

[0019] According to an embodiment of the first aspect of the present invention, the roller body is electrically connected to a power source, and the power source is suitable for supplying direct current to the roller body.

[0020] In a second aspect, the present invention further provides a coating device, comprising a vacuum chamber, wherein the vacuum chamber is provided with a coating roller structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the specific embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0022] Figure 1 This is a schematic structural diagram of a coating roller structure according to an embodiment of the present invention.

[0023] Description of reference numerals:

[0024] 1. Roller body; 2. First dielectric layer; 3. Second dielectric layer. DETAILED DESCRIPTION

[0025] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without making creative efforts shall fall within the scope of protection of the present invention.

[0026] In the description of the present invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate and simplify the description of the present invention. They are not intended to indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation, and therefore should not be construed as limitations on the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0027] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0028] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0029] Example 1:

[0030] Reference Figure 1 As shown, the coating roller structure includes a roller body 1, and a first dielectric layer 2 and a second dielectric layer 3 radially attached to the roller body 1 from the inside out. The roller body 1 is made of metal or alloy, specifically titanium or stainless steel. The first dielectric layer 2 includes a first porous ceramic material and an insulating polymer material, which is used to fill the pores of the first porous ceramic material. The first porous ceramic material accounts for 97% to 99.8% by volume, and the insulating polymer material accounts for 0.2% to 3% by volume. Preferably, the first porous ceramic material accounts for 97% by volume, and the insulating polymer material accounts for 3% by volume. The first porous ceramic material is aluminum oxide, and the insulating polymer material is epoxy resin. The second porous ceramic material is aluminum oxide.

[0031] The thickness of the first dielectric layer 2 and the second dielectric layer 3 ranges from 50 μm to 200 μm. Specifically, in Example 1, the thickness of the first dielectric layer 2 is 150 μm, and the thickness of the second dielectric layer 3 is 100 μm. A DC power supply was applied to the roller body to conduct an insulation withstand voltage test on the coated roller structure. A continuous voltage of 1000 V was applied, and the measured insulation resistance value was 64 MΩ. The electrostatic adsorption force was 316 Pa. The roller body 1 is provided with a cooling channel suitable for passing a cooling medium to cool the roller body 1.

[0032] Example 2:

[0033] The coating roller structure includes a roller body 1, and a first dielectric layer 2 and a second dielectric layer 3 attached to the roller body 1 in order from the inside to the outside in the radial direction; the roller body 1 is made of metal or alloy material, specifically titanium or stainless steel. The first dielectric layer 2 includes a first porous ceramic material and an insulating polymer material; the volume proportion of the first porous ceramic material is 97% to 99.8%, and the volume proportion of the insulating polymer material is 0.2% to 3%; preferably, the volume proportion of the first porous ceramic material is 98%, and the volume proportion of the insulating polymer material is 2%, the first porous ceramic material includes aluminum oxide and titanium dioxide, and the insulating polymer material is epoxy resin; the second porous ceramic material includes aluminum oxide and titanium dioxide; wherein in the first porous ceramic material, the mass proportion of aluminum oxide is 94%, and the mass proportion of titanium dioxide is 6%; in the second porous ceramic material, the mass proportion of aluminum oxide is 94%, and the mass proportion of titanium dioxide is 6%;

[0034] The thickness of the first dielectric layer 2 and the second dielectric layer 3 ranges from 50 μm to 200 μm. Specifically, in Example 2, the thickness of both the first dielectric layer 2 and the second dielectric layer 3 is 150 μm. A DC current was applied to the roller body via a power supply to conduct an insulation withstand voltage test on the coated roller structure. A continuous voltage of 1000 V was applied, resulting in an insulation resistance of 3 MΩ and an electrostatic adsorption force of 535 Pa. The roller body 1 is provided with a cooling channel adapted to allow a cooling medium to flow therethrough to cool the roller body 1.

[0035] Example 3:

[0036] The coating roller structure includes a roller body 1, and a first dielectric layer 2 and a second dielectric layer 3 attached to the roller body 1 in order from the inside to the outside in the radial direction; the roller body 1 is made of metal or alloy material, specifically titanium or stainless steel. The first dielectric layer 2 includes a first porous ceramic material and an insulating polymer material; the volume proportion of the first porous ceramic material is 97% to 99.8%, and the volume proportion of the insulating polymer material is 0.2% to 3%; preferably, the volume proportion of the first porous ceramic material is 98%, and the volume proportion of the insulating polymer material is 2%, the first porous ceramic material includes aluminum oxide and titanium dioxide, and the insulating polymer material is epoxy resin; the second porous ceramic material includes aluminum oxide and titanium dioxide; wherein in the first porous ceramic material, the mass proportion of aluminum oxide is 94%, and the mass proportion of titanium dioxide is 6%; in the second porous ceramic material, the mass proportion of aluminum oxide is 94%, and the mass proportion of titanium dioxide is 6%;

[0037] The thickness of the first dielectric layer 2 and the second dielectric layer 3 ranges from 50 μm to 200 μm. Specifically, in Example 3, the thickness of both the first dielectric layer 2 and the second dielectric layer 3 is 200 μm. A DC current is applied to the roller body via a power supply to conduct an insulation withstand voltage test on the coated roller structure. A continuous voltage of 1000 V is applied, and the measured insulation resistance value is 12 MΩ; the electrostatic adsorption force is 435 Pa. The roller body 1 is provided with a cooling channel adapted to pass a cooling medium to cool the roller body 1.

[0038] Example 4:

[0039] The coating roller structure includes a roller body 1, and a first dielectric layer 2 and a second dielectric layer 3 radially attached to the roller body 1 from the inside out. The roller body 1 is made of metal or alloy, specifically titanium or stainless steel. The first dielectric layer 2 includes a first porous ceramic material and an insulating polymer material. The volume proportion of the first porous ceramic material is 97% to 99.8%, and the volume proportion of the insulating polymer material is 0.2% to 3%. Preferably, the volume proportion of the first porous ceramic material is 97%, and the volume proportion of the insulating polymer material is 3%. The first porous ceramic material includes aluminum oxide and titanium dioxide, and the insulating polymer material is epoxy resin. The second porous ceramic material includes aluminum oxide. In the first porous ceramic material, the mass proportion of aluminum oxide is 94%, and the mass proportion of titanium dioxide is 6%.

[0040] The thickness of the first dielectric layer 2 and the second dielectric layer 3 ranges from 50 μm to 200 μm. Specifically, in Example 4, the thickness of the first dielectric layer 2 is 150 μm, and the thickness of the second dielectric layer 3 is 100 μm. A DC current was supplied to the roller body via a power supply to conduct an insulation withstand voltage test on the coated roller structure. A continuous voltage of 1000 V was applied, and the measured insulation resistance value was 14 MΩ. The electrostatic adsorption force was 152 Pa. The roller body 1 is provided with a cooling channel adapted to supply a cooling medium to cool the roller body 1.

[0041] Embodiment 5:

[0042] The coating roller structure includes a roller body 1, and a first dielectric layer 2 and a second dielectric layer 3 radially attached to the roller body 1 from the inside out. The roller body 1 is made of metal or alloy, specifically titanium or stainless steel. The first dielectric layer 2 includes a first porous ceramic material and an insulating polymer material. The first porous ceramic material accounts for 97% to 99.8% by volume, and the insulating polymer material accounts for 0.2% to 3% by volume. Preferably, the first porous ceramic material accounts for 97% by volume, and the insulating polymer material accounts for 3% by volume. The first porous ceramic material includes aluminum oxide, and the insulating polymer material is epoxy resin. The second porous ceramic material includes aluminum oxide and titanium dioxide. In the second porous ceramic material, the mass proportion of aluminum oxide is 94%, and the mass proportion of titanium dioxide is 6%.

[0043] The thickness of the first dielectric layer 2 and the second dielectric layer 3 ranges from 50 μm to 200 μm. Specifically, in Example 5, the thickness of the first dielectric layer 2 is 150 μm, and the thickness of the second dielectric layer 3 is 150 μm. A DC current was supplied to the roller body via a power supply to conduct an insulation withstand voltage test on the coated roller structure. A continuous voltage of 1000 V was applied, and the measured insulation resistance value was 15 MΩ. The electrostatic adsorption force was 167 Pa. The roller body 1 is provided with a cooling channel suitable for supplying a cooling medium to cool the roller body 1.

[0044] Comparative Example 1:

[0045] The coating roller structure includes a roller body 1 and a dielectric layer arranged on the roller body 1. The dielectric layer includes a porous ceramic material. Specifically, the porous ceramic material is aluminum oxide. The thickness of the dielectric layer is 250μm. The coating roller structure is subjected to insulation withstand voltage testing. A voltage of 1000V is continuously applied to measure the insulation resistance value to be 10240MΩ; the electrostatic adsorption force is 95Pa.

[0046] Comparative Example 2:

[0047] The coating roller structure includes a roller body 1, and a first dielectric layer 2 and a second dielectric layer 3 radially attached to the roller body 1 from the inside out. The first dielectric layer 2 includes a first porous ceramic material, and the second dielectric layer 3 includes a second porous ceramic material and an insulating polymer material. The first porous ceramic material and the second porous ceramic material are both aluminum oxide. The thickness of the first dielectric layer 2 and the second dielectric layer 3 are both 100 μm. An insulation withstand voltage test was conducted on the coating roller structure by continuously applying a voltage of 1000 V, and the insulation resistance value was measured to be 10970 MΩ. The electrostatic adsorption force was 70 Pa.

[0048] By performing data statistics and analysis on the above embodiments, Table 1 can be obtained:

[0049] Table 1: Coating roller structure insulation withstand voltage test data table

[0050]

[0051] The upper layer in Table 1 is the second dielectric layer 3 , and the lower layer is the first dielectric layer 2 .

[0052] According to the comparative analysis of Comparative Example 1 and Examples 1 to 5 of the present application, when only one dielectric layer is provided, the insulation resistance value of the coating roller structure is relatively high and the electrostatic adsorption force is relatively low. This means that a single dielectric layer cannot suppress the degradation of the insulation resistance and insulation withstand voltage performance, which is not conducive to the electrical insulation stability of the overall dielectric structure and cannot ensure the reliability and consistency of the coating process.

[0053] Comparing Comparative Example 2 with Example 1 of the present application, in the technical solution of Comparative Example 2, a first dielectric layer 2 and a second dielectric layer 3 are sequentially arranged on the surface of the roller body 1. The difference from Example 1 of the present application is that the first dielectric layer 2 in Comparative Example 1 is only provided with a porous ceramic material, and the second dielectric layer 3 is a composite of a porous ceramic material and an insulating polymer material; in Example 1 of the present application, the first dielectric layer 2 includes a first porous ceramic material and an insulating polymer material, and the second dielectric layer 3 includes a second porous ceramic material. The purpose of the arrangement of the present application is that, during the base film evaporation process, the splash of the evaporation source onto the coating roller can only fall into the pores of the porous ceramic material of the first dielectric layer 2. The splash cannot melt the insulating polymer material of the second dielectric layer 3, does not affect the insulation performance of the composite dielectric layer structure, and effectively suppresses the degradation of the insulation resistance and insulation withstand voltage performance. However, in Comparative Example 2, since an insulating polymer material is provided in the first dielectric layer 2, when the evaporation source splashes onto the coating roller, the insulating polymer material is melted, thereby failing to suppress the insulation resistance and improve the insulating performance of the dielectric layer.

[0054] According to the analysis of the first and fourth embodiments of the present invention, the porous material adopts a composite material of aluminum oxide and titanium dioxide, which is beneficial to reducing the insulation resistance value and improving the electrostatic adsorption force; specifically, in the first and fourth embodiments, the thickness of the first dielectric layer 2 and the second dielectric layer 3 are consistent, and in the first and fourth embodiments, the volume proportion of the first porous ceramic material in the first dielectric layer 2 is consistent with the volume proportion of the insulating polymer material, and the first porous ceramic material and the second porous ceramic material of the first embodiment are both made of aluminum oxide; the first porous ceramic material in the fourth embodiment includes aluminum oxide. alumina and titanium dioxide, wherein in the first porous ceramic material, the mass proportion of alumina is 94%, and the mass proportion of titanium dioxide is 6%; the second porous ceramic material includes alumina; after the insulation voltage tests are carried out on the coating roller structures in Example 1 and Example 4, the insulation resistance value of Example 1 is greater than the insulation resistance value of Example 4, but the electrostatic adsorption force of Example 1 is significantly greater than the electrostatic adsorption force of Example 4. It can be seen that the porous ceramic material adopts a composite of alumina and titanium dioxide, which will lead to a decrease in the insulation resistance value, but at the same time will reduce the electrostatic adsorption force.

[0055] According to the analysis of Example 2 and Example 3, the variable parameters in Example 2 and Example 3 are the thickness parameters of the first dielectric layer 2 and the second dielectric layer 3. The thickness of the first dielectric layer 2 and the second dielectric layer 3 in Example 2 is both 150 μm; the thickness of the first dielectric layer 2 and the second dielectric layer 3 in Example 3 is both 200 μm. According to the parameters obtained from the experiment, it can be seen that when the thickness of the first dielectric layer 2 is thicker, the insulation resistance value is greater and the electrostatic adsorption force is smaller.

[0056] According to the analysis of Examples 4 and 5, the use of a porous ceramic material with a high dielectric constant in the second dielectric layer 3 is more conducive to improving the electrostatic adsorption force. Specifically, in Example 4, the first dielectric layer 2 uses aluminum oxide and titanium dioxide, and the second dielectric layer 3 uses aluminum oxide; in Example 5, the first dielectric uses aluminum oxide, and the second dielectric layer 3 uses aluminum oxide and titanium dioxide. The composite material of aluminum oxide and titanium dioxide has a higher dielectric constant. Therefore, it is known that the use of a porous ceramic material with a high dielectric constant in the second dielectric layer 3 is more conducive to improving the electrostatic adsorption force.

[0057] In the second embodiment of the present invention, a coating device is provided, in which the coating roller structure in the first embodiment of the present invention is arranged in a vacuum chamber to improve the electrostatic adsorption force, ensure the continuity of the coating process and the consistency of the product, and have good industrial application prospects.

[0058] Although the embodiments of the present invention have been described with reference to the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the present invention. Such modifications and variations are all within the scope defined by the appended claims.

Claims

1. A coating roller structure, characterized in that: include: A roller body (1), and a first dielectric layer (2) and a second dielectric layer (3) sequentially attached to the roller body (1) from the inside to the outside in a radial direction; The first dielectric layer (2) comprises a first porous ceramic material and an insulating polymer material, wherein the volume proportion of the first porous ceramic material in the first dielectric layer (2) is 97% to 99.8%, and the volume proportion of the insulating polymer material is 0.2% to 3%. The second dielectric layer (3) comprises a second porous ceramic material.

2. The coating roller structure according to claim 1, characterized in that: The first porous ceramic material and the second porous ceramic material are both aluminum oxide, and the insulating polymer material is epoxy resin or silicone resin.

3. The coating roller structure according to claim 1, characterized in that: The first porous ceramic material and the second porous ceramic material both include aluminum oxide and titanium dioxide. In the first porous ceramic material and the second porous ceramic material, the mass proportion of aluminum oxide is 90% to 97%, and the mass proportion of titanium dioxide is 3% to 10%. The insulating polymer material is epoxy resin or silicone resin.

4. The coating roller structure according to claim 1, characterized in that: The first porous ceramic material includes aluminum oxide and titanium dioxide, and the second porous ceramic material includes aluminum oxide. In the first porous ceramic material, the mass proportion of aluminum oxide is 90% to 97%, and the mass proportion of titanium dioxide is 3% to 10%; the insulating polymer material is epoxy resin or silicone resin.

5. The coating roller structure according to claim 1, characterized in that: The first porous ceramic material includes aluminum oxide, and the second porous ceramic material includes aluminum oxide and titanium dioxide. In the second porous ceramic material, the mass proportion of aluminum oxide is 90% to 97%, and the mass proportion of titanium dioxide is 3% to 10%; the insulating polymer material is epoxy resin or silicone resin.

6. The coating roller structure according to any one of claims 1 to 5, characterized in that: The thickness of the first dielectric layer (2) and the second dielectric layer (3) are both 50 μm-200 μm.

7. The coating roller structure according to any one of claims 1 to 5, characterized in that: The roller body (1) is made of metal or alloy material, specifically titanium or stainless steel.

8. The coating roller structure according to any one of claims 1 to 5, characterized in that: The roller body (1) is provided with a cooling channel, and the cooling channel is suitable for passing a cooling medium to cool the roller body (1).

9. The coating roller structure according to any one of claims 1 to 5, characterized in that: The roller body is electrically connected to a power source, and the power source is suitable for supplying direct current to the roller body.

10. A coating device, characterized in that: It comprises a vacuum chamber, wherein the vacuum chamber is provided with the coating roller structure according to any one of claims 1-9.

Images