Sliding type double-temperature-zone chemical vapor deposition system and process

Abstract

The sliding type double-temperature-zone chemical vapor deposition system comprises an equipment body, an equipment cover and a double-temperature-zone reaction pipe, the equipment cover is rotationally connected to the rear end of the top end of the equipment body, and heating grooves are longitudinally formed in the middle positions of the opposite sides of the equipment cover and the equipment body correspondingly; the heating tank is matched with the double-temperature zone reaction tube, the double-temperature zone reaction tube is longitudinally arranged in the heating tank of the equipment body, and the outer sides of the two ends of the double-temperature zone reaction tube are fixedly connected with supporting frames; when the equipment statically operates, the operation stability of the equipment is ensured, the influence on the purity of subsequent products due to the vibration of the reaction area caused by the shaking of the equipment caused by external factors is avoided, the sealing operation at the joint is ensured when the equipment statically operates, and the increase of the power consumption of the equipment due to incapability of quickly reaching the reaction temperature caused by heat escape is prevented.

Description

Technical Field

[0001] The present invention relates to the technical field of chemical vapor deposition systems, and in particular to a sliding dual-temperature zone chemical vapor deposition system and process. Background Art

[0002] Chemical vapor deposition (CVD) is a chemical process that primarily utilizes one or more vapor-phase compounds or elements containing the thin film element to chemically react on a substrate surface to form a thin film. CVD is a new technique for preparing inorganic materials developed in recent decades. CVD has been widely used to purify substances, develop new crystals, and deposit a variety of single-crystal, polycrystalline, or glassy inorganic thin-film materials. These materials can be oxides, sulfides, nitrides, carbides, or binary or multi-element compounds within Groups III-V, II-IV, and IV-VI. Their physical functions can be precisely controlled through the vapor-phase doping deposition process.

[0003] Reference is made to a Chinese invention patent, publication number: CN CN 111485224 B, entitled: A chemical vapor deposition apparatus and a chemical vapor deposition method. The chemical vapor deposition apparatus is used to prepare thin film materials, and includes a first chamber, a second chamber, a transition chamber, a chassis, and a conveying mechanism. The first chamber and the second chamber are used for the growth or post-processing of thin film materials. The transition chamber is connected to the first chamber and the second chamber respectively through an isolation member. The chassis is used to load a growth substrate. The conveying mechanism is configured to convey the chassis between the first chamber and the transition chamber, and to convey the chassis between the second chamber and the transition chamber. The chemical vapor deposition method provided by the invention utilizes the above-mentioned apparatus to grow or post-process thin film materials.

[0004] However, there are still some problems in actual use:

[0005] When the existing sliding dual-temperature zone chemical vapor deposition system is in use, it needs to perform reciprocating motion to heat the material inside the container. When the equipment is stationary for long-term local heating, there is a certain amount of moving space between its moving mechanism and the equipment body, and external influences cause the equipment to shake. Secondly, when the equipment is stationary, there is a gap between the equipment heating space and the container connection area, which easily causes a large amount of heat to escape and increase energy consumption. Summary of the Invention

[0006] The purpose of the present invention is to solve the problem in the prior art that the existing sliding dual-temperature zone chemical vapor deposition system needs to perform reciprocating motion to heat the material inside the container when in use. When the equipment is stationary and performs local long-term heating, there is a certain moving space between its moving mechanism and the equipment body, and external influences cause the equipment to shake. Secondly, when the equipment is stationary, there is a gap between the equipment heating space and the container connection area, which easily causes a large amount of heat to escape and increase energy consumption. A sliding dual-temperature zone chemical vapor deposition system and process are proposed.

[0007] In order to achieve the above object, the present invention adopts the following technical solutions:

[0008] A sliding dual-temperature zone chemical vapor deposition system and process includes an equipment body, an equipment cover, and a dual-temperature zone chemical vapor deposition tube. The top and rear ends of the equipment body are rotatably connected to the equipment cover, and heating grooves are longitudinally opened in the middle positions of the opposite sides of the equipment cover and the equipment body. The heating grooves are compatible with the dual-temperature zone chemical vapor deposition tube, and the dual-temperature zone chemical vapor deposition tube is longitudinally arranged inside the heating grooves of the equipment body. The outer sides of both ends of the dual-temperature zone chemical vapor deposition tube are fixedly connected to support frames, and the bottom ends of the support frames are fixedly connected to a connecting base. The bottom of the equipment body is fixedly connected to a displacement mechanism, the bottom of the displacement mechanism is fixedly connected to a self-locking mechanism, and the opposite sides of the support frame are movably connected to a sealing mechanism.

[0009] Preferably, the self-locking mechanism includes an electric push rod, a connecting bar, a driving bar, a transmission bar, a pushing bar, a control bar, a connecting rod and a limit head. The connecting bars are provided with two and are symmetrically arranged. The electric push rod is on opposite sides of the connecting bar, and the telescopic end of the electric push rod is fixedly connected to the opposite side of one of the connecting bars. The driving bar is rotatably connected to the bottom of the connecting bar near the telescopic end of the electric push rod, one end of the transmission bar is connected to the end of the driving bar away from the connecting bar, and the pushing bar is rotatably connected to the other end of the transmission bar, and the other end of the pushing bar is connected to the bottom of the other connecting bar. The control bars are symmetrically arranged and are rotatably connected to both sides of the top of the connecting bar, and the connecting rods are movably connected to the end of the control bar away from the connecting bar through the rotating shaft, and the limit head is fixedly connected to the other end of the connecting rod.

[0010] Preferably, the self-locking mechanism also includes a sliding ring, a limit frame and a sliding rod, two sliding rods are provided, four sliding rings are provided and are symmetrically slidably connected to the outer sides of the sliding rods, the limit frames are fixedly connected to the inner sides of the sliding rings, a rectangular groove is provided on the inner side of the sliding ring, the limit head is adapted to the rectangular groove, and the limit head is located inside the rectangular groove, and the end of the limit frame away from the sliding ring is sleeved on the outer side of the connecting rod.

[0011] Preferably, the two ends of the sliding rod are respectively fixedly connected to the inside of the connecting base, and the bottom end of the sliding ring is fixedly connected to the bottom end of the device body. A groove is longitudinally provided at one end of the sliding rod close to the limit head, and serrations are provided inside the groove, and a limiting tooth is provided on the side of the limit head close to the groove.

[0012] Preferably, the displacement mechanism includes a control motor, a threaded rod and a slider, the control motor is fixedly connected to one end of the connecting base, the threaded rod is longitudinally arranged inside the connecting base, and both ends of the threaded rod are movably connected to the connecting base through bearings, the output end of the control motor passes through the connecting base and is fixedly connected to one end of the threaded rod through a coupling, and the slider is movably connected to the outside of the threaded rod through a thread.

[0013] Preferably, the top of the slider is fixedly connected to the middle position of the bottom of the equipment body, the longitudinal direction of the electric push rod is fixedly connected to the middle position of the bottom of the slider, and the electric push rod, drive bar, transmission bar, and push bar are all located at the bottom of the slider.

[0014] Preferably, the sealing mechanism includes a driving motor, a control rod, a limit bar, a winding roller and a steel cable, one end of the control rod is fixedly connected to the output end of the driving motor through a coupling, and two limit bars are provided and are symmetrically fixedly connected to the outer side of the control rod longitudinally, there are two winding rollers, and the opposite sides of the winding rollers are fixedly connected by a connecting piece, a sliding hole is opened inside the winding roller, and the sliding hole is adapted to the connecting section of the control rod and the limit bar, the winding roller is symmetrically slidably connected to the surface of the control rod, and there are four steel cables, and each two are grouped together and wound around the surface of the winding roller in the same direction.

[0015] Preferably, the driving motor is fixedly connected to the outer side of the support frame, a through hole is longitudinally opened at the bottom of the equipment body, and the control rod longitudinally passes through the inside of the through hole, the two ends of the control rod are movably connected to the opposite sides of the support frame through bearings, and a slide groove is opened on the outer side of the winding roller.

[0016] Preferably, the sealing mechanism also includes a sealing ring, a connecting shaft, a support bar and a roller. There are four sealing rings, and the sealing rings are arc-shaped and symmetrically arranged in pairs. The bottom end of each group of sealing rings is rotatably connected to the surface of the connecting shaft through a torque spring, and the connecting shaft is fixedly connected to the two ends of the arc groove opened on the equipment body. One end of the support bar is fixedly connected to the end of the connecting shaft away from the sealing ring, and the rollers are movably connected to the other end of the support bar. The rollers are adapted to the slide groove, and the rollers are rollingly connected to the inside of the slide groove.

[0017] A method for using a sliding dual-temperature zone chemical vapor deposition system process includes the following steps:

[0018] S1: After the preliminary chemical vapor deposition operations are completed, the equipment cover and the equipment body are closed. At this time, the dual-temperature zone chemical reaction tube is placed on the opposite side of the heating tank. When the equipment is in use, the body needs to be moved left and right to heat the inside of the dual-temperature zone chemical reaction tube. At this time, the control motor is started to drive the thread to rotate. At the same time, the threaded rod drives the slider to move left and right following the direction and speed of the control motor through the thread. The equipment body moves along the track of the slider. At the same time, the heating tank moves at the same frequency as the equipment body outside the dual-temperature zone chemical reaction tube;

[0019] S2; When the equipment needs to stop performing fixed-point operation on a certain area of ​​the dual-temperature zone reaction tube, the electric push rod is controlled to push the connecting bar forward. At this time, the connecting bar moves parallel to the telescopic end of the electric push rod, and at the same time, its two ends drive the control bar to align. Then, the two ends of the control bar expand outward to push the connecting rod to slide inside the limit frame. Then, the limit head is pushed by the connecting rod to approach one side of the groove until the limit tooth is stuck inside the serration;

[0020] S3; When the telescopic end of the electric push rod moves, it pushes one end of the driving bar forward and moves forward. At the same time, the other end of the driving bar pushes the transmission bar backward to push the push bar to move backward toward the inside of the limit frame. At this time, the push bar pushes the connecting bar and the other connection to move in the opposite direction. At the same time, the two ends of the connecting bar drive the control bar to align. Then the two ends of the control bar expand outward to push the connecting rod to slide inside the limit frame. Secondly, the limit head is pushed by the connecting rod to approach one side of the groove until the limit tooth is stuck inside the saw tooth.

[0021] S4; Before the equipment body moves, the control rod is driven by the driving motor to rotate, and the winding roller rotates along its trajectory. At this time, the winding roller winds and retracts the steel cable wrapped around its outer side. Then, the guide wheel rolls in the slide groove, and the other end of the steel cable pulls the sealing ring open and away from the dual-temperature zone reaction tube. At this time, when the equipment moves left and right, it will pull its winding roller along its trajectory through the connecting shaft, support bar and guide wheel in sequence;

[0022] S5: When the equipment is stationary, the drive motor is controlled to rotate in the reverse direction. At this time, the winding roller releases the sealing ring and the guide wheel rolls in the slide groove.

[0023] Compared with the prior art, the present invention provides a sliding dual-temperature zone chemical vapor deposition system and process, which has the following beneficial effects:

[0024] 1. The sliding dual-temperature zone chemical vapor deposition system, through the self-locking mechanism, ensures the operating stability of the equipment when the equipment is stationary, avoids external factors causing the equipment to shake and cause vibration in the reaction zone, affecting the purity of subsequent products. It solves the problem in the existing technology that when the existing sliding dual-temperature zone chemical vapor deposition system is in use, when the equipment is stationary and performs local long-term heating, there is a certain moving space between its moving mechanism and the equipment body, and external influences cause the equipment to shake. Secondly, when the equipment is stationary, there is a gap between the equipment heating space and the container connection area, which easily causes a large amount of heat to escape, increasing energy consumption.

[0025] 2. The sliding dual-temperature zone chemical vapor deposition system, through the provided sealing mechanism, ensures that the connection is sealed when the equipment is stationary, preventing heat from escaping and causing the temperature to fail to reach the reaction temperature quickly. Secondly, it increases the power consumption of the equipment and solves the problem in the prior art that there is a gap between the heating space of the equipment and the connection area of ​​the container, which easily causes a large amount of heat to escape and increase energy consumption.

[0026] 3. The sliding dual-temperature zone chemical vapor deposition system, through the displacement mechanism, realizes the stability of left and right movement when the equipment is working, avoids the occurrence of jamming and vibration that affects the internal chemical reaction, and solves the existing stability and smoothness when performing reciprocating motion to heat the material inside the container. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a structural schematic diagram of the present invention;

[0028] Figure 2 It is a bottom-up three-dimensional structural schematic diagram of the present invention;

[0029] Figure 3 It is a schematic diagram of a partial cross-sectional structure of the device body of the present invention;

[0030] Figure 4 It is a structural schematic diagram of the self-locking mechanism of the present invention;

[0031] Figure 5 It is a schematic diagram of the local cross-section connection structure of the sliding rod of the present invention;

[0032] Figure 6 Schematic diagram of the displacement mechanism structure of the present invention;

[0033] Figure 7 It is a structural schematic diagram of the sealing mechanism of the present invention;

[0034] Figure 8 For the present invention Figure 7 Enlarged structural diagram at point A in the middle.

[0035] In the figure: 1. Equipment body; 2. Equipment cover; 3. Dual-temperature zone reaction tube; 4. Support frame; 5. Connecting base; 6. Displacement mechanism; 601. Control motor; 602. Threaded rod; 603. Slider; 7. Self-locking mechanism; 701. Electric push rod; 702. Connecting bar; 703. Drive bar; 704. Transmission bar; 705. Push bar; 706. Control bar; 707. Connecting rod; 708. Limit head; 709. Sliding ring; 7010. Limit frame; 7011. Sliding rod; 8. Sealing mechanism; 801. Drive motor; 802. Control rod; 803. Limit bar; 804. Winding roller; 805. Steel cable; 806. Sealing ring; 807. Connecting shaft; 808. Support bar; 809. Roller; 9. Rectangular groove; 10. Groove; 11. Through hole; 12. Slide groove; 13. Heating groove. DETAILED DESCRIPTION

[0036] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention; it is obvious that the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0037] It will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by those skilled in the art in the art to which the present invention pertains. It should also be understood that terms such as those defined in common dictionaries should be understood to have meanings consistent with their meanings in the context of the prior art and, unless defined as such herein, will not be interpreted in an idealized or overly formal sense.

[0038] Example 1:

[0039] Reference Figure 1-8 A sliding dual-temperature-zone chemical vapor deposition system and process includes an equipment body 1, an equipment cover 2 and a dual-temperature-zone chemical vapor deposition tube 3. The top and rear ends of the equipment body 1 are rotatably connected to the equipment cover 2, and heating grooves 13 are longitudinally opened in the middle positions of the opposite sides of the equipment cover 2 and the equipment body 1. The heating grooves 13 are adapted to the dual-temperature-zone chemical vapor deposition tube 3, and the dual-temperature-zone chemical vapor deposition tube 3 is longitudinally arranged inside the heating grooves 13 of the equipment body 1. The outer sides of both ends of the dual-temperature-zone chemical vapor deposition tube 3 are fixedly connected to support frames 4, and the bottom end of the support frame 4 is fixedly connected to a connecting base 5. The bottom of the equipment body 1 is fixedly connected to a displacement mechanism 6, the bottom of the displacement mechanism 6 is fixedly connected to a self-locking mechanism 7, and the opposite side of the support frame 4 is movably connected to a sealing mechanism 8.

[0040] Example 2:

[0041] Reference Figure 2 、 Figure 3 、 Figure 4 and Figure 5 , a sliding dual-temperature zone chemical vapor deposition system and process, which is basically the same as Example 1, furthermore, the self-locking mechanism 7 includes an electric push rod 701, a connecting bar 702, a driving bar 703, a transmission bar 704, a pushing bar 705, a control bar 706, a connecting rod 707 and a limit head 708, the connecting bar 702 is provided with two and is symmetrically arranged, the electric push rod 701 is on the opposite side of the connecting bar 702, and the telescopic end of the electric push rod 701 is fixedly connected to one of the connecting bars 702 On the opposite side, the driving bar 703 is rotatably connected to the bottom of the connecting bar 702 near the telescopic end of the electric push rod 701, one end of the transmission bar 704 is connected to the end of the driving bar 703 away from the connecting bar 702, and the pushing bar 705 is rotatably connected to the other end of the transmission bar 704, and the other end of the pushing bar 705 is connected to the bottom of another connecting bar 702. The control bars 706 are symmetrically arranged and rotatably connected to the two sides of the top of the connecting bar 702, and the connecting rods 707 are movably connected to the The control strip 706 is away from one end of the connecting strip 702, and the limit head 708 is fixedly connected to the other end of the connecting rod 707. The self-locking mechanism 7 also includes a sliding ring 709, a limit frame 7010 and a sliding rod 7011. There are two sliding rods 7011, and four sliding rings 709 are provided and are symmetrically slidably connected to the outside of the sliding rod 7011. The limit frames 7010 are fixedly connected to the inner side of the sliding ring 709. The inner side of the sliding ring 709 is provided with a rectangular groove 9. The limit head 708 and the rectangular groove 9 are fixedly connected. The groove 9 is adapted, and the limit head 708 is located inside the rectangular groove 9. The end of the limit frame 7010 away from the sliding ring 709 is sleeved on the outside of the connecting rod 707. The two ends of the sliding rod 7011 are respectively fixedly connected to the bottom of the internal sliding ring 709 of the connecting base 5. The bottom end of the sliding ring 709 is fixedly connected to the bottom end of the device body 1. A groove 10 is longitudinally provided at one end of the sliding rod 7011 close to the limit head 708, and a serration is provided inside the groove 10, and a limit tooth is provided on the side of the limit head 708 close to the groove 10.

[0042] By controlling the electric push rod 701 to push the connecting bar 702 forward, the connecting bar 702 moves parallel to the telescopic end of the electric push rod 701, and at the same time, its two ends drive the control bar 706 to align, and then the two ends of the control bar 706 expand outward to push the connecting rod 707 to slide inside the limit frame 7010, and then the limit head 708 is pushed by the connecting rod 707 to move closer to the side of the groove 10 until the limit tooth is stuck inside the sawtooth. At the same time, the telescopic end of the electric push rod 701 moves, pushing one end of the driving bar 703 forward, and at the same time, the other end of the driving bar 703 pushes the transmission bar 704 backward to push it forward. The bar 705 moves backward toward the inside of the limit frame 7010. At this time, the push bar 705 pushes the connecting bar 702 to move in the opposite direction to the other connection. At the same time, the two ends of the connecting bar 702 drive the control bar 706 to align. Then the two ends of the control bar 706 expand outward to push the connecting rod 707 to slide inside the limit frame 7010. Secondly, the limit head 708 is pushed by the connecting rod 707 to approach the side of the groove 10 until the limit tooth is stuck inside the serration, which is beneficial to the equipment when it is stationary, ensuring the stability of the equipment operation, and avoiding external factors causing the equipment to shake and cause vibration in the reaction zone, affecting the purity of subsequent products.

[0043] Example 3:

[0044] Reference Figure 1 、 Figure 2 、 Figure 3 、 Figure 6 and Figure 7 , a sliding dual-temperature zone chemical vapor deposition system and process, which is basically the same as Example 1, and further, the displacement mechanism 6 includes a control motor 601, a threaded rod 602 and a slider 603, the control motor 601 is fixedly connected to one end of the connecting base 5, the threaded rod 602 is longitudinally arranged inside the connecting base 5, and both ends of the threaded rod 602 are movably connected to the connecting base 5 through bearings, the output end of the control motor 601 passes through the connecting base 5 and is fixedly connected to one end of the threaded rod 602 through a coupling, the slider 603 is movably connected to the outside of the threaded rod 602 through a thread, the top of the slider 603 is fixedly connected to the bottom middle position of the equipment body 1, the electric push rod 701 is longitudinally fixedly connected to the bottom middle position of the slider 603, and the electric push rod 701, the drive bar 703, the transmission bar 704, and the push bar 705 are all located at the bottom of the slider 603.

[0045] By starting the control motor 601, the thread is driven to rotate, and at the same time, the threaded rod 602 drives the slider 603 to move left and right following the direction and speed of the control motor 601 through the thread. The equipment body 1 moves following the trajectory of the slider 603. At the same time, the heating tank 13 moves at the same frequency as the equipment body 1 outside the dual-temperature zone reaction tube 3, which is conducive to facilitating the left and right movement stability of the equipment during operation and avoiding the occurrence of jamming and vibration, which affects the internal chemical reaction.

[0046] Example 4:

[0047] Reference Figure 1 、 Figure 2 、 Figure 3 、 Figure 6 、 Figure 7 and Figure 8 , a sliding dual-temperature zone chemical vapor deposition system and process, which is basically the same as Example 1, and further, the sealing mechanism 8 includes a driving motor 801, a control rod 802, a limit bar 803, a winding roller 804 and a steel cable 805, one end of the control rod 802 is fixedly connected to the output end of the driving motor 801 through a coupling, and the limit bar 803 is provided with two and is symmetrically fixedly connected to the outer side of the control rod 802 in the longitudinal direction, there are two winding rollers 804, and the opposite sides of the winding rollers 804 are fixedly connected by a connecting piece, a sliding hole is opened inside the winding roller 804, and the sliding hole is adapted to the connecting cross-section of the control rod 802 and the limit bar 803, the winding roller 804 is symmetrically slidably connected to the surface of the control rod 802, there are four steel cables 805 and each two are grouped in a group and are respectively wound on the surface of the winding roller 804 in the same direction, the driving motor 801 is fixedly connected to the outer side of the support frame 4, the equipment A through hole 11 is longitudinally provided at the bottom of the main body 1, and the control rod 802 is longitudinally extended through the inside of the through hole 11. The two ends of the control rod 802 are movably connected to the opposite sides of the support frame 4 through bearings. A slide groove 12 is provided on the outer side of the winding roller 804. The sealing mechanism 8 also includes a sealing ring 806, a connecting shaft 807, a support bar 808 and a roller 809. There are four sealing rings 806, and the sealing rings 806 are arc-shaped and symmetrically arranged in pairs. The bottom end of each group of sealing rings 806 is rotatably connected to the surface of the connecting shaft 807 through a torque spring, and the connecting shaft 807 is fixedly connected to the two ends of the arc groove opened on the equipment body 1. One end of the support bar 808 is fixedly connected to the end of the connecting shaft 807 away from the sealing ring 806, and the rollers 809 are movably connected to the other end of the support bar 808. The rollers 809 are adapted to the slide groove 12, and the rollers 809 are rollingly connected to the inside of the slide groove 12.

[0048] The control rod 802 is driven to rotate by the driving motor 801, and the winding roller 804 rotates along its trajectory. At this time, the winding roller 804 winds and contracts the steel cable 805 wrapped around its outer side, and then the guide wheel rolls in the slide 12. Then the other end of the steel cable 805 pulls the sealing ring 806 to open and move away from the dual-temperature zone reaction tube 3. At this time, when the equipment moves left and right, it will pull its winding roller 804 to move along its trajectory through the connecting shaft 807, the support bar 808 and the guide wheel in sequence. When the equipment is stationary, the driving motor 801 is controlled to rotate in the opposite direction. At this time, the winding roller 804 releases the sealing ring 806, and the guide wheel rolls in the slide 12, thereby clamping the connection between the heating tank 13 and the dual-temperature zone reaction tube 3, which is conducive to ensuring the sealing operation of the connection when the equipment is stationary, preventing heat dissipation from causing the temperature to fail to reach the reaction temperature quickly, and secondly increasing the power consumption of the equipment.

[0049] Working principle: After the preliminary operation of chemical vapor deposition is completed, the equipment cover 2 and the equipment body 1 are closed. At this time, the dual-temperature zone chemical reaction tube 3 is placed on the opposite side of the heating tank 13. When the equipment is used, the body needs to move left and right to heat the inside of the dual-temperature zone chemical reaction tube 3. At this time, the control motor 601 is started to drive the thread to rotate. At the same time, the threaded rod 602 drives the slider 603 to move left and right following the direction and speed of the control motor 601 through the thread. The equipment body 1 moves following the trajectory of the slider 603. At the same time, the heating tank 13 moves at the same frequency as the equipment body 1 on the outside of the dual-temperature zone chemical reaction tube 3. When the equipment needs to stop When a fixed-point operation is performed in a certain area of ​​the dual-temperature zone reaction tube 3, the electric push rod 701 is controlled to push the connecting bar 702 forward. At this time, the connecting bar 702 moves parallel to the telescopic end of the electric push rod 701, and at the same time, its two ends drive the control bar 706 to align. Then, the two ends of the control bar 706 expand outward to push the connecting rod 707 to slide inside the limit frame 7010. Then, the limit head 708 is pushed by the connecting rod 707 to move closer to the side of the groove 10 until the limit tooth is stuck inside the serration. At the same time, the telescopic end of the electric push rod 701 moves, pushing one end of the driving bar 703 forward, and at the same time, the other end of the driving bar 703 The end of the transmission bar 704 is pushed backward to push the push bar 705 to move backward toward the inside of the limit frame 7010. At this time, the push bar 705 pushes the connecting bar 702 to move in the opposite direction to the other connection. At the same time, the two ends of the connecting bar 702 drive the control bar 706 to align. Then the two ends of the control bar 706 expand outward to push the connecting rod 707 to slide inside the limit frame 7010. Secondly, the limit head 708 is pushed by the connecting rod 707 to move closer to the side of the groove 10 until the limit tooth is stuck inside the sawtooth. Before the device body 1 moves, the control rod 802 is driven to rotate by the driving motor 801. At the same time, the winding roller 8 04 rotates along its trajectory, at this time the winding roller 804 winds and contracts the steel cable 805 wrapped around its outer side, and then the guide wheel rolls in the chute 12, and then the other end of the steel cable 805 pulls the sealing ring 806 to open and move away from the dual-temperature zone reaction tube 3. At this time, when the equipment moves left and right, it will pull its winding roller 804 to move along its trajectory through the connecting shaft 807, the support bar 808 and the guide wheel in sequence. When the equipment is stationary, the drive motor 801 is controlled to rotate in the opposite direction. At this time, the winding roller 804 releases the sealing ring 806, and the guide wheel rolls in the chute 12, thereby clamping the connection between the heating tank 13 and the dual-temperature zone reaction tube 3.

[0050] The above description is only a preferred specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any technician familiar with the technical field, within the technical scope disclosed by the present invention, who makes equivalent replacements or changes based on the technical solution and inventive concept of the present invention, should be covered by the scope of protection of the present invention.

Claims

1. A sliding dual-temperature zone chemical vapor deposition system and process, comprising an equipment body (1), an equipment cover (2) and a dual-temperature zone chemical vapor deposition reaction tube (3), characterized in that: The top and rear ends of the equipment body (1) are rotatably connected to an equipment cover (2), and a heating groove (13) is longitudinally opened in the middle position of the opposite sides of the equipment cover (2) and the equipment body (1). The heating groove (13) is adapted to the dual-temperature zone reaction tube (3), and the dual-temperature zone reaction tube (3) is longitudinally arranged inside the heating groove (13) of the equipment body (1). The outer sides of both ends of the dual-temperature zone reaction tube (3) are fixedly connected to a support frame (4), and the bottom end of the support frame (4) is fixedly connected to a connection base (5). The bottom of the equipment body (1) is fixedly connected to a displacement mechanism (6), and the bottom of the displacement mechanism (6) is fixedly connected to a self-locking mechanism (7). The opposite side of the support frame (4) is movably connected to a sealing mechanism (8).

2. A sliding dual-temperature zone chemical vapor deposition system and process according to claim 1, characterized in that: The self-locking mechanism (7) includes an electric push rod (701), a connecting bar (702), a driving bar (703), a transmission bar (704), a pushing bar (705), a control bar (706), a connecting rod (707) and a limit head (708), wherein the connecting bars (702) are provided with two and are symmetrically arranged, the electric push rod (701) is on the opposite side of the connecting bar (702), and the telescopic end of the electric push rod (701) is fixedly connected to the opposite side of one of the connecting bars (702), and the driving bar (703) is rotatably connected to the bottom of the connecting bar (702) near the telescopic end of the electric push rod (701). One end of the transmission bar (704) is connected to the end of the driving bar (703) away from the connecting bar (702) by a rotating shaft, and the pushing bar (705) is rotatably connected to the other end of the transmission bar (704), and the other end of the pushing bar (705) is connected to the bottom of another connecting bar (702) by a rotating shaft. The control bar (706) is symmetrically arranged and rotatably connected to the two sides of the top of the connecting bar (702), and the connecting rod (707) is movably connected to the end of the control bar (706) away from the connecting bar (702) through the rotating shaft, and the limit head (708) is fixedly connected to the other end of the connecting rod (707).

3. The sliding dual-temperature zone chemical vapor deposition system and process according to claim 2, characterized in that: The self-locking mechanism (7) further comprises a sliding ring (709), a limiting frame (7010) and a sliding rod (7011), wherein two sliding rods (7011) are provided, four sliding rings (709) are provided and are symmetrically slidably connected to the outer sides of the sliding rods (7011), the limiting frames (7010) are respectively fixedly connected to the inner sides of the sliding rings (709), a rectangular groove (9) is provided on the inner side of the sliding ring (709), the limiting head (708) is adapted to the rectangular groove (9), and the limiting head (708) is located inside the rectangular groove (9), and the end of the limiting frame (7010) away from the sliding ring (709) is sleeved on the outer side of the connecting rod (707).

4. The sliding dual-temperature zone chemical vapor deposition system and process according to claim 3, characterized in that: The two ends of the sliding rod (7011) are respectively fixedly connected to the inside of the connecting base (5); the bottom end of the sliding ring (709) is fixedly connected to the bottom end of the device body (1); a groove (10) is longitudinally provided at one end of the sliding rod (7011) close to the limit head (708); a saw tooth is provided inside the groove (10), and a limit tooth is provided on one side of the limit head (708) close to the groove (10).

5. The sliding dual-temperature zone chemical vapor deposition system and process according to claim 1, characterized in that: The displacement mechanism (6) comprises a control motor (601), a threaded rod (602) and a slider (603), wherein the control motor (601) is fixedly connected to one end of the connection base (5), the threaded rod (602) is longitudinally arranged inside the connection base (5), and both ends of the threaded rod (602) are movably connected to the connection base (5) through bearings, the output end of the control motor (601) passes through the connection base (5) and is fixedly connected to one end of the threaded rod (602) through a coupling, and the slider (603) is movably connected to the outer side of the threaded rod (602) through a thread.

6. The sliding dual-temperature zone chemical vapor deposition system and process according to claim 5, characterized in that: The top end of the slider (603) is fixedly connected to the middle position of the bottom of the device body (1), the longitudinal direction of the electric push rod (701) is fixedly connected to the middle position of the bottom of the slider (603), and the electric push rod (701), the driving bar (703), the transmission bar (704), and the pushing bar (705) are all located at the bottom of the slider (603).

7. The sliding dual-temperature zone chemical vapor deposition system and process according to claim 1, characterized in that: The sealing mechanism (8) comprises a driving motor (801), a control rod (802), a limiting strip (803), a winding roller (804) and a steel cable (805), one end of the control rod (802) being fixedly connected to the output end of the driving motor (801) via a coupling, and two limiting strips (803) are provided and are symmetrically and longitudinally fixedly connected to the outer side of the control rod (802), two winding rollers (804) are provided, and opposite sides of the winding rollers (804) are fixedly connected via a connecting piece, a sliding hole is provided inside the winding roller (804), and the sliding hole is adapted to the connecting section of the control rod (802) and the limiting strip (803), the winding roller (804) is symmetrically and slidingly connected to the surface of the control rod (802), and four steel cables (805) are provided, and two of them form a group and are respectively wound around the surface of the winding roller (804) in the same direction.

8. The sliding dual-temperature zone chemical vapor deposition system and process according to claim 7, characterized in that: The driving motor (801) is fixedly connected to the outer side of the support frame (4), a through hole (11) is longitudinally opened at the bottom of the device body (1), and the control rod (802) longitudinally passes through the inside of the through hole (11), and the two ends of the control rod (802) are movably connected to the opposite sides of the support frame (4) through bearings, and a slide groove (12) is opened on the outer side of the winding roller (804).

9. The sliding dual-temperature zone chemical vapor deposition system and process according to claim 7, characterized in that: The sealing mechanism (8) further comprises a sealing ring (806), a connecting shaft (807), a support bar (808) and a roller (809), wherein four sealing rings (806) are provided, and the sealing rings (806) are arc-shaped and symmetrically arranged in pairs, and the bottom end of each group of the sealing rings (806) is rotatably connected to the surface of the connecting shaft (807) through a torque spring, and the connecting shaft (807) is respectively fixedly connected to the two ends of the arc groove opened on the device body (1), one end of the support bar (808) is fixedly connected to the end of the connecting shaft (807) away from the sealing ring (806), and the rollers (809) are movably connected to the other end of the support bar (808), and the rollers (809) are adapted to the slide groove (12), and the rollers (809) are rollingly connected to the inside of the slide groove (12).

10. A method for using a sliding dual-temperature zone chemical vapor deposition system according to any one of claims 1 to 9, characterized in that: The following steps are involved: S1: After the preliminary operation of chemical vapor deposition is completed, the device cover (2) and the device body (1) are closed. At this time, the dual-temperature zone chemical reaction tube (3) is placed on the opposite side of the heating tank (13). When the device is used, the body needs to move left and right to heat the inside of the dual-temperature zone chemical reaction tube (3). At this time, the control motor (601) is started to drive the thread to rotate. At the same time, the threaded rod (602) drives the slider (603) through the thread to move left and right following the direction and speed of the control motor (601). The device body (1) moves following the trajectory of the slider (603). At the same time, the heating tank (13) moves at the same frequency as the device body (1) outside the dual-temperature zone chemical reaction tube (3); S2; When the equipment needs to stop performing fixed-point operation on a certain area of ​​the dual-temperature zone reaction tube (3), the electric push rod (701) is controlled to push the connecting bar (702) forward, and the connecting bar (702) moves parallel to the telescopic end of the electric push rod (701), and at the same time, its two ends drive the control bar (706) to align, and then the two ends of the control bar (706) expand outward to push the connecting rod (707) to slide inside the limiting frame (7010), and then the limiting head (708) is pushed by the connecting rod (707) to approach one side of the groove (10) until the limiting tooth is stuck inside the saw teeth; S3; When the telescopic end of the electric push rod (701) moves, it pushes one end of the driving bar (703) forward and moves forward, and at the same time, the other end of the driving bar (703) pushes the transmission bar (704) backward to push the pushing bar (705) to move backward toward the inside of the limit frame (7010). At this time, the pushing bar (705) pushes the connecting bar (702) and the other connection to move in the opposite square. At the same time, the two ends of the connecting bar (702) drive the control bar (706) to be aligned. Then, the two ends of the control bar (706) expand outward to push the connecting rod (707) to slide inside the limit frame (7010). Then, the limit head (708) is pushed by the connecting rod (707) to move closer to one side of the groove (10) until the limit tooth is stuck inside the saw tooth. S4; before the device body (1) moves, the control rod (802) is driven to rotate by the driving motor (801), and the winding roller (804) rotates along its trajectory. At this time, the winding roller (804) winds and contracts the steel cable (805) wound around it, and then the guide wheel rolls in the slide groove (12). Then, the other end of the steel cable (805) pulls the sealing ring (806) to open and move away from the dual-temperature zone reaction tube (3). At this time, when the device moves left and right, it will pull its winding roller (804) along its trajectory through the connecting shaft (807), the support bar (808) and the guide wheel in sequence; S5; When the equipment is stationary, the drive motor (801) is controlled to rotate in the reverse direction. At this time, the winding roller (804) releases the sealing ring (806), and the guide wheel rolls in the slide groove (12), thereby clamping the connection between the heating tank (13) and the dual-temperature zone reaction tube (3).

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