Electron beam high voltage power supply testing device, testing circuit and testing equipment

Abstract

The application relates to the field of power electronics, and discloses an electron beam high-voltage power supply testing device, an electron beam high-voltage power supply testing circuit and an electron beam high-voltage power supply testing equipment. The electron beam high-voltage power supply testing device comprises a plurality of input terminals which are mutually insulated and a high-voltage power supply testing circuit connected with the plurality of input terminals; the plurality of input terminals are respectively used for connecting a plurality of output voltages of an electron beam high-voltage power supply; the high-voltage power supply testing circuit comprises a plurality of testing branches, each testing branch is connected with a different input terminal; the plurality of testing branches comprise a main high-voltage branch and a plurality of sub high-voltage branches, and a plurality of impedance devices in the main high-voltage branch form a variable impedance module. Compared with the related art, the electron beam high-voltage power supply testing device, the testing circuit and the testing equipment provided by the embodiment have the advantages that the plurality of output voltages of the electron beam high-voltage power supply can be tested at the same time, and the testing cost is reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of power electronics, in particular, a kind of electron beam high-voltage power supply testing device, electron beam high-voltage power supply test circuit and electron beam high-voltage power supply testing equipment are disclosed. BACKGROUND

[0002] Electron beam equipment is a kind of equipment using the characteristics of electron beam to realize various functions, and is widely used in material processing, electronic manufacturing, medical treatment, scientific research and other fields. The working principle of electron beam equipment is to heat the filament by using high-voltage power supply, so that the electrons in the filament have high thermal motion energy. When the energy is greater than the escape work of the filament, the electrons will be emitted from the surface of the filament, and form an electron beam under the action of strong electric field. For electron beam equipment, the stability of high-voltage power supply directly determines the working stability of electron beam equipment, so the stability detection of high-voltage power supply is very important for the working stability of electron beam equipment.

[0003] At present, the test of common high-voltage power supply is mainly realized by two ways. The first way is to connect the pins with high-voltage tower, and the actual output of high-voltage power supply is controlled by continuously increasing the input voltage of host computer through the high-voltage resistant structure of high-voltage tower, while observing whether the high-voltage power supply output is abnormal to judge whether the high-voltage power supply output is normal. The output of the main high-voltage is read by the high-voltage resistant oscilloscope connected with the high-voltage tower, the stability of the high-voltage is judged, and the quantitative test result is given. The second way is to omit the high-voltage tower, and the four-way output high-voltage is suspended or the voltage testing device is used. The input voltage of host computer is increased to observe whether the high-voltage power supply output is down, and then the high-voltage power supply stability is tested by connecting the voltage ripple testing device and high-voltage resistant oscilloscope in series and connecting the emitter. However, the current high-voltage power supply test method can only test a single output of high-voltage power supply at a time, and the test period is long, and the testing tool is large in size and expensive in price. SUMMARY

[0004] The purpose of the present application is to provide an electron beam high-voltage power supply testing device, electron beam high-voltage power supply test circuit and electron beam high-voltage power supply testing equipment, which can test the multi-output voltage of electron beam high-voltage power supply at the same time and reduce the test cost.

[0005] In a first aspect, the present application provides an electron beam high-voltage power supply testing device, comprising: a housing having a receiving space, a plurality of input terminals arranged on the housing and insulated from each other, and a high-voltage power supply testing circuit arranged in the receiving space and connected with the plurality of input terminals; the plurality of input terminals are respectively used for connecting a plurality of output voltages of the electron beam high-voltage power supply; the high-voltage power supply testing circuit comprises a plurality of test branches, each of the test branches comprises a plurality of impedance devices, and each of the test branches is connected with a different input terminal; the plurality of test branches comprise a main high-voltage branch and a plurality of sub high-voltage branches, and the plurality of impedance devices in the main high-voltage branch form a variable impedance module.

[0006] Compared with the related art, the electron beam high-voltage power supply testing device provided by the embodiment of the present application is provided with a plurality of input terminals, which are respectively used for connecting a plurality of output voltages of the electron beam high-voltage power supply, so that the plurality of output voltages of the electron beam high-voltage power supply can be simultaneously received for testing, thereby realizing the effect of simultaneously testing the plurality of output voltages of the electron beam high-voltage power supply. Moreover, since the plurality of input terminals are insulated from each other, the mutual crosstalk between the plurality of output voltages can be prevented, and the safety during testing is ensured, thereby avoiding damage to equipment or injury to personnel caused by high-voltage leakage. Meanwhile, a plurality of impedance devices are arranged in the main high-voltage branch to form a variable impedance module, and the impedance value of the variable impedance module can be adjusted according to different voltages of the high-voltage power supply during testing. In this way, the high-voltage power supply of different voltages can be better tested, and since the impedance devices have a lower cost than the expensive and bulky high-voltage tower, the testing cost can also be reduced.

[0007] In an optional embodiment, the device further comprises an output terminal arranged on the housing and connected with the main high-voltage branch, the output terminal is used for being connected with an oscilloscope, and the input terminal and the output terminal are respectively connected at two ends of the variable impedance module. The output terminal is arranged for being connected with the oscilloscope, so that the relevant information of the high-voltage power supply can be displayed in real time by the oscilloscope during testing of the high-voltage power supply, and the testing result of the high-voltage power supply is more intuitive. Moreover, since the input terminal and the output terminal are respectively connected at two ends of the variable impedance module, the overall impedance of the variable impedance module can be adjusted according to the voltage value of the high-voltage power supply and the rated input voltage of the oscilloscope during testing, thereby realizing the compatibility between the high-voltage power supply of different voltages and the oscilloscope of different rated input voltages.

[0008] In an optional embodiment, the output voltage of the output terminal is less than or equal to 24V. The output voltage of the output terminal is reduced to less than or equal to 24V by the variable impedance module, so that a commonly used low-voltage oscilloscope can be connected, and an expensive high-voltage resistant oscilloscope does not need to be used, thereby further reducing the testing cost.

[0009] In an optional embodiment, the output ends of the main high-voltage branch and the several sub high-voltage branches are connected to each other in an equipotential manner.

[0010] In an optional embodiment, the sub high-voltage branch includes an accelerating electrode branch, and an overload protector is arranged on the accelerating electrode branch, and the overload protector is used for overload protection when the current in the main high-voltage branch exceeds a protection threshold. Arranging the overload protector on the accelerating electrode branch can protect the high-voltage power supply and the testing device in real time, and avoid damage to the high-voltage power supply and the testing device caused by excessive current.

[0011] In an optional embodiment, the sub high-voltage branch includes a suppressor electrode branch, and a ratio of a difference between a total impedance value of the impedance devices in the main high-voltage branch and a total impedance value of the impedance devices in the suppressor electrode branch to the total impedance value of the impedance devices in the suppressor electrode branch is less than a preset threshold. The smaller impedance difference between the suppressor electrode branch and the main high-voltage branch can make the voltage drop between the suppressor electrode branch and the main high-voltage branch smaller.

[0012] In an optional embodiment, the sub high-voltage branch includes a puller electrode branch, and a ratio of a difference between a total impedance value of the impedance devices in the main high-voltage branch and a total impedance value of the impedance devices in the puller electrode branch to the total impedance value of the impedance devices in the puller electrode branch is less than a preset threshold. The smaller impedance difference between the puller electrode branch and the main high-voltage branch can make the voltage drop between the puller electrode branch and the main high-voltage branch smaller.

[0013] In an optional embodiment, a mechanical pre-centering structure arranged on the shell is further included, and the mechanical pre-centering structure is used for fixing a connection pose of the electron beam high-voltage power supply testing device when the electron beam high-voltage power supply testing device is connected to other devices. Arranging the mechanical pre-centering structure to fix the connection pose of the testing device and other devices ensures correct alignment and firm locking of the plug in the plugging process, improves the stability and durability of the testing device, and also reduces the operation difficulty and cost in the testing process.

[0014] In a second aspect, the embodiments of the present application provide an electron beam high-voltage power supply testing circuit, including: a plurality of testing branches, each of the testing branches including a plurality of impedance devices, and each of the testing branches having different input terminals, and the input terminals are respectively used for connecting a plurality of output voltages of the electron beam high-voltage power supply; the plurality of testing branches include a main high-voltage branch and a plurality of sub high-voltage branches, and the plurality of impedance devices in the main high-voltage branch form a variable impedance module.

[0015] Compared with the related art, the electronic beam high-voltage power supply test circuit provided by the embodiment of the application is provided with multiple input terminals, and the multiple input terminals are respectively used for connecting multiple output voltages of the electronic beam high-voltage power supply, so that the multiple output voltages of the electronic beam high-voltage power supply can be received simultaneously for testing, the effect of simultaneously testing the multiple output voltages of the electronic beam high-voltage power supply is realized, and because the multiple input terminals are mutually insulated, mutual crosstalk between the multiple output voltages can be prevented, and the safety during testing is ensured, and damage to equipment or injury to personnel caused by high-voltage leakage is avoided. Meanwhile, a plurality of impedance devices are arranged in the main high-voltage branch to form a variable impedance module, and during testing, the impedance value of the variable impedance module can be adjusted according to different voltages of the high-voltage power supply, so that the high-voltage power supply of different voltages can be better tested.

[0016] In a third aspect, the embodiment of the application provides an electronic beam high-voltage power supply test device, which comprises the electronic beam high-voltage power supply test device and a low-voltage oscilloscope connected with the electronic beam high-voltage power supply test device. BRIEF DESCRIPTION OF DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the application, the following will briefly introduce the drawings needed to be used in the embodiments. It should be understood that the following drawings only show some of the embodiments of the application, and therefore should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can also be obtained from these drawings.

[0018] Figure 1 The structural schematic diagram of the electronic beam high-voltage power supply test device provided by the embodiment of the application;

[0019] Figure 2 The circuit structural schematic diagram of the electronic beam high-voltage power supply test device provided by the embodiment of the application;

[0020] Figure 3 The circuit structural schematic diagram of the variable impedance circuit provided by the embodiment of the application;

[0021] Figure 4 The circuit structural schematic diagram of the electronic beam high-voltage power supply test circuit provided by the embodiment of the application;

[0022] Figure 5 The structural schematic diagram of the electronic beam high-voltage power supply test device provided by the embodiment of the application. DETAILED DESCRIPTION

[0023] In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the following will be combined with the accompanying drawings for the embodiments of the present application to make a clear and complete description of the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments of the present application. The components of the embodiments of the present application described and shown in the accompanying drawings can be arranged and designed in various different configurations.

[0024] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application.

[0025] It should be noted that: similar reference numerals and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.

[0026] In addition, if the terms "first", "second" and the like are used, they are only used to distinguish descriptions, and cannot be understood as indicating or implying relative importance.

[0027] It should be noted that: the features in the embodiments of the present application can be combined with each other without conflict.

[0028] Please refer to Figure 1 The embodiments of the present application provide an electron beam high-voltage power supply testing device 100, which can be connected with a high-voltage power supply 300 through a wire harness 200. The electron beam high-voltage power supply testing device 100 includes a shell 10 having a receiving space (located inside the shell 10, Figure 1 not shown), a plurality of input terminals (located inside the wire harness 200, Figure 1 not shown) arranged on the shell 10 and insulated from each other, and a high-voltage power supply testing circuit (located inside the shell 10, Figure 1 not shown) arranged in the receiving space and connected with the plurality of input terminals. Please refer to Figure 2 The high-voltage power supply testing circuit 20 includes a plurality of test branches, each test branch includes a plurality of impedance devices, and each test branch is connected with a different input terminal 30. The plurality of test branches include a main high-voltage branch (i.e. the Filament + test branch 21) and a plurality of sub high-voltage branches, and the plurality of impedance devices in the main high-voltage branch form a variable impedance module 211.

[0029] The electron beam high-voltage power supply usually includes multiple output voltages, for example, can include Filament+, Filament-, Bias, pull-out electrode, suppressor electrode, and accelerating electrode, etc. Among them, Filament+ and Filament- are the positive and negative terminals of the filament respectively. The filament is connected to the high-voltage power supply through these two terminals, and when current passes through, the filament generates heat, thereby generating hot electron emission. Filament+ is connected to the positive of the high-voltage power supply, and Filament- is connected to the negative of the high-voltage power supply. The current flows from Filament+ into the filament and then flows out from Filament-, so that the filament reaches the appropriate temperature to emit electrons. Bias is a bias voltage, which is used to adjust the emission characteristics of electrons in the electron beam device. By applying an appropriate bias voltage, the number, speed and direction of electron emission can be controlled, thereby affecting the intensity, focusing degree and stability of the electron beam, etc. For example, in some electron microscopes, the bias voltage can be used to adjust the brightness and contrast of the electron beam. In the high-voltage power supply, the pull-out electrode serves as a first-order electrostatic lens, so that in the case that the filament current is not too large, the electrons in the tip region of the filament obtain a larger potential energy. When this potential energy exceeds the material's own escape work, a large number of electrons will jump to the surface of the material and be released under the action of the electrostatic field. The function of the suppressor electrode is to suppress the electrons on the surface of the material except the tip region of the filament, so that as few as possible are excited, thereby reducing the chromatic aberration of the beam spot and improving the service life of the filament. The accelerating electrode is the accelerating voltage, which is an important parameter in the electron beam high-voltage power supply, and is a very high positive voltage applied between the anode and the cathode of the electron gun. Its function is to accelerate the electron beam emitted from the filament to obtain sufficient energy, thereby forming a high-speed moving electron beam. The size of the accelerating voltage directly affects the energy and speed of the electron beam, and thus affects the effect of the electron beam interacting with the sample or workpiece. For example, in an electron microscope, the accelerating voltage determines the penetration ability and resolution of the electron beam; in an electron beam processing device, the accelerating voltage affects the processing depth and precision of the electron beam on the material.

[0030] In the embodiment, the plurality of input terminals 30 are respectively used to connect the multiple output voltages of the electron beam high-voltage power supply, such as Figure 2As shown, the plurality of input terminals 30 can specifically include a Filament + input terminal 31 for connecting a Filament +, a suppressor input terminal 32 for connecting a suppressor, a puller input terminal 33 for connecting a puller, and an accelerator input terminal 34 for connecting an accelerator. In some other embodiments of the present application, the plurality of input terminals 30 may, for example, also include an input terminal for connecting a Bias. The plurality of input terminals 30 are respectively connected to different test branches, such as Figure 2 As shown, the Filament + input terminal 31 is connected to the Filament + test branch 21, the suppressor input terminal 32 is connected to the suppressor test branch 22, the puller input terminal 33 is connected to the puller test branch 23, and the accelerator input terminal 34 is connected to the accelerator test branch 24.

[0031] In the present embodiment, the test branch 21 is a main high-voltage branch, in which a plurality of impedance devices form a variable impedance module 211. That is, for the entire variable impedance module 211, the total impedance value thereof is variable and can be adjusted according to actual needs. Specifically, the variable impedance module can specifically include one variable impedance device, such as a variable resistor. Alternatively, it can also be, for example Figure 3 As shown, the variable impedance circuit formed by the plurality of impedance devices 40, in which the overall impedance to the outside is adjustable and variable according to the closing condition of the switch 50.

[0032] Compared with the related art, the electronic beam high-voltage power supply testing device provided by the present application sets a plurality of input terminals 30, which are respectively used for connecting a plurality of output voltages of the electronic beam high-voltage power supply, so that the plurality of output voltages of the electronic beam high-voltage power supply can be simultaneously received for testing, achieving the effect of simultaneously testing the plurality of output voltages of the electronic beam high-voltage power supply. Moreover, since the plurality of input terminals are mutually insulated, mutual crosstalk between the plurality of output voltages can be prevented, and the safety during testing is ensured, avoiding damage to equipment or injury to personnel caused by high-voltage leakage. Meanwhile, a plurality of impedance devices are arranged in the main high-voltage branch (i.e., the Filament + test branch 21) to form a variable impedance module 211, and the impedance value of the variable impedance module 211 can be adjusted according to different voltages of the high-voltage power supply during testing, so that the high-voltage power supply of different voltages can be better tested. At the same time, since the impedance devices have a lower cost than the expensive and bulky high-voltage tower, the testing cost can also be reduced.

[0033] Please continue to refer to Figure 1 The electronic beam high-voltage power supply testing device provided by the present application further includes an output terminal 60 arranged on the housing 10 and used for connecting an oscilloscope, such as Figure 2As shown, the output terminal 60 is connected with the main high-voltage branch (i.e. the Filament + test branch 21), and the input terminal 30 and the output terminal 60 are respectively connected at two ends of the variable impedance module 211. By setting the output terminal 60 for connection with the oscilloscope, the relevant information of the high-voltage power supply can be displayed in real time through the oscilloscope during the test of the high-voltage power supply, so that the test result of the high-voltage power supply is more intuitive. At the same time, since the input terminal 30 and the output terminal 60 are respectively connected at two ends of the variable impedance module 211, the overall impedance of the variable impedance module 211 can be adjusted according to the voltage value of the high-voltage power supply and the rated input voltage of the oscilloscope during the test, so as to realize the compatibility between the high-voltage power supply of different voltages and the oscilloscope of different rated input voltages.

[0034] In the embodiments of the present application, the output terminal 60 can also be provided in plurality, and the plurality of output terminals are respectively connected with the plurality of input terminals and the test branches. After the output terminal 60 is connected with the oscilloscope, the relevant information of the plurality of voltages connected with the test branches can be displayed correspondingly, so as to realize the simultaneous test of the plurality of voltages.

[0035] In the embodiments of the present application, the output voltage of the high-voltage power supply can cover 200V to 30kV, and the output voltage of the output terminal is less than or equal to 24V after the voltage reduction processing of the variable impedance module 211. By reducing the output voltage of the output terminal to less than or equal to 24V through the variable impedance module 211, a commonly used low-voltage oscilloscope can be connected, without the need to use an expensive high-voltage oscilloscope, so as to further reduce the test cost. It can be understood that, since the rated voltage of the common low-voltage oscilloscope is less than or equal to 24V, the output voltage of the output terminal is controlled to be less than or equal to 24V in the embodiments of the present application to meet the rated voltage requirement of the low-voltage oscilloscope. In actual application, the actual output voltage of the output terminal can also be set according to the actual rated voltage of the low-voltage oscilloscope.

[0036] In the embodiment of the present application, the output ends of the main high-voltage branch (i.e. the Filament + test branch 21) and the several sub-high-voltage branches (including: the suppressor electrode test branch 22, the puller electrode test branch 23, and the accelerator electrode test branch 24) are connected to each other in an equipotential manner. Equipotential connection is mainly achieved by connecting the conductive parts of the device together with a conductor, so that they are at the same potential, thereby avoiding the generation of potential difference between different components and causing electric shock or other electrical safety problems. In the embodiment of the present application, the output ends of the main high-voltage branch (i.e. the Filament + test branch 21) and the several sub-high-voltage branches (the suppressor electrode test branch 22, the puller electrode test branch 23, and the accelerator electrode test branch 24) are connected to each other, so that the output ends of the main high-voltage branch (i.e. the Filament + test branch 21) and the several sub-high-voltage branches (the suppressor electrode test branch 22, the puller electrode test branch 23, and the accelerator electrode test branch 24) are at the same potential, reducing the occurrence of mutual discharge between the main high-voltage branch (i.e. the Filament + test branch 21) and the several sub-high-voltage branches (the suppressor electrode test branch 22, the puller electrode test branch 23, and the accelerator electrode test branch 24), and improving the safety of the test device.

[0037] In the embodiment of the present application, the sub-high-voltage branch includes the accelerator electrode branch accelerator electrode test branch 24 connected to the accelerator electrode input terminal 34, and an overload protector 70 is arranged on the accelerator electrode branch. The overload protector 70 is used for overload protection when the current in the main high-voltage branch (i.e. the Filament + test branch 21) exceeds the protection threshold. The overload protector 70 is a device used to protect electrical equipment and circuits from overload damage, and usually works based on the principle of current induction. When the current in the main high-voltage branch (i.e. the Filament + test branch 21) exceeds the preset protection threshold, the overload protector 70 detects the abnormal increase of the current in the main high-voltage branch (i.e. the Filament + test branch 21), and the current sensing element inside it, such as a thermal bimetallic strip or a current transformer, will bend due to the heat generated by the current. When it bends to a certain extent, it will trigger and cut off the connection between the test device and the high-voltage power supply, thereby preventing the test device and the high-voltage power supply from being damaged due to long-term overload. Arranging the overload protector 70 on the accelerator electrode branch accelerator electrode test branch 24 can protect the high-voltage power supply and the test device in real time, avoiding damage to the high-voltage power supply and the test device caused by excessive current.

[0038] In the embodiments of the present application, the high-voltage branch further comprises a suppressor test branch 22 connected with the suppressor input terminal 32, and the ratio of the difference between the total impedance value of the impedance device in the main high-voltage branch (i.e. the Filament + test branch 21) and the total impedance value of the impedance device in the suppressor test branch 22 to the total impedance value of the impedance device in the suppressor test branch 22 is less than a preset threshold. The preset threshold may, for example, be 5%, 10%, etc. The smaller impedance difference between the suppressor test branch 22 and the main high-voltage branch (i.e. the Filament + test branch 21) can result in a smaller voltage drop between the suppressor test branch 22 and the main high-voltage branch (i.e. the Filament + test branch 21).

[0039] In the embodiments of the present application, the electron beam high-voltage power supply testing device further comprises an inflatable port 80 arranged on the housing 10 and openable and closable, and the inflatable port 80 is used to inject a protective gas into the accommodation space. During the testing process of the high-voltage power supply, the protective gas such as inert gas, sulfur hexafluoride gas, etc. is injected into the accommodation space via the inflatable port 80, so as to protect the electronic devices in the accommodation space, reduce the high-voltage breakdown and external discharge phenomenon caused by the excessively high voltage of the high-voltage power supply, improve the stability of the testing process and the reliability of the testing result, and improve the safety of the testing device and the testing process.

[0040] Please continue to refer to Figure 1 In the embodiments of the present application, the mechanical pre-centering structure 90 arranged on the housing 10 is used to fix the connection pose of the electron beam high-voltage power supply testing device when the electron beam high-voltage power supply testing device is connected with other devices. As shown in the Figure 1 The mechanical pre-centering structure 90 is a convex block with a fan-shaped cross section, and a corresponding recess with a corresponding shape is arranged in the corresponding other connecting device. Through the corresponding arrangement of the convex block and the recess in the other device, the electron beam high-voltage power supply testing device can be connected in the same pose when the electron beam high-voltage power supply testing device is connected with the other device. The mechanical pre-centering structure 90 is arranged to fix the connection pose of the testing device and the other device, so as to ensure the correct alignment and firm locking of the plug during the plugging process, improve the stability and durability of the testing device, and also reduce the operation difficulty and cost in the testing process.

[0041] Further, in the embodiments of the present application, the test device can also include a smart foolproof design to ensure the correct alignment and secure locking of the plug during insertion. At the same time, the module also supports the quick insertion and locking function of the plug, simplifying the installation and removal process of the test equipment. In addition, the module also prevents problems such as gas leakage, arc discharge or high voltage breakdown caused by loosening of the plug during use through the built-in locking screw design. Traditional test equipment is prone to damage or test failure due to human operation errors during installation and removal. The module provides mechanical pre-centering and smart foolproof design functions, not only improving the stability and durability of the test equipment, but also reducing the difficulty and cost of operation during testing. At the same time, the module also supports the quick calibration and debugging function of the test equipment, providing a strong guarantee for the smooth progress of the test process.

[0042] The embodiments of the present application also provide an electron beam high-voltage power supply test circuit, as shown in Figure 4 The embodiments of the present application also provide an electron beam high-voltage power supply test circuit, as shown in

[0043] Compared with the related art, the electron beam high-voltage power supply test circuit provided by the embodiments of the present application is provided with multiple input terminals 30, and the multiple input terminals 30 are respectively used to connect the multi-channel output voltage of the electron beam high-voltage power supply, so that the multi-channel output voltage of the electron beam high-voltage power supply can be received simultaneously for testing, achieving the effect of simultaneously testing the multi-channel output voltage of the electron beam high-voltage power supply, and because the multiple input terminals 30 are mutually insulated, the mutual crosstalk between the multi-channel output voltage can be prevented, and the safety during testing is also ensured, avoiding damage to the equipment or injury to personnel caused by high-voltage leakage. At the same time, the multiple impedance devices in the main high-voltage branch 21 form a variable impedance module 115, and the impedance value of the variable impedance module 115 can be adjusted according to the different voltages of the high-voltage power supply during testing, so that the high-voltage power supply with different voltages can be better tested.

[0044] The embodiments of the present application also provide an electron beam high-voltage power supply test circuit, as shown in Figure 5 The embodiments of the present application also provide an electron beam high-voltage power supply test circuit, as shown in

[0045] It can be understood that, since the rated voltage of a common low-voltage oscilloscope is less than or equal to 24V, the rated voltage of the low-voltage oscilloscope 400 in the embodiment can be less than or equal to 24V, and the output voltage of the electron beam high-voltage power supply testing device 100 is less than or equal to 24V. In actual application, the actual output voltage of the electron beam high-voltage power supply testing device 100 can also be set according to the actual rated voltage of the low-voltage oscilloscope.

[0046] The above merely provides a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any modification or replacement within the technical scope disclosed by the present application can be easily thought of by those skilled in the art, and should be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. An electron beam high voltage power supply testing device, characterized by, The application relates to an electron beam high-voltage power supply testing device. The device comprises a shell with a receiving space, a plurality of input terminals arranged on the shell and insulated from each other, and a high-voltage power supply testing circuit arranged in the receiving space and connected with the plurality of input terminals. The plurality of input terminals are respectively used for connecting a plurality of output voltages of the electron beam high-voltage power supply. The high-voltage power supply testing circuit comprises a plurality of testing branches, each of which comprises a plurality of impedance devices. The plurality of testing branches comprise a main high-voltage branch and a plurality of sub high-voltage branches. The plurality of impedance devices in the main high-voltage branch form a variable impedance module. The output ends of the main high-voltage branch and the plurality of sub high-voltage branches are connected in an equipotential manner.

2. The electron beam high voltage power supply test device of claim 1, wherein, The sub high-voltage branches comprise a suppressor branch, and the ratio of the difference between the total impedance value of the impedance devices in the main high-voltage branch and the total impedance value of the impedance devices in the main high-voltage branch to the total impedance value of the impedance devices in the suppressor branch is less than a preset threshold.

3. The electron beam high voltage power supply test device of claim 2, wherein, The device further comprises an output terminal arranged on the shell and connected with the main high-voltage branch, the output terminal being used for being connected with an oscilloscope.

4. The electron-beam high-voltage power supply test device according to claim 1, characterized in that, The output voltage of the output terminal is less than or equal to 24 V.

5. The electron-beam high-voltage power supply test device according to claim 1, characterized in that The sub high-voltage branches comprise an accelerating electrode branch, and an overload protector is arranged on the accelerating electrode branch.

6. The electron-beam high-voltage power supply test device of claim 1, wherein, The sub high-voltage branches comprise a pull-out electrode branch, and the ratio of the difference between the total impedance value of the impedance devices in the main high-voltage branch and the total impedance value of the impedance devices in the main high-voltage branch to the total impedance value of the impedance devices in the pull-out electrode branch is less than a preset threshold.

7. An electron beam high voltage power supply test apparatus characterized by comprising: The device further comprises a mechanical pre-centering structure arranged on the shell, which is used for fixing the connection position of the electron beam high-voltage power supply testing device when the electron beam high-voltage power supply testing device is connected with other devices. The application further relates to an electron beam high-voltage power supply testing device and a low-voltage oscilloscope connected with the electron beam high-voltage power supply testing device.

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