Configuration file processing method

Abstract

The embodiment of the invention provides a method for processing a configuration file, which comprises the following steps of: displaying a default hierarchical relationship configuration tree and a page navigation pool corresponding to a device type in a display page in response to a first configuration instruction carrying the device type, so that a user can carry out configuration operation on a target sub-node; the target sub-node is configured under the first-level node of the default hierarchical relationship configuration tree, so that a target hierarchical relationship configuration tree is obtained, and after configuration of the target hierarchical relationship configuration tree is completed, a user can generate a configuration file through a storage operation for the target hierarchical relationship configuration tree. The configuration file is used for rendering a UI page corresponding to the target hierarchical relationship configuration tree when the semiconductor process equipment loads the configuration file. According to the method for configuring the UI page, a user does not need to compile code levels for various semiconductor process devices, the purpose of simplifying the configuration process of the UI page is achieved, and the configuration efficiency of the UI page is improved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, in particular to a page configuration technology in the field of semiconductor technology, and more particularly to a method for processing a configuration file. Background Art

[0002] With the continuous advancement of semiconductor technology, various types of semiconductor process equipment have emerged. These semiconductor process equipment can be used to perform various semiconductor processes such as etching, chemical vapor deposition, and physical vapor deposition on process objects (such as wafers). In related technologies, the configuration of the user interface (UI) design (also known as human-computer interaction) interface of semiconductor process equipment is relatively cumbersome. Summary of the Invention

[0003] The embodiments of this specification provide a method for processing a configuration file to simplify the configuration process of a UI page and improve the configuration efficiency of the UI page.

[0004] To achieve the above technical objectives, the embodiments of this specification provide the following technical solutions:

[0005] In a first aspect, an embodiment of this specification provides a configuration file processing method, which is applied to semiconductor process equipment. The configuration file processing method includes:

[0006] In response to a first configuration instruction carrying a device type, a default hierarchical relationship configuration tree corresponding to the device type and a page navigation pool corresponding to the device type are displayed on a display page; the device type is used to describe the type of the semiconductor process equipment, the default hierarchical relationship configuration tree includes a first-level node corresponding to the semiconductor process equipment, the first-level node corresponds to a sub-page identifier of a human-computer interaction UI page of the semiconductor process equipment; the page navigation pool includes a plurality of sub-nodes, the sub-nodes corresponding to sub-pages in the UI page;

[0007] In response to a configuration operation on a target subnode, the target subnode is configured under the first-level node or other subnodes to obtain a target hierarchical relationship configuration tree; the target subnode is a subnode in the page navigation pool;

[0008] In response to a save operation on the target hierarchical relationship configuration tree, a configuration file corresponding to the target hierarchical relationship configuration tree is generated, and the configuration file is used to render a UI page corresponding to the target hierarchical relationship configuration tree when the semiconductor process equipment loads the configuration file.

[0009] In a second aspect, an embodiment of the present specification provides a configuration file processing device, which is applied to semiconductor process equipment. The configuration file processing device includes:

[0010] a first display module configured to, in response to a first configuration instruction carrying a device type, display a default hierarchical relationship configuration tree corresponding to the device type and a page navigation pool corresponding to the device type on a display page; the device type is used to describe the type of the semiconductor process equipment, the default hierarchical relationship configuration tree includes a first-level node corresponding to the semiconductor process equipment, the first-level node corresponds to a sub-page identifier of a human-computer interaction UI page of the semiconductor process equipment; the page navigation pool includes a plurality of sub-nodes, the sub-nodes corresponding to sub-pages in the UI page;

[0011] a hierarchical configuration module, configured to, in response to a configuration operation on a target subnode, configure the target subnode under the first-level node or other subnodes to obtain a target hierarchical relationship configuration tree; the target subnode is a subnode in the page navigation pool;

[0012] A file generation module is used to generate a configuration file corresponding to the target hierarchical relationship configuration tree in response to a save operation on the target hierarchical relationship configuration tree, and the configuration file is used to render a UI page corresponding to the target hierarchical relationship configuration tree when the semiconductor process equipment loads the configuration file.

[0013] In a third aspect, one embodiment of the present specification provides a semiconductor process device, comprising: a process chamber and a controller communicating with the process chamber, wherein a UI page configuration tool is stored in the controller, and the UI page configuration tool is configured to:

[0014] In response to a first configuration instruction carrying a device type, a default hierarchical relationship configuration tree corresponding to the device type and a page navigation pool corresponding to the device type are displayed on a display page; the device type is used to describe the type of the semiconductor process equipment, the default hierarchical relationship configuration tree includes a first-level node corresponding to the semiconductor process equipment, the first-level node corresponds to a sub-page identifier of a human-computer interaction UI page of the semiconductor process equipment; the page navigation pool includes a plurality of sub-nodes, the sub-nodes corresponding to sub-pages in the UI page;

[0015] In response to a configuration operation on a target subnode, the target subnode is configured under the first-level node or other subnodes to obtain a target hierarchical relationship configuration tree; the target subnode is a subnode in the page navigation pool;

[0016] In response to a save operation on the target hierarchical relationship configuration tree, a configuration file corresponding to the target hierarchical relationship configuration tree is generated, and the configuration file is used to render a UI page corresponding to the target hierarchical relationship configuration tree when the semiconductor process equipment loads the configuration file.

[0017] In a fourth aspect, an embodiment of the present specification further provides a computing device, comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor implements the configuration file processing method as described above when executing the computer program.

[0018] In a fifth aspect, an embodiment of the present specification further provides a computer-readable storage medium, on which a computer program is stored. When the computer program is executed by a processor, the configuration file processing method described above is implemented.

[0019] In a sixth aspect, an embodiment of this specification provides a computer program product or a computer program, wherein the computer program product includes a computer program, and the computer program is stored in a computer-readable storage medium; the processor of the computer device reads the computer program from the computer-readable storage medium, and the processor implements the steps of the above-mentioned configuration file processing method when executing the computer program.

[0020] It can be seen from the above technical solution that the configuration file processing method provided in the embodiment of this specification, by responding to the first configuration instruction carrying the device type, displays the default hierarchical relationship configuration tree corresponding to the device type and the page navigation pool corresponding to the device type in the display page, so that the user can configure the target sub-node under the first-level node of the default hierarchical relationship configuration tree through the configuration operation on the target sub-node, thereby obtaining the target hierarchical relationship configuration tree. After the configuration of the target hierarchical relationship configuration tree is completed, the user can generate a configuration file through the save operation on the target hierarchical relationship configuration tree. The configuration file is used to render the UI page corresponding to the target hierarchical relationship configuration tree when the semiconductor process equipment loads the configuration file. In this way, in the process of generating the configuration file, the configuration of the UI page of the semiconductor process equipment can be realized through the configuration operation on the target sub-node and the save operation on the target hierarchical relationship configuration tree. There is no need for the user to compile the code level for various types of semiconductor process equipment, thereby achieving the purpose of simplifying the configuration process of the UI page and improving the configuration efficiency of the UI page. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of this specification or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are merely embodiments of this specification. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without any creative work.

[0022] Figure 1 A flowchart of a configuration file processing method provided in accordance with one embodiment of the present disclosure;

[0023] Figure 2 A schematic diagram of an interface of a display page provided for one embodiment of this specification;

[0024] Figure 3 A schematic diagram of an interface of a display page provided in accordance with another embodiment of the present disclosure;

[0025] Figure 4 A schematic diagram of an interface of a display page provided in yet another embodiment of this specification;

[0026] Figure 5 A schematic diagram of an interface of a display page provided in yet another embodiment of this specification;

[0027] Figure 6 A schematic diagram of an interface of a display page provided for an optional implementation manner of this specification;

[0028] Figure 7 A schematic diagram of an example structure of a configuration file provided for one embodiment of this specification;

[0029] Figure 8 A schematic diagram of the structure of a computing device provided for one embodiment of this specification. DETAILED DESCRIPTION

[0030] Unless otherwise defined, technical or scientific terms used in the embodiments of this specification should have the same ordinary meaning as those understood by persons of ordinary skill in the art to which this specification pertains. The terms "first," "second," and similar terms used in the embodiments of this specification do not denote any order, quantity, or importance, but are provided solely to avoid confusion between constituent elements.

[0031] Unless the context requires otherwise, throughout this specification, the term "plurality" means "at least two," and "including" is to be interpreted as open and inclusive, meaning "including, but not limited to." Throughout this specification, the terms "one embodiment," "some embodiments," "exemplary embodiments," "example," "specific example," or "some examples" are intended to indicate that a particular feature, structure, material, or characteristic associated with the embodiment or example is included in at least one embodiment or example of this specification. The schematic representations of these terms do not necessarily refer to the same embodiment or example.

[0032] The following will be combined with the drawings in the embodiments of this specification to clearly and completely describe the technical solutions in the embodiments of this specification. Obviously, the embodiments described are only part of the embodiments of this specification, not all of the embodiments. Based on the embodiments in this specification, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of this specification.

[0033] Overview

[0034] The preparation process of semiconductor devices involves multiple key process steps such as etching and film formation, and various types of semiconductor process equipment are important equipment for implementing these process steps. Due to the diverse types of process steps involved in the preparation process of semiconductor devices, there are also many types of semiconductor process equipment corresponding to the various process steps, and in order to meet the preparation needs of various semiconductor devices, there may also be multiple types of semiconductor process equipment for performing the same process step. For example, in the etching process, multiple types of etching equipment may be required to meet the etching requirements of wafers of different sizes or different device types. Therefore, for a semiconductor process equipment manufacturer, there may be a large number of semiconductor process equipment on sale.

[0035] In order to improve the usability of semiconductor process equipment and make it easier to operate and understand, semiconductor process equipment manufacturers can set up a UI page in the semiconductor process equipment so that users can learn about the various parameters of the semiconductor process equipment through the UI page and control the semiconductor process equipment through the UI page. However, currently, users need to compile code separately for different types of semiconductor process equipment to render the UI page, and the UI pages of different types of semiconductor process equipment may be different. This requires users to compile the relevant code for different types of semiconductor process equipment one by one. After the relevant code is compiled, if the UI page needs to be adjusted, the code needs to be recompiled, and the whole process is relatively complicated.

[0036] In order to reduce the difficulty of generating and adjusting UI pages, the inventors have found through research that a UI page configuration tool can be provided in semiconductor process equipment. The UI page configuration tool can be configured to provide a display page at runtime. When a first configuration instruction carrying a device type is received, a default hierarchical relationship configuration tree corresponding to the device type and a page navigation pool corresponding to the device type are displayed in the display page; the device type is used to describe the type of the semiconductor process equipment, the default hierarchical relationship configuration tree includes a first-level node corresponding to the semiconductor process equipment, and the first-level node corresponds to a sub-page identifier of the human-computer interaction UI page of the semiconductor process equipment; the page navigation pool includes multiple sub-nodes, and the sub-nodes correspond to the U I page; and the UI page configuration tool can support users to configure the target sub-node, that is, the UI page configuration tool can respond to the configuration operation for the target sub-node and configure the target sub-node under the first-level node or other sub-nodes. In this way, the configuration operation of the sub-nodes under each first-level node can be implemented in a visual operation manner, thereby realizing the setting of the hierarchical relationship of each node in the target hierarchical relationship configuration tree. Finally, the UI page configuration tool can also respond to the save operation for the target hierarchical relationship configuration tree and generate a configuration file corresponding to the target hierarchical relationship configuration tree. The configuration file is used to render the UI page corresponding to the target hierarchical relationship configuration tree when the semiconductor process equipment loads the configuration file. In this way, the configuration of the UI page of the semiconductor process equipment is realized through the UI page configuration tool, without the user having to compile the code level for various types of semiconductor process equipment, thereby achieving the purpose of simplifying the configuration process of the UI page and improving the configuration efficiency of the UI page.

[0037] Based on the above concept, an embodiment of this specification provides a method for processing a configuration file. The configuration file processing method provided in the embodiment of this specification will be exemplarily described below with reference to the accompanying drawings.

[0038] Exemplary Methods

[0039] To be applied to Figure 1 Taking the controller in the example, the controller may be a host computer in a semiconductor process device, or may be a processor in a host computer. This specification does not limit this, and the specific method depends on the actual situation. Some embodiments of this specification exemplify the method for processing the configuration file, and the method for processing the configuration file includes:

[0040] S101: In response to a first configuration instruction carrying a device type, a default hierarchical relationship configuration tree corresponding to the device type and a page navigation pool corresponding to the device type are displayed in a display page; the device type is used to describe the type of the semiconductor process equipment, and the default hierarchical relationship configuration tree includes a first-level node corresponding to the semiconductor process equipment, and the first-level node corresponds to a sub-page identifier of a human-computer interaction UI page of the semiconductor process equipment; the page navigation pool includes multiple sub-nodes, and the sub-nodes correspond to sub-pages in the UI page.

[0041] refer to Figure 2 , Figure 2 A schematic diagram of a display page before receiving the first configuration instruction is shown. Figure 2 In the embodiment, the user can trigger the first configuration instruction by touching or clicking the device type drop-down box and selecting the device type from the drop-down box list. For example, in some embodiments, the user can touch or click the device type drop-down box to display the drop-down box list on the display page. The drop-down box list can use Etch, CVD, and PVD to represent semiconductor process equipment such as etching equipment, chemical vapor deposition equipment, and physical vapor deposition equipment, respectively. When there are multiple types of semiconductor process equipment of the same type, these semiconductor process equipment can be distinguished by serial numbers. For example, taking etching equipment as an example, assuming there are three types of etching equipment, these three types of etching equipment can be represented by Etch1, Etch2, and Etch3, respectively. That is, in this embodiment, the device type can be represented by the device identifier (e.g., Etch, CVD, PVD, etc.) in the drop-down box list. In addition, in some embodiments, the first configuration instruction can also include a voice instruction (e.g., the user can input the voice instruction by sending a voice message "The device type is CVD" to a controller with a voice receiving function), etc. This specification is not limited to this and it depends on the actual situation.

[0042] The subpage identifier refers to an identifier for identifying the identity of a subpage, and can be used to uniquely identify a subpage. In one embodiment, the subpage identifier may include a subpage name, in another embodiment, the subpage identifier may include a subpage ID, etc., which is not limited in this specification.

[0043] The default hierarchical relationship configuration tree and page navigation pool can correspond to the device type. For example, taking the etching device as an example, when the device type carried in the first configuration instruction is the etching device, the page diagram of the display page is referenced Figure 3 The default hierarchical relationship configuration tree may include a root node UI and multiple first-level nodes (e.g. Figure 3Operation (main operation node), Service (service node), Recipes (recipe node), Diagnose (fault diagnosis node), Datalog (data log node), Settings (setting parameter node), Host (host control node), Alarm (alarm node)), these first-level nodes correspond to the main operation sub-page, service sub-page, recipe sub-page, fault diagnosis sub-page, data log sub-page, setting sub-page, host control sub-page and alarm sub-page in the UI page respectively. In the page navigation pool, some or all sub-nodes corresponding to the equipment type (such as etching equipment) are displayed. These sub-nodes may include, for example, Process Job sub-node (corresponding to process task sub-page), Control Job sub-node (corresponding to control task sub-page), etc. It is understandable that for semiconductor process equipment of different equipment types, their respective corresponding default hierarchical relationship configuration trees may be the same, and their respective corresponding sub-nodes in the page navigation pool may be different. However, this specification does not limit this. In some embodiments, for semiconductor process equipment of different equipment types, their respective corresponding default hierarchical relationship configuration trees may be different, and their respective corresponding sub-nodes in the page navigation pool may be the same. This specification does not make an exhaustive list here.

[0044] In one embodiment of the present specification, the default hierarchical relationship configuration tree corresponding to each of the device types and the page navigation pool corresponding to each of the device types are pre-established and stored in the semiconductor process equipment. That is, before generating and rendering the configuration file, the default hierarchical relationship configuration tree and page navigation pool corresponding to the device type of each semiconductor process equipment can be pre-established, and the established default hierarchical relationship configuration tree and page navigation pool can be stored in the semiconductor process equipment. When it is necessary to modify the default hierarchical relationship configuration tree and page navigation pool, the default hierarchical relationship configuration tree and page navigation pool can be corrected or updated by adding, modifying and deleting content on the stored default hierarchical relationship configuration tree and page navigation pool. The default hierarchical relationship configuration tree is not empty and can include at least a root node and a first-level node to meet the basic generation requirements of the configuration file.

[0045] S102: In response to a configuration operation on a target sub-node, the target sub-node is configured under the first-level node or other sub-nodes to obtain a target hierarchical relationship configuration tree; the target sub-node is a sub-node in the page navigation pool.

[0046] After displaying the default hierarchical relationship configuration tree corresponding to the device type and the page navigation pool corresponding to the device type, the user can configure the hierarchical relationship between each sub-page in the UI page through configuration operations.

[0047] refer to Figure 4 and Figure 5 , the configuration operation for the target child node can be as follows Figure 4 The click operation on the "+" sign on the right of the selected target child node can also be as follows Figure 5 The drag operation for the selected target sub-node can also be a voice operation for the target sub-node in some implementations (for example, a voice of "adding Process Job to Hardware" is issued). This specification does not limit this, and the specific implementation depends on the actual situation.

[0048] In the hierarchical relationship configuration tree column, the hierarchical relationship between the nodes is used to represent the hierarchical relationship between the sub-pages corresponding to each node. For example, Figures 4-5 In the example, the first-level node Service includes three sub-nodes: Module Mode (module mode sub-node), Material Movement (material movement sub-node) and Hardware (hardware sub-node). These three sub-nodes are three parallel sub-nodes under the first-level node Service (also called second-level nodes). Among these three second-level nodes, the Hardware sub-node includes two sub-nodes: LoadPorts (wafer loading and unloading position) and VTM (vacuum manipulator) (also called third-level nodes). These two third-level nodes are parallel sub-nodes. In the hierarchical relationship configuration tree column, the hierarchical relationship between each sub-page in the corresponding UI page is displayed through the hierarchical relationship between the nodes mentioned above, so as to help users understand the hierarchical relationship between each sub-page in the UI page during the configuration process in a visual way, which is conducive to simplifying the configuration method of the UI page. It can be understood that when a sub-node does not have a next-level node in the target hierarchical relationship tree, the sub-node can also be called a leaf node (for example Figure 5 The Module Mode, Material Movement, LoadPorts, and VTM child nodes in the diagram are all leaf nodes. When a child node has a next-level node, the child node can be called an N-level node based on its level, for example Figure 5 In the example, the Hardware child node can be called a secondary node.

[0049] It is understandable that in the hierarchical relationship configuration tree column, if it is in a state of only including the root node and the first-level node, the hierarchical relationship configuration tree can be called the default hierarchical relationship configuration tree. After the user selects the device type, the default hierarchical relationship configuration tree can be automatically loaded and generated, thereby simplifying user operations. In some embodiments, the arrangement order between multiple first-level nodes can be adjusted according to user needs. When child nodes are added to the default hierarchical relationship configuration tree, the default hierarchical relationship configuration tree can be called the target hierarchical relationship configuration tree. When the user completes the configuration of the child nodes under at least one first-level node, the target hierarchical relationship configuration tree can be saved by saving the operation.

[0050] S103: In response to a save operation on the target hierarchical relationship configuration tree, a configuration file corresponding to the target hierarchical relationship configuration tree is generated, wherein the configuration file is used to render a UI page corresponding to the target hierarchical relationship configuration tree when the semiconductor process equipment loads the configuration file.

[0051] refer to Figures 4 and 5 When the target hierarchical relationship configuration tree displayed in the hierarchical relationship configuration tree column meets the user's UI page configuration requirements for semiconductor process equipment of this device type, the configuration file corresponding to the target hierarchical relationship configuration tree can be generated by clicking the Save button. In other embodiments, the save operation may refer to a click or touch operation on the Save button. In other embodiments, the save operation may also refer to the operation of sending a voice message containing "Save" or similar information. This specification does not limit this.

[0052] In step S103, the generated configuration file can render a UI page corresponding to the saved target hierarchical relationship configuration tree when the semiconductor process equipment loads the configuration file, thereby implementing the configuration operation of the UI page of the semiconductor process equipment. In some embodiments, the configuration file can be one of the startup items of the semiconductor process equipment when it is started. That is, the semiconductor process equipment will automatically load the configuration file during the startup process, eliminating the need for the user to manually open the configuration file, which helps to simplify user operations and optimize the user experience.

[0053] In order to support the user's configuration requirements for the default loaded page in the UI page, in some embodiments, before generating the configuration file corresponding to the target hierarchical relationship configuration tree in response to the save operation on the target hierarchical relationship configuration tree, the process further includes:

[0054] In response to a selection operation on the sub-node, the sub-page corresponding to the selected sub-node is used as a default loading page, and the default loading page is a sub-page displayed after the semiconductor process equipment is started.

[0055] Similarly, the selection operation for the subnode includes but is not limited to at least one of a click operation, a touch operation, and a voice operation on the subnode. When the user selects a subnode in the target hierarchical relationship configuration tree, the subnode can be configured as the default loading page. The default loading page can be considered as the default page displayed after the UI page is rendered, or it can also be considered as the first page displayed after the UI page is rendered.

[0056] In this embodiment, the configuration of the default loading page can be completed through a simple selection operation, which is conducive to simplifying the configuration process of the UI page and improving configuration efficiency.

[0057] Still refer to Figure 6 In some implementations, in order to make the user clear about which sub-page the configured default loading page is, the configuration file processing method further includes:

[0058] In the display page, the name and / or path of the default loading page is displayed.

[0059] For example, Figure 6 In the example, if the selected subnode is the LoadPorts subnode, the displayed page shows the subnode's path: Service / Hardware / LoadPorts and its name (LoadPorts). This allows users to clearly identify the selected subnode and its hierarchical relationship with other subnodes by displaying the name and / or path of the default load page. This allows users to obtain more information from the displayed page, helping them better configure the UI page.

[0060] In order to meet the configuration requirements of the sub-page loading animation, in some embodiments, the configuration file processing method further includes:

[0061] In response to the second configuration instruction carrying the animation type, the animation effect corresponding to the animation type is set as the loading animation of the sub-page.

[0062] refer to Figure 6 The second configuration instruction can be triggered by triggering the animation type drop-down box and selecting the animation type in the drop-down box list. The animation type can be mainly used for sub-pages containing robots, for example, for setting the movements and animations of the robot when performing processes in the chamber. Figure 6 Key-6 in the animation type identifier represents an animation type. By selecting an animation type, you can configure the loading animation. Animation types include but are not limited to fade, translation, rotation, etc. This manual does not limit these types, and the specific configuration depends on the actual situation.

[0063] In some embodiments, in order to enable the user to clearly configure the animation type, where the animation type corresponds to the type of the semiconductor process equipment, the configuration file processing method further includes:

[0064] In the display page, the animation type is displayed.

[0065] In this embodiment, by setting the animation type, on the one hand, the loading effect of the sub-page can be optimized, and on the other hand, different types of machines can be distinguished through the animation type. For example, for a 6K machine, the animation type corresponding to key-6 can be selected as the loading animation of the sub-page. For an 8K machine, the animation type corresponding to key-8 can be selected as the loading animation of the sub-page, and so on, to help users distinguish the machine types through the animation type.

[0066] In addition, by displaying the animation type on the actual page, it can help users to clearly understand the configured animation type, and help users to better complete the configuration of the UI page.

[0067] In a feasible implementation, a feasible method for generating a configuration file is provided. Specifically, generating a configuration file corresponding to the target hierarchical relationship configuration tree includes:

[0068] Adding the device type as a UI type element value of a target file, wherein the target file includes a file in an eXtensible Markup Language (XML) format, and the UI type element value is used to describe the type of the semiconductor process equipment corresponding to the configuration file in XML format;

[0069] The nodes at each level in the target hierarchical relationship configuration tree are traversed, and the node values ​​of the nodes at each level are added as elements of the target file to obtain the configuration file.

[0070] The target file can refer to an intermediate file in the process of generating a configuration file, or the state before the configuration file is generated. During the configuration file generation process, you can first create a blank XML file as the target file. After adding the device type as the UI type element value of the target file and adding the node values ​​of each level of nodes as elements of the target file, the target file becomes the final configuration file.

[0071] In this embodiment, once the target hierarchical configuration tree is determined, a save operation can trigger the generation of a configuration file corresponding to the target hierarchical configuration tree. This configuration file can be in XML format. Data recorded in an XML-formatted configuration file is stored in text form, making it highly readable. Furthermore, XML-formatted configuration files can contain custom tags and data structures, allowing them to accommodate data of varying types and structures. This makes it suitable for storing complex configuration information and improves the scalability of the configuration file.

[0072] In addition, in this embodiment, the device type is recorded in the target file using the UI Type (UIType) element value, so that when the semiconductor process equipment loads the configuration file, the device type can be distinguished by the UI Type element value. In addition, by traversing the nodes at each level in the target hierarchical relationship configuration tree, the node values ​​at each level are added as elements in the target file, thereby recording the hierarchical relationship between each sub-page in the UI page. After the configuration of each element in the target file is completed, the target file can be saved as a configuration file.

[0073] In one embodiment, when an animation type is configured, generating a configuration file corresponding to the target hierarchical relationship configuration tree further includes:

[0074] The animation type is added as an animation type element value of the target file, and the animation type element value is used to describe the loading animation type of the sub-page.

[0075] Similar to the device type, in this embodiment, the animation type can be recorded as an animation type (Animation Type) element value, so that when the semiconductor process equipment loads the configuration file, it can identify the animation type through the animation type element value and load each sub-page with the corresponding animation effect.

[0076] refer to Figure 7 , Figure 7 An example of an XML-formatted configuration file (UIConfig.xml) is shown below. The configuration file is briefly introduced below:

[0077] a) <?xml version="1.0"?>

[0078] <UIConfig xmlns:xsd="http: / / www.w3.org / 2001 / XMLSchema"xmlns:xsi="http: / / www.w3.org / 2001 / XMLSchema-instance"> Unified format for configuration files in XML format.

[0079] b) The AnimationType element value is used to identify the selected animation type. Key_6 and Key_8 correspond to different animations. When the UI page is loaded, the animation type identified by the element value will be used for rendering.

[0080] c) The UIType element value is used to identify the device type. When semiconductor process equipment loads a configuration file, the dynamic link library corresponding to the device type to be loaded can be determined based on the element value. The element value can be configured as abbreviations such as Etch, PVD, and CVD. When the UI page is rendered, it is mapped to the dynamic link library with the full name (such as: Naura.Framework.UI.Components.Etch.dll).

[0081] d) The content of the UITypeAndNames field is the entire target hierarchical relationship configuration tree.

[0082] e) The HeadLine field corresponds to the root of the tree (or root node), that is, Figures 3 to 6 The UI in .

[0083] f) The content of the UIName field is Figures 3 to 6 The first-level nodes such as Operation, Service, Alarm, etc. (the first-level node contains sub-nodes).

[0084] g) The FirstAliasNames field is the alias of nodes such as Operation, Service, and Alarm, that is, the custom name that the user needs to display on the UI page, that is, the user can name the first-level node with a custom name.

[0085] h) The FirstKeyNames field contains the key name for nodes such as Operation, Service, and Alarm. This field is immutable and serves as the index for instantiating the page when rendering the UI page. This field name and processing logic are handled in the background and may not be displayed on the display page.

[0086] i) The content of the SubNames field is all the second-level nodes under the corresponding first-level node (second-level nodes can contain sub-nodes).

[0087] j) The UISubName field is Figures 3 to 6 Secondary nodes such as Hardware in (secondary nodes can contain child nodes).

[0088] k) The SecondAliasName field is the alias of the Hardware node, that is, the user needs to display the custom name on the UI page, that is, the user can name the secondary node with a custom name.

[0089] The SecondKeyNames field is the key name of a node such as Hardware. It cannot be modified and serves as the index for instantiating the page when rendering the UI page. This field name and processing logic are in the background and do not need to be displayed on the page.

[0090] m) The content of the LeafNames field is all the third-level nodes under the corresponding second-level node (leaf nodes, that is, not including the next-level nodes).

[0091] n) The UILeafName field is Figure 6 Leaf nodes such as LoadPort and VTM in the cluster.

[0092] o) The ThirdAliasNames field is the alias of nodes such as LoadPort, that is, the custom name that the user needs to display on the UI page, that is, the user can name the third-level node with a custom name.

[0093] The ThirdKeyNames field is the key name of nodes such as LoadPort. It cannot be modified and is used as the index for instantiating the page when rendering the UI page. This field name and processing logic are in the background and do not need to be displayed on the page.

[0094] Accordingly, in one embodiment of the present specification, after generating a configuration file corresponding to the target hierarchical relationship configuration tree, the method further includes:

[0095] In response to the start operation, the configuration file is loaded and the UI page corresponding to the target hierarchical relationship configuration tree is rendered.

[0096] In this embodiment, after the configuration file is generated, the semiconductor process equipment can render the UI page corresponding to the target hierarchical configuration tree by loading the configuration file when it is started. For details on how to generate the configuration file, please refer to the relevant description above and this manual will not elaborate on it here.

[0097] In some implementations, loading the configuration file and rendering the UI page corresponding to the target hierarchical relationship configuration tree specifically includes:

[0098] Loading the configuration file, selectively loading an interface in a dynamic link library corresponding to the UI type element value in the configuration file based on the UI type element value, determining whether the loaded interfaces include a target interface, the target interface including an interface corresponding to the type of semiconductor process equipment described by the UI type element value; if so, creating a main frame view of the UI page using a simple factory pattern, parsing parameter information in the configuration file, and rendering a UI page corresponding to the target hierarchical relationship configuration tree;

[0099] If not, the default UI page is rendered.

[0100] A dynamic link library (DLL) is a library of code and data that can be shared by multiple programs at runtime. It can contain functions and interfaces. In a DLL, a function is a piece of code that performs a specific task, accepting input and returning a result. An interface is an abstract type that defines the signatures of a set of functions. If a type implements an interface, it must provide methods implemented by all the functions in the interface.

[0101] The type of semiconductor process equipment may refer to the process or function that the semiconductor process equipment can realize. The types of semiconductor process equipment may include etching equipment, film forming equipment and cleaning equipment, among which etching equipment may include ICP (Inductively Coupled Plasma) equipment and CCP (Capacitively Coupled Plasma) equipment and other sub-types, and film forming equipment may include PVD (Physical Vapor Deposition) equipment and CVD (Chemical Vapor Deposition) equipment and other sub-types.

[0102] In this embodiment, the target interface corresponds to the target type of semiconductor process equipment, and the target type of semiconductor process equipment is the type of semiconductor process equipment described by the UI type element value. The target interface is used to define the method for implementing the target type of semiconductor process equipment. Therefore, it is possible to determine whether the configuration file corresponds to the type of the current semiconductor process equipment by determining whether the target interface is included in the dynamic link library. When the interface of the loaded dynamic link library includes the target interface, it can be determined that the type of the current semiconductor process equipment corresponds to the configuration file, so that the UI page can be rendered based on the parameter information of the configuration file, avoiding the situation where the rendered UI page does not correspond to the type of semiconductor process equipment (for example, if the UI page of the etching equipment has relevant control options for the film forming equipment, it is called that the UI page does not correspond to the type of semiconductor process equipment).

[0103] If the loaded dynamic link library does not include the target interface, it indicates that the type of the current semiconductor process equipment does not correspond to the configuration file, and the default UI page can be rendered. The default UI page can include a page common to semiconductor process equipment, which can include modules common to semiconductor process equipment (such as alarm modules, etc.).

[0104] The Simple Factory pattern is a design pattern whose primary goal is to provide a mechanism for creating objects, thereby separating the specific product instantiation process from the user. This allows users to create the desired product objects without having to know the specific details of product creation. The Simple Factory pattern can include factory classes, abstract product classes, and concrete product classes. The factory class provides a static method (or non-static method) to create a product object. This method typically determines which specific product object to create based on a parameter (such as a string or an enumeration value). The abstract product class defines the common interface for all concrete products, and the factory class methods return objects of this interface or class. Concrete product classes implement the abstract product class or interface and are the objects that need to be created. The factory class creation method instantiates one of these concrete product classes based on the input parameters and returns an object of the abstract product class or interface.

[0105] In this implementation, using the simple factory pattern, when creating the main frame view of a UI page, one only needs to call the factory class's create method and pass in the appropriate parameters to obtain a main frame view of the UI page. This separates the product user (i.e., the client code) from the product creation process, making the code more modular and reusable, and thus improving code modularity and reusability.

[0106] In this embodiment, by determining whether the target interface is implemented or inherited in the dynamic link library, the problem of forcibly rendering the UI page corresponding to the configuration file when the target interface is not implemented or inherited, which may cause errors, is avoided, and the robustness of the configuration file processing method is improved.

[0107] Exemplary devices

[0108] In an exemplary embodiment of the present specification, a configuration file processing device is further provided, which is applied to semiconductor process equipment. The configuration file processing device includes:

[0109] a first display module configured to, in response to a first configuration instruction carrying a device type, display a default hierarchical relationship configuration tree corresponding to the device type and a page navigation pool corresponding to the device type on a display page; the device type is used to describe the type of the semiconductor process equipment, the default hierarchical relationship configuration tree includes a first-level node corresponding to the semiconductor process equipment, the first-level node corresponds to a sub-page identifier of a human-computer interaction UI page of the semiconductor process equipment; the page navigation pool includes a plurality of sub-nodes, the sub-nodes corresponding to sub-pages in the UI page;

[0110] a hierarchical configuration module, configured to, in response to a configuration operation on a target subnode, configure the target subnode under the first-level node or other subnodes to obtain a target hierarchical relationship configuration tree; the target subnode is a subnode in the page navigation pool;

[0111] A file generation module is used to generate a configuration file corresponding to the target hierarchical relationship configuration tree in response to a save operation on the target hierarchical relationship configuration tree, and the configuration file is used to render a UI page corresponding to the target hierarchical relationship configuration tree when the semiconductor process equipment loads the configuration file.

[0112] The specific definition of the configuration file processing device can be found in the definition of the configuration file processing method above and will not be repeated here. The various modules in the above-mentioned configuration file processing device can be implemented in whole or in part through software, hardware, or a combination thereof. The above-mentioned modules can be embedded in or independent of the processor in the computer device in hardware form, or can be stored in the memory of the computer device in software form, so that the processor can call and execute the corresponding operations of each of the above modules.

[0113] Exemplary devices

[0114] One embodiment of the present specification provides a semiconductor process device, including: a process chamber and a controller communicating with the process chamber, wherein a UI page configuration tool is stored in the controller, and the UI page configuration tool is configured to:

[0115] In response to a first configuration instruction carrying a device type, a default hierarchical relationship configuration tree corresponding to the device type and a page navigation pool corresponding to the device type are displayed on a display page; the device type is used to describe the type of the semiconductor process equipment, the default hierarchical relationship configuration tree includes a first-level node corresponding to the semiconductor process equipment, the first-level node corresponds to a sub-page identifier of a human-computer interaction UI page of the semiconductor process equipment; the page navigation pool includes a plurality of sub-nodes, the sub-nodes corresponding to sub-pages in the UI page;

[0116] In response to a configuration operation on a target subnode, the target subnode is configured under the first-level node or other subnodes to obtain a target hierarchical relationship configuration tree; the target subnode is a subnode in the page navigation pool;

[0117] In response to a save operation on the target hierarchical relationship configuration tree, a configuration file corresponding to the target hierarchical relationship configuration tree is generated, and the configuration file is used to render a UI page corresponding to the target hierarchical relationship configuration tree when the semiconductor process equipment loads the configuration file.

[0118] The controller may be a host computer of the semiconductor process equipment, and the UI page configuration tool may be a software program. When the UI page configuration tool is run, it may implement the configuration file processing method described in any of the above embodiments. For the configuration file processing method, please refer to the relevant description above, and this specification will not elaborate on it here.

[0119] Another embodiment of the present application further provides a computing device, see Figure 8 As shown, an exemplary embodiment of the present specification further provides a computing device, including: a memory and a processor, wherein the memory stores a computer program, and when the processor executes the computer program, it performs the steps of the configuration file processing method according to various embodiments of the present specification described in the above embodiments of the present specification.

[0120] The internal structure of the computing device can be as follows Figure 8 As shown, the computing device includes a processor, memory, a network interface, and an input device connected via a system bus. The processor of the computing device is used to provide computing and control capabilities. The memory of the computing device includes a non-volatile storage medium and an internal memory. The non-volatile storage medium stores an operating system and a computer program. The internal memory provides an environment for the operation of the operating system and computer program in the non-volatile storage medium. The network interface of the computing device is used to communicate with an external terminal via a network connection. When the computer program is executed by the processor, the steps of the configuration file processing method according to various embodiments of this specification described in the above embodiments of this specification are performed.

[0121] The processor may include a main processor, and may also include a baseband chip, a modem, etc.

[0122] The memory stores a program for executing the technical solution of the present invention, and may also store an operating system and other key services. Specifically, the program may include program code, which includes computer operating instructions. More specifically, the memory may include read-only memory (ROM), other types of static storage devices that can store static information and instructions, random access memory (RAM), other types of dynamic storage devices that can store information and instructions, disk storage, flash memory, etc.

[0123] The processor may be a general-purpose processor, such as a general-purpose central processing unit (CPU), a microprocessor, or the like, or an application-specific integrated circuit (ASIC), or one or more integrated circuits for controlling the execution of the program of the present invention. Alternatively, the processor may be a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA), or other programmable logic device, discrete gate or transistor logic device, or discrete hardware components.

[0124] Input devices may include devices that receive data and information input by a user, such as a keyboard, mouse, camera, scanner, light pen, voice input device, touch screen, pedometer, or gravity sensor.

[0125] Output devices may include means that allow information to be output to a user, such as display screens, printers, speakers, and the like.

[0126] The communication interface may include any device such as a transceiver to communicate with other devices or communication networks, such as Ethernet, Radio Access Network (RAN), Wireless Local Area Network (WLAN), etc.

[0127] The processor executes the program stored in the memory and calls other devices, which can be used to implement each step of any configuration file processing method provided in the above embodiments of the present application.

[0128] The computing device may also include a display component and a voice component. The display component may be a liquid crystal display or an electronic ink display. The input device of the computing device may be a touch layer covering the display component, or a button, trackball or touchpad provided on the housing of the computing device, or an external keyboard, touchpad or mouse.

[0129] Those skilled in the art will understand that Figure 8 The structure shown in the figure is only a block diagram of a part of the structure related to the scheme of this specification, and does not constitute a limitation on the computing device to which the scheme of this specification is applied. The specific computing device may include more or fewer components than shown in the figure, or combine certain components, or have a different component arrangement.

[0130] Exemplary computer program products and storage media

[0131] In addition to the above-mentioned methods and devices, the configuration file processing method provided in the embodiments of this specification may also be a computer program product, which includes computer program instructions. When the computer program instructions are executed by a processor, the processor executes the steps of the configuration file processing method according to various embodiments of this specification described in the above "Exemplary Method" section of this specification.

[0132] The computer program product may be written in any combination of one or more programming languages ​​to implement the operations of the embodiments of this specification, including object-oriented programming languages ​​such as Java, C++, and conventional procedural programming languages ​​such as "C" or similar programming languages. The program code may be executed entirely on the user's computing device, partially on the user's computing device, as a stand-alone software package, partially on the user's computing device and partially on a remote computing device, or entirely on a remote computing device or server.

[0133] In addition, an embodiment of this specification also provides a computer-readable storage medium on which a computer program is stored. The computer program is used by a processor to execute the steps of the configuration file processing method according to various embodiments of this specification described in the above "Exemplary Method" section of this specification.

[0134] Those skilled in the art will appreciate that all or part of the processes in the above-mentioned embodiments can be implemented by instructing the relevant hardware through a computer program. The computer program can be stored in a non-volatile computer-readable storage medium. When the computer program is executed, it can include the processes of the embodiments of the above-mentioned methods. Among them, any reference to memory, storage, database or other media used in the embodiments provided in this specification can include non-volatile and / or volatile memory. Non-volatile memory can include read-only memory (ROM), programmable ROM (PROM), electrically programmable ROM (EPROM), electrically erasable programmable ROM (EEPROM) or flash memory. Volatile memory can include random access memory (RAM) or external cache memory. By way of illustration and not limitation, RAM is available in various forms, such as static RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), double data rate SDRAM (DDRSDRAM), enhanced SDRAM (ESDRAM), synchronous link DRAM (SLDRAM), memory bus (Rambus) direct RAM (RDRAM), direct memory bus dynamic RAM (DRDRAM), and memory bus dynamic RAM (RDRAM).

[0135] The technical features of the above embodiments can be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0136] The above-described embodiments merely represent several implementation methods of this specification. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the solutions provided by the embodiments of this specification. It should be noted that a person skilled in the art can make several variations and improvements without departing from the scope of this specification, and these variations and improvements fall within the scope of protection of this specification. Therefore, the scope of protection of the patent in this specification shall be based on the appended claims.

Claims

1. A method for processing a configuration file, characterized in that: Applied to semiconductor process equipment, the configuration file processing method includes: In response to a first configuration instruction carrying a device type, a default hierarchical relationship configuration tree corresponding to the device type and a page navigation pool corresponding to the device type are displayed on a display page; the device type is used to describe the type of the semiconductor process equipment, the default hierarchical relationship configuration tree includes a first-level node corresponding to the semiconductor process equipment, the first-level node corresponds to a sub-page identifier of a human-computer interaction UI page of the semiconductor process equipment; the page navigation pool includes a plurality of sub-nodes, the sub-nodes corresponding to sub-pages in the UI page; In response to a configuration operation on a target subnode, the target subnode is configured under the first-level node or other subnodes to obtain a target hierarchical relationship configuration tree; the target subnode is a subnode in the page navigation pool; In response to a save operation on the target hierarchical relationship configuration tree, a configuration file corresponding to the target hierarchical relationship configuration tree is generated, and the configuration file is used to render a UI page corresponding to the target hierarchical relationship configuration tree when the semiconductor process equipment loads the configuration file.

2. The method according to claim 1, characterized in that Before generating a configuration file corresponding to the target hierarchical relationship configuration tree in response to a save operation on the target hierarchical relationship configuration tree, the method further includes: In response to a selection operation on the sub-node, the sub-page corresponding to the selected sub-node is used as a default loading page, and the default loading page is a sub-page displayed after the semiconductor process equipment is started.

3. The method according to claim 2, characterized in that Also includes: In the display page, the name and / or path of the default loading page is displayed.

4. The method according to claim 1, wherein Also includes: In response to the second configuration instruction carrying the animation type, the animation effect corresponding to the animation type is set as the loading animation of the sub-page.

5. The method according to claim 4, characterized in that The animation type corresponds to the type of the semiconductor process equipment, and the configuration file processing method further includes: In the display page, the animation type is displayed.

6. The method according to claim 1, characterized in that Generating a configuration file corresponding to the target hierarchical relationship configuration tree includes: Adding the device type as a UI type element value of a target file, wherein the target file includes a file in an extensible markup language (XML) format, and the UI type element value is used to describe the type of the semiconductor process equipment corresponding to the configuration file in XML format; The nodes at each level in the target hierarchical relationship configuration tree are traversed, and the node values ​​of the nodes at each level are added as elements of the target file to obtain the configuration file.

7. The method according to claim 6, characterized in that When an animation type is configured, generating a configuration file corresponding to the target hierarchical relationship configuration tree further includes: The animation type is added as an animation type element value of the target file, and the animation type element value is used to describe the loading animation type of the sub-page.

8. The method according to any one of claims 1 to 6, characterized in that The default hierarchical relationship configuration tree corresponding to each of the equipment types and the page navigation pool corresponding to each of the equipment types are pre-established and stored in the semiconductor process equipment.

9. The method according to any one of claims 1 to 6, characterized in that: Also includes: In response to a start operation, the configuration file is loaded, and the UI page corresponding to the target hierarchical relationship configuration tree is rendered.

10. The method according to claim 9, characterized in that The loading of the configuration file and the rendering of the UI page corresponding to the target hierarchical relationship configuration tree include: Loading the configuration file, selectively loading an interface in a dynamic link library corresponding to the UI type element value in the configuration file based on the UI type element value, determining whether the loaded interface includes a target interface, the target interface including an interface corresponding to the type of semiconductor process equipment described by the UI type element value; if so, creating a main frame view of the UI page using a simple factory pattern, parsing parameter information in the configuration file, and rendering the UI page corresponding to the target hierarchical relationship configuration tree; If not, the default UI page is rendered.

11. A computing device, characterized in that The invention comprises a memory, a processor and a computer program stored in the memory and executable on the processor, wherein the processor implements the configuration file processing method according to any one of claims 1 to 10 when executing the computer program.

12. A computer-readable storage medium, characterized in that The computer-readable storage medium stores a computer program, and when the computer program is executed by a processor, the method for processing a configuration file according to any one of claims 1 to 10 is implemented.

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