Laser power feedback device and laser processing equipment

Abstract

The invention provides a laser power feedback device and laser processing equipment, and relates to the technical field of laser processing. The laser power feedback device comprises a spectroscope, a power acquisition assembly, a signal transmission optical fiber and a signal processing assembly. The power acquisition assembly comprises a focusing lens, a reflecting lens, a diaphragm and an integrating sphere, the focusing lens is used for focusing reflected light of the spectroscope, the reflecting lens is used for reflecting a focused light beam to the diaphragm, and the diaphragm is arranged at a light inlet of the integrating sphere; one end of the signal transmission optical fiber is arranged at a light outlet of the integrating sphere; the signal processing assembly comprises a photoelectric probe and a signal processor, the photoelectric probe corresponds to the other end of the signal transmission optical fiber, and the signal processor is electrically connected with the photoelectric probe. According to the laser power feedback device, the real-time power of the laser can be calculated, so that the stability of the laser power is improved, the processing quality is ensured, and the product yield is improved; and return light can be blocked, and the acquisition precision is improved.

Description

Technical Field

[0001] The present invention relates to the field of laser processing technology, and in particular to a laser power feedback device and laser processing equipment. Background Art

[0002] With technological advancements, laser processing technology is experiencing rapid growth. For example, laser micro-welding, capable of welding products at the millimeter level, has gained widespread application in the microelectronics and semiconductor chip industries. However, precise control of laser power during laser processing significantly impacts product quality.

[0003] Currently, the stability of most lasers on the market is determined by the stability of their internal pump sources and cooling circuits. After high-frequency and prolonged use, the laser's power will attenuate to varying degrees, making it impossible to guarantee processing quality and resulting in low product yields. Summary of the Invention

[0004] In order to solve the problems existing in the prior art, one of the objectives of the present invention is to provide a laser power feedback device.

[0005] The present invention provides the following technical solutions: A laser power feedback device, comprising: Spectroscope; A power collection component, comprising a focusing lens, a reflecting lens, an aperture, and an integrating sphere. The focusing lens is used to focus the reflected light from the beam splitter, and the reflecting lens is used to reflect the focused light beam to the aperture. The aperture is provided at the light inlet of the integrating sphere. a signal transmission optical fiber, one end of which is arranged at the light outlet of the integrating sphere; and The signal processing component includes a photoelectric probe and a signal processor. The photoelectric probe is arranged corresponding to the other end of the signal transmission optical fiber, and the signal processor is electrically connected to the photoelectric probe.

[0006] As a further optional solution to the laser power feedback device, the power collection component further includes a filter, and the filter is arranged on a side of the focusing lens facing the beam splitter.

[0007] As a further optional solution to the laser power feedback device, the power collection component further includes a mirror seat, and the focusing lens, the reflecting lens, the aperture, the integrating sphere and the filter are all arranged in the mirror seat.

[0008] As a further optional solution for the laser power feedback device, the power collection component also includes a first optical fiber holder and an armored cable fixing component. The first optical fiber holder is arranged at the light outlet of the integrating sphere, and the end of the signal transmission optical fiber close to the integrating sphere is passed through the armored cable fixing component and is arranged on the first optical fiber holder.

[0009] As a further optional solution to the laser power feedback device, the signal processing component further includes a probe fixing seat and a radiator, the photoelectric probe is arranged on the probe fixing seat, and the probe fixing seat is arranged on the radiator.

[0010] As a further optional solution to the laser power feedback device, the signal processing component further includes a heat transfer element, and the heat transfer element is arranged between the probe fixing seat and the radiator.

[0011] As a further optional solution to the laser power feedback device, the signal processing component further includes a fan, and an air outlet of the fan is arranged toward the radiator.

[0012] As a further optional solution to the laser power feedback device, the signal processing component also includes a second fiber holder, which is arranged on the probe fixing seat, and the end of the signal transmission fiber away from the integrating sphere is arranged on the second fiber holder.

[0013] As a further optional solution for the laser power feedback device, the signal processing component further includes a fixing block and a pressing block, the pressing block is detachably connected to the fixing block, and the pressing block and the fixing block clamp and fix the signal transmission optical fiber.

[0014] Another object of the present invention is to provide a laser processing device.

[0015] The present invention provides the following technical solutions: A laser processing device comprises a laser and the above-mentioned laser power feedback device, wherein the signal processor is communicatively connected with a controller of the laser.

[0016] The embodiments of the present invention have the following beneficial effects: When using the aforementioned laser power feedback device, a beam splitter is placed in the laser transmission path. The beam splitter splits the laser light into two parts according to a preset ratio: reflected light and transmitted light. The reflected light serves as the laser power collection beam, while the transmitted light serves as the laser processing beam. A focusing lens focuses the reflected light, which is then reflected by a reflective lens onto an aperture. The focused beam then passes through the aperture into an integrating sphere. The integrating sphere homogenizes the laser light and outputs it to a signal transmission fiber, which then transmits it to a photoelectric sensor. The photoelectric sensor converts the optical signal into an electrical signal, which is then transmitted to a signal processor. The signal processor calculates the real-time laser power based on the preset splitting ratio of the beam splitter and the processing efficiency of the integrating sphere. This real-time power guides the laser to adjust its output power in real time, thereby improving laser power stability, ensuring processing quality, and increasing product yield. During this process, the laser light irradiates the processing surface, generating some reflected light. The return light reflected from the laser processing surface enters the power collection component through the beam splitter. However, since the return light is diffusely reflected, it cannot be precisely focused at the aperture position of the diaphragm after passing through the focusing lens and reflective lens. Instead, it is blocked by the peripheral structure of the diaphragm, meaning that the return light cannot pass through the diaphragm and enter the integrating sphere. Therefore, the above-mentioned laser power feedback device can block the return light generated during the processing process, improving the accuracy of laser power collection during the laser processing process, and thus improving the accuracy of the real-time laser power.

[0017] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying any creative work.

[0019] Figure 1 A schematic structural diagram of a laser processing device provided by an embodiment of the present invention is shown; Figure 2 A schematic structural diagram of a power collection component in a laser power feedback device provided by an embodiment of the present invention is shown; Figure 3 Shown Figure 2 Schematic diagram of the AA section; Figure 4 A schematic structural diagram of a signal processing component in a laser power feedback device provided by an embodiment of the present invention is shown; Figure 5 Shown Figure 4 Schematic diagram of the cross section along the BB direction.

[0020] Description of main component symbols: 10-Laser; 100-beam splitter; 200-power collection assembly; 201-focusing lens; 202-reflecting lens; 203-aperture; 204-integrating sphere; 205-filter; 206-mirror mount; 207-pressing ring; 208-first spacer; 209-second spacer; 210-vertical plate; 211-top plate; 212-first fiber holder; 213-armor cable fixing; 300-signal transmission fiber; 400-signal processing Components; 401-photoelectric probe; 402-signal processor; 403-housing; 403a-panel; 403b-electrical cavity; 403c-heat dissipation cavity; 403d-heat dissipation hole; 404-probe fixing seat; 405-heat sink; 406-heat transfer element; 407-fan; 408-second optical fiber holder; 409-fixing block; 410-pressing block; 411-aviation plug; X-first direction; Z-second direction. DETAILED DESCRIPTION

[0021] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0022] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly on the other element or there may be an intermediate element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be an intermediate element. Conversely, when an element is referred to as being "directly on" another element, there is no intermediate element. The terms "vertical," "horizontal," "left," "right," and similar expressions used herein are for illustrative purposes only.

[0023] In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," "connect," "fixed," etc. should be understood broadly. For example, they may refer to fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0024] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature identified as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, "plurality" means two or more, unless otherwise specifically defined.

[0025] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which this application belongs. The terms used in the template description herein are for the purpose of describing specific embodiments only and are not intended to limit the present invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0026] The inventors of this application discovered that most lasers on the market lack laser power feedback devices. The stability of the laser is determined by the stability of the internal pump source and the internal cooling circuit. At high frequencies and after prolonged use, the laser power will attenuate to varying degrees. In response, some laser manufacturers have introduced lasers with internal power feedback, but the power feedback accuracy is low and easily affected by reflected light. As a result, existing lasers cannot guarantee processing quality, and product yields are low.

[0027] In order to solve the above technical problems, this embodiment provides a laser power feedback device. Figure 1 The laser power feedback device includes a spectroscope 100 , a power collection component 200 , a signal transmission optical fiber 300 and a signal processing component 400 .

[0028] For example, after the beam splitter 100 divides the laser light into reflected light and transmitted light according to a preset ratio, the reflected light enters the power collection component 200, which homogenizes the collected reflected light and transmits the homogenized optical signal to the signal processing component 400 via the signal transmission fiber 300. The signal processing component 400 calculates the real-time power of the laser light by measuring the power of the homogenized reflected light.

[0029] Please also refer to Figure 2 and Figure 3 The power collection assembly 200 includes a focusing lens 201, a reflective lens 202, an aperture 203, and an integrating sphere 204. The focusing lens 201 can focus the reflected light from the beam splitter 100, and the reflective lens 202 can reflect the focused light beam to the aperture 203, which is located at the light inlet of the integrating sphere 204.

[0030] Correspondingly, one end of the signal transmission optical fiber 300 is disposed at the light outlet of the integrating sphere 204 , and the other end of the signal transmission optical fiber 300 is connected to the signal processing component 400 .

[0031] Please also refer to Figure 4 and Figure 5 In addition, the signal processing component 400 includes a photoelectric probe 401 and a signal processor 402. The photoelectric probe 401 is provided corresponding to the other end of the signal transmission optical fiber 300, and the signal processor 402 is electrically connected to the photoelectric probe 401.

[0032] When using the above-described laser power feedback device, a beam splitter 100 is placed in the laser transmission path. The beam splitter 100 divides the laser light into two parts according to a preset ratio: one part is reflected light, and the other is transmitted light. The reflected light serves as the laser power collection laser, while the transmitted light serves as the laser beam used for laser processing. Subsequently, the reflected light is focused by a focusing lens 201, and then the focused beam is reflected by a reflective lens 202 to an aperture 203. The focused beam then passes through the aperture of the aperture 203 and enters an integrating sphere 204. The integrating sphere 204 homogenizes the laser light and outputs it to a signal transmission fiber 300, which then transmits it to a photoelectric probe 401. The photoelectric probe 401 converts the optical signal into an electrical signal, which is then transmitted to a signal processor 402. The signal processor 402 calculates the real-time laser power based on the beam splitting ratio of the beam splitter 100 and the processing efficiency of the integrating sphere 204. This real-time power guides the laser 10 to correct the output power in real time, thereby improving the stability of the laser power, which helps ensure processing quality and increase product yield.

[0033] During this process, laser light irradiates the laser processing surface, generating some reflected light. This reflected light passes through beam splitter 100 and enters power collection assembly 200. However, since the reflected light is diffusely reflected, it cannot precisely converge to the aperture position of aperture 203 after passing through focusing lens 201 and reflective lens 202. Instead, it is blocked by the peripheral structure of aperture 203, preventing it from passing through aperture 203 and entering integrating sphere 204. Therefore, the laser power feedback device described above can block the reflected light generated during the processing process, improving the accuracy of laser power collection during the laser processing process, and thus, the accuracy of the real-time laser power.

[0034] Exemplarily, the signal processor 402 is implemented as a board.

[0035] Please refer again Figure 3 In some embodiments, the power collection component 200 further includes a filter 205 , which is disposed on a side of the focusing lens 201 facing the spectroscope 100 .

[0036] When in use, the filter 205 can selectively transmit light of a specific wavelength output by the laser 10 and block light of other wavelengths, ensuring that the collected light is the light of the laser 10. The collected laser reaches the focusing lens 201 after passing through the filter 205.

[0037] In some embodiments, the power collection component 200 further includes a lens holder 206 , in which the focusing lens 201 , the reflecting lens 202 , the aperture 203 , the integrating sphere 204 and the filter 205 are all disposed.

[0038] Exemplarily, the power harvesting assembly 200 has a first direction X and a second direction Z that are perpendicular to each other. The first direction X is the propagation direction of the reflected light from the beam splitter 100. The filter 205, the focusing lens 201, and the reflective lens 202 are sequentially arranged in the lens holder 206 along the first direction X. The reflective lens 202, the aperture 203, and the integrating sphere 204 are sequentially arranged in the lens holder 206 along the second direction Z.

[0039] During operation, the reflected light from the beam splitter 100 is filtered by the filter 205 before reaching the focusing lens 201, which focuses the collected laser light. The focused light beam is then reflected by the reflective lens 202 and propagates along the second direction Z to the aperture 203, where it passes through the aperture of the aperture 203 and enters the integrating sphere 204.

[0040] Optionally, the power collection component 200 further includes a pressure ring 207 , a first spacer ring 208 and a second spacer ring 209 , and the pressure ring 207 , the first spacer ring 208 and the second spacer ring 209 are all disposed on the mirror base 206 .

[0041] The pressure ring 207 is located on the side of the filter 205 facing away from the focusing lens 201, the first spacer 208 is located between the pressure ring 207 and the filter 205, and the second spacer 209 is located between the filter 205 and the focusing lens 201. In other words, the pressure ring 207, the first spacer 208, the filter 205, the second spacer 209, and the focusing lens 201 are arranged in sequence along the first direction X.

[0042] When assembling the power harvesting assembly 200, the pressing ring 207 abuts the first spacer 208, the first spacer 208 abuts the filter 205, the filter 205 abuts the second spacer 209, the second spacer 209 abuts the focusing lens 201, and the focusing lens 201 abuts the inner wall of the lens holder 206. Simultaneously, the pressing ring 207 and the lens holder 206 are interference-fitted or threadedly connected, thereby securing the filter 205 and focusing lens 201 in the lens holder 206.

[0043] Optionally, the power harvesting assembly 200 further includes a vertical plate 210 and a top plate 211. The vertical plate 210 is attached to one side of the integrating sphere 204 along the first direction X, and the top plate 211 is attached to the side of the integrating sphere 204 facing away from the aperture 203 along the second direction Z. The vertical plate 210 and the top plate 211 cooperate with the lens holder 206 to secure the integrating sphere 204.

[0044] In some embodiments, the power collection assembly 200 further includes a first fiber holder 212 and an armored cable fixture 213. The first fiber holder 212 is disposed at the light outlet of the integrating sphere 204, and the end of the signal transmission fiber 300 near the integrating sphere 204 is passed through the armored cable fixture 213 and disposed in the first fiber holder 212.

[0045] During use, the first fiber holder 212 locks the end of the signal transmission fiber 300 near the integrating sphere 204, aligning the signal transmission fiber 300 with the light outlet of the integrating sphere 204. This ensures that the laser light, homogenized by the integrating sphere 204, is smoothly output into the signal transmission fiber 300. Furthermore, the armored cable fixture 213 further protects and secures the signal transmission fiber 300, preventing it from loosening.

[0046] Exemplarily, the integrating sphere 204 , the first optical fiber holder 212 , and the armor cable fixing member 213 are arranged in sequence along the first direction X.

[0047] Please refer again Figure 4 and Figure 5 In this embodiment, the signal processing assembly 400 further includes a housing 403, within which the photoelectric probe 401 and the signal processor 402 are disposed. Furthermore, the housing 403 includes a panel 403a. The end of the signal transmission optical fiber 300, distal from the integrating sphere 204, passes through the panel 403a and enters the housing 403, where it is aligned with the photoelectric probe 401.

[0048] In some embodiments, the signal processing assembly 400 further includes a probe holder 404 and a heat sink 405 . The photoelectric probe 401 is disposed on the probe holder 404 , and the probe holder 404 is disposed on the heat sink 405 .

[0049] When photoelectric probe 401 receives laser light from signal transmission fiber 300, some of the light energy is converted into heat, causing the temperature of photoelectric probe 401 to rise. At this point, the heat from photoelectric probe 401 is transferred to probe holder 404, and then to heat sink 405. Finally, heat is rapidly dissipated by heat sink 405, preventing the photoelectric probe 401 from overheating and maintaining its temperature stability. This ensures that the measurement signal from photoelectric probe 401 is unaffected by temperature, thereby improving the accuracy of the real-time laser power.

[0050] It can be understood that the radiator 405 is fixedly connected to the inner wall of the housing 403, and the probe fixing base 404 is installed inside the housing 403 through the radiator 405. The radiator 405 can be a heat dissipation plate with heat dissipation fins.

[0051] Furthermore, a horizontally positioned heat sink 405 divides the interior of the housing 403 into upper and lower sections, with the upper and lower sections sealed by the heat sink 405. The upper section of the housing 403, located above the heat sink 405, is the electrical chamber 403b. This chamber is dustproof and waterproof, housing electronic components such as the photoelectric sensor 401 and the signal processor 402. The lower section of the housing 403, located below the heat sink 405, is the heat dissipation chamber 403c. The walls of the housing 403 are provided with heat dissipation holes 403d, connecting to the heat dissipation chamber 403c and allowing air to flow and remove heat from the heat sink 405.

[0052] In some embodiments, the signal processing assembly 400 further includes a heat transfer element 406 , which is disposed between the probe fixing base 404 and the heat sink 405 .

[0053] When in use, the heat transfer element 406 can accelerate the heat conduction speed between the probe fixing seat 404 and the radiator 405, thereby enhancing the heat dissipation effect of the photoelectric probe 401 and better maintaining the temperature stability of the photoelectric probe 401.

[0054] Exemplarily, the heat transfer element 406 may be a metal sheet with good thermal conductivity, such as a copper sheet, or a layer of thermal grease.

[0055] In some embodiments, the signal processing component 400 further includes a fan 407 , and an air outlet of the fan 407 is disposed toward the radiator 405 .

[0056] When in use, the fan 407 drives air toward the radiator 405, exchanges heat with the radiator 405, and takes away the heat on the radiator 405, thereby achieving forced heat dissipation of the radiator 405. It can also enhance the heat dissipation effect of the photoelectric probe 401 and better maintain the temperature stability of the photoelectric probe 401.

[0057] Exemplarily, the fan 407 is fixedly mounted on the bottom surface of the inner wall of the housing 403. The fan 407 is located below the radiator 405 and is substantially aligned with the probe fixing base 404. In addition, an air inlet is correspondingly provided on the bottom surface of the housing 403.

[0058] In some embodiments, the signal processing assembly 400 further includes a second fiber holder 408 . The second fiber holder 408 is disposed on the probe fixing base 404 , and the end of the signal transmission fiber 300 away from the integrating sphere 204 is disposed on the second fiber holder 408 .

[0059] When in use, the second fiber holder 408 can lock one end of the signal transmission fiber 300 close to the photoelectric probe 401, so that the signal transmission fiber 300 is aligned with the photoelectric probe 401, ensuring that the photoelectric probe 401 smoothly receives the laser from the signal transmission fiber 300.

[0060] In some embodiments, the signal processing assembly 400 further includes a fixing block 409 and a pressing block 410. The pressing block 410 is detachably connected to the fixing block 409, and the pressing block 410 and the fixing block 409 clamp and fix the signal transmission optical fiber 300.

[0061] When in use, the pressing block 410 cooperates with the fixing block 409 to hold the signal transmission optical fiber 300 tightly, so that the signal transmission optical fiber 300 is not easily loosened.

[0062] Illustratively, the fixing block 409 is fixedly connected to the outer wall of the panel 403a via screws. The signal transmission optical fiber 300 contacts the top of the fixing block 409 as it passes through the panel 403a. The pressing block 410 presses against the signal transmission optical fiber 300 from top to bottom, thereby cooperating with the fixing block 409 to clamp and secure the signal transmission optical fiber 300.

[0063] In some embodiments, the signal processing component 400 further includes an aviation plug 411 . The aviation plug 411 is fixedly mounted on an outer wall of the panel 403 a and is electrically connected to the signal processor 402 .

[0064] When in use, the aerial plug 411 is connected to an external power source to power the signal processor 402 and the photoelectric probe 401, and receives a signal from the signal processor 402 and then transmits the signal back to the laser 10. The signal is a real-time power signal of the laser.

[0065] When the laser power feedback device is in operation, a beam splitter 100 is positioned in the laser transmission path. The beam splitter 100 divides the laser light into two parts according to a preset ratio: one part is reflected light, and the other is transmitted light. The reflected light serves as the laser light for power collection, while the transmitted light serves as the laser processing light beam. A filter 205 filters the reflected light to ensure that the collected light is the light from the laser 10. The collected laser light is then focused by a focusing lens 201, and the focused light beam is then reflected by a reflecting lens 202 to an aperture 203. The focused light beam then passes through the aperture of the aperture 203 and enters an integrating sphere 204. The integrating sphere 204 homogenizes the laser light and outputs it to the signal transmission fiber 300, which then transmits it to the photoelectric probe 401. The photoelectric probe 401 converts the optical signal into an electrical signal, which is then transmitted to a signal processor 402. The signal processor 402 calculates the real-time power of the laser light based on the preset splitting ratio of the beam splitter 100 and the processing efficiency of the integrating sphere 204. This real-time power can guide the laser 10 to correct the output light power in real time, thereby improving the stability of the laser power, which is beneficial to ensuring processing quality and improving product yield. During this process, the laser irradiates the laser processing surface, generating some reflected light. The reflected light reflected from the laser processing surface enters the power collection component 200 through the beam splitter 100. However, since the reflected light is diffusely reflected light, it cannot be accurately focused on the aperture position of the aperture 203 after passing through the focusing lens 201 and the reflective lens 202. It will be blocked by the peripheral structure of the aperture 203, that is, the reflected light cannot pass through the aperture 203 and enter the integrating sphere 204.

[0066] In summary, compared to the internal feedback method of laser 10, the power collected by the above-mentioned laser power feedback device is closer to the product and can more accurately reflect the laser output power. Furthermore, the signal processing component 400 in the above-mentioned laser power feedback device is designed with a constant temperature device to ensure that the measured signal is not affected by temperature. The power collection component 200 is designed with a filter 205 and an anti-reflection structure to ensure that the collected power is not affected by reflected light.

[0067] Please refer again Figure 1 This embodiment further provides a laser processing device, comprising a laser 10 and the aforementioned laser power feedback device, wherein the signal processor 402 is in communication with the controller of the laser 10 .

[0068] During operation, the signal processor 402 feeds the calculated real-time laser power back to the controller of the laser 10. The controller of the laser 10 calibrates the real-time power value and compares it with the preset power. Then, based on the comparison result, it adjusts the output power of the laser 10 in real time, thereby achieving closed-loop control of the laser power.

[0069] Exemplarily, the laser processing equipment is a laser micro-welding equipment, which further includes a welding head.

[0070] In summary, the above-mentioned laser processing equipment can monitor the laser output power in real time and monitor the operating status of the laser 10 through the laser power feedback device. When the power output of the laser 10 is abnormal, an alarm can be issued in time to promptly troubleshoot the problem of the laser 10. When the compensation function is enabled, the light output stability of the laser 10 can be improved to prevent the unstable power of the laser 10 from causing defects such as product welding through and cold welding. When the power of the laser 10 is attenuated, it can also be detected in time and automatic compensation can be achieved to ensure the consistency of the output power, thereby ensuring the product welding yield.

[0071] In all examples shown and described herein, any specific values ​​should be interpreted as merely exemplary and not limiting, and thus other examples of the exemplary embodiments may have different values.

[0072] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.

[0073] The above-described embodiments merely illustrate several implementations of the present invention, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that variations and modifications are possible without departing from the scope of the present invention, and such variations and modifications are fully within the scope of protection of the present invention.

Claims

1. A laser power feedback device, characterized in that: include: Spectroscope (100); A power collection component (200), the power collection component (200) comprising a focusing lens (201), a reflecting lens (202), an aperture (203) and an integrating sphere (204), the focusing lens (201) being used to focus the reflected light of the beam splitter (100), the reflecting lens (202) being used to reflect the focused light beam to the aperture (203), and the aperture (203) being arranged at a light inlet of the integrating sphere (204); a signal transmission optical fiber (300), one end of the signal transmission optical fiber (300) being arranged at the light outlet of the integrating sphere (204); and A signal processing component (400) includes a photoelectric probe (401) and a signal processor (402). The photoelectric probe (401) is arranged corresponding to the other end of the signal transmission optical fiber (300), and the signal processor (402) is electrically connected to the photoelectric probe (401).

2. The laser power feedback device according to claim 1, characterized in that: The power collection component (200) further comprises a filter (205), and the filter (205) is arranged on a side of the focusing lens (201) facing the spectroscope (100).

3. The laser power feedback device according to claim 2, characterized in that: The power collection component (200) further comprises a mirror seat (206), wherein the focusing lens (201), the reflecting lens (202), the aperture (203), the integrating sphere (204) and the filter (205) are all arranged in the mirror seat (206).

4. The laser power feedback device according to claim 3, characterized in that: The power collection component (200) further comprises a first optical fiber seat (212) and an armor cable fixing member (213); the first optical fiber seat (212) is arranged at the light outlet of the integrating sphere (204); and one end of the signal transmission optical fiber (300) close to the integrating sphere (204) is passed through the armor cable fixing member (213) and is arranged on the first optical fiber seat (212).

5. The laser power feedback device according to any one of claims 1 to 4, characterized in that: The signal processing component (400) further comprises a probe fixing seat (404) and a radiator (405), wherein the photoelectric probe (401) is arranged on the probe fixing seat (404), and the probe fixing seat (404) is arranged on the radiator (405).

6. The laser power feedback device according to claim 5, characterized in that: The signal processing component (400) further includes a heat transfer element (406), and the heat transfer element (406) is arranged between the probe fixing seat (404) and the heat sink (405).

7. The laser power feedback device according to claim 5, characterized in that: The signal processing component (400) further comprises a fan (407), wherein an air outlet of the fan (407) is arranged toward the radiator (405).

8. The laser power feedback device according to claim 5, characterized in that: The signal processing component (400) further includes a second optical fiber holder (408), the second optical fiber holder (408) being arranged on the probe fixing seat (404), and the end of the signal transmission optical fiber (300) away from the integrating sphere (204) being arranged on the second optical fiber holder (408).

9. The laser power feedback device according to claim 5, characterized in that: The signal processing component (400) further comprises a fixing block (409) and a pressing block (410), wherein the pressing block (410) is detachably connected to the fixing block (409), and the pressing block (410) and the fixing block (409) clamp and fix the signal transmission optical fiber (300).

10. A laser processing device, characterized in that: The invention comprises a laser (10) and a laser power feedback device according to any one of claims 1 to 9, wherein the signal processor (402) is communicatively connected with a controller of the laser (10).

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