Optical system, scribing engine, and laser scribing apparatus

Abstract

The invention discloses an optical system, a scribing engine and laser scribing equipment. The optical system comprises an optical path structure which comprises a first optical lens, a wave plate, a polarizing beam splitter and a movable focus lens which are arranged in sequence; wherein the first optical lens, the wave plate and the polarizing beam splitter are arranged along a first direction, and the polarizing beam splitter is used for partially reflecting a first laser beam incident along the first direction into a second laser beam propagating along a second direction perpendicular to the first direction; the movable focus lens is arranged along the second direction and is used for receiving the second laser beam and focusing the second laser beam on a target site so as to lineate the coated glass; and the control module is configured to adjust the position of the movable focus lens along the second direction according to the focus of the second laser beam so as to keep the second laser beam focused on the target site. According to the laser scribing device, the focus and the position of the emitted laser beam can be adjusted in real time in the scribing period, and the edge effect consistency of laser scribing can be improved.

Description

Technical Field

[0001] The present application relates to the field of industrial manufacturing, and in particular to an optical system, a scribing engine, and a laser scribing device for laser scribing of thin-film solar cells. Background Art

[0002] Laser scribing is an essential and critical step in the manufacturing process of thin-film solar cells. Its basic principle is to focus a laser beam on the coated glass to be scribed and use the laser beam to remove the film layer in the irradiated area. During the laser scribing process, coated glass has a natural warping problem in the planar direction, that is, the z-direction is not an ideal plane. Therefore, when the coated glass is continuously scribed using a set laser beam (for example, energy, frequency, emission position, etc.), the laser beam focus will not always be focused on the target location, which will adversely affect the scribing results. Summary of the Invention

[0003] To solve the above problems, the present application discloses an optical system, a scribing engine, and a laser scribing device. The laser scribing device and the laser scribing system can automatically adjust the beam position and focus of the outgoing laser beam in real time during scribing to achieve consistent scribing.

[0004] On the one hand, the present application provides an optical system, which may include: an optical path structure, including a first optical lens, a wave plate, a polarization beam splitter and a movable focusing mirror arranged in sequence; wherein the first optical lens, the wave plate and the polarization beam splitter are arranged along a first direction, and the polarization beam splitter is used to partially reflect a first laser beam incident along the first direction into a second laser beam propagating along a second direction perpendicular to the first direction; the movable focusing mirror is arranged along the second direction, for receiving the second laser beam and focusing the second laser beam on a target site to scribe the coated glass; a control module is configured to adjust the position of the movable focusing mirror along the second direction according to the focus of the second laser beam to keep the second laser beam focused on the target site.

[0005] According to some embodiments of the present application, the control module may be communicatively connected to a focus detection element; the focus detection element is used to determine the focus of the second laser beam and transmit it to the focusing mirror control module.

[0006] According to some embodiments of the present application, the first optical lens may include a beam splitter or a reflector.

[0007] According to some embodiments of the present application, the wave plate may include a rotatable wave plate; a power detection element arranged behind the polarization beam splitter along the first direction and communicatively connected to the control module is used to determine the power of the second laser beam by determining a third laser beam passing through the polarization beam splitter; the control module is configured to control the rotation of the wave plate based at least on the power so that the power of the second laser beam meets preset requirements.

[0008] According to some embodiments of the present application, the optical system may further include a beam shaping element disposed in front of the movable focusing mirror along the second direction; the beam shaping element is configured to transform the intensity distribution of the second laser beam.

[0009] According to some embodiments of the present application, the beam shaping element may be configured to transform the intensity distribution of the second laser beam from a Gaussian distribution to a flat-top distribution.

[0010] According to some embodiments of the present application, the optical system may further include a half-mirror lens arranged in front of the movable focusing mirror along the second direction; the half-mirror lens is used to transmit the second laser beam and reflect visible light containing the marking result of the second laser beam to the photosensitive element.

[0011] According to some embodiments of the present application, the control module may be configured to receive a processing result of the photosensitive element on the visible light and at least control the overall movement of the optical system according to the processing result.

[0012] The second aspect of the present application provides a line engraving engine, which may include: a plurality of second optical lenses placed in sequence and a plurality of optical systems as described above; wherein the plurality of second optical lenses are arranged along a third direction, and each second optical lens is used to split a beam of laser into two beams of laser light having propagation directions perpendicular to each other, wherein one beam of laser light enters an adjacent second optical lens along the third direction, and the other beam of laser light propagates along a fourth direction perpendicular to the third direction into the optical system; the plurality of second optical lenses include at least one beam splitter placed in sequence along the third direction and a reflector arranged after the beam splitter.

[0013] According to some embodiments of the present application, when the number of optical systems placed along the fourth direction is one, the first optical lens includes a reflector; when the number of optical systems placed along the fourth direction is multiple, the first optical lens of the optical system placed at the rear along the fourth direction includes a reflector, and the first optical lenses of the remaining optical systems include a spectrometer.

[0014] According to a third aspect of the present application, there is provided a laser scribing device, which includes an optical path structure and a scribing engine as described above; the optical path structure includes at least: a laser, a first optical path, a second optical path and a splitting optical path; the laser is used to emit a laser beam, which passes through the first optical path and the second optical path in sequence, is emitted by the second optical path, and is received by the splitting optical path; the splitting optical path is used to split the incident laser beam, the number of splits being M, and the M split laser beams are respectively emitted into the corresponding scribing engines; each scribing engine splits the incident laser, the number of splits being N, and the emitted laser beam acts on the coated glass for laser scribing.

[0015] According to some embodiments of the present application, there are two lasers.

[0016] The optical system disclosed in the present application can adjust the focus and position of the outgoing laser beam in real time during scribing, thereby improving the consistency of the edge effect of the laser scribing. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The present application will be further described in the form of exemplary embodiments, which will be described in detail with reference to the accompanying drawings. These embodiments are not limiting, and in these embodiments, like numbers represent like structures, wherein: Figure 1 is an exemplary block diagram of an optical system according to some embodiments of the present application; Figure 2 is an exemplary block diagram of a marking engine according to some embodiments of the present application; Figure 3 is an exemplary structural diagram of a marking engine according to some embodiments of the present application; Figure 4 is an exemplary block diagram of an optical path structure of a laser scribing device according to some embodiments of the present application; Figure 5 is an exemplary block diagram of a split light path according to some embodiments of the present application; Figure 6 This is an exemplary structural diagram of a dust collecting part according to some embodiments of the present application. DETAILED DESCRIPTION

[0018] To make the above-mentioned objects, features, and advantages of the present application more clearly understood, the specific embodiments of the present application are described in detail below with reference to the accompanying drawings. The following description sets forth many specific details to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways than those described herein, and those skilled in the art can make similar improvements without violating the scope of the present application. Therefore, the present application is not limited to the specific embodiments disclosed below.

[0019] Unless otherwise defined, all technical and scientific terms used in this application have the same meanings as those commonly understood by those skilled in the art to which this application belongs. The terms used in this application and in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application. The terms "and / or" or "and / or" as used in this application include any and all combinations of one or more of the relevant listed items.

[0020] In this application, the terms "including", "having" and their cognates, which may be used in various embodiments, are intended only to indicate specific features, numbers, steps, operations, elements, components or combinations of the foregoing items, and should not be understood as first excluding the existence of one or more other features, numbers, steps, operations, elements, components or combinations of the foregoing items or the possibility of adding one or more features, numbers, steps, operations, elements, components or combinations of the foregoing items.

[0021] It should be noted that the terms "first", "second", "third", etc. used in this application are only used to distinguish descriptions and should not be understood as indicating or implying relative importance. When a component is referred to as being "fixed to", "mounted on" or "set on" another component, it can be directly on the other component or there can be other components in the middle. When a component is considered to be "connected" to another component, it can be directly connected to the other component or there can be other components in the middle at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used in this application are for illustrative purposes only.

[0022] Some embodiments of the present application are described below with reference to the accompanying drawings. It should be noted that the following description is for illustrative purposes only and is not intended to limit the scope of protection of the present application.

[0023] On the one hand, the present application discloses an optical system that can adjust the focus of an emitted laser beam in real time. Figure 1 An exemplary block diagram of an optical system according to some embodiments of the present application is shown, as shown in FIG. Figure 1 As shown, the optical system may include a first optical lens 110, a wave plate 120, a polarization beam splitter 130 and a movable focusing lens 140 arranged in sequence. The first optical lens 110, the wave plate 120 and the polarization beam splitter 130 may be arranged along a first direction, such as Figure 1 The coordinate system shown in xdirection. In some implementations, the first optical lens 110 may include a beam splitter or a reflector. The outgoing laser beam OR will enter the optical system from the first optical lens 110, and part or all of the laser beam OR will be incident on the wave plate 120 along the first direction. This changes according to the selection of the first optical lens 110. For example, when the first optical lens 110 is a beam splitter, part of the laser beam OR will be incident on the wave plate 120 along the first direction according to the ratio of the transmitted beam to the reflected beam. The polarization beam splitter 130 can be used to split the first laser beam L1 incident from the wave plate 120 into two laser beams with mutually perpendicular propagation directions. For example, the first laser beam can be partially reflected to propagate in a second direction perpendicular to the first direction (such as Figure 1 in y The second laser beam L2 (in the second direction) is transmitted through the polarization beam splitter 130, and another portion thereof continues to propagate in the first direction, which can be recorded as the third laser beam L3. The movable focusing mirror 140 can be arranged along the second direction to receive the second laser beam L2 and focus the second laser beam L2 on the target location to mark the coated glass T. In some implementations, the movable focusing mirror 140 can be arranged on the motion execution end of a controlled motor. The motor can achieve linear motion along the second direction. The optical system can also include a control module (not shown in the figure), which can be configured to adjust the position of the movable focusing mirror 140 along the second direction according to the focus of the second laser beam L2 to keep the second laser beam L2 focused on the target location. To achieve focus detection of the second laser beam L2, the optical system can also include a focus detection element 210 communicatively connected to the control module. The focus detection element 210 can be any suitable distance sensor or camera device. The control module can receive data related to the focus of the second laser beam L2 transmitted by the focus detection element 210 and process it, such as by comparing it with the target location, to determine whether the current focus of the second laser beam L2 is at the target location. Based on the determination result, the control module can control the movement of the motor to adjust the focus of the second laser beam L2. For example, the motor can also be communicatively connected to the control module to transmit control signals.

[0024] The wave plate 120 and the polarization beam splitter 130 located behind the wave plate 120 can be combined to control the optical power of the second laser beam L2. In some implementations, the wave plate 120 can be a half-wave plate, and the half-wave plate can be rotatable. By rotating the half-wave plate, the ratio of transmitted and reflected light passing through the polarization beam splitter 130 can be adjusted, thereby changing the optical power of the second laser beam L2. It is understood that the power of the first laser beam L1 may decrease due to certain reasons during propagation. The second laser beam L2, generated by the polarization beam splitter 130 based on the first laser beam L1, needs to maintain a stable power when laser scribing the coated glass T. In this case, power compensation can be performed. For example, when the optical power of the first laser beam L1 decreases, the ratio of transmitted and reflected light through the polarization beam splitter 130 can be reduced, increasing the reflected light and thus maintaining the optical power of the second laser beam L2. This operation can be achieved by rotating the wave plate 120 as described above. In some implementations, the rotation of the wave plate 120 can be controlled. The optical system may further include a power detection element 220, such as a laser power detector, disposed behind the polarization beam splitter 130 along the first direction and communicatively connected to the control module. The power detection element 220 can determine the power of the third laser beam L3 transmitted through the polarization beam splitter 130 and transmit this power to the control module. The control module can then determine the current power of the second laser beam L2 based on this power and the current ratio of transmitted light to reflected light from the polarization beam splitter 130. If the current power of the second laser beam L2 does not meet the requirements, such as being lower than the target power, the control module can control the rotation of the wave plate 120 to change the current ratio of transmitted light to reflected light from the polarization beam splitter 130, thereby compensating the power of the second laser beam L2. Regarding the rotation of the wave plate 120, it can also be disposed on the motion actuator of a controlled motor, for example, on the rotating shaft of a rotating motor to achieve rotation. The control module can control the rotation of the wave plate 120 by controlling the rotating motor, thereby achieving the aforementioned power compensation.

[0025] In some implementations, the optical system may further include a beam shaping element 150 disposed in front of the movable focusing mirror 140 along the second direction. The beam shaping element 150 may be used to transform the intensity distribution of the second laser beam L2. In one example, the beam shaping element 150 may be used to transform the intensity distribution of the second laser beam L2 from a Gaussian distribution to a flat-top distribution. A laser beam with a flat-top distribution can maintain a constant intensity distribution across its cross section, which facilitates consistent marking.

[0026] The half-mirror 160 can also be arranged in front of the movable focusing mirror 140 along the second direction. The half-mirror 160 has both light-transmitting and light-reflecting properties, and can completely transmit the passing second laser beam L2, and reflect the visible light containing the marking result of the second laser beam L2 to the photosensitive element 230. After the second laser beam L2 is focused and emitted from the movable focusing mirror 140, it will mark the coated glass T. The visible light including the reflected light from the marked area can propagate in the opposite direction to the second direction, and after reaching the half-mirror 160, it is reflected to the photosensitive element 230. The photosensitive element 230 can be any suitable imaging device, such as a CCD camera. After processing, the visible light can be converted into a visual image output as the above-mentioned visible light processing result.

[0027] In some implementations, the photosensitive element 230 can also be communicatively connected to the control module to receive the processing results and at least control the overall movement of the optical system based on the processing results. Exemplarily, in an implementation, the various components of the entire optical system can be installed in sequence on the same mounting frame. For example, the same mounting plate or the inside of the same mounting box. The mounting frame can be movably connected to other structures, such as a marking workbench. Through a combination of means such as guide rails and sliders, the guide rails are provided on the marking workbench, and the mounting frame corresponding to the optical system is provided on the slider. The movement of the marking unit is achieved by the linear sliding of the slider on the guide rail. The movement can be driven by a motor, such as a linear motor, and the slider provided on the guide rail serves as the actuator of the linear motor to perform linear motion under control. For example, a movement instruction issued by the control module is received to perform linear motion.

[0028] In some implementations, the control module may be integrated into the optical system. For example, the control module may include an MCU, a programmable logic device (PLD), or the like. Alternatively, the control module may be externally implemented in the form of an industrial computer, etc. This application does not impose any specific limitations.

[0029] Regarding the motion of an optical system or a component contained in an optical system, combined Figure 1 If the optical system is controlled to move in the direction from inside to outside the paper (refer to Figure 1 The coordinate system is in the z direction) and the coated glass is scribed. The movable focusing mirror 150 can be controlled along y The entire optical system can be controlled to move along the x Move in this direction to change the distance between the current stroke and the previous stroke (if any).

[0030] During the laser scribing process, there are at least three scribing steps. First, a P1 line is etched on the bottom electrode layer of the coated glass (for example, the conductive film layer of TCO glass). Then the electron transport layer is deposited and the perovskite layer is applied. After annealing, the hole transport layer is deposited, and the P2 line is etched on the hole transport layer, the perovskite layer and the electron transport layer. Finally, the top metal electrode layer is deposited, and the P3 line is etched on the metal electrode layer, the hole transport layer, the perovskite layer and the electron transport layer. The optical system disclosed in the present application can be to use the P1 line as the reference line to control the direction of the P2 / P3 line when etching the P2 and P3 lines, that is, the aforementioned control module controls the laser beam position of the optical system according to the output visual image of the photosensitive element 230 for the scribing area (as described above). x The laser scriber tracks the P1 line while etching the P2 / P3 lines, ensuring that all scribe lines follow the same path. Furthermore, the laser scriber minimizes the spacing between lines (by adjusting the laser beam position of the optical system) while ensuring that the lines do not cross, thus reducing dead zones and achieving high-quality laser scribing.

[0031] On the other hand, the present application provides a line engraving engine. Figure 2 , the engraving engine may include a plurality of second optical lenses (including the second optical lens OM1, the second optical lens OM2, etc.) placed in sequence and a plurality of optical systems as described above. Among them, the plurality of second optical lenses may be arranged along a third direction, and each second optical lens may divide a beam of laser into two beams of laser light having propagation directions perpendicular to each other, wherein one beam of laser light enters the adjacent second optical lens along the third direction, and the other beam of laser light propagates along a fourth direction perpendicular to the third direction into the optical system. For example, the second optical lens OM1 may divide the incident laser beam into a beam of laser light that enters the adjacent second optical lens OM2, and a beam of laser light that enters the optical system BL1 along a fourth direction (vertical direction, a third direction perpendicular to the horizontal direction). Along the third direction, the plurality of second optical lenses may include at least one beam splitter and a reflector located behind the beam splitter. As Figure 2 As shown, the second optical lens OM1 is a beam splitter, and its projection / reflection ratio can be 1:1. One laser beam enters the second optical lens OM2, and the other laser beam changes its propagation direction and enters the optical system BL1. The second optical lens OM2 is a reflector, which changes the propagation direction of the laser beam and transmits the laser beam to the optical system BL4. The number of optical systems placed along the fourth direction can be one or more. When the number is one, the first optical lens 110 of the optical system can be a reflector. Combined Figure 1, the laser beam OR will be changed in transmission direction and enter the subsequent components, such as the wave plate 120. When there are multiple optical systems, such as 2 or more, the first optical lens 110 of the optical system placed at the rear along the fourth direction is a reflector, and the first optical lenses 110 of the remaining optical systems are beam splitters. For example, Figure 2 The number of optical systems described in is 3, among which the first optical component 110 of the optical system BL1 is a beam splitter, and its projection / reflection ratio can be 2:1; the first optical component 110 of the optical system BL2 is a beam splitter, and its projection / reflection ratio can be 1:1; the first optical component 110 of the optical system BL3 is a reflector. Similarly, the first optical component 110 of the optical system BL4 is a beam splitter, and its projection / reflection ratio can be 2:1; the first optical component 110 of the optical system BL5 is a beam splitter, and its projection / reflection ratio can be 1:1; the first optical component 110 of the optical system BL6 is a reflector. Of course, the number of the above second optical lenses and the number of optical systems arranged along the fourth direction can be adjusted according to actual conditions. The engraving engine can emit at least one laser beam for engraving. For example, the number of second optical lenses is 1, and the number of optical systems arranged along the fourth direction is also 1. By increasing or decreasing the number of second optical lenses and the number of optical systems arranged along the fourth direction, the engraving engine can simultaneously emit multiple laser beams for engraving, thereby realizing the etching of multiple engraving lines at the same time. As Figure 2 As shown, the scribing engine can simultaneously emit six laser beams for scribing, thereby achieving high-efficiency laser scribing. Of course, the number of laser beams emitted by the scribing engine can be adjusted, for example, the number of laser beams emitted by the scribing engine is N, where N is a positive integer greater than 1.

[0032] refer to Figure 3 The exemplary structural diagram of the engraving engine shows six optical systems mounted on a mounting platform 310. The mounting platform 310 is provided with a mounting groove 320, and the mounting groove 320 is provided with a guide rail and a plurality of sliders located on the guide rail. The slider is provided with a plug-in structure for facilitating installation / disassembly, such as an elastic card slot, and the mounting frame of the optical system is provided with a mounting structure such as a card block that is compatible with the plug-in structure, so that the optical system can be quickly installed on the slider. In this way, the optical system can be adjusted in quantity quickly and conveniently to achieve the adjustment of the number of laser beams emitted by the engraving engine. The incident laser beam will first enter the beam splitter 330 (50 / 50), which corresponds to the aforementioned Figure 2 The second optical lens OM1 forms reflected light and transmitted light, and the intensity of reflected light and transmitted light are simply recorded as 1 and 1 respectively. The reflected light enters the three optical systems on the right side, which are the corresponding Figure 2 The optical system BL1, optical system BL2 and optical system BL3. The transmitted light passes through the reflector 340, which corresponds to the aforementioned Figure 2 The second optical lens OM2 changes the propagation direction and enters the three optical systems on the left, which corresponds to Figure 2 Then, the two laser beams are split, transmitted, and sent into six optical systems for beam output. Figure 3 Also shown is a line tracking camera 350, corresponding to the photosensitive element 230. In which, multiple optical systems can share one line tracking camera, such as Figure 3 The three optical systems shown in FIG3 share one line tracking camera 350. Alternatively, each optical system may be equipped with an independent line tracking camera, which is not restrictive.

[0033] The present application also provides a laser scribing device, which may include an optical path structure and a scribing engine as described above. Figure 4 , the optical path structure may include a laser 410, a first optical path 420, a second optical path 430 and a splitter optical path 440. The laser 410 can be used to emit laser light and may be a semiconductor laser. The laser beam emitted by the laser 410 may be reflected, shaped and / or expanded by the optical elements included in the first optical path 420 and the second optical path 430, and then emitted by the second optical path 430 and received by the splitter optical path 440. The splitter optical path 440 may split the incident laser beam, and the number of splits may be M, where M is a positive integer greater than or equal to 1. The M split laser beams may be respectively emitted into the corresponding engraving engines, that is, M engraving engines to perform laser marking on the coated glass. As Figure 4 As shown in the figure, the splitting optical path 440 can split the incident laser beam into three beams, which can then be incident on three marking engines for laser marking. In some feasible embodiments, the optical path structure can be installed on a supporting platform (not shown in the figure). The first optical path 720 and the second optical path 730 are not restrictive. Any optical path that can achieve reflection, shaping and / or beam expansion of the laser beam is within the scope of protection of this application. It is understandable that Figure 4 Only one laser 410 is shown in the figure, but more lasers may be provided in actual applications, for example, two, three or even more. In some implementations, the laser 410 may include two lasers.

[0034] As an example, but not limiting, the optical path structure may include a laser, a horizontal optical path serving as the aforementioned first optical path 420, a vertical optical path serving as the aforementioned second optical path 430, and a beam splitter optical path. Elements such as optical shutters, reflectors, beam expanders, and paddles may be used to form the horizontal and / or vertical optical paths. For example, the laser beam emitted by the laser first enters the optical shutter of the horizontal optical path. It then passes through multiple reflectors, continuously changing its propagation direction (consistently changing its propagation direction in the horizontal plane) before entering the beam expander for expansion. The expanded laser beam continues to enter the paddle and, through the reflectors, enters the vertical optical path. The multiple reflectors included in the vertical optical path change the propagation direction of the incident laser beam and direct it into the window. The laser beam then enters the beam splitter optical path. The beam splitter optical path is used to split the incoming laser beam and direct it into the scoring engine. For example, the mounting platform 310 for the scoring engine may be integrated into the beam splitter optical path, for example, provided by a platform within the beam splitter optical path. It should be noted that the number of lasers and the composition of the transmission optical path can also be increased or decreased according to actual conditions, such as adding one or more lasers, or reducing to one laser, or changing the number of reflectors, all of which are within the scope of protection of this application.

[0035] Figure 5 1 is an exemplary block diagram of a light splitting path according to some embodiments of the present application. The light splitting path 500 may include a plurality of light splitters arranged in sequence and a reflector arranged after the light splitters. Figure 5 As shown, the beam splitting optical path 500 may include a beam splitter 510, a beam splitter 520, and a reflector 530. The beam splitter 510 can be used to split the incident laser beam into two laser beams with mutually perpendicular propagation directions, one of which enters the beam splitter 520 for further beam splitting, and the other beam will enter the marking engine. For example, the beam splitter 510 can achieve a 66 / 33 ratio of beam splitting, with 2 beams incident on the beam splitter 520 and one beam incident on one marking engine. The beam splitter 520 can also split the incident laser beam into two beams. One beam is emitted to the reflector 530, and the other beam enters another marking engine. For example, the beam splitter 520 can achieve a 50 / 50 ratio of beam splitting, with one beam incident on the reflector 530 and one beam incident on one marking engine. The laser beam reaching the reflector 530 will have its propagation direction changed and will be incident on the third marking engine. According to actual conditions, the number of beam splitters can be adjusted instead of Figure 5 The limit is two. For example, by increasing or decreasing the number of beam splitters to adjust the number of beams obtained after splitting the incident laser beam, the number of beams after splitting can be 1, 2, 3, or even more. In this way, the splitting optical path can achieve M beam splits, and the marking engine can achieve N beam splits. The laser marking device provided in this application can simultaneously emit M*N laser beams for marking, greatly improving the marking efficiency.

[0036] As an illustrative but non-limiting illustration, the laser beam received by the aforementioned window can be reflected by a reflector and then redirected to enter the first beam splitter (33 / 67), forming reflected light and transmitted light. The intensities of the reflected light and transmitted light are simply recorded as 1 and 2, respectively. The reflected light hits the reflector and is reflected to one scoring engine, while the transmitted light hits the second beam splitter (50 / 50), forming reflected light and transmitted light, with the intensities of the reflected light and transmitted light being simply recorded as 1 and 1, respectively. The reflected light hits the reflector and is reflected to another scoring engine, while the transmitted light hits the reflector and reflector 880, changing direction, and then reflecting to yet another scoring engine. Correspondingly, when there are multiple laser beams, multiple windows can be provided, and the aforementioned beam splitting optical path structure can also be provided in multiple configurations to split / reflect the laser beam into multiple scoring engines. For example, the aforementioned structure can enable the laser beam to enter six scoring engines. Of course, the number of groups of final scoring units can be adjusted according to actual conditions, such as adjusting the number of lasers or increasing or decreasing the number of beam splitters, so as to control the number of laser beams.

[0037] It is understood that powder, dust, etc. will inevitably be generated during laser scribing. The laser scribing equipment may also include a dust collector, see Figure 6 The beam outlet of the marking engine can be covered by the dust collecting plate 610 of the dust collecting member. The dust collecting plate 610 can be provided with dust suction ports 620 corresponding to the number of the marking engines. For example, Figure 6 Six groups of dust suction ports 620 are shown in the figure. Each group of dust suction ports 620 can be provided with two dust suction inlets, which can include a first through hole that allows the laser beam to pass through and a second through hole for dust suction. In some embodiments, the first through hole and the second through hole can be the same through hole. The dust collecting plate 610 can be connected to the dust collecting air duct 630 and externally connected to the dust suction equipment. Therefore, the dust generated during laser marking will eventually enter the dust suction equipment through the confluence of the dust suction port 620 and the dust collecting air duct 630. In addition, a flow sensor 640 can be provided on the branch of the dust collecting air duct 630 to detect whether the dust suction port 620 is blocked.

[0038] The laser marking equipment may also include a workbench and a material transfer component. The workbench can be a base for laser marking, such as a U-shaped base made of marble with an extremely low thermal expansion coefficient. A gantry can be placed on the U-shaped base, for example, on arms on either side of the U-shaped base. The aforementioned optical path structure and marking engine can be mounted on the gantry. For example, this can be achieved via a supporting platform. The optical path structure and marking engine are placed on the supporting platform. The supporting platform is movably connected to the inner side wall of the gantry via a guide rail, a slider, or a gear rack. In this way, the movement of the supporting platform on the gantry can drive the optical path structure back and forth on the gantry, thereby achieving movement of the optical path structure along the marking direction to mark the coated glass. For example, the aforementioned z-direction. The movement of the supporting platform can be driven by a motor, such as a linear motor. The linear motor can be controlled, for example, connected to an external controller, such as an industrial computer, via a communication network, such as various wired or wireless connections. The linear motor moves by receiving motion control commands issued by the controller.

[0039] The material transfer component can be implemented by utilizing any existing suitable transfer structure, such as a combination of a conveyor belt, a conveyor wheel, a clamping claw, etc., and is not specifically limited here.

[0040] The above is an exemplary description of the laser scribing system disclosed in this application. It should be noted that the above description only describes part of the implementation of this application, and any modification, adjustment or update made under the guidance of this application is within the scope of protection of this application.

[0041] While the basic concepts have been described herein, it will be apparent to those skilled in the art that the detailed disclosure provided above is merely illustrative and does not constitute a limitation of this specification. Although not explicitly stated herein, various modifications, improvements, and revisions to this specification may be made by those skilled in the art. Such modifications, improvements, and revisions are suggested in this specification and remain within the spirit and scope of the exemplary embodiments of this specification.

[0042] It should be understood that the embodiments described in this specification are intended only to illustrate the principles of the embodiments of this specification. Other variations may also fall within the scope of this specification. Therefore, by way of example and not limitation, alternative configurations of the embodiments of this specification may be considered consistent with the teachings of this specification. Accordingly, the embodiments of this specification are not limited to the embodiments explicitly described and illustrated in this specification.

[0043] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0044] The above-described embodiments merely illustrate several implementations of the present invention, and while their descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent. It should be noted that a person skilled in the art would be able to make numerous variations and improvements without departing from the spirit of the present invention, all of which fall within the scope of protection of the present invention. Therefore, the scope of protection of the patent for this invention shall be determined by the appended claims.

Claims

1. An optical system, characterized in that: include: The optical path structure includes a first optical lens, a wave plate, a polarization beam splitter and a movable focusing lens arranged in sequence; The first optical lens, the wave plate, and the polarization beam splitter are arranged along a first direction, and the polarization beam splitter is used to reflect a portion of the first laser beam incident along the first direction into a second laser beam propagating along a second direction perpendicular to the first direction; The movable focusing mirror is arranged along the second direction, and is used to receive the second laser beam and focus the second laser beam on a target position to scribe the coated glass; The control module is configured to adjust the position of the movable focusing mirror along the second direction according to the focus of the second laser beam to keep the second laser beam focused on the target site.

2. The optical system according to claim 1, wherein: The control module is in communication with a focus detection element; the focus detection element is used to determine the focus of the second laser beam and transmit it to the focusing mirror control module.

3. The optical system according to claim 1, wherein: The first optical lens includes a beam splitter or a reflector.

4. The optical system according to claim 1, wherein: The wave plate includes a rotatable wave plate; a power detection element arranged behind the polarization beam splitter along the first direction and in communication with the control module, for determining the power of the second laser beam by the third laser beam passing through the polarization beam splitter; The control module is configured to control the rotation of the wave plate at least based on the power, so that the power of the second laser beam meets a preset requirement.

5. The optical system according to claim 1, wherein: The optical system further includes a beam shaping element disposed in front of the movable focusing mirror along the second direction; the beam shaping element is configured to transform the intensity distribution of the second laser beam.

6. The optical system according to claim 5, characterized in that The beam shaping element is used to transform the intensity distribution of the second laser beam from a Gaussian distribution to a flat-top distribution.

7. The optical system according to claim 1, wherein: The optical system further includes a half mirror disposed in front of the movable focusing mirror along the second direction; the half mirror is configured to transmit the second laser beam and reflect visible light containing a marking result of the second laser beam to a photosensitive element.

8. The optical system according to claim 7, wherein: The control module is configured to receive a processing result of the photosensitive element on the visible light and at least control the overall movement of the optical system according to the processing result.

9. A marking engine, characterized in that: include: A plurality of second optical lenses and a plurality of optical systems as claimed in any one of claims 1 to 8 are placed in sequence; wherein, The plurality of second optical lenses are arranged along a third direction, and each second optical lens is used to split a laser beam into two laser beams having mutually perpendicular propagation directions, wherein one laser beam enters an adjacent second optical lens along the third direction, and the other laser beam propagates along a fourth direction perpendicular to the third direction and enters the optical system; The plurality of second optical lenses include at least one beam splitter sequentially arranged along the third direction and a reflector arranged behind the beam splitter.

10. The marking engine according to claim 9, wherein: When the number of optical systems placed along the fourth direction is one, the first optical lens includes a reflector; when the number of optical systems placed along the fourth direction is multiple, the first optical lens of the optical system placed at the rear along the fourth direction includes a reflector, and the first optical lenses of the remaining optical systems include a spectrometer.

11. A laser scribing device, characterized in that: The laser scribing device comprises an optical path structure and a scribing engine according to any one of claims 9 to 10; The optical path structure at least includes: a laser, a first optical path, a second optical path and a split optical path; The laser is used to emit a laser beam, which passes through the first optical path and the second optical path in sequence, is emitted by the second optical path, and is received by the split optical path; The splitting optical path is used to split the incident laser beam, the number of split beams is M, and the M split laser beams are respectively emitted into the corresponding scoring engines; each scoring engine splits the incident laser, the number of split beams is N, and the emitted laser beam acts on the coated glass for laser scoring.

12. The laser scribing equipment according to claim 11, wherein the number of lasers is two.

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