Miniature peristaltic pump and processing method thereof

Abstract

The invention relates to a micro peristaltic pump and a processing method thereof. The micro peristaltic pump comprises a runner layer and at least one micro phase change driver, the flow channel layer comprises a flow channel layer body, a micro-flow channel arranged in the flow channel layer body and an elastic film used for sealing the micro-flow channel; the miniature phase change driver comprises a substrate layer, a cavity layer and an elastic barrier film which are sequentially arranged in a stacked mode in the first direction. The substrate layer comprises a substrate and an electrode arranged on the substrate, the material of the electrode has heat sensitivity, the cavity layer comprises a cavity and a phase-change material contained in a cavity formed by the cavity, the electrode is used for heating the phase-change material, and when the phase-change material is heated to expand, the elastic barrier film is extruded to deform, so that the phase-change material is separated from the elastic barrier film. Therefore, the integration level, the manufacturing feasibility and the process suitability of the micro peristaltic pump can be improved.

Description

Technical Field

[0001] The present application relates to the field of microfluidics technology, and in particular to a micro peristaltic pump and a processing method thereof. Background Art

[0002] Micropumps are key components in microfluidic systems for transporting and precisely controlling minute amounts of fluids. They are widely used in fields such as biomedical analysis, drug delivery, and environmental monitoring. Ultra-low flow rate pumping typically relies on channels with extremely fine inner diameters, which places higher demands on the pump's drive mechanism. Microperistaltic pumps achieve unidirectional fluid transport by periodically squeezing the flexible pipe wall, applying pressure sequentially at multiple locations, mimicking the peristaltic mechanism in vivo. This structure physically isolates the drive element from the working fluid, effectively preventing fluid contamination, leakage, dead volume at the drive end, clogging, and bubble accumulation. Furthermore, microperistaltic pumps feature valve-free operation, simple structure, and strong controllability. They can achieve high backpressure output, good bubble tolerance, self-priming, and bidirectional transport capabilities, demonstrating significant advantages in handling minute, sensitive, or highly reactive fluids. However, the structural design of conventional microperistaltic pumps, which rely on phase change actuation, presents numerous challenges in miniaturization, reliability, and process compatibility. Summary of the Invention

[0003] The present application provides a micro peristaltic pump and a processing method thereof, aiming to solve the problem of poor compatibility between traditional micro peristaltic pumps and micro-nano processing technology, thereby improving the integration, manufacturing feasibility and process adaptability of the micro peristaltic pump.

[0004] In a first aspect of the present application, a micro peristaltic pump is provided, comprising a flow channel layer and at least one micro phase change actuator;

[0005] The channel layer includes a channel layer body, a microchannel arranged in the channel layer body, and an elastic film for sealing the microchannel;

[0006] The micro phase change actuator includes a base layer, a chamber layer and an elastic barrier film stacked in sequence along a first direction; the base layer includes a substrate and an electrode arranged on the substrate, the material of the electrode is thermosensitive, the chamber layer includes a cavity and a phase change material accommodated in a cavity formed by the cavity, the electrode is used to heat the phase change material, and when the phase change material expands due to heat, it squeezes the elastic barrier film to deform, thereby squeezing the elastic film to deform to promote the flow of fluid in the microchannel; the material of the substrate, the material of the cavity and the material of the channel layer body each independently include a compound with a softening point below 700°C, and the Young's modulus of the compound is 1GPa~200GPa.

[0007] In some embodiments, the compound includes one or more of silicon, glass, and a polymer.

[0008] In some embodiments, the elastic barrier film is made of an elastic material and a polar polymer.

[0009] In some embodiments, at least a portion of the electrode is located within the cavity.

[0010] In some embodiments, the elastic film is made of elastic material.

[0011] In some embodiments, the compound includes at least the glass.

[0012] In some embodiments, the elastic barrier film includes a first base film and a second base film stacked along the first direction, the first base film is made of the elastic material, and the second base film is made of the polar polymer; or

[0013] The elastic barrier film only includes a first base film, and the material of the first base film includes the elastic material and the polar polymer.

[0014] In some embodiments, the polymer includes one or more of polymethyl methacrylate, polycarbonate, polystyrene, polydimethylsiloxane, polyethylene, polyethylene terephthalate, polyethersulfone, polyimide, and cyclic olefin copolymer.

[0015] In some embodiments, the glass includes one or more of soda-lime glass, borosilicate glass, soda-borosilicate glass, phosphate glass, zinc-phosphate glass, chalcogenide glass, and lead glass.

[0016] In some embodiments, the elastic material includes one or more of a silicone-based elastomer, a polyurethane elastomer, a thermoplastic elastomer, and a hydrogel-like material.

[0017] In some embodiments, the polar polymer includes one or more of parylene, epoxy resin, polyurethane, photocurable polyurethane, and thermoplastic polyurethane elastomer.

[0018] In some embodiments, the phase change material includes one or more of paraffin wax, fatty acid, polyol, water, and inorganic salt hydrate.

[0019] In some embodiments, the material of the electrode includes one or more metals and alloys thereof.

[0020] In some embodiments, the silicone-based elastomer includes one or more of polydimethylsiloxane and Ecoflex.

[0021] In some embodiments, the hydrogel material includes one or more of polyacrylamide, polyvinyl alcohol, gelatin, sodium alginate, sodium carboxymethyl cellulose, chitosan, polyvinyl pyrrolidone, and poly (N-isopropylacrylamide).

[0022] In some embodiments, the chamber layer further includes a doping material contained in the cavity, wherein the doping material includes one or more of graphite, carbon nanotubes, carbon nanofibers, metals and oxides thereof.

[0023] In some embodiments, the metal includes one or more of platinum, iridium, palladium, gold, silver, copper, iron, titanium, chromium, nickel, magnesium, aluminum, zinc, and indium.

[0024] In some embodiments, the base layer has a thickness of 300 μm to 1000 μm.

[0025] In some embodiments, the chamber layer has a thickness of 300 μm to 1000 μm.

[0026] In some embodiments, the wall thickness of the cavity is 500 μm to 1000 μm.

[0027] In some embodiments, the spacing between the cavities is 500 μm to 2000 μm.

[0028] In some embodiments, the cross-section of the cavity perpendicular to the first direction is any one of a circle, a rectangle, a rounded rectangle, an ellipse and an irregular shape, the maximum width of the cross-section parallel to the direction of fluid flow is 700 μm~1000 μm, and the maximum width of the cross-section perpendicular to the direction of fluid flow is 700 μm~1000 μm.

[0029] In some embodiments, the elastic barrier film has a thickness of 50 μm to 400 μm.

[0030] In some embodiments, the thickness of the flow channel layer is 300 μm to 1000 μm.

[0031] In some embodiments, the width of the microchannel parallel to the fluid flow direction is 300 μm to 1000 μm.

[0032] In some embodiments, the depth of the microchannel perpendicular to the fluid flow direction is 50 μm to 100 μm.

[0033] In some embodiments, the micro peristaltic pump comprises a plurality of the micro phase change actuators, and the plurality of the micro phase change actuators are arranged in an array along the microfluidic channel.

[0034] In some embodiments, the first direction is a direction from the micro phase change actuator to the flow channel layer.

[0035] A second aspect of the present application provides a method for manufacturing a micro peristaltic pump, comprising the following steps:

[0036] A thermosensitive electrode is prepared on the surface of the substrate to form a base layer;

[0037] Processing to form a cavity having a cavity;

[0038] laminating and bonding the cavity and the base layer;

[0039] filling the cavity with a phase change material to form a cavity layer;

[0040] An elastic barrier film is provided on a side of the chamber layer away from the base layer to obtain a micro phase change actuator;

[0041] Processing to form a flow channel layer body having micro-flow channels;

[0042] An elastic film for closing the microchannel is provided on one side of the channel layer body to form a channel layer;

[0043] Bonding at least one of the micro phase change actuators on one side of the elastic film of the flow channel layer to obtain the micro peristaltic pump;

[0044] In which, the electrode is used to heat the phase change material. When the phase change material expands due to heat, it squeezes the elastic barrier membrane to deform, thereby squeezing the elastic film to deform to promote the flow of fluid in the microchannel; the material of the substrate, the material of the cavity, and the material of the flow channel layer body each independently include a compound with a softening point below 700°C, and the Young's modulus of the compound is 1GPa~200GPa.

[0045] In some embodiments, the step of disposing an elastic barrier film on a side of the chamber layer away from the base layer comprises:

[0046] A first base film in the elastic barrier film is arranged on a side of the chamber layer away from the base layer, wherein the material of the first base film includes an elastic material;

[0047] A second base film in the elastic barrier film is arranged on a side of the first base film away from the base layer, and a material of the second base film includes a polar polymer.

[0048] In some embodiments, the steps of disposing the first base film in the elastic barrier film on the side of the chamber layer away from the base layer independently include: bonding the chamber layer to the first base film using at least one bonding method selected from plasma modified bonding, hot press bonding, adhesive bonding, and solvent assisted bonding; or

[0049] The first base film is formed on the surface of the chamber layer by using at least one of sputtering, chemical vapor deposition, spray coating, dip coating, spin coating, blade coating, and ultraviolet curing.

[0050] In some embodiments, the step of disposing the second base film in the elastic barrier film on the side of the first base film away from the base layer includes: bonding the first base film and the second base film using at least one bonding method selected from plasma modified bonding, hot press bonding, adhesive bonding, and solvent assisted bonding; or

[0051] The second base film is formed on the surface of the first base film by using at least one of sputtering, chemical vapor deposition, spray coating, dip coating, spin coating, blade coating, and ultraviolet curing.

[0052] In some embodiments, the step of providing an elastic film for closing the microchannel on one side of the channel layer body includes: bonding the channel layer body to the elastic film using at least one of plasma modified bonding, hot press bonding, adhesive bonding, and solvent-assisted bonding.

[0053] In some embodiments, the step of preparing a thermosensitive electrode on the surface of the substrate includes: forming an electrode pattern on the surface of the substrate using at least one of photolithography and printing;

[0054] The electrode material is deposited on the electrode pattern using at least one method selected from magnetron sputtering, ion sputtering, electron beam evaporation, laser evaporation, chemical vapor deposition and atomic layer deposition to form the electrode.

[0055] In some embodiments, the step of stacking and bonding the cavity and the base layer includes bonding the cavity and the base layer using at least one bonding method selected from the group consisting of pressure bonding, high-temperature hot-press bonding, ultrasonic bonding, and microwave-assisted bonding.

[0056] In some embodiments, the step of processing and forming the channel layer body having the microchannels includes: forming the channel layer body having the microchannels using at least one of deep reactive ion etching, laser etching, sandblasting etching, hot pressing, and injection molding.

[0057] Compared with traditional technologies, the above-mentioned micro peristaltic pump has at least the following advantages:

[0058] The substrate of the micro peristaltic pump is made of a compound with a softening point below 700°C and a Young's modulus of 1GPa to 200GPa. This material exhibits high structural rigidity, and during the thermal expansion of the phase change material, it causes little deformation of the cavity and substrate. This helps to more effectively convert the volume change caused by the phase change into directional stretching deformation of the elastic barrier membrane, reducing the accumulation of mechanical strain in the microstructure during actuation and enhancing the interfacial stability of the multilayer structure. Furthermore, under conditions of overall pressurized and heated bonding or localized heated bonding using ultrasound or microwaves, the material system still exhibits minimal microstructural deformation, which helps maintain the precision and integrity of the bonding interface. Based on the aforementioned material properties, a heating electrode can be integrated onto the substrate using standard micro-nanofabrication processes (such as lift-off). The material of this electrode is thermosensitive, and its resistance changes with temperature during actuation. By measuring this resistance change and combining it with an external temperature control circuit, the applied voltage or current can be adjusted in real time, enabling precise control of the volume change of the phase change material during heating, and thus precisely adjusting the stretching deformation of the elastic barrier membrane. The material of the flow channel layer and the cavity are each independently composed of compounds with a softening point below 700°C. This allows the use of micro-nanofabrication techniques such as laser cutting, dry etching, and wet etching to achieve the controllable construction of high-precision, complex microchannels and cavities formed by the cavity. Combined with the structural design of the flow channel layer and the micro phase change actuator, the integration, manufacturing feasibility, and process adaptability of the micro peristaltic pump can be improved. The materials used in the above structure all have good biocompatibility, making the device adaptable and safe for use in an in vivo implant environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0059] Figure 1 Schematic diagram of the cross-sectional structure of a micro peristaltic pump according to an embodiment of the present application.

[0060] Figure 2 Schematic diagram of the structure of a micro phase change actuator according to an embodiment of the present application.

[0061] Figure 3 FIG. 1 is a schematic diagram of an elastic barrier film according to an embodiment of the present application.

[0062] Figure 4 This is a schematic diagram of the processing flow of the base layer according to one embodiment of the present application; Figure 4 (a) is a schematic diagram of the substrate. Figure 4 (b) is a schematic diagram of the substrate and photoresist. Figure 4 (c) is a schematic diagram of the substrate, photoresist and electrode materials. Figure 4 (d) is a schematic diagram of the substrate and electrodes.

[0063] Figure 5A schematic diagram of the processing flow of a micro phase change actuator according to an embodiment of the present application; Figure 5 (e) is a schematic diagram of the cavity. Figure 5 (f) is a schematic diagram of the cavity, substrate and electrodes. Figure 5 (g) is a schematic diagram of the cavity, substrate, electrodes, phase change material and elastic barrier film.

[0064] Figure 6 This is a schematic diagram of the processing flow of the flow channel layer and the micro peristaltic pump according to one embodiment of the present application; Figure 6 (h) is a schematic diagram of the channel layer and the microchannel. Figure 6 (i) is a schematic diagram of the flow channel layer body, microchannels and resin materials. Figure 6 (j) is a schematic diagram of the flow channel layer. Figure 6 (k) in the figure is a schematic diagram of a micro peristaltic pump.

[0065] Figure 7 This is a top-view microscope photograph of the electrode array, phase-change actuator array, and micro peristaltic pump according to an embodiment of the present application; Figure 7 (a) is the electrode array, Figure 7 (b) is the phase change driver array. Figure 7 (c) in the figure is a micro peristaltic pump.

[0066] Figure 8 Side-view microscope photos of the elastic film and elastic barrier membrane expanding and deforming under different driving powers of the micro phase-change actuator according to one embodiment of the present application.

[0067] Explanation of the accompanying drawings: 1. Micro phase change actuator; 10. Base layer; 101. Substrate; 102. Electrode; 20. Chamber layer; 201. Cavity; 202. Phase change material; 2. Channel layer; 21. Microchannel; 22. First port; 23. Second port; 24. Channel layer body; 25. Elastic film; 26. Resin material; 3. Micro peristaltic pump; 30. Elastic barrier film; 301. First base film; 302. Second base film; 4. Photoresist; 5. Electrode material. DETAILED DESCRIPTION

[0068] To make the above-mentioned objects, features, and advantages of the present application more clearly understood, the specific embodiments of the present application are described in detail below. The following description sets forth many specific details to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways than those described herein, and those skilled in the art can make similar modifications without violating the scope of the present application. Therefore, the present application is not limited to the specific embodiments disclosed below.

[0069] In this application, terms such as "first aspect," "second aspect," and "third aspect" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or quantity, nor as implicitly indicating the importance or quantity of the technical features indicated. Furthermore, terms such as "first," "second," and "third," etc., are intended only to provide a non-exhaustive enumeration and description and should not constitute a closed-ended limitation on quantity.

[0070] In this application, the terms "optionally," "optional," and "optional" mean optional or dispensable, i.e., they refer to either option being selected from two parallel options: "with" or "without." If a technical solution contains multiple "optional" clauses, each "optional" clause is independent unless otherwise specified and there are no contradictions or constraints.

[0071] In this application, when referring to numerical ranges, unless otherwise specified, the numerical ranges are considered continuous and include the minimum and maximum values ​​of the range, as well as every value between such minimum and maximum values. Further, when a range refers to an integer, every integer between the minimum and maximum values ​​of the range is included. In addition, when multiple ranges are provided to describe a feature or characteristic, the ranges can be combined. In other words, unless otherwise specified, all ranges disclosed herein should be understood to include any and all subranges subsumed therein.

[0072] In this application, the technical features described in an open manner include closed technical solutions composed of the listed features, and also include open technical solutions containing the listed features.

[0073] Unless otherwise defined, all technical and scientific terms used in this application have the same meaning as commonly understood by those skilled in the art to which this application belongs. The terms used in this application and in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application. The term "and / or" used in this application includes any and all combinations of one or more related listed items. The term "multiple" in this application means at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0074] See also Figure 1 and Figure 2 , an embodiment of the present application provides a micro peristaltic pump 3, comprising a flow channel layer 2 and three micro phase change actuators 1;

[0075] The flow channel layer 2 includes a flow channel layer body 24, a micro-channel 21 disposed in the flow channel layer body 24, and an elastic film 25 for sealing the micro-channel 21;

[0076] The micro phase change actuator 1 includes a base layer 10, a chamber layer 20 and an elastic barrier film 30 stacked in sequence along a first direction Z; the base layer 10 includes a substrate 101 and an electrode 102 arranged on the substrate 101, the material of the electrode 102 is thermosensitive, the chamber layer 20 includes a cavity 201 and a phase change material 202 accommodated in the cavity formed by the cavity 201, the electrode 102 is used to heat the phase change material 202, and when the phase change material 202 expands due to heat, it squeezes the elastic barrier film 30 to deform, thereby squeezing the elastic film 25 to deform to promote the flow of fluid in the microchannel 21; the material of the substrate 101, the material of the cavity 201 and the material of the channel layer body 24 each independently include a compound with a softening point below 700°C, and the Young's modulus of the compound is 1GPa~200GPa.

[0077] The material selection of traditional micro peristaltic pumps makes the processing of micro peristaltic pumps not only demanding on equipment conditions, but also easily introduces residual stress, affecting the structural stability and yield of the micro peristaltic pumps. In addition, the interface compatibility between layers is poor, which limits the integration and structural scalability of the micro peristaltic pumps.

[0078] The material of the substrate 101 of the micro peristaltic pump 3 described above in this application includes a compound with a softening point below 700°C and a Young's modulus of 1GPa to 200GPa. The selected material has high structural rigidity and good biocompatibility. During the thermal expansion of the phase change material 202, the cavity 201 and the substrate 101 are substantially undeformed. This helps to more effectively convert the volume change caused by the phase change into the directional stretching deformation of the elastic barrier membrane 30, reducing the accumulation of mechanical strain in the microstructure during the driving process and enhancing the interfacial stability of the multilayer structure. In addition, under the conditions of overall pressurized and heated bonding or localized heated bonding achieved using ultrasound or microwaves, the above material system still exhibits minimal microstructural deformation, which is beneficial for maintaining the accuracy and integrity of the bonding interface. Based on the above-mentioned material properties, a standard micro-nanofabrication process (such as a lift-off process) can be used to process an integrated heating electrode 102 on the substrate 101. The material of the electrode 102 is thermosensitive, and its resistance changes with temperature during the driving process. By measuring this resistance change and combining it with an external temperature control circuit to adjust the applied voltage or current in real time, it is possible to achieve precise control of the volume change of the phase change material 202 during the heating process, and thus precisely adjust the extension deformation amplitude of the elastic barrier membrane 30. The material of the flow channel layer body 24 and the material of the cavity 201 each independently include compounds with a softening point below 700°C. Therefore, micro-nanofabrication technologies such as laser cutting, dry etching, and wet etching can be used to achieve high-precision, controllable construction of the complex microchannel 21 and the cavity formed by the cavity 201. At the same time, combined with the structural design of the flow channel layer 2 and the micro phase change actuator 1, the integration level, manufacturing feasibility, and process adaptability of the micro peristaltic pump 3 can be improved. The materials used in the above structure all possess excellent biocompatibility, ensuring the adaptability and safety of the microperistaltic pump 3 for use in an in vivo implant environment. The elastic film 25 provides sufficient restoring force when the microphase-change actuator 1 stops operating, while also preventing the elastic film 25 from entering the microchannel 21 when not operating, thereby ensuring the sealing and structural stability of the microperistaltic pump 3.

[0079] The micro peristaltic pump 3 of the present application is driven by electrothermal means. By applying voltage to the electrode 102 to generate Joule heat, the phase change material 202 in the cavity undergoes a phase change reaction from solid to liquid after being heated. The incompressible volume expansion generated by the phase change process acts on the deformable elastic barrier film 30, thereby acting on the elastic film 25, causing it to stretch and deform in the direction of the microchannel 21. After the voltage is removed, that is, after heating is stopped, the phase change material 202 cools and shrinks, and the elastic film 25 and the elastic barrier film 30 rebound to their original shape under the action of their own elastic restoring force, completing a drive cycle. In a drive cycle, the resistance of the electrode 102 changes with temperature. The change in resistance is measured and combined with the external temperature control circuit to adjust the magnitude of the applied voltage or current in real time, thereby adjusting the temperature in the cavity 201, and then accurately adjusting the stretching deformation amplitude of the elastic barrier film 30. A voltage or current is applied to the electrode 102 according to a preset driving mode to achieve alternating squeezing and releasing of the fluid, thereby forming a controllable unidirectional or bidirectional peristaltic fluid transport in the microchannel 21 .

[0080] It can be understood that the first direction Z refers to the direction from the micro phase change actuator 1 to the flow channel layer 2. Furthermore, the first direction Z is the thickness direction of the micro phase change actuator 1.

[0081] As non-limiting examples, the Young's modulus of the above compounds includes, but is not limited to, 1 GPa, 20 GPa, 40 GPa, 60 GPa, 80 GPa, 100 GPa, 120 GPa, 140 GPa, 160 GPa, 180 GPa, 200 GPa, or ranges between any two of the foregoing.

[0082] In some embodiments, the micro peristaltic pump 3 contains multiple micro phase change actuators 1, which are arranged in an array along the micro channel 21. Voltage is applied to the multiple micro phase change actuators 1 in sequence according to a preset driving sequence to achieve alternating squeezing and release of the fluid, thereby forming a controllable unidirectional or bidirectional peristaltic fluid transmission in the micro channel 21. While measuring the resistance of the electrode 102 in real time, by adjusting the input power of the electrode 102, the deformation amount and output driving force of a single micro phase change actuator 1 can be accurately controlled, thereby achieving flexible regulation of the overall flow rate and flow direction of the micro peristaltic pump 3. For further information, please refer to Figure 1 , three micro phase change actuators 1 are arranged in an array along the micro channel 21 .

[0083] In some embodiments, see Figure 2 At least part of the electrode 102 is located in the cavity. Thus, the Joule heat generated by applying a voltage to the electrode 102 can be effectively transferred to the phase change material 202, prompting the phase change material 202 to undergo a phase change reaction.

[0084] In some embodiments, the compound includes one or more of silicon, glass, and polymer. Selecting the above materials for the substrate 101 and the cavity 201 facilitates the preparation of the electrode 102 on the substrate 101 and the cavity 201, and also helps improve the interfacial adhesion between the substrate 101 and the cavity 201.

[0085] Furthermore, the compound includes at least glass. Glass has low thermal conductivity, effectively reducing the effects of thermal coupling between the array's micro-phase change actuators 1. Glass has high structural rigidity. During the thermal expansion of the phase change material 202, it causes little deformation of the cavity 201 or substrate 101. This helps more effectively convert the volume change caused by the phase change into directional stretching deformation of the elastic barrier membrane 30, reducing mechanical strain accumulation in the microstructure during actuation and enhancing the interfacial stability of the multilayer structure. Furthermore, under conditions of global pressurized and heated bonding or localized heated bonding using ultrasound or microwaves, glass still exhibits minimal microstructural deformation, which helps maintain the precision and integrity of the bonding interface. Based on the material properties of glass, standard micro-nanofabrication processes (such as lift-off) can be used to integrate heating electrodes onto the glass substrate 101. Furthermore, glass exhibits excellent biocompatibility, making the micro-phase change actuator 1 suitable for in vivo implantation. Furthermore, the substrate 101, cavity 201, and flow channel layer body 24 are all made of glass. It is understandable that the material of the substrate 101 , the material of the cavity 201 , and the material of the flow channel layer body 24 may be the same or different.

[0086] Furthermore, the elastic barrier membrane 30 is made of an elastic material and a polar polymer. This elastic barrier membrane 30 significantly enhances its mechanical strength and thermal stability while maintaining flexibility, effectively reducing or preventing the permeation of the phase change material 202. The combination of the elastic barrier membrane 30 and the elastic film 25 enhances their resilience and sealing properties, thereby enhancing the long-term sealing performance and overall operational reliability of the micro peristaltic pump 3.

[0087] In some embodiments, see Figure 1 and Figure 3 The elastic barrier film 30 includes a first base film 301 and a second base film 302 stacked along a first direction Z. The material of the first base film 301 includes an elastic material, and the material of the second base film 302 includes a polar polymer.

[0088] In other embodiments, the elastic barrier film 30 only includes the first base film 301, and the material of the first base film 301 includes an elastic material and a polar polymer. In this design, the elastic barrier film 30 is a single-layer structure.

[0089] Furthermore, the elastic film 25 is made of an elastic material. It is understood that the elastic material in the elastic film 25 and the elastic material in the first base film 301 can be the same or different.

[0090] Further, see Figure 1 , part of the electrode 102 is located in the cavity.

[0091] Further, the polymer includes one or more of polymethyl methacrylate (PMMA), polycarbonate (PC), polystyrene (PS), polydimethylsiloxane (PDMS), polyethylene (PE), polyethylene terephthalate (PET), polyethersulfone (PES), polyimide (PI) and cyclic olefin copolymer (COC).

[0092] Furthermore, the glass includes one or more of soda-lime glass, borosilicate glass, soda-borosilicate glass, phosphate glass, zinc-phosphate glass, chalcogenide glass and lead glass.

[0093] Furthermore, the elastic material includes one or more of a silicone-based elastomer, a polyurethane (PU) elastomer, a thermoplastic elastomer (TPE), and a hydrogel-based material. Furthermore, the silicone-based elastomer includes one or more of polydimethylsiloxane (PDMS) and Ecoflex. Furthermore, the hydrogel-based material includes one or more of polyacrylamide (PAAm), polyvinyl alcohol, gelatin, sodium alginate, sodium carboxymethyl cellulose, chitosan, polyvinyl pyrrolidone, and poly(N-isopropylacrylamide).

[0094] Furthermore, the polar polymer includes one or more of parylene, epoxy resin, polyurethane (PU), light-cured polyurethane and thermoplastic polyurethane elastomer (TPU).

[0095] In some embodiments, the phase change material 202 includes one or more of paraffin wax, fatty acid, polyol, water, and inorganic salt hydrates. Further, the inorganic salt hydrate includes one or more of sodium sulfate decahydrate, calcium chloride hexahydrate, zinc nitrate hexahydrate, magnesium nitrate hexahydrate, and sodium phosphate dodecahydrate.

[0096] Furthermore, to enhance heat transfer of the paraffin-based phase change material, the chamber layer 20 further includes a doping material contained within the cavity. The doping material includes one or more of graphite, carbon nanotubes, carbon nanofibers, metals, and their oxides. Furthermore, optionally, the graphite includes one or more of expanded graphite, graphene, and graphite nanosheets. Furthermore, optionally, the metal oxide includes one or more of titanium oxide and aluminum oxide.

[0097] Furthermore, the material of the electrode 102 includes one or more of metals and their alloys. Furthermore, the metal includes one or more of platinum, iridium, palladium, gold, silver, copper, iron, titanium, chromium, nickel, magnesium, aluminum, zinc, and indium.

[0098] Further, see Figure 1 The flow channel layer 2 further includes a first port 22 and a second port 23 . The first port 22 and the second port 23 are provided on the micro-channel 21 . The first port 22 and the second port 23 are used for the inflow and outflow of fluid.

[0099] Furthermore, the thickness of the base layer 10 is 300 μm to 1000 μm. As non-limiting examples, the thickness of the base layer 10 includes, but is not limited to, 300 μm, 350 μm, 400 μm, 450 μm, 500 μm, 550 μm, 600 μm, 650 μm, 700 μm, 800 μm, 900 μm, 1000 μm, or a range between any two of the foregoing.

[0100] Furthermore, the thickness of the chamber layer 20 is 300 μm to 1000 μm. As non-limiting examples, the thickness of the chamber layer 20 includes, but is not limited to, 300 μm, 350 μm, 400 μm, 450 μm, 500 μm, 550 μm, 600 μm, 650 μm, 700 μm, 800 μm, 900 μm, 1000 μm, or a range between any two of the foregoing.

[0101] Furthermore, the wall thickness of the cavity is 500 μm to 1000 μm. As non-limiting examples, the wall thickness of the cavity includes but is not limited to: 500 μm, 550 μm, 600 μm, 650 μm, 700 μm, 750 μm, 800 μm, 850 μm, 900 μm, 950 μm, 1000 μm, or a range between any two of the foregoing.

[0102] Furthermore, the spacing of the cavities is 500 μm to 2000 μm. As non-limiting examples, the spacing of the cavities includes but is not limited to: 500 μm, 700 μm, 900 μm, 1100 μm, 1300 μm, 1500 μm, 1700 μm, 1900 μm, 2000 μm, or a range between any two of the foregoing.

[0103] Furthermore, the cross-section of the cavity perpendicular to the first direction Z is any one of a circle, a rectangle, a rounded rectangle, an ellipse, and an irregular shape, the maximum width of the cross-section parallel to the fluid flow direction is 700 μm to 1000 μm, and the maximum width of the cross-section perpendicular to the fluid flow direction is 700 μm to 1000 μm. As non-limiting examples, the maximum width of the cross-section parallel to the fluid flow direction and the maximum width of the cross-section perpendicular to the fluid flow direction each independently include, but are not limited to, 700 μm, 750 μm, 800 μm, 850 μm, 900 μm, 950 μm, 1000 μm, or a range between any two of the foregoing.

[0104] It should be noted that irregular shapes refer to figures without uniform geometric rules or symmetry, such as arbitrary polygons, arbitrarily curved closed curves, etc.

[0105] Furthermore, the elastic barrier film 30 has a thickness of 50 μm to 400 μm. As non-limiting examples, the thickness of the elastic barrier film 30 includes, but is not limited to, 50 μm, 60 μm, 70 μm, 80 μm, 90 μm, 100 μm, 110 μm, 120 μm, 130 μm, 140 μm, 150 μm, 200 μm, 300 μm, 400 μm, or any range therebetween.

[0106] Furthermore, the thickness of the flow channel layer 2 is 300 μm to 1000 μm. As non-limiting examples, the thickness of the flow channel layer 2 includes but is not limited to: 500 μm, 550 μm, 600 μm, 650 μm, 700 μm, 800 μm, 900 μm, 1000 μm, or a range between any two of the foregoing.

[0107] Furthermore, the width of the microchannel 21 parallel to the fluid flow direction is 300 μm to 1000 μm. As non-limiting examples, the width includes but is not limited to: 500 μm, 550 μm, 600 μm, 650 μm, 700 μm, 800 μm, 900 μm, 1000 μm, or a range between any two of the foregoing.

[0108] Furthermore, the depth of the microchannel 21 perpendicular to the fluid flow direction is 50 μm to 100 μm. As non-limiting examples, the depth includes but is not limited to: 50 μm, 55 μm, 60 μm, 65 μm, 70 μm, 75 μm, 80 μm, 85 μm, 90 μm, 95 μm, 100 μm, or a range between any two of the foregoing.

[0109] In some embodiments, the micro peristaltic pump 3 further includes a temperature detection device electrically connected to the electrode 102. With this design, the electrode 102 can both heat and monitor temperature, forming a real-time closed-loop temperature control system. This design significantly improves temperature control accuracy and drive response speed, avoids problems such as overheating and response lag associated with traditional open-loop heating methods, and improves the control stability and energy efficiency of the micro peristaltic pump 3.

[0110] Figure 7 A top-down microscope photograph of the electrodes, phase-change actuator, and micro peristaltic pump of one embodiment. Figure 8 The side view microscope photos of the elastic barrier film and the elastic film expanding and deforming under different driving powers of the micro phase change actuator of an embodiment are shown. Figure 7 and Figure 8 It can be seen that the sizes of the electrodes, phase change actuators and micro peristaltic pumps are at the micron or millimeter level. By adjusting the input power of the electrodes, the deformation of the elastic barrier membrane in the micro phase change actuator and the output driving force can be precisely controlled, thereby achieving flexible control of the overall flow rate and flow direction of the micro peristaltic pump.

[0111] See also Figures 1 to 2 as well as Figures 4 to 6 Another embodiment of the present application provides a method for manufacturing a micro peristaltic pump 3, comprising the following steps:

[0112] A thermosensitive electrode 102 is prepared on the surface of a substrate 101 to form a base layer 10;

[0113] Processing to form a cavity 201 having a cavity;

[0114] Laminating and bonding the cavity 201 and the base layer 10;

[0115] Filling the cavity with a phase change material 202 to form a cavity layer 20;

[0116] An elastic barrier film 30 is provided on the side of the chamber layer 20 away from the base layer 10 to obtain a micro phase change actuator 1;

[0117] Processing to form a flow channel layer body 24 having a micro-flow channel 21;

[0118] An elastic film 25 for closing the microchannel 21 is provided on one side of the channel layer body 24 to form the channel layer 2;

[0119] At least one micro phase change actuator 1 is bonded to one side of the elastic film 25 of the flow channel layer 2 to obtain a micro peristaltic pump 3;

[0120] Among them, the electrode 102 is used to heat the phase change material 202. When the phase change material 202 expands due to heat, it squeezes the elastic barrier membrane 30 to deform, thereby squeezing the elastic film 25 to deform to promote the flow of fluid in the microchannel 21; the material of the substrate 101, the material of the cavity 201, and the material of the flow channel layer body 24 each independently include a compound with a softening point below 700°C, and the Young's modulus of the compound is 1GPa~200GPa.

[0121] The micro peristaltic pump 3 produced by the above-described processing method of the present application has the same advantages as the micro peristaltic pump 3 in the first embodiment of the present application. In addition, the overall manufacturing process of the micro peristaltic pump 3 is highly compatible with existing MEMS manufacturing processes, facilitating system-level integration and mass production, significantly improving the scalability and application flexibility of the micro peristaltic pump 3.

[0122] In some embodiments, see Figure 1 and Figure 5 The step of disposing the elastic barrier film 30 on the side of the chamber layer 20 away from the base layer 10 includes:

[0123] A first base film 301 of the elastic barrier film 30 is disposed on a side of the chamber layer 20 away from the base layer 10 . The material of the first base film 301 includes an elastic material.

[0124] The second base film 302 of the elastic barrier film 30 is disposed on a side of the first base film 301 away from the base layer 10 . The material of the second base film 302 includes a polar polymer.

[0125] The elastic barrier membrane 30 and the elastic film 25 are used together to achieve the dual functions of packaging sealing and deformation response. The above-mentioned elastic barrier membrane 30 significantly improves the mechanical strength and thermal stability of the elastic barrier membrane 30 while taking into account flexibility, effectively reducing or blocking the penetration of the phase change material 202, and at the same time improving the recovery ability and sealing performance of the elastic barrier membrane 30 and the elastic film 25, thereby enhancing the long-term sealing performance and overall operation reliability of the micro peristaltic pump 3.

[0126] In some embodiments, the steps of disposing the first base film 301 of the elastic barrier film 30 on the side of the chamber layer 20 away from the base layer 10 independently include: bonding the chamber layer 20 to the first base film 301 using at least one bonding method selected from plasma modified bonding, hot press bonding, adhesive bonding, and solvent assisted bonding; or,

[0127] The first base film 301 is formed on the surface of the chamber layer 20 by using at least one of sputtering, chemical vapor deposition, spray coating, dip coating, spin coating, doctor blade coating, and ultraviolet curing (UV curing).

[0128] In some embodiments, the step of disposing the second base film 302 of the elastic barrier film 30 on the side of the first base film 301 away from the base layer 10 includes: bonding the first base film 301 and the second base film 302 using at least one bonding method selected from plasma modified bonding, hot press bonding, adhesive bonding, and solvent assisted bonding; or

[0129] The second base film 302 is formed on the surface of the first base film 301 by using at least one of sputtering, chemical vapor deposition, spray coating, dip coating, spin coating, doctor blade coating, and UV curing.

[0130] Furthermore, the above-mentioned dipping includes uniform dipping.

[0131] Furthermore, the spin coating includes uniform spin coating.

[0132] Furthermore, the above-mentioned spraying includes at least one of uniform spraying and point-by-point spraying.

[0133] In other embodiments, the step of disposing the elastic barrier film 30 on the side of the chamber layer 20 away from the base layer 10 includes disposing a first base film 301 of the elastic barrier film 30 on the side of the chamber layer 20 away from the base layer 10, wherein the material of the first base film 301 includes an elastic material and a polar polymer. With this design, the elastic barrier film 30 can be a single-layer structure, comprising only the first base film 301.

[0134] In some embodiments, see Figure 1 and Figure 6 The step of providing an elastic film 25 for closing the microchannel 21 on one side of the channel layer body 24 includes: bonding the channel layer body 24 to the elastic film 25 using at least one bonding method selected from plasma modification bonding, hot pressing bonding, adhesive bonding, and solvent-assisted bonding.

[0135] In some embodiments, the elastic material includes one or more of a silicone-based elastomer, a polyurethane (PU) elastomer, a thermoplastic elastomer (TPE), and a hydrogel-based material.

[0136] In some embodiments, the polar polymer includes one or more of parylene, epoxy resin, polyurethane (PU), light-curable polyurethane, and thermoplastic polyurethane elastomer (TPU).

[0137] In some embodiments, see Figure 1 and Figure 4 The step of preparing the thermosensitive electrode 102 on the surface of the substrate 101 includes: forming an electrode pattern on the surface of the substrate 101 using at least one of photolithography and printing processes;

[0138] The electrode 102 material is deposited on the electrode pattern using at least one method selected from magnetron sputtering, ion sputtering, electron beam evaporation, laser evaporation, chemical vapor deposition (CVD), and atomic layer deposition (ALD) to form the electrode 102 .

[0139] In some embodiments, see Figure 4 The step of preparing the thermosensitive electrode 102 on the surface of the substrate 101 includes: forming an electrode pattern on the surface of the substrate 101 using a photoresist 4;

[0140] The electrode material 5 is deposited on the electrode pattern using at least one method selected from magnetron sputtering, ion sputtering, electron beam evaporation, laser evaporation, chemical vapor deposition (CVD), and atomic layer deposition (ALD) to form the electrode 102 .

[0141] In some embodiments, see Figure 1 and Figure 5 The step of laminating and bonding the cavity 201 to the base layer 10 includes bonding the cavity 201 to the base layer 10 using at least one of pressure bonding, high-temperature hot-press bonding, ultrasonic bonding, and microwave-assisted bonding. This ensures reliable sealing under high-pressure conditions, prevents leakage of the phase-change material 202, and minimizes microstructure deformation, thereby improving the structural stability and repeatability of the micro peristaltic pump 3.

[0142] In some embodiments, see Figure 1 and Figure 6 The step of disposing the elastic barrier film 30 on the side of the chamber layer 20 away from the base layer 10 includes disposing the elastic barrier film 30 on the side of the chamber layer 20 using at least one bonding method selected from plasma modification bonding, thermal compression bonding, adhesive bonding, and solvent-assisted bonding. This effectively improves interfacial adhesion and packaging sealing performance, meeting long-term stability requirements.

[0143] In some embodiments, see Figure 1 and Figure 6 The step of processing and forming the flow channel layer body 24 having the micro-channel 21 includes: using at least one processing method of deep reactive ion etching (DRIE), laser etching, sandblasting etching, hot pressing and injection molding to form the flow channel layer body 24 having the micro-channel 21.

[0144] In some embodiments, see Figure 6 After the step of forming the channel layer body 24 having the microchannel 21 and before the step of providing the elastic film 25 for closing the microchannel 21 on one side of the channel layer body 24, the method includes the step of providing a resin material 26 on the channel layer body 24. The resin material 26 is provided at the first port 22 and the second port 23.

[0145] By regulating the processing technology of the above-mentioned processing method, the above-mentioned micro peristaltic pump 3 of the present application can be obtained.

[0146] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0147] The above-described embodiments merely represent several implementation methods of the present application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that a person of ordinary skill in the art may make various modifications and improvements without departing from the spirit of the present application, all of which fall within the scope of protection of the present application. Therefore, the scope of protection of the present patent application shall be determined by the appended claims, and the specification may be used to interpret the content of the claims.

Claims

1. A micro peristaltic pump, characterized in that: comprising a flow channel layer and at least one micro phase change actuator; The channel layer includes a channel layer body, a microchannel arranged in the channel layer body, and an elastic film for sealing the microchannel; The micro phase change actuator includes a base layer, a chamber layer and an elastic barrier film stacked in sequence along a first direction; the base layer includes a substrate and an electrode arranged on the substrate, the material of the electrode is thermosensitive, the chamber layer includes a cavity and a phase change material accommodated in a cavity formed by the cavity, the electrode is used to heat the phase change material, and when the phase change material expands due to heat, it squeezes the elastic barrier film to deform, thereby squeezing the elastic film to deform to promote the flow of fluid in the microchannel; the material of the substrate, the material of the cavity and the material of the channel layer body each independently include a compound with a softening point below 700°C, and the Young's modulus of the compound is 1GPa~200GPa.

2. The micro peristaltic pump according to claim 1, characterized in that The micro peristaltic pump has at least one of the following features: (1) The compound comprises one or more of silicon, glass and polymer; (2) The elastic barrier film is made of an elastic material and a polar polymer; (3) at least a portion of the electrode is located within the cavity; (4) The elastic film is made of an elastic material.

3. The micro peristaltic pump according to claim 2, characterized in that The micro peristaltic pump has at least one of the following features: (1) The compound includes at least the glass; (2) The elastic barrier film includes a first base film and a second base film stacked along the first direction, the first base film is made of the elastic material, and the second base film is made of the polar polymer; or The elastic barrier film only includes a first base film, and the material of the first base film includes the elastic material and the polar polymer.

4. The micro peristaltic pump according to claim 2 or 3, characterized in that: The micro peristaltic pump has at least one of the following features: (1) The polymer comprises one or more of polymethyl methacrylate, polycarbonate, polystyrene, polydimethylsiloxane, polyethylene, polyethylene terephthalate, polyethersulfone, polyimide and cycloolefin copolymer; (2) The glass comprises one or more of soda-lime glass, borosilicate glass, soda-borosilicate glass, phosphate glass, zinc-phosphate glass, chalcogenide glass, and lead glass; (3) The elastic material includes one or more of a silicone-based elastomer, a polyurethane elastomer, a thermoplastic elastomer, and a hydrogel-based material; (4) the polar polymer comprises one or more of parylene, epoxy resin, polyurethane, photocurable polyurethane and thermoplastic polyurethane elastomer; (5) The phase change material includes one or more of paraffin, fatty acid, polyol, water and inorganic salt hydrate; (6) The material of the electrode includes one or more metals and their alloys.

5. The micro peristaltic pump according to claim 4, characterized in that: The micro peristaltic pump has at least one of the following features: (1) The silicone-based elastomer includes one or more of polydimethylsiloxane and Ecoflex; (2) The hydrogel material includes one or more of polyacrylamide, polyvinyl alcohol, gelatin, sodium alginate, sodium carboxymethyl cellulose, chitosan, polyvinyl pyrrolidone and poly (N-isopropyl acrylamide); (3) the chamber layer further includes a doping material contained in the cavity, wherein the doping material includes one or more of graphite, carbon nanotubes, carbon nanofibers, metals and oxides thereof; (4) The metal includes one or more of platinum, iridium, palladium, gold, silver, copper, iron, titanium, chromium, nickel, magnesium, aluminum, zinc and indium.

6. The micro peristaltic pump according to any one of claims 1 to 3, characterized in that: The micro peristaltic pump has at least one of the following features: (1) The thickness of the base layer is 300 μm to 1000 μm; (2) The thickness of the chamber layer is 300 μm to 1000 μm; (3) The wall thickness of the cavity is 500 μm to 1000 μm; (4) The spacing between the cavities is 500 μm to 2000 μm; (5) The cross-section of the cavity perpendicular to the first direction is any one of a circle, a rectangle, a rounded rectangle, an ellipse, and an irregular shape; the maximum width of the cross-section parallel to the direction of fluid flow is 700 μm to 1000 μm; and the maximum width of the cross-section perpendicular to the direction of fluid flow is 700 μm to 1000 μm; (6) The thickness of the elastic barrier film is 50 μm to 400 μm; (7) The thickness of the flow channel layer is 300 μm to 1000 μm; (8) The width of the microchannel parallel to the fluid flow direction is 300 μm to 1000 μm; (9) The depth of the microchannel perpendicular to the direction of fluid flow is 50 μm to 100 μm; (10) The micro peristaltic pump comprises a plurality of micro phase change actuators, and the plurality of micro phase change actuators are arranged in an array along the microfluidic channel; (11) The first direction is the direction from the micro phase change actuator to the flow channel layer.

7. A method for processing a micro peristaltic pump, characterized in that: The steps include: A thermosensitive electrode is prepared on the surface of the substrate to form a base layer; Processing to form a cavity having a cavity; laminating and bonding the cavity and the base layer; filling the cavity with a phase change material to form a cavity layer; An elastic barrier film is provided on a side of the chamber layer away from the base layer to obtain a micro phase change actuator; Processing to form a flow channel layer body having micro-flow channels; An elastic film for closing the microchannel is provided on one side of the channel layer body to form a channel layer; Bonding at least one of the micro phase change actuators on one side of the elastic film of the flow channel layer to obtain the micro peristaltic pump; In which, the electrode is used to heat the phase change material. When the phase change material expands due to heat, it squeezes the elastic barrier membrane to deform, thereby squeezing the elastic film to deform to promote the flow of fluid in the microchannel; the material of the substrate, the material of the cavity, and the material of the flow channel layer body each independently include a compound with a softening point below 700°C, and the Young's modulus of the compound is 1GPa~200GPa.

8. The processing method according to claim 7, characterized in that: The step of providing an elastic barrier film on a side of the chamber layer away from the base layer comprises: A first base film in the elastic barrier film is arranged on a side of the chamber layer away from the base layer, wherein the material of the first base film includes an elastic material; A second base film in the elastic barrier film is arranged on a side of the first base film away from the base layer, and a material of the second base film includes a polar polymer.

9. The processing method according to claim 7, characterized in that: The processing method satisfies at least one of the following conditions: (1) The steps of disposing the first base film of the elastic barrier film on the side of the chamber layer away from the base layer independently include: bonding the chamber layer to the first base film using at least one bonding method selected from the group consisting of plasma modified bonding, thermal compression bonding, adhesive bonding, and solvent assisted bonding; or, forming the first base film on the surface of the chamber layer by using at least one method selected from sputtering, chemical vapor deposition, spray coating, dip coating, spin coating, doctor blade coating, and UV curing; (2) the step of disposing the second base film of the elastic barrier film on the side of the first base film away from the base layer comprises: bonding the first base film and the second base film using at least one bonding method selected from plasma modification bonding, hot press bonding, adhesive bonding, and solvent-assisted bonding; or forming the second base film on the surface of the first base film by using at least one method selected from sputtering, chemical vapor deposition, spray coating, dip coating, spin coating, doctor blade coating, and UV curing; (3) The step of providing an elastic film for closing the microchannel on one side of the channel layer body includes: bonding the channel layer body to the elastic film using at least one bonding method selected from the group consisting of plasma modification bonding, hot pressing bonding, adhesive bonding, and solvent-assisted bonding.

10. The processing method according to any one of claims 7 to 9, characterized in that: The processing method satisfies at least one of the following conditions: (1) The step of preparing a thermosensitive electrode on the surface of the substrate comprises: forming an electrode pattern on the surface of the substrate using at least one of photolithography and printing; Depositing electrode material on the electrode pattern using at least one method selected from magnetron sputtering, ion sputtering, electron beam evaporation, laser evaporation, chemical vapor deposition, and atomic layer deposition to form the electrode; (2) the step of laminating and bonding the cavity and the base layer comprises: bonding the cavity and the base layer by at least one bonding method selected from the group consisting of pressure bonding, high-temperature hot-press bonding, ultrasonic bonding, and microwave-assisted bonding; (3) The step of processing and forming the flow channel layer body having the micro-channel includes: using at least one processing method selected from deep reactive ion etching, laser etching, sandblasting etching, hot pressing and injection molding to form the flow channel layer body having the micro-channel.

Images