Dry pump operation state audio monitoring system

By using a combination of non-contact microphones and contact sensors to pick up sound on the dry pump, combined with a characteristic sound spectrum database and a central processor, automatic identification and classification alarms of dry pump faults are achieved, solving the problem of operation and maintenance personnel having difficulty in intuitively judging the equipment status and improving fault diagnosis efficiency.

CN120650197APending Publication Date: 2025-09-16GUANGDONG HONHOR SEMICON EQUIP CO LTD
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Patent Information

Application Number
CN202410285314.4
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-03-13
Publication Date
2025-09-16

AI Technical Summary

Technical Problem

In the existing technology, dry pumps do not support the installation of contact vibration sensors, which makes it difficult for operation and maintenance personnel to intuitively judge the operating status of the equipment and prolongs the fault diagnosis time.

Method used

A hybrid method of non-contact microphones and contact sensors is used to pick up dry pump vibration sound signals. Combined with the characteristic sound spectrum database and central processing unit, automatic recognition and classification alarm of fault audio are achieved, and it has anti-interference capabilities.

Benefits of technology

It improves the accuracy of fault judgment, shortens fault diagnosis time, improves the work efficiency of operation and maintenance personnel, and has real-time monitoring and prediction functions.

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Abstract

The invention discloses a dry pump operation state audio monitoring system, and relates to the technical field of dry pump operation state monitoring. The invention aims to solve the problem of monitoring the running state of a dry pump which is inconvenient to additionally install a contact sensor. The device specifically comprises a characteristic sound spectrum database used for storing audio characteristics in the operation state of the dry pump, a sound collection unit used for collecting vibration sound signals in the operation state of the dry pump, an alarm module used for sending out an equipment fault alarm and a central processing unit, and the sound collection unit is in communication connection with the characteristic sound spectrum database. The sound acquisition unit, the alarm module and the characteristic sound spectrum database are respectively in communication connection with the central processing unit; a pickup element of the sound acquisition unit is one of a contact sensor and a microphone or a mixture of the contact sensor and the microphone. According to the invention, the appropriate sound acquisition unit is adopted for anti-interference monitoring, so that the operation and maintenance personnel can judge the operation state of the equipment more visually, the working efficiency of the operation and maintenance personnel is improved, and the fault diagnosis time is shortened.
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Description

Technical Field

[0001] The present invention relates to the technical field of dry pump operation status monitoring, and in particular to an audio monitoring system for the operation status of a dry pump. Background Art

[0002] The propagation of acoustic signals is not affected by electric and magnetic fields, making acoustic monitoring data easy to obtain. Furthermore, the acoustic monitoring process does not affect the normal operation of the equipment. Therefore, characteristic acoustic spectrum fault diagnosis technology is particularly suitable for fault diagnosis of certain closed, long-running mechanical equipment that cannot be shut down, such as dry pumps on semiconductor production lines. It is particularly suitable for fault detection within the audible sound range of 20Hz-20kHz, and the characteristic acoustic spectrum of dry pump faults falls within this range.

[0003] In the prior art, mechanical equipment has its own vibration sound spectrum characteristics when it is in operation. The equipment also has different sound spectrum characteristics in different operation stages (such as installation and debugging, running-in period, operation period, maintenance period, etc.), and these sound spectrum characteristics will not change in a short time and are repeatable. Therefore, an industrial "stethoscope" can be used to regularly record the sound spectrum characteristics of the equipment, and the equipment can be diagnosed for faults through analysis and comparison. At present, the "stethoscope" used on mechanical equipment usually adopts contact vibration sensors, swing sensors and temperature sensors installed on the equipment to provide information sources for equipment fault analysis, but some dry pumps do not support the installation of contact vibration sensors, etc., so it cannot enable operation and maintenance personnel to more intuitively judge the equipment operation status, improve the work efficiency of operation and maintenance personnel, and shorten the fault diagnosis time. Based on this, the present invention proposes a dry pump operation status audio monitoring system, which uses a non-contact microphone to "stethoscope" and pick up the sound of equipment faults, and can be applied to the monitoring of the operation status of dry pumps that are not convenient to install contact sensors. Summary of the Invention

[0004] The purpose of the present invention is to solve the shortcomings of the prior art and to propose an audio monitoring system for the operation status of a dry pump.

[0005] In order to achieve the above object, the present invention adopts the following technical solutions:

[0006] A dry pump operating status audio monitoring system includes a characteristic sound spectrum database for storing audio features when the dry pump is operating, a sound collection unit for collecting vibration sound signals when the dry pump is operating, an alarm module for issuing an equipment failure alarm, and a central processing unit. The sound collection unit is communicatively connected to the characteristic sound spectrum database, and the sound collection unit, the alarm module, and the characteristic sound spectrum database are respectively communicatively connected to the central processing unit.

[0007] The sound pickup element of the sound collection unit is a contact sensor and a microphone, or a combination of the two;

[0008] The audio features include audio when the dry pump is in normal operation and audio when a fault occurs during the operation of the dry pump.

[0009] Preferably, the characteristic sound spectrum database includes a normal audio storage library, a fault audio storage library, and an entry and editing module for adding normal audio and / or fault audio in the running state of the dry pump.

[0010] Preferably: the fault audio storage library includes level one dangerous value fault, level two dangerous value fault and level three dangerous value fault categories;

[0011] The first-level dangerous value fault is that the current fault audio is within the controllable range of the X1-X5 safety threshold, and it is estimated that it will not affect the normal operation of the dry pump within n hours;

[0012] The second-level dangerous value fault is that the current fault audio is within the uncontrollable range of the X6-X8 monitoring threshold, and it is estimated that it will affect the normal operation of the dry pump within n hours;

[0013] The third-level dangerous value fault is that the current fault audio is in the dangerous range of ≥X9 high-risk threshold.

[0014] Preferably: the alarm mode of the first-level dangerous value fault is background reminder;

[0015] The alarm mode for level 2 dangerous value fault is background reminder;

[0016] The alarm method for level 3 dangerous value faults is a dual reminder on site + in the background.

[0017] Preferably, the dry pump to which the current fault audio belongs, which belongs to the third-level dangerous value fault, will be directly controlled by the central processing unit to stop running.

[0018] Preferably: the sound collection unit includes an analysis and recognition module, an extraction module and an anti-interference module;

[0019] The analysis and identification module is used to perform spectrum conversion on the collected vibration and sound signals, and analyze and process them together with the information in the characteristic sound spectrum database; the extraction module is used to exclude and filter the audio under normal operating conditions of the dry pump; and the anti-interference module is used to shield the surrounding personnel and environmental noise.

[0020] Preferably, the anti-interference module is a shielding cover arranged on the periphery of the sound pickup element.

[0021] Preferably, the extraction module includes a filtering block for filtering out the fault audio in the dry pump operation state that is not in the current fault audio storage library.

[0022] Preferably, the alarm module includes an audible and visual alarm for use at the dry pump operation site, and a wireless transmission alarm block for remotely transmitting information to a backstage to alert operators.

[0023] The beneficial effects of the present invention are:

[0024] 1. The present invention sets a sound collection unit. For dry pumps that are not convenient to install contact sensors, a non-contact microphone is used to pick up the vibration and sound signals of the equipment. Conversely, a contact sensor is used to pick up the vibration and sound signals of the equipment, or a contact sensor and a microphone are used in combination to pick up the sound of the dry pump's operating status. The fusion processing can further improve the accuracy of dry pump fault judgment. According to the actual conditions of the dry pump, an appropriate sound collection unit can be used for anti-interference monitoring, so that operation and maintenance personnel can more intuitively judge the equipment's operating status, improve the work efficiency of operation and maintenance personnel, and shorten the fault diagnosis time.

[0025] 2. The present invention can automatically transmit the newly discovered fault audio during the operation of the dry pump to the input and editing module through the filtering block, so as to realize the automatic absorption of the fault audio during the abnormal operation of the dry pump, thereby supplementing the sound spectrum content of the fault audio repository; classify the fault audio during the operation of the dry pump, so as to distinguish the danger value corresponding to the fault audio, and classify and alarm the faults of different levels of danger value, so that the background operation personnel can judge how to accurately and reliably and effectively handle the dry pump fault.

[0026] 3. The analysis and identification module of the present invention is used to identify whether the collected vibration sound signal belongs to a normal audio repository or a fault audio repository. The extraction module directly excludes the audio of the dry pump in normal operation in the normal audio repository, retains only the remaining audio (including the fault audio), and transmits the signal to the central processing unit so that it can control the alarm module to issue an on-site or remote alarm, and promptly prompt the staff to arrive at the scene to take corresponding measures.

[0027] 4. The present invention can directly use a microphone to pick up sound, or it can work in conjunction with a vibration sensor to pick up sound. It can make a pre-judgment of the state of the dry pump based on long-term and real-time operation monitoring signals, and then can intuitively judge whether the operating state of the dry pump is normal or abnormal. After converting the picked-up audio signal into a sound pattern spectrum, it is compared with the data information in the characteristic sound spectrum database to judge whether there is a fault and the type of audio fault, and take corresponding reminder measures. It has the characteristics of being fast and practical.

[0028] 5. For situations where known fault models are exceeded and sample data is insufficient, the present invention can add new ones through the entry and editing module, or automatically transmit the newly discovered fault audio under the dry pump operation state to the entry and editing module through the filtering block, thereby realizing the automatic absorption of the fault audio during abnormal dry pump operation, thereby supplementing the sound spectrum content of the fault audio repository. It is relatively convenient to use and has multiple detection, processing, transmission, display, storage, long-term data comparison and sound and light alarm functions under the concept of industrial Internet of Things. It can be fixedly installed to achieve 7X24 hours of continuous monitoring, and can also be used for portable inspections. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 This is a flow chart of an audio monitoring system for the operation status of a dry pump proposed by the present invention. DETAILED DESCRIPTION

[0030] The technical solution of this patent is further described in detail below in conjunction with specific implementation methods.

[0031] The following describes in detail embodiments of the present invention, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0032] Example 1:

[0033] An audio monitoring system for the operation status of a dry pump, such as Figure 1 As shown, it includes a characteristic sound spectrum database for storing audio features when the dry pump is in operation, a sound collection unit for collecting vibration sound signals when the dry pump is in operation, an alarm module and a central processing unit for issuing an equipment failure alarm, wherein the sound collection unit and the characteristic sound spectrum database are communicatively connected, and the sound collection unit, the alarm module and the characteristic sound spectrum database are respectively communicatively connected to the central processing unit.

[0034] Preferably, the audio features include various audios during normal operation of the dry pump and various audios when a fault occurs during operation of the dry pump.

[0035] Preferably, the sound pickup element of the sound collection unit is one or a combination of a contact sensor and a non-contact microphone. For dry pumps that are not convenient to install contact sensors, a non-contact microphone is used to pick up the vibration and sound signals of the equipment. Conversely, a contact sensor is used to pick up the vibration and sound signals of the equipment. According to the actual conditions of the dry pump, an appropriate sound collection unit can be used for monitoring, and it can adapt to dry pumps of various structures, which is more convenient.

[0036] As a supplement, sound pickup elements such as microphones can be used near one or more dry pumps to pick up the operating vibration sounds of a single dry pump or multiple dry pumps. The sound spectrum of each dry pump is solved through comprehensive processing of the microphone array signal, and then compared with the fault audio repository; the contact sensor and microphone are used in combination to pick up the sound of the dry pump's operating status, and the fusion processing can further improve the accuracy of dry pump fault judgment.

[0037] Furthermore, the characteristic sound spectrum database includes a normal audio storage library, a fault audio storage library, and an entry and editing module for adding normal audio and / or fault audio in the operation state of the dry pump.

[0038] Preferably, the fault audio storage library includes different fault categories such as level one dangerous value fault, level two dangerous value fault and level three dangerous value fault; the fault audio in the dry pump operation state is classified to distinguish the dangerous value corresponding to the fault audio, and the different levels of dangerous value faults are classified and alarmed, so that the background operation personnel can judge how to accurately and reliably and effectively handle the dry pump fault.

[0039] Among them, the first-level dangerous value fault indicates that the current fault audio is within the controllable range of the X1-X5 safety threshold, and it is estimated that it will not affect the normal operation of the dry pump within n hours; preferably, the alarm method of the first-level dangerous value fault is a background reminder.

[0040] A level 2 critical value fault indicates that the current fault audio is within the uncontrollable range of the X6-X8 monitoring thresholds, and is estimated to affect the normal operation of the dry pump within n hours; preferably, the alarm method for the level 2 critical value fault is a background reminder.

[0041] Level 3 danger value fault means that the current fault audio is in the danger range of ≥X9 high-risk threshold. Preferably, the alarm mode of level 3 danger value fault is dual reminder on site + background.

[0042] Preferably, the threshold level contents of X1-9 are set by the backend operator as needed.

[0043] In addition, the dry pump to which the current fault audio belongs, which belongs to the third-level dangerous value fault, will be directly controlled by the central processing unit to stop running; when the analysis and identification module recognizes that the current fault audio belongs to one of the audios in the third-level dangerous value fault, it will transmit a signal to the central processing unit, which will control the dry pump to stop running to avoid causing greater losses on site.

[0044] Furthermore, the sound collection unit includes an analysis and recognition module for performing spectrum conversion on the collected vibration and sound signals and analyzing and processing them with the information in the characteristic sound spectrum database, and an extraction module for excluding and filtering the audio under normal operation of the dry pump; the analysis and recognition module is used to identify whether the collected vibration and sound signals belong to a normal audio repository or a faulty audio repository, and the extraction module directly excludes the audio under normal operation of the dry pump belonging to the normal audio repository, retaining only the remaining audio (including the faulty audio), and transmitting the signal to the central processing unit so that it can control the alarm module to issue an on-site or remote alarm, prompting the staff to arrive at the scene in time to take corresponding measures, etc.

[0045] Preferably, the extraction module includes a filtering block for filtering out fault audio in the dry pump operation state that is not in the current fault audio repository, and the filtering block is communicatively connected to the entry and editing module; the newly discovered fault audio in the dry pump operation state can be automatically transmitted to the entry and editing module through the filtering block, thereby realizing the automatic absorption of the fault audio during abnormal dry pump operation, thereby supplementing the sound spectrum content of the fault audio repository.

[0046] Furthermore, the alarm module includes an audible and visual alarm used at the dry pump operation site, and a wireless transmission alarm block for remotely transmitting to the background to remind the operators. The wireless transmission alarm block consists of a transmitter, a receiver and a controller, etc., which will not be repeated here.

[0047] When this embodiment is used, for dry pumps that are not convenient to install contact sensors, a non-contact microphone is used to pick up the vibration and sound signals of the equipment. Conversely, a contact sensor is used to pick up the vibration and sound signals of the equipment, or a contact sensor and a microphone are used in combination to pick up the sound of the dry pump's operating status. The fusion processing can further improve the accuracy of the dry pump fault judgment, and can be monitored using an appropriate sound collection unit according to the actual conditions of the dry pump. During the collection period, the analysis and recognition module is used to identify whether the collected vibration and sound signals belong to the normal audio repository or the fault audio repository. The extraction module directly excludes the audio of the dry pump in normal operation in the normal audio repository, retaining only the remaining audio (including the fault audio), and transmitting the signal to the central processing unit so that it can control the alarm module to issue an on-site or remote alarm, prompting the staff to arrive at the scene to take corresponding measures in time.

[0048] The present invention can directly use a microphone to pick up sound, or it can work in conjunction with a vibration sensor to pick up sound. Based on long-term and real-time operation monitoring signals, the present invention can predict the status of the dry pump and intuitively determine whether the dry pump is operating normally or abnormally. The present invention converts the picked-up audio signal into a sound pattern spectrum and compares it with the data information in the characteristic sound spectrum database to determine whether there is a fault and the type of audio fault, and take corresponding warning measures. This is fast and practical.

[0049] In the event of failures exceeding known fault models or insufficient sample data, the present invention can add new faults through the input and editing module, or automatically transmit newly discovered fault audio under dry pump operation to the input and editing module through the filtering block, thereby automatically absorbing the fault audio during abnormal dry pump operation, thereby supplementing the sound spectrum content of the fault audio repository, making it more convenient to use. The present invention has multiple detection, processing, transmission, display, storage, long-term data comparison, and audio and video alarm functions under the concept of the Industrial Internet of Things. It can be fixedly installed to achieve 7X24 hours of continuous monitoring, and can also be used for portable inspections.

[0050] Example 2:

[0051] An audio monitoring system for the operation status of a dry pump, such as Figure 1 As shown, in order to avoid interference of ambient noise on the information picked up by the sound pickup element, this embodiment makes the following supplements on the basis of Example 1: the sound collection unit also includes an anti-interference module for shielding the surrounding personnel and environmental noise. The anti-interference module can be a shielding cover arranged on the periphery of the sound pickup element. The setting of the shielding cover can protect the sound pickup element from interference from surrounding personnel and environmental sounds, buffer high-frequency oscillations, amplify the sound source, and thus ensure the effective extraction of sound in the dry pump operation state.

[0052] When in use, this embodiment uses a non-contact microphone to pick up the vibration and sound signals of the device for dry pumps that are inconvenient to install contact sensors. Conversely, a contact sensor is used to pick up the vibration and sound signals of the device. Based on the actual conditions of the dry pump, an appropriate sound collection unit can be used for monitoring. The provision of a shielding cover can protect the sound pickup element from interference from surrounding personnel and environmental sounds. During the collection period, the analysis and identification module is used to identify whether the collected vibration and sound signals belong to the normal audio storage library or the fault audio storage library. The extraction module directly excludes the audio of the dry pump in normal operation from the normal audio storage library, retaining only the remaining audio (including the fault audio) and transmitting the signal to the central processing unit so that it can control the alarm module to issue an on-site or remote alarm, prompting staff to arrive at the scene and take appropriate measures in a timely manner.

[0053] The above description is only a preferred specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any technician familiar with the technical field, within the technical scope disclosed by the present invention, who makes equivalent replacements or changes based on the technical solution and inventive concept of the present invention, should be covered by the scope of protection of the present invention.

Claims

1. An audio monitoring system for the operation status of a dry pump, comprising a characteristic sound spectrum database for storing audio characteristics of the dry pump operation status, a sound collection unit for collecting vibration sound signals when the dry pump is in operation status, an alarm module for issuing an equipment failure alarm, and a central processing unit, characterized in that: The sound collection unit is in communication with the characteristic sound spectrum database, and the sound collection unit, the alarm module and the characteristic sound spectrum database are in communication with the central processing unit respectively; The sound pickup element of the sound collection unit is a contact sensor and a microphone, or a combination of the two; The audio features include audio when the dry pump is in normal operation and audio when a fault occurs during the operation of the dry pump.

2. The dry pump operating status audio monitoring system according to claim 1, characterized in that: The characteristic sound spectrum database includes a normal audio storage library, a fault audio storage library, and an entry and editing module for adding normal audio and / or fault audio when the dry pump is in operation.

3. The dry pump operating status audio monitoring system according to claim 2, characterized in that: The fault audio storage library includes level one dangerous value fault, level two dangerous value fault and level three dangerous value fault categories; The first-level dangerous value fault is that the current fault audio is within the controllable range of the X1-X5 safety threshold, and it is estimated that it will not affect the normal operation of the dry pump within n hours; The second-level dangerous value fault is that the current fault audio is within the uncontrollable range of the X6-X8 monitoring threshold, and it is estimated that it will affect the normal operation of the dry pump within n hours; The third-level dangerous value fault is that the current fault audio is in the dangerous range of ≥X9 high-risk threshold.

4. The dry pump operating status audio monitoring system according to claim 3, characterized in that: The alarm mode of the first-level dangerous value fault is background reminder; The alarm mode for level 2 dangerous value fault is background reminder; The alarm method for level 3 dangerous value faults is a dual reminder on site + in the background.

5. The dry pump operating status audio monitoring system according to claim 4, characterized in that: The dry pump to which the current fault audio belongs, which belongs to the third-level dangerous value fault, will be directly controlled by the central processing unit to stop running.

6. The dry pump operating status audio monitoring system according to claim 1, characterized in that: The sound collection unit includes an analysis and recognition module, an extraction module and an anti-interference module; The analysis and identification module is used to perform spectrum conversion on the collected vibration and sound signals, and analyze and process them together with the information in the characteristic sound spectrum database; the extraction module is used to exclude and filter the audio under normal operating conditions of the dry pump; and the anti-interference module is used to shield the surrounding personnel and environmental noise.

7. The dry pump operating status audio monitoring system according to claim 6, characterized in that: The anti-interference module is a shielding cover arranged on the periphery of the sound pickup element.

8. The dry pump operating status audio monitoring system according to claim 7, characterized in that: The extraction module includes a filtering block for filtering out fault audio in a dry pump operation state that is not in a current fault audio storage library.

9. The dry pump operating status audio monitoring system according to claim 1, characterized in that: The alarm module includes an audible and visual alarm used at the dry pump operation site, and a wireless transmission alarm block for remotely transmitting information to the backend to alert the operator.

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