Flue gas filtering equipment of annealing furnace and use method of flue gas filtering equipment

Abstract

The invention relates to the technical field of flue gas filtration, in particular to flue gas filtration equipment of an annealing furnace and a using method thereof.The flue gas filtration equipment comprises an annealing furnace body, a furnace door arranged at one end of the annealing furnace body and filter cartridges arranged on the two sides of the top of the annealing furnace body, and fixing plates are fixedly installed on the two sides of the top of one end of the annealing furnace body through bolts; a fixed rotating rod is movably connected between the tops of the fixed plates through bearings, first gears are fixedly installed at the two ends of the fixed rotating rod and located on one sides of the fixed plates through bolts, second gears are movably connected to the two sides of the bottom of one end of the annealing furnace body through bearings, and chains are connected to the two sides of the annealing furnace body and located between the first gears and the second gears. Smoke overflowing from the two sides when the furnace door is lifted is sucked in through the air suction cover on the air suction side pipe, the smoke is brought into the connecting cylinder through the air draft fan and is filtered through the activated carbon filtering layer plate, the overflowing smoke is effectively sucked and filtered, the effect of enhancing the smoke filtering effect on the two sides when the furnace door is opened is achieved, and the design is ingenious.

Description

Technical Field

[0001] The present invention relates to the technical field of flue gas filtration, and in particular to a flue gas filtration device for an annealing furnace and a use method thereof. Background Art

[0002] An annealing furnace is a process used in the manufacture of semiconductor devices that involves heating multiple semiconductor wafers to affect their electrical properties. The thermal treatment is designed for different effects. The wafer can be heated to activate dopants, convert a film into a thin film or to convert a thin film into a wafer-substrate interface, make a densely deposited film, change the state of a growing film, repair implanted damage, move dopants or transfer dopants from one film to another or from a film into a wafer substrate. Annealing furnaces can be integrated into other furnace processing steps, such as oxidation, or can be performed on their own. Annealing is performed by equipment designed specifically for heating semiconductor wafers. Annealing furnaces are energy-efficient, cycle-type operating furnaces.

[0003] The annealing furnace will emit smoke when working. The smoke contains harmful gases and particulate matter. At present, an exhaust fan is used in conjunction with a filter purification box device to filter the smoke generated inside to prevent the smoke from polluting the factory environment. However, after the material annealing is completed, the furnace door needs to be opened to take the material out and enter the next process. When the furnace door is opened, the residual smoke inside will immediately overflow from both sides as the door opens, causing harm to workers or the environment. Summary of the Invention

[0004] In order to overcome the deficiencies of the prior art, the present invention provides a fume filtration device for an annealing furnace and a method for using the same.

[0005] Material toggling mechanism, its both sides respectively have a cylinder pressure, and the cylinder pressure bar connects swing arm, and the swing arm end face has hook portion, and a bar passes position between the end of two swing arms and the hook portion.

[0006] An intake side pipe for absorbing flue gas at the furnace door is fixedly installed with the intake side pipe at the bottom of both sides of one end of the annealing furnace body by bolts, the filter hole groove matches the size of the filter cartridge, and the filter cartridge is fixedly installed in the filter hole groove by bolts, a connecting ring is passed through the center of one end of the filter cartridge, an L-shaped guide tube is fixedly installed on one side of the connecting ring by bolts, and the bottom end of the L-shaped guide tube is connected to the top end of the intake side pipe;

[0007] For the exhaust fan that generates negative pressure in the suction side pipe, a rotating rod is movably connected to the center of one end of the filter cartridge through a bearing, and the rotating rod moves at the inner center of the connecting ring, one end of the rotating rod is fixedly installed with the exhaust fan in the filter cartridge by a bolt, the other end of the rotating rod extends through the outside of the filter cartridge, and a rotating gear is fixedly installed on the top of the rotating rod by a bolt, and rack plates movably meshed with the rotating gear are fixedly installed on both sides of the furnace door by bolts;

[0008] A connecting tube for filtering the flue gas in the filter cartridge, and the connecting tube is movable in the filter hole groove, one end of the filter cartridge is threadedly connected to the connecting tube, and the connecting tube is filled with an activated carbon filter layer plate for filtering the flue gas, and a flue gas filter box is fixedly installed on the annealing furnace body at the center of the top end away from the furnace door by bolts.

[0009] As a preferred technical solution of the present invention, fixed slide grooves are provided on both sides of the inner bottom end of the annealing furnace body, a movable bottom plate is connected to the annealing furnace body through the fixed slide grooves, heating rods are fixedly installed on both sides of the inner side of the annealing furnace body by bolts, and flue gas pipe racks connected to the flue gas filter box are fixedly installed on both sides of the outer side of the annealing furnace body by bolts.

[0010] The annealing furnace body is provided with T-shaped slide grooves at both ends of one side of the furnace door, and the annealing furnace body is provided with T-shaped sliders slidably connected in the T-shaped slide grooves. The top of the T-shaped slider is fixedly installed at the bottom of both ends of one side of the furnace door by bolts.

[0011] As a preferred technical solution of the present invention, a servo motor is fixedly installed on one side of the top of the annealing furnace body by bolts, the output end of the servo motor is connected to the first pulley through a rotating shaft, one end of the fixed rotating rod passes through the first gear and is connected to the second pulley, and a transmission belt is tensioned and connected between the first pulley and the second pulley.

[0012] Triangular hanging rings are welded and fixed around the top of the annealing furnace body, and an inspection port with a flip cover is opened at the center of one end of the top of the annealing furnace body. A smoke exhaust rack is fixed to the annealing furnace body at the center of the top away from the furnace door by bolts, and the smoke exhaust rack is connected to the smoke filter box.

[0013] The connecting ring is evenly provided with a plurality of air inlet holes on one side located inside the filter cylinder, and the air intake side pipe is evenly connected with a plurality of air intake hoods with trumpet-shaped structures on one side located inside the furnace door, and the air intake hoods are communicated with the air intake side pipe.

[0014] As a preferred technical solution of the present invention, an exhaust fan is fixedly installed on one side of the bottom of the smoke exhaust frame by bolts, a connecting pipe is fixedly installed between the smoke exhaust frame and the smoke filter box by bolts, and a valve is provided on the connecting pipe.

[0015] A base block is fixedly installed on the annealing furnace body at the center of one bottom side of the furnace door by bolts, and the furnace door is movable at the bottom center of the base plate, the intake side pipes are symmetrically installed on both sides of the furnace door, and a control box is fixedly installed on the outer side of the annealing furnace body by bolts.

[0016] As a preferred technical solution of the present invention, a method for using a fume filtration device of an annealing furnace includes the following steps:

[0017] S1. Place the material to be processed on the movable bottom plate, then push the movable bottom plate into the annealing furnace body through the fixed chute. The servo motor is controlled by the control box. The servo motor rotates the fixed rotating rod through the first pulley and the transmission belt. The fixed rotating rod synchronously drives the first gears at both ends to rotate. The first gear and the second gear cooperate to rotate the chain on the periphery. During the rotation process, the chain drives the furnace door to descend in the T-shaped chute through the support rod, and the annealing furnace body is closed through the furnace door.

[0018] S2. The heating rod in the annealing furnace is used to heat the material to achieve the annealing effect on the internal material. At the same time, during the annealing process, the smoke pipe rack, smoke filter box, smoke exhaust rack and connecting pipe on the annealing furnace body are used to absorb, filter, purify and discharge the internal smoke;

[0019] S3. After the annealing of the internal material is completed, the servo motor reverses to achieve the reverse rotation of the chains on both sides, and the furnace door in the T-shaped slide is lifted up by the chain and the support rod. When it is lifted up, the rack plates on both sides of the furnace door engage and drive the rotating gear to rotate;

[0020] S4. When the rotating gear rotates steadily in the filter cartridge, it drives the rotating rod to move synchronously. The rotating rod will generate negative pressure at one end of the filter cartridge through the exhaust fan, and the gas will enter through the air inlet hole on the connecting ring. The exhaust hood on the suction side pipe will suck in the flue gas overflowing from both sides when the furnace door is raised. The exhaust fan will bring the flue gas to the connecting cartridge for filtration using the activated carbon filter layer plate.

[0021] Compared with the prior art, the present invention has the following beneficial effects:

[0022] 1. The fixed rotating rod is rotated by the first pulley and the transmission belt, and the fixed rotating rod synchronously drives the first gears at both ends to rotate, so that the chain on the outer periphery of the first gear and the second gear drives the furnace door to move up and down in the T-shaped slide, thereby achieving convenient lifting and opening and closing control of the furnace door.

[0023] 2. The rotation of the chains on both sides is achieved through the servo motor. The furnace door in the T-shaped slide is raised and lowered by the chain and support rod. The rack plates on both sides of the furnace door are engaged to drive the rotating gear to rotate, which in turn drives the rotating rod to move synchronously. The structural connection is stable, and the rotation is driven by the rising and opening action of the furnace door. The structure is ingenious and stable.

[0024] 3. The exhaust hood on the suction side pipe sucks in the flue gas overflowing from both sides when the furnace door is raised, and the exhaust fan brings the flue gas to the connecting tube for filtration using the activated carbon filter plate, so as to effectively absorb and filter the overflowing flue gas, thereby achieving the effect of strengthening the flue gas filtration on both sides when the furnace door is opened. The design is ingenious.

[0025] 4. The smoke pipe rack, smoke filter box, smoke exhaust rack and connecting pipe on the annealing furnace body are used to absorb, filter, purify and discharge the internal smoke. The furnace door rack plate and rotating gear are engaged with each other to absorb and filter the smoke on both sides, achieving a full range of smoke absorption and filtration effects. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 The overall structure of the present invention is shown in FIG. Figure 1 ;

[0027] Figure 2 For the present invention Figure 1 Schematic diagram of the intermediate annealing furnace structure;

[0028] Figure 3 The overall structure of the present invention is shown in FIG. Figure 2 ;

[0029] Figure 4 The overall structure of the present invention is shown in FIG. Figure 3 ;

[0030] Figure 5 For the present invention Figure 1 Schematic diagram of the middle chain connection structure;

[0031] Figure 6 For the present invention Figure 1 Schematic diagram of the connection structure of the middle filter cartridge

[0032] Figure 7 For the present invention Figure 2 Schematic diagram of the servo motor connection structure;

[0033] Figure 8 For the present invention Figure 1 Schematic diagram of the middle furnace door connection structure;

[0034] Figure 9 For the present invention Figure 6 Schematic diagram of the connection structure between the rotating gear and the rack plate;

[0035] Figure 10 For the present invention Figure 6 Schematic diagram of the internal connection structure of the middle filter cartridge.

[0036] Among them: 10, annealing furnace body; 11, fixed chute; 12, movable bottom plate; 13, heating rod; 14, flue gas filter box; 15, flue gas pipe rack; 16, flue gas exhaust rack; 17, exhaust fan; 18, connecting pipe; 19, control box; 20, furnace door; 21, first gear; 22, second gear; 23, chain; 24, support rod; 25, rack plate; 26, T-shaped chute; 27, T-shaped slider; 28, base block; 30, filter Cylinder; 31. Filter hole slot; 32. Intake side pipe; 33. Connecting ring; 34. L-shaped duct; 35. Exhaust fan; 36. Rotating rod; 37. Rotating gear; 38. Intake hole; 39. Intake hood; 40. Fixed plate; 41. Fixed rotating rod; 42. Servo motor; 43. First pulley; 44. Second pulley; 45. Drive belt; 50. Connecting cylinder; 51. Activated carbon filter layer plate; 60. Inspection port; 61. Triangular lifting ring. DETAILED DESCRIPTION

[0037] In order to make the technical means, creative features, purpose and efficacy of the present invention easy to understand, the present invention is further described below in conjunction with specific examples, but the following examples are only preferred embodiments of the present invention, not all. Based on the examples in the embodiments, other embodiments obtained by those skilled in the art without making creative work are within the scope of protection of the present invention. The experimental methods in the following examples, unless otherwise specified, are conventional methods, and the materials, reagents, etc. used in the following examples, unless otherwise specified, can be obtained from commercial channels.

[0038] Example: Figure 1 、 Figure 5 、 Figure 6 、 Figure 7 、 Figure 9 and Figure 10 As shown, it includes an annealing furnace body 10 with support seats at both ends of the bottom, a furnace door 20 arranged at one end of the annealing furnace body 10, and filter cartridges 30 arranged on both sides of the top of the annealing furnace body 10. Fixed plates 40 are fixedly installed on both sides of the top of one end of the annealing furnace body 10 by bolts. A fixed rotating rod 41 is movably connected between the tops of the fixed plates 40 through bearings. The two ends of the fixed rotating rod 41 are fixedly installed with a first gear 21 on one side of the fixed plate 40 by bolts. The bottom of one end of the annealing furnace body 10 is movably connected to the second gear 21 on both sides through bearings. Gear 22, chains 23 are connected between the first gear 21 and the second gear 22 on both sides of the annealing furnace body 10, and support rods 24 are welded and fixed on one side of the two chains 23. The top of the support rod 24 is fixed to the top of the furnace door 20 on both sides by bolts, and the furnace door 20 is movable on the outside of one end of the annealing furnace body 10. Filter holes 31 are opened on both sides of the top of the annealing furnace body 10 to absorb the flue gas overflowing from the furnace door 20. A filter assembly is provided in the filter hole 31, and the filter assembly includes:

[0039] An intake side pipe 32 for absorbing smoke at the furnace door 20 is fixedly installed with an intake side pipe 32 at the bottom of both sides of one end of the annealing furnace body 10 by bolts. The smoke overflowing when the furnace door 20 is opened is absorbed by the intake side pipe 32. The filter hole groove 31 matches the size of the filter cartridge 30, and the filter cartridge 30 is fixedly installed in the filter hole groove 31 by bolts. A connecting ring 33 is passed through the center of one end of the filter cartridge 30. An L-shaped guide tube 34 is fixedly installed on one side of the connecting ring 33 by bolts. The bottom end of the L-shaped guide tube 34 is connected to the top of the intake side pipe 32. The connection between the intake side pipe 32 and the filter cartridge 30 is achieved by the connecting ring 33 and the L-shaped guide tube 34.

[0040] The exhaust fan 35 that generates negative pressure in the suction side pipe 32 has a rotating rod 36 movably connected to the center of one end of the filter cartridge 30 through a bearing, and the rotating rod 36 moves at the inner center of the connecting ring 33. One end of the rotating rod 36 is fixedly installed with the exhaust fan 35 in the filter cartridge 30 by bolts, and negative pressure is generated in the filter cartridge 30 and the suction side pipe 32 through the exhaust fan 35. The other end of the rotating rod 36 extends through the outer side of the filter cartridge 30, and the top of the rotating rod 36 is fixedly installed with a rotating gear 37 by bolts. Rack plates 25 movably meshed with the rotating gear 37 are fixedly installed on both sides of the furnace door 20 by bolts. The cooperation between the rotating gear 37 and the rack plate 25 causes the exhaust fan 35 to rotate stably, so that the exhaust fan 35 rotates when the furnace door 20 is opened.

[0041] A connecting tube 50 is provided for filtering the flue gas in the filter cartridge 30, and the connecting tube 50 is movable in the filter hole groove 31. One end of the filter cartridge 30 is threadedly connected to the connecting tube 50. The connecting tube 50 is filled with an activated carbon filter layer plate 51 for filtering the flue gas, thereby achieving the effect of filtering the overflowing flue gas. A flue gas filter box 14 is fixedly installed on the annealing furnace body 10 at the center of the top end away from the furnace door 20 by bolts. The flue gas filter box 14 is used to filter the flue gas inside the annealing furnace body 10, and an activated carbon filter device is provided in the flue gas filter box 14.

[0042] See Figure 2 、 Figure 3 and Figure 4 Fixed slide grooves 11 are provided on both sides of the bottom end of the annealing furnace body 10. A movable bottom plate 12 is connected to the annealing furnace body 10 through the fixed slide grooves 11. The annealing material is placed and processed through the movable bottom plate 12. Heating rods 13 are fixedly installed on both sides of the interior of the annealing furnace body 10 by bolts. The heating rods 13 are used to heat the interior. Flue gas pipe racks 15 connected to the flue gas filter box 14 are fixedly installed on both sides of the exterior of the annealing furnace body 10 by bolts to achieve flue gas absorption and filtering effects.

[0043] A T-shaped slide groove 26 is provided on the annealing furnace body 10 at both ends of one side of the furnace door 20. A T-shaped slider 27 is slidably connected in the T-shaped slide groove 26 on the annealing furnace body 10. The top of the T-shaped slider 27 is fixedly installed at the bottom of both ends of one side of the furnace door 20 by bolts, so that the furnace door 20 can be raised and lowered and opened stably and smoothly.

[0044] See Figure 5 、 Figure 7 and Figure 8 A servo motor 42 is fixedly installed on one side of the top of the annealing furnace body 10 by bolts. The output end of the servo motor 42 is connected to a first pulley 43 through a rotating shaft. One end of the fixed rotating rod 41 passes through the first gear 21 and is connected to a second pulley 44. A transmission belt 45 is tensioned between the first pulley 43 and the second pulley 44. The stable rotation movement of the fixed rotating rod 41 is driven by the linkage effect of the transmission belt 45, thereby achieving the rotation of the chain 23 and realizing the lifting and opening and closing of the furnace door 20.

[0045] Triangular lifting rings 61 are welded and fixed around the top of the annealing furnace body 10 for easy lifting. An inspection port 60 with a flip cover is provided at the center of one end of the top of the annealing furnace body 10 for easy maintenance. A flue gas exhaust rack 16 is fixedly installed on the annealing furnace body 10 at the center of the top of the end away from the furnace door 20 by bolts. The flue gas exhaust rack 16 is connected to the flue gas filter box 14 to filter the internal flue gas.

[0046] A plurality of air intake holes 38 are evenly provided on the connecting ring 33 on one side located inside the filter cartridge 30, and a plurality of trumpet-shaped air intake hoods 39 are evenly connected to the air intake side pipe 32 on one side located inside the furnace door 20, so as to absorb the overflowing smoke, and the air intake hood 39 is connected to the air intake side pipe 32, and is connected through and through, and has a simple and stable structure.

[0047] See Figure 1 and Figure 2 An exhaust fan 17 is fixedly installed on one side of the bottom of the smoke exhaust frame 16 by bolts to improve the internal smoke filtering and exhaust effect. A connecting pipe 18 is fixedly installed between the smoke exhaust frame 16 and the smoke filter box 14 by bolts, and a valve is provided on the connecting pipe 18 for easy control.

[0048] A base block 28 is fixedly installed on the annealing furnace body 10 at the center of the bottom side of the furnace door 20 by bolts, and the furnace door 20 moves at the bottom center of the base plate. The suction side pipe 32 is symmetrically installed on both sides of the furnace door 20. A control box 19 is fixedly installed on the outer side of the annealing furnace body 10 by bolts, which is simple to operate.

[0049] Among them, a method for using the flue gas filtering device of an annealing furnace includes the following steps:

[0050] S1. Place the material to be processed on the movable bottom plate 12, then push the movable bottom plate 12 into the annealing furnace body 10 through the fixed chute 11, control the servo motor 42 through the control box 19, and the servo motor 42 rotates the fixed rotating rod 41 through the first pulley 43 and the transmission belt 45. The fixed rotating rod 41 synchronously drives the first gears 21 at both ends to rotate. The first gear 21 and the second gear 22 cooperate to rotate the chain 23 on the periphery. During the rotation process, the chain 23 drives the furnace door 20 to descend in the T-shaped chute 26 through the support rod 24, and the annealing furnace body 10 is closed through the furnace door 20;

[0051] S2. The heating rod 13 in the annealing furnace body 10 is used to heat the material to achieve the annealing effect on the internal material. At the same time, during the annealing process, the smoke pipe rack 15, smoke filter box 14, smoke exhaust rack 16 and connecting pipe 18 on the annealing furnace body 10 are used to absorb, filter, purify and discharge the internal smoke;

[0052] S3. After the internal material annealing is completed, the servo motor 42 is reversed to achieve the reverse rotation of the chains 23 on both sides. The furnace door 20 in the T-shaped slide 26 is lifted up by the chains 23 and the support rods 24. When the furnace door 20 is lifted up, the rack plates 25 on both sides of the furnace door 20 engage and drive the rotating gear 37 to rotate.

[0053] S4. When the rotating gear 37 rotates stably in the filter cartridge 30, it drives the rotating rod 36 to move synchronously. The rotating rod 36 will generate negative pressure at one end of the filter cartridge 30 through the exhaust fan 35, and the gas will enter through the air inlet hole 38 on the connecting ring 33. The smoke overflowing from both sides when the furnace door 20 is raised will be sucked in through the suction hood 39 on the suction side pipe 32. The smoke will be brought to the connecting cylinder 50 by the exhaust fan 35 and filtered by the activated carbon filter layer plate 51.

[0054] Working principle: Place the material on the movable bottom plate 12, push the movable bottom plate 12 into the annealing furnace body 10 through the fixed slide 11, control the servo motor 42 through the control box 19, and the servo motor 42 rotates the fixed rotating rod 41 through the first pulley 43 and the transmission belt 45. The fixed rotating rod 41 synchronously drives the first gears 21 at both ends to rotate. The first gear 21 and the second gear 22 cooperate to make the chain 23 on the periphery rotate. During the rotation process, the chain 23 drives the furnace door 20 to descend in the T-shaped slide 26 through the support rod 24, closes the processing, and the heating rod 13 heats up to heat the material. During the annealing process, the smoke pipe rack 15, the smoke filter box 14, the smoke exhaust rack 16 and the connecting pipe 18 on the annealing furnace body 10 are used to absorb, filter, purify and discharge the internal smoke.

[0055] When annealing is completed, the servo motor 42 is reversed to achieve the reverse rotation of the chains 23 on both sides, and the furnace door 20 in the T-shaped slide 26 is lifted up by the chain 23 and the support rod 24. When lifting, the rack plates 25 on both sides of the furnace door 20 engage to drive the rotating gear 37 to rotate. When the rotating gear 37 rotates stably in the filter cartridge 30, it drives the rotating rod 36 to move synchronously. The rotating rod 36 will generate negative pressure at one end of the filter cartridge 30 through the exhaust fan 35, and the smoke overflowing from both sides when the furnace door 20 is lifted up is sucked in through the suction hood 39 on the suction side pipe 32. The smoke is brought to the connecting tube 50 by the exhaust fan 35 and filtered by the activated carbon filter layer plate 51, so as to achieve effective absorption and filtration of the overflowing smoke.

[0056] The embodiments of the present invention are described in detail above with reference to the accompanying drawings, but the present invention is not limited thereto. Various changes can be made within the scope of knowledge possessed by those skilled in the art without departing from the spirit of the present invention.

Claims

1. A fume filtration device for an annealing furnace, comprising an annealing furnace body (10) with support seats at both ends of the bottom, a furnace door (20) arranged at one end of the annealing furnace body (10), and filter cartridges (30) arranged on both sides of the top of the annealing furnace body (10), characterized in that: A fixing plate (40) is fixedly installed on both sides of the top of one end of the annealing furnace body (10) by means of bolts, a fixing rotating rod (41) is movably connected between the tops of the fixing plates (40) by means of bearings, a first gear (21) is fixedly installed on both ends of the fixing rotating rod (41) by means of bolts on one side of the fixing plate (40), a second gear (22) is movably connected on both sides of the bottom of one end of the annealing furnace body (10) by means of bearings, and the first gear (21) is movably connected to the two sides of the annealing furnace body (10). A chain (23) is connected between the first gear and the second gear (22), and a support rod (24) is welded and fixed on one side of each of the two chains (23). The top of the support rod (24) is fixed on the top of both sides of the furnace door (20) by bolts, and the furnace door (20) is movable outside one end of the annealing furnace body (10). Filter slots (31) are provided on both sides of the top of the annealing furnace body (10), and a filter assembly is provided in the filter slot (31), and the filter assembly includes: An intake side pipe (32) for absorbing smoke at the furnace door (20) is fixedly installed with the intake side pipe (32) at the bottom of both sides of one end of the annealing furnace body (10) by bolts, the filter hole groove (31) is consistent with the size of the filter cartridge (30), and the filter cartridge (30) is fixedly installed in the filter hole groove (31) by bolts, a connecting ring (33) is passed through the center of one end of the filter cartridge (30), an L-shaped guide tube (34) is fixedly installed on one side of the connecting ring (33) by bolts, and the bottom end of the L-shaped guide tube (34) is connected to the top end of the intake side pipe (32); For the exhaust fan (35) that generates negative pressure in the suction side pipe (32), a rotating rod (36) is movably connected to the center of one end of the filter cartridge (30) through a bearing, and the rotating rod (36) moves at the inner center of the connecting ring (33), one end of the rotating rod (36) is fixedly installed with the exhaust fan (35) in the filter cartridge (30) by bolts, the other end of the rotating rod (36) extends through the outside of the filter cartridge (30), and a rotating gear (37) is fixedly installed on the top of the rotating rod (36) by bolts, and rack plates (25) that are movably engaged with the rotating gear (37) are fixedly installed on both sides of the furnace door (20) by bolts; A connecting tube (50) is provided for filtering the flue gas in the filter tube (30), and the connecting tube (50) is movable in the filter hole groove (31). One end of the filter tube (30) is threadedly connected to the connecting tube (50), and the connecting tube (50) is filled with an activated carbon filter layer plate (51) for filtering the flue gas. A flue gas filter box (14) is fixedly installed on the annealing furnace body (10) at the center of the top end away from the furnace door (20) by bolts.

2. The flue gas filtering device for an annealing furnace according to claim 1, characterized in that: Fixed slide grooves (11) are provided on both sides of the inner bottom of the annealing furnace body (10); a movable bottom plate (12) is connected to the annealing furnace body (10) via the fixed slide grooves (11); heating rods (13) are fixedly installed on both sides of the inner side of the annealing furnace body (10) by means of bolts; and a flue gas pipe rack (15) connected to the flue gas filter box (14) is fixedly installed on both sides of the outer side of the annealing furnace body (10) by means of bolts.

3. The flue gas filtering device for an annealing furnace according to claim 2, characterized in that: The annealing furnace body (10) is provided with T-shaped sliding grooves (26) at both ends of one side of the furnace door (20), and the annealing furnace body (10) is provided with T-shaped sliders (27) slidably connected in the T-shaped sliding grooves (26), and the top ends of the T-shaped sliders (27) are fixedly mounted at the bottom ends of one side of the furnace door (20) by bolts.

4. The flue gas filtering device for an annealing furnace according to claim 3, characterized in that: A servo motor (42) is fixedly installed on one side of the top of the annealing furnace body (10) by bolts, and the output end of the servo motor (42) is connected to a first pulley (43) through a rotating shaft, and one end of the fixed rotating rod (41) passes through the first gear (21) and is connected to a second pulley (44), and a transmission belt (45) is tensioned and connected between the first pulley (43) and the second pulley (44).

5. The flue gas filtering device for an annealing furnace according to claim 4, characterized in that: Triangular hanging rings (61) are welded and fixed around the top of the annealing furnace body (10), and an inspection port (60) with a flip cover is opened at the center of one end of the top of the annealing furnace body (10). A smoke exhaust frame (16) is fixedly installed on the annealing furnace body (10) at the center of the top of one end away from the furnace door (20) by bolts, and the smoke exhaust frame (16) is connected to the smoke filter box (14).

6. The flue gas filtering device for an annealing furnace according to claim 5, characterized in that: The connecting ring (33) is evenly provided with a plurality of air inlet holes (38) on one side located inside the filter cylinder (30), and the air intake side pipe (32) is evenly connected with a plurality of air intake hoods (39) with trumpet-shaped structures on one side located inside the furnace door (20), and the air intake hoods (39) are communicated with the air intake side pipe (32).

7. The flue gas filtering device for an annealing furnace according to claim 6, characterized in that: An exhaust fan (17) is fixedly installed on one side of the bottom of the smoke exhaust frame (16) by means of bolts, and a connecting pipe (18) is fixedly installed between the smoke exhaust frame (16) and the smoke filter box (14) by means of bolts, and a valve is provided on the connecting pipe (18).

8. The flue gas filtering device for an annealing furnace according to claim 7, characterized in that: A base block (28) is fixedly mounted on the annealing furnace body (10) at the center of one side of the bottom of the furnace door (20) by means of bolts, and the furnace door (20) is movable at the center of the bottom of the base plate, the air intake side pipe (32) is symmetrically mounted on both sides of the furnace door (20), and a control box (19) is fixedly mounted on one side of the outside of the annealing furnace body (10) by means of bolts.

9. The method for using the fume filtration device of an annealing furnace according to claim 8, characterized in that: The following steps are included: S1. Place the material to be processed on the movable bottom plate (12), then push the movable bottom plate (12) into the annealing furnace body (10) through the fixed chute (11), control the servo motor (42) through the control box (19), and the servo motor (42) rotates the fixed rotating rod (41) through the first pulley (43) and the transmission belt (45), and the fixed rotating rod (41) synchronously drives the first gears (21) at both ends to rotate, and the first gear (21) and the second gear (22) cooperate to make the chain (23) on the periphery rotate, and the chain (23) drives the furnace door (20) to descend in the T-shaped chute (26) through the support rod (24) during the rotation process, and the annealing furnace body (10) is closed through the furnace door (20); S2, using the heating rod (13) in the annealing furnace body (10) to heat the material to achieve the annealing effect on the internal material, and at the same time, during the annealing process, the internal smoke is absorbed, filtered, purified and discharged through the smoke pipe rack (15), smoke filter box (14), smoke exhaust rack (16) and connecting pipe (18) on the annealing furnace body (10); S3. After the annealing of the internal material is completed, the servo motor (42) is reversed to realize the reverse rotation of the chains (23) on both sides, and the furnace door (20) in the T-shaped slide (26) is lifted up by the chain (23) and the support rod (24). When the furnace door (20) is lifted up, the rack plates (25) on both sides of the furnace door (20) are engaged to drive the rotating gear (37) to rotate; S4. When the rotating gear (37) rotates stably in the filter cartridge (30), it drives the rotating rod (36) to move synchronously. The rotating rod (36) generates negative pressure at one end of the filter cartridge (30) through the exhaust fan (35). Gas enters through the air inlet hole (38) on the connecting ring (33). The smoke overflowing from both sides when the furnace door (20) is raised is sucked in through the suction hood (39) on the suction side pipe (32). The smoke is brought to the connecting cylinder (50) through the exhaust fan (35) and filtered by the activated carbon filter layer plate (51).

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