Gyro structure and modal matching method
By introducing a mass block and electrostatic electrodes into the gyroscope structure and adjusting the in-plane modal vibration frequency, the problem of piezoelectric gyroscope modal matching is solved and the sensitivity of rotation detection is improved.
Patent Information
- Application Number
- CN202410302331.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-15
- Publication Date
- 2025-09-16
AI Technical Summary
Existing piezoelectric gyroscopes have difficulties in modal matching, which limits their rotational sensitivity.
A gyroscope structure is designed, including a device layer, a ring structure, a piezoelectric layer and an electrostatic electrode. The in-plane modal vibration frequency is adjusted by the mass block and the electrostatic electrode to match the out-of-plane modal vibration frequency.
The vibration frequency matching of the in-plane mode and out-of-plane mode of the gyro structure is achieved, the performance of the gyro is optimized, and the sensitivity of rotation detection is improved.
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Figure CN120651207A_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of gyroscopes, and in particular to a gyroscope structure and a modal matching method. Background Art
[0002] A roll or pitch axis gyroscope is an angular rate sensor that can detect in-plane rotation. This type of gyroscope has two operating modes: in-plane and out-of-plane.
[0003] Currently, this type of gyroscope is typically driven and detected using electrostatics. The drive and detection of out-of-plane modes relies on out-of-plane electrostatic electrodes, which complicates the manufacturing process. Using piezoelectrics to drive and detect both out-of-plane and in-plane modes reduces manufacturing complexity and offers the advantage of a high electromechanical coupling coefficient, making it a promising approach. However, piezoelectric gyroscopes suffer from difficulty in modal matching, which limits their sensitivity to rotation.
[0004] Therefore, how to reasonably design the piezoelectrically driven roll or pitch axis gyroscope structure so that it can achieve modal matching has become an urgent problem to be solved in this field. Summary of the Invention
[0005] The present application provides a gyroscope structure and a modal matching method, the purpose of which is to drive vibration on an out-of-plane mode to achieve closed-loop detection.
[0006] In order to achieve the above objectives, this application provides the following technical solutions:
[0007] A gyroscope structure, comprising:
[0008] a device layer, on which movable structures and immovable structures are distributed;
[0009] a ring structure suspended above the device layer and connected to the device layer via an anchor point;
[0010] a metal electrode located on the immovable structure and connected to the device layer;
[0011] a piezoelectric layer located on the movable structure and connected to the device layer, and a top electrode disposed on the piezoelectric layer;
[0012] a plurality of mass blocks distributed inside the annular structure, the mass blocks being used to reduce the in-plane modal vibration frequency of the annular structure so that the in-plane modal vibration frequency of the annular structure approaches the out-of-plane modal vibration frequency of the annular structure;
[0013] The electrostatic electrodes are distributed around the outer side of the annular structure and connected to the device layer. The electrostatic electrodes are used to adjust the in-plane modal vibration frequency of the annular structure based on the applied DC voltage.
[0014] Optionally, the top electrode includes: an out-of-plane modal driving electrode, an in-plane modal driving electrode, and an in-plane modal detection electrode;
[0015] A group of the out-of-plane modal drive electrodes and the in-plane modal drive electrodes, as well as a group of the out-of-plane modal drive electrodes and the in-plane modal detection electrodes are respectively provided on adjacent movable structures; the out-of-plane modal drive electrodes are used to apply an AC voltage; the in-plane modal drive electrodes are used to apply an AC voltage; and the in-plane modal detection electrodes are used to detect the voltage of the piezoelectric layer;
[0016] On the adjacent movable structures, the out-of-plane modal driving electrode on one movable structure is mirror-symmetrical to the out-of-plane modal driving electrode on the other movable structure;
[0017] On the adjacent movable structures, the in-plane modal driving electrodes on one movable structure are mirror-symmetrical to and adjacent to the in-plane modal detection electrodes on the other movable structure.
[0018] Optional,
[0019] The in-plane mode driving electrode covers the outer side of the annular structure, and the in-plane mode detection electrode covers the inner side of the annular structure;
[0020] The out-of-plane mode driving electrode covers the upper surface of the annular structure.
[0021] Optional,
[0022] The out-of-plane modal driving electrode is specifically an arc structure; the width of the arc structure is consistent with the width of the ring structure;
[0023] The in-plane modal driving electrode and the in-plane modal detection electrode are specifically arc structures; the width of the arc structure is half of the width of the ring structure.
[0024] Optionally, the angle between each mass block is 60°.
[0025] Optionally, the annular structure is connected to the device layer via a plurality of anchor points, and the angle between each anchor point and the horizontal direction is n*60°, where n=-1, -2, 1 or 2.
[0026] Optionally, the electrostatic electrode is arranged between the two top electrodes, and the electrostatic electrode is specifically an arc structure; the angle of the arc structure is 60°.
[0027] Optionally, there is a gap of 1 μm to 5 μm between the electrostatic electrode and the annular structure.
[0028] Optionally, the movable structure has a hollow area, the hollow area is provided with the non-movable structure, and the non-movable structure is provided with a metal electrode connected to the device layer.
[0029] A modal matching method, applied to any of the above-mentioned gyro structures, comprising:
[0030] After applying an AC voltage to the piezoelectric layer using the top electrode and the device layer electrode, the piezoelectric layer is used to drive the gyro structure;
[0031] Obtaining vibration frequencies of an in-plane mode and an out-of-plane mode of the gyro structure;
[0032] When the vibration frequency of the in-plane mode is inconsistent with the vibration frequency of the out-of-plane mode, the vibration frequency of the in-plane mode is adjusted by using the mass block and the electrostatic electrode to obtain the adjusted vibration frequency of the in-plane mode;
[0033] When the adjusted vibration frequency of the in-plane mode is consistent with the vibration frequency of the out-of-plane mode, it is determined that the in-plane mode and the out-of-plane mode match.
[0034] The technical solution provided by the present application comprises: a device layer on which a movable structure and a non-movable structure are distributed; a ring structure suspended above the device layer and connected to the device layer via an anchor point; a metal electrode located on the non-movable structure and connected to the device layer; a piezoelectric layer located on the movable structure and connected to the device layer, and a top electrode located on the piezoelectric layer; a plurality of mass blocks distributed inside the ring structure, the mass blocks being used to reduce the in-plane modal vibration frequency of the ring structure so that the in-plane modal vibration frequency of the ring structure approaches the out-of-plane modal vibration frequency of the ring structure; and electrostatic electrodes distributed around the outside of the ring structure and connected to the device layer, the electrostatic electrodes being used to adjust the in-plane modal vibration frequency of the ring structure based on an applied DC voltage. The piezoelectric-driven gyroscope structure is rationally designed by arranging electrostatic electrodes and piezoelectric electrodes on the gyroscope, and the in-plane modal vibration frequency is then adjusted by using the electrostatic electrodes so that the in-plane modal and out-of-plane modal vibration frequencies of the gyroscope structure match. BRIEF DESCRIPTION OF THE DRAWINGS
[0035] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.
[0036] Figure 1 A side view of a gyroscope structure provided in an embodiment of the present application;
[0037] Figure 2 A schematic diagram of the architecture of a gyroscope structure provided in an embodiment of the present application;
[0038] Figure 3 A schematic diagram of a movable structure and a non-movable structure provided in an embodiment of the present application;
[0039] Figure 4 A schematic diagram of a device layer structure provided in an embodiment of the present application;
[0040] Figure 5 A schematic diagram of a hollowed-out area of a movable structure provided in an embodiment of the present application;
[0041] Figure 6 A schematic diagram of the architecture of another gyroscope structure provided in an embodiment of the present application;
[0042] Figure 7 A schematic diagram of a top electrode provided in an embodiment of the present application;
[0043] Figure 8 A schematic diagram of a mass mounting structure provided in an embodiment of the present application;
[0044] Figure 9 A flow chart of a modality matching method provided in an embodiment of the present application;
[0045] Figure 10 A schematic diagram of a modal working state provided in an embodiment of the present application. DETAILED DESCRIPTION
[0046] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.
[0047] In this application, the terms "comprises," "comprising," or any other variations thereof are intended to encompass non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus. In the absence of further limitations, an element defined by the phrase "comprising a ..." does not preclude the presence of additional identical elements in the process, method, article, or apparatus that includes the element.
[0048] like Figure 1 and Figure 2FIG. 1 is a schematic diagram of the structure of a gyroscope provided in an embodiment of the present application, wherein the gyroscope includes:
[0049] The device layer 11 has movable structures 12 and immovable structures 13 distributed thereon.
[0050] It is understood that the movable structure 12 refers to an electronic device or structure that can achieve movement or vibration under certain conditions; the non-movable structure 13 refers to an electronic device or structure that cannot achieve movement or vibration. Figure 3 .
[0051] It should be noted that the device layer 11 includes but is not limited to: a silicon device layer, and semiconductor materials that can be used for micromechanical resonators (such as gallium nitride and silicon carbide).
[0052] The ring structure 14 is suspended above the device layer 11 and connected to the device layer 11 via an anchor point.
[0053] Optionally, the annular structure 14 is a basic structure of a gyroscope, and is suspended above the device layer 11 only by anchor points.
[0054] For details, see Figure 4 , is a schematic diagram of the structure of the device layer 11, which includes: a ring structure 14 connected to the device layer 11 through an anchor point.
[0055] Furthermore, the ring structure 14 is connected to the device layer 11 via a plurality of anchor points, and the angle between each anchor point and the horizontal direction is n*60°, where n=-1, -2, 1 or 2.
[0056] Optionally, the anchor point includes but is not limited to: a T-shaped anchor point.
[0057] Specifically, it is assumed that the ring structure 14 is connected to the device layer 11 via four anchor points, and the angles between the four anchor points and the horizontal direction are 60 degrees, 120 degrees, -120 degrees, and -60 degrees.
[0058] A metal electrode 15 is located on the immovable structure 13 and connected to the device layer.
[0059] It should be noted that the metal electrode 15 connected to the device layer is only connected to the device layer 11 , the metal electrode 15 and the device layer 11 have the same voltage, and the metal electrode 15 is electrically insulated from other electrodes.
[0060] Specifically, the metal electrode 15 is directly connected to the device layer, which is located below the piezoelectric layer 16 . Since the highly doped device layer is conductive, the potential of the metal electrode 15 is the same as the potential of the piezoelectric layer 16 .
[0061] Optionally, the metal electrode 15 and the device layer 11 together form a bottom electrode.
[0062] A piezoelectric layer 16 located on the movable structure 12 and connected to the device layer, and a top electrode 17 disposed on the piezoelectric layer 16 .
[0063] Among them, the piezoelectric layer 16 is used for energy conversion (that is, converting electrical energy into mechanical energy, or converting mechanical energy into electrical energy). The piezoelectric layer 16 can generate stress under the action of voltage, thereby driving the gyroscope, which is called the electrostrictive effect; similarly, the piezoelectric layer 16 can also convert the vibration of the gyroscope into a current or voltage signal. We can know the vibration condition of the gyroscope by detecting this electrical signal, which is called the piezoelectric effect.
[0064] Optionally, the piezoelectric layer 16 may be any material having piezoelectric properties, such as aluminum oxide, lead barium zirconate titanate piezoelectric ceramics, or PVDF.
[0065] Further, see Figure 5 The movable structure 12 has a hollow area, the hollow area is provided with a non-movable structure 13, and the non-movable structure 13 is provided with a metal electrode 15 connected to the device layer.
[0066] Optionally, a hollow area is provided in the middle of the movable structure 12, and below the hollow area is the device layer 11, which is connected to the metal electrode 15, that is, the hollow area is provided with a non-movable structure 13, and the non-movable structure 13 is provided with a metal electrode 15 connected to the device layer.
[0067] Further, see Figure 6 The top electrode 17 includes an out-of-plane mode driving electrode 61 , an in-plane mode driving electrode 62 and an in-plane mode detecting electrode 63 .
[0068] A set of out-of-plane modal drive electrodes 61 and in-plane modal drive electrodes 62 , and a set of out-of-plane modal drive electrodes 61 and in-plane modal detection electrodes 63 are respectively provided on adjacent movable structures 12 .
[0069] The out-of-plane mode driving electrode 61 is used to apply an AC voltage; the in-plane mode driving electrode 62 is used to apply an AC voltage; and the in-plane mode detection electrode 63 is used to detect the voltage of the piezoelectric layer 16 .
[0070] It can be understood that the out-of-plane mode driving electrode 61 and the in-plane mode driving electrode 62 apply an AC voltage to the piezoelectric layer 16 so that the piezoelectric layer 16 drives the gyroscope. When the gyroscope vibrates, the in-plane mode detection electrode 63 is used to detect the voltage of the piezoelectric layer 16.
[0071] On adjacent movable structures 12 , the out-of-plane modal driving electrodes 61 on one movable structure 12 are mirror-symmetrical to the out-of-plane modal driving electrodes 61 on the other movable structure.
[0072] On adjacent movable structures 12 , the in-plane modal driving electrode 62 on one movable structure 12 is mirror-symmetrical to and adjacent to the in-plane modal detecting electrode 63 on the other movable structure.
[0073] Further, see Figure 7 The in-plane mode driving electrode 62 covers the outer side of the annular structure 14 , and the in-plane mode detecting electrode 63 covers the inner side of the annular structure 14 .
[0074] It should be noted that there is a gap of several micrometers between the in-plane modal drive electrode 62 and the in-plane modal detection electrode 63 , that is, the in-plane modal drive electrode 62 and the in-plane modal detection electrode 63 are electrically insulated.
[0075] The out-of-plane mode driving electrode 61 covers the upper surface of the annular structure 14 .
[0076] It should be noted that the annular structure 14 is a device structure made of low-resistance silicon, which has both mechanical and electrical functions. Mechanically, it can detect rotation as a resonant gyroscope; electrically, the middle is a piezoelectric layer 16, and both the top and bottom are covered with electrodes. In the embodiment of the present application, the upper electrode is the top electrode 17, and the lower electrode is low-resistance silicon that directly acts as an electrode to provide a reference potential (ground). It is necessary to connect the electrical connection to the vicinity of the anchor point for wire bonding.
[0077] The reason for the electrical connection near the anchor point is that wire bonding requires a square-shaped pad, which must be located on the immovable structure 13 and not on the movable structure 12. In reality, wire bonding has no direct relationship with this structure; it is simply a common electrical connection method used in microelectronics to connect chips, packages, and PCBs.
[0078] Furthermore, the out-of-plane mode driving electrode 61 is specifically an arc structure; the width of the arc structure is consistent with the width of the annular structure 14 .
[0079] The angle of the arc structure is 58° to 60°.
[0080] It can be understood that when the width of the arc structure of the out-of-plane modal driving electrode 61 is consistent with the width of the ring structure, the out-of-plane modal driving electrode 61 can completely cover the ring structure 14 .
[0081] The in-plane modal driving electrode 62 and the in-plane modal detecting electrode 63 are specifically arc structures; the width of the arc structure is half of the width of the annular structure 14 .
[0082] The angle of the arc structure is 58° to 60°.
[0083] A plurality of mass blocks 18 are distributed inside the annular structure 14 .
[0084] The mass block 18 is used to reduce the in-plane modal vibration frequency of the annular structure 14 so that the in-plane modal vibration frequency of the annular structure 14 approaches the out-of-plane modal vibration frequency of the annular structure 14 .
[0085] Optionally, the mass block 18 is a circular mass block, which is mounted on the ring structure 14 through a small beam. For a specific embodiment of the mass block 18 being mounted on the ring structure 14 through a small beam, see Figure 8 .
[0086] It is understandable that the mass block 18 reduces the in-plane modal vibration frequency so that the in-plane modal vibration frequency of the annular structure 14 approaches the out-of-plane modal vibration frequency of the annular structure 14 , thereby achieving a modal matching effect.
[0087] Furthermore, the angle between each mass block 18 is 60°.
[0088] Optionally, the angle of the annular structure 14 is 360°, and the angle between each mass block 18 is 60°, that is, there are 6 mass blocks 18 at this time, and the angle between every two mass blocks 18 is 60°.
[0089] The electrostatic electrodes 19 are distributed around the outer side of the ring structure 14 and connected to the device layer.
[0090] The electrostatic electrode 19 is used to adjust the in-plane modal vibration frequency of the ring structure 14 based on the applied DC voltage.
[0091] It can be understood that when a DC voltage is applied to the electrostatic electrode 19 , the targeted frequency of the in-plane mode of the annular structure 14 is adjusted to achieve modal matching.
[0092] Specifically, there may be four electrostatic electrodes 19 , which are distributed around the annular structure 14 .
[0093] Furthermore, there is a gap between the electrostatic electrode 19 and the annular structure 14 .
[0094] Optionally, the gap between the electrostatic electrode 19 and the annular structure 14 includes but is not limited to: 1 μm to 5 μm.
[0095] Furthermore, the electrostatic electrode 19 is disposed between the two top electrodes 17 . The electrostatic electrode 19 is specifically an arc structure; the angle of the arc structure is 60°.
[0096] In summary, the gyroscope structure including the electrostatic electrodes and the piezoelectric electrodes is rationally designed according to the vibration mode characteristics of the gyroscope, and the vibration frequency of the in-plane mode is adjusted by the electrostatic electrodes so that the vibration frequencies of the in-plane mode and the out-of-plane mode of the gyroscope structure match.
[0097] Corresponding to the gyro structure provided in the above embodiment of the application, the embodiment of the present application further provides a modal matching method, which is applicable to the gyro structure mentioned in the above embodiment of the present application, such as Figure 9 Shown, including:
[0098] S901: After applying an AC voltage to the piezoelectric layer using the top electrode and the device layer electrode, the gyro structure is driven using the piezoelectric layer.
[0099] It can be understood that by applying an AC voltage to the piezoelectric layer through the top electrode and the device layer electrode, the piezoelectric layer can be deformed through the piezoelectric effect, thereby driving the gyro structure.
[0100] S902: Obtain vibration frequencies of the in-plane mode and out-of-plane mode of the gyro structure.
[0101] Among them, the in-plane mode refers to the vibration mode of the structure in the horizontal plane, while the out-of-plane mode refers to the vibration mode perpendicular to the horizontal plane.
[0102] It is understandable that the vibration frequencies of the in-plane mode and the out-of-plane mode of the gyro structure are obtained so that the mode matching can be confirmed later based on the vibration frequencies of the in-plane mode and the out-of-plane mode. If there is no mode matching, corresponding adjustments are required to make the mode matching. The vibration state of the out-of-plane mode and the vibration state of the in-plane mode can be found in Figure 10 .
[0103] S903: When the vibration frequency of the in-plane mode is inconsistent with the vibration frequency of the out-of-plane mode, the vibration frequency of the in-plane mode is adjusted by using the mass block and the electrostatic electrode to obtain an adjusted vibration frequency of the in-plane mode.
[0104] It can be understood that when the vibration frequency of the in-plane mode is inconsistent with the vibration frequency of the out-of-plane mode, the vibration frequency of the in-plane mode is first reduced by the mass block, and then a DC voltage is applied to the electrostatic electrode to adjust the vibration frequency of the in-plane mode to obtain the adjusted vibration frequency of the in-plane mode.
[0105] S904: When the adjusted vibration frequency of the in-plane mode is consistent with the vibration frequency of the out-of-plane mode, it is determined that the in-plane mode and the out-of-plane mode match.
[0106] Optionally, after determining that the in-plane mode and the out-of-plane mode match, an AC signal is applied to the piezoelectric electrode of the gyroscope in the out-of-plane driving mode, and the frequency of the AC signal is kept the same as the frequency of the out-of-plane driving mode, so as to drive the gyroscope at the resonant frequency of the vibration of the out-of-plane mode; by detecting the amplitude of the sinusoidal signal on the piezoelectric electrode of the gyroscope in the out-of-plane driving mode, the amplitude of the driving sinusoidal signal is dynamically adjusted through negative feedback, so as to achieve amplitude stabilization of the driving mode and keep it in oscillation with equal displacement amplitude.
[0107] It's important to note that when in-plane rotation occurs, the Coriolis force couples the vibration of the driving mode to the detection mode, causing sinusoidal vibration in the detection mode. The vibration amplitude of the detection mode is extracted using the piezoelectric electrodes of the gyroscope in the detection mode. Because the amplitude of the detection mode is proportional to the magnitude of the rotation, this amplitude can be considered a signal of in-plane rotation.
[0108] Alternatively, angular rate detection can be performed using a closed-loop detection method. After extracting the vibration amplitude of the gyroscope in the detection mode, a sinusoidal signal can be applied to the gyroscope's drive electrodes in the detection mode through a negative feedback closed loop to suppress the vibration caused by the rotation in the detection mode. At this point, the vibration of the gyroscope in the detection mode is nearly suppressed, and the magnitude of the applied sinusoidal signal can be considered to reflect the angular rate of rotation.
[0109] In summary, the vibration frequency of the in-plane mode is adjusted by the mass block and the electrostatic electrode so that the vibration frequency of the adjusted in-plane mode is consistent with the vibration frequency of the out-of-plane mode, thus achieving modal matching. Modal matching can enable the gyro structure to achieve the best working state within a specific frequency range, thereby optimizing the performance of the gyro structure.
[0110] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for system or system embodiments, since they are basically similar to method embodiments, the description is relatively simple, and the relevant parts can be referred to the partial description of the method embodiment. The system and system embodiments described above are merely schematic, wherein the units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place, or they may be distributed on multiple network units. Some or all of the modules can be selected according to actual needs to achieve the purpose of the solution of this embodiment. Ordinary technicians in this field can understand and implement it without expending creative work.
[0111] Professionals may further appreciate that the units and algorithm steps of each example described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, computer software, or a combination of the two. In order to clearly illustrate the interchangeability of hardware and software, the above description has generally described the components and steps of each example according to their functions. Whether these functions are performed in hardware or software depends on the specific application and design constraints of the technical solution. Professionals and technicians may use different methods to implement the described functions for each specific application, but such implementation should not be considered beyond the scope of the present invention.
[0112] The above description of the disclosed embodiments is intended to enable one skilled in the art to implement or use the present application. Various modifications to these embodiments will be readily apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application is not limited to the embodiments shown herein, but is intended to conform to the widest scope consistent with the principles and novel features disclosed herein.
Claims
1. A gyro structure, characterized in that: The gyroscope includes: a device layer, on which movable structures and immovable structures are distributed; a ring structure suspended above the device layer and connected to the device layer via an anchor point; a metal electrode located on the immovable structure and connected to the device layer; a piezoelectric layer located on the movable structure and connected to the device layer, and a top electrode disposed on the piezoelectric layer; a plurality of mass blocks distributed inside the annular structure, the mass blocks being used to reduce the in-plane modal vibration frequency of the annular structure so that the in-plane modal vibration frequency of the annular structure approaches the out-of-plane modal vibration frequency of the annular structure; The electrostatic electrodes are distributed around the outer side of the annular structure and connected to the device layer. The electrostatic electrodes are used to adjust the in-plane modal vibration frequency of the annular structure based on the applied DC voltage.
2. The gyro structure according to claim 1, characterized in that: The top electrode includes: an out-of-plane mode driving electrode, an in-plane mode driving electrode, and an in-plane mode detection electrode; A group of the out-of-plane modal drive electrodes and the in-plane modal drive electrodes, as well as a group of the out-of-plane modal drive electrodes and the in-plane modal detection electrodes are respectively provided on adjacent movable structures; the out-of-plane modal drive electrodes are used to apply an AC voltage; the in-plane modal drive electrodes are used to apply an AC voltage; and the in-plane modal detection electrodes are used to detect the voltage of the piezoelectric layer; On the adjacent movable structures, the out-of-plane modal driving electrode on one movable structure is mirror-symmetrical to the out-of-plane modal driving electrode on the other movable structure; On the adjacent movable structures, the in-plane modal driving electrodes on one movable structure are mirror-symmetrical to and adjacent to the in-plane modal detection electrodes on the other movable structure.
3. The gyro structure according to claim 2, characterized in that: The in-plane mode driving electrode covers the outer side of the annular structure, and the in-plane mode detection electrode covers the inner side of the annular structure; The out-of-plane mode driving electrode covers the upper surface of the annular structure.
4. The gyro structure according to claim 2, characterized in that: The out-of-plane modal driving electrode is specifically an arc structure; the width of the arc structure is consistent with the width of the ring structure; The in-plane modal driving electrode and the in-plane modal detection electrode are specifically arc structures; the width of the arc structure is half of the width of the ring structure.
5. The gyro structure according to claim 1, characterized in that: The angle between each mass block is 60°.
6. The gyro structure according to claim 1, characterized in that: The annular structure is connected to the device layer via a plurality of anchor points, and the angle between each anchor point and the horizontal direction is n*60°, where n=-1, -2, 1 or 2.
7. The gyro structure according to claim 1, characterized in that: The electrostatic electrode is arranged between the two top electrodes, and the electrostatic electrode is specifically an arc structure; the angle of the arc structure is 60°.
8. The gyro structure according to claim 1, characterized in that: There is a gap between the electrostatic electrode and the annular structure.
9. The gyro structure according to claim 1, characterized in that: The movable structure has a hollow area, the hollow area is provided with the non-movable structure, and the non-movable structure is provided with a metal electrode connected to the device layer.
10. A modal matching method, characterized in that: The gyro structure according to any one of claims 1 to 9 comprises: After applying an AC voltage to the piezoelectric layer using the top electrode and the device layer electrode, the piezoelectric layer is used to drive the gyro structure; Obtaining vibration frequencies of an in-plane mode and an out-of-plane mode of the gyro structure; When the vibration frequency of the in-plane mode is inconsistent with the vibration frequency of the out-of-plane mode, the vibration frequency of the in-plane mode is adjusted by using the mass block and the electrostatic electrode to obtain the adjusted vibration frequency of the in-plane mode; When the adjusted vibration frequency of the in-plane mode is consistent with the vibration frequency of the out-of-plane mode, it is determined that the in-plane mode and the out-of-plane mode match.