Static trimming method and device for frequency of piezoelectric gyroscope

Abstract

The invention discloses an electrostatic trimming method and device for frequency of a piezoelectric gyroscope, the electrostatic trimming method and device are applied to the piezoelectric gyroscope, the piezoelectric gyroscope comprises electrostatic electrodes and a closed structure, the electrostatic electrodes are distributed around the closed structure and connected with a semiconductor material, sinusoidal signals are applied to the piezoelectric electrodes of the piezoelectric gyroscope in a detection mode and a driving mode, and the frequency of the piezoelectric gyroscope is adjusted according to the sinusoidal signals. Obtaining a frequency sweeping result of the detection mode and a frequency sweeping result of the driving mode; adjusting the voltage of the electrostatic electrode of the piezoelectric gyroscope in the detection mode according to the frequency sweep result of the detection mode and the frequency sweep result of the driving mode; and when the adjusted frequency of the detection mode is consistent with the frequency of the driving mode, determining that the detection mode and the driving mode of the piezoelectric gyroscope are matched. The voltage of the electrostatic electrode of the piezoelectric gyroscope in the detection mode is adjusted again according to the frequency sweeping result, and the frequency can be trimmed according to different requirements until the requirements are met, so that the flexibility of the piezoelectric gyroscope in practical application is improved.

Description

Technical Field

[0001] The present application relates to the technical field of gyroscopes, and in particular to a method and device for electrostatically adjusting the frequency of a piezoelectric gyroscope. Background Art

[0002] Due to their small size and light weight, piezoelectric gyroscopes are widely used in applications such as unmanned vehicles, autonomous driving, and portable navigation. Piezoelectric gyroscopes consist of two orthogonal resonators. For a modally matched gyroscope, gyro sensitivity is highest when the resonant frequencies of the two resonators are identical. However, due to various errors in the gyroscope manufacturing process, even if the two frequencies are identical during design, they can still differ after processing (i.e., modal splitting).

[0003] To address modal splitting, mechanical tuning is often employed. This involves laser ablation of the structure to alter the stiffness and mass distribution of the piezoelectric gyroscope. However, since mechanical tuning is a one-time process, the frequency cannot be adjusted again in subsequent uses. Consequently, it cannot adapt to modal frequency changes caused by environmental factors (such as temperature), resulting in limited flexibility in practical applications.

[0004] Therefore, how to improve the flexibility of piezoelectric gyroscopes in practical applications has become an urgent problem to be solved in this field. Summary of the Invention

[0005] The present application provides a method and device for electrostatically adjusting the frequency of a piezoelectric gyroscope, the purpose of which is to improve the flexibility of the piezoelectric gyroscope in practical applications.

[0006] In order to achieve the above objectives, this application provides the following technical solutions:

[0007] A method for electrostatically adjusting the frequency of a piezoelectric gyroscope is applied to a piezoelectric gyroscope. The piezoelectric gyroscope includes: electrostatic electrodes and a closed structure. The electrostatic electrodes are distributed around the closed structure and connected to a semiconductor material, including:

[0008] Applying a sinusoidal signal to the piezoelectric electrodes of the piezoelectric gyroscope in the detection mode and the driving mode to obtain a frequency sweep result of the detection mode and a frequency sweep result of the driving mode; wherein, when the piezoelectric gyroscope is in the detection mode, the electrostatic electrode is at a maximum position of the detection mode displacement; when the piezoelectric gyroscope is in the driving mode, the electrostatic electrode is at a minimum position of the driving mode displacement; the frequency of the driving mode is less than the frequency of the detection mode; and the frequency sweep result of the driving mode includes the frequency of the driving mode;

[0009] adjusting the voltage of the electrostatic electrode of the piezoelectric gyroscope in the detection mode according to the frequency sweep result of the detection mode and the frequency sweep result of the driving mode to obtain an adjusted frequency of the detection mode;

[0010] When the frequency of the adjusted detection mode is consistent with the frequency of the driving mode, it is determined that the detection mode and the driving mode of the piezoelectric gyroscope match.

[0011] Optionally, applying a sinusoidal signal to the piezoelectric electrodes of the piezoelectric gyroscope in the detection mode and the driving mode to obtain a frequency sweep result of the detection mode and a frequency sweep result of the driving mode includes:

[0012] Applying sinusoidal signals to the piezoelectric electrodes of the piezoelectric gyroscope in the detection mode and the driving mode in order of signal frequency from low to high;

[0013] After applying the sinusoidal signal, monitoring the output amplitude of the piezoelectric gyroscope in the detection mode and the output amplitude of the piezoelectric gyroscope in the drive mode;

[0014] The output amplitude of the piezoelectric gyroscope in the detection mode is determined as a frequency sweep result of the detection mode, and the output amplitude of the piezoelectric gyroscope in the driving mode is determined as a frequency sweep result of the driving mode.

[0015] Optionally, adjusting the voltage of the electrostatic electrode of the piezoelectric gyroscope in the detection mode according to the frequency sweep result of the detection mode and the frequency sweep result of the driving mode to obtain the adjusted frequency of the detection mode includes:

[0016] The highest positions of the output amplitudes in the sweep frequency results of the detection mode and the sweep frequency results of the driving mode are respectively determined as the detection resonance peak and the driving resonance peak;

[0017] Applying a voltage to the electrostatic electrode of the piezoelectric gyroscope in the detection mode and increasing the voltage according to a preset rate to reduce the frequency of the detection mode;

[0018] When it is detected that the distance between the detection resonance peak and the driving resonance peak is a preset minimum distance, obtaining the frequency of the current detection mode;

[0019] The frequency of the current detection mode is determined as the frequency of the adjusted detection mode.

[0020] Optionally, also include:

[0021] When the detection mode of the piezoelectric gyroscope matches the driving mode, locking the frequency of the driving mode using a phase-locked loop;

[0022] After the frequency of the driving mode is locked, a closed-loop controller is used to lock the demodulation amplitude of the driving mode.

[0023] Optionally, also include:

[0024] applying a sinusoidal electrical signal to the piezoelectric electrodes of the piezoelectric gyroscope to suppress vibration of the piezoelectric gyroscope in the detection mode;

[0025] or,

[0026] The vibration of the piezoelectric gyroscope in the detection mode is suppressed by using a controller, and an output signal of the controller is used as an angular velocity signal.

[0027] A piezoelectric gyroscope frequency electrostatic adjustment device is applied to the piezoelectric gyroscope. The piezoelectric gyroscope includes: electrostatic electrodes and a closed structure. The electrostatic electrodes are distributed around the closed structure and connected to the semiconductor material, including:

[0028] an applying unit, configured to apply a sinusoidal signal to the piezoelectric electrodes of the piezoelectric gyroscope in a detection mode and a driving mode, to obtain a frequency sweep result of the detection mode and a frequency sweep result of the driving mode; wherein, when the piezoelectric gyroscope is in the detection mode, the electrostatic electrode is at a maximum position of the detection mode displacement; when the piezoelectric gyroscope is in the driving mode, the electrostatic electrode is at a minimum position of the driving mode displacement; the frequency of the driving mode is less than the frequency of the detection mode; and the frequency sweep result of the driving mode includes the frequency of the driving mode;

[0029] an adjusting unit, configured to adjust the voltage of the electrostatic electrode of the piezoelectric gyroscope in the detection mode according to the frequency sweep result of the detection mode and the frequency sweep result of the driving mode, so as to obtain an adjusted frequency of the detection mode;

[0030] The determining unit is configured to determine that the detection mode and the driving mode of the piezoelectric gyroscope match when the frequency of the adjusted detection mode is consistent with the frequency of the driving mode.

[0031] Optionally, the applying unit is specifically used for:

[0032] Applying sinusoidal signals to the piezoelectric electrodes of the piezoelectric gyroscope in the detection mode and the driving mode in order of signal frequency from low to high;

[0033] After applying the sinusoidal signal, monitoring the output amplitude of the piezoelectric gyroscope in the detection mode and the output amplitude of the piezoelectric gyroscope in the drive mode;

[0034] The output amplitude of the piezoelectric gyroscope in the detection mode is determined as a frequency sweep result of the detection mode, and the output amplitude of the piezoelectric gyroscope in the driving mode is determined as a frequency sweep result of the driving mode.

[0035] Optionally, the adjusting unit is specifically configured to:

[0036] The highest positions of the output amplitudes in the sweep frequency results of the detection mode and the sweep frequency results of the driving mode are respectively determined as the detection resonance peak and the driving resonance peak;

[0037] Applying a voltage to the electrostatic electrode of the piezoelectric gyroscope in the detection mode and increasing the voltage according to a preset rate to reduce the frequency of the detection mode;

[0038] When it is detected that the distance between the detection resonance peak and the driving resonance peak is a preset minimum distance, obtaining the frequency of the current detection mode;

[0039] The frequency of the current detection mode is determined as the frequency of the adjusted detection mode.

[0040] Optionally, also include:

[0041] a locking unit, configured to lock the frequency of the driving mode using a phase-locked loop after the detection mode of the piezoelectric gyroscope matches the driving mode;

[0042] The amplitude locking unit is used to lock the demodulation amplitude of the driving mode using a closed-loop controller after the frequency of the driving mode is locked.

[0043] Optionally, also include:

[0044] a first suppression unit, configured to apply a sinusoidal electrical signal to the piezoelectric electrodes of the piezoelectric gyroscope to suppress vibration of the piezoelectric gyroscope in the detection mode;

[0045] or,

[0046] The second suppression unit is configured to suppress the vibration of the piezoelectric gyroscope in the detection mode by using a controller, and use an output signal of the controller as an angular velocity signal.

[0047] The technical solution provided in this application is applied to a piezoelectric gyroscope. The piezoelectric gyroscope includes: an electrostatic electrode and a closed structure. The electrostatic electrodes are distributed around the closed structure and connected to a semiconductor material. A sinusoidal signal is applied to the piezoelectric electrode of the piezoelectric gyroscope in the detection mode and the drive mode to obtain a frequency sweep result of the detection mode and a frequency sweep result of the drive mode. According to the frequency sweep result of the detection mode and the frequency sweep result of the drive mode, the voltage of the electrostatic electrode of the piezoelectric gyroscope in the detection mode is adjusted. When the frequency of the adjusted detection mode is consistent with the frequency of the drive mode, it is determined that the detection mode and the drive mode of the piezoelectric gyroscope match. The voltage of the electrostatic electrode of the piezoelectric gyroscope in the detection mode is adjusted again based on the frequency sweep result. The frequency can be adjusted according to different needs until the needs are met, thereby improving the flexibility of the piezoelectric gyroscope in practical applications. BRIEF DESCRIPTION OF THE DRAWINGS

[0048] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0049] Figure 1 A flow chart of a method for electrostatically adjusting the frequency of a piezoelectric gyroscope provided in an embodiment of the present application;

[0050] Figure 2 A schematic diagram of an antinode and a node provided in an embodiment of the present application;

[0051] Figure 3 A flow chart of a frequency sweeping method for a piezoelectric electrode provided in an embodiment of the present application;

[0052] Figure 4 A flowchart of a detection mode adjustment method provided in an embodiment of the present application;

[0053] Figure 5 A schematic diagram of a frequency sweep result provided in an embodiment of the present application;

[0054] Figure 6 A schematic diagram of a resonance peak provided in an embodiment of the present application;

[0055] Figure 7 A flowchart of a method for determining modal matching provided in an embodiment of the present application;

[0056] Figure 8 A schematic diagram of a donut-shaped roll / pitch axis gyroscope provided in an embodiment of the present application;

[0057] Figure 9A frequency change schematic diagram provided in an embodiment of the present application;

[0058] Figure 10 A schematic diagram of frequency variation with tuning voltage provided in an embodiment of the present application;

[0059] Figure 11 A schematic diagram of the structure of an electrostatic frequency adjustment device for a piezoelectric gyroscope provided in an embodiment of the present application. DETAILED DESCRIPTION

[0060] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0061] In this application, the terms "comprises," "comprising," or any other variations thereof are intended to encompass non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus. In the absence of further limitations, an element defined by the phrase "comprising a ..." does not preclude the presence of additional identical elements in the process, method, article, or apparatus that includes the element.

[0062] like Figure 1 FIG. 1 is a flow chart of a method for electrostatically adjusting the frequency of a piezoelectric gyroscope provided in an embodiment of the present application. The method is applied to a piezoelectric gyroscope. The piezoelectric gyroscope includes: electrostatic electrodes and a closed structure. The electrostatic electrodes are distributed around the closed structure and connected to a semiconductor material. The method includes the following steps:

[0063] It should be noted that the closed structure includes but is not limited to: annular structure, solid disk, polygonal disk, hemispherical structure, and the annular structure includes but is not limited to: single circular ring structure, nested ring structure, and ring-like polygonal structure.

[0064] Optionally, the electrostatic electrodes are distributed outside the annular structure or around the inner portion.

[0065] It should be emphasized that the above mentioned materials include but are not limited to: silicon, gallium nitride, silicon carbide, etc.

[0066] S101: applying a sinusoidal signal to the piezoelectric electrodes of the piezoelectric gyroscope in the detection mode and the driving mode to obtain a frequency sweep result of the detection mode and a frequency sweep result of the driving mode.

[0067] Among them, when the piezoelectric gyroscope is in the detection mode, the electrostatic electrode is at the maximum position of the detection mode displacement; when the piezoelectric gyroscope is in the driving mode, the electrostatic electrode is at the minimum position of the driving mode displacement; the frequency of the driving mode is less than the frequency of the detection mode; the sweep result of the driving mode includes the frequency of the driving mode.

[0068] The so-called driving mode is essentially the mode or signal used to excite or drive the gyroscope's motion. It can be thought of as an input signal that excites the gyroscope system to produce the corresponding motion.

[0069] The so-called detection mode is essentially the mode or signal used to detect and measure gyroscope motion in the gyroscope system. It can be regarded as an output signal used to obtain information about physical quantities in the gyroscope system.

[0070] It should be noted that when the piezoelectric gyroscope is in detection mode, the electrostatic electrode is at its maximum displacement in the detection mode; when the piezoelectric gyroscope is in drive mode, the electrostatic electrode is at its minimum displacement in the drive mode, to achieve optimal frequency coordination. Because piezoelectric gyroscopes often utilize a solid-state wave design, the electrostatic electrode should be positioned at the antinode of the vibration mode generated by the piezoelectric gyroscope in detection mode. This location often corresponds to the node point of the vibration mode in the detection mode. Because the displacement at the node point is extremely small, the electrode only limits the displacement of the detection mode and hardly restricts the displacement of the drive mode.

[0071] Optional, see Figure 2 , which is a schematic diagram of wave antinodes and wave nodes. A wave node refers to the point or position where the amplitude is the smallest and the displacement is zero during the propagation of a wave; while an antinode refers to the point or position where the amplitude is the largest and the displacement reaches an extreme value during the propagation of a wave. Figure 2 This is the wine glass mode of the solid wave gyroscope in the plane. It can be seen that the electrostatic electrode of the piezoelectric gyroscope in the detection mode is located at the wave node, which basically does not limit the displacement of the piezoelectric gyroscope in the driving mode.

[0072] It can be understood that applying a sinusoidal signal to the piezoelectric electrodes of the piezoelectric gyroscope in the detection mode and the driving mode causes the piezoelectric gyroscope in the detection mode and the driving mode to generate an amplitude signal. Sinusoidal signals of different frequencies will generate different amplitude signals for the piezoelectric gyroscope in the detection mode and the driving mode, that is, the frequency sweep results of the detection mode and the frequency sweep results of the driving mode are different.

[0073] Optionally, in another embodiment of the present application, the specific implementation of step S101 is as follows: Figure 3 As shown, the following steps are included:

[0074] S301: applying sinusoidal signals to the piezoelectric electrodes of the piezoelectric gyroscope in the detection mode and the driving mode in order of signal frequency from low to high.

[0075] It can be understood that a sinusoidal signal is applied to the piezoelectric electrodes of the piezoelectric gyroscope in the detection mode and the driving mode in the order of signal frequency from low to high, that is, the sinusoidal signal frequency changes from low to high to apply a sinusoidal signal to the piezoelectric electrodes of the piezoelectric gyroscope.

[0076] S302: After applying the sinusoidal signal, monitor the output amplitude of the piezoelectric gyroscope in the detection mode and the output amplitude of the piezoelectric gyroscope in the driving mode.

[0077] It should be noted that the output amplitude of the piezoelectric gyroscope in the detection mode and the output amplitude of the piezoelectric gyroscope in the drive mode are monitored. The output amplitude can reflect the frequency of the detection mode and the frequency of the drive mode, and the frequency is used to determine whether the modes match at this time; if not, corresponding steps need to be performed to make the modes match.

[0078] S303: Determine the output amplitude of the piezoelectric gyroscope in the detection mode as a frequency sweep result of the detection mode, and determine the output amplitude of the piezoelectric gyroscope in the driving mode as a frequency sweep result of the driving mode.

[0079] It should be noted that by determining the output amplitude of the piezoelectric gyroscope in the detection mode as the sweep result of the detection mode, and determining the output amplitude of the piezoelectric gyroscope in the driving mode as the sweep result of the driving mode, the performance of the gyroscope can be evaluated and adjusted, and its frequency response and excitation effect can be understood, thereby providing guidance and reference for the application and optimization of the gyroscope.

[0080] S102: According to the frequency sweep result of the detection mode and the frequency sweep result of the driving mode, the voltage of the electrostatic electrode of the piezoelectric gyroscope in the detection mode is adjusted to obtain the frequency of the detection mode after adjustment.

[0081] It can be understood that since the highest position of the output amplitude in the sweep frequency result of the detection mode is inconsistent with the highest position of the output amplitude in the sweep frequency result of the driving mode, the highest position of the output amplitude in the sweep frequency result of the driving mode is used as a reference to adjust the voltage of the electrostatic electrode of the piezoelectric gyroscope in the detection mode to obtain the frequency of the adjusted detection mode, so that the frequency of the adjusted detection mode is consistent with the frequency of the detection mode in the sweep frequency result of the driving mode.

[0082] It should be noted that, based on the sweep frequency results of the detection mode and the sweep frequency results of the driving mode, the voltage of the electrostatic electrode of the piezoelectric gyroscope in the detection mode is adjusted, that is, the frequency of the detection mode is reduced by utilizing the spring softening effect, so that the piezoelectric gyroscope is affected by the spring effect during the vibration motion, thereby reducing the frequency of the detection mode.

[0083] Optionally, in another embodiment of the present application, the specific implementation of step S102 is as follows: Figure 4 As shown, the following steps are included:

[0084] S401: Determine the highest position of the output amplitude in the frequency sweep result of the detection mode and the frequency sweep result of the drive mode as the detection resonance peak and the drive resonance peak respectively.

[0085] The detection resonance peak indicates the peak value of the output amplitude of the piezoelectric gyroscope in the detection mode, and the driving resonance peak indicates the peak value of the output amplitude of the piezoelectric gyroscope in the driving mode.

[0086] Understandably, see Figure 5 , are the sweep results of the detection mode and the sweep results of the drive mode. The highest position of the output amplitude in the sweep results of the detection mode and the drive mode is determined as the detection resonance peak and the drive resonance peak, respectively. In other words, the peak value of the output amplitude in the sweep results of the detection mode is used as the detection resonance peak, and the peak value of the output amplitude in the sweep results of the drive mode is used as the drive resonance peak.

[0087] S402: applying a voltage to the electrostatic electrode of the piezoelectric gyroscope in the detection mode, and boosting the voltage according to a preset rate to reduce the frequency of the detection mode.

[0088] Optionally, the voltage applied to the electrostatic electrodes of the piezoelectric gyroscope in the detection mode includes but is not limited to a DC voltage.

[0089] It can be understood that when a voltage is applied to the electrostatic electrode of the piezoelectric gyroscope in the detection mode, the larger the voltage value is, the more the frequency of the detection mode is reduced. Therefore, it is necessary to increase the voltage according to a preset rate to reduce the frequency of the detection mode.

[0090] S403: When it is detected that the distance between the detection resonance peak and the driving resonance peak is a preset minimum distance, the frequency of the current detection mode is obtained.

[0091] Optionally, the preset minimum distance can be set according to actual conditions and is not specifically limited here.

[0092] It can be understood that when it is detected that the distance between the detection resonance peak and the driving resonance peak is the preset minimum distance, that is, when the detection resonance peak and the driving resonance peak almost coincide with each other, the frequency of the current detection mode is obtained so that the piezoelectric gyroscope can be subsequently determined whether it has reached a modal matching state based on the frequency of the current detection mode.

[0093] S404: Determine the frequency of the current detection mode as the frequency of the adjusted detection mode.

[0094] It can be understood that by applying a DC voltage to the electrostatic electrodes of the piezoelectric gyroscope in the detection mode, the frequency of the detection mode is adjusted. Once the adjustment is completed, the frequency of the current detection mode needs to be re-determined to ensure that the frequency of the adjusted detection mode meets the requirements.

[0095] S103: When the frequency of the adjusted detection mode is consistent with the frequency of the driving mode, it is determined that the detection mode and the driving mode of the piezoelectric gyroscope match.

[0096] It can be understood that when the distance between the detection resonance peak and the drive resonance peak is the preset minimum distance (that is, when the detection resonance peak and the drive resonance peak almost coincide with each other), it can be determined that the frequency of the adjusted detection mode is consistent with the frequency of the drive mode, and then the detection mode and the drive mode of the piezoelectric gyroscope are matched. The state in which the detection resonance peak and the drive resonance peak almost coincide with each other can be seen in FIG. Figure 6 .

[0097] Optionally, after step S103, after the detection mode and the driving mode of the piezoelectric gyroscope are matched, the driving mode in the matching state can be phase locked and the amplitude stabilized to ensure that the phase difference between the driving mode and the detection mode remains constant. Therefore, another embodiment of the present application provides an amplitude locking method, such as Figure 7 Shown, including:

[0098] S701: When the detection mode and the driving mode of the piezoelectric gyroscope match, the frequency of the driving mode is locked using a phase-locked loop.

[0099] When the detection mode and the driving mode of the piezoelectric gyroscope match, the magnitude of the tuning voltage is V1.

[0100] It is understandable that when the detection mode and driving mode of the piezoelectric gyroscope match, in order to keep the frequency of the driving mode stable and ensure that the driving mode and the detection mode maintain the same frequency, a phase-locked loop needs to be used to lock the frequency of the driving mode.

[0101] S702: After the frequency of the driving mode is locked, the demodulated amplitude of the driving mode is locked using a closed-loop controller.

[0102] It can be understood that when the frequency of the driving mode is locked, the output signal amplitude is proportional to the angular velocity. Therefore, maintaining a stable output signal amplitude can improve the measurement accuracy of the piezoelectric gyroscope. Therefore, a closed-loop controller is needed to lock the demodulated amplitude of the driving mode.

[0103] Optionally, in order to suppress the vibration of the detection mode caused by non-ideal stiffness coupling, it is necessary to suppress the vibration of the detection mode by corresponding means to improve the performance and stability of the gyroscope. Therefore, another embodiment of the present application provides a method for suppressing the vibration of the detection mode, including:

[0104] A sinusoidal electric signal is applied to the piezoelectric electrodes of the piezoelectric gyroscope to suppress the vibration of the piezoelectric gyroscope in the detection mode.

[0105] Among them, by applying a sinusoidal electric signal to the piezoelectric electrodes of the piezoelectric gyroscope, the vibration of the piezoelectric gyroscope in the detection mode is suppressed. The vibration is not generated by the Coriolis force, but is directly coupled from the driving mode through non-ideal mechanical errors.

[0106] or,

[0107] A controller is used to suppress the vibration of the piezoelectric gyroscope in the detection mode, and the output signal of the controller is used as an angular velocity signal.

[0108] A controller is used to suppress the vibration of the piezoelectric gyroscope in the detection mode, and the controller's output signal is used as the angular velocity signal. This force-balancing operation is performed on the detection signal in the detection mode. This force-balancing operation can expand the gyroscope's detection bandwidth. Unlike traditional electrostatic and piezoelectric gyroscopes, the sinusoidal signal output by the controller can be applied to both the piezoelectric and electrostatic electrodes.

[0109] In summary, the voltage of the electrostatic electrode of the piezoelectric gyroscope in the detection mode is readjusted through the frequency sweep results, so that the frequency of the adjusted detection mode is consistent with the frequency of the driving mode. The frequency can be adjusted according to different needs until the needs are met, thereby improving the flexibility of the piezoelectric gyroscope in practical applications.

[0110] Combine Figure 1 The following is a detailed description of the content shown in the figure. Figure 1 For an explanation of the contents, see Figure 8 , is a schematic diagram of a circular roll / pitch axis gyroscope shown in an embodiment of the present application, from Figure 8 As can be seen from the figure, the driving mode is the third out-of-plane mode, and the detection mode is the second in-plane mode. The static adjustment method of the annular roll / pitch axis gyroscope includes steps A1 to A3.

[0111] A1: Apply a sinusoidal signal to the piezoelectric electrodes of the donut-shaped roll / pitch gyroscope in the detection mode and the driving mode to obtain the sweep frequency results of the detection mode and the driving mode.

[0112] The frequency sweep result of the driving mode includes the frequency of the driving mode.

[0113] The electrostatic electrodes are arranged at the antinodes of the annular roll / pitch axis gyroscope in the detection mode, and the electrostatic electrodes are arranged at the nodes of the annular roll / pitch axis gyroscope in the driving mode.

[0114] Optionally, the electrostatic electrode is the electrostatic tuning electrode in the figure.

[0115] A2: Applying a voltage to the electrostatic electrodes of the donut-shaped roll / pitch gyroscope in the detection mode and increasing the voltage according to a preset rate to reduce the frequency of the detection mode, thereby obtaining an adjusted frequency of the detection mode.

[0116] It can be understood that applying voltage to the electrostatic electrodes of the annular roll / pitch gyroscope in the detection mode causes the annular roll / pitch gyroscope in the detection mode and the driving mode to change in frequency with the change of the tuning voltage. The frequency changes of the two modes can be seen in Figure 9 .

[0117] See also Figure 9 , it can be seen that the frequency of the driving mode remains essentially unchanged, while the frequency of the detection mode decreases quadratically with increasing voltage. When the voltage is approximately 35V, the donut-shaped roll / pitch gyro achieves mode matching operation.

[0118] See also Figure 10 , is the frequency difference between the two modes and the change with the increase of tuning voltage, that is, the frequency of the driving mode and the frequency of the detection mode change with the increase of tuning voltage.

[0119] A3: When the frequency of the adjusted detection mode is consistent with the frequency of the driving mode, it is determined that the detection mode and the driving mode of the piezoelectric gyroscope match.

[0120] In summary, a voltage is applied to the electrostatic electrode of the circular roll / pitch axis gyroscope in the detection mode, and the voltage is boosted according to a preset rate to reduce the frequency of the detection mode, so that the frequency of the adjusted detection mode is consistent with the frequency of the driving mode. The frequency can be adjusted according to different needs, thereby increasing the practicality of the gyroscope.

[0121] like Figure 11 , which is a schematic diagram of the architecture of an electrostatic adjustment device for the frequency of a piezoelectric gyroscope provided in an embodiment of the present application, the electrostatic adjustment device includes: an applying unit 100 , an adjusting unit 200 and a determining unit 300 .

[0122] The applying unit 100 is used to apply a sinusoidal signal to the piezoelectric electrode of the piezoelectric gyroscope in the detection mode and the driving mode to obtain a frequency sweep result of the detection mode and a frequency sweep result of the driving mode; wherein, when the piezoelectric gyroscope is in the detection mode, the electrostatic electrode is at a maximum position of the detection mode displacement; when the piezoelectric gyroscope is in the driving mode, the electrostatic electrode is at a minimum position of the driving mode displacement; the frequency of the driving mode is less than the frequency of the detection mode; and the frequency sweep result of the driving mode includes the frequency of the driving mode.

[0123] The applying unit 100 is specifically used to: apply a sinusoidal signal to the piezoelectric electrodes of the piezoelectric gyroscope in the detection mode and the driving mode in the order of signal frequency from low to high; after applying the sinusoidal signal, monitor the output amplitude of the piezoelectric gyroscope in the detection mode and the output amplitude of the piezoelectric gyroscope in the driving mode; determine the output amplitude of the piezoelectric gyroscope in the detection mode as the frequency sweep result of the detection mode, and determine the output amplitude of the piezoelectric gyroscope in the driving mode as the frequency sweep result of the driving mode.

[0124] The adjustment unit 200 is configured to adjust the voltage of the electrostatic electrode of the piezoelectric gyroscope in the detection mode according to the frequency sweep result of the detection mode and the frequency sweep result of the driving mode, so as to obtain the frequency of the detection mode after adjustment.

[0125] The adjustment unit 200 is specifically used to: determine the highest position of the output amplitude in the sweep frequency results of the detection mode and the sweep frequency results of the drive mode as the detection resonance peak and the drive resonance peak, respectively; apply voltage to the electrostatic electrode of the piezoelectric gyroscope in the detection mode, and boost the voltage according to a preset rate to reduce the frequency of the detection mode; when it is detected that the distance between the detection resonance peak and the drive resonance peak is a preset minimum distance, obtain the frequency of the current detection mode; and determine the frequency of the current detection mode as the frequency of the adjusted detection mode.

[0126] The determining unit 300 is configured to determine that the detection mode and the driving mode of the piezoelectric gyroscope match when the frequency of the adjusted detection mode is consistent with the frequency of the driving mode.

[0127] In summary, the voltage of the electrostatic electrode of the piezoelectric gyroscope in the detection mode is readjusted through the frequency sweep results, so that the frequency of the adjusted detection mode is consistent with the frequency of the driving mode. The frequency can be adjusted according to different needs until the needs are met, thereby improving the flexibility of the piezoelectric gyroscope in practical applications.

[0128] Preferably, combined Figure 11As shown in the figure, the electrostatic adjustment device further includes: a locking unit and an amplitude locking unit.

[0129] A locking unit is configured to lock the frequency of the driving mode using a phase-locked loop after the detection mode and the driving mode of the piezoelectric gyroscope match.

[0130] The amplitude locking unit is used to lock the demodulation amplitude of the driving mode using a closed-loop controller after the frequency of the driving mode is locked.

[0131] Preferably, combined Figure 11 As shown in the figure, the electrostatic adjustment device further includes: a first suppression unit and a second suppression unit.

[0132] The first suppression unit is configured to apply a sinusoidal electrical signal to the piezoelectric electrodes of the piezoelectric gyroscope to suppress the vibration of the piezoelectric gyroscope in the detection mode.

[0133] or,

[0134] The second suppression unit is configured to suppress the vibration of the piezoelectric gyroscope in the detection mode by using a controller, and use an output signal of the controller as an angular velocity signal.

[0135] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for system or system embodiments, since they are basically similar to method embodiments, the description is relatively simple, and the relevant parts can be referred to the partial description of the method embodiment. The system and system embodiments described above are merely schematic, wherein the units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place, or they may be distributed on multiple network units. Some or all of the modules can be selected according to actual needs to achieve the purpose of the solution of this embodiment. Ordinary technicians in this field can understand and implement it without expending creative work.

[0136] Professionals may further appreciate that the units and algorithm steps of each example described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, computer software, or a combination of the two. In order to clearly illustrate the interchangeability of hardware and software, the above description has generally described the components and steps of each example according to their functions. Whether these functions are performed in hardware or software depends on the specific application and design constraints of the technical solution. Professionals and technicians may use different methods to implement the described functions for each specific application, but such implementation should not be considered beyond the scope of the present invention.

[0137] The above description of the disclosed embodiments is intended to enable one skilled in the art to implement or use the present application. Various modifications to these embodiments will be readily apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application is not limited to the embodiments shown herein, but is intended to conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A method for electrostatically adjusting the frequency of a piezoelectric gyroscope, characterized in that: Applied to a piezoelectric gyroscope, the piezoelectric gyroscope includes: an electrostatic electrode and a closed structure, the electrostatic electrodes are distributed around the closed structure and connected to a semiconductor material, including: Applying a sinusoidal signal to the piezoelectric electrodes of the piezoelectric gyroscope in the detection mode and the driving mode to obtain a frequency sweep result of the detection mode and a frequency sweep result of the driving mode; wherein, when the piezoelectric gyroscope is in the detection mode, the electrostatic electrode is at a maximum position of the detection mode displacement; when the piezoelectric gyroscope is in the driving mode, the electrostatic electrode is at a minimum position of the driving mode displacement; the frequency of the driving mode is less than the frequency of the detection mode; and the frequency sweep result of the driving mode includes the frequency of the driving mode; adjusting the voltage of the electrostatic electrode of the piezoelectric gyroscope in the detection mode according to the frequency sweep result of the detection mode and the frequency sweep result of the driving mode to obtain an adjusted frequency of the detection mode; When the frequency of the adjusted detection mode is consistent with the frequency of the driving mode, it is determined that the detection mode and the driving mode of the piezoelectric gyroscope match.

2. The method according to claim 1, characterized in that The step of applying a sinusoidal signal to the piezoelectric electrodes of the piezoelectric gyroscope in the detection mode and the driving mode to obtain a frequency sweep result of the detection mode and a frequency sweep result of the driving mode includes: Applying sinusoidal signals to the piezoelectric electrodes of the piezoelectric gyroscope in the detection mode and the driving mode in order of signal frequency from low to high; After applying the sinusoidal signal, monitoring the output amplitude of the piezoelectric gyroscope in the detection mode and the output amplitude of the piezoelectric gyroscope in the drive mode; The output amplitude of the piezoelectric gyroscope in the detection mode is determined as a frequency sweep result of the detection mode, and the output amplitude of the piezoelectric gyroscope in the driving mode is determined as a frequency sweep result of the driving mode.

3. The method according to claim 1, characterized in that The step of adjusting the voltage of the electrostatic electrode of the piezoelectric gyroscope in the detection mode according to the frequency sweep result of the detection mode and the frequency sweep result of the driving mode to obtain the frequency of the detection mode after adjustment includes: The highest positions of the output amplitudes in the sweep frequency results of the detection mode and the sweep frequency results of the driving mode are respectively determined as the detection resonance peak and the driving resonance peak; Applying a voltage to the electrostatic electrode of the piezoelectric gyroscope in the detection mode and increasing the voltage according to a preset rate to reduce the frequency of the detection mode; When it is detected that the distance between the detection resonance peak and the driving resonance peak is a preset minimum distance, obtaining the frequency of the current detection mode; The frequency of the current detection mode is determined as the frequency of the adjusted detection mode.

4. The method according to claim 1, wherein Also includes: When the detection mode of the piezoelectric gyroscope matches the driving mode, locking the frequency of the driving mode using a phase-locked loop; After the frequency of the driving mode is locked, a closed-loop controller is used to lock the demodulation amplitude of the driving mode.

5. The method according to claim 1, wherein Also includes: applying a sinusoidal electrical signal to the piezoelectric electrodes of the piezoelectric gyroscope to suppress vibration of the piezoelectric gyroscope in the detection mode; or, The vibration of the piezoelectric gyroscope in the detection mode is suppressed by using a controller, and an output signal of the controller is used as an angular velocity signal.

6. An electrostatic adjustment device for the frequency of a piezoelectric gyroscope, characterized in that: Applied to a piezoelectric gyroscope, the piezoelectric gyroscope includes: an electrostatic electrode and a closed structure, the electrostatic electrodes are distributed around the closed structure and connected to a semiconductor material, including: an applying unit, configured to apply a sinusoidal signal to the piezoelectric electrodes of the piezoelectric gyroscope in a detection mode and a driving mode, to obtain a frequency sweep result of the detection mode and a frequency sweep result of the driving mode; wherein, when the piezoelectric gyroscope is in the detection mode, the electrostatic electrode is at a maximum position of the detection mode displacement; when the piezoelectric gyroscope is in the driving mode, the electrostatic electrode is at a minimum position of the driving mode displacement; the frequency of the driving mode is less than the frequency of the detection mode; and the frequency sweep result of the driving mode includes the frequency of the driving mode; an adjusting unit, configured to adjust the voltage of the electrostatic electrode of the piezoelectric gyroscope in the detection mode according to the frequency sweep result of the detection mode and the frequency sweep result of the driving mode, so as to obtain an adjusted frequency of the detection mode; The determining unit is configured to determine that the detection mode and the driving mode of the piezoelectric gyroscope match when the frequency of the adjusted detection mode is consistent with the frequency of the driving mode.

7. The device according to claim 6, characterized in that The applying unit is specifically used for: Applying sinusoidal signals to the piezoelectric electrodes of the piezoelectric gyroscope in the detection mode and the driving mode in order of signal frequency from low to high; After applying the sinusoidal signal, monitoring the output amplitude of the piezoelectric gyroscope in the detection mode and the output amplitude of the piezoelectric gyroscope in the drive mode; The output amplitude of the piezoelectric gyroscope in the detection mode is determined as a frequency sweep result of the detection mode, and the output amplitude of the piezoelectric gyroscope in the driving mode is determined as a frequency sweep result of the driving mode.

8. The device according to claim 6, characterized in that The regulating unit is specifically used for: The highest positions of the output amplitudes in the sweep frequency results of the detection mode and the sweep frequency results of the driving mode are respectively determined as the detection resonance peak and the driving resonance peak; Applying a voltage to the electrostatic electrode of the piezoelectric gyroscope in the detection mode and increasing the voltage according to a preset rate to reduce the frequency of the detection mode; When it is detected that the distance between the detection resonance peak and the driving resonance peak is a preset minimum distance, obtaining the frequency of the current detection mode; The frequency of the current detection mode is determined as the frequency of the adjusted detection mode.

9. The device according to claim 6, characterized in that Also includes: a locking unit, configured to lock the frequency of the driving mode using a phase-locked loop after the detection mode of the piezoelectric gyroscope matches the driving mode; The amplitude locking unit is used to lock the demodulation amplitude of the driving mode using a closed-loop controller after the frequency of the driving mode is locked.

10. The device according to claim 6, characterized in that Also includes: a first suppression unit, configured to apply a sinusoidal electrical signal to the piezoelectric electrodes of the piezoelectric gyroscope to suppress vibration of the piezoelectric gyroscope in the detection mode; or, The second suppression unit is configured to suppress the vibration of the piezoelectric gyroscope in the detection mode by using a controller, and use an output signal of the controller as an angular velocity signal.

Images