Laser optical processing device and processing method thereof

Abstract

The invention relates to a laser optical processing device and a processing method thereof. The device comprises a laser emitting unit used for emitting a scanning processing laser beam, and a frequency domain optical coherence tomography imaging unit used for emitting an imaging laser beam; the optical conduction unit is used for conducting and focusing the scanning processing laser beam and the imaging laser beam to a set first sample target area to generate first sample image information; the laser galvanometer scanning unit is used for scanning a to-be-detected sample and recording the position and orientation information of a first scanning point, and the indicating light imaging unit is used for shooting a first sample picture; the image processing display unit is used for obtaining a first imaging deviation according to the first sample image information, the position and orientation information of the first scanning point and the first sample photo. According to the invention, sample position information or image information can be provided in real time with high resolution and high speed in a short imaging time, and imaging parameters and scanning parameters are adjusted through real-time feedback, so that the operation of the laser optical processing device can be controlled in real time.

Description

Technical Field

[0001] The present invention belongs to the technical field of optical processing, and in particular relates to a laser optical processing device and a processing method thereof. Background Art

[0002] During the optical processing, it is necessary to detect samples in real time along the line, from surface scratches, irregular spherical and curved surfaces to internal damage. Real-time imaging provides sample position information or image information, so that unqualified samples can be quickly detected and reprocessed before entering the inspection line for re-inspection.

[0003] Traditional sample inspection technologies primarily include manually operated three-dimensional coordinate measurement systems and handheld inspection devices. Three-dimensional coordinate measurement systems require samples to be brought from the production line to the inspection room for inspection. This system cannot address the challenge of real-time inspection at the production line, nor can it automatically re-enter the inspection line for re-inspection after re-processing. Furthermore, adjusting optical components during sample inspection affects imaging speed, making it impossible to provide real-time sample position or image information. While handheld inspection devices can perform real-time inspection at the production line, they suffer from low accuracy, are prone to false detections and missed detections, and cannot automatically re-enter the inspection line for re-inspection after re-processing.

[0004] With the rise of laser and optoelectronic technologies, optical inspection has become a research hotspot in measurement technology. The high-precision detection capabilities of laser and optical coherence tomography, coupled with precise computer calculations for trajectory planning, have enabled automated and intelligent sample inspection. However, due to the high energy of the laser beam and the short scanning duration, existing imaging systems are unable to generate high-resolution, high-speed positional information or image information from the surface to the interior of the sample in such a short time. Furthermore, they are unable to analyze this image information to inform or proactively modify the ongoing laser scanning process. Summary of the Invention

[0005] The present invention provides a laser optical processing device and a processing method thereof, aiming to solve one of the above-mentioned technical problems in the prior art at least to a certain extent.

[0006] In order to solve the above problems, the present invention provides the following technical solutions:

[0007] A laser optical processing device includes a laser emitting unit, an optical transmission unit, a frequency domain optical coherence tomography unit, a laser galvanometer scanning unit, an indicator light imaging unit, an image processing and display unit, and a control unit. The laser emitting unit is configured to emit a scanning processing laser beam, and the frequency domain optical coherence tomography unit and the laser emitting unit share an optical path and are configured to emit an imaging laser beam. The optical transmission unit is configured to transmit and focus the scanning processing laser beam and the imaging laser beam onto a predetermined first sample target area to generate first sample image information of the sample to be detected. The laser galvanometer scanning unit is configured to scan the sample to be detected and record the position and orientation information of a first scanning point. The indicator light imaging unit is configured to capture a first sample photograph of the first scanning point. The image processing and display unit is configured to analyze the first sample image information, the position and orientation information of the first scanning point, and the first sample photograph to obtain a first imaging deviation. The control unit is configured to adjust the scanning parameters of the laser emitting unit and the imaging parameters of the frequency domain optical coherence tomography unit in real time according to the first imaging deviation, and generate a first scanning processing area according to the adjusted parameters.

[0008] The technical solution adopted in the embodiment of the present invention also includes: it also includes an optical fiber transmission unit and an electrical transmission unit, the laser emitting unit is connected to the optical transmission unit through the optical fiber transmission unit, and is connected to the control unit through the electrical transmission unit; the optical transmission unit is arranged at the light outlet of the laser emitting unit, and is connected to the frequency domain optical coherence tomography unit through the optical fiber transmission unit, and the laser galvanometer scanning unit is connected in the optical path of the optical transmission unit through the optical fiber transmission unit; the frequency domain optical coherence tomography unit is connected to the laser galvanometer scanning unit through the optical fiber transmission unit, and is connected to the control unit through the electrical transmission unit; the indicator light imaging unit is connected to the optical transmission unit through the optical fiber transmission unit, and is connected to the image processing and display unit through the electrical transmission unit; the image processing and display unit is respectively connected to the laser galvanometer scanning unit, the indicator light imaging unit and the control unit through the electrical transmission unit, and the control unit is respectively connected to the image processing and display unit, the laser emitting unit and the frequency domain optical coherence tomography unit through the electrical transmission unit.

[0009] The technical solution adopted by the embodiment of the present invention also includes: the optical transmission unit is further used to guide and focus the scanning processing laser beam and the imaging laser beam to a set second sample target area to generate a second scanning processing area; the second scanning processing area is generated specifically by: transmitting and focusing the scanning processing laser beam and the imaging laser beam to the set second sample target area by the optical transmission unit to generate second sample image information of the sample to be detected; scanning the sample to be detected by the laser galvanometer scanning unit, recording the position and orientation information of the second scanning point, and capturing a second sample photograph of the second scanning point by the indicator light imaging unit; the image processing and display unit analyzes a second imaging deviation between the first scanning point and the second scanning point based on the first sample photograph, first sample image information, and position and orientation information of the first scanning point, and the second sample photograph, second sample image information, and position and orientation information of the second scanning point; and the control unit adjusts the scanning parameters of the laser emitting unit, the imaging parameters of the frequency domain optical coherence tomography unit, and the capturing parameters of the indicator light imaging unit in real time based on the second imaging deviation to generate the second scanning processing area.

[0010] The technical solution adopted by the embodiment of the present invention also includes: the optical transmission unit includes a beam shaper, a laser flash switch, a first grating, a first dichroic mirror, a second dichroic mirror and a first focusing lens connected in sequence through the optical fiber transmission unit, the beam shaper obtains a circular spot of the scanning processing laser beam, the laser flash switch is connected to the control unit and is used to control the on and off of the scanning processing laser beam, the first grating is used to increase the energy of the scanning processing laser beam, the first dichroic mirror is used to transmit the circular spot to the second dichroic mirror, the first reference beam generated by the frequency domain optical coherence tomography unit is transmitted to the reference mirror, and the first reference beam generated by the frequency domain optical coherence tomography unit is transmitted to the reference mirror. The second reference beam returned by the reference mirror is transmitted back to the frequency domain optical coherence tomography unit, the first image beam generated by the frequency domain optical coherence tomography unit is transmitted to the laser galvanometer scanning unit for position adjustment, and the first image beam after position adjustment is transmitted to the second dichroic mirror; the second dichroic mirror is used to combine the optical path of the indicator light imaging unit into the main optical path, and transmit the first image beam to the first focusing lens; the first focusing lens is used to focus the first image beam and the scanning processing laser beam on the sample to be detected, and transmit the second image beam reflected by the sample to be detected to the frequency domain optical coherence tomography unit and the indicator light imaging unit.

[0011] The technical solution adopted in the embodiment of the present invention also includes: the beam shaper is a field stop, the first grating is a Bragg grating, and the first focusing lens is a scanning lens.

[0012] The technical solution adopted in the embodiment of the present invention also includes: the frequency domain optical coherence tomography imaging unit also includes a swept light source, an interferometer, an isolation plate, a second focusing lens, a second grating, a polarizer, a detector and a reference mirror, wherein the swept light source is used to emit an imaging laser beam, the interferometer is used to split the imaging laser beam into a first image beam and a first reference beam, and guide the first reference beam to the reference mirror through the first dichroic mirror, the reference mirror is used to combine the optical path of the first reference beam into the main optical path, and transmit the returned second reference beam back to the interferometer; the first image beam is transmitted to the laser beam through the second dichroic mirror. After the position of the optical galvanometer scanning unit is adjusted, the first image beam is transmitted to the sample to be detected, and the second image beam reflected by the sample to be detected is returned to the interferometer through the original optical path. After the polarity of the second image beam is rotated by the isolation plate, the second reference beam and the second image beam are interfered with by the interferometer to generate interference light of the sample to be detected, and the interference light is transmitted to the second grating and polarizer to generate a trigger signal for preferential detection of the interference light. The detector is used to start collecting the interference light signal according to the trigger signal and convert it into an electrical signal, and transmit the electrical signal to the image processing and display unit.

[0013] The technical solution adopted in the embodiment of the present invention also includes: the interferometer is a Michelson interferometer, the reference mirror is a reflector, the isolation plate is a Faraday isolation plate, the second grating is a diffraction grating, the polarizer is a wire grid polarizer, and the detector is a photodetector or an avalanche diode.

[0014] The technical solution adopted in the embodiment of the present invention also includes: the indicator light imaging unit includes an indicator light source and a high-speed camera, the indicator light source is a visible light source, used to emit visible light, and the high-speed camera is used to take a first sample photo of the first scanning point and a second sample photo of the second scanning point.

[0015] Another technical solution adopted by an embodiment of the present invention is: a processing method of a laser optical processing device, comprising the following steps:

[0016] A laser emitting unit is used to emit a scanning processing laser beam, and a frequency domain optical coherence tomography unit is used to emit an imaging laser beam, wherein the frequency domain optical coherence tomography unit and the laser emitting unit share an optical path;

[0017] The scanning laser beam and the imaging laser beam are guided and focused to a set first sample target area by an optical guidance unit to generate first sample image information of the sample to be detected;

[0018] Scanning the sample to be tested by a laser galvanometer scanning unit, recording the position and orientation information of a first scanning point, and taking a first sample photo of the first scanning point by an indicator light imaging unit;

[0019] Analyzing the first sample image information, the position and orientation information of the first scanning point, and the first sample photo through an image processing and display unit to obtain a first imaging deviation;

[0020] The control unit adjusts the scanning parameters of the laser emitting unit and the imaging parameters of the frequency domain optical coherence tomography unit in real time according to the first imaging deviation, and generates a first scanning processing area according to the adjusted parameters.

[0021] The technical solution adopted in the embodiment of the present invention further includes: after generating the first scanning processing area according to the adjusted parameters, it also includes:

[0022] The scanning laser beam and the imaging laser beam are transmitted and focused to a set second sample target area by the optical transmission unit to generate second sample image information of the sample to be detected;

[0023] Scanning the sample to be tested by the laser galvanometer scanning unit, recording the position and orientation information of the second scanning point, and taking a photo of the second sample at the second scanning point by the indicator light imaging unit;

[0024] analyzing, by the image processing and display unit, a second imaging deviation between the first scanning point and the second scanning point based on the first sample photo, the first sample image information, the position and orientation information of the first scanning point, and the second sample photo, the second sample image information, the position and orientation information of the second scanning point;

[0025] The control unit adjusts the scanning parameters of the laser emitting unit, the imaging parameters of the frequency domain optical coherence tomography unit, and the shooting parameters of the indicator light imaging unit in real time based on the second imaging deviation to generate a second scanning processing area.

[0026] Compared with the prior art, the beneficial effects produced by the embodiments of the present invention are as follows: the laser optical processing device and processing method of the embodiments of the present invention utilize a frequency domain optical coherence tomography unit for rapid scanning imaging, utilize beam modulation technology to change the polarity of the sample return light, preferentially detect the interference light returned by the sample and suppress the scattered light of the optical components to improve the resolution and complete real-time imaging of the sample, realize the real-time provision of sample position information or image information at high resolution and high speed within a short imaging time through image processing technology, and use a three-dimensional galvanometer scanning unit to scan the sample in real time from the surface to the inside at different depths, widths and axial positions while recording the position and orientation information of the scanning point, and adjust the imaging parameters of the frequency domain optical coherence tomography unit and the scanning parameters of the laser emission unit in real time, thereby controlling the operation of the laser optical processing device in real time. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 This is a schematic structural diagram of a laser optical processing device according to an embodiment of the present invention;

[0028] Figure 2 yes Figure 1 Flowchart of the processing method of the laser optical processing device shown;

[0029] Description of Figure Numbers:

[0030] 1 laser emitting unit, 21 beam shaper, 22 laser flash switch, 23 first grating, 24 first dichroic mirror, 25 second dichroic mirror, 26 / 34 focusing lens, 31 swept light source, 32 interferometer, 33 spacer, 26 / 34 focusing lens, 35 second grating, 36 polarizer, 37 detector, 38 reference mirror, 4 laser galvanometer scanning unit, 51 indicator light source, 52 high-speed camera, 6 image processing and display unit, 7 control unit, 8 optical fiber transmission unit, 9 electrical transmission unit. DETAILED DESCRIPTION

[0031] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0032] It should be noted that all directional indications in the embodiments of the present invention (such as up, down, left, right, front, back, etc.) are only used to explain the relative position relationship, movement status, etc. between the various components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0033] It should also be noted that when an element is referred to as being "fixed on" or "disposed on" another element, it may be directly on the other element or there may be an intermediate element. When an element is referred to as being "connected to" another element, it may be directly connected to the other element or there may be an intermediate element.

[0034] In addition, the descriptions of "first", "second", etc. in the present invention are for descriptive purposes only and should not be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" or "second" may explicitly or implicitly include at least one of such features. In addition, the technical solutions between the various embodiments can be combined with each other, but this must be based on the fact that they can be implemented by ordinary technicians in this field. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0035] References herein to "embodiments" mean that a particular feature, structure, or characteristic described in connection with the embodiments may be included in at least one embodiment of the present invention. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor does it constitute a separate or alternative embodiment that is mutually exclusive of other embodiments. It is understood, both explicitly and implicitly, by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0036] Specifically, see Figure 1 , is a schematic structural diagram of a laser optical processing device according to an embodiment of the present invention. The laser optical processing device according to an embodiment of the present invention comprises a laser emitting unit 1, an optical transmission unit (not labeled), a frequency domain optical coherence tomography imaging unit (not labeled), a laser galvanometer scanning unit 4, an indicator light imaging unit (not labeled), an image processing and display unit 6, a control unit 7, an optical fiber transmission unit 8 and an electrical transmission unit 9; wherein, the laser emitting unit 1 is connected to the optical transmission unit via the optical fiber transmission unit 8, and is connected to the control unit 7 via the electrical transmission unit 9; the optical transmission unit is arranged at the light outlet of the laser emitting unit 1, and is connected to the frequency domain optical coherence tomography imaging unit via the optical fiber transmission unit 8, the laser galvanometer scanning unit 4 is connected to the indicator light imaging unit (not labeled), the image processing and display unit 6, the control unit 7, the optical fiber transmission unit 8 and the electrical transmission unit 9; The optical fiber transmission unit 8 is connected in the optical path of the optical transmission unit; the frequency domain optical coherence tomography unit is connected to the laser galvanometer scanning unit 4 through the optical fiber transmission unit 8, and is connected to the control unit 7 through the electrical transmission unit 9; the indicator light imaging unit is connected to the optical transmission unit through the optical fiber transmission unit 8, and is connected to the image processing and display unit 6 through the electrical transmission unit 9; the image processing and display unit 6 is respectively connected to the laser galvanometer scanning unit 4, the indicator light imaging unit and the control unit 7 through the electrical transmission unit 9, and the control unit 7 is respectively connected to the image processing and display unit 6, the laser emitting unit 1 and the frequency domain optical coherence tomography unit through the electrical transmission unit 9.

[0037] Based on the above structure, the working principle of the laser optical processing device of the embodiment of the present invention includes: emitting a scanning processing laser beam according to the set scanning parameters through the laser emitting unit 1, and the frequency domain optical coherence tomography unit and the laser emitting unit 1 share an optical path, and are used to emit an imaging laser beam according to the set imaging parameters under the control of the control unit 7; after the scanning processing laser beam and the imaging laser beam are adjusted in position by the laser galvanometer scanning unit 4, the scanning processing laser beam and the imaging laser beam are transmitted and focused to the set first sample target area through the optical transmission unit to generate the first sample image information of the sample to be detected, and the laser galvanometer scanning unit 4 is used to scan the sample to be detected in real time from the surface to the inside at different depths, widths and axial positions, and record the position of the first scanning point. and orientation information, and at the same time, take a first sample photo of the first scanning point through the indicating light imaging unit, and transmit the first sample image information, the position and orientation information of the first scanning point, and the first sample photo to the image processing and display unit 6; the image processing and display unit 6 is used to analyze the first sample image information, the position and orientation information of the first scanning point, and the first sample photo, obtain a first imaging deviation and display the first imaging deviation, and transmit the first imaging deviation to the control unit 7; the control unit 7 is used to adjust the scanning parameters such as the energy and scanning position of the laser emitting unit 1 and the imaging parameters such as the output wavelength and focusing position of the frequency domain optical coherence tomography imaging unit in real time according to the first imaging deviation, and generate a first scanning processing area according to the adjusted parameters.

[0038] As an improvement, the optical transmission unit of the embodiment of the present invention is further used to guide and focus the scanning processing laser beam and the imaging laser beam to a set second sample target area to generate a second scanning processing area; the method of generating the second scanning processing area specifically includes: emitting the scanning processing laser beam according to the set scanning parameters by the laser emitting unit 1, and emitting the imaging laser beam according to the set imaging parameters under the control of the control unit 7; after adjusting the position of the scanning processing laser beam and the imaging laser beam by the laser galvanometer scanning unit 4, the scanning processing laser beam and the imaging laser beam are transmitted and focused to the set second sample target area by the optical transmission unit to generate second sample image information of the sample to be detected; and scanning the sample to be detected in real time by the laser galvanometer scanning unit 4 at different depths, widths and axial positions from the surface to the inside, and recording the position and orientation of the second scanning point. The second scanning point is obtained by scanning the laser beam of the laser emitting unit 1 and the second scanning point is obtained by scanning the laser beam of the laser emitting unit 1. The second scanning point is obtained by scanning the laser beam of the laser emitting unit 1 and the second scanning point is obtained by scanning the laser beam of the laser emitting unit 1. The second scanning point is obtained by scanning the laser beam of the laser emitting unit 1 and the second scanning point is obtained by scanning the laser beam of the laser emitting unit 1. The second scanning point is obtained by scanning the laser beam of the laser emitting unit 1 and the second scanning point is obtained by scanning the laser beam of the laser emitting unit 1. The second scanning point is obtained by scanning the laser beam of the laser emitting unit 1 and the second scanning point is obtained by scanning the laser beam of the laser emitting unit 1. The second scanning point is obtained by scanning the laser beam of the laser emitting unit 1 and the second scanning point is obtained by scanning the laser beam of the laser emitting unit 1. The second scanning point is obtained by scanning the laser beam of the laser emitting unit 1 and the second scanning point is obtained by scanning the laser beam of the laser emitting unit 1.

[0039] In one embodiment of the present invention, the image processing and display unit 6 analyzes the first sample photo, the first sample image information, and the position and orientation information of the first scanning point to obtain the first imaging deviation of the sample to be detected, which specifically includes: analyzing and displaying the deviation between the first sample image information and the first sample photo by the image processing and display unit 6, transmitting the deviation as the first imaging deviation to the control unit 7, and the control unit 7 adjusting the imaging parameters of the frequency domain optical coherence tomography unit in real time according to the first imaging deviation.

[0040] In one embodiment of the present invention, the image processing and display unit 6 analyzes and displays the second imaging deviation between the first scanning point and the second scanning point based on the first sample photo, the first sample image information, the position and orientation information of the first scanning point and the second sample photo, the second sample image information, the position and orientation information of the second scanning point. Specifically, the image processing and display unit 6 analyzes and displays the deviation between the first sample image information and the second sample image information, transmits the deviation as the second imaging deviation to the control unit 7, and adjusts the imaging parameters of the frequency domain optical coherence tomography unit in real time through the control unit 7.

[0041] In one embodiment of the present invention, the image processing and display unit 6 analyzes and displays the second imaging deviation between the first scanning point and the second scanning point based on the first sample photo, the first sample image information, the position and orientation information of the first scanning point and the second sample photo, the second sample image information, the position and orientation information of the second scanning point, and further includes: analyzing and displaying the deviation between the first sample photo and the second sample photo by the image processing and display unit 6, transmitting the deviation as the second imaging deviation to the control unit 7, and adjusting the shooting parameters of the indicator light imaging unit in real time by the control unit 7.

[0042] In one embodiment of the present invention, the image processing and display unit 6 analyzes and displays the second imaging deviation between the first scanning point and the second scanning point based on the first sample photo, first sample image information, position and orientation information of the first scanning point and the second sample photo, second sample image information, position and orientation information of the second scanning point, and also includes: analyzing and displaying the deviation between the position and orientation information of the first scanning point and the position and orientation information of the second scanning point by the image processing and display unit 6, transmitting the deviation as the second imaging deviation to the control unit 7, and adjusting the scanning parameters of the laser emitting unit 1 in real time by the control unit 7.

[0043] Furthermore, in one embodiment of the present invention, the optical transmission unit includes a beam shaper 21, a laser flash switch 22, a first grating 23, a first dichroic mirror 24, a second dichroic mirror 25, and a first focusing lens 26, which are sequentially connected through an optical fiber transmission unit 8. The optical transmission unit focuses the scanning laser beam and the imaging laser beam in the following manner: the beam shaper 21 is a field stop, which is used to filter out the non-circular portion of the scanning laser beam, thereby obtaining a circular light spot, so that the circular light spot can be evenly distributed in the radial direction after focusing, thereby improving the quality of the focused light spot; the laser flash switch 22 is connected to the control unit 7, which is used to control the on and off of the scanning laser beam during operation; the first grating 23 is a Bragg grating, which is used to increase the energy of the scanning laser beam; the first dichroic mirror 24 is used to transmit the obtained circular light spot to the second dichroic mirror 25, and convert the frequency domain into a circular light spot. The first reference beam generated by the optical coherence tomography unit is transmitted to the reference mirror 38, and the second reference beam returned by the reference mirror 38 is transmitted back to the frequency domain optical coherence tomography unit. The first image beam generated by the frequency domain optical coherence tomography unit is transmitted to the laser galvanometer scanning unit 4 for position adjustment, and then the position-adjusted first image beam is transmitted to the second dichroic mirror 25; the second dichroic mirror 25 is used to combine the optical path of the indicator light imaging unit into the main optical path, and transmit the first image beam to the first focusing lens 26. The first focusing lens 26 is a scanning lens, which is arranged in the output optical path of the first image beam and the scanning processing laser beam, and is used to focus the first image beam and the scanning processing laser beam after position adjustment by the laser galvanometer scanning unit 3 on the sample to be detected, and transmit the second image beam reflected by the sample to be detected to the frequency domain optical coherence tomography unit and the indicator light imaging unit.

[0044] In one embodiment of the present invention, the frequency domain optical coherence tomography imaging unit further includes a swept light source 31, an interferometer 32, an isolation plate 33, a second focusing lens 34, a second grating 35, a polarizer 36, a detector 37 and a reference mirror 38, wherein the swept light source 31 is used to emit an imaging laser beam, the interferometer 32 is a Michelson interferometer, which is used to split the imaging laser beam into a first image beam and a first reference beam, and guide the first reference beam to the reference mirror 38 through the first dichroic mirror 24, and the reference mirror 38 is a reflecting mirror, which is used to combine the optical path of the first reference beam into the main optical path, and transmit the second reference beam returned by the reference mirror 38 back to the interferometer 32, transmit the first image beam to the laser galvanometer scanning unit 4 through the second dichroic mirror 25 for position adjustment, and then transmit the first image beam to the sample to be detected, and transmit the second image beam reflected by the sample to be detected through the original optical path. Return to the interferometer 32; the isolation plate 33 is a Faraday isolation plate. After the polarity of the second image beam reflected by the sample to be detected is rotated by the isolation plate 33, the second reference beam and the second image beam are interfered by the interferometer 32 to generate interference light of the sample to be detected, and the interference light is transmitted to the second grating 35 and the polarizer 36; the second grating 35 is a diffraction grating, which is used to reduce the influence of sample scattering on the imaging accuracy of the frequency domain optical coherence tomography unit, and the polarizer 36 is a line grid polarizer, which is used to suppress the scattered light of the optical components of the optical transmission unit and the frequency domain optical coherence tomography unit, generate a trigger signal for preferential detection of the interference light, and transmit the trigger signal to the detector 37; the detector 37 is a photodetector or an avalanche diode, which is used to start collecting the interference light signal according to the trigger signal and convert it into an electrical signal, and transmit the electrical signal to the image processing and display unit 6.

[0045] It can be understood that the second grating 35, the polarizer 36 and the detector 37 reduce the influence of scattering of optical components and samples on imaging and improve the imaging resolution by preferentially detecting the interference light returned from the sample to be detected.

[0046] It can be understood that the first focusing lens 26 and the second focusing lens 34 can be fixed vertically above the sample to be detected, and are used to focus the imaging laser beam and the scanning laser beam onto the sample to be detected, while focusing the scanning lens of the laser emitting unit 1, the imaging lens of the frequency domain optical coherence tomography unit and the shooting lens of the indicator light imaging unit respectively.

[0047] In one embodiment of the present invention, the indicator light imaging unit includes an indicator light source 51 and a high-speed camera 52. The indicator light source 51 is a visible light source, including LED lamp beads, incandescent lamps and fluorescent lamps, which is used to emit visible light to make the indicator light imaging unit image. The high-speed camera 52 is used to take a first sample photo of the first scanning point and a second sample photo of the second scanning point.

[0048] In one embodiment of the present invention, the optical paths of the laser galvanometer scanning unit 4, the frequency domain optical coherence tomography unit, the laser emitting unit 1 and the indicator light imaging unit are coaxial, so that the sample to be detected can be simultaneously within the scanning range of the laser galvanometer scanning unit 4 and the laser emitting unit 1, within the imaging range of the frequency domain optical coherence tomography unit and within the shooting range of the indicator light imaging unit.

[0049] See also Figure 2 ,yes Figure 1 The flowchart of the processing method of the laser optical processing device is shown. The processing method includes the following steps:

[0050] S10: emitting a scanning processing laser beam according to the set scanning parameters by the laser emitting unit, and emitting an imaging laser beam according to the set imaging parameters by the frequency domain optical coherence tomography unit;

[0051] S20: After adjusting the positions of the scanning laser beam and the imaging laser beam by the laser galvanometer scanning unit, the scanning laser beam and the imaging laser beam are transmitted and focused to a set first sample target area by the optical transmission unit to generate first sample image information of the sample to be tested;

[0052] S30: Scanning the sample to be tested in real time by the laser galvanometer scanning unit, recording the position and orientation information of the first scanning point, and simultaneously taking a first sample photo of the first scanning point by the indicator light imaging unit, and transmitting the first sample image information, the position and orientation information of the first scanning point, and the first sample photo to the image processing and display unit;

[0053] S40: analyzing the first sample image information, the position and orientation information of the first scanning point, and the first sample photo through the image processing and display unit to obtain a first imaging deviation of the sample to be detected, display the first imaging deviation, and transmit the first imaging deviation to the control unit;

[0054] Among them, in one embodiment of the present invention, analyzing the first sample image information, the position and orientation information of the first scanning point, and the first sample photograph through the image processing and display unit specifically includes: analyzing and displaying the deviation between the first sample image information and the first sample photograph through the image processing and display unit, transmitting the deviation as the first imaging deviation to the control unit, and the control unit adjusting the imaging parameters of the frequency domain optical coherence tomography unit in real time according to the first imaging deviation.

[0055] S50: The control unit adjusts scanning parameters such as energy and scanning position of the laser emission unit and imaging parameters such as output wavelength and focus position of the frequency domain optical coherence tomography imaging unit according to real-time feedback of the first imaging deviation, and generates a first scanning processing area according to the adjusted parameters;

[0056] As an improvement method, the following steps are further included after S50:

[0057] S60: transmitting and focusing the scanning processing laser beam and the imaging laser beam to a set second sample target area through an optical transmission unit to generate second sample image information of the sample to be detected;

[0058] S70: Scanning the sample to be inspected in real time at different depths, widths, and axial positions from the surface to the inside of the sample by a laser galvanometer scanning unit, recording the position and orientation information of the second scanning point, and simultaneously taking a second sample photo at the second scanning point by an indicator light imaging unit, and transmitting the second sample image information, the position and orientation information of the second scanning point, and the second sample photo to an image processing and display unit;

[0059] S80: analyzing and displaying, by the image processing and display unit, a second imaging deviation between the first scanning point and the second scanning point based on the first sample photo, the first sample image information, the position and orientation information of the first scanning point, and the second sample photo, the second sample image information, the position and orientation information of the second scanning point, and transmitting the second imaging deviation to the control unit;

[0060] S90: adjusting, by the control unit, scanning parameters such as energy and scanning position of the laser emission unit and imaging parameters such as output wavelength and focus position of the frequency domain optical coherence tomography unit based on real-time feedback of the second imaging deviation, to form a second scanning processing area;

[0061] Among them, in one embodiment of the present invention, the image processing and display unit analyzes and displays the second imaging deviation between the first scanning point and the second scanning point based on the first sample photo, the first sample image information, the position and orientation information of the first scanning point and the second sample photo, the second sample image information, the position and orientation information of the second scanning point, specifically including: analyzing and displaying the deviation between the first sample image information and the second sample image information through the image processing and display unit, transmitting the deviation as the second imaging deviation to the control unit, and adjusting the imaging parameters of the frequency domain optical coherence tomography unit in real time through the control unit.

[0062] In one embodiment of the present invention, the image processing and display unit analyzes and displays the second imaging deviation between the first scanning point and the second scanning point based on the first sample photo, the first sample image information, the position and orientation information of the first scanning point and the second sample photo, the second sample image information, the position and orientation information of the second scanning point, and also includes: analyzing and displaying the deviation between the first sample photo and the second sample photo by the image processing and display unit, transmitting the deviation as the second imaging deviation to the control unit, and adjusting the shooting parameters of the indicator light imaging unit in real time by the control unit.

[0063] In one embodiment of the present invention, the image processing and display unit analyzes and displays the second imaging deviation between the first scanning point and the second scanning point based on the first sample photo, first sample image information, position and orientation information of the first scanning point and the second sample photo, second sample image information, position and orientation information of the second scanning point, and also includes: analyzing and displaying the deviation between the position and orientation information of the first scanning point and the position and orientation information of the second scanning point by the image processing and display unit, transmitting the deviation as the second imaging deviation to the control unit, and adjusting the scanning parameters of the laser emitting unit in real time by the control unit.

[0064] It should be noted that the laser optical processing device and processing method provided in the above embodiments of the present invention can be used for processing industrial samples from the surface to the internal structure, and can also be applied to imaging, detection and scanning of human or animal tissues, and has a wider range of applications.

[0065] Based on the above, the laser optical processing device and processing method of the embodiment of the present invention utilize the characteristics of the frequency domain optical coherence tomography imaging unit such as fast scanning speed and large scanning depth, and utilize beam modulation technology to change the polarity of the sample return light, preferentially detect the interference light returned by the sample and suppress the scattered light of the optical components to improve the resolution and complete real-time imaging of the sample. Through image processing technology, it is possible to provide sample position information or image information in real time with high resolution and high speed within a short imaging time, and use a three-dimensional galvanometer scanning unit to scan the sample from the surface to the inside at different depths, widths and axial positions in real time while recording the position and orientation information of the scanning point. Real-time feedback is used to adjust the imaging parameters of the frequency domain optical coherence tomography imaging unit and the scanning parameters of the laser emission unit, thereby controlling the operation of the laser optical processing device in real time.

[0066] It should be noted that the information interaction, execution process, etc. between the various steps in the above method embodiment are based on the same concept as the device embodiment of the present invention. Their specific functions and technical effects can be found in the device embodiment part and will not be repeated here.

[0067] In the embodiments provided herein, it should be understood that the disclosed systems, devices, and methods can be implemented in other ways. For example, the system embodiments described above are merely illustrative. For example, the division of units is merely a logical function division. In actual implementation, there may be other division methods, such as multiple units or components can be combined or integrated into another system, or some features can be ignored or not implemented. In addition, the mutual coupling or direct coupling or communication connection shown or discussed can be an indirect coupling or communication connection through some interface, device or unit, which can be electrical, mechanical or other forms.

[0068] In addition, the functional units in the various embodiments of the present invention may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit. The above-mentioned integrated units may be implemented in the form of hardware or in the form of software functional units. The above is only an embodiment of the present invention and does not limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made using the contents of the present invention specification and drawings, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A laser optical processing device, characterized in that: The system comprises a laser emitting unit, an optical transmission unit, a frequency domain optical coherence tomography unit, a laser galvanometer scanning unit, an indicator light imaging unit, an image processing and display unit, and a control unit; the laser emitting unit is used to emit a scanning processing laser beam, and the frequency domain optical coherence tomography unit and the laser emitting unit share an optical path and are used to emit an imaging laser beam; the optical transmission unit is used to transmit and focus the scanning processing laser beam and the imaging laser beam to a set first sample target area to generate first sample image information of the sample to be detected; the laser galvanometer scanning unit is used to scan the sample to be detected and record the position and orientation information of the first scanning point, and the indicator light imaging unit is used to take a first sample photo of the first scanning point; the image processing and display unit is used to analyze the first sample image information, the position and orientation information of the first scanning point, and the first sample photo to obtain a first imaging deviation; the control unit is used to adjust the scanning parameters of the laser emitting unit and the imaging parameters of the frequency domain optical coherence tomography unit in real time according to the first imaging deviation, and generate a first scanning processing area according to the adjusted parameters.

2. The laser optical processing device according to claim 1, wherein: It also includes an optical fiber transmission unit and an electrical transmission unit, the laser emitting unit is connected to the optical transmission unit through the optical fiber transmission unit, and is connected to the control unit through the electrical transmission unit; the optical transmission unit is arranged at the light outlet of the laser emitting unit, and is connected to the frequency domain optical coherence tomography unit through the optical fiber transmission unit, and the laser galvanometer scanning unit is connected in the light path of the optical transmission unit through the optical fiber transmission unit; the frequency domain optical coherence tomography unit is connected to the laser galvanometer scanning unit through the optical fiber transmission unit, and is connected to the control unit through the electrical transmission unit; the indicator light imaging unit is connected to the optical transmission unit through the optical fiber transmission unit, and is connected to the image processing and display unit through the electrical transmission unit; the image processing and display unit is respectively connected to the laser galvanometer scanning unit, the indicator light imaging unit and the control unit through the electrical transmission unit, and the control unit is respectively connected to the image processing and display unit, the laser emitting unit and the frequency domain optical coherence tomography unit through the electrical transmission unit.

3. The laser optical processing device according to claim 2, characterized in that: The optical transmission unit is further configured to guide and focus the scanning processing laser beam and the imaging laser beam onto a set second sample target area to generate a second scanning processing area. The second scanning processing area is generated by: guiding and focusing the scanning processing laser beam and the imaging laser beam onto the set second sample target area via the optical transmission unit to generate second sample image information of the sample to be detected; scanning the sample to be detected via the laser galvanometer scanning unit to record the position and orientation information of the second scanning point, and capturing a second sample photograph of the second scanning point via the indicator light imaging unit; analyzing a second imaging deviation between the first scanning point and the second scanning point based on the first sample photograph, first sample image information, and position and orientation information of the first scanning point, and the second sample photograph, second sample image information, and position and orientation information of the second scanning point; and adjusting the scanning parameters of the laser emitting unit, the imaging parameters of the frequency domain optical coherence tomography unit, and the capturing parameters of the indicator light imaging unit in real time based on the second imaging deviation to generate the second scanning processing area.

4. The laser optical processing device according to any one of claims 1 to 3, characterized in that: The optical transmission unit includes a beam shaper, a laser flash switch, a first grating, a first dichroic mirror, a second dichroic mirror, and a first focusing lens, which are sequentially connected through the optical fiber transmission unit. The beam shaper obtains a circular spot of the scanning processing laser beam. The laser flash switch is connected to the control unit and is used to control the on and off of the scanning processing laser beam. The first grating is used to increase the energy of the scanning processing laser beam. The first dichroic mirror is used to transmit the circular spot to the second dichroic mirror. The first reference beam generated by the frequency domain optical coherence tomography unit is transmitted to the reference mirror, and the reference beam returned by the reference mirror is transmitted to the reference mirror. The second reference beam is transmitted back to the frequency domain optical coherence tomography unit, the first image beam generated by the frequency domain optical coherence tomography unit is transmitted to the laser galvanometer scanning unit for position adjustment, and the first image beam after position adjustment is transmitted to the second dichroic mirror; the second dichroic mirror is used to combine the optical path of the indicator light imaging unit into the main optical path, and transmit the first image beam to the first focusing lens; the first focusing lens is used to focus the first image beam and the scanning processing laser beam on the sample to be detected, and transmit the second image beam reflected by the sample to be detected to the frequency domain optical coherence tomography unit and the indicator light imaging unit.

5. The laser optical processing device according to claim 4, characterized in that: The beam shaper is a field stop, the first grating is a Bragg grating, and the first focusing lens is a scanning lens.

6. The laser optical processing device according to claim 4, characterized in that The frequency domain optical coherence tomography unit further includes a swept light source, an interferometer, an isolation plate, a second focusing lens, a second grating, a polarizer, a detector and a reference mirror, wherein the swept light source is used to emit an imaging laser beam, the interferometer is used to split the imaging laser beam into a first image beam and a first reference beam, and guide the first reference beam to the reference mirror through the first dichroic mirror, the reference mirror is used to combine the optical path of the first reference beam into the main optical path, and transmit the returned second reference beam back to the interferometer; the first image beam is transmitted to the laser galvanometer scanning unit through the second dichroic mirror for After the position adjustment, the first image beam is transmitted to the sample to be detected, and the second image beam reflected by the sample to be detected is returned to the interferometer through the original optical path. After the polarity of the second image beam is rotated by the isolation plate, the second reference beam and the second image beam are interfered with by the interferometer to generate interference light of the sample to be detected, and the interference light is transmitted to the second grating and polarizer to generate a trigger signal for preferential detection of the interference light. The detector is used to start collecting the interference light signal according to the trigger signal and convert it into an electrical signal, and transmit the electrical signal to the image processing and display unit.

7. The laser optical processing device according to claim 6, characterized in that: The interferometer is a Michelson interferometer, the reference mirror is a reflector, the isolation plate is a Faraday isolation plate, the second grating is a diffraction grating, the polarizer is a line grid polarizer, and the detector is a photodetector or an avalanche diode.

8. The laser optical processing device according to claim 4, characterized in that The indicator light imaging unit includes an indicator light source and a high-speed camera. The indicator light source is a visible light source for emitting visible light. The high-speed camera is used to take a first sample photo of the first scanning point and a second sample photo of the second scanning point.

9. A processing method of a laser optical processing device, characterized in that: The following steps are involved: A laser emitting unit is used to emit a scanning processing laser beam, and a frequency domain optical coherence tomography unit is used to emit an imaging laser beam, wherein the frequency domain optical coherence tomography unit and the laser emitting unit share an optical path; The scanning laser beam and the imaging laser beam are guided and focused to a set first sample target area by an optical guidance unit to generate first sample image information of the sample to be detected; Scanning the sample to be tested by a laser galvanometer scanning unit, recording the position and orientation information of a first scanning point, and taking a first sample photo of the first scanning point by an indicator light imaging unit; Analyzing the first sample image information, the position and orientation information of the first scanning point, and the first sample photo through an image processing and display unit to obtain a first imaging deviation; The control unit adjusts the scanning parameters of the laser emitting unit and the imaging parameters of the frequency domain optical coherence tomography unit in real time according to the first imaging deviation, and generates a first scanning processing area according to the adjusted parameters.

10. The processing method of the laser optical processing device according to claim 9, characterized in that: After generating the first scanning processing area according to the adjusted parameters, the method further includes: The scanning laser beam and the imaging laser beam are transmitted and focused to a set second sample target area by the optical transmission unit to generate second sample image information of the sample to be detected; Scanning the sample to be tested by the laser galvanometer scanning unit, recording the position and orientation information of the second scanning point, and taking a photo of the second sample at the second scanning point by the indicator light imaging unit; analyzing, by the image processing and display unit, a second imaging deviation between the first scanning point and the second scanning point based on the first sample photo, the first sample image information, the position and orientation information of the first scanning point, and the second sample photo, the second sample image information, the position and orientation information of the second scanning point; The control unit adjusts the scanning parameters of the laser emitting unit, the imaging parameters of the frequency domain optical coherence tomography unit, and the shooting parameters of the indicator light imaging unit in real time based on the second imaging deviation to generate a second scanning processing area.

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