Full-laser welding manufacturing method for MOCVD (Metal Organic Chemical Vapor Deposition) nozzle body

Abstract

The invention provides an MOCVD (Metal Organic Chemical Vapor Deposition) nozzle main body full-laser welding manufacturing method which comprises the following steps: pairing a top plate, a backing ring and a bottom plate from top to bottom, and enabling through holes of the top plate to be in one-to-one correspondence with through holes of the bottom plate; fusion welding is conducted on the joint of the top plate and the backing ring and the joint of the backing ring and the bottom plate through laser welding; placing the hollow pipes corresponding to the through holes in number and size in the corresponding through holes for assembly; the length of the hollow pipe is the sum of the thicknesses of the top plate, the backing ring and the bottom plate; the joints of the hollow pipes and the top plate and the joints of the hollow pipes and the bottom plate are subjected to batch fusion welding through laser welding; laser welding is carried out on the same equipment. In the production process, through a full-laser welding mode, the brazing process flow and the subsequent wire cutting process in the prior art are omitted, the production process of the MOCVD spray head equipment is simplified, the welding production time is shortened, the overall cost of the production equipment is reduced, and the production efficiency of the MOCVD spray head equipment is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment manufacturing, and in particular to a method for manufacturing an MOCVD nozzle body through full laser welding. Background Art

[0002] Metal-organic chemical deposition (MOCVD) equipment is currently essential for growing semiconductor materials. As a key component, the showerhead currently faces challenges such as stringent sealing requirements, prone to deformation during production, and long manufacturing cycles. To improve showerhead sealing performance, the industry typically employs methods such as modifying raw materials or adding coatings. These methods include manufacturing showerheads with a regenerated protective layer, ceramic showerheads, and 3D printing.

[0003] Under existing manufacturing technology, the production of a nozzle body requires multiple steps, including plate drilling, assembly welding, tube insertion, spot welding and sealing, brazing, wire cutting, and turning. Argon arc welding is used for assembly welding and spot welding, while brazing is used to connect the plate to the hollow tube. These two welding processes not only require different specialized equipment, but the brazing process also requires the use of costly brazing materials. Furthermore, auxiliary equipment such as wire cutting machines (used to create high-precision holes and complex grooves on the nozzle surface to ensure uniform gas distribution) are required to complete the manufacturing process. The entire production process requires switching between multiple devices. This multi-equipment collaborative production model has caused the following problems: First, the cost of equipment purchase and maintenance has increased significantly, and expensive brazing materials have further pushed up material costs; second, various types of equipment occupy a large space, which places higher requirements on the layout of the production site; third, the conversion of multiple processes and multiple equipment has seriously affected the production rhythm and reduced production efficiency. Summary of the Invention

[0004] Based on this, the present invention provides a full laser welding manufacturing method for an MOCVD nozzle body, aiming to solve the problem in the prior art that a variety of welding equipment are required during the nozzle manufacturing process.

[0005] To achieve the purpose of the invention, the present invention provides a method for manufacturing an MOCVD nozzle body through full laser welding, comprising: Step S01: Pair the top plate, the gasket, and the bottom plate in order from top to bottom, so that the through holes of the top plate correspond to the through holes of the bottom plate one by one; Step S02: fusion welding the joints between the top plate and the gasket, and between the gasket and the bottom plate by laser welding; Step S03: placing hollow tubes corresponding to the number and size of the through holes in the corresponding through holes for assembly; the length of the hollow tubes is the sum of the thicknesses of the top plate, the gasket, and the bottom plate; Step S04: performing batch fusion welding on the joints between each hollow tube and the top plate, and each hollow tube and the bottom plate by laser welding; The laser welding in step S02 and the laser welding in step S04 are performed on the same equipment.

[0006] The present invention provides a method for manufacturing the MOCVD nozzle body through full laser welding of a batch of hollow tubes to the top and bottom plates, completely eliminating the complex brazing process and subsequent wire cutting steps in the prior art. This innovative welding method not only simplifies the production process of MOCVD nozzle equipment, but also reduces the amount of welding equipment, eliminates the amount of brazing material, the time required for brazing, and the significant time consumption of subsequent wire cutting, significantly shortening the production cycle, reducing production costs, and improving production efficiency. At the same time, the application of full laser welding technology further improves the reliability and consistency of welding quality, providing a strong guarantee for the high performance and high reliability of MOCVD nozzle equipment.

[0007] As an optional solution for the full laser welding manufacturing method of the MOCVD nozzle body of the present invention, the material of the top plate, gasket, bottom plate and hollow tube is stainless steel; the thickness of the top plate and bottom plate is 5mm-10mm, and the thickness of the gasket is 5mm-25mm; the outer diameter of the hollow tube is 1mm-10mm; the laser welding equipment is a combination of a fiber laser and a robotic arm, and the laser welding power is in the range of 200W to 6000W.

[0008] As an optional solution of the full laser welding manufacturing method of the MOCVD nozzle body of the present invention, the laser welding parameters in step S02 are: The welding trajectory is selected as the arc fish pattern lap welding trajectory at the connection between the top plate and the gasket, and the gasket and the bottom plate, and 2 to 4 curved welds with a length ranging from 2000 mm to 4000 mm are formed; The weld width is in the range of 1mm to 3mm; Welding power ranges from 600W to 3000W; Welding speed is in the range of 100mm / min to 1000mm / min; The laser welding parameters in step S04 are: The welding trajectory is selected as an arc fish pattern lap welding trajectory at the connection between the hollow tube and the top plate, and the hollow tube and the bottom plate, and 1,000 to 10,000 circular lead-out line weld trajectories with a length ranging from 10 mm to 90 mm are formed; The weld width is in the range of 0.2mm to 2mm; Welding power ranges from 400W to 3000W; The welding speed is in the range of 100 mm / min to 4000 mm / min.

[0009] As an optional solution of the full laser welding manufacturing method of the MOCVD nozzle body of the present invention, in step S04, the sequential trajectory of the batch fusion welding is a gap jump welding trajectory from the outside to the inside.

[0010] As a preferred solution of the above optional solution, step S04 specifically includes the following steps: Step S041: The laser welding nozzle is vertically aligned with the center of the hollow tube to be welded, and a point is selected for coordinate calibration. The actual center coordinates of the batch of hollow tubes are accurately distributed using a robotic arm; Step S042: performing batch fusion welding on the joints between the hollow tubes and the top plate, with the welding power ranging from 400W to 2500W; Step S043: Flip the bottom plate upwards, perform point selection coordinate calibration again, and use the robotic arm to accurately allocate the actual center coordinates of the batch of hollow tubes; Step S044: performing batch fusion welding on the joints between the hollow tubes and the bottom plate, with the welding power being in the range of 600W to 3000W, and the welding power being greater than the welding power in step S042.

[0011] As an optional solution of the full laser welding manufacturing method of the MOCVD nozzle body of the present invention, In step S01, two through-hole regions with different apertures are present on the top plate and the bottom plate, wherein the through-holes in the central region are arranged in a hexagonal pattern, the aperture of the through-holes in the central region is 5 mm to 10 mm, and the number of through-holes in the central region is in a range of 100 to 2000; the through-holes in the edge region are arranged in a circular pattern, the aperture of the through-holes in the edge region is 1 mm to 5 mm, and the number of through-holes in the edge region is in a range of 500 to 3000; In step S04, in the central area, the welding trajectory of the hollow tube and the top plate, and the hollow tube and the bottom plate is a continuous welding trajectory along a hexagonal straight line, a jump welding trajectory along a hexagonal straight line, or a hexagonal gap jump welding trajectory from the outside to the inside; in the edge area, the welding trajectory of the hollow tube and the top plate, and the hollow tube and the bottom plate is a circular gap jump welding.

[0012] As an optional solution to the full laser welding manufacturing method of the MOCVD nozzle body of the present invention, in step S01, 5 to 20 evenly distributed corresponding hollow tubes are first placed in the through holes of the top plate and the bottom plate for assembly and fixation; in step S03, corresponding hollow tubes are placed in the remaining through holes of the top plate and the bottom plate for assembly and fixation.

[0013] As an optional solution of the full laser welding manufacturing method of the MOCVD nozzle body of the present invention, in step S01, the top plate and the gasket, and the gasket and the bottom plate are tightly connected, placed at the center of a workbench with a self-rotating function and horizontally adjusted.

[0014] As an optional solution of the full laser welding manufacturing method of the MOCVD nozzle body of the present invention, in step S02, the laser welding nozzle is horizontally provided with an inclination angle, and the welding track does not contact the water inlet of the gasket during welding.

[0015] Additional aspects and advantages of the present invention will be set forth in part in the following description, in part will become apparent during the description, and in part can be learned by practicing the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 A schematic flow chart of a full laser welding manufacturing method for an MOCVD nozzle body according to an embodiment of the present application is shown.

[0017] Figure 2 A schematic diagram of the structure of the MOCVD nozzle body in an embodiment of the present application is shown.

[0018] Figure 3 A schematic diagram of the structure of the MOCVD nozzle body after full laser welding is completed in an embodiment of the present application is shown.

[0019] Figure 4 A schematic cross-sectional view of the gasket and the top plate / bottom plate after welding in an embodiment of the present application is shown.

[0020] Figure 5 A schematic diagram of welding the hollow tube and the top plate / bottom plate in an embodiment of the present application is shown.

[0021] Figure 6 Shown Figure 5 Schematic diagram of the weld seam on the top plate / bottom plate surface after welding in a single welding position.

[0022] Figure 7 Shown Figure 5 Schematic diagram of the cross section after welding at a single welding position.

[0023] Figure 8 Shown Figure 5 Schematic diagram of the actual cross-section metallographic structure after welding at a single welding position.

[0024] Figure 9 A schematic diagram of the hexagonal gap jump welding trajectory from outside to inside is shown.

[0025] Figure 10 A schematic diagram of continuous welding trajectory along a hexagonal straight line is shown.

[0026] Figure 11 A schematic diagram of the jump welding trajectory along a hexagonal straight line is shown.

[0027] Explanation of the accompanying drawings: 10, top plate; 11, bottom plate; 12, gasket; 100, through hole; 101, through hole in the central area; 102, through hole in the edge area; 121, water inlet; 130, hollow tube; 131, hollow tube in the central area; 132, hollow tube in the edge area; 50, laser welding nozzle; 501, weld between the top plate and the gasket; 502, weld between the gasket and the bottom plate; 503, weld between the hollow tube and the top plate; 504, weld between the hollow tube and the bottom plate; 61, connection between the top plate and the gasket; 62, connection between the gasket and the bottom plate; 63, connection between the hollow tube and the top plate; 64, connection between the hollow tube and the bottom plate. DETAILED DESCRIPTION

[0028] The technical solution of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0029] In the description of the present invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate and simplify the description of the present invention. They are not intended to indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation, and therefore should not be construed as limitations on the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0030] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0031] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0032] The present invention provides a method for manufacturing a MOCVD nozzle body by full laser welding. Figure 1-2 Shown, including: Step S01: Pair the top plate 10, the backing ring 12, and the bottom plate 11 in order from top to bottom, so that the through holes 100 of the top plate 10 correspond to the through holes 100 of the bottom plate 11 one to one; Step S02: fusion-welding the connection 61 between the top plate 10 and the gasket 12 and the connection 62 between the gasket 12 and the bottom plate 11 by laser welding; Step S03: placing hollow tubes 130 corresponding to the number and size of the through holes 100 into the corresponding through holes 100 for assembly; the length of the hollow tubes 130 is the sum of the thicknesses of the top plate 10, the gasket 12, and the bottom plate 11; Step S04: The connection points 63 between each hollow tube and the top plate, and the connection points 64 between each hollow tube and the bottom plate are batch fusion-welded by laser welding. It can be understood that batch laser welding is used here to connect the hollow tubes and the top plate / bottom plate, replacing the brazing in the prior art, thereby eliminating the amount of brazing material, the time required for brazing, and the large amount of time spent on subsequent wire cutting, significantly shortening the production cycle, reducing production costs, and improving production efficiency.

[0033] The laser welding of step S02 and the laser welding of step S04 are performed on the same equipment. It can be understood that the overall all-laser welding method reduces the number of welding equipment and the space occupied, reduces the equipment conversion process, and further improves the reliability and consistency of welding quality. In addition, due to the high precision and flexibility of laser welding, in the subsequent production process, if there are leaks in some areas that fail to meet the sealing requirements, laser welding technology can be used for rapid repair. In this way, not only is production efficiency improved, but the risk of equipment failure due to sealing problems is also reduced, further improving the reliability and service life of the product, and reducing production costs and equipment maintenance difficulties.

[0034] In some embodiments of the present application, the material of the top plate 10, the gasket 12, the bottom plate 11, and the hollow tube 130 is stainless steel; the thickness of the top plate 10 and the bottom plate 11 is 5mm-10mm, and the thickness of the gasket 12 is 5mm-25mm; the outer diameter of the hollow tube 130 is 1mm-10mm; the laser welding equipment is a combination of a fiber laser and a robotic arm, and the power of the laser welding is in the range of 200W to 6000W.

[0035] In some embodiments of the present application, the laser welding parameters in step S02 are: The welding trajectory is selected as an arc fish pattern stitch welding trajectory at the connection 61 / 62 between the top plate 10 and the backing ring 12, and the backing ring 12 and the bottom plate 11, and 2 to 4 curved welds 501 / 502 with a length ranging from 2000 mm to 4000 mm are formed; The width of the weld seam 501 / 502 is in the range of 1 mm to 3 mm; Welding power ranges from 600W to 3000W; Welding speed is in the range of 100mm / min to 1000mm / min; The laser welding parameters in step S04 are: The welding trajectory is selected as the arc fish pattern stitch welding trajectory of the connection 63 / 64 between the hollow tube 130 and the top plate 10, and the hollow tube 130 and the bottom plate 11, and 1000 to 10000 circular lead-out line welds 503 / 504 with a length ranging from 10 mm to 90 mm are formed; The width of the weld 503 / 504 is in the range of 0.2 mm to 2 mm; Welding power ranges from 400W to 3000W; The welding speed is in the range of 100 mm / min to 4000 mm / min.

[0036] It should be noted that during the production process, the applicant discovered that the manufacturing requirements for the MOCVD nozzle body are relatively high. First, it is necessary to ensure that the welds between the top plate, bottom plate and pad, as well as the welds between the top plate, bottom plate and hollow tube are fully penetrated. At the same time, the water inlet of the pad and the inner wall of the hollow tube must not be touched during welding, and it is prohibited to cause changes in the overall structure to avoid large deformation of the top plate and bottom plate. Laser welding involves high-temperature melting of the welded objects, and the number of hollow tubes is large. During batch laser welding, it is easy to cause overall deformation of the top plate and bottom plate, as well as depression of the hollow tube. For this reason, after research, the applicant determined that the above-mentioned laser welding parameters are the optimal process parameters. By controlling the parameters within this range, effective welding can be achieved while effectively avoiding deformation problems caused by laser welding.

[0037] In some embodiments of the present application, in step S04, the sequential trajectory of batch fusion welding is a gap jump welding trajectory from the outside to the inside. It should be noted that in the welding process of batch hollow tubes, the use of this unique gap jump welding trajectory from the outside to the inside can effectively avoid the warping phenomenon caused by continuous welding in the vertical direction. Through the jump welding method, the heat distribution is more uniform, which significantly reduces the thermal deformation during the welding process, thereby improving the stability and consistency of the welding quality. This optimized welding trajectory is not only suitable for the welding of a single hollow tube, but also can maintain high-efficiency and high-quality welding effects in batch production.

[0038] In some embodiments of the present application, step S04 specifically includes the following steps: Step S041: The laser welding nozzle 50 is vertically aligned with the center of the hollow tube 130 to be welded, and a point is selected for coordinate calibration. The actual center coordinates of the batch of hollow tubes 130 are accurately distributed using a robotic arm; Step S042: performing batch fusion welding on the joints 63 of each hollow tube 130 and the top plate 10, with the welding power being in the range of 400W to 2500W; Step S043: Flip the bottom plate 11 upward, perform point selection coordinate calibration again, and use the robotic arm to accurately allocate the actual center coordinates of the batch of hollow tubes 130; Step S044 , performing batch fusion welding on the joints 64 of the hollow tubes 130 and the bottom plate 11 , with the welding power being in the range of 600 W to 3000 W, and the welding power being greater than the welding power in step S042 .

[0039] It's important to note that different welding power strategies are employed when batch welding hollow tubes and top / bottom plates. Specifically, the welding power for the rear weld surface is set relatively high. This higher power offsets some of the deformation generated during the first weld. This effectively balances the stresses generated during welding, further reducing the potential for weld deformation. This differentiated welding power control method not only improves welding quality but also increases welding efficiency, ensuring the overall performance of the welded structure.

[0040] In some embodiments of the present application, in step S01, two through-hole regions with different apertures are present on the top plate 10 and the bottom plate 11, wherein the through-holes 101 in the central region are arranged in a hexagonal pattern, the aperture of the through-holes 101 in the central region is 5 mm to 10 mm, and the number of the through-holes 101 in the central region is in a range of 100 to 2000; the through-holes 102 in the edge region are arranged in a circular pattern, the aperture of the through-holes 102 in the edge region is 1 mm to 5 mm, and the number of the through-holes 102 in the edge region is in a range of 500 to 3000; In step S04, in the central area, the welding tracks of the hollow tube 130 and the top plate 10, and the hollow tube 130 and the bottom plate 11 are hexagonal jump welding tracks from outside to inside, such as Figure 9 As shown, continuous welding tracks are arranged along the hexagonal straight line, such as Figure 10 As shown, or jump welding track along the hexagonal straight line, such as Figure 11 As shown; in the edge area, the welding trajectory of the hollow tube 130 and the top plate 10, and the hollow tube 130 and the bottom plate 11 is a circular gap jump welding.

[0041] In some embodiments of the present application, in step S01, 5 to 20 evenly distributed corresponding hollow tubes 130 are first inserted into the through holes 100 of the top plate 10 and the bottom plate 11 for assembly and fixation. In step S03, corresponding hollow tubes 130 are then inserted into the remaining through holes 100 of the top plate 10 and the bottom plate 11 for assembly and fixation. It should be noted that the initial installation of some hollow tubes in step S01 can provide a certain degree of fixation, preventing misalignment during laser welding and air blowing in step S02.

[0042] In some embodiments of the present application, in step S01, top plate 10 and backing ring 12, and backing ring 12 and bottom plate 11 are tightly connected, placed at the center of a rotating workbench, and horizontally adjusted. It should be noted that the rotating workbench's rotation can be utilized to rapidly complete laser welding and fusion at the joints, allowing hollow tube assembly and point alignment to be performed on the workbench.

[0043] In some embodiments of the present application, in step S02, the laser welding nozzle 50 is horizontally tilted so that the welding trajectory does not contact the water inlet 121 of the backing ring 12 during welding. The tilt angle during laser welding can reduce weld spatter, improve weld formation, increase welding process stability, reduce welding defects, adapt to complex welds and workpiece shapes, improve laser energy utilization, reduce welding deformation, and improve the microstructure of the weld, thereby improving welding quality and efficiency.

[0044] Some preferred embodiments of the present application are listed below. Example 1

[0045] The following is a detailed description of this embodiment with reference to the accompanying drawings: a method for manufacturing an MOCVD nozzle body through full laser welding. The welding environment is kept at a constant temperature and equipped with cooling equipment such as air conditioners and exhaust equipment such as fans to offset the heat and metal dust generated during the batch welding process. The following steps are included: Step S01: Figure 2 As shown, the top plate 10 , the backing ring 12 and the bottom plate 11 are paired in order from top to bottom, so that the through holes 100 of the top plate 10 correspond to the through holes 100 of the bottom plate 11 one by one.

[0046] Among them, the material of the top plate 10, the gasket 12 and the bottom plate 11 are all stainless steel, the thickness of the top plate 10 and the bottom plate 11 is 10mm, and the thickness of the gasket 12 is 15mm. There are two through-hole areas with different apertures on the top plate 10 and the bottom plate 11, among which the aperture of the through hole 101 in the central area is 8mm, and the aperture of the through hole 102 in the edge area is 5mm. The through holes 101 in the central area are arranged in a hexagonal shape, and the number of through holes 101 in the central area is 2000. The through holes 102 in the edge area are arranged in a circular shape, and the number of through holes 102 in the edge area is 3000. The connection between the top plate 10 and the gasket 12, and the gasket 12 and the bottom plate 11 is tightly connected without obvious gaps, and is placed at the center of a workbench with a self-rotating function and adjusted horizontally.

[0047] Step S02: Figure 3 As shown, the connection 61 between the top plate 10 and the gasket 12 and the connection 62 between the gasket 12 and the bottom plate 11 are fusion-welded by laser welding.

[0048] Specifically, a fiber laser and a robotic arm are combined for laser welding, and the welding power of the fiber laser is 1500W. The top plate 10, the gasket 12 and the bottom plate 11 are rotated by the workbench self-rotation function, and the laser welding nozzle 50 follows the arc of the connection 61 between the top plate 10 and the gasket 12, and the connection 62 between the gasket 12 and the bottom plate 11 to form a fish-pattern lap welding trajectory, and forms two curved weld seam trajectories with a length of 4000mm and overlapping starting points. The laser welding nozzle 50 is 15mm away from the welded parts 61 and 62, the horizontal angle is offset downward by 15°, and the welding speed is 400mm / min. The width of the weld 501 between the top plate 10 and the gasket 12, and the weld 502 between the gasket 12 and the bottom plate 11 are 2mm, as shown in FIG. Figure 4 shown.

[0049] Step S03 , placing hollow tubes 130 corresponding to the number and size of the through holes 100 in the corresponding through holes 100 for assembly; the length of the hollow tube 130 is the sum of the thicknesses of the top plate 10 , the gasket 12 and the bottom plate 11 .

[0050] A hollow tube 131 with an outer diameter of 8 mm ± 0.02 mm is installed in the through hole 101 in the central area, and a hollow tube 132 with an outer diameter of 5 mm ± 0.02 mm is installed in the through hole 102 in the edge area. The hollow tube 130 is made of stainless steel and has a length of 35 mm.

[0051] Step S04: performing batch fusion welding on the joints 63 between each hollow tube and the top plate, and the joints 64 between each hollow tube and the bottom plate by laser welding.

[0052] Batch fusion welding is performed using the same equipment as in step S02, with the following specific steps: Step S041: Figure 5 As shown, the laser welding nozzle 50 is vertically aligned with the center of the hollow tube 130 to be welded, and a point is selected for coordinate calibration. The actual center coordinates of the batch of hollow tubes 130 are accurately distributed using a robotic arm.

[0053] Step S042, batch fusion welding is performed on the joints 63 of each hollow tube 130 and the top plate 10. The welding trajectory follows a fish pattern lap welding trajectory, and 5000 circular lead-out line weld trajectories are formed. The welding power is 2000W, and the welding speed is 2000mm / min. The width of the weld 503 between the hollow tube 130 and the top plate 10 is 0.8mm. The two different aperture areas are welded in sequence. In the center area, the welding trajectory of the hollow tube 130 and the top plate 10 is a hexagonal gap jump welding trajectory from the outside to the inside, such as Figure 9As shown, according to the order of ① to ④, the welding track length of the single hollow tube 131 is 26.62mm. In the edge area, the welding track of the hollow tube 130 and the top plate 10 is a circular gap jump welding, and the welding track length of the single hollow tube 132 is 17.2mm. Figure 6 、 7 shown.

[0054] Step S043 , flip the bottom plate 11 upward, perform point selection coordinate calibration again, and use a robotic arm to accurately allocate the actual center coordinates of the batch of hollow tubes 130 .

[0055] Step S044, perform batch fusion welding on the joints 64 between each hollow tube 130 and the bottom plate 11. The welding trajectory follows a fish pattern lap welding trajectory, and forms 5000 circular lead-out line weld trajectories. The welding power is 2200W, and the welding speed is 2000mm / min. The width of the weld 504 between the hollow tube 130 and the bottom plate 11 is 0.85mm. The two different aperture areas are welded in sequence. In the center area, the welding trajectory between the hollow tube 130 and the bottom plate 11 is a hexagonal gap jump welding trajectory from the outside to the inside, such as Figure 9 As shown, according to the order of ① to ④, the welding track length of the single hollow tube 131 is 26.62mm. In the edge area, the welding track of the hollow tube 130 and the bottom plate 11 is a circular gap jump welding, and the welding track length of the single hollow tube 132 is 17.2mm. Figure 6 、 7 shown.

[0056] This unique, outside-to-inside, gap-skipping welding path effectively avoids warping caused by continuous vertical welding. This skip welding method provides more even heat distribution, significantly reducing thermal deformation during welding, thereby improving the stability and consistency of weld quality. This optimized welding path is not only suitable for welding single hollow tubes, but also ensures efficient and high-quality welding results in mass production.

[0057] like Figure 8 As shown, the weld of the hollow tube 130 in this embodiment is uniform and the shape of the hollow tube 130 after welding is complete, and has a good penetration depth and almost no deformation. Example 2

[0058] This embodiment provides another method for manufacturing an MOCVD nozzle body through full laser welding, comprising the following steps: Step S01: Figure 2 As shown, the top plate 10, the gasket 12 and the bottom plate 11 are matched in order from top to bottom, so that the through holes 100 of the top plate 10 correspond to the through holes 100 of the bottom plate 11. Ten matching hollow tubes 130 are evenly placed in the through holes 100.

[0059] Among them, the material of the top plate 10, the gasket 12 and the bottom plate 11 are all stainless steel, the thickness of the top plate 10 and the bottom plate 11 is 10mm, and the thickness of the gasket 12 is 15mm. There are two through-hole areas with different apertures on the top plate 10 and the bottom plate 11, among which the aperture of the through hole 101 in the central area is 8mm, and the aperture of the through hole 102 in the edge area is 5mm. The through holes 101 in the central area are arranged in a hexagonal shape, and the number of through holes 101 in the central area is 2000. The through holes 102 in the edge area are arranged in a circular shape, and the number of through holes 102 in the edge area is 3000. The connection between the top plate 10 and the gasket 12, and the gasket 12 and the bottom plate 11 is tightly connected without obvious gaps, and is placed at the center of a workbench with a self-rotating function and adjusted horizontally.

[0060] Step S02: Figure 3 As shown, the connection 61 between the top plate 10 and the gasket 12 and the connection 62 between the gasket 12 and the bottom plate 11 are fusion-welded by laser welding.

[0061] Specifically, a fiber laser and a robotic arm are combined for laser welding, and the welding power of the fiber laser is 1500W. The top plate 10, the gasket 12 and the bottom plate 11 are rotated by the workbench self-rotation function, and the laser welding nozzle 50 follows the arc of the connection 61 between the top plate 10 and the gasket 12, and the connection 62 between the gasket 12 and the bottom plate 11 to form a fish-pattern lap welding trajectory, and forms two curved weld seam trajectories with a length of 4000mm and overlapping starting points. The laser welding nozzle 50 is 15mm away from the welded parts 61 and 62, the horizontal angle is offset downward by 15°, and the welding speed is 400mm / min. The width of the weld 501 between the top plate 10 and the gasket 12, and the weld 502 between the gasket 12 and the bottom plate 11 are 2mm, as shown in FIG. Figure 4 shown.

[0062] Step S03 , placing hollow tubes 130 corresponding to the number and size of the through holes 100 in the corresponding through holes 100 for assembly; the length of the hollow tube 130 is the sum of the thicknesses of the top plate 10 , the gasket 12 and the bottom plate 11 .

[0063] A hollow tube 131 with an outer diameter of 8 mm ± 0.02 mm is installed in the through hole 101 in the central area, and a hollow tube 132 with an outer diameter of 5 mm ± 0.02 mm is installed in the through hole 102 in the edge area. The hollow tube 130 is made of stainless steel and has a length of 35 mm.

[0064] Step S04: performing batch fusion welding on the joints 63 between each hollow tube and the top plate, and the joints 64 between each hollow tube and the bottom plate by laser welding.

[0065] Batch fusion welding is performed using the same equipment as in step S02, with the following specific steps: Step S041: Figure 5 As shown, the laser welding nozzle 50 is vertically aligned with the center of the hollow tube 130 to be welded, and a point is selected for coordinate calibration. The actual center coordinates of the batch of hollow tubes 130 are accurately distributed using a robotic arm.

[0066] Step S042: Batch fusion welding is performed on the joints 63 between each hollow tube 130 and the top plate 10. The welding trajectory follows a fish pattern lap welding trajectory, and 5000 circular lead-out line weld trajectories are formed. The welding power is 1800W, and the welding speed is 2500mm / min. The width of the weld 503 between the hollow tube 130 and the top plate 10 is 0.7mm. The two different aperture areas are welded in sequence. In the center area, the welding trajectory of the hollow tube 130 and the top plate 10 is a continuous welding trajectory along a hexagonal straight line, such as Figure 10 As shown, the welding is carried out in sequence along the arrow direction, and the welding track length of the single hollow tube 131 is 26.62mm. In the edge area, the welding track of the hollow tube 130 and the top plate 10 is a circular gap jump welding, and the welding track length of the single hollow tube 132 is 17.2mm. Figure 6 、 7 shown.

[0067] Step S043 , flip the bottom plate 11 upward, perform point selection coordinate calibration again, and use a robotic arm to accurately allocate the actual center coordinates of the batch of hollow tubes 130 .

[0068] Step S044, perform batch fusion welding on the joints 64 between each hollow tube 130 and the bottom plate 11. The welding trajectory follows a fish pattern lap welding trajectory, and forms 5000 circular lead-out line weld trajectories. The welding power is 2100W, and the welding speed is 2500mm / min. The width of the weld 504 between the hollow tube 130 and the bottom plate 11 is 0.78mm. The two different aperture areas are welded in sequence. In the center area, the welding trajectory of the hollow tube 130 and the bottom plate 11 is a continuous welding trajectory along a hexagonal straight line, such as Figure 10 As shown, the welding is carried out in sequence along the arrow direction, and the welding track length of the single hollow tube 131 is 26.62mm. In the edge area, the welding track of the hollow tube 130 and the bottom plate 11 is a circular gap jump welding, and the welding track length of the single hollow tube 132 is 17.2mm. Figure 6 、 7 shown. Example 3

[0069] The full laser welding manufacturing method provided in this embodiment is basically the same as that in embodiment 2, except that in steps S042 and S044, in the central area, the welding trajectory of the hollow tube 130 and the top plate 10 / bottom plate 11 is a hexagonal straight line continuous jump welding trajectory such as Figure 11 As shown, jump to welding in the order of ① to ⑨.

[0070] Obviously, the above embodiments are merely examples for clarity of explanation and are not intended to limit the implementation methods. Those skilled in the art will readily appreciate that other variations or modifications based on the above descriptions are possible. It is not necessary and impossible to enumerate all implementation methods here. Obvious variations or modifications arising therefrom remain within the scope of protection of the present invention.

Claims

1. A method for manufacturing a MOCVD nozzle body by full laser welding, characterized in that: include: Step S01: Pair the top plate, the gasket, and the bottom plate in order from top to bottom, so that the through holes of the top plate correspond to the through holes of the bottom plate one by one; Step S02: fusion welding the joints between the top plate and the gasket, and between the gasket and the bottom plate by laser welding; Step S03: placing hollow tubes corresponding to the number and size of the through holes in the corresponding through holes for assembly; the length of the hollow tubes is the sum of the thicknesses of the top plate, the gasket, and the bottom plate; Step S04: performing batch fusion welding on the joints between each hollow tube and the top plate, and each hollow tube and the bottom plate by laser welding; The laser welding in step S02 and the laser welding in step S04 are performed on the same equipment.

2. The method for manufacturing a MOCVD nozzle body by full laser welding according to claim 1, characterized in that: The top plate, gasket, bottom plate and hollow tube are made of stainless steel; the thickness of the top plate and bottom plate is 5mm-10mm, and the thickness of the gasket is 5mm-25mm; the outer diameter of the hollow tube is 1mm-10mm; the laser welding equipment is a combination of a fiber laser and a robotic arm, and the power of the laser welding is in the range of 200W to 6000W.

3. The method for manufacturing a MOCVD nozzle body by full laser welding according to claim 1, characterized in that: The laser welding parameters in step S02 are: The welding trajectory is selected as the arc fish pattern lap welding trajectory at the connection between the top plate and the gasket, and the gasket and the bottom plate, and 2 to 4 curved welds with a length ranging from 2000 mm to 4000 mm are formed; The weld width is in the range of 1mm to 3mm; Welding power ranges from 600W to 3000W; Welding speed is in the range of 100mm / min to 1000mm / min; The laser welding parameters in step S04 are: The welding trajectory is selected as an arc fish pattern lap welding trajectory at the connection between the hollow tube and the top plate, and the hollow tube and the bottom plate, and 1,000 to 10,000 circular lead-out line weld trajectories with a length ranging from 10 mm to 90 mm are formed; The weld width is in the range of 0.2mm to 2mm; Welding power ranges from 400W to 3000W; The welding speed is in the range of 100 mm / min to 4000 mm / min.

4. The method for manufacturing a MOCVD nozzle body by full laser welding according to claim 1, wherein: In step S04, the sequential trajectory of batch fusion welding is a gap jump welding trajectory from outside to inside.

5. The method for manufacturing the MOCVD nozzle body by full laser welding according to claim 2 or 4, characterized in that: The step S04 specifically includes the following steps: Step S041: The laser welding nozzle is vertically aligned with the center of the hollow tube to be welded, and a point is selected for coordinate calibration. The actual center coordinates of the batch of hollow tubes are accurately distributed using a robotic arm; Step S042: performing batch fusion welding on the joints between the hollow tubes and the top plate, with the welding power ranging from 400W to 2500W; Step S043: Flip the bottom plate upwards, perform point selection coordinate calibration again, and use the robotic arm to accurately allocate the actual center coordinates of the batch of hollow tubes; Step S044: performing batch fusion welding on the joints between the hollow tubes and the bottom plate, with the welding power being in the range of 600W to 3000W, and the welding power being greater than the welding power in step S042.

6. The method for manufacturing a MOCVD nozzle body by full laser welding according to claim 1, wherein: In step S01, two through-hole regions with different apertures are present on the top plate and the bottom plate, wherein the through-holes in the central region are arranged in a hexagonal pattern, the aperture of the through-holes in the central region is 5 mm to 10 mm, and the number of through-holes in the central region is in a range of 100 to 2000; and the through-holes in the edge region are arranged in a circular pattern, the aperture of the through-holes in the edge region is 1 mm to 5 mm, and the number of through-holes in the edge region is in a range of 500 to 3000. In step S04, in the central area, the welding trajectory of the hollow tube and the top plate, and the hollow tube and the bottom plate is a continuous welding trajectory along a hexagonal straight line, a jump welding trajectory along a hexagonal straight line, or a hexagonal gap jump welding trajectory from the outside to the inside; in the edge area, the welding trajectory of the hollow tube and the top plate, and the hollow tube and the bottom plate is a circular gap jump welding.

7. The method for manufacturing a MOCVD nozzle body by full laser welding according to claim 1, wherein: In step S01, 5 to 20 evenly distributed corresponding hollow tubes are first placed in the through holes of the top plate and the bottom plate and assembled and fixed; In step S03, corresponding hollow tubes are placed into the remaining through holes of the top plate and the bottom plate and assembled and fixed.

8. The method for manufacturing a MOCVD nozzle body by full laser welding according to claim 1, wherein: In step S01, the top plate and the gasket, as well as the gasket and the bottom plate, are tightly connected and placed at the center of a workbench with a self-rotating function and are adjusted horizontally.

9. The method for manufacturing a MOCVD nozzle body by full laser welding according to claim 1, characterized in that: In step S02, the laser welding nozzle is horizontally positioned with an inclination angle, and the welding track does not contact the water inlet of the gasket during welding.

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