High and low pressure dual-stage pressure reduction and air supply system and air pressure regulation method for air flotation platforms

Abstract

This invention belongs to the field of pneumatic control technology, specifically a high-low pressure dual-stage pressure reduction and supply system and pressure regulation method for an air-float platform. High-pressure and low-pressure gas cylinders store high-pressure and low-pressure gases respectively. These cylinders are connected to the inlet of a high-pressure pressure reducing valve via pipelines. The outlet of the high-pressure pressure reducing valve is connected to the inlet of a gas container via a pipeline, and the outlet of the gas container is connected to the inlet of a low-pressure pressure reducing valve via a pipeline. The outlet of the low-pressure pressure reducing valve is connected to the inlet of a high-speed switching valve via a pipeline. The outlet of the high-speed switching valve is divided into multiple branches, each connected to an air-float bearing. All air-float bearings are installed on the bottom surface of the structural frame. The high-speed switching valve and the main valve are connected to a controller. This invention uses high-low pressure staged pressure reduction to first reduce the high-pressure gas to medium pressure, and then precisely adjusts it to the working pressure. It utilizes a gas container to balance pressure fluctuations and achieves closed-loop pressure control through the high-speed switching valve and a digital pressure gauge.

Description

Technical Field

[0001] This invention belongs to the field of pneumatic control technology, specifically a high-low pressure dual-stage depressurization air supply system and air pressure regulation method for an air flotation platform. Background Technology

[0002] Air-floating platforms, as devices that utilize air film support to achieve low-friction motion, are widely used in precision measurement, microgravity simulation, semiconductor processing, and aerospace experiments. The stable operation of an air-floating platform highly depends on the air supply system providing constant and precise air pressure to maintain the air film thickness and the platform's stable suspension. However, existing air-floating platforms generally employ a single-stage pressure-reducing valve structure, directly reducing the pressure of the high-pressure gas cylinder to the working pressure. While this structure is simple, it suffers from the following problems:

[0003] First, because the adjustment range of a single-stage pressure reduction is limited, when the gas source pressure fluctuates greatly or the dynamic load of the platform changes, it is easy to cause output pressure fluctuations, affecting the stability of the gas film thickness, which in turn leads to platform vibration or position drift.

[0004] Secondly, the response speed of a single-stage pressure reducing valve is relatively slow, which cannot meet the requirements of experimental platforms with high dynamic performance, especially in application scenarios where the air buoyancy support force needs to be adjusted quickly.

[0005] In addition, existing gas supply systems mostly use traditional mechanical pressure gauges, which have limited accuracy and cannot reflect gas pressure changes in a timely and accurate manner, making it difficult to achieve closed-loop control.

[0006] Therefore, there is an urgent need for an air supply system with a more rational structure, higher decompression accuracy, faster response, and the ability to achieve precise air pressure control, in order to meet the higher requirements of air flotation platforms for stability and dynamic performance. Summary of the Invention

[0007] In order to overcome the above-mentioned shortcomings of existing air supply systems for air flotation platforms, the present invention aims to provide a high-low pressure dual-stage depressurization air supply system and air pressure regulation method for air flotation platforms, so as to achieve higher precision air pressure regulation, improve the stability and response speed of air supply, and meet the strict requirements of air flotation platforms for air source systems.

[0008] The objective of this invention is achieved through the following technical solution:

[0009] The gas supply system of this invention includes a structural frame and, respectively, a high-speed switching valve, a high-pressure gas cylinder, a gas container, a low-pressure reducing valve, a high-pressure reducing valve, a main valve, and a low-pressure gas cylinder installed within the structural frame. The high-pressure and low-pressure gas cylinders respectively store high-pressure gas and low-pressure gas. The high-pressure and low-pressure gas cylinders are respectively connected to the inlet of the high-pressure reducing valve via pipelines. The high-pressure reducing valve reduces the high-pressure gas in the high-pressure cylinder to a medium-pressure range. The outlet of the high-pressure reducing valve is connected to the inlet of the gas container via a pipeline. The gas container is used to temporarily store medium-pressure gas and balance gas supply pressure fluctuations. The outlet is connected to the inlet of a low-pressure reducing valve via a pipeline. The low-pressure reducing valve further reduces the medium-pressure gas to the working pressure required by the air-float platform. The outlet of the low-pressure reducing valve is connected to the inlet of a high-speed switching valve via a pipeline. The outlet of the high-speed switching valve is divided into multiple branches, each branch connected to an air-float bearing. Each air-float bearing is installed on the bottom surface of the structural frame. The high-speed switching valve and the main valve are respectively connected to the controller. The high-speed switching valve quickly opens or closes the gas flow according to the control signal of the controller. The main valve controls the main gas source switch of the entire gas supply system.

[0010] The pipeline between the high-pressure gas cylinder and the high-pressure pressure reducing valve, and the pipeline between the low-pressure gas cylinder and the high-pressure pressure reducing valve are respectively equipped with filters for filtering impurities in the gas.

[0011] The pipeline before the inlet of the high-pressure reducing valve and the pipeline before the inlet of the low-pressure reducing valve are respectively equipped with digital pressure gauges for real-time detection of output air pressure and output of pressure signals. The digital pressure gauges are connected to the controller, and the digital pressure gauges feed back the detected air pressure signals to the controller. The controller controls the opening and closing of the high-speed switching valve according to the preset target pressure value to realize closed-loop regulation of output air pressure.

[0012] There are three branches. A T-junction is provided between the outlet of the high-speed switching valve and each branch. The first port of the T-junction is connected to the outlet of the high-speed switching valve through a pipeline. The second port of the T-junction is connected to one end of a branch. The third port of the T-junction is connected to one end of the other two branches respectively. The other ends of the three branches are respectively connected to an air bearing.

[0013] The tee is fixed to the structural frame by a tee support, and the outside of the tee is covered with a tee protective sleeve to prevent the pipeline from loosening or leaking due to vibration or external force.

[0014] The main valve is an electrically controlled valve, used to remotely open and close via control signals issued by the controller.

[0015] The structural frame includes an upper cover plate, support columns, and a lower base plate. Multiple support columns are provided between the upper cover plate and the lower base plate. The upper and lower ends of each support column are respectively connected to the upper cover plate and the lower base plate by bolts. The main valve is installed on the upper surface of the lower base plate.

[0016] A partition plate fixed to each support column is provided between the upper cover plate and the lower base plate. The bodies of the high-pressure gas cylinder and the low-pressure gas cylinder are installed on the partition plate by a gas cylinder fixing device. The bottom and mouth of the high-pressure gas cylinder and the low-pressure gas cylinder are located on the upper and lower sides of the partition plate, respectively. The high-speed switching valve and the high-pressure reducing valve are installed on the upper surface of the partition plate, respectively. The gas container is fixed on the lower surface of the partition plate. The low-pressure reducing valve and the main valve are both located below the partition plate.

[0017] The high-pressure gas cylinder and the low-pressure gas cylinder are respectively connected to gas cylinder connectors at their cylinder openings. The gas cylinder connectors are connected to the inlet of the high-pressure pressure reducing valve via pipelines. A shut-off valve A is installed on the pipeline between the gas cylinder connector of the high-pressure gas cylinder and the inlet of the high-pressure pressure reducing valve, and a shut-off valve B is installed on the pipeline between the gas cylinder connector of the low-pressure gas cylinder and the inlet of the high-pressure pressure reducing valve. The high-pressure gas cylinder and the low-pressure gas cylinder are respectively connected to a gas source via pipelines, and a shut-off valve C is installed on the pipeline connected to the gas source.

[0018] The present invention relates to a method for regulating air pressure in a high-low pressure dual-stage pressure reduction air supply system for an air flotation platform, comprising the following steps:

[0019] Step A: The high-pressure gas cylinder operates, and high-pressure gas is output to the high-pressure pressure reducing valve;

[0020] Step B: The high-pressure reducing valve reduces the pressure of the high-pressure gas to the medium-pressure range;

[0021] Step C involves temporarily storing medium-pressure gas in the gas container to balance pressure fluctuations;

[0022] Step D: The low-pressure reducing valve further reduces the medium-pressure gas to the working pressure required by the air flotation platform;

[0023] Step E: The gas is rapidly switched on and off by the high-speed switching valve to achieve dynamic regulation of the gas pressure.

[0024] Step F: Digital pressure gauges are installed on the pipelines before the inlet of the high-pressure reducing valve and the low-pressure reducing valve, respectively. The digital pressure gauges are connected to the controller. The digital pressure gauges detect the air pressure on the pipeline in real time and feed the pressure signal back to the controller. The controller controls the opening and closing of the high-speed switching valve according to the preset pressure value to realize closed-loop control.

[0025] Step G: The gas output by the high-speed switching valve is distributed to the air bearings on multiple branches to provide uniform support for the air-floating platform.

[0026] Step H: When the air flotation platform needs to descend, the low-pressure gas cylinder and the high-pressure gas cylinder work simultaneously. The low-pressure gas in the low-pressure gas cylinder mixes with the high-pressure gas in the high-pressure gas cylinder and is then output to the high-pressure pressure reducing valve, so that the gas pressure is reduced rapidly. Then, steps B to G are repeated to make the air flotation platform descend rapidly.

[0027] The advantages and positive effects of this invention are as follows:

[0028] 1. This invention effectively reduces the fluctuation of output air pressure and improves the stability of air flotation platform operation by using a two-stage pressure reduction method with high and low pressure.

[0029] 2. The high-pressure reducing valve and the low-pressure reducing valve of the present invention are connected in series. Through two-stage segmented pressure reduction, the pressure fluctuation caused by single-stage pressure reduction is effectively reduced, and the stability of air pressure output is improved.

[0030] 3. This invention uses a combination of a high-speed switching valve and a digital pressure gauge to achieve rapid and accurate air pressure regulation and closed-loop control, thereby enabling rapid response to external pressure adjustment needs, improving the system's regulation accuracy and dynamic response performance, and meeting the requirements of high dynamic performance.

[0031] 4. The tee support and tee protective sleeve of the present invention are used to fix and protect the tee, so as to avoid pipeline loosening or leakage due to vibration or external force, and improve system reliability.

[0032] 5. The present invention has a compact structure, which is easy to integrate and install, and improves the convenience of maintenance and overall safety through modular design. Attached Figure Description

[0033] Figure 1 This is a front view of the gas supply system of the present invention;

[0034] Figure 2 This is a left view of the structure of the gas supply system of the present invention;

[0035] Figure 3 This is a bottom view of the gas supply system of the present invention;

[0036] Figure 4 This is a schematic diagram of the gas supply system of the present invention.

[0037] Wherein: 1 is a three-way support, 2 is a three-way valve, 3 is a high-speed switching valve, 4 is an upper cover plate, 5 is a support column, 6 is a filter, 7 is a gas cylinder fixing device, 8 is a high-pressure gas cylinder, 9 is a gas container, 10 is a digital pressure gauge, 11 is a low-pressure pressure reducing valve, 12 is a three-way protective sleeve, 13 is a high-pressure pressure reducing valve, 14 is a gas cylinder connector, 15 is a low-pressure gas cylinder, 16 is a main valve, 1701 is an air bearing A, 1702 is an air bearing B, 1703 is an air bearing C, 18 is a lower base plate, 19 is a partition plate, 20 is a shut-off valve A, 21 is a shut-off valve B, and 22 is a shut-off valve C. Detailed Implementation

[0038] The invention will now be described in further detail with reference to the accompanying drawings.

[0039] like Figures 1-4 As shown, the high-low pressure dual-stage pressure-reducing gas supply system of the present invention includes a structural frame and a high-speed switching valve 3, a high-pressure gas cylinder 8, a gas container 9, a low-pressure pressure-reducing valve 11, a high-pressure pressure-reducing valve 13, a main valve 16, and a low-pressure gas cylinder 15, all installed within the structural frame. The high-pressure gas cylinder 8 and the low-pressure gas cylinder 15 are arranged side-by-side, storing high-pressure gas and low-pressure gas respectively. The high-pressure gas cylinder 8 and the low-pressure gas cylinder 15 are respectively connected to the inlet of the high-pressure pressure-reducing valve 13 via pipelines. The high-pressure pressure-reducing valve 13 reduces the high-pressure gas in the high-pressure gas cylinder 8 to a medium-pressure range. The outlet of the high-pressure pressure-reducing valve 13 is connected to the inlet of the gas container 9 via a pipeline. The gas container 9 is used to temporarily store medium-pressure gas and balance gas supply pressure fluctuations, ensuring the stability of downstream gas supply. The outlet of the gas container 9 is connected to the inlet of the low-pressure pressure-reducing valve 11 via a pipeline. The low-pressure reducing valve 11 further reduces the medium-pressure gas to the working pressure required by the air flotation platform. The outlet of the low-pressure reducing valve 11 is connected to the inlet of the high-speed switching valve 3 through a pipeline. The outlet of the high-speed switching valve 3 is divided into multiple branches, each branch connected to an air flotation bearing, and each air flotation bearing is installed on the bottom surface of the structural frame. The high-speed switching valve 3 and the main valve 16 are respectively connected to the controller (the controller of this invention can be implemented using an industrial control system in the prior art). The high-speed switching valve 3 can quickly open or close the gas flow according to the control signal of the controller, which is used to quickly adjust the gas pressure of the air flotation platform, thereby improving the dynamic response performance. The main valve 16 is an electric control valve, which is used to remotely open and close the gas supply system through the control signal issued by the controller, controlling the main gas source switch of the entire gas supply system.

[0040] The structural frame of this embodiment includes an upper cover plate 4, support columns 5 and a lower base plate 18. Multiple support columns 5 are provided between the upper cover plate 4 and the lower base plate 18. The upper and lower ends of each support column 5 are respectively connected to the upper cover plate 4 and the lower base plate 18 by bolts. The main valve 16 is installed on the upper surface of the lower base plate 18, and each air bearing is installed on the lower surface of the lower base plate 18. In this embodiment, both the upper cover plate 4 and the lower base plate 18 are square plates, and there are four support columns 5. When connected, they form a rectangular structural frame to support and fix the high-pressure gas cylinder 8, the low-pressure gas cylinder 15, various valves and pipelines to ensure the structural stability of the gas supply system. A partition plate 19 is also provided between the upper cover plate 4 and the lower base plate 18 and fixed on each support column 5. The cylinder bodies of the high-pressure gas cylinder 8 and the low-pressure gas cylinder 15 are installed on the partition plate 19 by the gas cylinder fixing device 7 (which can be a clamp in this embodiment). The bottom and mouth of the high-pressure gas cylinder 8 and the low-pressure gas cylinder 15 are located on the upper and lower sides of the partition plate 19, respectively. The high-speed switching valve 3 and the high-pressure reducing valve 13 are respectively installed on the upper surface of the partition plate 19, the gas container 9 is fixed on the lower surface of the partition plate 19, and the low-pressure reducing valve 11 and the main valve 16 are both located below the partition plate 19.

[0041] In this embodiment, the cylinder openings of the high-pressure gas cylinder 8 and the low-pressure gas cylinder 15 are respectively connected to cylinder connectors 14. The cylinder connectors 14 are connected to the inlet of the high-pressure pressure reducing valve 13 through pipelines. A shut-off valve A20 and a filter 6 are provided on the pipeline between the cylinder connector 14 of the high-pressure gas cylinder 8 and the inlet of the high-pressure pressure reducing valve 13. A shut-off valve B21 and a filter 6 are provided on the pipeline between the cylinder connector 14 of the low-pressure gas cylinder 15 and the inlet of the high-pressure pressure reducing valve 13. That is, the high-pressure gas cylinder 8, shut-off valve A20 and filter 6 are connected in parallel with the low-pressure gas cylinder 15, shut-off valve B21 and filter 6. The filter 6 is used to filter solid particulate impurities in the gas to prevent impurities from entering the downstream valves and air bearings, affecting the system accuracy or clogging the valves. High-pressure gas cylinder 8 and low-pressure gas cylinder 15 are connected to a gas source via pipelines. A shut-off valve C22 is installed on the pipeline connected to the gas source. By controlling the opening and closing of shut-off valves A20, B21, and C22, the gas source can respectively fill the high-pressure gas cylinder 8 with high-pressure gas (pressure up to 20 MPa) or fill the low-pressure gas cylinder 15 with low-pressure gas (pressure up to 5 MPa). The filter 6 in this embodiment is prior art, a sintered metal filter element with a filtration accuracy of 5–20 μm.

[0042] In this embodiment, digital pressure gauges 10 are respectively installed on the pipeline before the inlet of the high-pressure reducing valve 13 and the pipeline before the inlet of the low-pressure reducing valve 11. Each digital pressure gauge 10 is connected to the controller to detect the output air pressure in real time and output a pressure signal. The digital pressure gauge 10 feeds back the detected air pressure signal to the controller. The controller controls the opening and closing of the high-speed switching valve 3 according to the preset target pressure value to realize closed-loop regulation of the output air pressure, thereby achieving precise air pressure regulation.

[0043] In this embodiment, there are three branches. A tee 2 is provided between the outlet of the high-speed switching valve 3 and each branch. The tee 2 is fixed to the lower base plate 18 by a tee support 1. A tee protective sleeve 12 covers the outside of the tee 2. In this embodiment, the tee protective sleeve 12 is made of metal or high-strength engineering plastic to prevent the pipeline from loosening or leaking due to vibration or external impact. In this embodiment, the first interface of the tee 2 is connected to the outlet of the high-speed switching valve 3 through a pipeline. The second interface of the tee 2 is connected to one end of the first branch. The other end of the first branch is equipped with an air bearing A1701. The third interface of the tee 2 is connected to one end of the other two branches. The other ends of the other two branches are connected to air bearings B1702 and C1703, respectively. Air bearings A1701, B1702, and C1703 are installed on the air-floating platform to provide uniform, stable, and independently adjustable gas support force for multiple support points of the air-floating platform, thereby achieving low-friction levitation of the platform.

[0044] All three air bearings in this embodiment are commercially available products, purchased from Eisenberger Air Bearing Technology (Beijing) Co., Ltd., model number EZ-0053-045. The high-pressure reducing valve 13 in this embodiment is a commercially available product, purchased from GENTEC Corporation (USA), model number R21SLBK-DHG-00-00. The low-pressure reducing valve 11 in this embodiment is a commercially available product, purchased from SMC Corporation (Japan), model number IR1020-01BG-A. The high-speed switching valve 3 in this embodiment is a commercially available solenoid valve, purchased from FESTO Corporation (Germany), model number MHJ9-QS-4-LF, with a response time of less than 50ms for rapid adjustment. The main valve 16 in this embodiment is a commercially available product, purchased from FESTO Corporation (Germany), model number HE-2-1 / 4-QS-8. In this embodiment, there are two high-speed switching valves 3 and two filters 6, which are divided into two groups. The high-speed switching valve 3 and the filter 6 in each group are integrated into a module. Both filters 6 are used, but only one high-speed switching valve 3 is used, and the other high-speed switching valve 3 is not used.

[0045] In this embodiment, gas container 9 is a closed medium-pressure gas buffer container with a volume of 0.5–2L, used to reduce pressure fluctuations between the high-pressure reducing valve 13 and the low-pressure reducing valve 11. In this embodiment, the high-pressure reducing valve 13 reduces the pressure of high-pressure gas from 10–30 MPa to a medium-pressure range of 1–3 MPa, and the low-pressure reducing valve 11 further reduces the medium-pressure gas to a working pressure range of 0.05–0.3 MPa.

[0046] The present invention relates to a method for regulating air pressure in a high-low pressure dual-stage pressure reduction air supply system for an air flotation platform, comprising the following steps:

[0047] Step A: Open shut-off valves C22 and A20, and close shut-off valve B21 and high-pressure reducing valve 13. Fill the high-pressure gas cylinder 8 with 20MPa high-pressure gas through the gas source. After filling, close shut-off valve A20, open shut-off valve B21, and fill the low-pressure gas cylinder 15 with 5MPa low-pressure gas through the gas source until it is full. Then, close shut-off valves B21 and C22.

[0048] Step B: Open the shut-off valve A20 and the high-pressure reducing valve 13. The high-pressure gas cylinder 8 will start working, and the high-pressure gas will be output to the high-pressure reducing valve 13.

[0049] Step C: The high-pressure reducing valve 13 reduces the pressure of the high-pressure gas to the medium-pressure range of 2MPa;

[0050] Step D: Temporarily store medium-pressure gas in gas container 9 to balance pressure fluctuations;

[0051] Step E: The low-pressure reducing valve 11 further reduces the medium-pressure gas to the working pressure required by the air flotation platform.

[0052] Step F involves controlling the rapid on / off of the gas supply via high-speed switching valve 3 to achieve dynamic regulation of the gas pressure.

[0053] Step G: The digital pressure gauge 10 detects the air pressure on the pipeline in real time and feeds the pressure signal back to the controller. The controller controls the opening and closing of the high-speed switching valve 3 according to the preset pressure value to achieve closed-loop control.

[0054] In step H, the gas output from the high-speed switching valve 3 is distributed to the air bearings A1701, B1702, and C1703 on the three branches to provide uniform support for the air-floating platform.

[0055] Step I: When the air flotation platform needs to descend, open the shut-off valve B21. The low-pressure gas cylinder 15 and the high-pressure gas cylinder 8 work simultaneously. The low-pressure gas in the low-pressure gas cylinder 15 and the high-pressure gas in the high-pressure gas cylinder 8 are mixed and output to the high-pressure pressure reducing valve 13, so that the gas pressure is reduced rapidly. Then repeat steps B to G to make the air flotation platform descend rapidly.

[0056] This invention significantly reduces pressure fluctuations caused by single-stage pressure reduction through a high-low pressure dual-stage pressure reduction design. It also utilizes a high-speed switching valve and a digital pressure gauge to achieve rapid response and closed-loop control, thereby improving the dynamic performance and accuracy of the gas supply system. It is suitable for air flotation platforms that have high requirements for gas supply stability and response speed.

Claims

1. A high-low pressure dual-stage pressure reduction gas supply system for an air flotation platform, characterized in that: The system includes a structural frame and a high-speed switching valve (3), a high-pressure gas cylinder (8), a gas container (9), a low-pressure pressure reducing valve (11), a high-pressure pressure reducing valve (13), a main valve (16), and a low-pressure gas cylinder (15) respectively installed within the structural frame. The high-pressure gas cylinder (8) and the low-pressure gas cylinder (15) store high-pressure gas and low-pressure gas respectively. The high-pressure gas cylinder (8) and the low-pressure gas cylinder (15) are respectively connected to the inlet of the high-pressure pressure reducing valve (13) through pipelines. The high-pressure pressure reducing valve (13) reduces the high-pressure gas in the high-pressure gas cylinder (8) to a medium-pressure range. The outlet of the high-pressure pressure reducing valve (13) is connected to the inlet of the gas container (9) through a pipeline. The gas container (9) is used to temporarily store medium-pressure gas and balance the gas supply pressure. Force fluctuation, the outlet of the gas container (9) is connected to the inlet of the low pressure reducing valve (11) through a pipeline. The low pressure reducing valve (11) further reduces the medium pressure gas to the working pressure required by the air flotation platform. The outlet of the low pressure reducing valve (11) is connected to the inlet of the high speed switching valve (3) through a pipeline. The outlet of the high speed switching valve (3) is divided into multiple branches, each branch is connected to an air flotation bearing, and each air flotation bearing is installed on the bottom surface of the structural frame. The high speed switching valve (3) and the main valve (16) are respectively connected to the controller. The high speed switching valve (3) quickly opens or closes the gas flow according to the control signal of the controller. The main valve (16) controls the main gas source switch of the entire gas supply system.

2. The high and low pressure dual-stage pressure reduction gas supply system for air flotation platforms according to claim 1, characterized in that: The pipeline between the high-pressure gas cylinder (8) and the high-pressure pressure reducing valve (13) and the pipeline between the low-pressure gas cylinder (15) and the high-pressure pressure reducing valve (13) are respectively equipped with filters (6) for filtering impurities in the gas.

3. The high and low pressure dual-stage pressure reduction gas supply system for air flotation platforms according to claim 1, characterized in that: The pipeline before the inlet of the high pressure reducing valve (13) and the pipeline before the inlet of the low pressure reducing valve (11) are respectively equipped with digital pressure gauges (10) for real-time detection of output air pressure and output of pressure signals. The digital pressure gauges (10) are connected to the controller. The digital pressure gauges (10) feed back the detected air pressure signals to the controller. The controller controls the opening and closing of the high-speed switching valve (3) according to the preset target pressure value to realize closed-loop regulation of output air pressure.

4. The high and low pressure dual-stage pressure reduction gas supply system for air flotation platforms according to claim 1, characterized in that: There are three branches. A tee (2) is provided between the outlet of the high-speed switching valve (3) and each branch. The first port of the tee (2) is connected to the outlet of the high-speed switching valve (3) through a pipeline. The second port of the tee (2) is connected to one end of a branch. The third port of the tee (2) is connected to one end of the other two branches respectively. The other ends of the three branches are connected to an air bearing respectively.

5. The high and low pressure dual-stage pressure reduction gas supply system for air flotation platforms according to claim 4, characterized in that: The tee (2) is fixed to the structural frame by the tee support (1), and the outside of the tee (2) is covered with a tee protective sleeve (12) to prevent the pipeline from loosening or leaking due to vibration or external force.

6. The high and low pressure dual-stage pressure reduction gas supply system for an air flotation platform according to claim 1, characterized in that: The main valve (16) is an electrically controlled valve, used to remotely open and close via control signals issued by the controller.

7. The high and low pressure dual-stage pressure reduction gas supply system for air flotation platforms according to claim 1, characterized in that: The structural frame includes an upper cover plate (4), support columns (5) and a lower base plate (18). Multiple support columns (5) are provided between the upper cover plate (4) and the lower base plate (18). The upper and lower ends of each support column (5) are respectively connected to the upper cover plate (4) and the lower base plate (18) by bolts. The main valve (16) is installed on the upper surface of the lower base plate (18).

8. The high and low pressure dual-stage pressure reduction gas supply system for an air flotation platform according to claim 7, characterized in that: A partition (19) fixed on each support column (5) is provided between the upper cover plate (4) and the lower bottom plate (18). The bodies of the high-pressure gas cylinder (8) and the low-pressure gas cylinder (15) are installed on the partition (19) by the gas cylinder fixing device (7). The bottom and mouth of the high-pressure gas cylinder (8) and the low-pressure gas cylinder (15) are located on the upper and lower sides of the partition (19) respectively. The high-speed switching valve (3) and the high-pressure pressure reducing valve (13) are respectively installed on the upper surface of the partition (19). The gas container (9) is fixed on the lower surface of the partition (19). The low-pressure pressure reducing valve (11) and the main valve (16) are both located below the partition (19).

9. The high and low pressure dual-stage pressure reduction gas supply system for an air flotation platform according to claim 1, characterized in that: The high-pressure gas cylinder (8) and the low-pressure gas cylinder (15) are respectively connected to gas cylinder connectors (14). The gas cylinder connectors (14) are connected to the inlet of the high-pressure pressure reducing valve (13) through pipelines. A shut-off valve A (20) is provided on the pipeline between the gas cylinder connector (14) of the high-pressure gas cylinder (8) and the inlet of the high-pressure pressure reducing valve (13). A shut-off valve B (21) is provided on the pipeline between the gas cylinder connector (14) of the low-pressure gas cylinder (15) and the inlet of the high-pressure pressure reducing valve (13). The high-pressure gas cylinder (8) and the low-pressure gas cylinder (15) are respectively connected to a gas source through pipelines, and a shut-off valve C (22) is provided on the pipeline connected to the gas source.

10. A method for regulating air pressure in a high-low pressure dual-stage depressurization air supply system for an air flotation platform as described in any one of claims 1 to 9, characterized in that: Includes the following steps: In step A, the high-pressure gas cylinder (8) operates, and high-pressure gas is output to the high-pressure pressure reducing valve (13). Step B, the high-pressure reducing valve (13) reduces the pressure of the high-pressure gas to the medium-pressure range; Step C, the medium-pressure gas is temporarily stored in the gas container (9) to balance pressure fluctuations; Step D, the low-pressure reducing valve (11) further reduces the medium-pressure gas to the working pressure required by the air flotation platform; Step E: The gas is rapidly switched on and off by the high-speed switching valve (3) to achieve dynamic regulation of the gas pressure; Step F: Digital pressure gauges (10) are installed on the pipelines before the inlet of the high pressure reducing valve (13) and the low pressure reducing valve (11). The digital pressure gauges (10) are connected to the controller. The digital pressure gauges (10) detect the air pressure on the pipeline in real time and feed the pressure signal back to the controller. The controller controls the opening and closing of the high-speed switching valve (3) according to the preset pressure value to realize closed-loop control. Step G, the gas output by the high-speed switching valve (3) is distributed to the air bearings on multiple branches to provide uniform support for the air-floating platform; Step H: When the air flotation platform needs to descend, the low-pressure gas cylinder (15) and the high-pressure gas cylinder (8) work simultaneously. The low-pressure gas in the low-pressure gas cylinder (15) and the high-pressure gas in the high-pressure gas cylinder (8) are mixed and output to the high-pressure pressure reducing valve (13) to rapidly reduce the gas pressure. Then, steps B to G are repeated to rapidly descend the air flotation platform.

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