Temperature detection device for spray header, spray header and semiconductor processing machine table

Abstract

The invention provides a temperature detection device for a spray header, the spray header and a semiconductor processing machine table, and relates to the technical field of semiconductor manufacturing, and the device comprises a flexible substrate which is used for being attached to the spray header, and one surface, facing the spray header, of the flexible substrate is provided with a plurality of uniformly distributed positioning holes; one end of each thermocouple wire is a measuring end, the multiple measuring ends are arranged in the multiple positioning holes in a one-to-one correspondence mode, the measuring ends are used for collecting the temperature of the spraying head, and the other ends of the thermocouple wires are used for being externally connected with a temperature collector; and the protection tube is coated on the plurality of thermocouple wires, and the protection tube is used for bundling the plurality of thermocouple wires. According to the invention, the temperature distribution information of the surface of the spray header can be comprehensively detected, the tube bundle thermocouple wire is protected, signal interference and thermocouple wire damage are reduced, and the accuracy and reliability of measurement are improved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor manufacturing, and in particular to a temperature detection device for a shower head, the shower head and a semiconductor processing machine. Background Art

[0002] In semiconductor manufacturing, showerheads are key components of equipment such as chemical vapor deposition (CVD), physical vapor deposition (PVD), and etching (ETCH). Through tiny holes in their disks, showerheads uniformly spray process gases onto the wafer surface, enabling processes such as thin film deposition, material deposition, or etching. However, the temperature of the showerhead surface significantly affects the shape accuracy and uniformity of the holes, as well as the reaction rate of the process gases. Excessively high or low temperatures can cause the holes to deform or clog, or impair the reaction of the process gases, thereby affecting wafer processing quality. Therefore, accurate monitoring of showerhead surface temperature is crucial for improving process performance, predicting wafer process variations, and diagnosing equipment anomalies.

[0003] The existing technology for measuring the surface temperature of the shower head has the disadvantages of single and incomplete measurement, poor measurement accuracy, and difficulty in meeting the requirements of semiconductor manufacturing processes for accurate monitoring of the shower head temperature. Summary of the Invention

[0004] The present invention mainly provides a temperature detection device for a shower head, a shower head and a semiconductor processing machine, which are used to solve the technical problems raised in the above background technology, such as single and incomplete measurement, poor measurement accuracy, and difficulty in meeting the requirements of semiconductor manufacturing process for accurate monitoring of shower head temperature.

[0005] The technical solution adopted by the present invention to solve the above technical problems is: The present application provides a temperature detection device for a shower head, comprising: a flexible substrate for being attached to the shower head, a plurality of evenly distributed positioning holes being provided on a surface of the flexible substrate facing the shower head; a plurality of thermocouple wires, one end of each of the thermocouple wires being a measuring end, the plurality of measuring ends being arranged in a one-to-one correspondence within the plurality of positioning holes, the measuring end being used to collect the temperature on the shower head, and the other end of the thermocouple wire being used to be connected to an external temperature collector; and a protective tube covering the plurality of thermocouple wires, the protective tube being used to bundle the plurality of thermocouple wires.

[0006] Optionally, the flexible substrate includes a coating layer and a surface layer stacked on each other; The positioning hole is located in the covering layer, a portion of the protection tube is located between the covering layer and the surface layer, and another portion of the protection tube extends from between the covering layer and the surface layer.

[0007] Optionally, the covering layer is provided with a high-temperature resistant coating double-sided tape for bonding to the surface of the sprinkler head. Optionally, the covering layer and the surface layer are made of a high-temperature resistant film material. Optionally, the diameter of the thermocouple wire is less than or equal to 0.1 mm.

[0008] Optionally, a through-belt is further included, which is connected to one end of the protective tube, and the thermocouple wire passes through the through-belt into the protective tube, and multiple thermocouple wires are arranged side by side in the through-belt, and the through-belt is used to pass through the sealing ring of the reaction chamber.

[0009] Optionally, the through-belt is a double-layer structure, comprising a first insulating layer and a second insulating layer stacked on each other, and a plurality of thermocouple wires pass through the protective tube between the first insulating layer and the second insulating layer, and the total thickness of the first insulating layer and the second insulating layer is less than 0.2 mm.

[0010] Optionally, a connecting terminal is further included, wherein the connecting terminal is arranged at one end of the protection tube away from the through-band, the thermocouple wire is electrically connected to the connecting terminal, and the connecting terminal is used to externally connect to the temperature collector.

[0011] The present application provides a shower head, comprising a feed pipe, a shower head, and the temperature detection device as described above, wherein the feed pipe is connected to the shower head, and the temperature detection device is attached to the surface of the shower head.

[0012] The present application also provides a semiconductor processing machine, including a reaction chamber, a base, an electrostatic chuck, a vacuum device and the shower head as described above, wherein the base is located at the bottom of the reaction chamber, the electrostatic chuck is arranged on the base, the electrostatic chuck is used to fix the workpiece, the vacuum device is arranged on the side wall of the reaction chamber, the shower head is arranged at the top of the reaction chamber, and the shower head is used to introduce reaction gas into the reaction chamber.

[0013] The present application provides a temperature detection device for a shower head, a shower head, and a semiconductor processing machine. The thermocouple wire measuring end is fixed by a positioning hole so that multiple thermocouple wires can directly contact the surface of the shower head. Not only can the temperature of the shower head surface be accurately measured, but the temperature of multiple points on the shower head surface can also be measured simultaneously. The temperature distribution information on the shower head surface can be comprehensively detected. The protective tube bundles the thermocouple wires, reduces signal interference and thermocouple wire damage, and improves the accuracy and reliability of the measurement. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the technical solution of the present application, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying any creative work.

[0015] Figure 1 This is a schematic structural diagram of the temperature detection device for the shower head in this application.

[0016] Icon: 100-flexible substrate; 200-thermocouple wire; 210-measuring end; 300-protective tube; 400-through strip; 500-connection terminal. DETAILED DESCRIPTION

[0017] To make the objectives, technical solutions, and advantages of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0018] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present invention are only used to explain the relative position relationship, movement status, etc. between the various components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0019] In this application, unless otherwise specified or limited, the terms "connection" and "fixation" should be understood in a broad sense. For example, "fixation" can mean fixed connection, detachable connection, or integration; it can mean mechanical connection or electrical connection; it can mean direct connection or indirect connection through an intermediate medium; it can mean internal communication between two elements or interaction between two elements, unless otherwise specified. For those skilled in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0020] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present application, the descriptions of "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or suggesting their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of such features. In addition, the meaning of "and / or" appearing throughout the text includes three parallel schemes. Taking "A and / or B" as an example, it includes scheme A, or scheme B, or a scheme in which A and B are satisfied at the same time. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement it. When the combination of technical solutions is mutually contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by this application.

[0021] The existing technology for measuring the surface temperature of the shower head has the following problems: single measurement, incomplete measurement, poor measurement accuracy, and difficulty in meeting the requirements of semiconductor manufacturing processes for accurate monitoring of the shower head temperature. Figure 1 , provide the following technical solutions to overcome the above problems.

[0022] Please refer to Figure 1 An embodiment of the present application provides a temperature detection device for a shower head, comprising: a flexible substrate 100 for attachment to the shower head, the flexible substrate 100 having a surface facing the shower head and having a plurality of evenly distributed positioning holes; a plurality of thermocouple wires 200, each of the thermocouple wires 200 having a measuring end 210 at one end, the plurality of measuring ends 210 being disposed in a one-to-one correspondence within the plurality of positioning holes, the measuring end 210 being used to collect the temperature on the shower head, and the other end of the thermocouple wire 200 being used to connect to an external temperature collector; and a protective tube 300 covering the plurality of thermocouple wires 200, the protective tube 300 being used to bundle the plurality of thermocouple wires 200.

[0023] Specifically, the flexible substrate 100 secures the measuring end 210 of the thermocouple wire 200 through positioning holes, ensuring that the measuring end 210 is accurately attached to the showerhead surface and in direct contact with it. The positioning holes are evenly distributed to ensure that the measuring end 210 maintains uniform contact with the showerhead surface. The other end of the thermocouple wire 200 is connected to a temperature collector. Using the thermoelectric effect, the measuring end 210 senses the showerhead surface temperature and transmits the thermoelectric potential signal through the thermocouple wire 200 to an external temperature collector, alerting the operator to the showerhead surface temperature.

[0024] Furthermore, the protective tube 300 bundles the multiple thermocouple wires 200 together to prevent mutual interference or external damage between the thermocouple wires 200. Through physical protection, the wear and interference of the thermocouple wires 200 during use are reduced, ensuring the stability of signal transmission.

[0025] It should be noted that, in this embodiment, there is no specific limitation on the length of the thermocouple wire 200 , and it can be flexibly set according to actual needs.

[0026] The present application provides a temperature detection device for a shower head. The measuring end 210 of the thermocouple wire 200 is fixed by a positioning hole so that multiple thermocouple wires 200 can directly contact the surface of the shower head. Not only can the temperature of the shower head surface be accurately measured, but the temperature of multiple points on the shower head surface can also be measured simultaneously. The temperature distribution information on the shower head surface can be comprehensively detected. The protective tube 300 bundles the thermocouple wires 200 to reduce signal interference and damage to the thermocouple wires 200, thereby improving the accuracy and reliability of the measurement.

[0027] In one embodiment, the flexible substrate 100 includes a covering layer and a surface layer stacked on each other; the positioning hole is located in the covering layer, a portion of the protective tube 300 is located between the covering layer and the surface layer, and another portion of the protective tube 300 extends from between the covering layer and the surface layer.

[0028] Specifically, the flexible substrate 100 is composed of a covering layer and a surface layer, and the two layers are stacked on each other. The covering layer is in direct contact with the surface of the shower head, playing the role of adhesion and preliminary protection; the surface layer provides additional protection and structural support to prevent external damage. The positioning hole is located on the covering layer and is used to fix the measuring end 210 of the thermocouple wire 200 to ensure that the measuring end 210 can be accurately attached to the shower head and in direct contact with the shower head surface. Furthermore, the protective tube 300 extends between the covering layer and the surface layer. On the one hand, it provides physical protection for the thermocouple wire 200 to prevent damage to the thermocouple wire 200; on the other hand, through the constraint of the double-layer structure of the flexible substrate 100, the stability of the protective tube 300 and the thermocouple wire 200 in the flexible substrate 100 is ensured, avoiding displacement or damage of the thermocouple wire 200 due to bending or deformation of the flexible substrate 100.

[0029] As can be appreciated, the dual-layer structure of the flexible substrate 100 and the protective tube 300 enhances the mechanical strength and stability of the overall device, enabling it to better adapt to high-temperature environments and mechanical stresses. Furthermore, the dual-layer design of the flexible substrate 100 facilitates installation of the flexible substrate 100 and the protective tube 300, and also facilitates maintenance and replacement of the thermocouple wire 200.

[0030] In one embodiment, a high-temperature resistant double-sided adhesive tape is provided on the covering layer for bonding to the surface of the shower head.

[0031] Specifically, a layer of high-temperature-resistant double-sided adhesive, capable of withstanding temperatures of 270°C, is applied to the back of the coating layer. This double-sided adhesive securely adheres the flexible substrate 100 to the surface of the showerhead. One side of the double-sided adhesive adheres to the coating layer, while the other side adheres to the showerhead surface, ensuring a tight fit between the flexible substrate 100 and the showerhead. As can be appreciated, the high-temperature-resistant double-sided adhesive has excellent adhesion properties and can maintain its viscosity in high-temperature environments, ensuring that the flexible substrate 100 does not fall off due to high temperatures. The high-temperature-resistant double-sided adhesive maintains its physical and chemical properties within the operating temperature range of the showerhead, preventing degradation or failure, and preventing the generation of impurities that could affect the processing.

[0032] In one embodiment, the covering layer and the surface layer are made of high-temperature resistant thin film material.

[0033] Specifically, the high-temperature resistant film material is used as the material for the coating layer and the surface layer, and can withstand a high temperature environment of 270°C. The high-temperature resistant film material is processed into a film form and stacked together to form the flexible substrate 100. The coating layer is in direct contact with the surface of the shower head, and the surface layer provides additional protection and structural support. It can be understood that the high-temperature resistant film material can maintain its physical and chemical properties in a high-temperature environment without deformation, degradation or failure. The high-temperature resistant film material can remain stable within the operating temperature range of the shower head, ensuring that the flexible substrate 100 will not be damaged by high temperature. The high-temperature resistant film material has good flexibility and can adapt to the shape of the shower head surface, ensuring that the flexible substrate 100 is tightly fitted to the shower head surface.

[0034] In this embodiment, the materials of the coating layer and the surface layer are preferably polyimide (PI) film, ceramic film, polytetrafluoroethylene (PTFE) film, etc., which can be flexibly selected according to actual conditions and actual needs.

[0035] For example, in chemical vapor deposition (CVD) and physical vapor deposition (PVD) equipment, and in showerheads that typically operate in high-temperature environments, alumina ceramic films are selected as the coating and surface layers. Alumina ceramic films offer excellent high-temperature resistance and chemical stability, allowing them to remain stable in high-temperature environments. In etching (ETCH) equipment, showerheads typically operate in high-temperature and corrosive environments, and polyimide (PI) films or polytetrafluoroethylene (PTFE) films are selected as the coating and surface layers. PTFE films offer excellent high-temperature resistance and chemical stability, allowing them to remain stable in high-temperature and corrosive environments.

[0036] In one embodiment, the diameter of the thermocouple wire 200 is less than or equal to 0.1 mm.

[0037] Specifically, a thermocouple wire 200 with a diameter of 0.1 mm or less has a smaller heat capacity, enabling a faster response to temperature changes and improving measurement sensitivity and accuracy. The thin thermocouple wire 200 can sense temperature changes more quickly, reducing the impact of heat capacity on measurement, thereby improving measurement sensitivity and response speed. The thin thermocouple wire 200 also takes up less space, allowing for the placement of more measurement points within a limited space, enabling multi-point temperature monitoring.

[0038] In one embodiment, a through-belt 400 is further included. The through-belt 400 is connected to one end of the protective tube 300. The thermocouple wire 200 passes through the through-belt 400 and enters the protective tube 300. Multiple thermocouple wires 200 are arranged side by side in the through-belt 400. The through-belt 400 is used to pass through the sealing ring of the reaction chamber.

[0039] Specifically, multiple thermocouple wires 200 are inserted into the protective tube 300 through a through-belt 400 and arranged side by side within the through-belt 400, ensuring that the thermocouple wires 200 remain neatly arranged during extraction. The through-belt 400's structural design allows it to pass through the reaction chamber's sealing ring, ensuring that the thermocouple wires 200 can be safely extracted from the reaction chamber to the outside while maintaining the chamber's seal. As can be understood, the through-belt 400 serves as a transmission channel for the thermocouple wires 200, ensuring that the thermocouple wires 200 can transmit temperature signals from the showerhead surface to an external temperature collector.

[0040] In one embodiment, the through-belt 400 is a double-layer structure, comprising a first insulating layer and a second insulating layer stacked on each other, and a plurality of thermocouple wires 200 pass through the protective tube 300 between the first insulating layer and the second insulating layer, and the total thickness of the first insulating layer and the second insulating layer is less than 0.2 mm.

[0041] Specifically, the through-band 400 is designed as a double-layer structure, comprising a first insulating layer and a second insulating layer stacked on top of each other. Multiple thermocouple wires 200 are inserted into the protective tube 300 between the first and second insulating layers, ensuring that the thermocouple wires 200 are arranged side by side within the through-band 400. The combined thickness of the first and second insulating layers is less than 0.2 mm, ensuring a compact structure for the entire through-band 400. The first and second insulating layers provide excellent electrical insulation for the thermocouple wires 200, preventing short circuits between the thermocouple wires 200 and reducing the impact of external electromagnetic interference on the signal. By controlling the combined thickness of the two insulating layers to less than 0.2 mm, the through-band 400 is made more compact and ensures that the through-band 400 does not affect the sealing of the reaction chamber when passing through the sealing ring of the reaction chamber.

[0042] In one embodiment, a connection terminal 500 is further included. The connection terminal 500 is arranged at one end of the protection tube 300 away from the through-belt 400 . The thermocouple wire 200 is electrically connected to the connection terminal 500 . The connection terminal 500 is used to connect to the temperature collector.

[0043] Specifically, a connecting terminal 500 is provided at one end of the protective tube 300, distal from the through-band 400, for electrically connecting the thermocouple wire 200 to an external temperature collector. The other end of the thermocouple wire 200 (the non-measuring end 210) is electrically connected to the connecting terminal 500, ensuring signal transmission from the thermocouple wire 200 to the connecting terminal 500. Through the connecting terminal 500, the thermocouple wire 200 is connected to the temperature collector, enabling temperature signal collection and processing. As can be appreciated, the connecting terminal 500 provides a standardized electrical interface, enabling reliable connection between the thermocouple wire 200 and the external temperature collector. The temperature collector receives the thermoelectric potential signal transmitted by the thermocouple wire 200 through the connecting terminal 500 and converts it into a temperature value for further processing and analysis. Furthermore, the standardized electrical interface provided by the connecting terminal 500 makes the temperature detection device compatible with various types of temperature collectors, enhancing the system's versatility and flexibility.

[0044] An embodiment of the present application provides a shower head, comprising a feed pipe, a shower head, and the temperature detection device as described above, wherein the feed pipe is connected to the shower head, and the temperature detection device is attached to the surface of the shower head.

[0045] Specifically, the shower head is composed of a feed pipe and a nozzle, wherein the feed pipe is connected to the nozzle and is used to deliver process gas to the nozzle. A temperature detection device is attached to the surface of the nozzle to monitor the temperature of the nozzle surface in real time.

[0046] An embodiment of the present application also provides a semiconductor processing machine, including a reaction chamber, a base, an electrostatic chuck, a vacuum pumping device and the shower head as described above, wherein the base is located at the bottom of the reaction chamber, the electrostatic chuck is arranged on the base, the electrostatic chuck is used to fix the workpiece, the vacuum pumping device is arranged on the side wall of the reaction chamber, the shower head is arranged at the top of the reaction chamber, and the shower head is used to introduce reaction gas into the reaction chamber.

[0047] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any changes or substitutions within the technical scope disclosed in the present invention should be included in the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be based on the scope of protection of the claims.

Claims

1. A temperature detection device for a shower head, characterized in that: include: A flexible substrate is used to be attached to the shower head, and a plurality of evenly distributed positioning holes are formed on a surface of the flexible substrate facing the shower head; A plurality of thermocouple wires, one end of each thermocouple wire being a measuring end, the plurality of measuring ends being arranged in a one-to-one correspondence in the plurality of positioning holes, the measuring end being used to collect the temperature of the sprinkler head, and the other end of the thermocouple wire being used to connect to an external temperature collector; A protective tube is coated on the plurality of thermocouple wires and is used to bundle the plurality of thermocouple wires.

2. The temperature detection device for a shower head according to claim 1, characterized in that: The flexible substrate includes a coating layer and a surface layer stacked on each other; The positioning hole is located in the covering layer, a portion of the protection tube is located between the covering layer and the surface layer, and another portion of the protection tube extends from between the covering layer and the surface layer.

3. The temperature detection device for a shower head according to claim 2, characterized in that: The coating layer is provided with a high-temperature resistant double-sided adhesive for bonding to the surface of the sprinkler head.

4. The temperature detection device for a shower head according to claim 2, characterized in that: The coating layer and the surface layer are made of high-temperature resistant film material.

5. The temperature detection device for a shower head according to claim 2, characterized in that: The diameter of the thermocouple wire is less than or equal to 0.1 mm.

6. The temperature detection device for a shower head according to claim 1, characterized in that: It also includes a through-belt connected to one end of the protection tube, the thermocouple wire passes through the through-belt into the protection tube, a plurality of the thermocouple wires are arranged side by side in the through-belt, and the through-belt is used to pass through the sealing ring of the reaction chamber.

7. The temperature detection device for a shower head according to claim 6, characterized in that: The through-belt has a double-layer structure, comprising a first insulating layer and a second insulating layer stacked on each other, and a plurality of thermocouple wires pass through the protective tube between the first insulating layer and the second insulating layer. The total thickness of the first insulating layer and the second insulating layer is less than 0.2 mm.

8. The temperature detection device for a shower head according to claim 6, characterized in that: It also includes a connecting terminal, which is arranged at one end of the protection tube away from the through-band, the thermocouple wire is electrically connected to the connecting terminal, and the connecting terminal is used to be externally connected to the temperature collector.

9. Sprinkler head, characterized in that, It comprises a feeding pipe, a nozzle and a temperature detection device according to any one of claims 1 to 8, wherein the feeding pipe is connected to the nozzle, and the temperature detection device is attached to the surface of the nozzle.

10. A semiconductor processing machine, characterized in that: It includes a reaction chamber, a base, an electrostatic suction cup, a vacuum device and the shower head as described in claim 9, wherein the base is located at the bottom of the reaction chamber, the electrostatic suction cup is arranged on the base, the electrostatic suction cup is used to fix the workpiece, the vacuum device is arranged on the side wall of the reaction chamber, the shower head is arranged on the top of the reaction chamber, and the shower head is used to introduce reaction gas into the reaction chamber.

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