Piezoelectric motor rotating table

Abstract

The invention relates to the technical field of micro-nano precision driving and positioning, and discloses a piezoelectric motor rotating table which comprises a stator and a rotor. The stator comprises a flexible hinge mechanism and piezoelectric ceramics. The flexible hinge mechanism comprises a broken line type driving foot with pre-tightening force and a connecting part. A cavity structure is defined by the first fixed end, the first flexible hinge arm, the second fixed end and the second flexible hinge arm in sequence. And the piezoelectric ceramic is arranged in the cavity structure. The rotor includes a bearing. The broken line type driving feet abut against the bearing outer ring or the bearing inner ring. The broken line type driving foot drives the bearing outer ring or the bearing inner ring to rotate through friction coupling. The piezoelectric stepping direct drive motor driven by piezoelectric ceramics is adopted, the broken line type drive foot with pretightening force is arranged, linear micro-displacement generated by the piezoelectric ceramics can be converted into macroscopic angle rotation motion of a mechanical plane, and the rotation resolution can achieve high-precision angle positioning of micro radian. According to the invention, 360-degree bidirectional rotation motion and a power-off self-locking function are realized.

Description

Technical Field

[0001] The present invention belongs to the field of micro-nano precision driving and positioning technology, and in particular relates to a piezoelectric motor rotating table. Background Art

[0002] With the advancement of science and technology, the demand for micro- and nano-scale actuation and positioning technology is becoming increasingly urgent in cutting-edge technology fields both domestically and internationally. As one of the key technologies in this field, piezoelectric actuation technology, with its small size, high positioning accuracy, large travel range, and lack of electromagnetic interference, has demonstrated significant scientific significance and broad application prospects in fields such as micromachining, materials science, semiconductor processing, and bioengineering.

[0003] The piezoelectric rotary stage is a precision drive and positioning platform that uses piezoelectric drive technology to produce micro / nano-level motion resolution. It can be applied to technical fields such as ultra-precision machining, large-scale integrated circuit manufacturing, and scanning probe microscopy. Existing piezoelectric rotary stages mainly use direct drive to achieve piezoelectric micro-rotation. Due to the small deformation of the direct-drive hinge structure, in order to increase the output displacement of the direct-drive hinge structure, the hinge structure is complex, the load is small, and there are also defects such as a small rotation range, which seriously restricts the promotion and application of piezoelectric stick-slip rotary stages in the field of precision drive and positioning technology.

[0004] Based on the above, the current problem to be solved is to provide a piezoelectric motor rotary table with a simple structure, high repeatability, high resolution, large load and 360-degree bidirectional rotation. Summary of the Invention

[0005] The purpose of the present invention is to provide a piezoelectric motor rotary table, aiming to solve the problems in the prior art of the piezoelectric motor rotary table, namely, complex structure, low repeatability, low resolution, small load and small rotation range.

[0006] The present invention is implemented as follows: a piezoelectric motor rotating platform, comprising:

[0007] The stator includes a flexible hinge mechanism and a piezoelectric ceramic. The flexible hinge mechanism includes a preloaded zigzag drive foot and a connecting portion. The connecting portion includes a first fixed end, a first flexible hinge arm, a second fixed end, and a second flexible hinge arm. The first fixed end, the first flexible hinge arm, the second fixed end, and the second flexible hinge arm sequentially surround a cavity structure. The piezoelectric ceramic is disposed within the cavity structure.

[0008] The rotor includes a bearing, wherein the bearing includes a bearing outer ring and a bearing inner ring. The broken line driving foot abuts against the bearing outer ring or the bearing inner ring, and the broken line driving foot drives the bearing outer ring or the bearing inner ring to rotate by friction coupling.

[0009] Furthermore, the major axis of the piezoelectric ceramic forms an angle α with a tangent line at abutment between the broken-line driving foot and the bearing outer ring or the bearing inner ring, where 0<α<90°.

[0010] Furthermore, the zigzag driving foot includes an abutting end and a zigzag rebound portion connected to the abutting end.

[0011] Furthermore, the first flexible hinge arm and the second flexible hinge arm are configured as arc-shaped structures with pre-tightening force.

[0012] Furthermore, an end surface of the rotating outer ring of the bearing or the rotating inner ring of the bearing away from the stator is provided with an angle scale for measuring the rotation angle.

[0013] Furthermore, the end surface of the rotating outer ring of the bearing or the rotating inner ring of the bearing away from the stator is evenly provided with threaded holes, and the threaded holes are used to connect with an external mechanism.

[0014] Furthermore, it also includes an upper cover and a base, the stator and the rotor are arranged between the upper cover and the base, the outer ring of the bearing is connected to the upper cover and the base, the inner ring of the bearing is provided with an annular portion protruding toward the base, the stator is connected to the bottom of the outer ring of the bearing, and the broken line driving foot abuts against the outer wall of the annular portion.

[0015] Furthermore, the upper cover and the base are respectively provided with through holes in the middle.

[0016] Furthermore, a gasket is provided between the bearing outer ring and the stator.

[0017] The piezoelectric motor rotary table provided by the present invention has the following beneficial effects:

[0018] The piezoelectric motor rotary stage utilizes a piezoelectric stepper direct-drive motor driven by piezoelectric ceramics. A preloaded, zigzag drive converts the linear micro-displacement produced by the piezoelectric ceramics into macro-angular rotational motion on the mechanical plane, achieving high repeatability and micro-radian resolution.

[0019] The flexible hinge mechanism has a simple structure and comes with its own preload, and the entire structure operates stably. The broken-line drive foot includes an abutment end for contacting the side wall of the bearing outer ring or the bearing inner ring, and a broken-line rebound portion for adding a preload between the abutment end and the side wall of the bearing outer ring or the bearing inner ring. The broken-line drive foot produces an oblique displacement, which applies a vertical positive pressure to the side wall of the bearing outer ring or the bearing inner ring, while also applying a tangential rotational force (static friction) to the side wall of the bearing outer ring or the bearing inner ring. The present invention adopts the stick-slip drive principle and innovatively designs the flexible hinge mechanism to achieve 360-degree bidirectional rotational motion, with a large load and a power-off self-locking function. The present invention is provided with an angle scale that can display the rotation angle in real time. The middle of the upper cover and the base are respectively provided with through holes that allow light to pass through, which is compatible with the rotating table in optical environments (also compatible with conventional environments). BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 A schematic diagram of the three-dimensional structure of the piezoelectric motor rotating platform provided by the present invention;

[0021] Figure 2 The present invention provides Figure 1 Schematic diagram of the cross-section structure in the AA direction;

[0022] Figure 3 An exploded view of the piezoelectric motor rotary stage provided by the present invention;

[0023] Figure 4 A top view of the stator and rotor combination provided by the present invention;

[0024] Figure 5 A top view of the stator provided by the present invention;

[0025] In the figure: 1-stator; 11-flexible hinge mechanism; 111-broken line driving foot; 1111-abutting end; 1112-broken line rebound part; 112-connecting part; 1121-first fixed end; 1122-first flexible hinge arm; 1123-second fixed end; 1124-second flexible hinge arm; 1125-cavity structure; 12-piezoelectric ceramic; 2-rotor; 21-bearing; 211-bearing outer ring; 212-bearing inner ring; 2121-annular part; 22-angle scale; 23-threaded hole; 3-upper cover; 4-base. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0027] The implementation of the present invention is described in detail below with reference to specific embodiments.

[0028] The same or similar numbers in the drawings of this embodiment correspond to the same or similar parts; in the description of the present invention, it should be understood that if the terms "up", "down", "left", "right", etc. indicate directions or positional relationships, they are based on the directions or positional relationships shown in the drawings. This is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, the terms describing the positional relationship in the drawings are only used for illustrative purposes and cannot be understood as limiting the present invention. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.

[0029] Reference Figure 1-5 The figure shows a preferred embodiment of the present invention.

[0030] The piezoelectric motor rotating platform includes an upper cover 3 and a base 4. Figure 1-3 . A stator 1 and a rotor 2 are provided between the upper cover 3 and the base 4. Preferably, a through hole is provided in the middle of the upper cover 3 and the base 4 respectively. The stator 1 includes a flexible hinge mechanism 11 and a piezoelectric ceramic 12. The flexible hinge mechanism 11 includes a broken line driving foot 111 with a self-preloaded preload and a connecting portion 112. The connecting portion 112 is used to fix the piezoelectric ceramic 12. The connecting portion 112 includes a first fixed end 1121, a first flexible hinge arm 1122, a second fixed end 1123 and a second flexible hinge arm 1124, refer to Figure 5 . The first fixed end 1121, the first flexible hinge arm 1122, the second fixed end 1123 and the second flexible hinge arm 1124 surround the cavity structure 1125 in sequence. The piezoelectric ceramic 12 is arranged in the cavity structure 1125. The two ends of the piezoelectric ceramic 12 are respectively connected to the first fixed end 1121 and the second fixed end 1123. The first flexible hinge arm 1122 and the second flexible hinge arm 1124 are preferably configured as an arc structure with a pre-tightening force. The output end of the piezoelectric ceramic 12 is connected to the zigzag driving foot 111, that is, the end of the first fixed end 1121 facing away from the piezoelectric ceramic 12 is connected to the zigzag driving foot 111.

[0031] The rotor 2 includes a bearing 21. The bearing 21 comprises an outer ring 211, located on the outside, and an inner ring 212, located on the inside. A retainer is positioned between the outer ring 211 and the inner ring 212, with steel balls mounted on the retainer and a retaining ring positioned above the balls. A zigzag drive foot 111 abuts against the outer ring 211 or the inner ring 212. The zigzag drive foot 111 utilizes friction coupling to drive the outer ring 211 or the inner ring 212 in rotation. Specifically, the outer ring 211 is fixed, and the zigzag drive foot 111 drives the inner ring 212 in rotation; alternatively, the inner ring 212 is fixed, and the zigzag drive foot 111 drives the outer ring 211 in rotation. Threaded holes 23 are evenly distributed on the end surface of the rotating outer ring 211 or the rotating inner ring 212 facing away from the stator 1. These threads are used to connect to an external mechanism, allowing the bearing 21 to rotate the mechanism.

[0032] Preferred embodiment: The outer ring 211 of the bearing is connected with the upper cover 3 and the base 4, refer to Figure 4 . The bearing inner ring 212 is provided with an annular portion 2121 protruding toward the base 4. The upper end and the lower end of the bearing inner ring 212 extend to the through holes in the middle of the upper cover 3 and the base 4 respectively. The stator 1 is connected to the bottom of the bearing outer ring 211 by screws. The zigzag drive foot 111 abuts against the outer wall of the annular portion 2121. The zigzag drive foot 111 has its own pre-tightening force and can abut against the outer wall of the annular portion 2121. The zigzag drive foot 111 includes an abutting end 1111 and a zigzag rebound portion 1112 connected to the abutting end 1111. Preferably, the long axis m of the piezoelectric ceramic 12 forms an angle α with the tangent n at the abutment between the zigzag drive foot 111 and the bearing outer ring 211 or the bearing inner ring 212, 0<α<90°. The piezoelectric ceramic 12 drives the broken-line driving foot 111 to apply a vertical pressing force to the outer wall of the annular portion 2121 , while also applying a tangential rotational force to the annular portion 2121 .

[0033] An angle scale 22 for measuring the rotation angle is provided on the end surface of the rotating bearing outer ring 211 or the rotating bearing inner ring 212 facing away from the stator 1. Preferably, the bearing outer ring 211 or the rotating bearing inner ring 212 and the angle scale 22 are integrally formed. The angle scale 22 can display the rotation angle in real time. A plurality of threaded holes 23 are distributed in a circular array on the angle scale 22. A gasket is provided between the bearing outer ring 211 and the stator 1. This gasket not only extends the service life of the stator 1 but also allows for adjustment of the stator 1's installation height.

[0034] This does not limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A piezoelectric motor rotating platform, characterized in that: include: A stator (1) comprising a flexible hinge mechanism (11) and a piezoelectric ceramic (12), wherein the flexible hinge mechanism (11) comprises a broken-line driving foot (111) with a self-preloaded preload and a connecting portion (112); the connecting portion (112) comprises a first fixed end (1121), a first flexible hinge arm (1122), a second fixed end (1123) and a second flexible hinge arm (1124); the first fixed end (1121), the first flexible hinge arm (1122), the second fixed end (1123) and the second flexible hinge arm (1124) sequentially surround a cavity structure (1125), and the piezoelectric ceramic (12) is disposed in the cavity structure (1125); A rotor (2) includes a bearing (21), wherein the bearing (21) includes a bearing outer ring (211) and a bearing inner ring (212), wherein the broken line driving foot (111) abuts against the bearing outer ring (211) or the bearing inner ring (212), and the broken line driving foot (111) drives the bearing outer ring (211) or the bearing inner ring (212) to rotate by friction coupling.

2. A piezoelectric motor rotating platform, characterized in that: The long axis of the piezoelectric ceramic (12) and the tangent line at the abutment point between the broken-line driving foot (111) and the bearing outer ring (211) or the bearing inner ring (212) form an angle α, 0<α<90°.

3. A piezoelectric motor rotating platform, characterized in that: The folded-line driving foot (111) comprises an abutting end (1111) and a folded-line rebound portion (1112) connected to the abutting end (1111).

4. The piezoelectric motor rotating stage according to claim 1, wherein: The first flexible hinge arm (1122) and the second flexible hinge arm (1124) are configured as arc-shaped structures with pre-tightening force.

5. The piezoelectric motor rotating stage according to claim 1, wherein: An end surface of the rotating bearing outer ring (211) or the rotating bearing inner ring (212) away from the stator (1) is provided with an angle scale (22) for measuring the rotation angle.

6. The piezoelectric motor rotating stage according to claim 1, wherein: The end surface of the rotating bearing outer ring (211) or the rotating bearing inner ring (212) away from the stator (1) is evenly provided in the threaded hole (23), and the threaded hole (23) is used for connection with an external mechanism.

7. The piezoelectric motor rotating stage according to claim 1, wherein: The invention also includes an upper cover (3) and a base (4), wherein the stator (1) and the rotor (2) are arranged between the upper cover (3) and the base (4), the bearing outer ring (211) is connected to the upper cover (3) and the base (4), the bearing inner ring (212) is provided with an annular portion (2121) protruding toward the base (4), the stator (1) is connected to the bottom of the bearing outer ring (211), and the broken line driving foot (111) abuts against the outer side wall of the annular portion (2121).

8. The piezoelectric motor rotating stage according to claim 7, wherein: The upper cover (3) and the base (4) are respectively provided with through holes in their middle parts.

9. The piezoelectric motor rotating stage according to claim 7, wherein: A gasket is provided between the bearing outer ring (211) and the stator (1).

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