Carbon nanotube laser polishing quality real-time monitoring system and method, electronic device and medium

Abstract

The embodiment of the specification provides a carbon nanotube laser polishing quality real-time monitoring system and method based on optical coherence tomography (OCT) and secondary ion mass spectrometer (SIMS), an electronic device and a medium, wherein the system comprises: an ultrafast laser polishing device for high-precision laser polishing of a carbon nanotube film according to laser parameters; an OCT optical monitoring system for real-time monitoring of the surface morphology of the carbon nanotube film in the polishing process of the ultrafast laser polishing device, to obtain OCT data; a SIMS chemical component analysis module for detecting the surface element composition and impurity content of the carbon nanotube film before and after polishing, to obtain SIMS data; an intelligent feedback control system for optimizing the laser parameters of the ultrafast laser polishing device based on the OCT data and the SIMS data by using a machine learning algorithm; and a data processing and storage module for storing and analyzing the OCT data and the SIMS data, generating a surface quality evaluation report, and remotely adjusting the laser parameters according to the feedback of the intelligent feedback control system.

Description

TECHNICAL FIELD

[0001] The present document relates to the field of nanomaterial processing and surface treatment in carbon-based integrated circuit manufacturing processes, and particularly relates to a carbon nanotube laser polishing quality real-time monitoring system, method, electronic device and medium. BACKGROUND

[0002] Carbon nanotubes (CNTs) have been widely applied in nanoelectronics, sensors, energy storage devices, and carbon-based integrated circuits due to their excellent electrical, mechanical, thermal, and chemical properties. As the application of carbon nanotube films in electronic devices continues to increase, the influence of their surface quality on device performance becomes increasingly important. Therefore, how to ensure the uniformity and precision of the surface quality of carbon nanotube films during their preparation process has become a focus of current research and industrialization.

[0003] Traditional carbon nanotube film surface treatment methods such as chemical cleaning, mechanical polishing, and ultrasonic cleaning have the defect of being unable to precisely control the surface morphology and treatment effect. The chemical cleaning method often involves toxic chemicals, which can easily introduce contaminants and possibly damage the material; the mechanical polishing and ultrasonic cleaning methods can result in excessively high surface roughness, and even cause damage to the material structure. In addition, existing technologies often rely on post-quality detection, which cannot provide real-time feedback and adjust parameters during the processing, resulting in low processing efficiency and inconsistent polishing effect.

[0004] In recent years, laser polishing technology has been widely applied as an efficient, non-contact surface treatment method. Laser polishing not only enables high-precision surface treatment without abrasive and tool consumption, but also has the advantage of adjusting laser parameters (such as pulse width, wavelength, and energy density) to precisely control the surface quality. However, a major problem in existing laser polishing processes is the lack of real-time quality monitoring and feedback mechanisms, which cannot effectively monitor the surface changes during polishing, thereby affecting the polishing precision and efficiency.

[0005] To solve the above problems, recent research has proposed real-time monitoring methods based on optical coherence tomography (OCT) and secondary ion mass spectrometry (SIMS). OCT technology has high-resolution imaging capabilities, which can monitor the changes in the surface morphology of carbon nanotube films in real time, accurately measure the surface roughness and microstructure characteristics; while SIMS technology can analyze the chemical composition changes of materials on a scale of microns to nanometers, providing high-sensitivity surface element analysis and composition distribution information. Combining these two technologies in a real-time monitoring system during laser polishing can provide high-precision feedback during the processing, guide the optimization of laser parameters, and thus improve the consistency and precision of the polishing effect. SUMMARY

[0006] The application aims to provide a carbon nanotube laser polishing quality real-time monitoring system, method, electronic device and medium, and aims to solve the above problems in the prior art.

[0007] The application provides a carbon nanotube laser polishing quality real-time monitoring system based on optical coherence tomography (OCT) and secondary ion mass spectrometry (SIMS), comprising:

[0008] An ultrafast laser polishing device is used for high-precision laser polishing of a carbon nanotube film according to laser parameters;

[0009] An OCT optical monitoring system is used for real-time monitoring of the surface morphology of the carbon nanotube film in the polishing process of the ultrafast laser polishing device, and OCT data is obtained;

[0010] A SIMS chemical component analysis module is used for detecting the surface element composition and impurity content of the carbon nanotube film before and after polishing, and SIMS data is obtained;

[0011] An intelligent feedback control system is based on the OCT data and the SIMS data, and uses a machine learning algorithm to optimize the laser parameters of the ultrafast laser polishing device;

[0012] A data processing and storage module is used for storing and analyzing the OCT data and the SIMS data, generating a surface quality evaluation report, and remotely adjusting the laser parameters according to the feedback of the intelligent feedback control system.

[0013] The application provides a carbon nanotube laser polishing quality real-time monitoring method based on OCT and SIMS, which is used for a carbon nanotube laser polishing quality real-time monitoring system based on OCT and SIMS, and comprises the following steps:

[0014] An ultrafast laser polishing device is used for high-precision laser polishing of a carbon nanotube film according to laser parameters;

[0015] An OCT optical monitoring system is used for real-time monitoring of the surface morphology of the carbon nanotube film in the polishing process of the ultrafast laser polishing device, and OCT data is obtained;

[0016] A SIMS chemical component analysis module is used for detecting the surface element composition and impurity content of the carbon nanotube film before and after polishing, and SIMS data is obtained;

[0017] An intelligent feedback control system is based on the OCT data and the SIMS data, and uses a machine learning algorithm to optimize the laser parameters of the ultrafast laser polishing device;

[0018] The OCT data and the SIMS data are stored and analyzed by a data processing and storage module, a surface quality evaluation report is generated, and the laser parameters are remotely adjusted according to the feedback of the intelligent feedback control system.

[0019] The embodiment of the present application also provides an electronic device, comprising a memory, a processor and a computer program stored in the memory and executable on the processor, and the computer program implements the steps of the real-time monitoring method for laser polishing quality of carbon nanotube based on OCT and SIMS when executed by the processor.

[0020] The embodiment of the present application also provides a computer readable storage medium, wherein the computer readable storage medium stores an implementation program of information transmission, and the program implements the steps of the real-time monitoring method for laser polishing quality of carbon nanotube based on OCT and SIMS when executed by a processor.

[0021] The embodiment of the present application solves the problem of lack of real-time monitoring and feedback in the traditional laser polishing technology. By integrating the OCT and SIMS technologies, the surface morphology, composition change and quality of the carbon nanotube film can be monitored in real time during the laser polishing process, so as to ensure the stability and consistency of the polishing effect, thereby improving the quality and processing efficiency of the carbon nanotube film. The technical scheme of the embodiment of the present application not only provides a new solution for efficient processing of the carbon nanotube film, but also can be widely applied to the manufacturing of carbon-based integrated circuits, nanoelectronic devices and other high-precision materials. BRIEF DESCRIPTION OF DRAWINGS

[0022] In order to more clearly illustrate the technical scheme in the one or more embodiments of the present application or the prior art, the drawings needed to be used in the embodiment or prior art description will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments described in the present application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0023] Figure 1 is a schematic diagram of the real-time monitoring system for laser polishing quality of carbon nanotube based on OCT and SIMS of the embodiment of the present application;

[0024] Figure 2 is a schematic diagram of the overall work flow of the system of the embodiment of the present application;

[0025] Figure 3 is an OCT measurement diagram of the surface roughness of the carbon nanotube film before and after laser polishing of the embodiment of the present application;

[0026] Figure 4 is a SIMS analysis result measurement diagram of the embodiment of the present application;

[0027] Figure 5 is a flow chart of the OCT and SIMS based real-time monitoring method for carbon nanotube laser polishing quality of an embodiment of the present application;

[0028] Figure 6 is a schematic diagram of an electronic device of an embodiment of the present application. DETAILED DESCRIPTION

[0029] In order for those skilled in the art to better understand the technical solutions in one or more embodiments of the present specification, the technical solutions in one or more embodiments of the present specification will be described clearly and completely below in conjunction with the drawings in one or more embodiments of the present specification. Obviously, the described embodiments are only a part of the embodiments of the present specification, rather than all the embodiments. Based on one or more embodiments of the present specification, all other embodiments obtained by those skilled in the art without creative labor should fall within the protection scope of the present document.

[0030] System embodiment

[0031] According to an embodiment of the present application, an OCT and SIMS based real-time monitoring system for carbon nanotube laser polishing quality is provided. By integrating optical coherence tomography (OCT) and secondary ion mass spectrometer (SIMS) technologies, the surface morphology changes and chemical composition distribution of the carbon nanotube film during the laser polishing process are monitored in real time, feedback is provided and laser parameters are optimized, thereby improving the precision and efficiency of the carbon nanotube film polishing process. Figure 1 is a schematic diagram of the OCT and SIMS based real-time monitoring system for carbon nanotube laser polishing quality of an embodiment of the present application, as shown in Figure 1 According to an embodiment of the present application, the OCT and SIMS based real-time monitoring system for carbon nanotube laser polishing quality specifically includes:

[0032] An ultrafast laser polishing device 10 is used to polish the carbon nanotube film with high precision according to laser parameters; the laser parameters specifically include: laser pulse width, laser wavelength, laser energy density, and laser scanning rate.

[0033] An OCT optical monitoring system 12 is used to monitor the surface morphology of the carbon nanotube film during the polishing process by the ultrafast laser polishing device, and obtain OCT data; the OCT scanning depth of the OCT optical monitoring system is 50 pm, and the longitudinal resolution is ≤10 nm; the OCT optical monitoring system 12 is specifically used for:

[0034] Real-time surface roughness monitoring of the carbon nanotube film during the polishing process is performed, the detection range is 0.1 nm-50 nm, and the target surface roughness is ≤2 nm;

[0035] Identify the defects on the surface of the carbon nanotube film during the polishing process, and automatically adjust the laser focus position after defect identification;

[0036] Reconstruct the dynamic surface model of the surface of the carbon nanotube film during the polishing process in combination with AI algorithm.

[0037] SIMS chemical composition analysis module 14 for detecting the surface element composition and impurity content of the carbon nanotube film before and after polishing to obtain SIMS data; the mass resolution of the SIMS chemical composition analysis module is ≥5000, and the depth resolution is ≤2nm; the SIMS chemical composition analysis module 14 is specifically used for:

[0038] Identify trace metal residues, oxides and catalyst residues in the carbon nanotube film;

[0039] Accurately analyze the chemical changes of the material before and after laser polishing;

[0040] Accurately distinguish isotopes and trace impurities.

[0041] Intelligent feedback control system 16, based on the OCT data and the SIMS data, using machine learning algorithm to optimize the laser parameters of the ultrafast laser polishing device; specifically for:

[0042] Optimize the laser energy density and scanning rate based on the OCT data, when the surface roughness is >2nm, automatically reduce the laser energy by 5%-10%;

[0043] Adjust the laser pulse width based on the SIMS data, when the surface oxide content increases by >5%, automatically adjust the pulse width to a lower value;

[0044] Enter the defect repair mode: when the OCT detects surface cracks or particle contamination, intelligently adjust the laser focus to repair locally.

[0045] Data processing and storage module 18 for storing and analyzing the OCT data and the SIMS data, generating a surface quality evaluation report, and remotely adjusting the laser parameters according to the feedback of the intelligent feedback control system. Specifically for:

[0046] Long-term storage of historical data of carbon nanotube film polishing process;

[0047] Adjust the laser parameters through cloud computing;

[0048] Based on the OCT data and the SIMS data, automatically output a surface quality analysis report, wherein the surface quality analysis report specifically includes information about surface roughness, defect distribution and element composition change.

[0049] It should be noted that the system is suitable for the following processing applications of carbon nanotube thin films:

[0050] (1) Single-walled carbon nanotube (SWCNT) thin film, suitable for transparent conductive film and flexible electronic device, target surface roughness ≤ 1.5 nm;

[0051] (2) Multi-walled carbon nanotube (MWCNT) thin film, suitable for high thermal conductivity and heat dissipation material, target surface roughness ≤ 2 nm, thermal conductivity ≥ 2000 W / m·K;

[0052] (3) Carbon nanotube / metal composite thin film, used for field effect transistor (CNT-FET), resistance contact value ≤ 10 -3 Ω·cm 2 ;

[0053] (4) Carbon nanotube / polymer composite thin film, used for flexible electronic device, target mechanical stability ≥ 95%.

[0054] The system can be integrated into an industrialized carbon-based integrated circuit production line to realize online monitoring and automatic optimization of laser polishing process, and the polishing efficiency is improved by ≥ 30%.

[0055] As shown in Figure 2 , the working process of the entire carbon nanotube laser polishing system is shown, including the complete process from film preparation, laser polishing, real-time monitoring, data feedback to final surface quality evaluation. The real-time monitoring system for carbon nanotube laser polishing quality based on OCT and SIMS of the present application realizes the following technical solutions:

[0056] Laser polishing device: The system uses ultrafast laser with pulse width of 10 fs-200 fs, adjustable wavelength of 355 nm, 405 nm, 427 nm, 515 nm, 800 nm, 1030 nm, laser energy density of 0.1-10 J / cm 2 , scanning rate of 1-500 mm / s. The laser device is used for high-precision non-contact polishing of carbon nanotube thin film, ensuring high uniformity and low roughness of surface quality.

[0057] OCT optical monitoring system: The system uses OCT technology to monitor the surface morphology of carbon nanotube thin film in the polishing process in real time. The longitudinal resolution of the OCT system can reach ≤ 10 nm, the scanning depth can reach 50 μm, and the surface roughness, porosity, micro-cracks and other defects can be measured in real time, and the laser polishing parameters are automatically adjusted through the feedback control system.

[0058] SIMS chemical composition analysis module: The SIMS module is used to analyze the changes in the chemical composition of the surface of the carbon nanotube film during polishing, providing information on the surface element composition, impurity content, and surface oxide or catalyst residue. The mass resolution of SIMS is ≥5000, the depth resolution is ≤2nm, and the sensitivity can reach the ppb level, allowing accurate analysis of the trace changes in the material before and after polishing.

[0059] Intelligent feedback control system: Based on OCT and SIMS data, the system automatically optimizes laser parameters through machine learning algorithms. When OCT detects that the surface roughness exceeds the preset threshold, the system will automatically adjust the laser energy density and scanning speed; when SIMS detects an increase in surface oxide or impurity content, the system will adjust the pulse width to ensure controllability of surface quality and composition changes. The response time of the entire feedback control system is ≤0.1 seconds, ensuring real-time optimization of the polishing process.

[0060] Data processing and storage module: The system has strong data storage and processing capabilities, with a storage capacity of ≥10TB, capable of saving historical data of the carbon nanotube film polishing process and automatically generating surface quality analysis reports. In addition, the system supports remote control, allowing operators to remotely monitor and adjust the processing process through the cloud platform.

[0061] As can be seen from the above technical aspects, the technical scheme of the embodiment of the present application combines OCT and SIMS for real-time monitoring of the quality of carbon nanotube film laser polishing, improving the processing precision and feedback speed; the intelligent feedback system combines OCT and SIMS data and automatically optimizes laser parameters through machine learning algorithms, improving the processing consistency; it has high-resolution three-dimensional topography reconstruction function, making the polishing process more controllable and optimizing the surface quality of the film. The technical scheme of the embodiment of the present application realizes polishing monitoring and adjustment at the nanometer level; using OCT and SIMS dual monitoring means, it can analyze the surface topography and monitor the material composition changes, improving the characterization accuracy; combined with real-time data transmission (≥1GHz) and remote control function, it is suitable for industrial production lines, improving the automation level. The technical scheme of the embodiment of the present application can be directly applied to high-end fields such as carbon-based integrated circuits, flexible electronic devices, sensors, and supercapacitors, meeting the demand for high-precision surface processing; it can improve the polishing efficiency of carbon nanotube films by ≥30%, and ensure that the surface roughness is ≤2nm, improving the material performance stability; it is compatible with various carbon nanotube films and can be applied to the manufacture of single-walled carbon nanotubes, multi-walled carbon nanotubes, and carbon nanotube composites, with a wide market demand.

[0062] The application effect of the OCT and SIMS based carbon nanotube laser polishing quality real-time monitoring system in carbon nanotube film processing is shown below. The system is used for laser polishing of carbon nanotube film, and realizes real-time surface quality monitoring and laser parameter optimization, so as to improve the surface smoothness and processing efficiency of the carbon nanotube film.

[0063] 1. Experimental materials and equipment

[0064] Material: Single-walled carbon nanotube (SWCNT) film with a thickness of 20 nm and a silicon (Si) wafer as the substrate, with an initial surface roughness of 4 nm.

[0065] Laser equipment: Ultrafast laser source with a pulse width of 50 fs, a wavelength of 800 nm, and a laser energy density adjustable range of 0.1-10 J / cm 2 , and a scanning speed of 100 mm / s.

[0066] OCT system: Resolution of 10 nm, scanning depth of 50 μm, used for real-time monitoring of film surface morphology changes.

[0067] SIMS system: Mass resolution of 5000, depth resolution of ≤2 nm, used for analyzing the chemical composition changes of the film before and after polishing.

[0068] 2. Experimental steps (1) Laser polishing process

[0069] Place the carbon nanotube film in the laser polishing device and start adjusting the laser parameters. Initially set the laser energy density to 2 J / cm 2 , pulse width to 50 fs, and scanning speed to 100 mm / s. The laser pulse passes through the surface of the carbon nanotube film, and the OCT system is used to monitor the surface morphology in real time, and the SIMS system is used to analyze the changes in the surface elements of the material.

[0070] (2) Real-time monitoring and feedback adjustment

[0071] During the laser polishing process, the OCT optical monitoring system continuously captures the changes in the surface roughness of the film. When the OCT system detects that the surface roughness exceeds 2 nm, the system automatically adjusts the laser parameters through an intelligent feedback control mechanism:

[0072] Laser energy density: adjusted to 1.5 J / cm 2 ;

[0073] Pulse width: shortened to 30 fs to reduce the heat affected area and improve the surface smoothness;

[0074] Scanning speed: adjusted to 120 mm / s to improve the polishing efficiency.

[0075] The SIMS system synchronously monitors the elemental composition of the thin film. Experimental data show that the surface oxygen content gradually decreases during polishing, and the surface carbon oxide content decreases from 5% to 1%, indicating that the oxide layer is removed during laser polishing and the atomic structure of the carbon nanotube is maintained.

[0076] 3. Quality Assessment

[0077] After polishing, the surface roughness of the thin film is measured using OCT. The results show that the average surface roughness of the carbon nanotube thin film decreases from Ra 4nm to Ra 1.5nm, meeting the required surface quality standards. As shown in Figure 3 , the surface morphology changes of the carbon nanotube thin film before and after polishing are demonstrated, and the difference in roughness before and after using OCT data is compared, proving the effectiveness of the system in reducing surface roughness.

[0078] The experimental results show that through the real-time monitoring and feedback system based on OCT and SIMS, the surface roughness of the carbon nanotube thin film can be effectively controlled during laser polishing, and the chemical composition of the film surface can be precisely regulated. The system successfully reduces the surface roughness from 4nm to 1.5nm, and removes surface impurities and oxides, significantly improving the quality and performance of the film. For example, as shown in Figure 4 , the removal of catalyst residues (such as PMMA residues, nitrogen-containing dopants) and the optimization of surface composition during polishing are compared through SIMS analysis results.

[0079] Focus on the changes of C, H, O, N, because the catalyst mainly includes C, H, O, N4elements, and the carbon nanotube thin film is mainly composed of C elements, and the measured results of element changes are shown in Table 1.

[0080] Table 1 SIMS measured results of C, H, O, N elements in carbon nanotube thin film before and after laser polishing

[0081]

[0082] Combined Figure 4 with the SIMS measured results in Table 1, it can be found that the C content increases significantly, indicating that the surface polymer layer (containing H / N / O) is removed, exposing the high-purity CNT skeleton (sp 2 -C dominated). H, N, O decreases synchronously, indicating that the polymer (such as PMMA residues, nitrogen-containing dopants) is selectively decomposed by laser.

[0083] Based on Figure 4 the results in Table 1, the mechanism of laser polishing to remove polymers mainly includes two parts, as follows:

[0084] (1) Laser-polymer interaction

[0085] Photo-thermal dissociation: ultrafast laser (10-200 fs) generates nonlinear absorption in polymers, local temperature transient >2000 K, leading to: C-H bond breaking (bond energy ~413 kJ / mol), causing H2 to evaporate (SIMS detects H - decrease); C-N / C=O bond breaking (bond energy ~305 kJ / mol), causing CO, N2 to release (O - , N - decrease).

[0086] Selective removal: polymer pyrolysis threshold (~0.2 J / cm 2 ) is much lower than CNT (~0.8 J / cm 2 ), achieving surface cleaning.

[0087] Photo-chemical degradation: ultraviolet band laser (such as 355 nm) directly destroys the covalent bond of the polymer chain (such as the π→π* transition of C=O), generating small molecular fragments (SIMS detects CH - , CN - peak decrease).

[0088] (2) Evolution of surface chemical state

[0089] C chemical state change (SIMS secondary ion characteristics): before polishing, the C2 - / C - ratio is low (~0.3), reflecting the dominance of sp 3 -C in polymers; after polishing, the C2 - / C - ratio increases (~1.2), corresponding to the sp 2 -C characteristics of CNT (graphitization enhancement).

[0090] O / N residual analysis: the remaining O (~3.8 At%) is mainly from the carboxyl group (-COOH) at the end of CNT, and N (~1.8 At%) is derived from a small amount of doped pyridine nitrogen (SIMS detects CN - peak).

[0091] In summary, the embodiments of the present application have the following beneficial effects:

[0092] 1. Improve processing efficiency: through the real-time feedback mechanism, the automatic adjustment of laser parameters makes the polishing process more efficient, reducing unnecessary energy waste and over-polishing.

[0093] 2. Surface quality control: the combination of OCT and SIMS systems provides precise surface quality control, ensuring accurate regulation of the surface roughness of the carbon nanotube film and effectively removing surface contaminants.

[0094] 3. Improved material properties: By removing oxides and impurities, the structure and properties of carbon nanotubes are maintained, enhancing their potential applications in carbon-based integrated circuits and nanoelectronic devices.

[0095] Method embodiment

[0096] According to the embodiment of the present application, a real-time monitoring method for carbon nanotube laser polishing quality based on OCT and SIMS is provided, which is used for a real-time monitoring system for carbon nanotube laser polishing quality based on OCT and SIMS, Figure 5 is the flowchart of the real-time monitoring method for carbon nanotube laser polishing quality based on OCT and SIMS according to the embodiment of the present application, as Figure 5 shown, the real-time monitoring method for carbon nanotube laser polishing quality based on OCT and SIMS according to the embodiment of the present application specifically includes:

[0097] Step S501, high-precision laser polishing of the carbon nanotube film is performed by the ultrafast laser polishing device according to laser parameters; the laser parameters specifically include: laser pulse width, laser wavelength, laser energy density, and laser scanning rate;

[0098] Step S502, the surface morphology of the carbon nanotube film during the polishing process by the ultrafast laser polishing device is monitored in real time by the OCT optical monitoring system, and OCT data is obtained; specifically including:

[0099] Real-time surface roughness monitoring of the carbon nanotube film during the polishing process is performed, the detection range is 0.1nm-50nm, and the target surface roughness is ≤2nm;

[0100] Defect identification of the surface of the carbon nanotube film during the polishing process is performed, and the laser focal point position is automatically adjusted after defect identification;

[0101] Dynamic surface model reconstruction of the surface of the carbon nanotube film during the polishing process is performed in combination with an AI algorithm; wherein the OCT scanning depth of the OCT optical monitoring system is 50μm, and the longitudinal resolution is ≤10nm;

[0102] Step S503, the surface element composition and impurity content of the carbon nanotube film before and after polishing are detected by the SIMS chemical composition analysis module, and SIMS data is obtained; specifically including:

[0103] Identify trace metal residues, oxides and catalyst residues in the carbon nanotube film;

[0104] Precise analysis of the chemical changes of the material before and after laser polishing;

[0105] Accurate differentiation of isotopes and trace impurities; wherein the mass resolution of the SIMS chemical composition analysis module is ≥5000, and the depth resolution is ≤2nm;

[0106] Step S504 involves controlling the OCT data and SIMS data through an intelligent feedback system, and optimizing the laser parameters of the ultrafast laser polishing device using machine learning algorithms; specifically including:

[0107] Based on OCT data, the laser energy density and scanning rate are optimized, and the laser energy is automatically reduced by 5%-10% when the surface roughness is >2nm.

[0108] The laser pulse width is adjusted based on SIMS data. When the surface oxide content increases by more than 5%, the pulse width is automatically adjusted to a lower value.

[0109] Entering Defect Repair Mode: When OCT detects surface cracks or particulate contamination, it intelligently adjusts the laser focus for local repair.

[0110] Step S505 involves storing and analyzing the OCT data and SIMS data through a data processing and storage module to generate a surface quality assessment report, and remotely adjusting the laser parameters based on feedback from the intelligent feedback control system. Specifically, this includes:

[0111] Long-term storage of historical data on the polishing process of carbon nanotube films;

[0112] Adjust laser parameters via cloud computing;

[0113] The surface quality analysis report is automatically generated based on OCT and SIMS data. The surface quality analysis report specifically includes information on surface roughness, defect distribution, and elemental composition variations.

[0114] Device Example 1

[0115] This invention provides an electronic device, such as... Figure 6 As shown, it includes: a memory 60, a processor 62, and a computer program stored in the memory 60 and executable on the processor 62, wherein the computer program, when executed by the processor 62, performs the steps as described in the method embodiment.

[0116] Device Example 2

[0117] This invention provides a computer-readable storage medium storing an information transmission implementation program, which, when executed by a processor 62, performs the steps described in the method embodiment.

[0118] The computer-readable storage media described in this embodiment include, but are not limited to, ROM, RAM, disk, or optical disk.

[0119] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, and are not intended to limit the present application; although the present application has been described in detail with reference to the above embodiments, those skilled in the art should understand that the technical solutions recorded in the above embodiments can be modified, or some or all of the technical features can be replaced by equivalents; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A real-time monitoring system for carbon nanotube laser polishing quality based on optical coherence tomography (OCT) and secondary ion mass spectrometer (SIMS), characterized in that, include: An ultrafast laser polishing device is used to perform high-precision laser polishing of carbon nanotube films according to laser parameters. An OCT optical monitoring system is used to monitor the surface morphology of the carbon nanotube film during the polishing process of the ultrafast laser polishing device in real time, obtaining OCT data; the OCT optical monitoring system has an OCT scanning depth of 50 μm and a longitudinal resolution of ≤10 nm; the OCT optical monitoring system is specifically used for: Real-time surface roughness monitoring of carbon nanotube films during polishing was performed, with a detection range of 0.1 nm-50 nm and a target surface roughness ≤2 nm. Defects on the surface of carbon nanotube films are identified during the polishing process, and the laser focus position is automatically adjusted after defect identification. The system utilizes AI algorithms to reconstruct a dynamic surface model of the carbon nanotube film during polishing; a SIMS chemical composition analysis module is used to detect the surface elemental composition and impurity content of the carbon nanotube film before and after polishing, obtaining SIMS data; the SIMS chemical composition analysis module has a mass resolution ≥5000 and a depth resolution ≤2 nm; the SIMS chemical composition analysis module is specifically used for: Identify trace metal residues, oxides, and catalyst residues in carbon nanotube films; Precisely analyze the chemical changes of materials before and after laser polishing; Accurately distinguish isotopes from trace impurities; The intelligent feedback control system, based on the OCT data and the SIMS data, optimizes the laser parameters of the ultrafast laser polishing device using machine learning algorithms; the intelligent feedback control system is specifically used for: Based on OCT data, the laser energy density and scanning rate are optimized, and the laser energy is automatically reduced by 5%-10% when the surface roughness is >2 nm. The laser pulse width is adjusted based on SIMS data. When the surface oxide content increases by more than 5%, the pulse width is automatically adjusted to a lower value. Entering Defect Repair Mode: When OCT detects surface cracks or particulate contamination, it intelligently adjusts the laser focus for local repair. The data processing and storage module is used to store and analyze the OCT data and the SIMS data, generate a surface quality assessment report, and remotely adjust the laser parameters based on feedback from the intelligent feedback control system.

2. The system of claim 1, wherein, The laser parameters specifically include: Laser pulse width, laser wavelength, laser energy density, and laser scanning rate.

3. The system of claim 1, wherein, The data processing and storage module is specifically used for: Long-term storage of historical data on the polishing process of carbon nanotube films; Laser parameters are adjusted via cloud computing; The surface quality analysis report is automatically generated based on OCT and SIMS data. The surface quality analysis report specifically includes information on surface roughness, defect distribution, and elemental composition variations.

4. A method for real-time monitoring of carbon nanotube laser polishing quality based on OCT and SIMS, characterized in that, A real-time monitoring system for the quality of carbon nanotube laser polishing based on OCT and SIMS, the method specifically includes: High-precision laser polishing of carbon nanotube films is performed using an ultrafast laser polishing device based on laser parameters. The surface morphology of the carbon nanotube film during the polishing process of the ultrafast laser polishing device is monitored in real time using an OCT optical monitoring system to obtain OCT data; specifically including: Real-time surface roughness monitoring of the carbon nanotube film during the polishing process, the detection range is 0.1 nm-50 nm, and the target surface roughness is ≤2 nm; Defect identification of the surface of the carbon nanotube film during the polishing process, and automatic adjustment of the laser focal point position after defect identification; Dynamic surface model reconstruction of the surface of the carbon nanotube film during the polishing process combined with AI algorithm; wherein the OCT scanning depth of the OCT optical monitoring system is 50 μm, and the longitudinal resolution is ≤10 nm; Detecting the surface element composition and impurity content of the carbon nanotube film before and after polishing through the SIMS chemical composition analysis module to obtain SIMS data; specifically including: Identifying trace metal residues, oxides and catalyst residues in the carbon nanotube film; Precise analysis of the chemical changes of the material before and after laser polishing; Accurate distinction of isotopes and trace impurities; wherein the mass resolution of the SIMS chemical composition analysis module is ≥5000, and the depth resolution is ≤2 nm; Optimizing the laser parameters of the ultrafast laser polishing device using machine learning algorithm based on the OCT data and the SIMS data through the intelligent feedback control system; specifically including: Optimizing the laser energy density and scanning rate based on the OCT data, when the surface roughness is >2 nm, automatically reducing the laser energy by 5%-10%; Adjusting the laser pulse width based on the SIMS data, when the surface oxide content increases by >5%, automatically adjusting the pulse width to a lower value; Entering the defect repair mode: when the OCT detects surface cracks or particle contamination, intelligently adjusting the laser focal point for local repair; Storing and analyzing the OCT data and the SIMS data through the data processing and storage module, generating a surface quality evaluation report, and remotely adjusting the laser parameters according to the feedback of the intelligent feedback control system.

5. The method of claim 4, wherein, The laser parameters specifically include: laser pulse width, laser wavelength, laser energy density, and laser scanning rate; Storing and analyzing the OCT data and the SIMS data through the data processing and storage module, generating a surface quality evaluation report, and remotely adjusting the laser parameters according to the feedback of the intelligent feedback control system specifically including: Long-term storage of historical data of the carbon nanotube film polishing process; Adjusting the laser parameters through cloud computing; Automatically outputting a surface quality analysis report based on the OCT data and the SIMS data, wherein the surface quality analysis report specifically includes information about surface roughness, defect distribution, and element composition changes.

6. An electronic device, comprising: Including: A memory, a processor, and a computer program stored on the memory and executable on the processor, which when executed by the processor implements the steps of the OCT and SIMS based real-time monitoring method of carbon nanotube laser polishing quality according to any one of claims 4-5.

7. A computer readable storage medium characterized in that, The computer readable storage medium stores an information transmission implementation program, and the program is executed by the processor to implement the steps of the OCT and SIMS based real-time monitoring method of carbon nanotube laser polishing quality according to any one of claims 4-5.

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