Device and method for safely replacing chemical liquid medicine and supply system

Abstract

The invention relates to the technical field of semiconductor manufacturing, and discloses a device and method for safely replacing chemical liquid medicine and a supply system. The device comprises a liquid medicine barrel and a barrel cover, a sealing layer is arranged on the inner side of the barrel cover, an operation hole is formed in the center of the sealing layer and provided with a one-way opening structure, a liquid pumping pipe is allowed to be opened in a one-way mode from outside to inside, and the outer side of the operation hole is covered with a peelable sealing adhesive tape. The one-way opening structure is an elastic valve and is composed of an elastic sealing piece inclining towards the interior of the barrel, a sealing flange is arranged at the tail end of the one-way opening structure, and the one-way opening structure is buckled to form liquid-tight sealing when the liquid extraction pipe is pulled out. The sealing layer is detachably connected with the barrel cover through an annular clamping groove and provided with an O-shaped sealing ring. The hole diameter of the operation hole is larger than the outer diameter of the liquid pumping pipe. The replacement method comprises the steps of tearing off the sealing adhesive tape, inserting the liquid extraction pipe, pulling out the liquid extraction pipe and the like. The chemical liquid medicine supply system comprises a plurality of chemical liquid medicine safe replacement devices which are connected in parallel. According to the invention, safe and efficient replacement of chemical liquid medicine is realized, and the operation risk is reduced.

Description

Technical Field

[0001] The present invention belongs to the technical field of semiconductor manufacturing, and in particular relates to a device for safely replacing chemical liquid, and also relates to a method for safely replacing chemical liquid and a supply system. Background Art

[0002] In the semiconductor integrated circuit and chip manufacturing industry, processes such as wet cleaning and wet etching frequently require the use of large amounts of chemical solutions, such as hydrofluoric acid, sulfuric acid, nitric acid, hydrochloric acid, ammonia, hydrogen peroxide, and sodium hydroxide. These chemicals are often highly corrosive, toxic, or volatile, posing a serious threat to human health and environmental safety.

[0003] Currently, replacing chemical solutions during production relies primarily on manual labor: when a barrel of chemical solution runs out, an operator manually removes the extraction tube from the old barrel, opens the lid of the new barrel, and inserts the extraction tube into the new barrel. Although operators wear protective gear such as face masks, the chemical solution can still evaporate or splash during the replacement process, potentially causing harm, such as inhalation of toxic gases or burns from corrosive liquids.

[0004] Existing technology lacks sealing in liquid medicine barrels, especially when opening the barrel lid and inserting the liquid extraction tube, which cannot effectively prevent the volatilization and splashing of liquid medicine. In addition, frequent manual operation not only increases safety risks, but can also lead to liquid medicine contamination or waste due to improper operation.

[0005] Therefore, there is an urgent need for a device that can achieve safe and efficient replacement of chemical liquids to solve the above problems, reduce hazards to operators, and improve the reliability and safety of the production process. Summary of the Invention

[0006] One purpose of the present invention is to provide a device for safely replacing chemical liquid, aiming to solve the problem that chemical liquid is prone to leakage and contamination during the replacement process, and to improve the safety and reliability of the chemical liquid replacement process.

[0007] To achieve the above object, the present invention provides the following technical solutions:

[0008] The present invention provides a device for safely replacing chemical liquid, comprising a liquid liquid barrel and a barrel cover, wherein a sealing layer is fixedly arranged on the inner side of the barrel cover; an operation hole is provided at the center of the sealing layer, and a one-way opening structure is provided at the operation hole, wherein the one-way opening structure is configured to only allow a liquid extraction tube to be opened in one direction from the outside to the inside; and the outer side of the operation hole is covered with a peelable sealing tape.

[0009] In addition to the above technical features, the present invention has also made optimization and improvements in the following aspects:

[0010] As a preferred technical solution of the present invention, the sealing layer and the liquid medicine barrel are both made of corrosion-resistant polymers.

[0011] As a preferred technical solution of the present invention, the one-way opening structure is an elastic valve, including at least two elastic sealing sheets inclined toward the barrel. The elastic sealing sheets close the operating hole in a natural state and elastically deform outward when the liquid extraction tube is inserted.

[0012] As a preferred technical solution of the present invention, a sealing flange is provided at the end of the elastic sealing sheet. When the liquid extraction tube is pulled out, the sealing flanges are buckled together to form a liquid-tight seal.

[0013] As a preferred technical solution of the present invention, the elastic sealing sheet is a perfluoroether rubber sealing sheet with a thickness of 1.2 to 1.8 mm.

[0014] As a preferred technical solution of the present invention, the adhesive layer of the sealing tape has a thickness of 0.05 to 0.1 mm, and the covering area exceeds the edge of the operating hole by 8 to 10 mm.

[0015] As a preferred technical solution of the present invention, the sealing layer and the barrel cover are detachably connected through an annular groove, and an O-ring is provided at the connection.

[0016] As a preferred technical solution of the present invention, the diameter of the operating hole is 1.05-1.1 times the outer diameter of the liquid extraction tube, and a guide slope is provided on the edge of the hole.

[0017] A second object of the present invention is to provide a method for safely replacing chemical liquids, based on the above-mentioned device for safely replacing chemical liquids, comprising:

[0018] S1. Remove the sealing tape to expose the operating hole;

[0019] S2. Insert the liquid extraction tube vertically into the operating hole to force the one-way opening structure to open;

[0020] S3. After the liquid medicine is extracted, the extraction tube is pulled out and the one-way opening structure automatically closes.

[0021] The third object of the present invention is to provide a chemical liquid supply system, comprising a plurality of the aforementioned safe chemical liquid replacement devices connected in parallel, wherein the liquid extraction pipe of each safe chemical liquid replacement device is connected to the main pipeline via a three-way valve.

[0022] Combined with the description of the above technical content, the technical effects of this application are mainly reflected in the following aspects:

[0023] 1. Dynamic sealing and fluid control optimization

[0024] Intelligent sealing mechanism of the elastic valve: Through the dynamic deformation design of the elastic sealing piece, low-resistance opening when inserting the suction tube and rapid closure when removing it are achieved. Combined with the fluid negative pressure effect, the sealing is enhanced, significantly reducing the risk of drug leakage and air infiltration.

[0025] Efficient flow design of the guide slope: optimizes the flow path of the liquid, reduces turbulence and bubble mixing, ensures stable delivery of high-purity liquid (such as semiconductor cleaning fluid), and avoids splashing or contamination.

[0026] 2. Materials Science and Corrosion Protection

[0027] Molecular-level corrosion resistance of perfluoroether rubber: Perfluoroether rubber sealing sheets with a thickness of 1.2 to 1.8 mm can resist corrosion from strong acids (such as hydrofluoric acid) and strong alkalis (such as sodium hydroxide), and maintain high elasticity and sealing reliability for a long time.

[0028] Material consistency and anti-pollution design: The sealing layer and the chemical solution barrel are made of the same corrosion-resistant polymer (such as PTFE / PFA) to avoid electrochemical corrosion or dissolution contamination, meeting the semiconductor industry's stringent requirements for high-purity chemical solutions.

[0029] 3. Anti-volatile and gas phase barrier

[0030] Double-sealed physical-mechanical barrier: The sealing tape (0.05-0.1mm adhesive layer) works synergistically with the elastic valve to block volatilization (such as ammonia) before peeling and block gas phase diffusion through surface tension after peeling.

[0031] Micro-seal reinforcement of O-ring: Fluororubber O-ring fills the gap in the assembly interface and effectively prevents the escape of liquid vapor.

[0032] 4. System-level security and fault-tolerant design

[0033] Failure redundancy of the parallel system: Multiple liquid tanks are connected in parallel through three-way valves. When the seal of a single tank fails, it can be quickly switched to the backup tank. Combined with the negative pressure design of the main line, production continuity is ensured.

[0034] Ergonomically designed to prevent misoperation: The precise interference fit between the operating hole and the liquid extraction tube (1.05-1.1 times the outer diameter) prevents damage to the sealing piece due to oblique insertion, thereby improving operational reliability.

[0035] 5. Process compatibility and standardization potential

[0036] Compatibility with automated equipment: The standardized one-way opening structure seamlessly connects with the robotic arm liquid exchange system, supporting unmanned operation in semiconductor factories.

[0037] Maintenance advantages of the removable sealing layer: The annular slot design facilitates replacement or cleaning of the sealing layer, reduces the impact of material aging on sealing performance, and extends service life.

[0038] In summary, this application achieves zero volatility, zero sputtering, and zero pollution during the chemical solution replacement process through dynamic seal optimization, the use of highly corrosion-resistant materials, anti-pollution and anti-volatilization design, system-level fault tolerance mechanisms, and enhanced human-machine safety. This approach is particularly suitable for high-cleanliness applications such as semiconductors. The technical solution employed in this application not only improves operational efficiency but also addresses the safety risks of traditional solution replacement methods, demonstrating significant industrial application value. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Figure 1 This is a structural schematic diagram of one side of the barrel cover of the device for safely replacing chemical liquids of the present invention;

[0040] Figure 2 This is a structural schematic diagram of the other side of the barrel cover of the device for safely replacing chemical liquids of the present invention;

[0041] Figure 3 It is a longitudinal sectional view of the barrel cover of the device for safely replacing chemical liquids according to the present invention;

[0042] Figure 4 This is a schematic diagram of the overall structure of the device for safely replacing chemical liquids according to the present invention;

[0043] Figure 5 It is a partial structural diagram of the chemical liquid supply system of the present invention.

[0044] In the picture:

[0045] 1. Liquid barrel; 2. Barrel cover; 3. Sealing layer; 31. Operation hole; 311. Diversion slope; 32. One-way opening structure; 321. Elastic sealing sheet; 322. Sealing flange; 33. Annular groove; 34. O-ring; 4. Liquid extraction tube; 5. Sealing tape; 6. Three-way valve; 7. Main line. DETAILED DESCRIPTION

[0046] The preferred embodiments of the present invention are described below with reference to the accompanying drawings. It should be understood that the preferred embodiments described herein are only used to illustrate and explain the present invention, and are not used to limit the present invention.

[0047] 1. Explanation of Descriptive Terms in the Present Invention

[0048] The embodiments of the present invention are provided in conjunction with the technical solutions to make the present invention more thorough and complete and to fully convey the scope of the present invention to those skilled in the art. It should be noted that unless otherwise specifically stated in the present invention, the relative arrangements of components described in these embodiments should be interpreted as merely exemplary and not as a limitation of the technical solutions of the present invention.

[0049] When used in this disclosure, directional terms such as "upper," "lower," "left," "right," "bottom," and "top" are defined relative to the directions in the accompanying drawings and are intended only to indicate relative positional relationships. These relative positional relationships may change accordingly if the absolute positions of the objects being described change. These and other directional terms should not be construed as restrictive.

[0050] In the present invention, words such as "a," "an," "an," and "the" do not limit the number and may refer to the singular or plural. The terms "include," "comprising," "having," and any variations thereof, as used in the present invention, are intended to cover non-exclusive inclusions. The terms "first," "second," and "third," etc., used in the present invention, are merely used to distinguish similar objects and do not indicate a specific ordering of the objects.

[0051] In the present invention, when a specific device is described as being located between a first device and a second device, an intervening device may or may not be present between the specific device and the first device or the second device. When a specific device is described as being connected to another device, the specific device may be directly connected to the other device without an intervening device, or may be directly connected to the other device but with an intervening device.

[0052] In addition, the present invention does not discuss in detail the technologies and equipment known to ordinary technicians in the relevant fields, but where appropriate, the technologies and equipment should be considered as part of the specification.

[0053] 2. Core technical issues to be solved by the technical solution of this application

[0054] In the manufacturing of semiconductor integrated circuits and chips, wet processes require the frequent use of highly corrosive, toxic or volatile chemical solutions such as hydrofluoric acid and sulfuric acid.

[0055] Conventional technology relies on manual labor to replace the liquid medicine: the operator must manually remove the old barrel's extraction tube, open the new barrel's lid, and insert the tube. Even with protective gear, the liquid medicine can still evaporate or splash during the replacement process, potentially causing hazards such as inhalation of toxic gases or burns from corrosive liquids.

[0056] Furthermore, the liquid medicine barrels are not properly sealed, especially when opening the lid and inserting the extraction tube, which cannot effectively prevent the liquid medicine from volatilizing and splashing. Frequent manual operation not only increases safety risks but can also cause liquid medicine contamination or waste due to improper operation. A safe and efficient liquid medicine replacement device is urgently needed to solve these problems.

[0057] 3. Based on the above problems, the present invention specifically provides a technical solution to the above problems. Figures 1 to 5 As shown, the technical solution, working principle and technical effects of the present invention are described in detail.

[0058] Example 1

[0059] refer to Figure 1 The present application discloses a device for safely replacing chemical liquid, comprising: a liquid liquid barrel 1, a barrel cover 2, a sealing layer 3, an operating hole 31, a one-way opening structure 32, and a sealing tape 5 and other components.

[0060] Liquid medicine barrel 1: Made of corrosion-resistant polymer material (polypropylene), with a capacity of 20L, the barrel body is cylindrical in design for easy storage and transportation.

[0061] Barrel cover 2: Made of the same material as the liquid medicine barrel 1 (polypropylene), it is connected to the liquid medicine barrel 1 through threads to ensure overall sealing.

[0062] Sealing layer 3: fixed on the inner side of the barrel cover 2, made of polypropylene, 2 mm thick, and detachably connected to the barrel cover 2 through an annular groove 33; an O-ring 34 (made of perfluoroether rubber) is provided at the connection to ensure the seal between the sealing layer 3 and the barrel cover 2.

[0063] The operation hole 31 is opened at the center of the sealing layer 3, with a hole diameter of 10.5 mm (designed to be 1.05 times the outer diameter of the liquid extraction tube 4 of 10 mm). The edge of the hole is provided with a guide slope 311 to facilitate the insertion of the liquid extraction tube 4.

[0064] One-way opening structure 32: consists of two elastic sealing sheets 321 (made of perfluoroether rubber, 1.5mm thick) tilted inwardly of the barrel, which close the operating hole 31 in a natural state; a sealing flange 322 is provided at the end of the sealing sheet, which elastically deforms outward to form a channel when the liquid extraction tube 4 is inserted, and the flanges engage with each other to form a liquid-tight seal when pulled out to prevent the liquid from volatilizing and splashing.

[0065] Sealing tape 5: covers the outside of the operation hole 31, with an adhesive layer thickness of 0.08 mm and a covering area extending 8 mm beyond the edge of the operation hole 31, to ensure the sealing of the operation hole 31 during transportation and storage.

[0066] Based on the above-mentioned safe chemical liquid replacement device, the specific operating steps for this application to safely replace the liquid are as follows:

[0067] Removing the sealing tape 5 : The operator wears protective gloves and carefully removes the sealing tape 5 on the outside of the operation hole 31 to expose the operation hole 31 .

[0068] Insert the liquid extraction tube 4: align the liquid extraction tube 4 vertically with the operating hole 31 and insert it slowly and forcefully; with the help of the elastic deformation of the guide slope 311 and the elastic sealing piece 321, the liquid extraction tube 4 easily enters the liquid medicine barrel 1.

[0069] Extracting liquid medicine: After the liquid extraction tube 4 is inserted into place, the liquid medicine extraction device is connected to start extracting liquid medicine; the one-way opening structure 32 prevents the liquid medicine from volatilizing and splashing.

[0070] Pull out the liquid extraction tube 4: After the liquid extraction is completed, slowly pull out the liquid extraction tube 4; the elastic sealing piece 321 quickly returns to its original shape, and the end sealing flanges 322 buckle with each other to form a liquid-tight seal to ensure safety.

[0071] This embodiment provides a basic sealing structure that is simple to operate, low in cost, and suitable for general chemical liquid environments; the elastic design of the one-way opening structure 32 effectively reduces the risk of liquid exposure.

[0072] Combined with the above description of the composition structure of the device for safely replacing chemical liquids in this application, in order to more clearly describe the present technical solution, the working principle of the device for safely replacing chemical liquids in this application is explained as follows:

[0073] This device for safely replacing chemical liquids primarily consists of a liquid medicine barrel 1, a barrel cover 2, and a sealing layer 3. During operation, a removable sealing tape 5 covers the outside of an operating hole 31 in the center of the inner side of the sealing layer 3. Initially, the sealing tape 5 seals the operating hole 31 to prevent the liquid from volatilizing and splashing.

[0074] When the liquid medicine needs to be replaced, the operator tears off the sealing tape 5 to expose the operation hole 31 , and then vertically inserts the liquid extraction tube 4 into the operation hole 31 .

[0075] A one-way opening structure 32 is provided at the operation hole 31. This structure is an elastic valve composed of at least two elastic sealing pieces 321 that are tilted inwardly toward the barrel. In its natural state, the elastic sealing pieces 321 close the operation hole 31. When the withdrawal tube 4 is inserted, the elastic sealing pieces 321 elastically deform outward, opening the operation hole 31 and allowing the liquid medicine to be withdrawn through the withdrawal tube 4.

[0076] After the liquid medicine is extracted, the liquid extraction tube 4 is pulled out, and the elastic sealing piece 321 automatically closes under its own elastic action, and a sealing flange 322 is provided at its end, which engages with each other to form a liquid-tight seal to prevent liquid medicine from leaking.

[0077] The sealing layer 3 and the liquid medicine barrel 1 are both made of corrosion-resistant polymers. The sealing layer 3 and the barrel cover 2 are detachably connected through an annular groove 33, and an O-ring 34 is provided at the connection to enhance the sealing performance.

[0078] At the same time, the diameter of the operating hole 31 is larger than the outer diameter of the liquid extraction tube 4, and a guiding slope 311 is provided at the edge of the hole to facilitate the insertion of the liquid extraction tube 4 and the flow of the liquid medicine.

[0079] Example 2: Improved one-way opening structure 32 embodiment

[0080] The device comprises: a liquid medicine barrel 1, a barrel cover 2, a sealing layer 3, an operating hole 31, and a sealing tape 5, which are the same as those in Example 1 (including materials, dimensions, and connection methods).

[0081] The difference lies in the improvement of the one-way opening structure 32: the elastic valve is composed of four sealing sheets inclined toward the inside of the barrel (the material is still perfluoroether rubber, but the thickness is increased to 1.8mm); a sealing flange 322 is provided at the end of each sealing sheet. When the liquid extraction tube 4 is pulled out, the four flanges are buckled together to form a tighter liquid-tight seal.

[0082] Among them, the operation steps for replacing the medicine liquid are basically the same as those in Example 1, except that: since the one-way opening structure 32 adopts four elastic sealing sheets 321, when the liquid extraction tube 4 is inserted, a slightly larger force is required to force the sealing sheet to elastically deform outward; but when the liquid extraction tube 4 is pulled out, the four sealing flanges 322 are engaged with each other, and the sealing effect is better, which further reduces the risk of volatilization and splashing of the medicine liquid.

[0083] This embodiment optimizes the sealing performance based on the first embodiment. The four sealing sheets provide multiple sealing barriers, which significantly reduce the risk of volatilization and splashing of the liquid medicine, and is particularly suitable for highly volatile liquid medicine.

[0084] Example 3: Chemical Liquid Supply System Example

[0085] (1) Device composition

[0086] Multiple safe chemical liquid replacement devices: adopt the structure of Example 1, with three devices, each of which independently stores different chemical liquids (such as hydrofluoric acid, sulfuric acid, and nitric acid).

[0087] Three-way valve 6: Made of corrosion-resistant material, each device's liquid extraction pipe 4 is connected to the main line 7 through the three-way valve 6, which is used to switch the liquid supply between different liquid barrels 1. The three-way valve 6 is made of corrosion-resistant material and can switch the liquid supply between different liquid barrels 1 as needed.

[0088] Main line 7: connected to semiconductor manufacturing equipment, used to transport chemical solutions to wet cleaning, wet etching and other equipment in the semiconductor integrated circuit and chip manufacturing process.

[0089] (2) The specific operation steps for liquid medicine supply are as follows:

[0090] Preparation: Check whether the sealing tape 5 of each chemical liquid safety replacement device is intact and whether the liquid extraction pipe 4 is normal.

[0091] Switching the liquid medicine barrel 1: According to production requirements, operate the three-way valve 6 to switch to the liquid extraction pipe 4 corresponding to the liquid medicine barrel 1. For example, when hydrofluoric acid is needed, switch the three-way valve 6 to the liquid extraction pipe 4 connected to the hydrofluoric acid liquid medicine barrel 1.

[0092] Removing the sealing tape 5 and inserting the liquid extraction tube 4: According to the steps of Example 1, the sealing tape 5 is removed and the liquid extraction tube 4 is inserted into the liquid medicine barrel 1 to be used.

[0093] Supplying chemical liquid: The chemical liquid is transported to the production equipment through the main line 7 for wet cleaning or etching processes.

[0094] Replacing a liquid medicine barrel 1: When the liquid medicine in a certain liquid medicine barrel 1 is exhausted, there is no need to stop production. Simply remove the sealing tape 5 from the new liquid medicine barrel 1, insert the liquid extraction tube 4, and then switch to the new liquid medicine barrel 1 via the three-way valve 6 to resume the liquid medicine supply. During the replacement process, the one-way opening structure 32 of each liquid medicine barrel 1 and the sealing tape 5 prevent liquid volatilization and splashing, ensuring operator safety.

[0095] This embodiment expands a single device into a system to achieve seamless switching and supply of multiple liquid medicines, thereby improving production efficiency. Based on the sealing mechanism of Example 1, it ensures the safety of operators and is suitable for continuous production lines.

[0096] Example 4: Example 3 of sealing layer with different materials

[0097] Device composition

[0098] Medicine liquid barrel 1: Medicine liquid barrel 1: Made of corrosion-resistant polymer material (such as polyethylene), with a capacity of 30L.

[0099] Barrel cover 2: Made of the same material as the liquid medicine barrel 1 (polyethylene), but connected to the liquid medicine barrel 1 via a snap for quick opening.

[0100] Sealing layer 3: fixed on the inner side of the barrel cover 2, the material is changed to polytetrafluoroethylene (to improve corrosion resistance), the thickness is 3mm, and it is connected to the barrel cover 2 by bolts; an O-ring 34 (made of fluororubber) is provided at the connection.

[0101] The operating hole 31 and the one-way opening structure 32 are designed the same as those in Example 1, but the material of the elastic sealing sheet 321 of the one-way opening structure 32 is changed to fluororubber (thickness 1.2 mm) to match the material of the sealing layer 3 .

[0102] Sealing tape 5: the same as in Example 1.

[0103] Based on the above structural composition, the specific steps for replacing the drug solution in this embodiment are essentially the same as those in Example 1. Since sealing layer 3 is made of polytetrafluoroethylene, it has better corrosion resistance and chemical stability, making it suitable for use in more demanding chemical environments. The elastic sealing piece 321 of the one-way opening structure 32 is made of fluororubber, which also has excellent corrosion resistance and elasticity, ensuring long-term stable operation of the device.

[0104] This embodiment is designed for harsh chemical environments (such as strong acid or high temperature). The sealing layer 3 and the upgraded sealing material (polytetrafluoroethylene and fluororubber) provide higher corrosion resistance and chemical stability, extending the life of the device; the snap connection simplifies maintenance.

[0105] Example 5: Example with different apertures of the operating hole 31

[0106] (1) Device composition

[0107] The liquid medicine barrel 1, barrel cover 2, sealing layer 3, and sealing tape 5 are exactly the same as those in Example 1 (polypropylene material, 20L capacity, etc.).

[0108] The operation hole 31 is located in the center of the sealing layer 3 and has a diameter 1.1 times the outer diameter of the liquid extraction tube 4. The outer diameter of the liquid extraction tube 4 is 12 mm, and the diameter of the operation hole 31 is 13.2 mm. The edge of the hole is provided with a guide slope 311 to facilitate the insertion of a larger liquid extraction tube 4.

[0109] One-way opening structure 32: Similar to Example 1 (elastic valve), but to accommodate a larger aperture, the thickness of the sealing sheet is increased to 1.8 mm (the material is still perfluoroether rubber), ensuring that the elastic sealing sheet 321 can be effectively closed when pulled out.

[0110] Based on the above structural design, the specific steps for replacing the liquid medicine are basically the same as those in Example 1. Because the diameter of the operating hole 31 is 1.1 times the outer diameter of the liquid withdrawal tube 4, the liquid withdrawal tube 4 is inserted more easily without the operator having to exert too much force. However, due to the slightly larger hole diameter, the elastic sealing piece 321 of the one-way opening structure 32 needs to be more elastic to ensure a good sealing effect when the liquid withdrawal tube 4 is removed.

[0111] In this embodiment, the elastic sealing sheet 321 of the one-way opening structure 32 is made of perfluoroether rubber and has a thickness of 1.8 mm. The thicker sealing sheet provides sufficient elasticity to ensure the sealing effect after the aperture is increased.

[0112] This embodiment improves operational convenience by adjusting the size of the operating hole 31 (the hole diameter is 1.1 times the outer diameter of the liquid extraction tube 4). The optimized thickness of the sealing sheet compensates for the hole diameter change and maintains sealing reliability, making it suitable for scenarios where the liquid medicine is frequently changed.

[0113] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

[0114] In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the fact that ordinary technicians in this field can implement them; when the combination of technical solutions is mutually contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

Claims

1. A device for safely replacing chemical liquid, characterized in that: include: A liquid medicine barrel (1) and a barrel cover (2), wherein a sealing layer (3) is fixedly provided on the inner side of the barrel cover (2); an operating hole (31) is provided at the center of the sealing layer (3); a one-way opening structure (32) is provided at the operating hole (31), and the one-way opening structure (32) is configured to only allow a liquid extraction tube (4) to be opened one-way from the outside to the inside; and a peelable sealing tape (5) is covered on the outer side of the operating hole (31).

2. The device for safely replacing chemical liquid according to claim 1, characterized in that: The sealing layer (3) and the medicine liquid barrel (1) are both made of corrosion-resistant polymers.

3. The device for safely replacing chemical liquid according to claim 1, characterized in that: The one-way opening structure (32) is an elastic valve, comprising at least two elastic sealing sheets (321) inclined inwardly of the barrel. The elastic sealing sheets (321) close the operating hole (31) in a natural state and elastically deform outwardly when the liquid extraction tube (4) is inserted.

4. The device for safely replacing chemical liquid according to claim 3, characterized in that: The end of the elastic sealing sheet (321) is provided with a sealing flange (322). When the liquid extraction tube (4) is pulled out, the sealing flanges (322) are engaged with each other to form a liquid-tight seal.

5. The device for safely replacing chemical liquid according to claim 4, characterized in that: The elastic sealing sheet (321) is a perfluoroether rubber sealing sheet with a thickness of 1.2 to 1.8 mm.

6. The device for safely replacing chemical liquid according to claim 1, characterized in that: The adhesive layer thickness of the sealing tape (5) is 0.05 to 0.1 mm, and the coverage area exceeds the edge of the operating hole (31) by 8 to 10 mm.

7. The device for safely replacing chemical liquid according to claim 2, characterized in that: The sealing layer (3) and the barrel cover (2) are detachably connected via an annular clamping groove (33), and an O-type sealing ring (34) is provided at the connection.

8. The device for safely replacing chemical liquid according to claim 1, characterized in that: The diameter of the operating hole (31) is 1.05-1.1 times the outer diameter of the liquid extraction tube (4), and a flow guiding slope (311) is provided at the edge of the hole.

9. A method for safely replacing chemical liquid, based on the device for safely replacing chemical liquid according to any one of claims 1 to 8, characterized in that: include: S1. Remove the sealing tape (5) to expose the operating hole (31); S2. Insert the liquid extraction tube (4) vertically into the operating hole (31), forcing the one-way opening structure (32) to open; S3. After the liquid medicine is extracted, the extraction tube (4) is pulled out and the one-way opening structure (32) is automatically closed.

10. A chemical liquid supply system, characterized in that: The invention comprises a plurality of safe chemical liquid replacement devices according to any one of claims 1 to 8 connected in parallel, wherein the liquid extraction pipe (4) of each safe chemical liquid replacement device is connected to the main pipeline (7) through a three-way valve (6).

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