Furnace door structure for stacked boat tube type PECVD (plasma enhanced chemical vapor deposition)

Abstract

The invention provides a furnace door structure for stacked boat tube type PECVD (Plasma Enhanced Chemical Vapor Deposition), which comprises a furnace door driving structure and a furnace body assembly, and the furnace door driving structure comprises a transverse driving assembly and a longitudinal movement assembly; the transverse driving assembly comprises a transverse double-sliding-block bottom plate, a pen-shaped air cylinder, a transverse double-sliding-block guide rail, a transverse double-sliding-block connecting plate, a transverse single-sliding-block bottom plate, four adjusting bolts, a transverse single-sliding-block guide rail and a traction piece. A group of transverse single-sliding-block guide rails are additionally arranged for supporting, in the vertical boat stacking process, even if the diameter and the weight of the furnace door are increased, the bottom plate cannot deform when the furnace door moves to the furnace opening end, and therefore the furnace door can not be damaged, and the vertical boat stacking process can be achieved. Therefore, the conditions that the furnace door deviates downwards and the sealing performance of the furnace mouth is reduced are avoided; and the lifting ring and the handle are additionally arranged, so that the furnace door can be conveniently lifted and taken when being manually mounted and dismounted.

Description

Technical Field

[0001] The invention relates to a furnace door structure, in particular to a furnace door structure for stacked boat tube type PECVD, belonging to the technical field of PECVD equipment. Background Art

[0002] PECVD equipment plays a crucial role in the silicon wafer coating process in the photovoltaic industry. Throughout the coating process, the quartz tube serves as the core reaction vessel, carrying out key steps in the wafer coating process. First, the silicon wafer is smoothly fed into the quartz tube using a precise conveyor. The furnace door then quickly closes, tightly sealing the tube and creating a reaction chamber isolated from external interference. Next, an appropriate amount of reactant gas is introduced into the tube, based on the coating process requirements. These gases are excited by the electric field to form a plasma, which then undergoes a series of complex chemical reactions with the silicon wafer surface, depositing the desired thin film material. After the reaction is complete, a specific temperature must be maintained for a period of time to ensure stable film performance. At the end of the process cycle, the furnace door is reopened, allowing the coated wafer to be removed. The furnace door acts as the gatekeeper of this entire process, and its precise opening and closing, as well as its ability to maintain temperature, are directly impacting the success of the coating process and the quality of the final product.

[0003] In recent years, with the continuous advancement of photovoltaic technology, the structure of graphite boats has gradually evolved from the traditional horizontal twin-boat design to a vertically stacked design. This shift has significantly improved wafer loading density and production efficiency, but it has also posed new challenges to other components of PECVD equipment. To accommodate the vertically stacked graphite boats, the diameters of the quartz tubes and furnace tubes had to be increased accordingly, significantly increasing the size and weight of the supporting furnace door. In actual production, when the large and heavy furnace door moves to the furnace mouth, the longitudinal bottom plate bears loads far exceeding the design expectations, causing elastic or even plastic deformation. Once the bottom plate deforms, the furnace door's mounting base is damaged, causing the furnace door to shift downward. Although seemingly minor, this door shift can seriously affect the sealing performance of the furnace mouth, leading to reaction gas leakage and air infiltration. This not only disrupts the stability of the coating process but also reduces the yield rate of silicon wafer coating, hindering the efficient development of the photovoltaic industry. To this end, a furnace door structure for stacked-boat-tube PECVD is proposed. Summary of the Invention

[0004] In view of this, the present invention provides a furnace door structure for stacked boat tube PECVD to solve or alleviate the technical problems existing in the prior art and at least provide a beneficial option.

[0005] The technical solution of the embodiment of the present invention is achieved as follows: a furnace door structure for stacked boat tube PECVD, comprising a furnace door drive structure and a furnace body assembly, wherein the furnace door drive structure comprises a transverse drive assembly and a longitudinal motion assembly; The transverse drive assembly includes a transverse double-slider base plate, a pen-shaped cylinder, a transverse double-slider guide rail, a transverse double-slider connecting plate, a transverse single-slider base plate, four adjustment bolts, a transverse single-slider guide rail and a traction member; The pen-shaped cylinder is installed on the upper surface of the transverse double-slider bottom plate, the traction piece is installed on the end of the cylinder shaft of the pen-shaped cylinder, the transverse double-slider guide rail is installed on the upper surface of the transverse double-slider bottom plate, the upper surface of the transverse double-slider bottom plate is installed with a transverse flexible limit block, the transverse double-slider connecting plate is installed on the slider of the transverse double-slider guide rail, one side of the transverse double-slider connecting plate is fixedly connected with a transverse hard limit block, the transverse single-slider guide rail is installed on the upper surface of the transverse single-slider bottom plate, the four adjustment bolts are symmetrically installed on the inside of the transverse single-slider bottom plate, the outer wall of the slider of the transverse double-slider guide rail and the outer wall of the slider of the transverse single-slider guide rail are both installed with transverse heat insulation boards, and the upper surface of the slider of the transverse single-slider guide rail is fixedly connected with a transverse single-slider connecting plate.

[0006] Further preferably, a silicon chip sensing component is provided on the bottom plate of the horizontal double slider, and the silicon chip sensing component includes a photoelectric mounting plate, an angle adjustment plate and a silicon chip in-position photoelectric sensor; The photoelectric mounting plate is mounted on the upper surface of the transverse double slider bottom plate, the angle adjustment plate is mounted on the end of the photoelectric mounting plate through bolts, and the silicon chip in-position photoelectric sensor is mounted on the upper surface of the angle adjustment plate.

[0007] Further preferably, a transverse limit sensor is installed on one side of the transverse double-slider bottom plate, and a transverse sensor sheet is installed on one side of the slider of the transverse double-slider guide rail.

[0008] Further preferably, the longitudinal motion assembly includes a longitudinal bottom plate, a longitudinal adapter block, a longitudinal sensor plate, a furnace door connection block, a rodless cylinder, a longitudinal limit sensor and a limit fixing block; The longitudinal base plate is respectively installed on the upper surface of the transverse double-slider connecting plate and the upper surface of the transverse single-slider connecting plate, the furnace door connecting block is installed on the outside of the rodless cylinder, the rodless cylinder is installed on the upper surface of the longitudinal base plate, the longitudinal sensor is installed on the outer side wall of the furnace door connecting block through the longitudinal adapter block, the limit fixing block is installed on the end of the rodless cylinder, and the interior of the limit fixing block is respectively installed with a limit bolt, a buffer and a longitudinal limit sensor.

[0009] Further preferably, a longitudinal heat insulation plate is fixedly connected to the upper surface of the longitudinal bottom plate, and the cylinder shaft of the pen-shaped cylinder is fixedly connected to the longitudinal heat insulation plate via a traction member.

[0010] Further preferably, the furnace body assembly includes a furnace door panel, a rotating seat, a horizontal adjustment block, an axis fixing seat, an adjustment bracket, a furnace door beam, a furnace door rotating block, a connecting nut, a hinge shaft and a bearing retaining ring; The furnace door beam is mounted on one side of the adjustment bracket by connecting bolts, the shaft fixing seat is mounted on the upper surface of the adjustment bracket by connecting bolts, the horizontal adjustment block is mounted on the upper surface of the adjustment bracket and connected to the shaft fixing seat by connecting bolts, the shaft fixing seat is fixedly connected to the front surface of the furnace door rotating block, and the furnace door rotating block is fixedly connected to the front surface of the rotating seat; The rotating seat is rotatably connected to the furnace door panel via a hinge shaft, and a bearing retaining ring is sleeved on the exterior of the hinge shaft.

[0011] Further preferably, the furnace body assembly further comprises a spring cover, a plunger, a support seat, a hanging ring, a support spring and a connecting nut; The support spring is sleeved on the outside of the hinge shaft, the spring cover is connected to the hinge shaft through a connecting nut and compresses the support spring, the support seat is symmetrically fixedly connected to the rear surface of the furnace door panel, the plunger is simultaneously inserted into the inside of the support seat and the inside of the furnace door rotating block, the hanging ring is installed on the top of the front surface of the furnace door panel, and a handle is installed on the front surface of the furnace door panel.

[0012] Further preferably, the furnace door beam is fixedly connected to the upper surface of the furnace door connecting block.

[0013] Further preferably, a furnace mouth air cavity assembly is provided inside the furnace door panel, and the furnace mouth air cavity assembly includes a furnace door flow equalizing plate, a guide fixing ring, an air inlet pipe, an air outlet block, a protective cover and a guide elbow; The furnace door flow equalizing plate is fixedly connected to the rear surface of the furnace door panel, the guide fixing ring is installed on the rear surface of the furnace door panel, the air inlet pipe is installed inside the furnace door panel and fits onto the inner wall of the guide fixing ring, the protective cover is installed on the rear surface of the furnace door panel, the air outlet block is fixedly connected to the center of the rear surface of the furnace door panel, and the guide bend is installed inside the air outlet block.

[0014] Further preferably, the air inlet pipe is located inside the protective cover, one end of the air inlet pipe is connected to the guide elbow, and the air inlet pipe, the air outlet block and the protective cover are all located inside the furnace door flow equalizing plate.

[0015] The embodiment of the present invention adopts the above technical solution, which has the following advantages: The present invention adds a set of transverse single-slider guide rails for support. During the vertical boat stacking process, even if the diameter and weight of the furnace door increase, the bottom plate will not be deformed when the furnace door moves to the furnace mouth end, thereby preventing the furnace door from deflecting downward and the furnace mouth from being sealed. In addition, new lifting rings and handles are added to facilitate lifting and taking when manually installing and removing the furnace door; Compared with the previous design, the split double-layer flow equalizer is welded into an integrated one, which avoids the problem of damage to the screw wrench hole and difficulty in maintenance and disassembly due to long-term exposure to high temperature environment; By moving the limit sensing switch of the longitudinal motion component from the bottom of the rodless cylinder to the top, not only longitudinal space is saved, but also maintenance is easier. In addition, the length of the longitudinal heat insulation baffle is lengthened to better protect the longitudinal motion component.

[0016] The above summary is for illustrative purposes only and is not intended to be limiting in any way. In addition to the illustrative aspects, embodiments and features described above, further aspects, embodiments and features of the present invention will be readily apparent by reference to the accompanying drawings and the following detailed description. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0018] Figure 1 This is a structural diagram of a furnace door structure for stacked boat and tube PECVD according to the present invention; Figure 2 This is a structural diagram of the transverse drive assembly of the present invention; Figure 3 This is a structural diagram of the traction member of the present invention; Figure 4 This is a structural diagram of the furnace assembly of the present invention; Figure 5 This is a structural diagram of the hinge axis of the present invention; Figure 6 This is a structural diagram of the furnace door panel of the present invention; Figure 7 This is a structural diagram of the furnace mouth air cavity component of the present invention; Figure 8 It is a structural diagram of the protective cover of the present invention.

[0019] Reference numerals: 101, transverse drive assembly; 11, transverse dual-slider base plate; 12, pen-shaped cylinder; 13, transverse rigid limit block; 14, transverse flexible limit block; 15, transverse dual-slider guide rail; 16, transverse dual-slider connecting plate; 17, transverse single-slider base plate; 18, adjustment bolt; 19, transverse single-slider guide rail; 20, transverse single-slider connecting plate; 21, photoelectric mounting plate; 22, angle adjustment plate; 23, silicon wafer in-position photoelectric sensor; 24, transverse limit sensor; 25, transverse sensor plate; 26, traction member; 27, transverse heat insulation board; 301, longitudinal motion assembly; 31, longitudinal base plate; 32, longitudinal adapter block; 33, longitudinal sensor plate; 34, furnace door connection block; 35, rodless cylinder; 36, longitudinal limit sensor; 37, limit fixing block; 38, buffer; 39, limit bolt; 40, longitudinal heat insulation board; 401. Furnace body assembly; 41. Furnace door panel; 42. Rotating seat; 43. Handle; 44. Leveling block; 45. Shaft fixing seat; 46. Adjusting bracket; 47. Spring cover; 48. Furnace door beam; 49. Furnace door rotating block; 50. Plunger; 51. Support seat; 52. Lifting ring; 56. Support spring; 57. Connecting nut; 58. Hinge shaft; 59. Bearing retaining ring; 601, furnace mouth air cavity assembly; 61, furnace door flow plate; 62, guide fixing ring; 63, air inlet pipe; 64, air outlet block; 67, protective cover; 68, guide elbow. DETAILED DESCRIPTION

[0020] Hereinafter, only certain exemplary embodiments are briefly described. As will be appreciated by those skilled in the art, the described embodiments may be modified in various ways without departing from the spirit or scope of the present invention. Therefore, the drawings and description are to be considered as illustrative in nature and not restrictive.

[0021] The embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0022] like Figures 1-8 As shown, an embodiment of the present invention provides a furnace door structure for stacked boat tube PECVD, including a furnace door drive structure and a furnace body assembly 401. The furnace door drive structure includes a transverse drive assembly 101 and a longitudinal motion assembly 301. The transverse drive assembly 101 includes a transverse double-slider base plate 11, a pen-shaped cylinder 12, a transverse double-slider guide rail 15, a transverse double-slider connecting plate 16, a transverse single-slider base plate 17, four adjustment bolts 18, a transverse single-slider guide rail 19, and a traction member 26; The pen-shaped cylinder 12 is mounted on the upper surface of the horizontal double-slider bottom plate 11, and the traction member 26 is mounted on the end of the cylinder shaft of the pen-shaped cylinder 12. Through the cooperation of the pen-shaped cylinder 12 and the traction member 26, the opening and closing control of the furnace door structure can be realized; The transverse double-slider guide rail 15 is installed on the upper surface of the transverse double-slider bottom plate 11, and a transverse flexible limit block 14 is installed on the upper surface of the transverse double-slider bottom plate 11. The transverse double-slider connecting plate 16 is installed on the slider of the transverse double-slider guide rail 15. One side of the transverse double-slider connecting plate 16 is fixedly connected to a transverse rigid limit block 13. The transverse single-slider guide rail 19 is installed on the upper surface of the transverse single-slider bottom plate 17. By simultaneously arranging the transverse single-slider guide rail 19 and the transverse double-slider guide rail 15, during the vertical boat stacking process, even if the diameter and weight of the furnace door increase, the bottom plate will not be deformed when the furnace door moves to the furnace mouth end, and the furnace door will not deviate downward and the sealing of the furnace mouth will not decrease. Four adjustment bolts 18 are symmetrically installed inside the transverse single slider base plate 17. The outer walls of the sliders of the transverse double slider guide rail 15 and the outer walls of the sliders of the transverse single slider guide rail 19 are both installed with transverse heat insulation plates 27. The upper surface of the slider of the transverse single slider guide rail 19 is fixedly connected with a transverse single slider connecting plate 20. By setting four adjustment bolts 18, the installation position of the transverse single slider base plate 17 can be adjusted according to usage requirements, thereby ensuring accuracy in the control process.

[0023] In one embodiment, a silicon chip sensing assembly is provided on the horizontal double slider bottom plate 11, and the silicon chip sensing assembly includes a photoelectric mounting plate 21, an angle adjustment plate 22 and a silicon chip in position photoelectric sensor 23; The photoelectric mounting plate 21 is mounted on the upper surface of the horizontal double-slider bottom plate 11, and the angle adjustment plate 22 is mounted on the end of the photoelectric mounting plate 21 by bolts. The silicon wafer in-place photoelectric sensor 23 is mounted on the upper surface of the angle adjustment plate 22. By loosening the bolts between the angle adjustment plate 22 and the photoelectric mounting plate 21, the angle of the angle adjustment plate 22 can be adjusted, thereby adjusting the angle of the silicon wafer in-place photoelectric sensor 23. During operation, the position of the silicon wafer is detected by the silicon wafer arrival photoelectric sensor 23. When it is detected that the silicon wafer has entered the quartz tube, it sends a signal to the control system. At this time, the horizontal drive component 101 and the longitudinal motion component 301 drive the furnace door to close.

[0024] In one embodiment, a lateral limit sensor 24 is installed on one side of the lateral double slider base plate 11, and a lateral sensing plate 25 is installed on one side of the slider of the lateral double slider guide rail 15. Through the cooperation of the lateral limit sensor 24 and the lateral sensing plate 25, the displacement distance of the slider on the lateral double slider guide rail 15 can be limited.

[0025] In one embodiment, the longitudinal motion assembly 301 includes a longitudinal base plate 31, a longitudinal adapter block 32, a longitudinal sensor plate 33, a furnace door connection block 34, a rodless cylinder 35, a longitudinal limit sensor 36 and a limit fixing block 37; The longitudinal bottom plate 31 is respectively mounted on the upper surface of the transverse double-slider connecting plate 16 and the upper surface of the transverse single-slider connecting plate 20. The upper surface of the longitudinal bottom plate 31 is fixedly connected to the longitudinal heat insulation plate 40. The cylinder shaft of the pen-shaped cylinder 12 is fixedly connected to the longitudinal heat insulation plate 40 via the traction member 26. When the cylinder shaft of the pen-shaped cylinder 12 extends, the traction member 26 drives the longitudinal bottom plate 31 via the longitudinal heat insulation plate 40, and the longitudinal bottom plate 31 slides along the transverse double-slider guide rail 15 and the transverse single-slider guide rail 19. The furnace door connecting block 34 is installed on the outside of the rodless cylinder 35, and the rodless cylinder 35 is installed on the upper surface of the longitudinal bottom plate 31. The longitudinal sensor 33 is installed on the outer wall of the furnace door connecting block 34 through the longitudinal adapter block 32. The limit fixing block 37 is installed at the end of the rodless cylinder 35. The furnace door connecting block 34 is driven to move by the rodless cylinder 35. When the furnace door connecting block 34 moves, the longitudinal sensor 33 is driven. The position distance of the furnace door connecting block 34 can be monitored in real time by the longitudinal limit sensor 36, thereby ensuring the accuracy of the furnace door movement. The interior of the limit fixing block 37 is respectively installed with a limit bolt 39, a buffer 38 and a longitudinal limit sensor 36. Through the cooperation of the limit bolt 39 and the buffer 38, the longitudinal transfer block 32 can be buffered and limited. When the rodless cylinder 35 is working, the furnace door also extends / returns accordingly. A limit bolt 39, a buffer 38 and a longitudinal limit sensor 36 are provided at both ends of the rodless cylinder 35, and their front and rear positions can be adjusted to achieve the ideal furnace door extension / return position.

[0026] In one embodiment, the furnace body assembly 401 includes a furnace door panel 41, a rotating seat 42, a horizontal adjustment block 44, an axis fixing seat 45, an adjustment bracket 46, a furnace door beam 48, a furnace door rotating block 49, a connecting nut 57, a hinge shaft 58 and a bearing retaining ring 59; The furnace door beam 48 is mounted on one side of the adjustment bracket 46 by connecting bolts, the shaft fixing seat 45 is mounted on the upper surface of the adjustment bracket 46 by connecting bolts, the horizontal adjustment block 44 is mounted on the upper surface of the adjustment bracket 46 and connected to the shaft fixing seat 45 by connecting bolts. By loosening the connecting bolts between the adjustment bracket 46 and the furnace door beam 48, the vertical height position of the furnace door panel 41 can be adjusted. By loosening the connecting bolts between the horizontal adjustment block 44 and the shaft fixing seat 45, the left and right position of the furnace door panel 41 can be adjusted, thereby fine-tuning the vertical, left and right positions of the furnace door. The shaft fixing seat 45 is fixedly connected to the front surface of the furnace door rotating block 49, and the furnace door rotating block 49 is fixedly connected to the front surface of the rotating seat 42. The rotating seat 42 is rotatably connected to the furnace door panel 41 through the hinge shaft 58. The outer part of the hinge shaft 58 is sleeved with a bearing retaining ring 59. The connection between the furnace door panel 41 and the shaft fixing seat 45 can be realized through the hinge shaft 58.

[0027] In one embodiment, the furnace assembly 401 further includes a spring cover 47, a plunger 50, a support seat 51, a lifting ring 52, a support spring 56 and a connecting nut 57; The support spring 56 is sleeved on the outside of the hinge shaft 58. The spring cover 47 is connected to the hinge shaft 58 through the connecting nut 57 and compresses the support spring 56. Through the cooperation of the support spring 56, the spring cover 47 and other structures, the front and rear position of the oven door panel 41 can be adjusted to meet the required sealing effect. The support seat 51 is symmetrically fixedly connected to the rear surface of the furnace door panel 41, and the plunger 50 is simultaneously inserted into the inside of the support seat 51 and the inside of the furnace door rotating block 49. The lifting ring 52 is installed on the top of the front surface of the furnace door panel 41. The front surface of the furnace door panel 41 is installed with a handle 43. Because the weight of the folding boat furnace door panel 41 is too heavy and there is no artificial fulcrum, when installing and disassembling the furnace door body, the lifting ring 52 and the furnace door handle 43 can be used for auxiliary disassembly. The lifting ring 52 is installed on the furnace door panel 41 through the mounting block and can be removed after the installation is completed for next use.

[0028] In one embodiment, the furnace door beam 48 is fixedly connected to the upper surface of the furnace door connecting block 34. The furnace door beam 48 can be connected to the furnace door driving structure through the furnace door connecting block 34, thereby realizing the opening and closing control of the furnace mouth.

[0029] In one embodiment, a furnace door air cavity assembly 601 is provided inside the furnace door panel 41. The furnace door air cavity assembly 601 includes a furnace door flow equalizing plate 61, a guide fixing ring 62, an air inlet pipe 63, an air outlet block 64, a protective cover 67 and a guide bend 68. The furnace door flow equalizing plate 61 is fixedly connected to the rear surface of the furnace door plate 41, and the furnace door flow equalizing plate 61 is connected to the furnace door plate 41 by welding; The guide fixing ring 62 is installed on the rear surface of the furnace door panel 41, the air inlet pipe 63 is installed on the inside of the furnace door panel 41 and fits into the inner wall of the guide fixing ring 62, the protective cover 67 is installed on the rear surface of the furnace door panel 41, the air outlet block 64 is fixedly connected to the center of the rear surface of the furnace door panel 41, the guide elbow 68 is installed on the inside of the air outlet block 64, the air inlet pipe 63 is located inside the protective cover 67, one end of the air inlet pipe 63 is connected to the guide elbow 68, the air inlet pipe 63, the air outlet block 64 and the protective cover 67 are all located inside the furnace door equalizing plate 61. During operation, the reaction gas enters through the air inlet pipe 63 and flows out from the guide elbow 68. The gas is first concentrated in the air cavity of the furnace door equalizing plate 61, and then flows evenly into the quartz tube through the pores in the furnace door equalizing plate 61 for reaction, and finally the silicon wafer is coated.

[0030] In one embodiment, in the silicon wafer coating process of a PECVD device, coordinated control of gas flow and temperature is a key step in ensuring coating uniformity and stability. For example, the device's air intake piping and furnace door temperature control system demonstrate sophisticated design that fully demonstrates the logic of intelligent process control.

[0031] Precision monitoring module for intake pipes A gas flow sensor is integrated into the outer wall of the inlet pipe 63. This sensor utilizes the thermal mass flow measurement principle to capture the dynamic flow rate of the reactant gases in real time. When reactant gases such as silane (SiH4) and ammonia (NH3) are delivered to the quartz tube through the inlet pipe, the sensor accurately calculates the gas mass flow rate (in sccm) by measuring the heat exchange efficiency between the gas molecules and the heating element. This data is then synchronized with the equipment control system. This non-contact monitoring method avoids the airflow disturbance caused by traditional throttling measurement and is particularly suitable for thin film deposition processes sensitive to flow fluctuations, such as the deposition of silicon nitride anti-reflective coatings. Furthermore, to meet the gas flow accuracy requirements of different processes, the sensor features a multi-range automatic switching function, maintaining a measurement accuracy of ±1% under both low flow (0-100 sccm) and high flow (100-1000 sccm) conditions. Furthermore, the sensor surface is treated with an anti-corrosion coating to effectively resist erosion by corrosive gases such as silane, extending its service life and reducing maintenance requirements.

[0032] Real-time feedback mechanism for furnace door temperature control The temperature sensor embedded in the furnace door panel 41 uses a K-type thermocouple or platinum resistance (Pt100) element. Its temperature probe extends deep into the furnace door, providing real-time sensing of the temperature distribution within the furnace. Considering the potential temperature gradient changes that may occur during the opening and closing of the furnace door, the equipment has multiple temperature sensors installed at different locations on the furnace door panel, establishing a three-dimensional temperature monitoring network. During the coating process, if the temperature sensor detects that the furnace temperature deviates from the set value (e.g., a ±5°C fluctuation), the control system triggers a dual regulation mechanism: Closed-loop temperature regulation: Prioritizing the power output of the furnace's heating modules, the system uses a PID control algorithm to quickly stabilize the temperature within the process window (e.g., 80-400°C). To avoid energy waste and equipment loss caused by frequent heating power adjustments, the system also incorporates a fuzzy control algorithm to predict and optimize heating strategies based on temperature trends.

[0033] Gas flow coordinated control: If the temperature deviation exceeds a preset threshold (e.g., ±10°C), the system will automatically correct the flow rate of the reaction gas in the inlet pipe based on the temperature-flow mapping model. For example, when the furnace temperature is higher than the process setpoint, the control system will proportionally reduce the gas flow rate to suppress excessive chemical reaction rates and avoid film thickness deviations or composition deviations. Conversely, when the furnace temperature is low, the gas flow rate will be appropriately increased to compensate for the decrease in deposition efficiency caused by insufficient temperature. In addition, the system also supports manual intervention mode, allowing operators to manually adjust the associated parameters of temperature and flow according to actual process requirements to achieve personalized process control.

[0034] Process advantages of intelligent linkage This dynamic coupling of temperature and flow control effectively solves the problem of temperature lag in traditional processes. For example, during the fabrication of silicon nitride thin films, when a localized hotspot develops in the furnace due to aging of the quartz tube, the flow sensor and temperature sensor work together to complete data acquisition, algorithm calculation, and actuator adjustment within 100ms, keeping gas flow fluctuations within ±2% and ensuring film thickness uniformity across the silicon wafer surface with a tolerance of less than 3%. Furthermore, the control system features process parameter self-learning, using historical data to establish optimal flow curves for different temperature ranges. This further improves the stability and repeatability of complex processes such as polysilicon doping and oxide deposition. To ensure real-time and reliable data transmission, the equipment utilizes the Industrial Ethernet communication protocol, enabling high-speed, low-latency interaction between sensor data and the control system. Furthermore, the system incorporates integrated fault diagnosis capabilities. When a sensor or actuator anomaly occurs, the fault point is quickly located and an alarm is triggered, guiding maintenance personnel to address it promptly and minimizing equipment downtime.

[0035] By integrating an inlet flow sensor with a furnace door temperature sensor, PECVD equipment has achieved a technological leap from passive monitoring to active control, providing reliable hardware support and intelligent control strategies for efficient and precise silicon wafer coating processes. As the photovoltaic industry continues to demand higher quality silicon wafer coatings, this intelligent control technology will continue to evolve, driving PECVD equipment toward higher precision and stability.

[0036] When the present invention is working: the position of the silicon wafer is detected by the silicon wafer in-place photoelectric sensor 23. When it is detected that the silicon wafer has entered the quartz tube, it sends a signal to the control system, the longitudinal motion component 301 works, the rodless cylinder 35 drives the furnace door connecting block 34 to move, and the furnace door connecting block 34 drives the furnace door plate 41 to move toward the furnace door. When the furnace door plate 41 is in place, it stops. At this time, the transverse drive component 101 works, the cylinder shaft of the pen-shaped cylinder 12 retracts, and the cylinder shaft of the pen-shaped cylinder 12 drives the longitudinal bottom plate 31 through the traction member 26. The furnace door plate 41 moves toward the furnace mouth. After the furnace door plate 41 is in place, it stops and the furnace door plate 41 closes the furnace door. The reaction gas enters through the air inlet pipe 63 and flows out from the guide bend 68. The gas is first concentrated in the air cavity of the furnace door flow equalizer 61, and then flows evenly into the quartz tube through the air holes in the furnace door flow equalizer 61 to react, and finally the silicon wafer is coated. When the coating is completed, the cylinder shaft of the pen-shaped cylinder 12 extends, the furnace door plate 41 moves away from the furnace door, and the furnace door is opened. After the furnace door plate 41 is in place horizontally, it stops, and the longitudinal motion component 301 works. The rodless cylinder 35 drives the furnace door connecting block 34 to move. The furnace door connecting block 34 drives the furnace door plate 41 to move in the direction away from the furnace door. The furnace door plate 41 stops after it is in place, and the furnace door plate 41 is closed and opened at this time. Compared with the prior art, the present invention adds a set of horizontal single slider guide rails for support. During the vertical boat stacking process, even if the diameter and weight of the furnace door increase, the bottom plate will not be deformed when the furnace door moves to the furnace mouth end, and the furnace door will not shift downward and the sealing of the furnace mouth will not decrease.

[0037] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any person skilled in the art can easily conceive of various modifications and substitutions within the technical scope disclosed in the present invention, and such modifications and substitutions are intended to be within the scope of protection of the present invention. Therefore, the scope of protection of the present invention shall be subject to the scope of protection of the claims.

Claims

1. A furnace door structure for stacked boat tube PECVD, comprising a furnace door drive structure and a furnace body assembly (401), characterized in that: The furnace door driving structure comprises a transverse driving component (101) and a longitudinal motion component (301); The transverse drive assembly (101) includes a transverse double-slider base plate (11), a pen-shaped cylinder (12), a transverse double-slider guide rail (15), a transverse double-slider connecting plate (16), a transverse single-slider base plate (17), four adjustment bolts (18), a transverse single-slider guide rail (19) and a traction member (26); The pen-shaped cylinder (12) is mounted on the upper surface of the transverse double-slider bottom plate (11), the traction member (26) is mounted on the end of the cylinder shaft of the pen-shaped cylinder (12), the transverse double-slider guide rail (15) is mounted on the upper surface of the transverse double-slider bottom plate (11), a transverse flexible limit block (14) is mounted on the upper surface of the transverse double-slider bottom plate (11), the transverse double-slider connecting plate (16) is mounted on the slider of the transverse double-slider guide rail (15), and one side of the transverse double-slider connecting plate (16) is mounted on the slider of the transverse double-slider guide rail (15). The side is fixedly connected with a transverse hard limit block (13), the transverse single slider guide rail (19) is installed on the upper surface of the transverse single slider base plate (17), the four adjustment bolts (18) are symmetrically installed inside the transverse single slider base plate (17), the outer wall of the slider of the transverse double slider guide rail (15) and the outer wall of the slider of the transverse single slider guide rail (19) are both installed with a transverse heat insulation board (27), and the upper surface of the slider of the transverse single slider guide rail (19) is fixedly connected with a transverse single slider connecting plate (20).

2. The furnace door structure for stacked boat and tube PECVD according to claim 1, characterized in that: A silicon chip sensing component is provided on the transverse double-slider bottom plate (11), and the silicon chip sensing component includes a photoelectric mounting plate (21), an angle adjustment plate (22), and a silicon chip in-position photoelectric sensor (23); The photoelectric mounting plate (21) is mounted on the upper surface of the horizontal double slider bottom plate (11), the angle adjustment plate (22) is mounted on the end of the photoelectric mounting plate (21) by bolts, and the silicon chip in-position photoelectric sensor (23) is mounted on the upper surface of the angle adjustment plate (22).

3. The furnace door structure for stacked boat and tube PECVD according to claim 2, characterized in that: A transverse limit sensor (24) is installed on one side of the transverse double-slider bottom plate (11), and a transverse sensor sheet (25) is installed on one side of the slider of the transverse double-slider guide rail (15).

4. The furnace door structure for stacked boat and tube PECVD according to claim 1, characterized in that: The longitudinal motion assembly (301) includes a longitudinal bottom plate (31), a longitudinal adapter block (32), a longitudinal sensor plate (33), a furnace door connection block (34), a rodless cylinder (35), a longitudinal limit sensor (36) and a limit fixing block (37); The longitudinal bottom plate (31) is respectively mounted on the upper surface of the transverse double-slider connecting plate (16) and the upper surface of the transverse single-slider connecting plate (20); the furnace door connecting block (34) is mounted on the outside of the rodless cylinder (35); the rodless cylinder (35) is mounted on the upper surface of the longitudinal bottom plate (31); the longitudinal sensing piece (33) is mounted on the outer side wall of the furnace door connecting block (34) through the longitudinal adapter block (32); the limit fixing block (37) is mounted on the end of the rodless cylinder (35); and the limit bolt (39), the buffer (38) and the longitudinal limit sensor (36) are respectively mounted inside the limit fixing block (37).

5. The furnace door structure for stacked boat and tube PECVD according to claim 4, characterized in that: A longitudinal heat insulation plate (40) is fixedly connected to the upper surface of the longitudinal bottom plate (31), and a cylinder shaft of the pen-shaped cylinder (12) is fixedly connected to the longitudinal heat insulation plate (40) via a traction member (26).

6. The furnace door structure for stacked boat and tube PECVD according to claim 1, characterized in that: The furnace body assembly (401) includes a furnace door panel (41), a rotating seat (42), a horizontal adjustment block (44), an axis fixing seat (45), an adjustment bracket (46), a furnace door beam (48), a furnace door rotating block (49), a connecting nut (57), a hinge shaft (58) and a bearing retaining ring (59); The furnace door beam (48) is mounted on one side of the adjustment bracket (46) through a connecting bolt, the shaft fixing seat (45) is mounted on the upper surface of the adjustment bracket (46) through a connecting bolt, the horizontal adjustment block (44) is mounted on the upper surface of the adjustment bracket (46) and connected to the shaft fixing seat (45) through a connecting bolt, the shaft fixing seat (45) is fixedly connected to the front surface of the furnace door rotating block (49), and the furnace door rotating block (49) is fixedly connected to the front surface of the rotating seat (42); The rotating seat (42) is rotatably connected to the furnace door panel (41) via a hinge shaft (58), and a bearing retaining ring (59) is sleeved on the outside of the hinge shaft (58).

7. The furnace door structure for stacked boat and tube PECVD according to claim 6, characterized in that: The furnace body assembly (401) further includes a spring cover plate (47), a plunger (50), a support seat (51), a hanging ring (52), a support spring (56) and a connecting nut (57); The support spring (56) is sleeved on the outside of the hinge shaft (58), the spring cover plate (47) is connected to the hinge shaft (58) through the connecting nut (57) and compresses the support spring (56), the support seat (51) is symmetrically fixedly connected to the rear surface of the furnace door plate (41), the plunger (50) is simultaneously inserted into the inside of the support seat (51) and the inside of the furnace door rotating block (49), the hanging ring (52) is installed on the top of the front surface of the furnace door plate (41), and the front surface of the furnace door plate (41) is installed with a handle (43).

8. The furnace door structure for stacked boat and tube PECVD according to claim 7, characterized in that: The furnace door beam (48) is fixedly connected to the upper surface of the furnace door connecting block (34).

9. The furnace door structure for stacked boat and tube PECVD according to claim 7, characterized in that: A furnace mouth air cavity assembly (601) is provided inside the furnace door panel (41), and the furnace mouth air cavity assembly (601) comprises a furnace door flow equalizing plate (61), a guide fixing ring (62), an air inlet pipe (63), an air outlet block (64), a protective cover (67), and a guide elbow (68); The furnace door flow equalizing plate (61) is fixedly connected to the rear surface of the furnace door panel (41), the guide fixing ring (62) is installed on the rear surface of the furnace door panel (41), the air inlet pipe (63) is installed inside the furnace door panel (41) and fits on the inner wall of the guide fixing ring (62), the protective cover (67) is installed on the rear surface of the furnace door panel (41), the air outlet block (64) is fixedly connected to the center of the rear surface of the furnace door panel (41), and the guide elbow (68) is installed inside the air outlet block (64).

10. The furnace door structure for stacked boat and tube PECVD according to claim 9, characterized in that: The air inlet pipe (63) is located inside the protective cover (67), one end of the air inlet pipe (63) is connected to the guide elbow (68), and the air inlet pipe (63), the air outlet block (64) and the protective cover (67) are all located inside the furnace door flow equalizing plate (61).

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