Intelligent work order filling method and device, storage medium and equipment

Abstract

The invention provides an intelligent work order filling method and device, a storage medium and equipment, and the method comprises the steps: feeding back an intelligent work order filling verification prompt if a fault equipment unit judges that fault report information does not belong to a laboratory equipment unit range; if the fault equipment unit is inconsistent with the fault type or the fault description information, generating an intelligent work order filling verification prompt by combining the fault equipment unit, the fault type and / or the fault description information, and feeding back the intelligent work order filling verification prompt; if any one of the fault equipment unit, the fault type and the fault description information is null, feeding back an intelligent work order to fill in a first supplementary prompt; and if the specified object of any one of the fault equipment unit, the fault type and the fault description information is not unique, generating an intelligent work order filling second supplementary prompt in combination with the fault equipment unit and / or the fault type and / or the fault description information, and feeding back the intelligent work order filling second supplementary prompt.

Description

Technical Field

[0001] The present invention relates to the field of work order filling, and in particular to an intelligent work order filling method, device, storage medium and equipment. Background Art

[0002] Semiconductor micro-nanofabrication and manufacturing platforms involve a large number of process and general equipment, requiring complex expertise. The operating status of each device in a semiconductor micro-nanofabrication and manufacturing platform requires regular inspection and maintenance. Existing technologies often require specialized maintenance personnel to regularly monitor each device for faults and report them promptly.

[0003] However, when a device fails, the entire processing process will be recorded in the form of a work order. However, it is precisely because the work order recording mode brings many pain points in actual application. For example, when reporting a problem, on-site maintenance personnel need to manually enter the work order content. This process requires a huge amount of filling, which greatly reduces work efficiency. In addition, when describing the fault information, due to the lack of accurate extraction of key fault information, relevant personnel are unable to fully and accurately grasp the on-site fault situation in the first time, which seriously affects the subsequent maintenance work. Furthermore, when dealing with fault problems, laboratory managers and maintenance personnel often use various communication methods such as WeChat, DingTalk, and email to analyze the cause of the fault and specify solutions. The above information is scattered in various communication channels, and maintenance personnel need to organize and summarize the scattered information before reflecting it in the work order, which undoubtedly wastes a lot of energy. It is also possible that some effective information that is crucial to solving the fault will be overlooked in the process of sorting out the solution. Furthermore, since maintenance personnel need to connect to hundreds of devices at the same time, and most of them simply report the fault work order information when a device fails, the subsequent maintenance of the faulty equipment may require maintenance personnel to repeatedly check the faulty equipment to determine the accurate faulty equipment information, resulting in a slow maintenance process for the faulty equipment, which is not conducive to the efficient operation of the micro-nano processing platform equipment. Summary of the Invention

[0004] Based on this, the present invention provides an intelligent work order filling method, device, storage medium and equipment, which automatically extracts corresponding equipment failure information from the information reported by patrol personnel and generates an intelligent work order, thereby improving the efficiency and accuracy of patrol personnel's reporting of faulty equipment.

[0005] In a first aspect, the present invention provides an intelligent work order filling method, comprising:

[0006] Obtain fault reporting information sent by inspection personnel;

[0007] Extract the faulty equipment unit, fault type, fault reporting time, fault description information and inspection personnel ID from the fault reporting information;

[0008] If it is determined based on the faulty equipment unit that the fault report information does not belong to the scope of the laboratory equipment unit, the intelligent work order filling verification prompt is fed back in combination with the inspection personnel ID;

[0009] If it is determined that the fault report information belongs to the scope of laboratory equipment groups according to the faulty equipment group, whether any one of the fault type and the fault description information is empty is determined; if any one of the fault type and the fault description information is empty, the first supplementary prompt is filled in the intelligent work order in combination with the inspection personnel ID feedback;

[0010] If the faulty equipment unit, the fault type, and the fault description information are all not empty, determine whether the faulty equipment unit, the fault type, and the fault description information are consistent; if the faulty equipment unit is inconsistent with the fault type or the fault description information, generate a smart work order filling and verification prompt based on the faulty equipment unit, the fault type, and / or the fault description information, and feedback the smart work order filling and verification prompt based on the inspection personnel ID;

[0011] If the faulty equipment unit, the fault type and the fault description information are consistent, determine whether the objects specified by the faulty equipment unit, the fault type and the fault description information are unique; if the object specified by any one of the faulty equipment unit, the fault type and the fault description information is not unique, generate a second supplementary prompt for filling out an intelligent work order in combination with the faulty equipment unit, and / or the fault type, and / or the fault description information, and feedback the second supplementary prompt for filling out an intelligent work order in combination with the inspection personnel ID.

[0012] Furthermore, the intelligent work order filling method also includes: if the faulty equipment group determines that the fault reporting information belongs to the scope of laboratory equipment groups, the faulty equipment group, the fault type and the fault description information are not empty, and the faulty equipment group, the fault type and the fault description information are consistent and the specified object is unique, an intelligent work order is generated according to the faulty equipment group, fault type, fault reporting time, fault description information and inspection personnel ID.

[0013] Furthermore, the fault reporting information sent by the inspection personnel includes text fault reporting information and voice fault reporting information sent by the inspection personnel.

[0014] Furthermore, the intelligent work order filling method also includes:

[0015] Retrieving historical fault information of the faulty equipment unit;

[0016] Generate historical fault prompt information based on the historical fault information and send it to the inspection personnel.

[0017] Furthermore, the intelligent work order filling method also includes:

[0018] Retrieve the associated equipment units of the faulty equipment unit;

[0019] Associated equipment fault inspection information is generated according to the correlation between the associated equipment group and the faulty equipment group, and is sent to inspection personnel.

[0020] Furthermore, the intelligent work order filling method also includes:

[0021] The smart work orders are sorted according to the impact levels of the faulty equipment units corresponding to the smart work orders, and the sorted smart work orders are sent to inspection personnel for sequential verification.

[0022] Furthermore, the intelligent work order filling method also includes:

[0023] After the intelligent work order is generated, the engineer's feedback on the maintenance suggestions for the faulty equipment unit is obtained through various communication methods;

[0024] The maintenance suggestion information is integrated according to the time series to obtain a maintenance suggestion plan for the faulty equipment unit.

[0025] Furthermore, the intelligent work order filling method also includes:

[0026] If the maintenance suggestion plan for the faulty equipment unit lacks the fault cause or maintenance means of the faulty equipment unit, a reference maintenance suggestion plan is obtained by searching from a reference database according to the intelligent work order.

[0027] Furthermore, the intelligent work order filling method also includes:

[0028] If the maintenance suggestion plan for the faulty equipment unit records the fault cause and maintenance method of the faulty equipment unit, searching for at least one reference fault cause and at least one reference maintenance method from a reference database according to the intelligent work order;

[0029] Determine the similarity between the fault cause and a reference fault cause, and the similarity between the corresponding repair means and the reference repair means; if the similarity between the fault cause and the reference fault cause is lower than an analysis credibility threshold and / or the similarity between the repair means and the reference repair means is lower than an operation credibility threshold, change the fault cause in the repair suggestion to the reference fault cause, and change the repair means in the fault repair suggestion to the reference repair means.

[0030] Furthermore, the intelligent work order filling method also includes:

[0031] Obtaining historical maintenance plans for the faulty equipment unit;

[0032] If there are multiple recommended maintenance plans for the faulty equipment unit, the following steps are set for any recommended maintenance plan:

[0033] If the similarity between the maintenance suggestion and the historical maintenance solution is greater than a first threshold, and the number of times the historical maintenance solution has a similarity greater than the first threshold with the maintenance suggestion is greater than a second threshold;

[0034] Lowering the priority of the maintenance suggestion plan according to a preset weight;

[0035] The maintenance suggestions with adjusted priorities are sorted and pushed to the maintenance personnel.

[0036] Furthermore, the intelligent work order filling method also includes:

[0037] Obtaining historical maintenance plans for the faulty equipment unit;

[0038] If the similarity between the maintenance suggestion plan and the historical maintenance plan is greater than a first threshold, and the frequency of the historical maintenance plan within a preset period is greater than a third threshold;

[0039] A prompt message indicating that the maintenance suggestion plan is invalid is generated based on the intelligent work order and sent to the maintenance personnel.

[0040] In a second aspect, the present invention further provides an intelligent work order filling device, comprising:

[0041] Fault reporting module, used to obtain fault reporting information sent by inspection personnel;

[0042] An information extraction module is used to extract the faulty equipment unit, fault type, fault reporting time, fault description information and inspection personnel ID from the fault reporting information;

[0043] The equipment verification module is used to, if it is determined based on the faulty equipment unit that the fault report information does not belong to the scope of laboratory equipment units, feedback the intelligent work order filling verification prompt based on the inspection personnel ID;

[0044] An information vacancy verification module is used to determine whether any one of the faulty equipment group, the fault type, and the fault description information is empty if the fault report information is determined to belong to the scope of laboratory equipment groups according to the faulty equipment group; if any one of the faulty equipment group, the fault type, and the fault description information is empty, the first supplementary prompt for filling in the intelligent work order is fed back in combination with the inspection personnel ID;

[0045] An information consistency verification module is used to determine whether the faulty equipment unit, the fault type, and the fault description information are consistent if none of them are empty; if the faulty equipment unit is inconsistent with the fault type or the fault description information, generate a smart work order filling verification prompt based on the faulty equipment unit, the fault type, and / or the fault description information, and feedback the smart work order filling verification prompt based on the inspection personnel ID;

[0046] An information uniqueness verification module is used to determine whether the objects specified by the faulty equipment group, the fault type and the fault description information are unique if the faulty equipment group, the fault type and the fault description information are consistent; if the object specified by any one of the faulty equipment group, the fault type and the fault description information is not unique, a second supplementary prompt for filling out an intelligent work order is generated in combination with the faulty equipment group, and / or the fault type, and / or the fault description information, and the second supplementary prompt for filling out the intelligent work order is fed back in combination with the inspection personnel ID.

[0047] In a third aspect, the present invention further provides a computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements the steps of any one of the intelligent work order filling methods in the first aspect.

[0048] In a fourth aspect, the present invention further provides a computer device comprising a memory and a processor, wherein the memory stores a computer program, and when the processor executes the computer program, it executes any one of the intelligent work order filling methods in the first aspect.

[0049] The beneficial effects of adopting the above technical solution are: this embodiment extracts and verifies the fault information reported by the patrol personnel, and feeds back to the patrol personnel the problems existing in the filling of intelligent work orders. Without requiring the patrol personnel to have a large amount of knowledge reserves, it improves the accuracy and efficiency of filling out intelligent work orders, which is beneficial for laboratory personnel to quickly grasp the fault conditions of the equipment inside the laboratory, and provides a data basis for the subsequent effective maintenance of a large number of equipment faults in the laboratory. BRIEF DESCRIPTION OF THE DRAWINGS

[0050] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for describing the embodiments or the prior art.

[0051] Figure 1 This is a schematic diagram of a method for filling out an intelligent work order in one embodiment of the present application;

[0052] Figure 2 This is a schematic diagram of an intelligent work order filling device in one embodiment of the present application. DETAILED DESCRIPTION

[0053] The following will combine the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention. In order to explain the present invention in more detail, the intelligent work order filling method, device, storage medium and equipment provided by the present invention are specifically described below in combination with the drawings.

[0054] Unless otherwise defined, the technical or scientific terms used in this application should have the usual meanings understood by people with ordinary skills in the field to which the invention belongs. The words "first", "second" and similar terms used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, words such as "one", "an" or "the" do not indicate a quantity limitation, but rather indicate the presence of at least one. Words such as "include" or "comprise" mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. Words such as "connect" or "connected" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the object being described changes, the relative positional relationship may also change accordingly.

[0055] The micro-nano processing experimental platform includes process equipment and plant equipment, including but not limited to multiple processes of semiconductor micro-nano processing, such as lithography equipment, deposition equipment, etching equipment, doping equipment, etc. The micro-nano processing equipment of each process requires a certain amount of semiconductor micro-nano processing knowledge before operation, and the equipment maintenance stage requires a more comprehensive and in-depth micro-nano processing knowledge reserve; plant equipment generally includes power systems, pure water systems, cooling water systems, nitrogen production systems and exhaust systems, etc. Each plant equipment requires high-precision control, high-purity assurance, and low-interference operation to meet the stringent environmental requirements of micro-nano processing and provide stable and reliable infrastructure support for high-precision micro-nano manufacturing.

[0056] However, the existing technology mostly adopts a model in which inspection personnel inspect and report the faults of micro-nano processing platform equipment, and then professional maintenance personnel carry out inspection and maintenance. However, since the inspection personnel have limited professional knowledge of the micro-nano processing platform and inaccurate description of the faults of the micro-nano processing platform equipment, it is easy for professional maintenance personnel to not understand the fault information reported in the work order after the fault is reported, which is not conducive to the subsequent maintenance work of the faulty equipment. It is even possible that the erroneous fault reporting work order will cause the subsequent maintenance work to be delayed, which has a greater impact.

[0057] The embodiment of the present application provides an application scenario of intelligent work order filling, which includes the terminal device provided in the embodiment, and the terminal device includes but is not limited to a smart phone and a computer device, wherein the computer device can be at least one of a desktop computer, a portable computer, a laptop computer, a mainframe computer, a tablet computer, etc. The terminal device receives the fault report information sent by the inspection personnel, analyzes whether the fault report information accurately describes the problem of the faulty unit, and feeds back prompt information to the inspection personnel. Figure 1 The figure shows a schematic diagram of the method for filling out an intelligent work order. For the specific process, please refer to the embodiment of filling out an intelligent work order.

[0058] Step S100: Obtain fault reporting information sent by inspection personnel.

[0059] Specifically, in this embodiment, the fault report information sent by the inspection personnel can be in the form of text or voice. The inspection personnel can send text fault report information and / or voice fault report information through a specific communication terminal device to describe the equipment fault situation in the micro-nano processing platform.

[0060] Step S200: extracting the faulty equipment unit, fault type, fault reporting time, fault description information and inspection personnel ID from the fault reporting information.

[0061] Specifically, the fault report sent by the inspector should include the information required to generate a smart work order, such as the faulty equipment unit, fault type, fault reporting time, fault description, and inspector ID. The faulty equipment unit can be described by its name and location, or by its ID. The faulty equipment unit is used to identify the specific faulty equipment. The fault type includes the type of fault experienced by the faulty equipment unit, such as liquid level, air pressure, or temperature. The fault reporting time is the time the inspector sent the fault report. The fault description details the fault condition of the faulty equipment unit, making it easier for maintenance personnel to understand the specific fault condition. For example, the fault description could be "Equipment A has a liquid level fault, the current level is 0.36m," or "Equipment B has a temperature fault, the current temperature is 800°C." The inspector ID records the person who sent the fault report, facilitating the subsequent delivery of corresponding prompts or the tracing of subsequent equipment fault reports.

[0062] Step S300: If it is determined based on the faulty equipment unit that the fault report information does not belong to the scope of the laboratory equipment unit, a smart work order filling and verification prompt is fed back in combination with the inspection personnel ID.

[0063] Specifically, when receiving the fault reporting information sent by the inspection personnel, it is necessary to first check whether the fault reporting information belongs to the scope of the laboratory equipment unit. If the fault reporting information sent by the inspection personnel does not belong to the scope of the laboratory equipment unit, it means that the fault reporting information is incorrect and the inspection personnel need to check the fault reporting information.

[0064] Among them, a laboratory equipment unit database is set up for the micro-nano processing experimental platform. The faulty equipment unit extracted from the fault report information sent by the inspection personnel is compared with the laboratory equipment unit database using a traversal method. If there is no consistent faulty equipment unit after the faulty equipment unit traverses the laboratory equipment unit database, it is necessary to feedback to the inspection personnel that the faulty equipment unit does not exist. Specifically, the intelligent work order filling verification prompt is fed back in combination with the inspection personnel ID.

[0065] Step S400: If it is determined that the fault reporting information belongs to the scope of laboratory equipment groups based on the faulty equipment group, determine whether any one of the fault type and the fault description information is empty. If any one of the faulty equipment group, the fault type and the fault description information is empty, fill in the first supplementary prompt of the intelligent work order in combination with the inspection personnel ID feedback.

[0066] Specifically, in the process of fault management of experimental equipment in the micro-nano processing platform, it is essential to determine the accurate description of the equipment fault, including the fault equipment unit, fault type and fault description information. If any of the above items is empty, the specific situation of the faulty equipment cannot be located. At this time, it is necessary to feedback the first supplementary prompt for filling out the smart work order to the inspection personnel to fill in the necessary information for the smart work order of the faulty equipment unit.

[0067] Step S500: If the faulty equipment unit, the fault type and the fault description information are not empty, determine whether the faulty equipment unit, the fault type and the fault description information are consistent. If the faulty equipment unit is inconsistent with the fault type or fault description information, generate an intelligent work order filling and verification prompt based on the faulty equipment unit, the fault type and / or fault description information, and feedback the intelligent work order filling and verification prompt based on the inspection personnel ID.

[0068] Specifically, due to the limited knowledge base of the inspection personnel on the equipment units within the micro-nano processing platform, the inspection personnel may find that the faulty equipment unit is inconsistent with the fault type or fault description information during the fault reporting process. For such cases, it is necessary to generate a smart work order filling and verification prompt based on the faulty equipment unit, fault type and / or fault description information. For example, in the same fault report information, the faulty equipment unit is a pure water system device, but the corresponding fault type is "low air pressure" or the fault description information is "low pressure alarm E1", which is obviously inconsistent with the faulty equipment unit. In this case, it is necessary to generate a smart work order filling and verification prompt based on the above information to remind the inspection personnel whether they have confused the fault type or fault description information of other faulty equipment units.

[0069] Step S600: If the faulty equipment unit, the fault type and the fault description information are consistent, determine whether the objects specified by the faulty equipment unit, the fault type and the fault description information are unique; if the objects specified by any one of the faulty equipment unit, the fault type and the fault description information are not unique, generate a second supplementary prompt for filling out an intelligent work order in combination with the faulty equipment unit, and / or the fault type, and / or the fault description information, and feedback the second supplementary prompt for filling out an intelligent work order in combination with the inspection personnel ID.

[0070] Specifically, when the object specified in any one of the faulty equipment unit, the fault type and the fault description information is not unique, it means that the fault reporting information sent by the inspection personnel is in a vague state, which is not conducive to the maintenance personnel to determine the specific equipment unit fault situation. At this time, the inspection personnel need to further supplement the situation where the above-mentioned specified objects are not unique in order to clearly and accurately describe the fault information of the faulty equipment unit.

[0071] The specific judgment process for determining whether the object specified in any one of the faulty equipment unit, fault type, and fault description information is unique is as follows:

[0072] If the faulty equipment unit ID determined by traversing the laboratory equipment unit database is empty or exceeds one, the object specified by the faulty equipment unit is not unique;

[0073] If the faulty equipment unit traverses a faulty equipment unit ID determined by the laboratory equipment unit database, the preset fault type of the faulty equipment unit is retrieved according to the faulty equipment unit ID;

[0074] If the fault type ID determined by traversing the preset fault types of the faulty equipment group is empty or exceeds one, the object specified by the fault type is not unique;

[0075] If the fault type traverses the preset fault types of the faulty equipment group and determines that there is only one fault type ID, the fault type description data type is retrieved according to the fault type ID;

[0076] If the fault description information does not conform to the fault type description data type, the object specified by the fault description information is not unique.

[0077] Furthermore, the above fault description information is also provided with a determination of the fault description information range, specifically:

[0078] Retrieve the fault type description data threshold according to the fault type ID;

[0079] If the fault description information exceeds the maximum proportion of the fault type description data threshold range, the fault description information is incorrect, and an error prompt will be displayed when the smart work order is filled out in combination with the inspection personnel ID feedback.

[0080] To better understand the technical solutions described in this application, the following explanation is provided with reference to a specific example of a micro-nano processing platform, which illustrates that the object specified in any of the above-mentioned faulty equipment unit, fault type, and fault description information is not unique:

[0081] When the inspection personnel report the fault report information and the faulty equipment unit extracted is the alarm of the chiller / hot water unit and the fault type is pressure abnormality, if the fault description is not in accordance with the preset fault type description data type (such as the fault code displayed on the panel, E3: exhaust pressure alarm, E4: low pressure alarm, etc.), but is described as "low pressure", the fault description cannot determine the specific pressure abnormality of the chiller / hot water unit. At this time, the inspection personnel need to be reminded to report the pressure abnormality according to the preset fault type description data type.

[0082] Using the same example of the chiller / hot water unit mentioned above, if the fault codes corresponding to the abnormal pressure of the chiller / hot water unit only include E1-E6, and the fault description information is recorded as "E8: Exhaust pressure alarm", then the fault description information is incorrect and it is necessary to combine the inspection personnel ID feedback to fill in the error prompt of the smart work order.

[0083] Step S700: If the faulty equipment group determines that the fault reporting information belongs to the scope of laboratory equipment groups, the faulty equipment group, the fault type and the fault description information are not empty, and the faulty equipment group, the fault type and the fault description information are consistent and the specified object is unique, an intelligent work order is generated according to the faulty equipment group, fault type, fault reporting time, fault description information and inspection personnel ID.

[0084] For example, the fault reporting information sent by the inspection personnel extracts that the faulty equipment unit is PWC water tank 001, the fault type is liquid level alarm, the fault reporting time is time a, the fault description information is "the liquid level deviates from the normal range, the current liquid level is 2.5m", and the inspection personnel ID is inspection 007. At this time, an intelligent work order can be generated based on the above information, recorded as "fault reporting personnel: inspection 007; fault reporting time: time a; faulty equipment unit: PWC water tank 001; fault type: liquid level alarm; fault description information: liquid level 2.5m"; based on the above intelligent work order, the inspection personnel can quickly determine the faulty equipment unit and the corresponding fault condition, and quickly provide solutions to troubleshoot the fault, which can effectively maintain the equipment of the micro-nano processing platform.

[0085] Furthermore, based on the above solution, this embodiment also takes into account the possibility that the fault report information may be repeated with the historical fault report information. In this case, the historical fault report information can be combined to provide a reference for the accurate description of the current fault report information, so that the inspection personnel can quickly and accurately describe the equipment unit fault condition, specifically:

[0086] Step S801: retrieve historical fault information of the faulty equipment unit.

[0087] It should be noted that the historical fault information of the faulty equipment unit is historical fault information that accurately describes the fault condition of the faulty equipment unit, and the historical maintenance plan is also recorded in the historical fault information.

[0088] Step S802: Generate historical fault prompt information based on the historical fault information and send it to inspection personnel.

[0089] In this embodiment, historical fault prompt information can be generated based on the historical fault information that has occurred most frequently within a preset historical time period and sent to inspection personnel so that the inspection personnel can quickly describe the fault condition of the faulty equipment unit. The historical fault prompt information includes the historical fault type and historical fault description information. The historical fault type is the historical fault type that has occurred most frequently within the historical time period, and the historical fault description information is the historical fault description information with the highest frequency within the historical fault type.

[0090] Furthermore, considering that the internal equipment of the micro-nano processing laboratory does not exist independently, when a certain equipment unit fails, the linked equipment units may also fail. Therefore, when filling out the smart work order, it is necessary to describe the related equipment together, specifically:

[0091] Step S901: retrieve the associated equipment groups of the faulty equipment group.

[0092] In this embodiment, taking the plant equipment of a micro-nano processing laboratory as an example, the plant equipment includes a power system, a pure water system, an ultrapure water system, a chilled water system, a cooling water system, a hot water system, a medium-temperature water system, a nitrogen generation system, an air compression system, a vacuum system, a process cooling water system, an air conditioning unit, a wastewater system, an exhaust system, a bulk gas system, a specialty gas system, and a chemical supply system. The associated equipment of the above plant equipment is as follows:

[0093] (1) If the power system suddenly loses power, all plant systems will shut down; if any two systems lose power, it is highly likely that the cause is a power system failure.

[0094] (2) If the pure water system stops, ① it will affect the operation of the humidification module of the air-conditioning unit, and the temperature and humidity will be out of control after 2 hours; ② it will affect the operation of the nitrogen production system, and the air compressor screw used for lubrication and water replenishment in the nitrogen production system will stop running after about 3 days without pure water; ③ it will affect the scrubber of the special gas system, and the special gas cannot be replaced.

[0095] (3) If the ultrapure water system is shut down, it will not affect other plant systems, but it will affect the process equipment using ultrapure water. Wet cleaning, wet etching, and water-based developing equipment cannot be used. However, it is best not to shut down the ultrapure water system for more than 4 hours. If it is shut down for too long, the water quality will deteriorate.

[0096] (4) If the chilled water system shuts down, it will immediately affect the temperature and humidity of the entire laboratory and needs to be restored immediately.

[0097] (5) If the cooling water system shuts down, the chilled water system will not operate normally. The chilled water system will shut down immediately, which will immediately affect the temperature and humidity of the entire clean room and need to be restored immediately.

[0098] (6) If the hot water system stops working, it will affect the operation of the clean room air conditioning, and the temperature and humidity cannot be controlled, so it needs to be restored immediately.

[0099] (7) If the medium-temperature water system shuts down, ① it will affect the operation of the air compressor system. The air compressor will shut down after about 5 minutes. Because the medium-temperature water plays a cooling role in the air compressor system, the shutdown of the medium-temperature water will cause the temperature to be too high, and the air compressor will shut down automatically; ② it will affect the operation of the nitrogen generator system. The nitrogen generator will shut down after about 5 minutes. Because the medium-temperature water plays a cooling role in the nitrogen generator system, the shutdown of the medium-temperature water will cause the temperature to be too high, and the nitrogen generator will shut down automatically; ③ it will affect the temperature of the entire clean room because the medium-temperature water is the cooling water for the dry cooling coil.

[0100] (8) If the nitrogen production system stops, ① it will affect the special gas system. The nitrogen produced can still be supplied for 20 minutes. After 20 minutes, the special gas system will stop supplying gas immediately because all pneumatic valves will be closed; ② it will affect the operation of the ultrapure water system. The nitrogen produced can still be supplied for 20 minutes. After about 20 minutes, the ultrapure water system will stop running because there is no nitrogen supply to the nitrogen sealing water tank of the ultrapure water; ③ after 20 minutes of nitrogen supply stoppage, the use of all process equipment will be affected.

[0101] (9) If the air compression system stops, ① it will affect the pure water system. After 4 hours of air compression stopping, the pure water system will stop; ② it will cause 80% of the process machines to fail to operate normally.

[0102] (10) If the vacuum system shuts down, it will not affect other factory equipment, but will affect process equipment that uses vacuum, such as coating and developing equipment, photolithography machines, etching machines, etc.

[0103] (11) If the process cooling water system is shut down, it will not affect other plant equipment, but will affect the process equipment using PCW, which accounts for about 90% of the process equipment.

[0104] (12) If the air conditioning unit stops working, it will immediately affect the temperature and humidity of the entire laboratory and needs to be restored immediately.

[0105] (13) If the wastewater system is shut down, it will not affect other factory equipment. The wastewater system has a temporary storage tank that can support 8 hours. After 8 hours, it will affect the discharge of wastewater from process equipment, and will affect the coating and developing equipment and wet bench.

[0106] (14) If the exhaust system is shut down, ① it will affect the operation of the special gas system and the false alarm of the gas detector, causing the special gas system to stop supplying gas immediately, and the process equipment using special gases cannot operate normally; ② basically all exhaust process equipment cannot be used.

[0107] (15) If the bulk gas is shut down, it will not affect other plant equipment, but the process equipment using bulk gas will not be able to operate normally, accounting for about 90% of the process equipment.

[0108] (16) If the special gas system is shut down, it will not affect other plant equipment, but the process equipment using special gases cannot be used normally, accounting for about 50% of the process equipment.

[0109] (17) If the chemical supply system shuts down, it will not affect other factory equipment, but will affect the wet cleaning and etching machines.

[0110] The process equipment is explained by taking the fully automatic coating and developing equipment and MOCVD equipment as examples, as follows:

[0111] Fully automatic coating and developing equipment consists of a main unit and an auxiliary constant temperature and humidity device. Under normal circumstances, the auxiliary constant temperature and humidity device provides a constant temperature and humidity environment for the main unit, precisely controlling the coating and developing processes. However, if the constant temperature and humidity device malfunctions, the main unit can still operate and perform the coating and developing processes normally, but the process results will be poor. Therefore, if the fully automatic coating and developing equipment malfunctions or the process results deteriorate significantly, the auxiliary constant temperature and humidity device should be listed as an associated device in the smart work order, so that personnel can consider whether the constant temperature and humidity device is at fault when troubleshooting the fully automatic coating and developing equipment.

[0112] Under normal conditions, the exhaust gas treatment equipment on the micro-nano processing platform is used to treat the exhaust gas from the MOCVD equipment, ensuring that the exhaust gas is treated and meets standards before being discharged. However, if the exhaust gas treatment device malfunctions, the MOCVD equipment cannot operate normally and must remain in a non-operating state. Without the exhaust gas treatment device to treat the exhaust gas, the exhaust gas cannot be directly discharged, which would be dangerous. If the exhaust gas treatment device fails or malfunctions, the MOCVD system must be shut down, and the MOCVD shutdown information and associated equipment must be recorded in the smart work order, allowing subsequent staff to quickly understand the reason for the MOCVD non-operation.

[0113] Step S902: generating associated equipment fault inspection information based on the correlation between the associated equipment group and the faulty equipment group, and sending the information to inspection personnel.

[0114] Specifically, based on the correlation between the associated equipment units and the faulty equipment units shown in the above examples, associated equipment fault inspection information is generated and sent to inspection personnel so that the inspection personnel can promptly inspect the operating status of the associated equipment units or perform shutdown processing.

[0115] Furthermore, considering that the micro-nano processing platform may receive multiple smart work orders at any time, and the inspection personnel need to verify the smart work order information one by one, and considering that the impact range or impact level of different equipment unit failures on the micro-nano processing platform is different, when the inspection personnel check the smart work orders, they need to sort the smart work orders and check them in sequence, specifically:

[0116] The smart work orders are sorted according to the impact levels of the faulty equipment units corresponding to the smart work orders, and the sorted smart work orders are sent to inspection personnel for sequential verification.

[0117] Taking plant equipment as an example, the impact levels of faulty equipment units are divided into the following categories:

[0118] Level 1: Impact on laboratory safety, such as detector alarms in special gas systems and leak alarms in chemical supply systems;

[0119] Level 2: Affecting the use of all process equipment in the laboratory, such as sudden power outage of the power system, shutdown of the chilled water system, shutdown of the cooling water system, shutdown of the medium-temperature water system, and shutdown of the air-conditioning unit;

[0120] Level 3: Affecting the use of some laboratory process equipment, such as the shutdown of the ultrapure water system and the chemical process system;

[0121] Level 4: It does not affect the use of process equipment in the short term and needs to be repaired as soon as possible, such as the wastewater system.

[0122] Among them, the smart work orders corresponding to the above impact levels are ranked as follows: Level 1 > Level 2 > Level 3 > Level 4.

[0123] After determining the specific faulty equipment unit and the corresponding fault condition based on the above-mentioned smart work order, a specific maintenance suggestion plan can be generated for the above-mentioned smart work order in combination with the maintenance suggestion information fed back by the engineer, so that subsequent maintenance engineers can quickly carry out maintenance according to the content described in the smart work order. Specifically:

[0124] Step S1001: After the intelligent work order is generated, maintenance suggestion information provided by engineers on the faulty equipment unit in various communication modes is obtained.

[0125] Specifically, the communication methods include WeChat, email, enterprise WeChat, government WeChat, DingTalk and other communication methods, and the name of the faulty equipment unit in the smart work order is used as the keyword to extract information from the communication records in multiple communication methods, and obtain the maintenance suggestion information provided by engineers on the faulty equipment unit in various communication methods.

[0126] Step S1002: Integrate the maintenance suggestion information according to the time series to obtain a maintenance suggestion plan for the faulty equipment unit.

[0127] Specifically, considering that the maintenance suggestion information communication process progresses over time, the maintenance suggestion information of the faulty equipment unit is integrated according to the time sequence to obtain a maintenance suggestion plan for the faulty equipment unit.

[0128] In the process of integrating maintenance suggestion information, the maintenance suggestion information is screened:

[0129] Inputting the maintenance suggestion information into the trained semantic recognition model to obtain a semantic representation of the maintenance suggestion information;

[0130] When the semantic representation of the maintenance suggestion information is positive, retaining the maintenance suggestion information;

[0131] When the semantic representation of the maintenance suggestion information is reverse, discarding the maintenance suggestion information;

[0132] The retained maintenance suggestion information is integrated in chronological order to obtain a maintenance suggestion plan for the faulty equipment unit.

[0133] An example of the maintenance suggestion information integration process is as follows:

[0134] On January 26, 2025, two leaks occurred in the ultrapure water system: the water supply resistivity probe and the first-stage TOC flange. The details were discussed in the WeChat group chat as follows:

[0135] Engineer: Mr. Zhang, have you found the cause of the leakage of the first-level TOC flange and the water supply resistivity probe?

[0136] Engineer Zhang: The leak in the Level 1 TOC flange is due to a full weld seam with sand holes. We need to have a worker re-weld it and provide the cause of the leak. We haven't found the cause of the leak in the water supply resistivity probe yet, and we'll continue investigating.

[0137] Engineer: OK, then please continue to investigate the cause of the water supply resistivity probe leakage.

[0138] Mr. Zhang: Okay.

[0139] The DingTalk chat record on January 27 is as follows:

[0140] Engineer Zhang: (You can quote the engineer’s question yesterday at this point) The reason for the water supply resistivity probe leaking is that the original sealing raw tape has aged and become loose due to the long-term use of the probe and the water pressure, and the sealing raw tape needs to be rewound.

[0141] Engineer: Okay, then please proceed according to the plan.

[0142] At this point, the recommended repair plan for the leakage of the first-level TOC flange in the ultrapure water system can be summarized as "the reason for the leakage of the first-level TOC flange is the leakage of sand holes in the full weld seam, and a worker needs to be hired to re-weld it, and the reason for the leakage is attached"; the recommended repair plan for the leakage of the water supply resistivity probe is "the reason for the leakage of the water supply resistivity probe is that the original sealing raw tape has aged and leaked due to the effect of water pressure after long-term use of the probe, and the sealing raw tape needs to be re-wound."

[0143] Furthermore, to avoid the situation where the integrated fault repair plan does not match the fault problem of the equipment unit, or the situation where the integrated fault repair plan solves the current fault problem of the equipment unit but brings other safety hazards, the repair suggestion plan for the faulty equipment unit obtained in step S1002 needs to be verified in combination with the knowledge system or repair suggestion plan of the public literature, specifically:

[0144] Step S1003 : If the maintenance suggestion plan for the faulty equipment unit lacks the fault cause or maintenance means of the faulty equipment unit, a reference maintenance suggestion plan is obtained by searching from a reference database according to the smart work order.

[0145] Specifically, during the discussion of the maintenance plan for the faulty equipment unit, the engineers may not be able to determine the specific cause of the fault or the maintenance method. However, an incomplete fault maintenance plan is still generated due to the step of triggering the fault maintenance plan integration. However, the incomplete fault maintenance plan cannot solve the problem of the faulty equipment unit. At this time, it is necessary to introduce a reference maintenance suggestion plan in the reference database to solve the problem of the faulty equipment unit.

[0146] Step S1004: If the maintenance suggestion plan for the faulty equipment unit records the fault cause and maintenance method of the faulty equipment unit, at least one reference fault cause and at least one reference maintenance method are searched from a reference database according to the smart work order;

[0147] Step S1005: Determine the similarity between the fault cause and a reference fault cause, and the similarity between the corresponding maintenance means and the reference maintenance means. If the similarity between the fault cause and the reference fault cause is lower than an analysis credibility threshold and / or the similarity between the maintenance means and the reference maintenance means is lower than an operation credibility threshold, change the fault cause in the maintenance suggestion to the reference fault cause, and change the maintenance means in the fault maintenance suggestion to the reference maintenance means.

[0148] It should be noted that in this embodiment, a reference database is provided within the micro-nano processing platform. The reference database records the fault guidance manuals for each device, including the causes of failures and specific repair methods corresponding to various fault phenomena. Therefore, when it is determined that the repair suggestion plan communicated and integrated by the engineer is complete, it can be further determined whether the repair suggestion plan is credible, for example, whether the repair suggestion plan has not appeared in the fault guidance manual. If so, it means that the repair suggestion plan is not necessarily correct and the causes of failures and specific repair methods in the fault guidance manual should be used as the basis. In the above step S1005, the analysis credibility threshold and the operation credibility threshold can be set according to the acceptability of the deviation between the repair suggestion plan and the corresponding content in the fault guidance manual. For example, the analysis credibility threshold can be set to 10% and the operation credibility threshold can be set to 40%.

[0149] Furthermore, considering that the maintenance plans for the same faults of the equipment units in the micro-nano processing platform are somewhat referenceable, the maintenance plans for the faults of the equipment units in the micro-nano processing platform may only solve the current fault conditions. When the frequency of the same fault condition of the equipment unit is too high within a set time period, it means that the historical maintenance plans corresponding to the historical faults of the equipment unit have not solved the fault conditions well. At this time, the historical maintenance plans need to be adjusted, as follows:

[0150] Step S1101: Obtain the historical maintenance plan of the faulty equipment unit.

[0151] In step S1102, if there are multiple suggested maintenance plans for the faulty equipment unit, the following steps are set for any suggested maintenance plan:

[0152] Step S1103 : If the similarity between the maintenance suggestion and the historical maintenance solution is greater than a first threshold, and the number of times the historical maintenance solution has a similarity greater than the first threshold with the maintenance suggestion is greater than a second threshold.

[0153] It should be noted that, given that the descriptions of the repair suggestions may not be completely consistent, for a current repair suggestion, if the similarity between the current repair suggestion and the historical repair suggestion is greater than a first threshold, the current repair suggestion and the historical repair suggestion may be considered the same repair suggestion. It should be noted that the similarity between the current repair suggestion and the historical repair suggestion depends primarily on the cause analysis of the repair suggestion, the repair component, and the handling method for the repair component.

[0154] In this embodiment, the first threshold value for similarity and the second threshold value corresponding to the number of occurrences of historical maintenance plans can be set based on the acceptance of maintenance plans that do not solve the fundamental problem by a specific equipment unit. In this embodiment, the first threshold value can be set to 85%, and the second threshold value can be set to 3. This means that when the similarity between the current maintenance suggestion plan and the historical maintenance suggestion plan exceeds 85%, they are considered to be the same maintenance suggestion plan; when the same maintenance suggestion plan appears more than three times in the historical maintenance plan, the priority of the historical maintenance suggestion plan needs to be reduced according to a preset weight (e.g., 5% or 10%).

[0155] Step S1104: lowering the priority of the maintenance suggestion plan according to a preset weight.

[0156] Step S1105 : sorting the maintenance suggestions with adjusted priorities, and pushing the sorted maintenance suggestions to maintenance personnel.

[0157] Furthermore, considering that the frequency of the same equipment unit failure in the above-described historical maintenance plan is too high, it means that the historical maintenance plan cannot solve the equipment unit failure. In this case, whether there are multiple historical maintenance plans or only one historical maintenance plan, the historical maintenance plan is not a reference and a new maintenance plan is urgently needed:

[0158] Step S1201: Obtain the historical maintenance plan of the faulty equipment unit.

[0159] Step S1202: If the similarity between the suggested maintenance plan and the historical maintenance plan is greater than a first threshold, and the frequency of the historical maintenance plan in a preset period is higher than a third threshold.

[0160] Step S1203: Generate prompt information indicating that the maintenance suggestion plan is invalid based on the smart work order and send it to the maintenance personnel.

[0161] In this embodiment, the first threshold of similarity and the third threshold corresponding to the number of occurrences of historical maintenance plans can be set according to the acceptance of maintenance plans that do not solve the fundamental problem by the specific equipment unit. In this embodiment, the first threshold can be set to 85%, and the third threshold can be set to a frequency of 3 times a day.

[0162] To better illustrate the above embodiment, the alarm of the chiller in the micro-nano processing platform is used as an example:

[0163] At 12:40 PM on June 19th, the chiller in the chilled water system automatically shut down during operation, with the alarm message E4: Low Pressure Alarm. It was immediately reset, and the equipment resumed normal operation.

[0164] The same shutdown occurred at 4:20 PM on June 19th. It was immediately reset and the equipment returned to normal operation.

[0165] At 7:30 PM on June 19th, the same shutdown occurred. An immediate reset restored the device to normal operation. While the device was recovering, we were investigating the possible cause. However, a reset at this point would not resolve the issue, requiring further investigation.

[0166] During the investigation, the same shutdown occurred at 9:05 PM on June 19. At this point, the solution was changed to increase the water supply pressure threshold of the chilled water system's constant pressure supply device, and the issue was considered resolved.

[0167] At 5:50 PM on June 23rd, the same shutdown occurred. The previous solution only addressed the short-term issue, but the true cause was not identified. Further investigation with external experts confirmed a possible pipe blockage. The filter was opened and cleared of foreign matter. So far, the system has been operating normally.

[0168] The above-described intelligent work order filling method effectively reviews equipment fault reports sent by inspection personnel and adjusts any missing or inappropriate parts of the sent equipment fault reports, thereby improving the efficiency and effectiveness of intelligent work order filling. Furthermore, this embodiment integrates maintenance suggestion information from multiple communication methods to generate a maintenance suggestion plan based on intelligent work order filling. This plan is then adjusted based on the historical failure status and maintenance plans of the equipment unit, thereby improving the maintenance efficiency and effectiveness of the maintenance plans for the micro-nano processing platform equipment.

[0169] It should be understood that although the Figure 1 The steps in the flowchart are shown in the order indicated by the arrows, but these steps are not necessarily executed in the order indicated by the arrows. Unless otherwise specified in this document, there is no strict order restriction for the execution of these steps, and these steps can be executed in other orders. Figure 1 At least part of the steps may include multiple sub-steps or sub-stages. These sub-steps or stages are not necessarily executed at the same time, but can be executed at different times. The execution order of these sub-steps or stages is not necessarily sequential, but can be executed in turn or alternately with other steps or at least part of the sub-steps or stages of other steps.

[0170] The embodiment disclosed in the above invention describes in detail the method for filling out an intelligent work order. The method disclosed in the present invention can be implemented using various devices. Therefore, the present invention also discloses an intelligent work order filling device. Figure 2, specific embodiments are given below to explain in detail.

[0171] The fault reporting module 1301 is used to obtain the fault reporting information sent by the inspection personnel;

[0172] An information extraction module 1302 is configured to extract the faulty equipment unit, fault type, fault reporting time, fault description information, and inspection personnel ID from the fault reporting information;

[0173] The equipment verification module 1303 is configured to, if it is determined based on the faulty equipment unit that the fault report information does not belong to the scope of laboratory equipment units, feedback a smart work order filling verification prompt based on the inspection personnel ID;

[0174] The information vacancy verification module 1304 is configured to, if it is determined based on the faulty equipment unit that the fault report information belongs to the scope of laboratory equipment units, determine whether any one of the faulty equipment unit, the fault type, and the fault description information is empty; if any one of the faulty equipment unit, the fault type, and the fault description information is empty, feedback the first supplementary prompt for filling in the intelligent work order in combination with the inspection personnel ID;

[0175] The information consistency verification module 1305 is configured to, if the faulty equipment unit, the fault type, and the fault description information are all not empty, determine whether the faulty equipment unit, the fault type, and the fault description information are consistent; if the faulty equipment unit is inconsistent with the fault type or the fault description information, generate a smart work order filling verification prompt based on the faulty equipment unit, the fault type, and / or the fault description information, and feedback the smart work order filling verification prompt based on the inspection personnel ID;

[0176] The information uniqueness verification module 1306 is used to determine whether the objects specified by the faulty equipment group, the fault type and the fault description information are unique if the faulty equipment group, the fault type and the fault description information are consistent; if the object specified by any one of the faulty equipment group, the fault type and the fault description information is not unique, generate a second supplementary prompt for filling out an intelligent work order in combination with the faulty equipment group, and / or the fault type, and / or the fault description information, and feedback the second supplementary prompt for filling out an intelligent work order in combination with the inspection personnel ID.

[0177] For the intelligent work order filling device, please refer to the above definition of the method and will not be repeated here. Each module in the above device can be implemented in whole or in part by software, hardware, or a combination thereof. Each of the above modules can be embedded in or independent of the processor of the terminal device in the form of hardware, or can be stored in the memory of the terminal device in the form of software so that the processor can call and execute the operations corresponding to each of the above modules.

[0178] In one embodiment, the present invention further provides a computer-readable storage medium having a computer program stored thereon, which implements the steps of the above-mentioned intelligent work order filling method when executed by a processor.

[0179] The computer-readable storage medium may be an electronic memory such as flash memory, EEPROM (Electrically Erasable Programmable Read-Only Memory), EPROM (Erasable Programmable Read-Only Memory), a hard disk, or ROM. Optionally, the computer-readable storage medium includes a non-transitory computer-readable storage medium. The computer-readable storage medium has storage space for program code for executing any of the steps of the above-described method. This program code can be read from or written to one or more computer program products, and the program code may be compressed in a suitable form.

[0180] In one embodiment, the present invention provides a computer device including a memory and a processor, wherein the memory stores a computer program, and the processor executes the above-mentioned intelligent work order filling method when executing the computer program.

[0181] The computer device includes a memory, a processor, and one or more computer programs, wherein the one or more computer programs can be stored in the memory and configured to be executed by one or more processors, and the one or more applications are configured to execute the above-mentioned intelligent work order filling method.

[0182] A processor may include one or more processing cores. The processor utilizes various interfaces and circuits to connect the various components within the entire computer device. It executes instructions, programs, code sets, or instruction sets stored in memory, and accesses data stored in memory to perform various functions of the computer device and process data. Optionally, the processor may be implemented in the form of at least one of a digital signal processing (DSP), a field-programmable gate array (FPGA), and a programmable logic array (PLA). The processor may integrate one or a combination of a central processing unit (CPU), a graphics processing unit (GPU), and a modem. The CPU primarily processes the operating system, user interface, and application programs; the GPU is responsible for rendering and drawing display content; and the modem handles wireless communications. It is understood that the modem may not be integrated into the processor and may be implemented separately via a communications chip.

[0183] The memory may include random access memory (RAM) or read-only memory (ROM). The memory may be used to store instructions, programs, codes, code sets, or instruction sets. The memory may include a program storage area and a data storage area, wherein the program storage area may store instructions for implementing an operating system, instructions for implementing at least one function (such as a touch function, a sound playback function, an image playback function, etc.), instructions for implementing the above-mentioned various method embodiments, etc. The data storage area may also store data created by the terminal device during use, etc.

[0184] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the same. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. An intelligent work order filling method, characterized in that: include: Obtain fault reporting information sent by inspection personnel; Extract the faulty equipment unit, fault type, fault reporting time, fault description information and inspection personnel ID from the fault reporting information; If it is determined based on the faulty equipment unit that the fault report information does not belong to the scope of the laboratory equipment unit, the intelligent work order filling verification prompt is fed back in combination with the inspection personnel ID; If it is determined that the fault report information belongs to the scope of laboratory equipment groups according to the faulty equipment group, whether any one of the fault type and the fault description information is empty is determined; if any one of the fault type and the fault description information is empty, the first supplementary prompt is filled in the intelligent work order in combination with the inspection personnel ID feedback; If the faulty equipment unit, the fault type, and the fault description information are all not empty, determine whether the faulty equipment unit, the fault type, and the fault description information are consistent; if the faulty equipment unit is inconsistent with the fault type or the fault description information, generate a smart work order filling and verification prompt based on the faulty equipment unit, the fault type, and / or the fault description information, and feedback the smart work order filling and verification prompt based on the inspection personnel ID; If the faulty equipment unit, the fault type and the fault description information are consistent, determine whether the objects specified by the faulty equipment unit, the fault type and the fault description information are unique; if the object specified by any one of the faulty equipment unit, the fault type and the fault description information is not unique, generate a second supplementary prompt for filling out an intelligent work order in combination with the faulty equipment unit, and / or the fault type, and / or the fault description information, and feedback the second supplementary prompt for filling out an intelligent work order in combination with the inspection personnel ID.

2. The intelligent work order filling method according to claim 1, characterized in that: Also includes: If the faulty equipment group determines that the fault reporting information belongs to the scope of laboratory equipment groups, the faulty equipment group, the fault type and the fault description information are not empty, and the faulty equipment group, the fault type and the fault description information are consistent and the specified object is unique, an intelligent work order is generated according to the faulty equipment group, fault type, fault reporting time, fault description information and inspection personnel ID.

3. The intelligent work order filling method according to claim 1, characterized in that: The fault reporting information sent by the inspection personnel includes text fault reporting information and / or voice fault reporting information sent by the inspection personnel.

4. The intelligent work order filling method according to claim 1, characterized in that: Also includes: Retrieving historical fault information of the faulty equipment unit; Generate historical fault prompt information based on the historical fault information and send it to the inspection personnel.

5. The intelligent work order filling method according to claim 1, characterized in that: Also includes: Retrieve the associated equipment units of the faulty equipment unit; Associated equipment fault inspection information is generated according to the correlation between the associated equipment group and the faulty equipment group, and is sent to inspection personnel.

6. The intelligent work order filling method according to claim 1, characterized in that: Also includes: The smart work orders are sorted according to the impact levels of the faulty equipment units corresponding to the smart work orders, and the sorted smart work orders are sent to inspection personnel for sequential verification.

7. The intelligent work order filling method according to claim 1, characterized in that: Also includes: After the intelligent work order is generated, the engineer's feedback on the maintenance suggestions for the faulty equipment unit is obtained through various communication methods; The maintenance suggestion information is integrated according to the time series to obtain a maintenance suggestion plan for the faulty equipment unit.

8. The intelligent work order filling method according to claim 7, characterized in that: Also includes: If the maintenance suggestion plan for the faulty equipment unit lacks the fault cause or maintenance means of the faulty equipment unit, a reference maintenance suggestion plan is obtained by searching from a reference database according to the intelligent work order.

9. The intelligent work order filling method according to claim 8, characterized in that: Also includes: If the maintenance suggestion plan for the faulty equipment unit records the fault cause and maintenance method of the faulty equipment unit, searching for at least one reference fault cause and at least one reference maintenance method from a reference database according to the intelligent work order; Determine the similarity between the fault cause and a reference fault cause, and the similarity between the corresponding repair means and the reference repair means; if the similarity between the fault cause and the reference fault cause is lower than an analysis credibility threshold and / or the similarity between the repair means and the reference repair means is lower than an operation credibility threshold, change the fault cause in the repair suggestion to the reference fault cause, and change the repair means in the fault repair suggestion to the reference repair means.

10. The intelligent work order filling method according to claim 7, characterized in that: Also includes: Obtaining historical maintenance plans for the faulty equipment unit; If there are multiple recommended maintenance plans for the faulty equipment unit, the following steps are set for any recommended maintenance plan: If the similarity between the maintenance suggestion and the historical maintenance solution is greater than a first threshold, and the number of times the historical maintenance solution has a similarity greater than the first threshold with the maintenance suggestion is greater than a second threshold; Lowering the priority of the maintenance suggestion plan according to a preset weight; The maintenance suggestions with adjusted priorities are sorted and pushed to the maintenance personnel.

11. The intelligent work order filling method according to claim 8, characterized in that: Also includes: Obtaining historical maintenance plans for the faulty equipment unit; If the similarity between the maintenance suggestion plan and the historical maintenance plan is greater than a first threshold, and the frequency of the historical maintenance plan within a preset period is greater than a third threshold; A prompt message indicating that the maintenance suggestion plan is invalid is generated based on the intelligent work order and sent to the maintenance personnel.

12. An intelligent work order filling device, characterized in that: include: Fault reporting module, used to obtain fault reporting information sent by inspection personnel; An information extraction module is used to extract the faulty equipment unit, fault type, fault reporting time, fault description information and inspection personnel ID from the fault reporting information; The equipment verification module is used to, if it is determined based on the faulty equipment unit that the fault report information does not belong to the scope of laboratory equipment units, feedback the intelligent work order filling verification prompt based on the inspection personnel ID; An information vacancy verification module is used to determine whether any one of the faulty equipment group, the fault type, and the fault description information is empty if the fault report information is determined to belong to the scope of laboratory equipment groups according to the faulty equipment group; if any one of the faulty equipment group, the fault type, and the fault description information is empty, the first supplementary prompt for filling in the intelligent work order is fed back in combination with the inspection personnel ID; An information consistency verification module is used to determine whether the faulty equipment unit, the fault type, and the fault description information are consistent if none of them are empty; if the faulty equipment unit is inconsistent with the fault type or the fault description information, generate a smart work order filling verification prompt based on the faulty equipment unit, the fault type, and / or the fault description information, and feedback the smart work order filling verification prompt based on the inspection personnel ID; An information uniqueness verification module is used to determine whether the objects specified by the faulty equipment group, the fault type and the fault description information are unique if the faulty equipment group, the fault type and the fault description information are consistent; if the object specified by any one of the faulty equipment group, the fault type and the fault description information is not unique, a second supplementary prompt for filling out an intelligent work order is generated in combination with the faulty equipment group, and / or the fault type, and / or the fault description information, and the second supplementary prompt for filling out the intelligent work order is fed back in combination with the inspection personnel ID.

13. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the steps of the intelligent work order filling method according to any one of claims 1 to 11 are implemented.

14. A computer device comprising a memory and a processor, wherein the memory stores a computer program, wherein: When the processor executes the computer program, it executes any one of the intelligent work order filling methods in claims 1-11.

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