Magnetic suspension molecular pump test tool

By designing a magnetic levitation molecular pump test fixture, the problems of inaccurate test results, easy damage to equipment and safety hazards were solved, the stability and safety of the test environment were achieved, and the accuracy of the test results and personnel safety were ensured.

CN120701600APending Publication Date: 2025-09-26北京中科九微科技有限公司 +1
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Patent Information

Application Number
CN202511056133.5
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-07-30
Publication Date
2025-09-26

AI Technical Summary

Technical Problem

Existing magnetic levitation molecular pump testing methods have problems such as inaccurate test results, easy damage to equipment, and safety hazards, especially in disordered field environments, and are unable to monitor and handle abnormal situations in a timely manner.

Method used

A magnetic levitation molecular pump test fixture was designed, which included a fixture base and a protective device. The test platform was fixed by a detachable connection structure, and a guide rail mechanism was used to enable the test platform or the protective device to slide. A protective cover structure was set to protect the equipment and ensure the stability and safety of the test environment.

Benefits of technology

It effectively avoids equipment collision and dust interference, ensures the accuracy of test results, prevents equipment damage, improves the safety of the test environment, allows real-time monitoring and maintenance, and avoids hazards caused by "pump explosion".

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention discloses a magnetic suspension molecular pump test tool, and the tool comprises a tool pedestal which is provided with a test platform, the test platform is used for fixing a to-be-tested molecular pump, and the test platform is fixedly connected with the tool pedestal through a detachable connection structure; and the protection device is arranged on the tool base, and the test platform is located in the protection device. Wherein the top of the tool base is provided with a guide slide rail mechanism, and at least one of the test platform and the protection device is slidably arranged on the guide slide rail mechanism, so that the test platform can be located on the outer side of the protection device through the movement of the guide slide rail mechanism. The magnetic suspension molecular pump testing tool can ensure the stability of a testing environment and improve the personal safety of testing personnel.
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Description

Technical Field

[0001] The embodiments of the present invention relate to the technical field of magnetic levitation molecular pump testing, and more specifically, to a magnetic levitation molecular pump testing tool. Background Art

[0002] Before being put into use, magnetic levitation molecular pumps need to undergo a long-term operation test. This testing process is crucial because it not only verifies the stability and reliability of the equipment, but also promptly identifies and resolves potential problems, ensuring the safety and efficiency of the equipment in actual operation.

[0003] During long-term testing, the magnetic levitation molecular pump needs to be placed upright and fixed at the test location. This placement helps simulate the device's actual operating environment, allowing for a more accurate performance assessment. However, existing testing methods have some shortcomings. For example, the magnetic levitation molecular pump during long-term testing is often disturbed by the chaotic on-site environment. The test site may be bustling with people, and the equipment is susceptible to collisions and vibrations, which not only affects the accuracy of test results but can also cause damage to the equipment. Furthermore, in extreme situations (such as magnetic levitation failure or airflow impact), the magnetic levitation molecular pump poses a risk of "pump explosion," which is extremely dangerous and can cause serious harm to nearby personnel and equipment. Therefore, to ensure the safety of test personnel, the magnetic levitation molecular pump should be completely isolated from the test personnel during operation. However, this isolation measure also brings new problems: the on-site test environment cannot be maintained in a timely and effective manner, making it difficult for test personnel to monitor and observe the site in real time. If an equipment abnormality occurs, it may not be detected and addressed in a timely manner, resulting in test interruption or data loss. Summary of the Invention

[0004] In order to solve one or more of the technical problems mentioned above, the present invention provides a magnetic levitation molecular pump test fixture to ensure the stability of the test environment and improve the personal safety of testers.

[0005] The present invention provides a magnetic levitation molecular pump test fixture. The magnetic levitation molecular pump test fixture comprises: a fixture base, on which is disposed a test platform for securing a molecular pump to be tested, the test platform being fixedly connected to the fixture base via a detachable connection structure; and a protective device disposed on the fixture base, with the test platform located within the protective device. A guide rail mechanism is disposed on the top of the fixture base, and at least one of the test platform and the protective device is slidably disposed on the guide rail mechanism, such that the test platform can be positioned outside the protective device by movement of the guide rail mechanism.

[0006] In some embodiments, the protective device is fixedly connected to the tooling base, and the bottom of the test platform is provided with a slider assembly that slidably cooperates with the guide rail mechanism.

[0007] In some embodiments, the test platform is provided with connection holes that match the fixing holes of the molecular pump to be tested and fixing holes that are fixedly connected to the tooling base, and both the connection holes and the fixing holes are used for passing bolts.

[0008] In some embodiments, a placement groove is further formed on the test platform, and the placement groove is used to place the molecular pump to be tested.

[0009] In some embodiments, the test platform is fixedly connected to the tooling base, and the protective device is constructed as a protective cover structure with an open bottom and openable and closable side walls. A slider assembly that slides with the guide rail mechanism is provided at the bottom of the protective cover structure.

[0010] In some embodiments, the bottom of the protective device is provided with a fixing hole that is fixedly connected to the tooling base, and the fixing hole is used for the passing connection of bolts.

[0011] In some embodiments, the protective device includes a cover frame, a top plate is provided on the top of the cover frame, and a plurality of side plates are provided on the side of the cover frame, and the top plate and the side plates are hinged to the cover frame.

[0012] In some embodiments, a notch is formed at the bottom of at least one of the side panels, and the notch is used for accessing vacuum tubes, power lines, and signal lines.

[0013] In some embodiments, the tooling base is constructed as a welded frame, a bottom of the tooling base is provided with positionable casters, and a series structure is provided on opposite sides of the tooling base.

[0014] In some embodiments, the series structure includes a transverse slot and a transverse plug-in plate that is plugged into the slot of the transverse slot. The transverse plug-in plate and the transverse slot are respectively arranged on opposite sides of the tooling base. The transverse plug-in plate and the transverse slot are formed with longitudinal holes, which are used to insert the connecting parts.

[0015] The magnetic levitation molecular pump test fixture provided above, by providing protective devices, can, on the one hand, effectively prevent the magnetic levitation molecular pump from being hit by collisions during long-term testing due to the disorder of the on-site environment, or from being disturbed by dust and debris in the test environment, thereby effectively ensuring the accuracy of the test results and avoiding damage to the equipment. On the other hand, the protective devices can prevent the occurrence of hazards to test personnel due to "pump explosion", thereby making the test environment safer, so that test personnel can perform monitoring and maintenance work. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The above and other objects, features and advantages of the exemplary embodiments of the present invention will become readily understood by reading the following detailed description with reference to the accompanying drawings. In the accompanying drawings, several embodiments of the present invention are shown in an illustrative and non-limiting manner, and the same or corresponding reference numerals represent the same or corresponding parts, wherein:

[0017] Figure 1 This is an exemplary application scenario of the magnetic levitation molecular pump test fixture according to an embodiment of the present invention, wherein the molecular pump is located in a test position;

[0018] Figure 2 This is an exemplary application scenario of the magnetic levitation molecular pump test fixture according to an embodiment of the present invention, wherein the molecular pump is located at the installation position;

[0019] Figure 3 for Figure 2 A schematic top view of the magnetic levitation molecular pump test fixture shown, excluding the protective device;

[0020] Figure 4 A schematic top view of a tool base of a magnetic levitation molecular pump test tool according to an embodiment of the present invention;

[0021] Figure 5 for Figure 1 The right side structural diagram of the magnetic levitation molecular pump test fixture is shown. DETAILED DESCRIPTION

[0022] The following will be combined with the accompanying drawings in the embodiments of the present disclosure to clearly and completely describe the technical solutions in the embodiments of the present disclosure. Obviously, the embodiments described are part of the embodiments of the present disclosure, not all of them. Based on the embodiments of the present disclosure, all other embodiments obtained by those skilled in the art without making any creative efforts shall fall within the scope of protection of the present disclosure.

[0023] Figure 1 The application scenario of the magnetic levitation molecular pump test fixture 100 according to an embodiment of the present invention is shown, wherein the molecular pump 200 is located at a test position. Figure 2 FIG. 1 shows an application scenario of the magnetic levitation molecular pump test fixture 100 according to an embodiment of the present invention, wherein the molecular pump 200 is located at the installation position. Figure 1 and Figure 2 As shown, combined with Figure 3The magnetic levitation molecular pump test fixture 100 comprises: a fixture base 1, on which is mounted a test platform 2 for securing the molecular pump 200 to be tested. The test platform 2 is fixedly connected to the fixture base 1 via a detachable connection structure; and a protective device 3, which is mounted on the fixture base 1, with the test platform 2 positioned within the protective device 3. A guide rail mechanism 4 is mounted on the top of the fixture base 1, and either the test platform 2 or the protective device 3 is slidably mounted on the guide rail mechanism 4, allowing the test platform 2 to be positioned outside the protective device 3 as the guide rail mechanism 4 moves.

[0024] When the magnetic levitation molecular pump test fixture 100 according to an embodiment of the present invention is used, the guide rail mechanism 4 is provided to move the test platform 2 or the protective device 3, or both in opposite directions, so that the test platform 2 is located outside the protective device 3. Using a lifting device, the molecular pump 200 to be tested is placed and fixed on the test platform 2, and the relevant test units (such as vacuum tubes, power cables, and signal cables) are connected. After the installation is completed, the test platform 2 is moved to the inside of the protective device 3, and the test platform 2 and the fixture base 1 are fixed by connecting structures (such as bolts) in preparation for testing.

[0025] Through the above-mentioned configuration, the magnetic levitation molecular pump test fixture 100 of the embodiment of the present invention is provided with a protective device 3. On the one hand, it can effectively prevent the magnetic levitation molecular pump 200 from being hit by collisions due to the disorder of the on-site environment during long-term testing, or from being disturbed by dust and debris in the test environment, thereby effectively ensuring the accuracy of the test results and avoiding damage to the equipment. On the other hand, the protective device 3 can prevent the occurrence of hazards to test personnel due to "pump explosion", thereby making the test environment safer, so that test personnel can perform monitoring and maintenance tasks.

[0026] In the present application, one of the test platform 2 and the protective device 3 can be slidably arranged on the guide rail mechanism 4, which can be understood as the protective device 3 being fixed and the test platform 2 being movable (such as Figure 1 and Figure 2 or, the test platform 2 is fixed and the protection device 3 is movable; or, the test platform 2 and the protection device 3 are synchronous and relatively movable. In the present application, the test platform 2 can be constructed as a mounting plate.

[0027] Please continue to refer to Figure 1 and Figure 2 As shown, in some embodiments, the protective device 3 can be fixedly connected to the tooling base 1, and the bottom of the test platform 2 is provided with a slider assembly that slidably cooperates with the guide rail mechanism 4.

[0028] In this embodiment, the test platform 2 is a movable component and the protective device 3 is a fixed component. In actual use, the test platform 2 is first moved to the outside of the protective device 3 to facilitate the installation of the molecular pump 200 to be tested. After installation is completed, the entire test platform 2 is moved into the interior of the protective device 3.

[0029] It is understandable that in order to enable the test platform 2 to move from inside the protection device 3 to the outside, the protection device 3 should have a channel through which the test platform 2 and the molecular pump 200 can pass.

[0030] Please refer to Figure 4 In some embodiments, the test platform 2 is provided with a connection hole 21 that matches the fixing hole of the molecular pump 200 to be tested and a fixing hole 22 that is fixedly connected to the tooling base 1. The connection hole 21 and the fixing hole 22 are both used for the passage of bolts.

[0031] In the present application, the connection hole 21 can be constructed as a square hole or an oblong hole. After the molecular pump 200 to be tested is placed on the test platform 2, the position of the fixing hole of the molecular pump 200 is adjusted to make the fixing hole correspond to the connection hole 21. Bolts are used to pass through the bottom of the test platform 2 and fix the molecular pump 200 and the test platform 2. After the molecular pump 200 is installed on the test platform 2, it is moved to the inside of the protective device 3, and then the test platform 2 is fixedly connected to the tooling base 1 through the fixing hole 22 using bolts, so that the molecular pump 200 is in a fixed state during the test process.

[0032] Please continue to refer to Figure 4 In some embodiments, a placement groove 23 may be formed on the test platform 2 , and the placement groove 23 is used to place the molecular pump 200 to be tested.

[0033] In the present application, the placement groove 23 can be used to quickly place the molecular pump 200, so as to facilitate the quick alignment of the fixing hole of the molecular pump 200 with the connection hole 21, thereby improving the installation efficiency of the molecular pump 200. In addition, the depth of the placement groove 23 can also limit the molecular pump 200 to a certain extent, thereby further preventing the molecular pump 200 from being accidentally touched or tipped over by other external forces.

[0034] In some embodiments, the test platform 2 is fixedly connected to the tooling base 1, and the protective device 3 is constructed as a protective cover structure with an open bottom and openable and closable side walls. A slider assembly that slides with the guide rail mechanism 4 is provided at the bottom of the protective cover structure.

[0035] In this embodiment, the protective device 3 is movable, while the test platform 2 is fixed. In actual use, the protective device 3 is first moved to the outside of the test platform 2 to facilitate the installation of the molecular pump 200 to be tested. After installation is complete, the protective device 3 is moved back to a position that covers the test platform 2.

[0036] In some embodiments, the bottom of the protective device 3 is provided with a fixing hole that is fixedly connected to the tooling base 1, and the fixing hole is used for the penetration connection of bolts.

[0037] In the present application, after the protective device 3 is moved to a position covering the test platform 2 , the protective device 3 is fixedly connected to the tooling base 1 using bolts, thereby ensuring that the molecular pump 200 is in a fixed state during the test process.

[0038] In other preferred embodiments, the protection device 3 is movable, and the test platform 2 is also movable.

[0039] In the present application, the guide rail mechanism 4 may be a double rail group, one group connected to the protective device 3 and the other group connected to the test platform 2, so that both the protective device 3 and the test platform 2 can move.

[0040] Please refer to Figure 5 In some embodiments, the protective device 3 may include a cover frame, a top plate 31 is provided on the top of the cover frame, and a plurality of side plates 32 are provided on the side of the cover frame, and the top plate 31 and the side plates 32 are hinged to the cover frame.

[0041] In this application, the top panel 31 and side panels 32 are connected to the housing frame via hinges, allowing them to be opened and closed as needed to facilitate setting up and observing the molecular pump test environment. Furthermore, the top panel 31 and side panels 32 may be provided with handles for gripping. Furthermore, the top panel 31 and side panels 32 may be fixedly connected to the housing frame via bolts.

[0042] Please continue to refer to Figure 5 In some embodiments, a notch 33 is formed at the bottom of at least one of the side panels 32 , and the notch 33 is used for accessing vacuum tubes, power lines, and signal lines.

[0043] In the present application, a notch 33 can be reserved at the lower portion of the side panel 32 at the rear side to facilitate access to vacuum tubes, power lines, and signal lines required for the test environment. At the same time, the rear access will not clutter the test environment.

[0044] In some embodiments, the top plate 31 and the side plates 32 may be configured as transparent plates, such as acrylic plates or tempered glass, so that the internal test environment can be observed after the protective device 3 is closed.

[0045] Please continue to refer to Figure 5 In some embodiments, the tooling base 1 may be constructed as a welded frame, with positionable casters 11 provided at the bottom of the tooling base 1 and serial structures 12 provided on opposite sides of the tooling base 1 .

[0046] Through the above arrangement, the series structure 12 can connect multiple tool bases 1 so that multiple magnetic levitation molecular pump test tools 100 are connected in series, thereby effectively increasing the stability of the magnetic levitation molecular pump test tools 100 .

[0047] Please continue to refer to Figure 5 In some embodiments, the serial structure 12 includes a transverse slot 121 and a transverse plug plate 122 that is plugged into the notch of the transverse slot 121. The transverse plug plate 122 and the transverse slot 121 are respectively arranged on opposite sides of the tooling base 1. The transverse plug plate 122 and the transverse slot 121 are formed with longitudinal holes, which are used to insert the connecting piece 123.

[0048] In the present application, the transverse slot 121 can be composed of two parallel transverse inserting plates 122. The transverse inserting plate 122 is located between the two transverse inserting plates 122 of the transverse slot 121. With the above arrangement, the disassembly and assembly of the transverse inserting plates 122 and the transverse slot 121 is more convenient.

[0049] In the above description of this application, unless otherwise expressly specified or limited, terms such as "fixed," "mounted," "connected," or "connected" should be understood in a broad sense. For example, with respect to the term "connected," it can mean a fixed connection, a detachable connection, or an integral connection; it can mean a mechanical connection or an electrical connection; it can mean a direct connection or an indirect connection through an intermediate medium; it can mean internal communication between two elements or an interaction between two elements. Therefore, unless otherwise expressly specified in this application, those skilled in the art can understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0050] According to the above description of the present application, those skilled in the art may also understand that the terms used below, such as "up", "down", "front", "back", "left", "right", "length", "width", "thickness", "vertical", "horizontal", "top", "bottom", "inside", "outside", "axial", "radial", "circumferential", "center", "longitudinal", "lateral", "clockwise" or "counterclockwise", etc., which indicate orientation or positional relationships, are based on the orientation or positional relationships shown in the drawings of the present application, and are only for the purpose of facilitating the explanation of the scheme of the present invention and simplifying the description, rather than explicitly or implicitly indicating that the devices or elements involved must have the specific orientation, be constructed and operated in a specific orientation. Therefore, the above-mentioned orientation or positional relationship terms cannot be understood or interpreted as limitations on the scheme of the present invention.

[0051] In addition, the terms "first" or "second" used in this application to refer to numbers or ordinal numbers are used for descriptive purposes only and should not be understood as explicitly or implicitly indicating relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of this application, the meaning of "plurality" is at least two, such as two, three or more, etc., unless otherwise clearly and specifically defined.

[0052] Although a number of embodiments of the present invention have been shown and described herein, it will be apparent to those skilled in the art that such embodiments are provided by way of example only. Those skilled in the art may devise numerous modifications, variations, and alternatives without departing from the concept and spirit of the present invention. It should be understood that in practicing the present invention, various alternatives to the embodiments of the present invention described herein may be employed. The appended claims are intended to define the scope of the present invention and therefore cover equivalents or alternatives within the scope of these claims.

Claims

1. A magnetic levitation molecular pump test tool, characterized in that: include: A tooling base, on which a test platform is provided, the test platform is used to fix the molecular pump to be tested, and the test platform is fixedly connected to the tooling base via a detachable connection structure; and, A protective device, which is provided on the tooling base, and the test platform is located inside the protective device; A guide rail mechanism is provided on the top of the tooling base, and at least one of the test platform and the protective device can be slidably provided on the guide rail mechanism so that the test platform can be located outside the protective device through the movement of the guide rail mechanism.

2. The magnetic levitation molecular pump test fixture according to claim 1, characterized in that: The protective device is fixedly connected to the tooling base, and a slider assembly that is slidably matched with the guide rail mechanism is provided at the bottom of the test platform.

3. The magnetic levitation molecular pump test tool according to claim 2, characterized in that: The test platform is provided with a connection hole matched with the fixing hole of the molecular pump to be tested and a fixing hole fixedly connected to the tooling base, and both the connection hole and the fixing hole are used for passing bolts.

4. The magnetic levitation molecular pump test tool according to claim 2 or 3, characterized in that: A placement groove is also formed on the test platform, and the placement groove is used to place the molecular pump to be tested.

5. The magnetic levitation molecular pump testing tool according to claim 1, characterized in that: The test platform is fixedly connected to the tooling base, and the protective device is constructed as a protective cover structure with an open bottom and openable and closable side walls. A slider assembly that slides with the guide rail mechanism is provided at the bottom of the protective cover structure.

6. The magnetic levitation molecular pump test tool according to claim 5, characterized in that: The bottom of the protective device is provided with a fixing hole position fixedly connected to the tooling base, and the fixing hole position is used for the passing connection of bolts.

7. The magnetic levitation molecular pump testing tool according to claim 5, characterized in that: The protective device comprises a cover frame, a top plate is provided on the top of the cover frame, a plurality of side plates are provided on the side of the cover frame, and the top plate and the side plates are hinged to the cover frame.

8. The magnetic levitation molecular pump testing tool according to claim 7, characterized in that: A notch is formed at the bottom of at least one of the side panels, and the notch is used for accessing a vacuum tube, a power line, and a signal line.

9. The magnetic levitation molecular pump testing tool according to claim 1, characterized in that: The tooling base is constructed as a welded frame. Positionable casters are provided at the bottom of the tooling base. Series structures are provided on opposite sides of the tooling base.

10. The magnetic levitation molecular pump testing tool according to claim 9, characterized in that: The serial structure includes a transverse slot and a transverse plug-in plate that is plugged into the notch of the transverse slot. The transverse plug-in plate and the transverse slot are respectively arranged on opposite sides of the tooling base. The transverse plug-in plate and the transverse slot are formed with longitudinal plug-in holes, and the longitudinal plug-in holes are used to insert connecting parts.