Ruler grating, grating ruler, and method for manufacturing a ruler grating

Abstract

The application provides a ruler grating, a grating ruler and a preparation method of the ruler grating. The ruler grating comprises light modulation units and light shielding units which are periodically and alternately arranged along a preset direction; wherein the light modulation units are dynamically configured with optical states by external signals to adjust the grating pitch of the ruler grating. The optical states of the light modulation units are dynamically configured to adjust the grating pitch of the ruler grating, so that the measurement accuracy is adjustable.

Description

Technical Field

[0001] This application relates to the field of position measurement, and in particular to a scale grating, a grating ruler, and a method for preparing the scale grating. Background Technology

[0002] In the field of precision machining, precision displacement (angle) sensors are an indispensable and important component, often referred to as the ruler of intelligent manufacturing. Their accuracy directly determines the leading position of the processing and manufacturing process.

[0003] A grid-type measuring device is a precision sensor that can accurately calibrate displacement (or rotation angle) and is widely used in the precision manufacturing industry.

[0004] However, current optical scales and gratings cannot guarantee the simultaneous needs of precise and rough measurement in the manufacturing process. Summary of the Invention

[0005] The main technical problem addressed by this application is to provide a scale grating, a grating ruler, and a method for fabricating the scale grating, thereby solving the problem that existing optical scale gratings cannot guarantee both precise and rough measurement requirements during the manufacturing process.

[0006] To solve the above-mentioned technical problems, the first technical solution provided in this application is: to provide a scale grating, which includes light modulation units and light blocking units arranged periodically and alternately along a preset direction;

[0007] The optical modulation unit dynamically configures the optical state through external signals to adjust the grating pitch of the scale grating.

[0008] The optical modulation unit includes a first electrode, a functional layer, and a second electrode stacked sequentially. The first electrode is connected to a first voltage, and the second electrode is connected to a second voltage. The optical state of the optical modulation unit is dynamically configured by controlling the first voltage and the second voltage. The optical modulation unit is configured to be independently controlled.

[0009] The functional layer is a light-emitting layer, and its optical states include a light-emitting state and a light-blocking state; at least one of the first electrode and the second electrode is a light-transmitting layer.

[0010] or,

[0011] The functional layer is a polarizing layer, and its optical states include a light-transmitting state and a light-blocking state; both the first electrode and the second electrode are light-transmitting layers.

[0012] The scale grating further includes a first substrate and a second substrate disposed opposite to each other; a light modulation unit is disposed between the first substrate and the second substrate, and a light-shielding unit is located between the first substrate and the second substrate; at least one of the first substrate and the second substrate is a light-transmitting layer.

[0013] In the preset direction, the width of the light modulation unit is greater than the width of the light blocking unit.

[0014] During the measurement process, the scale grating exhibits alternating bright and dark areas along a preset direction;

[0015] The light modulation units and light blocking units arranged periodically and alternately along a preset direction are divided into multiple continuously arranged basic units. Each basic unit includes an adjacent light modulation unit and a light blocking unit. In the preset direction, the width of the basic unit is equal to the length.

[0016] The grating pitch of the scale grating is n times the length of the equal division; each bright area includes n consecutively arranged basic units, and each dark area includes n consecutively arranged basic units; n is an integer greater than 0; the light modulation units in the bright area are configured to be in a light-transmitting state or a light-emitting state; the light modulation units in the dark area are configured to be in a light-blocking state.

[0017] To solve the above-mentioned technical problems, the second technical solution provided in this application is: to provide a grating ruler, wherein it includes:

[0018] The scale grating is the scale grating described above;

[0019] The counter, relative to the scale grating, is used to read the optical signal on the scale grating and output the displacement data.

[0020] The functional layer of the scale grating is the light-emitting layer, and the light modulation unit of the scale grating is dynamically configured to be in a light-emitting state or a light-blocking state; the counter includes a reading head, which is located on one side of the working surface of the scale grating.

[0021] or,

[0022] The functional layer of the scale grating is a polarizing layer, and the light modulation unit of the scale grating is dynamically configured to be in a light-transmitting state or a light-blocking state. The counter includes a reading head and a light source. The reading head is set on one side of the working surface of the scale grating, and the light source is set on one side of the back surface of the scale grating, with the back surface opposite to the working surface.

[0023] To solve the above-mentioned technical problems, the third technical solution provided in this application is: a method for fabricating a scale grating, wherein the method for fabricating the scale grating includes:

[0024] An optical modulation unit is fabricated, and the optical modulation units are spaced apart.

[0025] A light-shielding unit is fabricated on the side of the light modulation unit.

[0026] To address the aforementioned technical problems, the fourth technical solution provided in this application is: a method for fabricating a scale grating, wherein the method for fabricating the aforementioned scale grating includes:

[0027] A first electrode and a first light-shielding layer are sequentially fabricated on a first substrate; the first light-shielding layer is located on the side of the first electrode.

[0028] A second electrode and a second light-shielding layer are sequentially fabricated on a second substrate; the second light-shielding layer is located on the side of the second electrode.

[0029] A functional layer is prepared on the surface of the first electrode or the second electrode;

[0030] The first substrate and the second substrate are aligned and arranged so that the first electrode, the functional layer and the second electrode are stacked in sequence to form an optical modulation unit, and the first light-shielding layer and the second light-shielding layer are bonded together to form a light-shielding unit.

[0031] The beneficial effects of this application are as follows: Unlike existing technologies, this application provides a scale grating, a grating ruler, and a method for fabricating the scale grating. The scale grating includes light modulation units and light-blocking units arranged periodically and alternately along a preset direction. The light modulation units dynamically configure their optical states via external signals to adjust the grating pitch of the scale grating. By dynamically configuring the optical states of the light modulation units to adjust the grating pitch of the scale grating, adjustable measurement accuracy is achieved. Attached Figure Description

[0032] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without any creative effort.

[0033] Figure 1 This is a three-dimensional structural diagram of the grating ruler provided in this application;

[0034] Figure 2 This is a three-dimensional structural schematic diagram of the scale grating provided in this application;

[0035] Figure 3 This is a schematic diagram of the structure of an embodiment of the scale grating provided in this application;

[0036] Figure 4 This is a schematic diagram of the structural state of the scale grating provided in this application;

[0037] Figure 5 This is a schematic diagram of another structural state of the scale grating provided in this application;

[0038] Figure 6 This is a schematic diagram of the structure of an embodiment of the grating ruler provided in this application;

[0039] Figure 7This is a schematic diagram of another embodiment of the grating ruler provided in this application;

[0040] Figure 8 This is a schematic flowchart of one embodiment of the method for fabricating the scale grating provided in this application;

[0041] Figure 9 yes Figure 8 A flowchart of one embodiment corresponding to step S11;

[0042] Figure 10 yes Figure 9 Schematic diagram of the structure corresponding to steps S111-S113 in the middle section;

[0043] Figure 11 yes Figure 8 A schematic diagram of the structure corresponding to steps S12 and S13 in the middle section;

[0044] Figure 12 This is a schematic flowchart of another embodiment of the method for fabricating the scale grating provided in this application;

[0045] Figure 13 yes Figure 12 The flowchart corresponding to step S21 is shown below;

[0046] Figure 14 yes Figure 13 A schematic diagram of the structure corresponding to steps S211 and S212;

[0047] Figure 15 yes Figure 12 The flowchart corresponding to step S22 is shown below;

[0048] Figure 16 yes Figure 15 A schematic diagram of the structure corresponding to steps S221 and S222;

[0049] Figure 17 yes Figure 12 A schematic diagram of the structure corresponding to steps S23 and S24.

[0050] Explanation of icon numbers:

[0051] 1. Scale grating; 101. Working surface; 102. Back surface; 103. Dark area; 104. Bright area; 10. Light modulation unit; 11. First electrode; 111. First lead; 12. Second electrode; 121. Second lead; 13. Functional layer; 20. Light-shielding unit; 201. First light-shielding layer; 202. Second light-shielding layer; 30. First substrate; 40. Second substrate; 50. Basic unit; 2. Counter; 21. Reading head; 22. Light source; 100. Grating scale; P. Grating pitch; L. Equal division length; x1. First width; x2. Second width. Detailed Implementation

[0052] The embodiments of this application will now be described in detail with reference to the accompanying drawings.

[0053] In the following description, specific details such as particular system architectures, interfaces, and technologies are presented for illustrative purposes rather than for limiting purposes, in order to provide a thorough understanding of this application.

[0054] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0055] The terms "first," "second," and "third" in this application are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first," "second," or "third" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified. All directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of this application are only used to explain the relative positional relationships and movements between components in a specific orientation (as shown in the figures). If the specific orientation changes, the directional indications also change accordingly. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or device that includes a series of steps or units is not limited to the listed steps or units, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to these processes, methods, products, or devices.

[0056] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0057] Please see Figure 1 and Figure 2 , Figure 1 This is a three-dimensional structural diagram of the grating ruler provided in this application. Figure 2 This is a three-dimensional structural diagram of the scale grating provided in this application.

[0058] Generally, a set of grating rulers consists of two parts: a scale grating and a counter, such as... Figure 1 As shown, the scale grating is engraved with equal physical quantities L, which is called an equally divided scale. Traditional high-precision mechanical scales use equally spaced contrast substrates. The scale grating includes alternating bright and dark substrates, with the width of the bright substrate being L2 and the width of the dark substrate being L1, where L = L1 + L2. When the scale grating moves or rotates with the mechanical device, the number of times the equal physical quantity L repeats, N, is captured by a counter, thus calculating the displacement X = L * N. However, in current equally divided scale gratings, the equal components L are fixed values.

[0059] When precise measurement of the moving distance is required, the scale grating advances in minimum gradient steps, and the counter collects the number of repetitions N to complete the moving distance measurement X. When coarse measurement of the moving distance is required, the measurement time increases due to the high precision of L.

[0060] Please see Figures 3 to 5 , Figure 3 This is a schematic diagram of the structure of an embodiment of the scale grating provided in this application. Figure 4 This is a schematic diagram of the structural state of the scale grating provided in this application. Figure 5 This is a schematic diagram of another structural state of the scale grating provided in this application.

[0061] To address the aforementioned technical problems, this application provides a scale grating 1. The scale grating 1 includes light modulation units 10 and light blocking units 20 arranged periodically and alternately along a preset direction; wherein, the light modulation units 10 dynamically configure the optical state through external signals to adjust the grating pitch P of the scale grating 1.

[0062] By dynamically configuring the optical state of the optical modulation unit 10, the grating pitch P of the scale grating 1 can be adjusted, thereby achieving adjustable measurement accuracy.

[0063] For example, the preset direction is the relative displacement direction of the scale grating 1 along a straight line.

[0064] The grating pitch P determines the original resolution of the scale grating 1, and is the smallest reference unit for measuring displacement. Scale grating 1 and counter 2 (see...) Figure 6 During relative displacement, the number of times the grid pitch P recurs is captured by counter 2, thus calculating the displacement as the grid pitch P multiplied by the number of times it occurs, i.e., X = P * N. N represents the number of times the grid pitch P recurs, and X represents the displacement.

[0065] The light-blocking unit 20 is used to block or shield light.

[0066] In some embodiments, the optical modulation unit 10 includes a first electrode 11, a functional layer 13, and a second electrode 12 stacked sequentially; the first electrode 11 is externally connected to a first voltage, and the second electrode 12 is externally connected to a second voltage, and the optical state of the optical modulation unit 10 is dynamically configured by controlling the first voltage and the second voltage; the optical modulation unit 10 is configured to be independently controlled.

[0067] The optical modulation unit 10 dynamically modulates the optical properties of the functional layer 13 by the voltage difference between the first electrode 11 and the second electrode 12, so as to change its optical state.

[0068] Each optical modulation unit 10 can be controlled independently, so that the optical states between the optical modulation units 10 can be differentiated, thereby enabling the grating pitch P of the scale grating 1 to be adjustable.

[0069] In some embodiments, the functional layer 13 is a light-emitting layer, and the optical state includes a light-emitting state and a light-blocking state; at least one of the first electrode 11 and the second electrode 12 is a light-transmitting layer.

[0070] For example, by adjusting the voltage difference between the first electrode 11 and the second electrode 12, in response to a voltage difference greater than or equal to a preset voltage, the functional layer 13 emits light, and the light modulation unit 10 is in an emitting state; in response to a voltage difference less than the preset voltage, the functional layer 13 does not emit light, and the light modulation unit 10 is in a light-shielding state. That is, by adjusting the voltage difference between the first electrode 11 and the second electrode 12, the light modulation unit 10 can switch between an emitting state and a light-shielding state.

[0071] The preset voltage is related to functional layer 13. There are no restrictions on the preset voltage here; it can be selected according to actual needs.

[0072] The scale grating 1 has a working surface 101. The working surface 101 is the surface on the scale grating 1 that directly participates in the modulation of optical signals.

[0073] The electrode in the first electrode 11 and the second electrode 12 located on the side of the functional layer 13 facing the working surface 101 is a light-transmitting layer, so as to ensure that the light emitted by the functional layer 13 can penetrate the working surface 101.

[0074] For example, the second electrode 12 is a light-transmitting layer. The second electrode 12 is located on the side of the functional layer 13 facing the working surface 101.

[0075] There are no restrictions on the material of the light-emitting layer here; it can be selected according to the requirements.

[0076] In other embodiments, the functional layer 13 is a polarizing layer, and the optical states include a light-transmitting state and a light-blocking state; the first electrode 11 and the second electrode 12 are both light-transmitting layers.

[0077] By adjusting the voltage difference between the first electrode 11 and the second electrode 12, the polarization angle of the light irradiated onto the functional layer 13 is changed, thereby enabling the light modulation unit 10 to switch between a light-transmitting state and a light-blocking state.

[0078] Both the first electrode 11 and the second electrode 12 are light-transmitting layers to ensure that the incident light can be emitted from the working surface 101 through the light modulation unit 10.

[0079] In some embodiments, the scale grating 1 further includes a first substrate 30 and a second substrate 40 disposed opposite to each other; a light modulation unit 10 is disposed between the first substrate 30 and the second substrate 40, and a light-shielding unit 20 is located between the first substrate 30 and the second substrate 40; at least one of the first substrate 30 and the second substrate 40 is a light-transmitting layer.

[0080] For example, the functional layer 13 is a light-emitting layer, and the substrate of the first substrate 30 and the second substrate 40 located on the side of the functional layer 13 facing the working surface 101 is a light-transmitting layer.

[0081] For example, the functional layer 13 is a polarizing layer, and the first substrate 30 and the second substrate 40 are both light-transmitting layers.

[0082] In some embodiments, the width of the light modulation unit 10 is greater than the width of the light blocking unit 20 in a preset direction.

[0083] In a preset direction, the width of each light modulation unit 10 is equal, and the width of each light blocking unit 20 is equal. In the preset direction, the width of each light modulation unit 10 is a first width x1, and the width of the light blocking unit 20 is x2.

[0084] In a predetermined direction, the width of the light modulation unit 10 is much larger than the width of the light blocking unit 20. By limiting the width of the light modulation unit 10, the micro-arrangement (the distribution of the light blocking unit 20 and the light modulation unit 10) achieves a macroscopic optical effect.

[0085] The macroscopic optical effect is that sparse light-blocking units 20 are submerged in a bright background. Dense light-blocking units 20 form continuous dark areas. That is, when the proportion of light-blocking units 20 is low, the macroscopic appearance is bright; when the proportion of light-blocking units 20 is high, the macroscopic appearance is dark. For example, when the light modulation units 10 on both sides of a light-blocking unit 20 are in a non-light-blocking state (transparent or emitting state), the area where the light-blocking unit 20 and the light modulation units 10 on both sides are located appears as a bright area macroscopically (see...). Figure 5 ).

[0086] By controlling the shading or unshading state of each light modulation unit 10, the macroscopic brightness and darkness distribution is achieved, thereby adjusting the grating pitch P of the scale grating 1.

[0087] The non-shielding state of the light modulation unit 10 refers to the light-transmitting state or the light-emitting state.

[0088] In some embodiments, during the measurement process, the scale grating 1 presents bright areas 104 and dark areas 103 arranged alternately along a preset direction; the light modulation units 10 and light blocking units 20 arranged periodically and alternately along the preset direction are divided into a plurality of continuously arranged basic units 50, each basic unit 50 including an adjacent light modulation unit 10 and a light blocking unit 20; in the preset direction, the width of the basic unit 50 is equal to the length L; in response to the pitch of the scale grating 1 being n times the length L; each bright area 104 includes n continuously arranged basic units 50, and each dark area 103 includes n continuously arranged basic units 50; n is an integer greater than 0; the light modulation units 10 in the bright area 104 are configured to be in a light-transmitting state or a light-emitting state; the light modulation units 10 in the dark area 103 are configured to be in a light-blocking state.

[0089] Bright area 104 refers to the area that appears bright on a macroscopic scale, while dark area 103 refers to the area that appears dark on a macroscopic scale.

[0090] In one specific embodiment, n is 1, and the pitch P of the scale grating 1 is equal to the length L (i.e., the minimum pitch P). That is, P = L. Each bright area 104 includes one basic unit 50, and each dark area 103 includes one basic unit 50. When precise measurement of the moving distance is required, the relative displacement of the scale grating 1 is stepped according to the equal length L.

[0091] In another specific embodiment, n is 2, corresponding to the grating pitch P of the scale grating 1 being twice the equal division length L. That is, P = 2L. Each bright area 104 includes two basic units 50, and each dark area 103 includes two basic units 50. When a rough measurement of the moving distance is required, the relative displacement of the scale grating 1 is incremented by twice the equal division length L, which can save measurement time and improve production efficiency.

[0092] By rationally dividing the bright area 104 and the dark area 103, and selecting the light modulation unit 10 within the bright area 104 to be configured in an unshielded state, different grating pitches P can be adjusted, thereby achieving adjustable precision. For fine-tuning, the smallest grating pitch P is selected; for coarse-tuning, the grating pitch P can be increased, thus saving measurement time and improving production efficiency.

[0093] Please see Figure 6 and Figure 7 , Figure 6 This is a structural schematic diagram of an embodiment of the grating ruler provided in this application. Figure 7 This is a schematic diagram of another embodiment of the grating ruler provided in this application.

[0094] This application provides a grating ruler 100. The grating ruler 100 includes a scale grating 1 and a counter 2. The scale grating 1 is the scale grating 1 described above. The counter 2 is relative to the scale grating 1 and is used to read the optical signal on the scale grating 1 and output displacement data.

[0095] In some embodiments, such as Figure 6 As shown, the functional layer 13 of the scale grating 1 is a light-emitting layer, and the light modulation unit 10 of the scale grating 1 is dynamically configured to a light-emitting state or a light-blocking state; the counter 2 includes a reading head 21, which is disposed on one side of the working surface 101 of the scale grating 1.

[0096] The light modulation unit 10 is self-illuminating, eliminating the need for a light source 22 in the counter 2 and simplifying its structure. The light source is integrated into the scale grating 1, which actively provides the light signal. Direct interaction with the reading head 21 reduces signal delay. Furthermore, the scale grating 1 is self-illuminating, exhibiting strong resistance to ambient light interference, making it suitable for dark environments or complex working conditions.

[0097] During the measurement process, the scale grating 1 displays bright areas 104 arranged alternately along a preset direction (see...). Figure 4 and Figure 5 ) and Dark Zone 103 (see Figure 4 and Figure 5 In bright area 104, the light modulation unit 10 is in an emitting state, emitting a light signal. Counter 2 receives the light signal and counts once. Counter 2 moves to the next interval (i.e., the next dark area 103 adjacent to bright area 104). In dark area 103, the light modulation unit 10 is in a light-blocking state, and counter 2 cannot receive a light signal, so counter 2 counts once again. Counter 2 continues to move to the next interval (i.e., the next bright area 104 adjacent to dark area 103). In bright area 104, the light modulation unit 10 is in an emitting state, emitting a light signal. Counter 2 can receive the light signal, so counter 2 counts once again.

[0098] In other embodiments, such as Figure 7 As shown, the functional layer 13 of the scale grating 1 is a polarizing layer, and the light modulation unit 10 of the scale grating 1 is dynamically configured to be in a light-transmitting state or a light-blocking state; the counter 2 includes a reading head 21 and a light source 22. The reading head 21 is disposed on one side of the working surface 101 of the scale grating 1, and the light source 22 is disposed on one side of the back surface 102 of the scale grating 1. The back surface 102 is disposed opposite to the working surface 101.

[0099] The light source 22 emits light of a specific wavelength (such as infrared or visible light) to form a uniform beam that illuminates the back surface 102 of the scale grating 1.

[0100] For example, the light source 22 is a light-emitting diode or a laser diode.

[0101] The scale grating 1 converts continuous light into periodically varying bright and dark fringes (moiré fringes), providing a recognizable optical signal for the reading head 21.

[0102] During the measurement process, the scale grating 1 displays bright areas 104 arranged alternately along a preset direction (see...). Figure 4 and Figure 5 ) and Dark Zone 103 (see Figure 4 and Figure 5 Light source 22 emits a light signal. The light modulation unit 10 in the bright area 104 is in a light-transmitting state. Counter 2 receives the light signal through the light modulation unit 10 and counts once. Counter 2 moves to the next interval (i.e., the next dark area 103 adjacent to the bright area 104). The light modulation unit 10 in the dark area 103 is in a light-blocking state, and counter 2 cannot receive the light signal. Counter 2 counts once again. Counter 2 continues to move to the next interval (i.e., the next bright area 104 adjacent to the dark area 103). The light modulation unit 10 in the bright area 104 is in a light-transmitting state, and counter 2 can receive the light signal. Counter 2 counts once again.

[0103] The internal structure of counter 2 is not subject to many restrictions here, and can be selected according to actual needs. For example, counter 2 also includes a photoelectric sensor (not shown in the figure), which is responsible for receiving the light signal from the scale grating 1 and converting the light signal into an electrical signal, thereby realizing the measurement and reading of displacement.

[0104] Please see Figure 6 , Figures 8 to 10 , Figure 8 This is a schematic flowchart illustrating one embodiment of the method for fabricating the scale grating provided in this application. Figure 9 yes Figure 8 A flowchart of one embodiment corresponding to step S11 is shown. Figure 10 yes Figure 9 Schematic diagram of the structure corresponding to steps S111-S113.

[0105] This application provides a method for fabricating a scale grating, used to fabricate the aforementioned scale grating 1.

[0106] Methods for fabricating scale gratings include:

[0107] S11: Prepare optical modulation units, and set the optical modulation units at intervals.

[0108] Specifically, an optical modulation unit 10 is fabricated on the first substrate 30.

[0109] In one specific embodiment, step S11 includes:

[0110] S111: Fabricate the first electrode on the first substrate.

[0111] Specifically, the first electrodes 11 are equidistant from each other. In a preset direction, the width of the first electrode 11 is a first width x1, and the spacing between the first electrodes 11 is a second width x2. The first width x1 is greater than the second width x2.

[0112] While fabricating the first electrode 11, a first lead 111 is also fabricated, and the first electrode 11 is connected to an external power source through the first lead 111.

[0113] The extension direction of the first lead 111 is set to intersect with the preset direction.

[0114] Specifically, the extension direction of the first lead 111 is set perpendicular to the preset direction.

[0115] S112: A functional layer is prepared on the side of the first electrode away from the first substrate.

[0116] Specifically, the orthographic projection of the functional layer 13 on the first substrate 30 coincides with the orthographic projection of the first electrode 11 on the first substrate 30. In a preset direction, the width of the functional layer 13 is a first width x1, and the spacing between the functional layers 13 is a second width x2.

[0117] Functional layer 13 is either a light-emitting layer or a polarizing layer. The specific material of the light-emitting layer or polarizing layer is not limited here; it can be selected based on actual needs.

[0118] S113: A second electrode is fabricated on the side of the functional layer away from the first substrate.

[0119] Specifically, the orthographic projection of the second electrode 12 on the first substrate 30 coincides with the orthographic projection of the first electrode 11 on the first substrate 30. In a preset direction, the width of the second electrode 12 is a first width x1, and the spacing between the second electrodes 12 is a second width x2.

[0120] At least one of the first electrode 11 and the second electrode 12 is a light-transmitting layer.

[0121] While fabricating the second electrode 12, a second lead 121 is also fabricated, and the second electrode 12 is connected to an external power source through the second lead 121.

[0122] The extension direction of the second lead 121 is set to intersect with the preset direction.

[0123] Specifically, the extension direction of the second lead 121 is set perpendicular to the preset direction.

[0124] The first electrode 11, the functional layer 13, and the second electrode 12, which are stacked in sequence, constitute the optical modulation unit 10.

[0125] Please see Figure 6 , Figure 10 and Figure 11 , Figure 11 yes Figure 8 The structural diagrams corresponding to steps S12 and S13 are shown below.

[0126] S12: A light-shielding unit is fabricated on the side of the light modulation unit.

[0127] Specifically, the light-shielding unit 20 is located on the side of the light modulation unit 10.

[0128] In the preset direction, the width of the light-shielding unit 20 is the second width x 2.

[0129] In some embodiments, the surface of the light-shielding unit 20 away from the first substrate 30 is flush with the surface of the light modulation unit 10 away from the first substrate 30.

[0130] In other embodiments, the side surface of the light-shielding unit 20 away from the first substrate 30 is higher than the side surface of the light modulation unit 10 away from the first substrate 30.

[0131] In one specific embodiment, the surface of the light-shielding unit 20 away from the first substrate 30 is flush with the surface of the light modulation unit 10 away from the first substrate 30 to facilitate the fabrication of the second substrate 40. Specifically, a light-shielding layer (not shown) is formed on the side of the second electrode 12 away from the first substrate 30, covering the second electrode 12 and filling the space between the light modulation unit 10. The light-shielding layer is patterned to form the light-shielding unit 20.

[0132] The process after step S12 also includes:

[0133] S13: Prepare a second substrate on the side of the second electrode away from the first substrate.

[0134] At least one of the first substrate 30 and the second substrate 40 is a light-transmitting layer.

[0135] Specifically, when the functional layer 13 is a light-emitting layer, it is only necessary to ensure that the portion located between the working surface 101 and the functional layer 13, and facing the functional layer 13, is a light-transmitting layer, so that the light emitted by the functional layer 13 can be emitted through the working surface 101. When the functional layer 13 is a polarizing layer, it is only necessary to ensure that the portion located between the working surface 101 and the functional layer 13, and facing the functional layer 13, is a light-transmitting layer, and that the portion located between the back surface 102 and the functional layer 13, and facing the functional layer 13, is a light-transmitting layer, so that the light irradiated onto the back surface 102 can be transmitted through the light modulation unit 10 and out of the working surface 101.

[0136] In one specific embodiment, the functional layer 13 is a light-emitting layer, and the second electrode 12 and the second substrate 40 are both light-transmitting layers. The surface of the second substrate 40 away from the first substrate 30 is the working surface 101.

[0137] Please see Figures 12 to 14 , Figure 12 This is a schematic flowchart of another embodiment of the method for fabricating the scale grating provided in this application. Figure 13 yes Figure 12 The flowchart corresponding to step S21 is shown below. Figure 14 yes Figure 13 A schematic diagram of the structure corresponding to steps S211 and S212.

[0138] This application provides a method for fabricating a scale grating, used to fabricate the aforementioned scale grating 1.

[0139] Methods for fabricating scale gratings include:

[0140] S21: A first electrode and a first light-shielding layer are sequentially fabricated on a first substrate; the first light-shielding layer is located on the side of the first electrode.

[0141] Specifically, in a preset direction, the width of the first electrode 11 is a first width x1, the spacing between the first electrodes 11 is a second width x2, and the width of the first light-shielding layer 201 is a second width x2. The first width x1 is greater than the second width x2.

[0142] In one specific embodiment, step S21 includes:

[0143] S211: Fabricate a first electrode on a first substrate.

[0144] Specifically, a first electrode 11 is prepared on the first substrate 30, and the first electrodes 11 are arranged at equal intervals.

[0145] While fabricating the first electrode 11, a first lead 111 is also fabricated, and the first electrode 11 is connected to an external power source through the first lead 111.

[0146] The extension direction of the first lead 111 is set to intersect with the preset direction.

[0147] Specifically, the extension direction of the first lead 111 is set perpendicular to the preset direction.

[0148] S212: Prepare a first light-shielding layer on the side of the first electrode.

[0149] Specifically, a first light-shielding layer 201 is formed on the side of the first electrode 11. The surface of the first light-shielding layer 201 away from the first substrate 30 is flush with the surface of the first electrode 11 away from the first substrate 30, or the surface of the first light-shielding layer 201 away from the first substrate 30 is higher than the surface of the first electrode 11 away from the first substrate 30.

[0150] Exemplarily, the surface of the first light-shielding layer 201 away from the first substrate 30 is higher than the surface of the first electrode 11 away from the first substrate 30. Specifically, a light-shielding layer (not shown) is formed on the side of the first electrode 11 away from the first substrate 30, the light-shielding layer covering the first electrode 11 and filling the gaps between the first electrodes 11. The light-shielding layer is patterned to expose the first electrode 11, thus obtaining the first light-shielding layer 201.

[0151] Please see Figures 16 to 17 , Figure 15 yes Figure 12 The flowchart corresponding to step S22 is shown below. Figure 16 yes Figure 15 Structural diagrams corresponding to steps S221 and S222 are shown below. Figure 17 yes Figure 12 A schematic diagram of the structure corresponding to steps S23 and S24.

[0152] S22: A second electrode and a second light-shielding layer are sequentially fabricated on the second substrate; the second light-shielding layer is located on the side of the second electrode.

[0153] Specifically, in a preset direction, the width of the second electrode 12 is a first width x1, the spacing between the second electrodes 12 is a second width x2, and the width of the second light-shielding layer 202 is a second width x2. The first width x1 is greater than the second width x2.

[0154] S221: Fabricate a second electrode on the second substrate.

[0155] Specifically, a second electrode 12 is fabricated on the second substrate 40, and the second electrodes 12 are arranged at equal intervals.

[0156] While fabricating the second electrode 12, a second lead 121 is also fabricated, and the second electrode 12 is connected to an external power source through the second lead 121.

[0157] The extension direction of the second lead 121 is set to intersect with the preset direction.

[0158] Specifically, the extension direction of the second lead 121 is set perpendicular to the preset direction.

[0159] S222: Prepare a second light-shielding layer on the side of the second electrode.

[0160] Specifically, the surface of the second light-shielding layer 202 away from the second substrate 40 is flush with the surface of the second electrode 12 away from the second substrate 40, or the surface of the second light-shielding layer 202 away from the second substrate 40 is higher than the surface of the second electrode 12 away from the second substrate 40.

[0161] For example, the surface of the second light-shielding layer 202 away from the second substrate 40 is flush with the surface of the second electrode 12 away from the second substrate 40.

[0162] It should be noted that steps S21 and S22 can be performed in any order.

[0163] S23: Prepare a functional layer on the surface of the first electrode or the second electrode.

[0164] Specifically, when the functional layer 13 is prepared on the surface of the first electrode 11, the orthographic projection of the functional layer 13 on the first substrate 30 coincides with the orthographic projection of the first electrode 11 on the first substrate 30.

[0165] When the functional layer 13 is fabricated on the surface of the second electrode 12, the orthographic projection of the functional layer 13 on the second substrate 40 coincides with the orthographic projection of the second electrode 12 on the second substrate 40.

[0166] In the preset direction, the width of the functional layer 13 is a first width x1. The spacing between the functional layers 13 is a second width x2.

[0167] Functional layer 13 is a light-emitting layer or a polarizing layer.

[0168] For example, a functional layer 13 is prepared on the surface of the first electrode 11.

[0169] S24: Align the first substrate and the second substrate so that the first electrode, the functional layer and the second electrode are stacked in sequence to form an optical modulation unit, and attach the first light-shielding layer and the second light-shielding layer to form a light-shielding unit.

[0170] Specifically, at least one of the first substrate 30 and the second substrate 40 is a light-transmitting layer. At least one of the first electrode 11 and the second electrode 12 is a light-transmitting layer.

[0171] For example, the orthographic projection of the first electrode 11 on the first substrate 30 coincides with the orthographic projection of the second electrode 12 on the first substrate 30.

[0172] In one specific embodiment, the functional layer 13 is a polarizing layer, and the first electrode 11, the second electrode 12, the first substrate 30, and the second substrate 40 are all light-transmitting layers.

[0173] In the above embodiments, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions in other embodiments.

[0174] The above are merely embodiments of this application and do not limit the scope of patent protection of this application. Any equivalent structural or procedural changes made using the content of this application’s specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the scope of patent protection of this application.

Claims

1. A scale grating, characterized by, The light modulation unit and the light shielding unit are periodically and alternately arranged along a preset direction; The light modulation unit is dynamically configured by an external signal to adjust the grating pitch of the scale grating; The light modulation unit comprises a first electrode, a functional layer and a second electrode which are sequentially stacked; the first electrode is connected with a first voltage, the second electrode is connected with a second voltage, and the optical state of the light modulation unit is dynamically configured by controlling the first voltage and the second voltage; the light modulation unit is configured to be independently controlled; The functional layer is a light-emitting layer, the optical state includes a light-emitting state and a light-shielding state, and at least one of the first electrode and the second electrode is a light-transmitting layer; or The functional layer is a polarizing layer, the optical state includes a light-transmitting state and a light-shielding state, and the first electrode and the second electrode are both light-transmitting layers.

2. The scale grating according to claim 1, characterized in that The scale grating further comprises a first substrate and a second substrate arranged oppositely; the light modulation unit is arranged between the first substrate and the second substrate, and the light shielding unit is located between the first substrate and the second substrate; at least one of the first substrate and the second substrate is a light-transmitting layer.

3. The scale grating of claim 1, wherein In the preset direction, the width of the light modulation unit is greater than the width of the light shielding unit.

4. The scale grating of claim 3, wherein During the measurement process, the scale grating presents bright areas and dark areas which are alternately arranged along the preset direction; The light modulation unit and the light shielding unit periodically and alternately arranged along the preset direction are divided into a plurality of continuously arranged basic units, each of which comprises one light modulation unit and one light shielding unit arranged adjacently; in the preset direction, the width of the basic unit is an equal division length; In response to the grating pitch of the scale grating being n times the equal division length; each bright area comprises n continuously arranged basic units, and each dark area comprises n continuously arranged basic units; n is an integer greater than 0; the light modulation unit in the bright area is configured to be in a light-transmitting state or a light-emitting state; the light modulation unit in the dark area is configured to be in a light-shielding state.

5. An optical encoder scale comprising: Comprising: The scale grating is the scale grating of any one of claims 1 to 4; The counter is displaced relative to the scale grating and is used to read the optical signal on the scale grating and output displacement data.

6. The grating ruler according to claim 5, wherein The functional layer of the scale grating is a light-emitting layer, and the light modulation unit of the scale grating is dynamically configured to be in a light-emitting state or a light-shielding state; the counter comprises a reading head arranged on one side of the working surface of the scale grating; Or The functional layer of the scale grating is a polarizing layer, and the light modulation unit of the scale grating is dynamically configured to be in a light-transmitting state or a light-shielding state; the counter comprises a reading head and a light source, the reading head is arranged on one side of the working surface of the scale grating, and the light source is arranged on one side of the back surface of the scale grating, the back surface being arranged oppositely to the working surface.

7. A method of manufacturing a scale grating, characterized by, For preparing the scale grating of any one of claims 1 to 4; comprising: The application discloses a preparation method of a scale grating, and the scale grating comprises a plurality of light modulation units which are arranged at intervals and are independently controlled. The light modulation unit is provided with a light shielding unit on the side thereof.

8. A method of manufacturing a scale grating, characterized by, The application discloses a preparation method of a scale grating, and the scale grating comprises a plurality of light modulation units which are arranged at intervals and are independently controlled. The first electrode and the first light shielding layer are prepared on a first substrate in sequence; the first light shielding layer is arranged on the side of the first electrode. The second electrode and the second light shielding layer are prepared on a second substrate in sequence; the second light shielding layer is arranged on the side of the second electrode. The functional layer is prepared on the surface of the first electrode or the second electrode. The first substrate and the second substrate are arranged in a position alignment mode, so that the first electrode, the functional layer and the second electrode are arranged in a laminated mode to form the light modulation unit, and the first light shielding layer and the second light shielding layer are arranged in a close mode to form the light shielding unit; the first electrode is connected with a first voltage, the second electrode is connected with a second voltage, and the optical state of the light modulation unit is dynamically configured by controlling the first voltage and the second voltage; the light modulation unit is independently controlled; wherein the functional layer is a light emitting layer, the optical state comprises a light emitting state and a light shielding state, and at least one of the first electrode and the second electrode is a light transmitting layer; or the functional layer is a polarizing layer, the optical state comprises a light transmitting state and a light shielding state, and the first electrode and the second electrode are both light transmitting layers.

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