Three-axis integrated gyroscope architecture and three-axis gyroscope

Abstract

The invention provides a three-axis integrated gyroscope architecture and a three-axis gyroscope, and the three-axis integrated gyroscope architecture comprises: a driving frame comprising a first driving frame and a second driving frame which are parallel to each other and are arranged at an interval; the X gyroscope structure, the Y gyroscope structure and the Z gyroscope structure are arranged between the first driving frame and the second driving frame in parallel; the X gyroscope structure, the Y gyroscope structure and the Z gyroscope structure are respectively connected with the corresponding frames through driving decoupling beams; wherein the first driving frame and the second driving frame perform resonant motion along the Y axis, detection mass blocks in the X gyro structure and the Z gyro structure perform consistent resonant motion with corresponding frames, and a Y conversion displacement mechanism is arranged between the Y gyro structure and the driving frame. And the Y conversion displacement mechanism converts the resonant motion of the driving frame along the Y axis into the resonant motion of the Y gyro structure along the X axis.

Description

Technical Field

[0001] The present application relates to the field of micro-electromechanical technology, and in particular to a three-axis integrated gyroscope architecture and a three-axis gyroscope. Background Art

[0002] In recent years, inertial technology has been widely used in modern industrial control, aerospace, defense, military, consumer electronics, and other fields, demonstrating its crucial importance across all industries. MEMS gyroscopes, sensors that measure angular velocity, are one of the core components of inertial technology. Currently, with increasing consumer market demand, higher requirements are being placed on gyroscope size and performance. MEMS gyroscopes are also developing towards smaller size, lower power consumption, lower cost, and higher integration.

[0003] Currently, the working principle of known three-axis MEMS gyroscopes is to detect angular velocity by measuring the magnitude of the Coriolis force. The key technology of traditional three-axis gyroscope products lies in the device assembly stage, that is, the three-axis inertial sensor module assembled from three independent single-axis gyroscopes. Since each single-axis gyroscope structure needs to contain independent mass blocks, drive and detection structures, the overall size after assembly is relatively large. At the same time, the corresponding ASIC circuit needs to be driven separately by three sets of independent drive circuits, further increasing the cost and power consumption of the final gyroscope chip. Traditional three-axis gyroscopes face the problems of large size and power consumption, and low integration. In addition, since the three independent gyroscopes need to be mechanically assembled, there is a large axis misalignment problem, which causes the components of the responses of other axes to be superimposed on the measurement axis, resulting in measurement errors. Summary of the Invention

[0004] In order to solve the existing technical problems, the present application provides a three-axis integrated gyroscope architecture and a three-axis gyroscope that can integrate multi-axis sensitive devices into a single chip and realize one-drive three-detection.

[0005] In a first aspect, an embodiment of the present application provides a three-axis integrated gyroscope architecture, comprising:

[0006] The driving frame includes a first driving frame and a second driving frame which are parallel to each other and spaced apart from each other;

[0007] an X-gyro structure, a Y-gyro structure, and a Z-gyro structure arranged in parallel between the first drive frame and the second drive frame, wherein the X-gyro structure, the Y-gyro structure, and the Z-gyro structure are respectively connected to the corresponding frame via a drive decoupling beam;

[0008] The first drive frame and the second drive frame perform resonant motion along the Y axis, the detection mass blocks in the X gyro structure and the Z gyro structure perform consistent resonant motion with the corresponding frames, and a Y conversion displacement mechanism is provided between the Y gyro structure and the drive frame. The Y conversion displacement mechanism converts the resonant motion of the drive frame along the Y axis into the resonant motion of the Y gyro structure along the X axis.

[0009] In a second aspect, an embodiment of the present application provides a three-axis gyroscope, comprising a substrate, and a three-axis integrated gyroscope architecture as described in any embodiment of the present application that is integrated on the substrate.

[0010] In the three-axis integrated gyroscope architecture provided by the above-described embodiment, the X, Y, and Z gyroscope structures are arranged in parallel between a first drive frame and a second drive frame, and connected to the corresponding frames via driven decoupling beams. The X, Y, and Z gyroscope structures share the same set of drive frames. When the first and second drive frames respectively undergo resonant motion along the Y axis, the proof mass blocks in the X and Z gyroscope structures undergo resonant motion along the Y axis, consistent with the corresponding drive frames. The proof mass block in the Y gyroscope structure undergoes resonant motion in the X axis via a Y-conversion displacement mechanism. This enables the same drive frame to simultaneously drive the three gyroscope structures, achieving one drive and three detections. Thus, by fabricating the X, Y, and Z gyroscope structures as multiple sensitive structures on a single substrate and sharing a common control circuit system, angular velocity measurement along the three axes can be achieved. This reduces device power consumption and enables single-chip integration of multiple axes, offering significant advantages in miniaturization, high yield, and low-cost large-scale manufacturing.

[0011] In the above embodiment, the three-axis gyroscope and the corresponding three-axis integrated gyroscope architecture embodiment belong to the same concept, and thus have at least the same technical effects as the corresponding three-axis integrated gyroscope architecture embodiment, which will not be repeated here. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 A schematic structural diagram of a three-axis integrated gyroscope architecture provided by an embodiment.

[0013] Figure 2 for Figure 1 Schematic diagram of the Y-axis gyroscope structure.

[0014] Figure 3 for Figure 1 Another schematic diagram of the Y-axis gyroscope structure.

[0015] Figure 4 for Figure 3 A partial enlarged view of the middle Y-axis gyroscope structure.

[0016] Figure 5 for Figure 1 Schematic diagram of the Z-axis gyroscope structure.

[0017] Figure 6 for Figure 1 Schematic diagram of the X-axis gyroscope structure.

[0018] Figure 7 for Figure 1 Another schematic diagram of the central X-axis gyroscope structure.

[0019] Figure 8 for Figure 7 A partial enlarged view of the middle Y-axis gyroscope structure.

[0020] Figure 9 FIG. 1 is a driving diagram of a three-axis integrated gyroscope architecture in one embodiment.

[0021] Figure 10 Schematic diagram of the detection of the Z gyro structure when driven by the three-axis integrated gyroscope architecture.

[0022] Figure 11 Schematic diagram of the detection of the Y gyroscope structure when driving the three-axis integrated gyroscope architecture.

[0023] Figure 12 Schematic diagram of the detection of the X-gyro structure when driven by the three-axis integrated gyroscope architecture. DETAILED DESCRIPTION

[0024] The technical solution of the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0025] In order to make the purpose, technical solutions and advantages of this application clearer, the application will be further described in detail below with reference to the accompanying drawings. The described embodiments should not be regarded as limiting this application. All other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of this application.

[0026] In the following description, the expression "some embodiments" is involved, which describes a subset of all possible embodiments. It should be noted that "some embodiments" may be the same subset or different subsets of all possible embodiments, and may be combined with each other without conflict.

[0027] In the following description, the terms "first, second, and third" are merely used to distinguish similar objects and do not represent a specific ordering of the objects. It is understandable that "first, second, and third" can be interchanged with a specific order or sequence where permitted, so that the embodiments of the present application described herein can be implemented in an order other than that illustrated or described herein.

[0028] See also Figure 1 An embodiment of the present application provides a three-axis integrated gyroscope architecture, comprising: a drive frame, including a first drive frame 11 and a second drive frame 12, which are parallel to each other and spaced apart from each other; an X-gyro structure 100, a Y-gyro structure 300, and a Z-gyro structure 200, which are arranged in parallel between the first drive frame 11 and the second drive frame 12, wherein the X-gyro structure 100, the Y-gyro structure 300, and the Z-gyro structure 200 are respectively connected to the corresponding frames via drive decoupling beams; wherein the first drive frame 11 and the second drive frame 12 perform resonant motion along the Y axis, the detection masses in the X-gyro structure 100 and the Z-gyro structure 200 perform consistent resonant motion with the corresponding frames, and a Y-conversion displacement mechanism is provided between the Y-gyro structure 300 and the drive frame, which converts the resonant motion of the drive frame along the Y axis into resonant motion of the Y-gyro structure 300 along the X axis.

[0029] The first drive frame 11 and the second drive frame 12 are positioned at the outermost sides, with a predetermined gap between them. The X-, Y-, and Z-gyro structures 100, 300, and 200 are positioned within the gap between the first drive frame 11 and the second drive frame 12, arranged sequentially and independently of each other. The X-, Y-, and Z-gyro structures 100, 300, and 200 are connected to the drive frames via drive decoupling beams. These beams have significantly greater stiffness in the drive direction than in the non-drive direction, enabling displacement of the drive frames to be transmitted to the proof masses of the X-, Y-, and Z-gyro structures 100, 300, and 200, while also providing the proof masses with a degree of freedom for displacement in the non-drive direction.

[0030] In the three-axis integrated gyroscope architecture provided in the above embodiment, the X-gyro structure 100, the Y-gyro structure 300, and the Z-gyro structure 200 are arranged in parallel between the first drive frame 11 and the second drive frame 12, and are connected to the corresponding frames by driving the decoupling beam. The X-gyro structure 100, the Y-gyro structure 300, and the Z-gyroscope structure 200 share the same set of drive frames. When the first drive frame 11 and the second drive frame 12 respectively perform resonant motion along the Y axis, the detection masses in the X-gyro structure 100 and the Z-gyroscope structure 200 perform resonant motion along the Y axis in the same direction as the corresponding drive frames. The detection mass block in the Y gyro structure 300 performs resonant motion in the X-axis direction through the Y conversion displacement mechanism, so that the same driving frame can simultaneously drive the three gyro structures, realizing one drive and three detections. In this way, the X gyro structure 100, the Y gyro structure 300, and the Z gyro structure 200 can be manufactured as multiple sensitive structures and arranged on the same substrate, and share the same control circuit system, so as to realize the measurement of the angular velocity of the three axes respectively. This can reduce the power consumption of the device and realize the integration of multiple axes into one single chip, which has great advantages in miniaturization, high yield rate and low-cost large-scale manufacturing.

[0031] The Y gyro structure 300 is a differential detection module. In some embodiments, please refer to Figures 2 to 4 The Y-gyro structure 300 includes a first Y-proofing mass 35, a second Y-proofing mass 36, and a Y-center coupling beam connected between the first and second Y-proofing masses 35, 36. The first and second Y-proofing masses 35, 36 are spaced apart along the X-axis between the first and second drive frames 11, 12. The Y-conversion displacement mechanism includes a plurality of Y-conversion mechanism masses disposed around the first and second Y-proofing masses 35, 36, and a Y-displacement conversion beam connected between adjacent Y-conversion mechanism masses. The Y-displacement conversion beam is tilted at a predetermined angle relative to the Y-axis. The predetermined angle is used to change the ratio of the resonant motion amplitudes of the first and second Y-proofing masses 35, 36 in the Y-axis and X-axis directions. For the convenience of description, the Y conversion displacement mechanism is distinguished by the first Y conversion displacement mechanism 615, the second Y conversion displacement mechanism 616, the third Y conversion displacement mechanism 617 and the fourth Y conversion displacement mechanism 618. The first Y conversion displacement mechanism 615, the second Y conversion displacement mechanism 616, the third Y conversion displacement mechanism 617 and the fourth Y conversion displacement mechanism 618 are located around the first Y detection mass block 35 and the second Y detection mass block 36. The first Y conversion displacement mechanism 615 and the second Y conversion displacement mechanism 616 are connected to the first drive frame 11 through the first Y drive decoupling beam 235; the third Y conversion displacement mechanism 617 and the fourth Y conversion displacement mechanism 618 are connected to the second drive frame 12 through the second Y drive decoupling beam 236.

[0032] The Y-center coupling beam is used to couple the displacements of the first Y-proofing mass 35 and the second Y-proofing mass 36 in the X and Z directions. Y-displacement conversion beams are positioned in the gaps between the multiple conversion mechanism masses to achieve displacement conversion. Because their axial stiffness is significantly greater than their bending stiffness, they can simultaneously achieve displacement conversion while simultaneously bending to maintain the desired angle at the beam root. In this embodiment, the Y-displacement conversion beam is angled at 45°, an adjustable angle during design. By varying the angle of the Y-displacement conversion beam, the ratio of the resonant motion amplitudes in the Y / X directions can be altered.

[0033] Optionally, the Y-gyro structure 300 further includes a Y-center coupling block 532 and Y-coupling beam anchors located on either side of the Y-center coupling block 532. The Y-center coupling block 532 is connected to the Y-coupling beam anchors via elastic units. The Y-center coupling beams are connected between the Y-center coupling block 532 and the first and second Y-detection masses 35 and 36. The combination of the elastic units and the Y-coupling beam anchors ensures proper displacement coupling between the first and second Y-detection masses 35 and 36 while also increasing the stiffness of the in-phase mode, making the frequency of the in-phase mode greater than that of the anti-phase mode. For ease of understanding and distinction, in the accompanying drawings, the Y-center coupling beams connected between the four corners of the Y-center coupling block 532 and the corresponding Y-detection masses are labeled 545, 546, 547, and 548, respectively, and the two Y-coupling beam anchors are labeled 515 and 516, respectively.

[0034] The Y-conversion mechanism mass blocks include a first Y-conversion mechanism mass block 645 and a second Y-conversion mechanism mass block 648, spaced apart along the X-axis, and a third Y-conversion mechanism mass block 646 and a fourth Y-conversion mechanism mass block 647, spaced apart along the Y-axis. The first Y-conversion mechanism mass block 645 is connected to the first drive frame 11 via the first Y-drive decoupling beam 235, and the second Y-conversion mechanism mass block 648 is connected to the second drive frame 12 via the second Y-drive decoupling beam 236. The third Y-conversion mechanism mass block 646 is connected to the first Y-detection mass block 35 via the first Y-conversion displacement connecting beam, and the fourth Y-conversion mechanism mass block 647 is connected to the second Y-detection mass block 36 via the second Y-conversion displacement connecting beam. The first and second Y-conversion displacement connecting beams are used to provide the first and second Y-detection mass blocks 35 and 36 with degrees of freedom in the out-of-plane direction.

[0035] For ease of understanding and distinction, in the accompanying drawings, the two first Y-conversion displacement connecting beams are numbered 655 and 657, respectively, and the two second Y-conversion displacement connecting beams are numbered 656 and 658. Each Y-conversion displacement connecting beam is a linear beam extending along the Y-axis, with its opposite ends connected to the corresponding Y-detection mass block and the Y-conversion mechanism mass block. It should be noted that the Y-conversion displacement connecting beam is used to ensure the transmission of in-plane displacement while providing the Y-detection mass block with an out-of-plane degree of freedom in the out-of-plane direction. This out-of-plane direction is used to detect X-axis angular velocity. Any beam shape that can meet this characteristic is acceptable, and is not limited to the shape shown in this embodiment.

[0036] The first Y-drive decoupling beam 235 and the second Y-drive decoupling beam 236 each have a serpentine shape, comprising a linear center beam and side beams extending from one end of the center beam. The center beam is connected to the first Y detection mass 35, and the ends of the side beams are respectively connected to the first drive frame 11. It should be noted that the Y-drive decoupling beam must have a Y-direction stiffness that is significantly greater than the X-direction stiffness to achieve both Y-direction displacement transmission and X-direction displacement decoupling. Any beam shape that meets this requirement is acceptable, and is not limited to the shape shown in this embodiment.

[0037] Optionally, the Y-gyro structure 300 further includes Y-conversion support beam anchor points located on the outside of each end of each Y-conversion mechanism mass block, and a Y-conversion support beam connected between the Y-conversion mechanism mass block and the corresponding Y-conversion support beam anchor point. The Y-conversion support beam and the Y-conversion support beam anchor point are connected to the substrate to constrain the movement of the Y-conversion mechanism mass block in its respective direction and the orthogonality of the displacement conversion. The connection between the Y-conversion support beam and the Y-conversion support beam anchor point on the outside of the Y-conversion mechanism mass block and the substrate ensures that the Y-conversion mechanism mass block is constrained to move in its respective direction, ensuring the orthogonality of the displacement conversion, while also increasing the frequency of the in-phase mode of the entire Y-conversion displacement mechanism. For ease of understanding and distinction, in the accompanying drawings, the two Y-conversion support beam anchor points corresponding to the first Y-conversion mechanism mass block 645 are numbered 629 and 6211, respectively, and the two Y-conversion support beams are numbered 639 and 6311, respectively. The two Y-conversion support beam anchor points corresponding to the second Y-conversion mechanism mass block 648 are numbered 6214 and 6216, respectively, and the two Y-conversion support beams are numbered 6314 and 6316, respectively. The two Y-conversion support beam anchor points corresponding to the third Y-conversion mechanism mass block 646 are numbered 6210 and 6213, respectively, and the two Y-conversion support beams are numbered 6310 and 6313, respectively. The two Y-conversion support beam anchor points corresponding to the fourth Y-conversion mechanism mass block 647 are numbered 6212 and 6215, respectively, and the two Y-conversion support beams are numbered 6312 and 6315, respectively.

[0038] Please refer to Figure 9and Figure 11 The working principle of the Y-gyro structure 300 is described as follows:

[0039] When the first drive frame 11 performs resonant motion along the Y-axis and the second drive frame 12 performs resonant motion along the Y-axis in the opposite direction to the first drive frame 11, the first drive frame 11 drives the Y conversion displacement mechanism to move through the first Y-axis driven decoupling beam, and the Y conversion displacement mechanism converts the resonant motion of the first drive frame 11 along the Y-axis into resonant motion of the first Y detection mass block 35 along the X-axis. The second drive frame 12 drives the Y conversion displacement mechanism to move through the second Y-axis driven decoupling beam, and the Y conversion displacement mechanism converts the reverse resonant motion of the second drive frame 12 along the Y-axis into resonant motion of the second Y detection mass block 36 along the X-axis in the opposite direction to the first Y detection mass block 35. When an external angular velocity on the Y-axis exists, the first Y detection mass block 35 generates a detection displacement in the Z-direction through the Coriolis force, and the second Y detection mass block 36 generates a detection displacement along the Z-axis in the opposite direction to the first Y detection mass block 35 through the Coriolis force. By placing a lower electrode plate (not shown in the figure) on the substrate below the first Y detection mass block 35 and the second Y detection mass block 36, a differential signal can be generated to detect the magnitude of the Y-axis angular velocity.

[0040] Specifically, when the first driving frame 11 moves upward along the Y-axis and the second driving frame 12 moves downward along the Y-axis, the first driving frame 11 drives the first Y-conversion mechanism mass block 645 to move upward along the Y-axis through the first Y-axis driving decoupling beam, and the second driving frame 12 drives the second Y-conversion mechanism mass block 648 to move downward along the Y-axis through the second Y-axis driving decoupling beam.

[0041] The first Y conversion mechanism mass block 645 converts the upward motion displacement along the Y axis into movement of the third Y conversion mechanism mass block 646 to the right along the X axis through the first Y displacement conversion beam 665. The second Y conversion mechanism mass block 648 converts the downward motion along the Y axis into movement of the third Y conversion mechanism mass block 646 to the right along the X axis through the third Y displacement conversion beam 667. The combined action of the first Y displacement conversion beam 665 and the third Y displacement conversion beam 667 causes the third Y conversion mechanism mass block 646 to move to the right along the X axis, and the first Y detection mass block 35 is driven to move to the right along the X axis through the first Y displacement conversion beam 665 and the third Y displacement conversion beam 667.

[0042] Similarly, the first Y conversion mechanism mass block 645 converts the upward movement along the Y axis into the leftward movement of the fourth Y conversion mechanism mass block 647 along the X axis through the second Y displacement conversion beam 666. The second Y conversion mechanism mass block 648 converts the downward movement along the Y axis into the leftward movement of the fourth Y conversion mechanism mass block 647 along the X axis through the fourth Y displacement conversion beam 668. The combined action of the second Y displacement conversion beam 666 and the fourth Y displacement conversion beam 668 causes the fourth Y conversion mechanism mass block 647 to move left along the X axis, and the second Y detection mass block 36 is driven to move left along the X axis through the second Y displacement conversion beam 666 and the fourth Y displacement conversion beam 668.

[0043] In this way, by setting up the Y conversion displacement mechanism, the displacement direction conversion from the Y-axis displacement of the driving frame to the X-axis displacement of the Y detection mass block can be realized, and when the first driving frame 11 and the second driving frame 12 perform resonant motion in opposite directions along the Y axis, the first Y detection mass block 35 and the second Y detection mass block 36 perform resonant motion in opposite directions along the X axis.

[0044] The key design features of the Y-gyro structure 300 provided in the embodiment of the present application include the following:

[0045] First, the Y-gyro structure 300 primarily consists of two differential Y-proofing masses, a Y-drive decoupling beam, a Y-translation displacement mechanism, a Y-translation displacement connecting beam, a Y-center coupling beam, a Y-center coupling block 532, an elastic unit, and a Y-coupling beam anchor. The Y-translation displacement mechanism is connected to the differential drive frame via two Y-drive decoupling beams and to the Y-proofing mass via a Y-translation displacement connecting beam. This mechanism can convert the drive-direction displacement of the differential drive frame by 90 degrees and transmit it to the Y-proofing mass, thus achieving a one-drive, three-detection system.

[0046] Second, the two differential Y detection masses are connected to the Y conversion displacement mechanism through the Y conversion displacement connecting beam. The Y conversion displacement connecting beam will ensure the transmission of in-plane displacement while giving the Y detection mass the degree of freedom in the out-of-plane direction. The out-of-plane direction is used to detect the Y-axis angular velocity.

[0047] Third, the two differential Y proof masses are connected via a Y-center coupling beam. This Y-center coupling beam is secured to the substrate via Y-center coupling block 532, an elastic unit, and a coupling beam anchor. This ensures proper displacement coupling between the two differential Y proof masses while also increasing the stiffness of the in-phase mode, making the frequency of the in-phase mode greater than that of the anti-phase mode. This displacement coupling of the two Y differential proof masses ensures equal amplitude and synchronization of the differential motion within the bounds of process tolerances.

[0048] Fourth, the Y-conversion displacement mechanism primarily consists of two Y-conversion mass blocks, a Y-displacement conversion beam, a Y-conversion support beam, and a Y-conversion support beam anchor. The two Y-conversion mass blocks are positioned at 90 degrees and connected at a predetermined tilt angle by the Y-displacement conversion beam. This allows the Y displacement of one Y-conversion mass block to be converted into the X displacement of the other, with the displacement conversion ratio controlled by the tilt angle.

[0049] Fifth, the two Y-conversion mechanism masses are fixed to the anchor points of the Y-conversion support beam by the Y-conversion support beam, which not only ensures the orthogonality of the displacement transmission, but also increases the stiffness of the in-phase mode, making the frequency of the in-phase mode greater than that of the anti-phase mode.

[0050] Sixth, when the differential drive frame performs differential motion in the drive direction, the Y drive coupling beam causes the two differential Y conversion mechanism masses to also perform differential motion in the drive direction. Simultaneously, the Y displacement conversion beam converts the differential motion of another Y conversion mechanism mass placed 90 degrees apart. This is then converted to differential motion of the Y detection mass by the Y conversion displacement connecting beam. In the presence of an external angular velocity along the Y axis, the Y detection mass generates a differential displacement in the out-of-plane direction due to the Coriolis force. By placing a lower electrode on the substrate below the Y detection mass, a differential signal is generated, completing the detection of the Y axis angular velocity.

[0051] See also Figure 5 The Z gyro structure 200 also functions as a differential detection module. In some embodiments, the Z gyro structure 200 includes a first Z detection mass 33, a second Z detection mass 34, and a Z-center coupling beam connected between the first Z detection mass 33 and the second Z detection mass 34. The first Z detection mass 33 and the second Z detection mass 34 are spaced along the Y-axis between the first drive frame 11 and the second drive frame 12. The Z-center coupling beam couples the displacements of the first Z detection mass 33 and the second Z detection mass 34, causing them to perform equal-amplitude and synchronous differential motion. The drive decoupling beams include a first Z drive decoupling beam 233 connecting the first Z detection mass 33 to the first drive frame 11, and a second Z drive decoupling beam 234 connecting the second Z detection mass 34 to the second drive frame 12. The first Z drive decoupling beam 233 and the second Z drive decoupling beam 234 have greater stiffness in the Y-axis direction than in the X-axis direction. The Z-driven decoupling beam has a serpentine shape, comprising a linear center beam and side beams extending from one end of the center beam. The center beam is connected to the first drive frame 11, and the ends of the side beams are respectively connected to the first Z detection mass block 33. It should be noted that the Z-driven decoupling beam must have a Y-direction stiffness that is significantly greater than the X-direction stiffness to achieve transmission of Y-direction displacement and decoupling of X-direction displacement. Any beam shape that meets this requirement is acceptable, and is not limited to the shape shown in this embodiment.

[0052] Optionally, the first Z detection mass 33 and the second Z detection mass 34 each include a Z mass support beam anchor point located at the periphery, and a Z mass support beam connecting the Z mass support beam anchor point to the corresponding Z detection mass. The Z mass support beam provides the corresponding Z detection mass with preset stiffness and degrees of freedom in the X-axis and Y-axis directions. In an optional example, the Z mass support beam anchor points are located at the four corners of the corresponding Z detection mass, and the Z mass support beam includes a first beam portion folded in the X-axis direction and a second beam portion folded in the Y-axis direction, wherein the end of the first beam portion is connected to the corresponding Z mass support beam anchor point, and the end of the second beam portion is connected to the corner of the corresponding Z detection mass. The four corners of the first Z detection mass block 33 are respectively provided with a first Z mass block support beam anchor point 411, a second Z mass block support beam anchor point 412, a third Z mass block support beam anchor point 413, and a fourth Z mass block support beam anchor point 414; accordingly, the Z mass block support beam includes a first Z mass block support beam 421 connected between the first Z mass block support beam anchor point 411 and the first Z detection mass block 33, a second Z mass block support beam 422 connected between the second Z mass block support beam anchor point 412 and the second Z detection mass block 34, a third Z mass block support beam 423 connected between the third Z mass block support beam anchor point 413 and the first Z detection mass block 33, and a fourth Z mass block support beam 424 connected between the fourth Z mass block support beam anchor point 414 and the first Z detection mass block 33.

[0053] The Z gyro structure 200 is symmetrical as a whole. A fifth Z mass support beam anchor point 415, a sixth Z mass support beam anchor point 416, a seventh Z mass support beam anchor point 417, and an eighth Z mass support beam anchor point 418 are respectively provided at the four corners of the second Z detection mass 34. Accordingly, the Z mass support beams include a fifth Z mass support beam 425 connected between the fifth Z mass support beam anchor point 415 and the second Z detection mass 34, a sixth Z mass support beam 426 connected between the sixth Z mass support beam anchor point 416 and the second Z detection mass 34, a seventh Z mass support beam 427 connected between the seventh Z mass support beam anchor point 417 and the second Z detection mass 34, and an eighth Z mass support beam 428 connected between the eighth Z mass support beam anchor point 418 and the second Z detection mass 34.

[0054] It should be noted that the Z mass support beam needs to meet the X and Y stiffness requirements while providing freedom of displacement in the X and Y directions. Beams of different shapes that can meet this requirement are acceptable, and are not limited to the shapes shown in this embodiment.

[0055] Optionally, the Z-center coupling beam includes a first Z-center coupling beam 523 and a second Z-center coupling beam 524 symmetrically arranged. The first Z-center coupling beam 523 and the second Z-center coupling beam 524 are each bent and connected between the first Z detection mass 33 and the second Z detection mass 34. The Z gyro structure 200 also includes Z-coupling beam anchors disposed between the first Z detection mass 33 and the second Z detection mass 34. The first Z-center coupling beam 523 and the second Z-center coupling beam 524 are each connected to the corresponding Z-coupling beam anchors via elastic units. In this embodiment, the Z-center coupling beam is located between the first Z detection mass 33 and the second Z detection mass 34 and is used to simultaneously couple the displacements of the first Z detection mass 33 and the second Z detection mass 34 in the X and Y directions. At the same time, the Z-center coupling beam is connected to the Z-coupling beam anchor via an elastic unit. The combination of the elastic unit and the Z-coupling beam anchor ensures the proper displacement coupling between the first Z detection mass 33 and the second Z detection mass 34 while also increasing the stiffness of the in-phase mode, making the frequency of the in-phase mode greater than that of the anti-phase mode. It should be noted that any combination of elastic units and coupling beam anchors that meet these characteristics can be used as part of a coupling mechanism between the first Z detection mass 33 and the second Z detection mass 34 in the Z gyro structure 200, where the frequency of the in-phase mode is greater than that of the anti-phase mode, and is not limited to the shape, position, and number shown in the accompanying drawings. For ease of understanding and distinction, the Z-coupling beam anchors are numbered 513 and 514, respectively, and the elastic units are numbered 523 and 524, respectively, in the accompanying drawings.

[0056] Please refer to Figure 9 and Figure 10 The working principle of the Z gyro structure 200 is described as follows:

[0057] When the first drive frame 11 undergoes resonant motion along the Y-axis and the second drive frame 12 undergoes resonant motion along the Y-axis in the opposite direction to that of the first drive frame 11, the first drive frame 11 drives the first Z-proofing mass 33 to undergo resonant motion along the Y-axis via the first Z-axis driven decoupling beam. The second drive frame 12 drives the second Z-proofing mass 34 to undergo resonant motion along the Y-axis in the opposite direction to that of the first Z-proofing mass 33 via the second Z-axis driven decoupling beam. When an external angular velocity in the Z-axis is present, the first Z-proofing mass 33 generates a detection displacement in the X-direction due to the Coriolis force, while the second Z-proofing mass 34 generates a detection displacement along the Z-axis in the opposite direction to that of the first Z-proofing mass 31 due to the Coriolis force. By placing comb electrodes (not shown) within the planes of the first Z-proofing mass 33 and the second Z-proofing mass 34, a differential signal is generated, thereby detecting the magnitude of the Z-axis angular velocity.

[0058] The design key points of the Z gyro structure 200 provided in the embodiment of the present application include the following:

[0059] First, the Z gyro structure 200 primarily consists of two differential Z proof masses, a Z drive decoupling beam, a Z proof mass support beam, a Z proof mass support beam anchor, a Z center coupling beam, an elastic unit, and a Z coupling beam anchor. The two differential Z proof masses are connected to the differential drive frame via two Z drive decoupling beams. The two differential Z proof masses are connected to the substrate via the Z proof mass support beam and the Z proof mass support beam anchor. The Z proof mass support beam has low stiffness in both the drive and detection directions, ensuring the Z proof mass has degrees of freedom in both the drive and detection directions.

[0060] Second, the two differential Z detection masses are provided with a Z center coupling beam to couple the displacements of the two differential Z detection masses, thus ensuring equal amplitude and synchronization of the differential motion within the range of process errors.

[0061] Third, the Z-center coupling beam is fixed to the substrate via an elastic unit and a coupling beam anchor. The elastic unit has low in-plane rotational stiffness and high axial stiffness, thereby ensuring the normal displacement coupling of the two differential Z detection masses while increasing the stiffness of the in-phase mode, making the frequency of the in-phase mode greater than that of the anti-phase mode.

[0062] Fourth, when the differential drive frame performs differential motion in the driving direction, the Z-drive coupling beam is used to make the two differential Z-axis mass blocks also perform differential motion in the driving direction. When there is an external angular velocity on the Z axis, the Z detection mass block generates a differential displacement in the detection direction through the Coriolis force. By placing comb electrodes in the plane where the Z detection mass block is located, a differential signal can be generated to complete the detection of the Z-axis angular velocity.

[0063] The X-gyro structure 100 is also a differential detection module. In some embodiments, the X-gyro structure 100 includes a first X-proofing mass 31, a second X-proofing mass 32, and an X-center coupling beam connected between the first and second X-proofing masses 31, 32. The first and second X-proofing masses 31, 32 are spaced along the Y-axis between the first and second drive frames 11, 12. An X-translation displacement mechanism 611 is provided between the first and second X-proofing masses 31, 32 and the drive frames. This mechanism is used to adjust the frequency of spurious modes. In the Z-gyro structure 200, the X-center coupling beam is used to couple the displacements of the first and second X-proofing masses 31, 32 in the Y and Z directions. The provision of the X-translation displacement mechanism 611 does not change the direction of the resonant motion of the X-gyro structure 100. It primarily enhances the overall structural symmetry of the three-axis integrated gyro architecture and adjusts the frequency of spurious modes. In this embodiment, the angle of the X-displacement conversion beam is 45°, which can be adjusted during design. By changing the angle of the X-displacement conversion beam, the proportional relationship of the resonant motion amplitude in the Y / X axis direction can be changed.

[0064] In one optional example, the X-conversion displacement mechanism 611 includes a plurality of X-conversion mechanism masses disposed around the first X-proofing mass 31 and the second X-proofing mass 32, and an X-displacement conversion beam connecting adjacent X-conversion mechanism masses. The X-displacement conversion beam is tilted at a predetermined angle relative to the Y-axis, which is used to change the ratio of the resonant motion amplitudes of the first X-proofing mass 31 and the second X-proofing mass 32 in the Y-axis and X-axis directions. For ease of description, the X-conversion displacement mechanism 611 is further categorized as a first X-conversion displacement mechanism, a second X-conversion displacement mechanism, a third X-conversion displacement mechanism, and a third X-conversion displacement mechanism. The first X-conversion displacement mechanism, the second X-conversion displacement mechanism, the third X-conversion displacement mechanism, and the third X-conversion displacement mechanism are located around the first X-proofing mass 31 and the second X-proofing mass 32. The first X-proofing mass 31 is connected to the first drive frame 11 via the first X-drive decoupling beam 231, and the second X-drive decoupling beam 232 is connected to the second drive frame 12.

[0065] Optionally, the X-gyro structure 100 further includes an X-center coupling block 542 and X-coupling beam anchors located on either side of the X-center coupling block 542. In this embodiment, the X-center coupling beam connects between the X-center coupling block 542 and the first and second X-center detection masses 31 and 32. The X-center coupling block 542 and the X-center coupling beam anchors are aligned along the X-axis. The X-center coupling block 542 is connected to the two X-center coupling beam anchors via two elastic units. The combination of the elastic units and the X-center coupling beam anchors ensures proper displacement coupling between the first and second X-center detection masses 31 and 32 while also increasing the stiffness of the in-phase mode, making the frequency of the in-phase mode greater than that of the anti-phase mode. For ease of description, the two X-center coupling beam anchor points are numbered 511 and 512, respectively. The two X-center coupling beams are numbered 521 and 522, respectively. The X-center coupling beams connected between the four corners of the X-center coupling block 542 and the corresponding X-detection mass blocks are numbered 541, 542, 543, and 544, respectively.

[0066] Optionally, the X-conversion mechanism mass includes a first X-conversion mechanism mass 641 and a second X-conversion mechanism mass 644 spaced apart along the X-axis, and a third X-conversion mechanism mass 642 and a fourth X-conversion mechanism mass 643 spaced apart along the Y-axis. The first X-conversion mechanism mass 641 is connected to the first drive frame 11 via the first X-drive decoupling beam 231 and to the first X-detection mass 31 via the first X-conversion displacement connecting beam. The second X-conversion mechanism mass 644 is connected to the second drive frame 12 via the second X-drive decoupling beam 232 and to the second X-detection mass 32 via the second X-conversion displacement connecting beam. The first and second X-conversion displacement connecting beams are used to provide the first and second X-detection mass 31 and 32 with degrees of freedom in the out-of-plane direction.

[0067] For ease of distinction and description, the two first X-translation displacement connecting beams are numbered 651 and 652, respectively, and the two second X-translation displacement connecting beams are numbered 653 and 654, respectively. The X-translation displacement connecting beams are linear beams extending along the X-axis, with their opposite ends connected to the corresponding X-detection mass blocks and the X-translation mechanism mass blocks. It should be noted that the X-translation displacement connecting beams are used to ensure the transmission of in-plane displacement while providing the X-detection mass blocks with an out-of-plane degree of freedom in the out-of-plane direction. This out-of-plane direction is used for detecting X-axis angular velocity. Any beam shape that meets these requirements may be used, and is not limited to the shape shown in this embodiment.

[0068] The first X-driven decoupling beam 231 and the second X-driven decoupling beam 232 each have a serpentine shape, comprising a linear center beam and side beams extending from one end of the center beam. The center beam is connected to the first X-proof mass 31, and the ends of the side beams are connected to the first drive frame 11. It should be noted that the X-driven decoupling beam must have a significantly greater stiffness in the X direction than in the Y direction to achieve both displacement transmission in the X direction and displacement decoupling in the Y direction. Any beam shape that meets these requirements is acceptable, and is not limited to the shape shown in this embodiment.

[0069] Optionally, the X-gyro structure 100 further includes X-conversion support beam anchor points disposed outside each end of each X-conversion mechanism mass block, and X-conversion support beams connected between the X-conversion mechanism mass block and the corresponding X-conversion support beam anchor points. The X-conversion support beams and the X-conversion support beam anchor points are connected to the substrate, constraining the movement of the X-conversion mechanism mass blocks in their respective directions and ensuring orthogonality in displacement conversion. The X-conversion support beams disposed outside each X-conversion mechanism mass block and the X-conversion support beam anchor points connected to the substrate ensure that each X-conversion mechanism mass block can be constrained to move in its respective direction, maintaining orthogonality in displacement conversion, while also increasing the frequency of the in-phase mode of the entire X-gyro structure 100. For ease of understanding and distinction, in the accompanying drawings, the two X-conversion support beam anchor points corresponding to the first X-conversion mechanism mass block 641 are numbered 621 and 623, respectively, and the two Y-conversion support beams are numbered 631 and 633, respectively. The two X-conversion support beam anchor points corresponding to the second X-conversion mechanism mass block 644 are numbered 626 and 628, respectively, and the two X-conversion support beams are numbered 653 and 654, respectively. The two X-conversion support beam anchor points corresponding to the third X-conversion mechanism mass block 642 are numbered 622 and 625, respectively, and the two X-conversion support beams are numbered 632 and 635, respectively. The two X-conversion support beam anchor points corresponding to the fourth X-conversion mechanism mass block 643 are numbered 624 and 627, respectively, and the two X-conversion support beams are numbered 634 and 637, respectively.

[0070] Please refer to Figure 9 and Figure 12 The working principle of the X-gyro structure 100 is described as follows:

[0071] When the first drive frame 11 performs resonant motion along the Y-axis and the second drive frame 12 performs resonant motion along the Y-axis in the opposite direction to that of the first drive frame 11, the first drive frame 11 drives the first X conversion mechanism mass block 641 to move via the first X-drive decoupling beam 231. The first X conversion mechanism mass block 641 drives the first X detection mass block 31 to perform resonant motion along the Y-axis. The second drive frame 12 drives the second X conversion mechanism mass block 642 to move via the second X-drive decoupling beam 232. The second X conversion mechanism mass block 642 drives the second X detection mass block 32 to perform resonant motion along the Y-axis in the opposite direction to that of the first X detection mass block 31. When an external angular velocity along the X-axis is present, the first X-proofing mass 31 generates a detection displacement in the Z-direction due to the Coriolis force, while the second X-proofing mass 32 generates a detection displacement along the Z-axis in the opposite direction to that of the first X-proofing mass 31 due to the Coriolis force. By placing a lower electrode plate (not shown) on the substrate below the first X-proofing mass 31 and the second X-proofing mass 32, a differential signal can be generated to detect the magnitude of the X-axis angular velocity.

[0072] Specifically, when the first drive frame 11 moves upward along the Y-axis and the second drive frame 12 moves downward along the Y-axis, the first drive frame 11 drives the first X-conversion mechanism mass block 641 to move upward along the Y-axis through the first X-drive decoupling beam 231, and the second drive frame 12 drives the second X-conversion mechanism mass block 644 to move downward along the Y-axis through the second X-drive decoupling beam 232.

[0073] The first X-conversion mechanism mass block 641 converts the upward motion of the first drive frame 11 along the Y-axis into leftward motion of the third X-conversion mechanism mass block 642 along the X-axis via the first X-displacement conversion beam 661. The second X-conversion mechanism mass block 644 converts the downward motion of the first drive frame 12 along the Y-axis into leftward motion of the third X-conversion mechanism mass block 642 along the X-axis via the third X-displacement conversion beam 663. The combined action of the first X-displacement conversion beam 661 and the third X-displacement conversion beam 663 causes the third X-conversion mechanism mass block 642 to move leftward along the X-axis. The third X-conversion mechanism mass block 642 subsequently no longer participates in the structural connection of the X-detection mass block; its sole purpose is to balance the modal stiffness of the XY gyroscope and increase the frequency of the in-phase mode of the X-gyroscope structure 100.

[0074] Similarly, the first X-conversion mechanism mass block 641 converts the upward motion of the first drive frame 11 along the Y-axis into rightward motion of the fourth X-conversion mechanism mass block 643 along the X-axis via the second X-displacement conversion beam 662. The second X-conversion mechanism mass block 644 converts the downward motion along the Y-axis into rightward motion of the fourth X-conversion mechanism mass block 643 along the X-axis via the fourth X-displacement conversion beam 664. The combined action of the second X-displacement conversion beam 662 and the fourth X-displacement conversion beam 664 causes the fourth X-conversion mechanism mass block 643 to move rightward along the X-axis. The fourth X-conversion mechanism mass block 643 subsequently no longer participates in the structural connection of the X-detection mass block. Its primary purpose is to balance the modal stiffness of the XY gyroscope and increase the frequency of the in-phase mode of the X-gyroscope structure 100.

[0075] The key design features of the X-gyro structure 100 provided in the embodiment of the present application include the following:

[0076] First, the X-axis gyro consists of two differential X-proof masses, an X-drive decoupling beam, an X-translation displacement mechanism 611, an X-translation displacement connecting beam, an X-center coupling beam, an X-center coupling block 542, an elastic unit, and X-coupling beam anchors. The X-displacement conversion mechanism is connected to the differential drive frame via two X-drive decoupling beams. The X-translation displacement mechanism 611 within the X-axis gyro structure ensures consistent stiffness of the XY gyro and increases the in-phase modal frequency.

[0077] Second, the two differential X detection masses are connected to the X translation displacement mechanism 611 via an X translation displacement connecting beam. The X translation displacement connecting beam ensures the transmission of in-plane displacement while providing the X detection masses with an out-of-plane degree of freedom. The out-of-plane direction is used to detect the X-axis angular velocity.

[0078] Third, the two differential X-proofing masses are connected via an X-center coupling beam. This beam is secured to the substrate via X-center coupling block 542, an elastic unit, and a coupling beam anchor. This ensures proper displacement coupling between the two differential X-proofing masses while also increasing the stiffness of the in-phase mode, making the frequency of the in-phase mode greater than that of the anti-phase mode. This displacement coupling of the two X-differential proofing masses ensures equal amplitude and synchronization of the differential motion within the bounds of process tolerances.

[0079] Fourth, the X-conversion displacement mechanism 611 primarily consists of two X-conversion mass blocks, an X-displacement conversion beam, an X-conversion support beam, and an X-conversion support beam anchor. The two X-conversion mass blocks are positioned at 90 degrees and connected at a predetermined angle by the X-displacement conversion beam. This allows the X-displacement of one X-conversion mass block to be converted into the X-displacement of the other, and the displacement conversion ratio can be controlled by the angle of inclination.

[0080] Fifth, the two X-conversion mechanism masses are fixed to the anchor points of the X-conversion support beam by the X-conversion support beam, which not only ensures the orthogonality of the displacement transmission but also increases the stiffness of the in-phase mode, making the frequency of the in-phase mode greater than that of the anti-phase mode.

[0081] Sixth, when the differential drive frame performs differential motion in the drive direction, the X-drive coupling beam causes the two differential X-conversion mechanism masses to also perform differential motion in the drive direction. Simultaneously, the X-conversion displacement connecting beam transmits this differential motion to the X-detection mass. Simultaneously, the X-conversion mechanism mass, still via the Y-displacement conversion beam, converts the differential motion of another X-conversion mechanism mass positioned 90 degrees to the X-conversion mechanism mass, but this time it is no longer connected to the X-detection mass. In the presence of an external angular velocity along the X-axis, the X-detection mass generates differential displacement in the out-of-plane direction due to the Coriolis force. By placing a lower electrode on the substrate beneath the X-detection mass, a differential signal is generated, enabling detection of the magnitude of the X-axis angular velocity.

[0082] Please refer again Figure 1 In this embodiment of the present application, the X-, Y-, and Z-gyro structures 100, 300, and 200 share a common drive frame. A first drive frame 11 is located on the upper side and is capable of performing vertical resonant motion along the Y-axis. A second drive frame 12 is located on the lower side, parallel to the first drive frame 11 and spaced a predetermined distance apart, and is capable of performing resonant motion along the Y-axis in the opposite direction to the first drive frame 11. The X-, Y-, and Z-gyro structures 100, 300, and 200 are sequentially and parallelly connected between the first and second drive frames 11, 12. The X-, Y-, and Z-gyro structures 100, 300, and 200 are independent of each other and are all driven by both the first and second drive frames 11, 12. In some embodiments, the driving frame also includes a plurality of first driving frame support beam anchor points arranged on the periphery of the first driving frame 11 and first driving frame support beams respectively connected between each first driving frame support beam anchor point and the first driving frame 11; and a plurality of second driving frame support beam anchor points arranged on the periphery of the second driving frame 12 and second driving frame support beams respectively connected between each second driving frame support beam anchor point and the second driving frame 12.

[0083] For the convenience of distinguishing and describing, the three first drive frame support beam anchor points corresponding to the X gyro structure 100 are numbered 211, 212, and 213, respectively, and the corresponding three first drive frame support beams are numbered 221, 222, and 223, respectively; the one first drive frame support beam anchor point corresponding to the Z gyro structure 200 is numbered 217, and the corresponding first drive frame support beams are numbered 227, respectively; the three first drive frame support beam anchor points corresponding to the Y gyro structure 300 are numbered 219, 2110, and 2111, respectively, and the corresponding three first drive frame support beams are numbered 229, 2210, and 2211, respectively.

[0084] The three second drive frame support beam anchor points corresponding to the X gyro structure 100 are numbered 216, 214, and 215, respectively, and the corresponding three second drive frame support beams are numbered 226, 224, and 225, respectively; the one second drive frame support beam anchor point corresponding to the Z gyro structure 200 is numbered 218, and the corresponding second drive frame support beam is numbered 228; the three second drive frame support beam anchor points corresponding to the Y gyro structure 300 are numbered 2114, 2112, and 2113, respectively, and the corresponding three second drive frame support beams are numbered 2214, 2212, and 2213, respectively.

[0085] Among them, the first drive frame support beam anchor point and the second drive frame support beam anchor point are fixedly set on the base, the first drive frame 11 is connected to the first drive frame support beam anchor point through the first drive frame support beam, the first drive frame 11 and the first drive frame support beam are suspended above the base, the second drive frame 12 is connected to the second drive frame support beam anchor point through the second drive frame support beam, and the second drive frame 12 and the second drive frame support beam are suspended above the base. The first drive frame 11 and the second drive frame 12 are placed parallel to the X-axis. In the direction of the drawing, the X-axis is along the left-right direction and the Y-axis is along the up-down direction. It should be noted that the drive frame support beam must meet the requirement that the X-direction stiffness is much greater than the Y-direction stiffness, so as to limit the first and second frames to strictly perform resonant motion along the Y-direction. As long as the beam structure meets this feature, it can be used as the drive frame support beam, and is not limited to the shape and position shown in the accompanying drawings.

[0086] The three-axis integrated gyroscope architecture provided in the embodiments of the present application has at least the following characteristics:

[0087] First, the drive frame, along with the X-, Y-, and Z-gyro structures 100, 300, and 200, can be placed on a single substrate. This allows for a rational layout of the proof mass blocks and displacement conversion mechanisms within the X / Y / Z gyro structure 200, achieving "one drive, three proofs" and reducing chip size. Furthermore, integrating the three-axis gyros into a single structure offers significant advantages in miniaturization, high integration, and low-cost mass manufacturing.

[0088] Second, since the three-axis gyroscope structure is placed on the same substrate at the same time, it only needs to be assembled once during the packaging process to automatically ensure the orthogonality of the three-axis gyroscope, avoiding the axis misalignment error caused by multiple mechanical assemblies.

[0089] Third, the three-axis gyroscope structure uses the same drive framework and shares the same control loop, which reduces circuit power consumption, optimizes routing complexity, and ensures consistency in the drive frequency of the three axes.

[0090] Fourth, the design introduces a conversion displacement mechanism, which can not only realize the integration of the three-axis gyroscope structure and reduce production costs, but also suppress the in-phase mode, so that the structure has better anti-random vibration performance.

[0091] Fifth, the three-axis gyroscope structure uses differential detection to detect the differential motion of the mass block, and generates a differential signal of the circuit through the change of the capacitor gap, which can effectively reduce the interference of the common-mode signal on the final signal.

[0092] Sixth, in the three-axis gyroscope structure, by adding a central coupling structure between adjacent detection masses, the synchronization and equal amplitude of differential motion can be guaranteed in the case of imperfect etching, further effectively reducing the interference of common-mode signals.

[0093] Seventh, in the three-axis gyroscope structure, the central coupling structure and the fixing method of the displacement conversion mass block and the substrate are further designed, which can greatly improve the stiffness of the in-phase mode, make the frequency of the in-phase mode greater than the anti-phase mode, and have a certain interval, which can greatly improve the vibration resistance of the structure.

[0094] Eighth, the detection masses of the X / Y / Z three-axis gyro structure are independent of each other and do not interfere with each other, reducing the cross-axis coupling error.

[0095] Another embodiment of the present application provides a three-axis gyroscope, comprising a substrate and a three-axis integrated gyroscope architecture as described in any embodiment of the present application, integrated on the substrate. The drive frame may further include a first drive frame 11 and a second drive frame 12, each including comb electrodes, to form a differential drive frame. The differential drive frame is secured to the substrate via a drive frame support beam anchor and a drive frame support beam.

[0096] The above are only specific embodiments of the present application, but the scope of protection of the present application is not limited thereto. Any changes or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in this application should be included in the scope of protection of the present application. Therefore, the scope of protection of the present application should be based on the scope of protection of the claims.

Claims

1. A three-axis integrated gyroscope architecture, characterized in that: include: The driving frame includes a first driving frame and a second driving frame which are parallel to each other and spaced apart from each other; an X-gyro structure, a Y-gyro structure, and a Z-gyro structure arranged in parallel between the first drive frame and the second drive frame, wherein the X-gyro structure, the Y-gyro structure, and the Z-gyro structure are respectively connected to the corresponding frame via a drive decoupling beam; The first drive frame and the second drive frame perform resonant motion along the Y axis, the detection mass blocks in the X gyro structure and the Z gyro structure perform consistent resonant motion with the corresponding frames, and a Y conversion displacement mechanism is provided between the Y gyro structure and the drive frame. The Y conversion displacement mechanism converts the resonant motion of the drive frame along the Y axis into the resonant motion of the Y gyro structure along the X axis.

2. The three-axis integrated gyroscope architecture according to claim 1, characterized in that: The Y gyro structure includes a first Y detection mass block, a second Y detection mass block, and a Y center coupling beam connected between the first Y detection mass block and the second Y detection mass block; the first Y detection mass block and the second Y detection mass block are arranged between the first driving frame and the second driving frame at intervals along the X axis; The Y-conversion displacement mechanism includes a plurality of Y-conversion mechanism masses respectively arranged on the periphery of the first Y-detection mass block and the second Y-detection mass block, and a Y-displacement conversion beam connected between adjacent Y-conversion mechanism mass blocks. The Y-displacement conversion beam is inclined at a preset angle relative to the Y-axis. The preset angle is used to change the ratio of the resonant motion amplitudes of the first Y-detection mass block and the second Y-detection mass block in the Y-axis and X-axis directions.

3. The three-axis integrated gyroscope architecture according to claim 2, characterized in that: The Y conversion mechanism mass block includes a first Y conversion mechanism mass block and a second Y conversion mechanism mass block arranged at intervals along the X-axis direction, and a third Y conversion mechanism mass block and a fourth Y conversion mechanism mass block arranged at intervals along the Y-axis direction; The first Y conversion mechanism mass block is connected to the first driving frame via a first Y drive decoupling beam, and the second Y conversion mechanism mass block is connected to the second driving frame via a second Y drive decoupling beam; The third Y conversion mechanism mass block is connected to the first Y detection mass block through a first Y conversion displacement connecting beam, and the fourth Y conversion mechanism mass block is connected to the second Y detection mass block through a second Y conversion displacement connecting beam. The first Y conversion displacement connecting beam and the second Y conversion displacement connecting beam are used to provide the first Y detection mass block and the second Y detection mass block with degrees of freedom in the out-of-plane direction.

4. The three-axis integrated gyroscope architecture according to claim 2, wherein: The Y-gyro structure further includes Y-conversion support beam anchor points respectively provided on the outer sides of both ends of each Y-conversion mechanism mass block, and a Y-conversion support beam connected between the Y-conversion mechanism mass block and the corresponding Y-conversion support beam anchor points; The Y-conversion support beam and the Y-conversion support beam anchor are connected to the substrate, and are used to constrain the movement of the Y-conversion mechanism mass block in respective directions and the orthogonality of displacement conversion.

5. The three-axis integrated gyroscope architecture according to claim 1, wherein: The Z gyro structure includes a first Z proof mass, a second Z proof mass, and a Z center coupling beam connected between the first Z proof mass and the second Z proof mass. The first Z proof mass and the second Z proof mass are spaced apart along the Y axis between the first drive frame and the second drive frame. The Z center coupling beam couples the displacements of the first Z proof mass and the second Z proof mass, so that the first Z proof mass and the second Z proof mass perform equal-amplitude and synchronous differential motion. The drive decoupling beam includes a first Z drive decoupling beam connecting the first Z detection mass block with the first drive frame, and a second Z drive decoupling beam connecting the second Z detection mass block with the second drive frame. The stiffness of the first Z drive decoupling beam and the second Z drive decoupling beam in the Y-axis direction is greater than the stiffness in the X-axis direction.

6. The three-axis integrated gyroscope architecture according to claim 5, characterized in that: The first Z proof mass and the second Z proof mass each include a Z proof mass support beam anchor point provided at the periphery, and a Z proof mass support beam connecting the Z proof mass support beam anchor point to the corresponding Z proof mass; The Z mass support beam provides the corresponding Z detection mass block with preset stiffness and degrees of freedom in the X-axis and Y-axis directions.

7. The three-axis integrated gyroscope architecture according to claim 6, characterized in that: The Z mass block support beam anchor points are respectively arranged at the four corners of the corresponding Z detection mass block, and the Z mass block support beam includes a first beam portion folded in the X-axis direction and a second beam portion folded in the Y-axis direction, wherein the end of the first beam portion is connected to the corresponding Z mass block support beam anchor point, and the end of the second beam portion is connected to the corner of the corresponding Z detection mass block.

8. The three-axis integrated gyroscope architecture according to claim 5, wherein: The Z-center coupling beam comprises a first Z-center coupling beam and a second Z-center coupling beam symmetrically arranged, wherein the first Z-center coupling beam and the second Z-center coupling beam are respectively bent and connected between the first Z detection mass block and the second Z detection mass block; The Z gyro structure further includes a Z coupling beam anchor point disposed between the first Z detection mass block and the second Z detection mass block, and the first Z center coupling beam and the second Z center coupling beam are respectively connected to the corresponding Z coupling beam anchor point through elastic units.

9. The three-axis integrated gyroscope architecture according to claim 1, wherein: The X-gyro structure includes a first X-proof mass block, a second X-proof mass block, and an X-center coupling beam connected between the first X-proof mass block and the second X-proof mass block; the first X-proof mass block and the second X-proof mass block are arranged between the first drive frame and the second drive frame along the Y-axis. An X-conversion displacement mechanism is provided between the first X-detection mass block, the second X-detection mass block and the driving frame, and the X-conversion displacement mechanism is used to adjust the frequency of the stray mode.

10. The three-axis integrated gyroscope architecture according to claim 9, characterized in that: The X-translation displacement mechanism includes a plurality of X-translation mechanism masses disposed around the first and second X-detection masses, and an X-displacement conversion beam connected between adjacent X-translation mechanism masses. The X-displacement conversion beam is inclined at a predetermined angle relative to the Y-axis. The predetermined angle is used to change the ratio of the resonant motion amplitudes of the first and second X-detection masses in the Y-axis and X-axis directions.

11. The three-axis integrated gyroscope architecture according to claim 9, wherein: The X conversion mechanism mass block includes a first X conversion mechanism mass block and a second X conversion mechanism mass block arranged at intervals along the X-axis direction, and a third X conversion mechanism mass block and a fourth X conversion mechanism mass block arranged at intervals along the Y-axis direction; The first X conversion mechanism mass block is connected to the first drive frame via a first X drive decoupling beam, and is connected to the first X detection mass block via a first X conversion displacement connection beam; the second X conversion mechanism mass block is connected to the second drive frame via a second X drive decoupling beam, and is connected to the second X detection mass block via a second X conversion displacement connection beam; the first X conversion displacement connection beam and the second X conversion displacement connection beam are used to provide the first X detection mass block and the second X detection mass block with degrees of freedom in the out-of-plane direction.

12. The three-axis integrated gyroscope architecture according to claim 9, wherein: The X-gyro structure further includes X-conversion support beam anchor points respectively provided on the outer sides of both ends of each X-conversion mechanism mass block, and an X-conversion support beam connected between the X-conversion mechanism mass block and the corresponding X-conversion support beam anchor points; The X-conversion support beam and the X-conversion support beam anchor are connected to the substrate, and are used to constrain the movement of the X-conversion mechanism mass block in respective directions and the orthogonality of displacement conversion.

13. The three-axis integrated gyroscope architecture according to any one of claims 1 to 12, characterized in that: The driving frame also includes a plurality of first driving frame support beam anchor points arranged on the periphery of the first driving frame and first driving frame support beams respectively connected between each of the first driving frame support beam anchor points and the first driving frame; and a plurality of second driving frame support beam anchor points arranged on the periphery of the second driving frame and second driving frame support beams respectively connected between each of the second driving frame support beam anchor points and the second driving frame.

14. A three-axis gyroscope, characterized in that: The invention comprises a substrate, and a three-axis integrated gyroscope architecture according to any one of claims 1 to 13 which is integrated on the substrate.

15. The three-axis gyroscope according to claim 14, wherein: The first driving frame and the second driving frame respectively include comb-tooth electrodes, forming a differential driving frame; The differential driving frame is fixed on the substrate through the driving frame support beam anchor point and the driving frame support beam.

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