Probe seat Z-axis rapid movement adjusting device for defect positioning

Abstract

The invention relates to the technical field of defect positioning and moving devices, and particularly discloses a probe seat Z-axis rapid moving and adjusting device for defect positioning, which comprises a bottom plate; the X-axis sliding mechanism comprises a first panel, a second panel and a first rotating rod, the first panel is connected with the bottom plate, a first open groove is formed in the upper end of the first panel, the first rotating rod is arranged in the first open groove, a first connecting block is arranged at the lower end of the second panel, and when the first rotating rod rotates, the second panel moves relative to the first panel; the Y-axis sliding mechanism comprises a third panel and a second rotating rod, and the third panel moves relative to the second panel; and the Z-axis sliding mechanism comprises a fourth panel, a fifth panel and a third rotating rod, and the fifth panel moves relative to the fourth panel. The defects that in the prior art, a rapid adjusting device for defect positioning is complex in structure, prone to falling off and inconvenient to install are overcome.

Description

Technical Field

[0001] The present invention relates to the field of defect location moving devices, and in particular to a probe base Z-axis rapid moving adjustment device for defect location. The main application scenario is "a probe base Z-axis rapid moving adjustment device for defect location in the field of thermal & InGaAs EMMI, Obrich & TIVA chip failure analysis (EFA) Background Art

[0002] In semiconductor manufacturing, electronic component testing, and precision instrument inspection, defect localization is crucial for ensuring product quality. As the core component of defect localization systems, the probe holder must precisely control the probe's position on the Z-axis (vertical direction) to contact specific areas of the device under test and complete electrical testing or signal acquisition.

[0003] In the existing technology, the Z-axis of the defect positioning probe seat only contains a fine-tuning knob and is usually adjusted by fixing screws. Therefore, for devices under test of different heights, the Z-axis height needs to be adjusted by disassembling and assembling the screws each time. The operation is complicated and the accuracy cannot be guaranteed. Therefore, it is necessary to develop a probe seat Z-axis rapid movement adjustment device and retain the original probe seat fine-tuning knob to solve the shortcomings of the existing technology. Summary of the Invention

[0004] (1) Technical issues to be resolved The problem to be solved by the present invention is to provide a Z-axis rapid movement adjustment device for a probe seat for defect positioning, so as to overcome the problem that the Z-axis of the probe seat for defect positioning in the prior art cannot be quickly adjusted and the control accuracy cannot be guaranteed. (2) Technical solution In order to solve the above technical problems, the first aspect of the present invention provides a Z-axis rapid movement adjustment device for a probe seat for defect positioning, comprising: base plate; An X-axis sliding mechanism, comprising a first panel, a second panel, and a first rotating rod, wherein the first rotating rod is a threaded rod, the lower end of the first panel is connected to the bottom plate, the upper end of the first panel is provided with a first slot, the first rotating rod is disposed in the first slot, the lower end of the second panel has a first connecting block, the first connecting block is threadedly connected to the first rotating rod, and when the first rotating rod rotates, the second panel is displaced relative to the first panel; A Y-axis sliding mechanism, the Y-axis sliding mechanism comprising a third panel and a second rotating rod, the upper end of the second panel being provided with a second slot, the lower end of the third panel being provided with a second connecting block, the second rotating rod being a threaded rod, the second connecting block being threadedly connected to the second rotating rod, and when the second rotating rod rotates, the third panel is displaced relative to the second panel; A Z-axis sliding mechanism, the Z-axis sliding mechanism comprising a fourth panel, a fifth panel, and a third rotating rod, one end of the fourth panel being connected to the third panel, the other end of the fourth panel being provided with a third slot, one end of the fifth panel being provided with a third connecting block, the third connecting block being threadedly connected to the third rotating rod, and when the third rotating rod rotates, the fifth panel is displaced relative to the fourth panel; The first connecting block, the second connecting block and the third connecting block are respectively located in the first slot, the second slot and the third slot, and outer walls of the first slot, the second slot and the third slot are used for limiting.

[0005] As described above, in the Z-axis rapid movement adjustment device for the defect positioning probe seat, optionally, a fixing block is connected to the fifth panel by bolts.

[0006] As described above, in the Z-axis rapid movement adjustment device for the defect positioning probe base, optionally, the fixed block is connected to the probe fixture via bolts.

[0007] As described above, the Z-axis rapid movement adjustment device for the probe base for defect positioning, optionally, the probe fixture clamps a probe device, and the probe is used to detect whether the test piece is in a passage state.

[0008] As for the Z-axis rapid movement adjustment device for the defect positioning probe seat as described above, optionally, the first rotating rod is connected to the first rotating disk, the second rotating rod is connected to the second rotating disk, and the third rotating rod is connected to the third rotating disk.

[0009] As for the Z-axis rapid movement adjustment device for the defect positioning probe seat as described above, optionally, the lower end of the base plate is connected to a magnetic fixing device, and the magnetic fixing device is used to magnetically fix the base plate.

[0010] As described above, the Z-axis rapid movement adjustment device of the probe seat for defect positioning, optionally, the positioning mechanism includes a first positioning block, a second positioning block and a pin, the positioning mechanism is used for fixed limit, the first positioning block is respectively connected to the two ends of the first slot, the second slot and the third slot, the second positioning block is respectively connected to the two ends of the first connecting block, the second connecting block and the third connecting block, and the pin is arranged between the first positioning block and the second positioning block.

[0011] As for the Z-axis rapid movement adjustment device for the defect positioning probe seat as described above, optionally, each of the positioning mechanisms is respectively arranged perpendicular to the first rotating rod, the second rotating rod and the third rotating rod.

[0012] (3) Beneficial effects The invention provides a Z-axis rapid movement adjustment device for a probe seat for defect positioning, which has the following beneficial effects: The present invention utilizes X-axis, Y-axis, and Z-axis sliding mechanisms to control the directions of the three degrees of freedom. The adjustment method involves driving the first, second, and third rotating rods via the first, second, and third rotating disks, thereby controlling movement in the three degrees of freedom through threaded engagement. This method is structurally simple and offers precise movement during threaded actuation, effectively improving the structure and movement accuracy of the present invention.

[0013] The present invention limits the X-axis sliding mechanism, the Y-axis sliding mechanism, and the Z-axis sliding mechanism through a positioning mechanism. This design can effectively avoid the connection strength between the components of the present invention and prevent them from falling off.

[0014] The present invention uses a magnetic fixing device to install / remove the base plate and the components on the base plate. This design can be modularized, making maintenance and disassembly easier. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0016] Figure 1 A three-dimensional diagram of a Z-axis rapid movement adjustment device of a probe base for defect positioning according to the present invention; Figure 2 A perspective view of a Z-axis rapid movement adjustment device of a probe holder for defect positioning according to the present invention from a second viewing angle; Figure 3 A top view of a Z-axis rapid movement adjustment device for a probe base for defect positioning according to the present invention; Figure 4 A side view of a Z-axis rapid movement adjustment device for a probe holder for defect location according to the present invention; Figure 5 A cross-sectional view of a Z-axis rapid movement adjustment device of a probe holder for defect positioning according to the present invention; Figure 6 A partial cross-sectional view of a Z-axis rapid movement adjustment device of a probe holder for defect positioning according to the present invention; Figure 7 for Figure 6 Partial schematic diagram of A in the figure.

[0017] The names of the components corresponding to the various figure marks in the figure are: 1. base plate; 2. X-axis sliding mechanism; 21. first panel; 22. second panel; 23. first rotating rod; 24. first slot; 25. first connecting block; 3. Y-axis sliding mechanism; 31. third panel; 32. second rotating rod; 33. second slot; 34. second connecting block; 4. Z-axis sliding mechanism; 41. fourth panel; 42. fifth panel; 43. third rotating rod; 44. third slot; 45. third connecting block; 5. fixing block; 51. probe fixture; 52. probe device; 53. first turntable; 54. second turntable; 55. third turntable; 56. magnetic fixing device; 6. positioning mechanism; 61. first positioning block; 62. second positioning block; 63. latch. DETAILED DESCRIPTION

[0018] The present application is described in detail below with reference to the accompanying drawings and specific embodiments.

[0019] The following describes the embodiments of the present application through specific examples, and those skilled in the art can easily understand other advantages and effects of the present application from the contents disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The present application can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present application. It should be noted that, in the absence of conflict, the features in the following embodiments and embodiments can be combined with each other. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without making creative work are within the scope of protection of this application.

[0020] It should be noted that various aspects of the embodiments within the scope of the appended claims are described below. It should be apparent that the aspects described herein can be embodied in a wide variety of forms, and any specific structure and / or function described herein is merely illustrative. Based on this application, it should be understood by those skilled in the art that an aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspect described herein can be used to implement an apparatus and / or practice a method. In addition, other structures and / or functionalities other than one or more of the aspects described herein can be used to implement this apparatus and / or practice this method.

[0021] It should also be noted that the illustrations provided in the following embodiments are only schematic illustrations of the basic concept of the present application. The illustrations only show components related to the present application and are not drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component can be changed at will, and the component layout type may also be more complicated.

[0022] Additionally, in the following description, specific details are provided to provide a thorough understanding of the examples, however, one skilled in the art will appreciate that the examples can be practiced without these specific details.

[0023] The following describes the technical solutions provided by various embodiments of the present application in conjunction with the accompanying drawings.

[0024] See Figures 1 to 7 The present invention provides a Z-axis rapid movement adjustment device for a probe holder for defect location, comprising: a base plate 1, an X-axis sliding mechanism 2, a Y-axis sliding mechanism 3, a Z-axis sliding mechanism 4, and a probe fixture 51. The X-axis sliding mechanism 2 is used to control the movement of the probe fixture 51 in the X-axis direction, the Y-axis sliding mechanism 3 is used to control the movement of the probe fixture 51 in the Y-axis direction, and the Z-axis sliding mechanism 4 is used to control the movement of the probe fixture 51 in the Z-axis direction. The probe fixture 51 holds a probe device 52, which can detect the continuity of the test piece.

[0025] exist Figures 1 to 7 In an optional embodiment, the X-axis sliding mechanism 2 includes a first panel 21, a second panel 22 and a first rotating rod 23. The first rotating rod 23 is a threaded rod. The lower end of the first panel 21 is connected to the base plate 1. A first slot 24 is provided in the upper end of the first panel 21. The first rotating rod 23 is arranged in the first slot 24. The lower end of the second panel 22 has a first connecting block 25. The first connecting block 25 is threadedly connected to the first rotating rod 23. When the first rotating rod 23 rotates, the second panel 22 displaces relative to the first panel 21.

[0026] It should be noted that a positioning mechanism 6 is provided adjacent to the first slot 24 and the first connecting block 25. The positioning mechanism 6 includes a first positioning block 61, a second positioning block 62 and a latch 63, and is used for fixing and limiting.

[0027] Furthermore, first positioning blocks 61 are provided at both ends of the first slot 24, and second positioning blocks 62 are provided at both ends of the first connecting block 25, with the overhead being located between the first positioning blocks 61 and the second positioning blocks 62. The positioning mechanism 6 can assist in the movement of the X-axis sliding mechanism 2 and also serve as a limiter to prevent the first panel 21 and the second panel 22 from falling off.

[0028] At the same time, the first rotating rod 23 is connected to the first rotating disk 53 , and the experimenters in this field can conveniently rotate the first rotating rod 23 by rotating the first rotating disk 53 .

[0029] exist Figures 1 to 7 In an optional embodiment, the Y-axis sliding mechanism 3 includes a third panel 31 and a second rotating rod 32. The upper end of the second panel 22 is provided with a second slot 33, and the lower end of the third panel 31 is provided with a second connecting block 34. The second rotating rod 32 is a threaded rod, and the second connecting block 34 is threadedly connected to the second rotating rod 32. When the second rotating rod 32 rotates, the third panel 31 is displaced relative to the second panel 22.

[0030] It should be noted that a positioning mechanism 6 is provided at adjacent positions of the second slot 33 and the second connecting block 34 .

[0031] Furthermore, first positioning blocks 61 are provided at both ends of the second slot 33, and second positioning blocks 62 are provided at both ends of the second connecting block 34, with the overhead being located between the first positioning blocks 61 and the second positioning blocks 62. The positioning mechanism 6 can assist the movement of the Y-axis sliding mechanism 3 and also serve as a limiter to prevent the second panel 22 and the third panel 31 from falling off.

[0032] At the same time, the second rotating rod 32 is connected to a second rotating disk 54 , and experimenters in this field can conveniently rotate the second rotating rod 32 by rotating the second rotating disk 54 .

[0033] The Z-axis sliding mechanism 4 includes a fourth panel 41, a fifth panel 42 and a third rotating rod 43. One end of the fourth panel 41 is connected to the third panel 31, and the other end of the fourth panel 41 is provided with a third slot 44. One end of the fifth panel 42 is provided with a third connecting block 45, and the third connecting block 45 is threadedly connected to the third rotating rod 43. When the third rotating rod 43 rotates, the fifth panel 42 is displaced relative to the fourth panel 41.

[0034] It should be noted that a positioning mechanism 6 is provided at adjacent positions of the third slot 44 and the third connecting block 45 .

[0035] Furthermore, first positioning blocks 61 are provided at both ends of the third slot 44, and second positioning blocks 62 are provided at both ends of the third connecting block 45, with the overhead being located between the first positioning blocks 61 and the second positioning blocks 62. This positioning mechanism 6 can assist the movement of the Z-axis sliding mechanism 4 and also serve as a limiter to prevent the fourth panel 41 and the fifth panel 42 from falling off.

[0036] At the same time, the third rotating rod 43 is connected to a third rotating disk 55 , and experimenters in this field can conveniently rotate the third rotating rod 43 by rotating the third rotating disk 55 .

[0037] Furthermore, the first connecting block 25 , the second connecting block 34 and the third connecting block 45 are respectively located in the first slot 24 , the second slot 33 and the third slot 44 , and the outer walls of the first slot 24 , the second slot 33 and the third slot 44 are used for limiting.

[0038] Furthermore, a fixing block 5 is connected to the fifth panel 42 via bolts. The fixing block 5 can be used to conveniently fix subsequent components.

[0039] Furthermore, the fixing block 5 is connected to a probe fixture 51 via bolts.

[0040] Furthermore, the probe fixture 51 holds a probe device 52 , and the probe is used to detect whether the test piece is in a passage state.

[0041] Furthermore, a magnetic fixing device 56 is connected to the lower end of the base plate 1, and the magnetic fixing device 56 is used to magnetically fix the base plate 1. In an optional embodiment of the present invention, the magnetic fixing device 56 has a magnetic wrench, and by twisting the magnetic wrench, the base plate 1 can be conveniently fixed / removed.

[0042] Furthermore, each positioning mechanism 6 is respectively arranged perpendicular to the first rotating rod 23 , the second rotating rod 32 and the third rotating rod 43 .

[0043] The same or similar parts between the various embodiments in this specification can be referred to each other, and each embodiment focuses on the differences from other embodiments.

[0044] The above description is merely a specific embodiment of the present application, but the scope of protection of the present application is not limited thereto. Any changes or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in the present application should be included in the scope of protection of the present application. Therefore, the scope of protection of the present application should be based on the scope of protection of the claims.

Claims

1. A Z-axis rapid movement adjustment device for a probe seat for defect positioning, characterized in that: include: Bottom plate (1); An X-axis sliding mechanism (2), the X-axis sliding mechanism (2) comprising a first panel (21), a second panel (22) and a first rotating rod (23), the first rotating rod (23) being a threaded rod, the lower end of the first panel (21) being connected to the bottom plate (1), the upper end of the first panel (21) being provided with a first slot (24), the first rotating rod (23) being arranged in the first slot (24), the lower end of the second panel (22) being provided with a first connecting block (25), the first connecting block (25) being threadedly connected to the first rotating rod (23), and when the first rotating rod (23) rotates, the second panel (22) is displaced relative to the first panel (21); A Y-axis sliding mechanism (3), the Y-axis sliding mechanism (3) comprising a third panel (31) and a second rotating rod (32), the upper end of the second panel (22) being provided with a second slot (33), the lower end of the third panel (31) being provided with a second connecting block (34), the second rotating rod (32) being a threaded rod, the second connecting block (34) being threadedly connected to the second rotating rod (32), and when the second rotating rod (32) rotates, the third panel (31) is displaced relative to the second panel (22); A Z-axis sliding mechanism (4), the Z-axis sliding mechanism (4) comprising a fourth panel (41), a fifth panel (42) and a third rotating rod (43), one end of the fourth panel (41) being connected to the third panel (31), the other end of the fourth panel (41) being provided with a third slot (44), one end of the fifth panel (42) being provided with a third connecting block (45), the third connecting block (45) being threadedly connected to the third rotating rod (43), and when the third rotating rod (43) rotates, the fifth panel (42) is displaced relative to the fourth panel (41); The first connecting block (25), the second connecting block (34) and the third connecting block (45) are respectively located in the first slot (24), the second slot (33) and the third slot (44), and the outer walls of the first slot (24), the second slot (33) and the third slot (44) are used for limiting.

2. The Z-axis rapid movement adjustment device for the probe seat for defect positioning according to claim 1, characterized in that: The fifth panel (42) is connected to a fixing block (5) via bolts.

3. The Z-axis rapid movement adjustment device for the probe seat for defect positioning according to claim 2, characterized in that: The fixed block (5) is connected to a probe fixture (51) via bolts.

4. The Z-axis rapid movement adjustment device for the probe seat for defect positioning according to claim 3, characterized in that: The probe fixture (51) holds a probe device (52), and the probe is used to detect whether the test piece is in a passage state.

5. The Z-axis rapid movement adjustment device for a probe seat for defect positioning according to claim 1, characterized in that: The first rotating rod (23) is connected to the first rotating disk (53), the second rotating rod (32) is connected to the second rotating disk (54), and the third rotating rod (43) is connected to the third rotating disk (55).

6. The Z-axis rapid movement adjustment device for a probe seat for defect location according to claim 1, characterized in that: The lower end of the base plate (1) is connected to a magnetic fixing device (56), and the magnetic fixing device (56) is used to magnetically fix the base plate (1).

7. The Z-axis rapid movement adjustment device for a probe seat for defect location according to claim 1, characterized in that: The positioning mechanism (6) comprises a first positioning block (61), a second positioning block (62) and a bayonet (63). The positioning mechanism (6) is used for fixed limiting. The first positioning block (61) is respectively connected to the two ends of the first slot (24), the second slot (33) and the third slot (44). The second positioning block (62) is respectively connected to the two ends of the first connecting block (25), the second connecting block (34) and the third connecting block (45). The bayonet (63) is arranged between the first positioning block (61) and the second positioning block (62).

8. The Z-axis rapid movement adjustment device for a probe seat for defect location according to claim 7, characterized in that: Each of the positioning mechanisms (6) is respectively arranged perpendicularly to the first rotating rod (23), the second rotating rod (32), and the third rotating rod (43).

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