Multi-focal deformation reflection optical device, laser processing head and laser processing device

Abstract

The invention discloses a multi-focal deformation reflection optical device, a laser processing head and a laser processing device.The multi-focal deformation reflection optical device comprises a reflection lens layer, an integrally-formed actuating layer and a plurality of independent first electrode layers arranged on the integrally-formed actuating layer; one side face of the reflecting lens layer is directly or indirectly attached to one side face of the integrally-formed actuating layer, the other side face of the integrally-formed actuating layer is attached to a plurality of independent first electrode layers, each first electrode layer at least comprises a first pole layer and a second pole layer, and the first pole layer is attached to the second pole layer. And the plurality of independent first electrode layers are used for driving the integrally formed actuating layer to generate different deformation displacements. Therefore, a plurality of focuses can appear after the light beam incident to the reflecting lens layer is reflected by the reflecting lens layer.

Description

Technical Field

[0001] The present invention relates to the field of optical technology, and in particular to a multi-focal deformable reflective optical device, a laser processing head and a laser processing device. Background Art

[0002] In recent years, high-power laser technology has been widely used in fields such as material processing, national defense and military industry, laser spot welding, precision cutting, and nuclear fusion research. With the continuous improvement of laser power density and the growing market demand, the original planar laser process has gradually become insufficient, and technologies for controlling the light field in more dimensions are needed. As a result, several technologies for controlling the focus on the Z axis have been gradually introduced on the market, such as pneumatically driven deformable mirrors, electromagnetic (voice coil) driven lenses, etc. However, these solutions either have a small stroke or a low frequency, and cannot take advantage of the control on the Z axis. In addition, these controls only control a single focus in the direction of the optical axis and cannot achieve the separation of the beam energy. Summary of the Invention

[0003] The present invention provides a multi-focal deformable reflective optical device, a laser processing head and a laser processing device to solve the problems in the related art that only single focus can be adjusted, the adjustment range is small and the frequency is low.

[0004] According to one aspect of the present invention, a multi-focal deformable reflective optical device is provided, comprising: a reflective lens layer, an integrally formed actuating layer, and a plurality of independent first electrode layers arranged on the integrally formed actuating layer, wherein one side of the reflective lens layer is directly or indirectly bonded to one side of the integrally formed actuating layer, and the other side of the integrally formed actuating layer is bonded to the plurality of independent first electrode layers, wherein the first electrode layer comprises at least a first electrode layer and a second electrode layer, and the plurality of independent first electrode layers are used to drive the integrally formed actuating layer to produce different deformation displacements.

[0005] Optionally, the multi-focal deformable reflective optical device further comprises a film layer, and one side surface of the reflective lens layer and one side surface of the integrally formed actuating layer are indirectly bonded together via the film layer.

[0006] Optionally, the membrane layer is used as a second electrode layer and can be used together with the first electrode layer to input electrical energy to the multiple independently driven actuation layers, or,

[0007] The reflective lens layer serves as a second electrode layer and can be used together with the first electrode layer to input electrical energy to the multiple independently driven actuation layers.

[0008] Optionally, the first pole layer is a central pole layer, and the second pole layer is annularly arranged around the central pole layer; and further comprises: an insulating ring located between adjacent ones of the plurality of independently driven actuation layers.

[0009] Optionally, the first polar layer and the second polar layer are concentrically arranged.

[0010] Optionally, the insulating ring is an air gap between the first pole layer and the second pole layer, and a radial dimension of the air gap is greater than a sum of maximum deformation displacements between the first pole layer and the second pole layer.

[0011] Optionally, the insulating ring is formed of an insulating material, is concentrically arranged with the first pole layer and the second pole layer, and the insulating ring between the first pole layer and the second pole layer is arranged between the maximum deformation displacement positions between the first pole layer and the second pole layer.

[0012] Optionally, the reflective lens layer is elliptical, and the surface of the reflective lens layer is a complex curved surface that can be deformed under pressure; the first polar layer is elliptical, and the second polar layer is annular.

[0013] According to another aspect of the present invention, there is provided a laser processing head comprising the multi-focal anamorphic reflective optical device according to any embodiment of the present invention.

[0014] According to another aspect of the present invention, a laser processing device is provided, comprising the laser processing head according to any embodiment of the present invention.

[0015] According to embodiments of the present invention, a multi-focal deformable reflective optical device, a laser processing head, and a laser processing apparatus are provided. The multi-focal deformable reflective optical device comprises: a reflective lens layer, an integrally formed actuating layer, and multiple independent first electrode layers disposed on the integrally formed actuating layer. One side of the reflective lens layer is directly or indirectly bonded to one side of the integrally formed actuating layer, and another side of the integrally formed actuating layer is bonded to the multiple independent first electrode layers. The first electrode layer includes at least a first electrode layer and a second electrode layer. The multiple independent first electrode layers are used to drive the integrally formed actuating layer to produce different deformation displacements. By applying different driving voltages to different first electrode layers, the deformation displacements of the portions of the actuating layer corresponding to each first electrode layer can be different, thereby causing different deformation displacements of the corresponding portions of the reflective lens layer. This allows a light beam incident on the reflective lens layer to have multiple focal points after being reflected by the reflective lens layer. Furthermore, when cutting plates of different depths, the beams with multiple focal points can more thoroughly discharge molten metal, significantly reducing burr generation. At the same time, the light spot on the same plane is intercepted, which has a central point spot and an outer ring spot. The size of this ring can be controlled by the actuation layer, so that when welding different materials and thicknesses, spatter can be suppressed, the penetration depth can be controlled, and a good weld can be formed, among other process advantages.

[0016] It should be understood that the content described in this section is not intended to identify the key or important features of the embodiments of the present invention, nor is it intended to limit the scope of the present invention. Other features of the present invention will become readily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0018] Figure 1 is a schematic structural diagram of a multi-focal deformable reflective optical device provided according to an embodiment of the present invention;

[0019] Figure 2 yes Figure 1 Cross-sectional view in the AA' direction;

[0020] Figure 3 1 is a schematic diagram of a simulated structure of a multi-focal deformable reflective optical device before deformation provided by an embodiment of the present invention;

[0021] Figure 4 1 is a schematic diagram of a simulated structure of a multi-focal deformable reflective optical device after deformation provided by an embodiment of the present invention;

[0022] Figure 5 1 is a schematic diagram of a simulation of the reflection of a light beam by a deformed multi-focal deformable reflective optical device provided by an embodiment of the present invention;

[0023] Figure 6 This is a schematic diagram of another reflection simulation of a light beam after deformation of the multi-focal deformable reflective optical device provided by an embodiment of the present invention;

[0024] Figure 7 Schematic diagram of a light spot formed by the reflection of a light beam after deformation of a multi-focal anamorphic reflective optical device provided by an embodiment of the present invention;

[0025] Figure 8 is a schematic structural diagram of a multi-focal deformable reflective optical device provided according to another embodiment of the present invention;

[0026] Figure 9 yes Figure 8 Cross-sectional view in the BB' direction;

[0027] Figure 10 is a schematic structural diagram of a multi-focal deformable reflective optical device provided by yet another embodiment of the present invention;

[0028] Figure 11is a schematic structural diagram of a multi-focal deformable reflective optical device provided by another embodiment of the present invention;

[0029] Figure 12 is a schematic structural diagram of a multi-focal deformable reflective optical device provided by yet another embodiment of the present invention;

[0030] Figure 13 It is a structural schematic diagram of a multi-focal deformable reflective optical device provided by yet another embodiment of the present invention.

[0031] Reference numerals: 100, reflective lens layer; 200, actuating layer; 301, first pole layer; 302, second pole layer; 400, membrane layer; 500, insulating ring; 600, hollow support. DETAILED DESCRIPTION

[0032] In order to enable those skilled in the art to better understand the solutions of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts should fall within the scope of protection of the present invention.

[0033] It should be noted that the terms "first", "second", etc. in the description and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that the numbers used in this way can be interchanged where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0034] Figure 1 3 is a schematic structural diagram of a multi-focal deformable reflective optical device provided according to an embodiment of the present invention. Figure 2 yes Figure 1 Cross-sectional view in the AA' direction. Figure 1 and Figure 2As shown, the multi-focal deformable reflective optical device includes: a reflective lens layer 100, an integrally formed actuating layer 200, and multiple independent first electrode layers disposed on the integrally formed actuating layer 200. One side of the reflective lens layer 100 is directly or indirectly bonded to one side of the integrally formed actuating layer 200, and the other side of the integrally formed actuating layer 200 is bonded to the multiple independent first electrode layers, wherein the first electrode layer includes at least a first electrode layer 301 and a second electrode layer 302. The multiple independent first electrode layers are used to drive the integrally formed actuating layer 200 to produce different deformation displacements.

[0035] The reflective lens layer 100 can be made of glass, plastic, polyimide, polymethyl methacrylate, polycarbonate, or optical polymer, and is generally 500 to 1500 microns thick. The actuation layer 200 is a piezoelectric layer or a dielectric layer, whose shape can be changed by voltage or current.

[0036] It should be noted that this optical device includes multiple discrete first electrode layers. The portions of the actuation layer 200 corresponding to each first electrode layer can be independently driven by the first electrode layers, causing deformation and displacement. The first electrode layers are positive electrodes. When different voltages are applied to different first electrode layers, the corresponding portions of the actuation layer 200 experience different deformation and displacement. This causes the corresponding portions of the reflective lens layer 100 to deform differently, and consequently, the light beam incident on the reflective lens layer 100 forms different focal points after passing through the deformed reflective lens layer 100.

[0037] The following description is made by taking the case that there are two first electrode layers (the first electrode layer 301 and the second electrode layer 302) as an example. Figure 1 and Figure 2 The optical device includes a first pole layer 301 and a second pole layer 302, as well as a first actuator corresponding to the first pole layer 301 and a second actuator corresponding to the second pole layer 302. When a first driving voltage is applied to the first pole layer 301, the first actuator undergoes a first deformation displacement, and the reflector layer 100 corresponding to the first actuator undergoes a first deformation displacement. When a second driving voltage is applied to the second pole layer 302, the second actuator undergoes a second deformation displacement, and the reflector layer 100 corresponding to the second actuator undergoes a second deformation displacement. The first driving voltage and the second driving voltage are different, and the first deformation displacement and the second deformation displacement are different. Consequently, a light beam incident on the reflector layer 100 with the first deformation displacement is reflected by the reflector layer 100 to form a first focal point, while a light beam incident on the reflector layer 100 with the second deformation displacement is reflected by the reflector layer 100 to form a second focal point. The first and second focal points are substantially coaxial, which allows for more complete discharge of molten metal when cutting plates of varying depths, significantly reducing burr formation.

[0038] It is understood that the specific magnitude of the driving voltage applied to the actuation layer 200, the resulting deformation displacement, and the corresponding focal position of the reflective lens layer 100 can be determined through simulation or actual testing. In actual use, this can then be reversed, using the focal position of the laser beam required to cut a sheet of material of a corresponding thickness to determine the required deformation displacement. The magnitude of the driving voltage to drive the corresponding actuation unit is then determined based on the required deformation displacement.

[0039] in, Figure 3 1 is a schematic diagram of a simulated structure of a multi-focal deformable reflective optical device before deformation provided by an embodiment of the present invention; Figure 4 1 is a schematic diagram of a simulated structure of a multi-focal deformable reflective optical device after deformation provided by an embodiment of the present invention; Figure 5 1 is a schematic diagram of a simulation of the reflection of a light beam by a deformed multi-focal deformable reflective optical device provided by an embodiment of the present invention; Figure 6 This is another simulation diagram of reflection of a light beam after deformation of the multi-focal deformable reflective optical device provided by an embodiment of the present invention. Figure 7 FIG. 1 is a schematic diagram of a light spot formed by the reflection of a light beam after deformation of a multi-focal deformable reflective optical device provided by an embodiment of the present invention. In the simulation process, two first electrode layers are still used as an example. Figure 3 In the embodiment, no driving voltage is applied to the actuating layer 200, and neither the actuating layer 200 nor the reflective lens layer 100 is deformed. Figure 4 In the embodiment, the driving voltage of the first actuating part is different from the driving voltage of the second actuating part. It can be seen that the deformation of the first actuating part and the reflective lens layer 100 is gentle, while the deformation of the second actuating part and the reflective lens layer 100 is relatively steep. Furthermore, the deformation of the middle part and the outer ring part of the reflective lens layer 100 is different, that is, the curvature changes of the middle and the periphery are different, and finally the result is Figure 5 and Figure 6 The two separate focal points A and B in the cutting machine enable the molten metal to be discharged more thoroughly when cutting plates of different depths, significantly reducing burr generation. Figure 7 The light spot formed in one embodiment of the present invention (for example, the light spot at focus A or the light spot at focus B) is shown in FIG. Figure 7 As can be seen, the spot consists of a central spot and an outer ring. For welding, this device can generate a spot ring and other spots, and the size of this ring can be controlled by the actuation layer. This allows for welding of different materials and thicknesses while suppressing spatter, controlling penetration, and achieving good welds.

[0040] It should be noted that in the above embodiment, the optical device also includes a second electrode layer. The second electrode layer can be disposed between the reflective lens layer 100 and the actuation layer 200, serving as a negative electrode and forming an electrical circuit with each first electrode layer. The actuation layer 200 is located between the first and second electrode layers, and the second electrode layer can be a single layer.

[0041] In this embodiment, if the reflective lens layer 100 is a conductive layer, it can also be used as the second electrode layer, ie, the cathode layer.

[0042] In other embodiments, each first electrode layer may also be configured to have other shapes, and may be configured accordingly according to the spot shape required by actual cutting requirements.

[0043] Optionally, Figure 8 2 is a schematic structural diagram of a multi-focal deformable reflective optical device according to another embodiment of the present invention. Figure 9 yes Figure 8 Cross-sectional view in the BB' direction. Figure 8 and Figure 9 As shown, the multi-focal deformable reflective optical device further includes a film layer 400 , and one side of the reflective lens layer 100 and one side of the integrally formed actuating layer 200 are indirectly bonded together via the film layer 400 .

[0044] It should be noted that the film layer 400 can be a metal film layer (such as aluminum, copper, etc.), an alloy film layer, a semi-metal film layer (such as carbon, silicon, etc.), or glass, plastic, or glass ceramic. The film layer 400 primarily supports the reflective lens layer 100, the actuating layer 200, and the first electrode layers. Its thickness is generally between 50 and 230 microns.

[0045] In the optical axis direction of the multi-focal deformable reflective optical device, the projected outline size of the reflective lens layer 100 is smaller than the projected outline size of the film layer 400 , and the projected outline size of the actuating layer 200 is smaller than the projected outline size of the film layer 400 .

[0046] The projected outline dimensions of the reflective lens layer 100 can be the same as the projected outline dimensions of the actuating layer 200. Since the multifocal deformable reflective optical device needs to be mounted within a frame for later use, the film layer 400 can be mounted within the frame, while the reflective lens layer 100 and the actuating layer 200 can be positioned away from the frame. This prevents the frame from exerting a compressive force on the reflective lens layer 100 and the actuating layer 200, thereby preventing the deformation of the reflective lens layer 100 and the actuating layer 200 from being affected. Furthermore, in the direction from which the reflective lens layer 100 points toward the film layer 400, the radial dimension of the outer contour of the film layer 400 is greater than the radial dimension of the outer contour of the reflective lens layer 100, facilitating the subsequent installation of the entire optical device.

[0047] The reflective lens layer 100 and the film layer 400 may be bonded together using resin glue, the film layer 400 and the actuating layer 200 may be bonded together using resin glue, and the actuating layer 200 and the first electrode layer may be bonded together using resin glue.

[0048] Figure 10 FIG2 is a schematic structural diagram of a multi-focal deformable reflective optical device provided by another embodiment of the present invention. The multi-focal deformable reflective optical device further includes a hollow support 600 , which is used to fix the film layer 400 and expose the reflective lens layer 100 and the actuating layer 200 .

[0049] The hollow support 600 can be a fastening member that snaps together from top to bottom, allowing the film layer 400 to be sandwiched between the hollow support 600. After the film layer 400 is sandwiched, it is secured by snapping or bolting. The shape of the hollow portion of the hollow support 600 can be the same as that of the reflective lens layer 100.

[0050] In this embodiment, if the film layer 400 is a conductive layer, it can be used as the second electrode layer, ie, the negative electrode.

[0051] Optionally, the membrane layer 400 is used as the second electrode layer and can be used together with the first electrode layer to input electrical energy to a plurality of independently driven actuation layers, or,

[0052] The reflective lens layer 100 serves as the second electrode layer and can be used together with the first electrode layer to input electrical energy to a plurality of independently driven actuation layers.

[0053] When the film layer 400 or the reflective lens layer 100 serves as the second electrode layer, the conductive-only electrode layer corresponding to the first electrode layer can be omitted. This reduces the overall thickness of the optical device. For example, when the film layer 400 serves as the conductive layer, it can be made of copper, aluminum, or the like, and when the reflective lens layer 100 serves as the conductive layer, it can be made of gold, silver, aluminum, or the like.

[0054] Optionally, continue to refer to Figure 1 、 Figure 2 、 Figure 8 and Figure 9 The first pole layer 301 is the central actuating layer, and the second pole layer 302 is annularly arranged around the central actuating layer; the optical device also includes: an insulating ring 500 located between the first pole layer 301 and the second pole layer 302.

[0055] It is understood that to prevent adjacent first electrode layers from aligning when a driving voltage is applied, the spacing between adjacent first electrode layers is determined based on the maximum radial deformation displacement of adjacent actuation layers after voltage is applied. Furthermore, the first electrode layer 301 and the second electrode layer 302 are concentrically arranged. This simplifies the process flow.

[0056] In one embodiment, the insulating ring 500 is an air gap between the first pole layer 301 and the second pole layer 302 , and a radial dimension of the air gap is greater than the sum of the maximum deformation displacements between the first pole layer 301 and the second pole layer 302 .

[0057] It is understood that since the actuating portion of the actuating layer 200 corresponding to the first electrode layer deforms after a driving voltage is applied to the first electrode layer, the deformed actuating portion will cause the first electrode layer to move, or cause the first electrode layer to also undergo a corresponding slight deformation. Furthermore, an insulating ring 500 is required between adjacent first electrode layers to isolate them and prevent them from aligning after the corresponding actuating portion deforms. Therefore, the sum of the maximum deformation displacements described above can be understood as the deformation of the actuating portion corresponding to the first electrode layer.

[0058] Figure 11 FIG. 1 is a schematic structural diagram of a multi-focal deformable reflective optical device provided by another embodiment of the present invention. Figure 11 As shown, the maximum deformation displacement of the first actuating portion after voltage is applied is D1, and the maximum deformation displacement of the second actuating portion after voltage is applied is D2. Then, the air gap distance D3 is greater than D1+D2. In this way, it is possible to avoid contact between the first actuating portion and the second actuating portion after deformation due to voltage application, which would result in different actuating portions being driven by the same voltage or causing circuit short circuits.

[0059] In this embodiment, adjacent first electrode layers are merely spaced apart to insulate the adjacent first electrode layers, which simplifies the process and saves costs.

[0060] In another embodiment, the insulating ring 500 is formed of an insulating material and is concentrically arranged with the first pole layer 301 and the second pole layer 302, and the insulating ring 500 between the first pole layer 301 and the second pole layer 302 is arranged between the maximum deformation displacement positions between the first pole layer 301 and the second pole layer 302.

[0061] Figure 12 FIG. 1 is a structural diagram of a multi-focal deformable reflective optical device provided by another embodiment of the present invention. Figure 12 As shown, based on the previous embodiment, in this embodiment, an insulating material is provided on the ring distance D3-D1-D2 to further prevent the first electrode layer contact problem that may occur when adjacent actuation layers are deformed.

[0062] The insulating material of the insulating ring 500 can be ceramic, glass, plastic, rubber or fiber (polyimide). Figure 12In one embodiment, the insulating ring 500 can be arranged between the maximum deformation displacement position of the first actuator part and the maximum deformation displacement position of the second actuator part. In this way, it is possible to avoid contact between the first pole layer 301 and the second pole layer 302 after the first actuator part and the second actuator part are deformed by the application of voltage, which may cause different actuator parts to be driven by the same voltage, or cause problems such as circuit short circuit. The radial dimension of the insulating ring 500 can be set according to actual conditions, and the maximum size does not exceed the distance between the maximum deformation displacement position of the first actuator part and the maximum deformation displacement position of the second actuator part. In other words, it does not exceed the distance between the maximum deformation displacement position of the first pole layer 301 and the maximum deformation position of the second pole layer 302.

[0063] Optionally, Figure 13 FIG. 1 is a schematic structural diagram of a multi-focal deformable reflective optical device provided by another embodiment of the present invention. Figure 13 As shown, the reflective lens layer 100 is elliptical, and the surface of the reflective lens layer 100 is a complex curved surface that can be deformed under pressure; the first polar layer 301 is elliptical, and the second polar layer 302 is annular.

[0064] There is a certain width between the reflective lens layer 100 and the hollow support 600, and there is also a certain width between the outer edge of the actuating layer 200 and the hollow support 600. To avoid astigmatism at the focal point when light is incident at an angle on a multifocal anamorphic reflective optical device, different radii of curvature are required on two orthogonal axes of the optical device. This means that the reflective lens layer 100 is configured as an elliptical toric lens. In other words, a toric surface is a surface with different radii of curvature in at least two directions.

[0065] The width between the reflective lens layer 100 and the hollow support 600 can be determined according to the incident angle of the light beam incident on the multi-focal anamorphic reflective optical device, and can generally be selected within the range of 0.2 mm to 15 mm.

[0066] It should be noted that the principle behind the design of the mirror layer of conventional elliptical lenses is elliptical:

[0067] For oblique incident light (incident angle α = 45°), the mirror surface needs to present a set of different curvature radii Rx and Ry to eliminate astigmatism after reflection and make the reflected beam properly focused in two orthogonal directions. In theory, these two curvature radii should satisfy Rx / Ry = cos 2 45°.

[0068] In one embodiment, the actuation layer 200 can be elliptical, the first electrode layer 301 can be elliptical, and the second electrode layer 302 can be annular. The annular shape can be elliptical or other annular shapes. The first actuation portion corresponding to the first electrode layer 301 is elliptical, and the second actuation portion corresponding to the second electrode layer 302 is annular. In this embodiment, the outer contour of the actuation layer 200 is consistent with that of the reflective lens layer 100. The shapes of each first electrode layer are identical to those of the reflective lens layer 100, and the major and minor axes of the outermost first electrode layer are also identical to those of the reflective lens layer 100. Furthermore, the hollow portion of the hollow support 600 is also elliptical, with the major and minor axes in the same ratio as those of the reflective lens layer 100 and each actuation layer, simplifying the process steps.

[0069] In other embodiments, the film layer 400 may be circular in shape to increase the pressing area of ​​the hollow support 600 on the film layer 400 , so that the film layer 400 is not easily fallen off in the hollow support 600 .

[0070] Thus, the optical device obtained by the embodiment of the present invention uses multi-layer concentric elliptical electrodes (inner ring, outer ring and expandable to N rings) to drive the elliptical PZT (piezoelectric ceramic) drive partition. The driving voltage can be applied independently to each ring area to achieve local differentiated deformation and multi-focus generation. The dual-focus spot works synergistically at different depths to more thoroughly discharge the molten metal and significantly reduce burr generation, which is particularly advantageous when cutting plates with a thickness of 5-20mm. A high dielectric strength insulating layer is deposited between adjacent electrode rings, and a free edge area is reserved at the edge of each ring to accurately control the curvature response difference of each ring area, suppress electric field coupling and high-voltage breakdown, and improve thermal stability and reliability. It is driven by a multi-channel ±100-500V high-voltage amplifier with a bandwidth of ≥10kHz per channel, fully utilizing the μs-ms level response characteristics of the PZT material to achieve high-frequency dynamic compensation and multi-focus superposition in the optical axis direction. Not only can the focus position be adjusted in the optical axis direction, but multiple focuses can also be formed. It has a compact structure, flexible drive, and resistance to high heat loads.

[0071] According to another aspect of the present invention, there is provided a laser processing head comprising the multi-focal anamorphic reflective optical device according to any embodiment of the present invention.

[0072] According to another aspect of the present invention, a laser processing device is provided, comprising the laser processing head according to any embodiment of the present invention.

[0073] Among them, the laser processing head can achieve the aforementioned effects of the present invention, which will not be described in detail here.

[0074] In summary, according to embodiments of the present invention, a multi-focal deformable reflective optical device, a laser processing head, and a laser processing apparatus are proposed. The multi-focal deformable reflective optical device comprises: a reflective lens layer, an integrally formed actuating layer, and multiple independent first electrode layers disposed on the integrally formed actuating layer. One side of the reflective lens layer is directly or indirectly bonded to one side of the integrally formed actuating layer, and another side of the integrally formed actuating layer is bonded to the multiple independent first electrode layers. The first electrode layer includes at least a first electrode layer and a second electrode layer. The multiple independent first electrode layers are used to drive the integrally formed actuating layer to produce different deformation displacements. By applying different driving voltages to different first electrode layers, the deformation displacements of the portions of the actuating layer corresponding to each first electrode layer can be different, thereby causing different deformation displacements of the corresponding portions of the reflective lens layer. This allows a light beam incident on the reflective lens layer to have multiple focal points after being reflected by the reflective lens layer. Furthermore, when cutting plates of different depths, the beams with multiple focal points can more thoroughly discharge molten metal, significantly reducing burr generation. At the same time, the light spot on the same plane is intercepted, which has a central point spot and an outer ring spot. The size of this ring can be controlled by the actuation layer, so that when welding different materials and thicknesses, spatter can be suppressed, the penetration depth can be controlled, and a good weld can be formed, among other process advantages.

[0075] It should be understood that the various forms of the processes shown above can be used to reorder, add, or delete steps. For example, the steps described in the present invention can be performed in parallel, sequentially, or in a different order, as long as the desired results of the technical solution of the present invention can be achieved. This is not limited herein.

[0076] The above specific embodiments do not limit the scope of protection of the present invention. Those skilled in the art will appreciate that various modifications, combinations, sub-combinations, and substitutions may be made based on design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention are intended to be included within the scope of protection of the present invention.

Claims

1. A multi-focal deformable reflective optical device, characterized in that: The invention comprises: a reflective lens layer, an integrally formed actuating layer, and a plurality of independent first electrode layers arranged on the integrally formed actuating layer, wherein one side of the reflective lens layer is directly or indirectly bonded to one side of the integrally formed actuating layer, and the other side of the integrally formed actuating layer is bonded to the plurality of independent first electrode layers, wherein the first electrode layer comprises at least a first electrode layer and a second electrode layer, and the plurality of independent first electrode layers are used to drive the integrally formed actuating layer to produce different deformation displacements.

2. The multi-focal anamorphic reflective optical device according to claim 1, wherein: It also includes a film layer, and one side of the reflective lens layer and one side of the integrally formed actuating layer are indirectly bonded together through the film layer.

3. The multi-focal anamorphic reflective optical device according to claim 2, wherein: The membrane layer is used as a second electrode layer and can be used together with the first electrode layer to input electrical energy to the integrally formed actuation layer, or, The reflective lens layer serves as a second electrode layer and can be used together with the first electrode layer to input electrical energy to the integrally formed actuating layer.

4. The multi-focal anamorphic reflective optical device according to claim 1, wherein: The first pole layer is a central pole layer, and the second pole layer is annularly arranged around the central pole layer; and further includes: an insulating ring located between the first pole layer and the second pole layer.

5. The multi-focal anamorphic reflective optical device according to claim 4, characterized in that: The first pole layer and the second pole layer are concentrically arranged.

6. The multi-focal anamorphic reflective optical device according to claim 4, wherein: The insulating ring is an air gap between the first pole layer and the second pole layer, and a radial dimension of the air gap is greater than a sum of maximum deformation displacements between the first pole layer and the second pole layer.

7. The multi-focal anamorphic reflective optical device according to claim 4, wherein: The insulating ring is formed of an insulating material and is concentrically arranged with the first pole layer and the second pole layer, and the insulating ring between the first pole layer and the second pole layer is arranged between the maximum deformation displacement positions between the first pole layer and the second pole layer.

8. The multi-focal anamorphic reflective optical device according to claim 1, wherein: The reflective lens layer is elliptical, and the surface of the reflective lens layer is a complex curved surface that can be deformed under pressure; The first polar layer is elliptical, and the second polar layer is annular.

9. A laser processing head, characterized in that: The invention comprises a multi-focal deformable reflective optical device as described in any one of claims 1 to 8.

10. A laser processing device, characterized in that: Comprising the laser processing head according to claim 9.

Images