Material carrying control method and material carrying system

Abstract

The invention relates to a material carrying control method and a material carrying system.The method is applied to an automatic control system EAP, and the automatic control system EAP is used for conducting information interaction with a manufacturing execution system MES and a carrying control system MCS so as to achieve automatic carrying of materials. The material carrying control method comprises the steps that a feeding carrying request of process equipment needing feeding is reported to a manufacturing execution system MES; setting the state of the process equipment needing to be loaded as a locking state of prohibiting reporting of a loading carrying request; and after cargo arrival information reported by the process equipment needing to be loaded is received, the locking state is relieved. The automatic control system EAP used for controlling the process equipment converts the state of the process equipment into a locking state after receiving a loading carrying request reported by the process equipment needing to be loaded, and unlocks the locking state until goods reported by the process equipment arrive. And invalid carrying caused by repeated material carrying due to repeated reporting of the feeding carrying request is avoided.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor product manufacturing, and in particular to a material handling control method and a material handling system. Background Art

[0002] In the field of semiconductor production and manufacturing, such as silicon wafer manufacturing and integrated circuit production, material handling is usually handled by handling equipment, such as automated guided vehicles (AGVs) and / or overhead hoist transports (OHTs), which load or unload materials for process equipment by executing dispatch instructions issued by the material control system (MCS).

[0003] At present, the automatic handling system in manufacturing is uniformly issued by the upper-level MES (Manufacturing Execution System) / RTD (Real Time Dispatcher) / DSP (Demand-Supply Planning). The command dispatch is based on the status RTL (request for loading), ARRIVE (goods arrival), RTU (request for return), REMOVE (goods removal) reported by the EAP (Equipment Automation Program) on the process equipment side, and the Transfer complete (handling task completion) status reported by the automatic handling system MCS (Material Control System, MCS).

[0004] Because the RTL / RTU status is reported to the MES system by the process equipment side via the EAP system, and the instruction transfer completion status is reported to the MES system by the MCS system, it was found during actual on-site operations that due to the differences in control content and logic between the two systems, there was a delay in reporting the status to the MES system, resulting in the MES system's RTD repeatedly dispatching transfer instructions, causing invalid transfers. Summary of the Invention

[0005] To address the above technical issues, the present invention provides a material handling control method and system. These methods address the issue of delays in reporting status to the Manufacturing Execution System (MES) due to differences in control content and logic between the automated handling system (MCS) and the automated control system (EAP). This delay results in the MES's real-time scheduler (RTD) repeatedly dispatching handling instructions, leading to ineffective handling.

[0006] To achieve the above objectives, the technical solution adopted in an embodiment of the present invention is: a material handling control method, the method being applied to an automated control system EAP, the automated control system EAP being used to exchange information with a manufacturing execution system MES and a handling control system MCS to achieve automatic material handling, the material handling control method comprising:

[0007] Report the material handling request of the process equipment that needs to be loaded to the manufacturing execution system MES;

[0008] Set the status of the process equipment that needs to be loaded to a locked state that prohibits reporting of loading and handling requests;

[0009] After receiving the information of the arrival of the goods reported by the process equipment to be loaded, the locking state is released.

[0010] Optionally, after reporting the material handling request of the process equipment that needs to be loaded to the manufacturing execution system MES, the following steps are also included:

[0011] Receive material handling instructions and move materials to the process equipment where they are required to be loaded.

[0012] Optionally, a material handling request for the process equipment that needs to be loaded is reported to the Manufacturing Execution System (MES), specifically including:

[0013] Report the material handling request of the process equipment that needs to be loaded to the manufacturing execution system MES, as well as the identity information of the process equipment that needs to be loaded.

[0014] An embodiment of the present invention further provides a material handling control method, which is applied to a manufacturing execution system (MES). The manufacturing execution system (MES) is used to interact with an automation control system (EAP) and a handling control system (MCS) to achieve automatic material handling. The material handling control method includes:

[0015] Receive the material handling request for the process equipment that needs to be loaded reported by the automation control system EAP;

[0016] Issue material handling instructions to the handling control system MCS;

[0017] Receive the completion of the material handling task reported by the handling control system MCS, and the arrival of the goods reported by the automation control system EAP, and the completion of the material handling instruction.

[0018] An embodiment of the present invention further provides a material handling control method, which is applied to a handling control system MCS. The handling control system MCS is used to exchange information with a manufacturing execution system MES and an automation control system EAP to realize automatic material handling. The material handling control method includes:

[0019] Receive material handling instructions issued by the manufacturing execution system MES;

[0020] Assign handling tasks to handling equipment;

[0021] After the material arrives at the process equipment that needs to be loaded, the completion of the handling task is reported to the manufacturing execution system MES.

[0022] An embodiment of the present invention further provides a material handling system, comprising a manufacturing execution system MES, a handling control system MCS, an automation control system EAP and at least one process equipment;

[0023] The automated control system EAP is used to report the material loading and handling request of the process equipment that needs to be loaded to the manufacturing execution system MES after receiving the material loading and handling request of the process equipment that needs to be loaded;

[0024] The manufacturing execution system MES is used to issue material handling instructions to the handling control system MCS;

[0025] The transport control system MCS is used to assign transport tasks to transport equipment and report the completion of material transport tasks to the manufacturing execution system MES after the material transport is completed;

[0026] The automated execution system EAP is also used to change the status of the process equipment that needs to be loaded to a locked state that prohibits reporting of loading and handling requests after reporting the loading and handling request of the process equipment that needs to be loaded to the manufacturing execution system MES, and to release the locked state of the process equipment after the process equipment that needs to be loaded reports that the goods have arrived.

[0027] An embodiment of the present invention further provides a material handling control method, which is applied to the above-mentioned material handling system. The material handling control method includes:

[0028] The automated execution system EAP receives the material loading and handling request of the process equipment that needs to be loaded;

[0029] The automation execution system EAP reports the material loading and handling request of the process equipment that needs to be loaded to the manufacturing execution system MES, and changes the status of the process equipment that needs to be loaded to a locked state that prohibits reporting the material loading and handling request;

[0030] The manufacturing execution system MES issues material handling instructions to the handling control system MCS;

[0031] The transport control system MCS assigns transport tasks to transport equipment and reports the completion of material transport tasks to the manufacturing execution system MES after the material transport is completed;

[0032] After receiving a report from the process equipment that needs to be loaded with materials that the goods have arrived, the automated execution system EAP releases the locked state of the process equipment.

[0033] An embodiment of the present invention also provides an electronic device, comprising a memory, a processor, and one or more programs stored in the memory and executable on the processor. When the one or more programs are executed by the processor, the electronic device executes the above-mentioned material handling control method.

[0034] An embodiment of the present invention further provides a readable storage medium, on which a program or instruction is stored. When the program or instruction is executed by a processor, the steps of the material handling control method as described above are implemented.

[0035] The beneficial effect of the present invention is that the automated control system EAP for controlling process equipment, after receiving a loading and handling request reported by the process equipment that needs to load materials, converts the state of the process equipment into a locked state until the arrival of the goods reported by the process equipment is received, and then releases the locked state, thereby avoiding invalid handling of materials caused by repeated reporting of loading and handling requests. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1 It represents the material handling control method in an embodiment of the present invention;

[0037] Figure 2 It shows the material handling control method in an embodiment of the present invention. DETAILED DESCRIPTION

[0038] To make the purpose, technical solutions, and advantages of the embodiments of the present disclosure more clear, the technical solutions of the embodiments of the present disclosure will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, not all of the embodiments. Based on the described embodiments of the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0039] Unless otherwise defined, the technical or scientific terms used in this disclosure should have the usual meanings understood by people with ordinary skills in the field to which this disclosure belongs. The words "first", "second" and similar words used in this disclosure do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, words such as "one", "an" or "the" do not indicate a quantity limitation, but rather indicate the existence of at least one. Words such as "include" or "comprise" mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. Words such as "connect" or "connected" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the object being described changes, the relative positional relationship may also change accordingly.

[0040] As used in the embodiments of the present disclosure, the terms "parallel," "perpendicular," and "identical" include the strict sense of "parallel," "perpendicular," and "identical," as well as "approximately parallel," "approximately perpendicular," and "approximately identical" with respect to a certain tolerance, which, taking into account the tolerances associated with the measurement of a particular quantity (e.g., limitations of the measurement system), means within an acceptable range of deviation for a particular value as determined by one of ordinary skill in the art. For example, "approximately" can mean within one or more standard deviations, or within 3% or 5% of the stated value.

[0041] In addition, in this document, unless otherwise defined, the terms "substantially," "essentially," "approximately," and "about" are used to describe and explain small variations. When used in connection with an event or circumstance, these terms can encompass situations where the event or circumstance occurs exactly, as well as situations where the event or circumstance occurs approximately. For example, when used in connection with a numerical value, these terms can include a range of variation of less than or equal to 10% of the numerical value, such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, less than or equal to ±0.05%. The term "substantially coplanar" can refer to two surfaces being aligned along the same plane within the micrometer range, for example, within 40 μm, 30 μm, 20 μm, 10 μm, or 1 μm.

[0042] The automation control system (Equipment Automation Program, EAP) monitors the status of the process equipment by interacting with the process equipment (Equipment, EQP), and EAP can also report information to the Manufacturing Execution System (MES). MES can interact with the Real Time Dispatch System (RTD) and, based on the interaction results, issue the handling instructions to the automatic handling system MCS (Material Control System, MCS). Based on the handling instructions, MCS dispatches handling tasks to the automatic guided vehicle (AGV) and / or overhead hoist transport (OHT) as the automated handling equipment, so that the AGV and / or OHT transport the materials required by the process equipment from the material storage system (STK) to the process equipment. It can be understood that the process equipment EQP can be a process execution equipment of any process node in the wafer manufacturing process, such as a crystal pulling furnace, a multi-wire saw, a grinding equipment, a polishing equipment, a cleaning equipment, etc., which will not be described in detail in this disclosure.

[0043] At present, the automatic handling system in manufacturing is uniformly issued by the upper-level MES (Manufacturing Execution System) / RTD (Real Time Dispatcher) / DSP (Demand-Supply Planning). The command dispatch is based on the status RTL (request for loading), ARRIVE (goods arrival), RTU (request for return), REMOVE (goods removal) reported by the EAP (Equipment Automation Program) on the process equipment side, and the Transfer complete (handling task completion) status reported by the automatic handling system MCS (Material Control System, MCS).

[0044] If the process equipment reports the RTL (request to load) status through the EAP system, the MES system issues a loading instruction. After the goods arrive at the process equipment, the EAP system reports ARRIVE (goods arrival), and the MCS reports Transfercomplete of the instruction. The MES system then considers that the instruction has completed the transfer.

[0045] Because the RTL / RTU status is reported to the MES system by the process equipment side via the EAP system, and the instruction transfer completion status is reported to the MES system by the MCS system, it was found during actual on-site operations that due to the differences in control content and logic between the two systems, there was a delay in reporting the status to the MES system, resulting in the MES system's RTD repeatedly dispatching transfer instructions, causing invalid transfers.

[0046] For example: the process equipment reports RTL (request for loading), the RTD of the MES system generates a handling instruction, the MCS system dispatches an automated handling equipment instruction, and after the product is transported to the process equipment, the MCS system reports Transfer complete (handling task completed). However, due to some internal action logic on the process equipment side, such as positioning, code scanning, etc., there is a delay in reporting the ARRIVE (goods arrival) status, causing the status of the process equipment to still be RTL (request for loading). The MES system checks that the MCS system has no instructions sent to the process equipment, so it will reissue the handling instruction to the process equipment. In fact, there is already material on the process equipment, resulting in invalid transportation.

[0047] refer to Figure 1 To address the above issues, this embodiment provides a material handling control method. The method is applied to an automated control system (EAP). The automated control system (EAP) is used to exchange information with a manufacturing execution system (MES) and a handling control system (MCS) to achieve automatic material handling. The material handling control method includes:

[0048] Report the material handling request of the process equipment that needs to be loaded to the manufacturing execution system MES;

[0049] Set the status of the process equipment that needs to be loaded to a locked state that prohibits reporting of loading and handling requests;

[0050] After receiving the information of the arrival of the goods reported by the process equipment to be loaded, the locking state is released.

[0051] A BLK (block lock) state is added between the existing RTL (request for loading, i.e. loading and handling request) and ARRIVE (goods arrival) states. When the manufacturing execution system MES receives the RTL state generated instruction reported by the process equipment end through the automation control system EAP, the handling control system MCS dispatches the automated handling equipment to transport the materials. In the process of using the automated handling equipment to transport the materials to the target process equipment (i.e. the process equipment that needs to be loaded), the state of the target process equipment is processed through manual interaction or automatic control. First, the state of the target process equipment is switched from RTL to Block state. After the automated handling equipment completes the material delivery, the handling control system MCS reports to the manufacturing execution system MES Transfer complete (handling task completed), and the automated handling equipment leaves. However, because the target process equipment still needs to perform actions such as positioning and code scanning on the materials, ARRIVE (goods arrival) cannot be reported if these actions are not completed. However, because the status of the process equipment has switched to BLK status, the real-time scheduler RTD of the manufacturing execution system MES will not issue the transportation instruction again until the status of the process equipment switches to the next RTL status (only after the process equipment reports the arrival of the goods will it be unlocked so that the loading and transportation request can be reported the next time loading is needed), thus completely solving the problem of invalid transportation caused by the time difference of such status reporting.

[0052] It should be noted that each process equipment is provided with a material buffer at the loading port. The material buffer can buffer multiple materials, allowing the process equipment to report a loading request to the automated control system EAP after multiple loadings, eliminating the need to report a loading request after each loading, thereby reducing the probability of the process equipment entering an idle state. However, each loading requires a certain amount of time. If the state of the process equipment is changed to a locked state after each loading request and before the arrival of the goods is reported, there will be vacancies in the material buffer, but the material cannot be loaded in time, increasing the probability of the process equipment entering an idle state. Therefore, in some embodiments, when the process equipment that needs to load materials reports a loading request, the status of the materials cached in the material buffer is reported, including the number of vacant material buffers. If the preset conditions are met, the state of the process equipment is changed to a locked state until the goods are reported by the process equipment, i.e., the locked state is released, waiting for the next reporting of the loading and handling request.

[0053] The preset condition can be set according to actual needs. For example, the number of vacant material cache locations is less than or equal to a preset value. The preset value can be zero, but is not limited thereto.

[0054] In some implementations, to effectively avoid the issuance of duplicate handling instructions due to delays in reporting status, the preset value can be 1, 2, or 3. This can be determined based on the time between the process equipment reporting the loading request and the arrival of the goods, as well as the quantity of goods loaded at one time. For example, if the number of goods that can be loaded simultaneously at one time is 2, the preset value can be set to 3, meaning that the number of vacant material buffer locations is greater than the number of goods that can be loaded at one time. This can prevent ineffective handling while avoiding excessive vacant material buffer locations, thereby improving efficiency.

[0055] After a process device that requires material loading submits a material handling request, if the number of available material buffer locations exceeds a preset value, the status of the process device will not be changed. This means that if the number of available material buffer locations exceeds a preset value, the status of the process device will not be locked, and the process device can still be in the loading request state, ensuring continuous operation and improving efficiency.

[0056] For example, to avoid ineffective handling, a setting can be set where, after a preset time period has passed since a process device reported a loading and handling request, if the process device has not reported the arrival of goods, the state of the process device will be changed to locked. This can reduce the probability of idleness of the process device and prevent ineffective handling caused by delayed reporting of goods arrival by the process device.

[0057] It should be noted that the preset time can be set according to actual needs. For example, the preset time can be the time from when the process equipment reports the loading request to when the goods arrive.

[0058] It should be noted that the time from when the process equipment reports the loading request to when the goods arrive is a relatively accurate time obtained through multiple statistics and calculations. For example, the time from when the process equipment reports the loading request to when the goods arrive is obtained multiple times, and the average value obtained by adding them up is used as the preset time.

[0059] In an exemplary real-time manner, after reporting a material handling request for a process device requiring material loading to a manufacturing execution system (MES), the following steps are further included:

[0060] Receive material handling instructions and move materials to the process equipment where they are required to be loaded.

[0061] Specifically, after the process equipment reports the material loading and handling request, the manufacturing execution system MES issues a handling instruction, the handling control system MCS receives the material handling instruction, and transports the material to the process equipment where the material needs to be loaded.

[0062] In an exemplary embodiment, reporting a material handling request for a process device requiring material loading to a manufacturing execution system (MES) specifically includes:

[0063] Report the material handling request and the identity information of the process equipment to be loaded to the Manufacturing Execution System (MES), so that the automated handling equipment can accurately transport the materials to the process equipment to be loaded.

[0064] In an exemplary embodiment, when multiple process equipment simultaneously submit material handling requests, the Manufacturing Execution System (MES) creates a handling plan based on priority and issues sequential handling instructions. This priority can include factors such as the time the material arrives at the process equipment, the distance it travels to, the urgency of the material's need, and the number of handling equipment. For example, materials may be prioritized for handling to closer process equipment.

[0065] For example, the material handling plan can also be set by the handling control system MCS, that is, the manufacturing execution system MES only issues material handling instructions to the handling control system MCS, and the specific handling plan is set by the handling control system MCS according to the number of specific handling equipment, etc.

[0066] An embodiment of the present invention further provides a material handling control method, which is applied to a manufacturing execution system (MES). The manufacturing execution system (MES) is used to interact with an automation control system (EAP) and a handling control system (MCS) to achieve automatic material handling. The material handling control method includes:

[0067] Receive the material handling request for the process equipment that needs to be loaded reported by the automation control system EAP;

[0068] Issue material handling instructions to the handling control system MCS;

[0069] Receive the completion of the material handling task reported by the handling control system MCS, and the arrival of the goods reported by the automation control system EAP, and the completion of the material handling instruction.

[0070] An embodiment of the present invention further provides a material handling control method, which is applied to a handling control system MCS. The handling control system MCS is used to exchange information with a manufacturing execution system MES and an automation control system EAP to realize automatic material handling. The material handling control method includes:

[0071] Receive material handling instructions issued by the manufacturing execution system MES;

[0072] Assign handling tasks to handling equipment;

[0073] After the material arrives at the process equipment that needs to be loaded, the completion of the handling task is reported to the manufacturing execution system MES.

[0074] An embodiment of the present invention further provides a material handling system, comprising a manufacturing execution system MES, a handling control system MCS, an automation control system EAP and at least one process equipment;

[0075] The automated control system EAP is used to report the material loading and handling request of the process equipment that needs to be loaded to the manufacturing execution system MES after receiving the material loading and handling request of the process equipment that needs to be loaded;

[0076] The manufacturing execution system MES is used to issue material handling instructions to the handling control system MCS;

[0077] The transport control system MCS is used to assign transport tasks to transport equipment and report the completion of material transport tasks to the manufacturing execution system MES after the material transport is completed;

[0078] The automated execution system EAP is also used to change the status of the process equipment that needs to be loaded to a locked state that prohibits reporting of loading and handling requests after reporting the loading and handling request of the process equipment that needs to be loaded to the manufacturing execution system MES, and to release the locked state of the process equipment after the process equipment that needs to be loaded reports that the goods have arrived.

[0079] refer to Figure 2 The embodiment of the present invention further provides a material handling control method, which is applied to the above-mentioned material handling system. The material handling control method includes:

[0080] The automated execution system EAP receives the material loading and handling request of the process equipment that needs to be loaded;

[0081] The automation execution system EAP reports the material loading and handling request of the process equipment that needs to be loaded to the manufacturing execution system MES, and changes the status of the process equipment that needs to be loaded to a locked state that prohibits reporting the material loading and handling request;

[0082] The manufacturing execution system MES issues material handling instructions to the handling control system MCS;

[0083] The transport control system MCS assigns transport tasks to transport equipment and reports the completion of material transport tasks to the manufacturing execution system MES after the material transport is completed;

[0084] After receiving a report from the process equipment that needs to be loaded with materials that the goods have arrived, the automated execution system EAP releases the locked state of the process equipment.

[0085] It should be noted that the automated execution system EAP controls multiple process equipment. Therefore, when reporting a material handling request for a process equipment that needs to be loaded, the identity information of the process equipment that needs to be loaded and the information of the required materials must be reported at the same time.

[0086] The transport control system MCS can control multiple transport equipment, which can be one of an unmanned transport vehicle (AGV), an overhead hoist transport (OHT), a stacker crane, and a conveyor, but is not limited to this.

[0087] In an exemplary embodiment, when multiple process equipment simultaneously reports material handling requests, the manufacturing execution system MES includes the priority order of the multiple material handling instructions when issuing multiple material handling instructions to the handling control system MCS.

[0088] The priority of multiple material handling instructions can be set according to actual needs, such as the urgency of loading materials, the time required to complete the handling instructions, etc.

[0089] An embodiment of the present invention also provides an electronic device, comprising a memory, a processor, and one or more programs stored in the memory and executable on the processor. When the one or more programs are executed by the processor, the electronic device executes the above-mentioned material handling control method.

[0090] An embodiment of the present invention further provides a readable storage medium, on which a program or instruction is stored. When the program or instruction is executed by a processor, the steps of the material handling control method as described above are implemented.

[0091] The above-mentioned computer-readable storage medium implements the steps in the above-mentioned method embodiments when the computer program stored in its memory is executed by the processor. Similarly, it can bring about the beneficial effects brought by the above-mentioned silicon wafer placement method, which will not be repeated here.

[0092] Those skilled in the art will appreciate that all or part of the processes in the above-mentioned embodiment methods can be implemented by instructing the relevant hardware through a computer program, and the computer program can be stored in a non-volatile computer-readable storage medium. When the computer program is executed, it can include the processes of the embodiments of the above-mentioned methods. Among them, any reference to memory, storage, database or other media used in the embodiments provided in this application may include at least one of non-volatile and volatile memory. Non-volatile memory may include read-only memory (ROM), magnetic tape, floppy disk, flash memory or optical memory, etc. Volatile memory may include random access memory (RAM) or external cache memory. As an illustration and not limitation, RAM can be in various forms, such as static random access memory (SRAM) or dynamic random access memory (DRAM).

[0093] There are a few points to note:

[0094] (1) The drawings of the embodiments of the present disclosure only relate to the structures related to the embodiments of the present disclosure. Other structures may refer to conventional designs.

[0095] (2) For the sake of clarity, the thickness of layers or regions in the drawings used to describe the embodiments of the present disclosure are exaggerated or reduced, i.e., these drawings are not drawn to scale. It is understood that when an element such as a layer, film, region, or substrate is referred to as being "on" or "under" another element, the element may be "directly" "on" or "under" the other element or intervening elements may be present.

[0096] (3) In the absence of conflict, the embodiments of the present disclosure and the features therein may be combined with each other to form new embodiments.

[0097] It will be understood that the above embodiments are merely exemplary embodiments for illustrating the principles of the present invention, and the present invention is not limited thereto. Those skilled in the art will appreciate that various modifications and improvements can be made without departing from the spirit and substance of the present invention, and such modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A material handling control method, characterized in that: The method is applied to an automated control system EAP, which is used to exchange information with a manufacturing execution system MES and a handling control system MCS to achieve automatic material handling. The material handling control method includes: Report the material handling request of the process equipment that needs to be loaded to the manufacturing execution system MES; Set the status of the process equipment that needs to be loaded to a locked state that prohibits reporting of loading and handling requests; After receiving the information of the arrival of the goods reported by the process equipment to be loaded, the locking state is released.

2. The material handling control method according to claim 1, characterized in that: After reporting the material handling request of the process equipment that needs to be loaded to the Manufacturing Execution System (MES), it also includes: Receive material handling instructions and move materials to the process equipment where they are required to be loaded.

3. The material handling control method according to claim 1, characterized in that: Report the material handling request of the process equipment that needs to be loaded to the Manufacturing Execution System (MES), including: Report the material handling request of the process equipment that needs to be loaded to the manufacturing execution system MES, as well as the identity information of the process equipment that needs to be loaded.

4. A material handling control method, characterized in that: Applied to a manufacturing execution system (MES), the manufacturing execution system (MES) is used to interact with an automation control system (EAP) and a handling control system (MCS) to achieve automatic material handling. The material handling control method includes: Receive the material handling request for the process equipment that needs to be loaded reported by the automation control system EAP; Issue material handling instructions to the handling control system MCS; Receive the completion of the material handling task reported by the handling control system MCS, and the arrival of the goods reported by the automation control system EAP, and the completion of the material handling instruction.

5. A material handling control method, characterized in that: Applied to a transport control system MCS, the transport control system MCS is used to exchange information with a manufacturing execution system MES and an automation control system EAP to achieve automatic material handling. The material handling control method includes: Receive material handling instructions issued by the manufacturing execution system MES; Assign handling tasks to handling equipment; After the material arrives at the process equipment that needs to be loaded, the completion of the handling task is reported to the manufacturing execution system MES.

6. A material handling system, characterized in that: Including manufacturing execution system MES, handling control system MCS, automation control system EAP and at least one process equipment; The automated control system EAP is used to report the material loading and handling request of the process equipment that needs to be loaded to the manufacturing execution system MES after receiving the material loading and handling request of the process equipment that needs to be loaded; The manufacturing execution system MES is used to issue material handling instructions to the handling control system MCS; The transport control system MCS is used to assign transport tasks to transport equipment and report the completion of material transport tasks to the manufacturing execution system MES after the material transport is completed; The automation control system EAP is also used to change the status of the process equipment that needs to be loaded to a locked state that prohibits reporting of loading and handling requests after reporting the loading and handling request of the process equipment that needs to be loaded to the manufacturing execution system MES, and to release the locked state of the process equipment after the process equipment that needs to be loaded reports that the goods have arrived.

7. A material handling control method, characterized in that: Applied to the material handling system according to claim 6, the material handling control method comprises: The automated execution system EAP receives the material loading and handling request of the process equipment that needs to be loaded; The automation execution system EAP reports the material loading and handling request of the process equipment that needs to be loaded to the manufacturing execution system MES, and changes the status of the process equipment that needs to be loaded to a locked state that prohibits reporting the material loading and handling request; The manufacturing execution system MES issues material handling instructions to the handling control system MCS; The transport control system MCS assigns transport tasks to transport equipment and reports the completion of material transport tasks to the manufacturing execution system MES after the material transport is completed; After receiving a report from the process equipment that needs to be loaded with materials that the goods have arrived, the automated execution system EAP releases the locked state of the process equipment.

8. An electronic device, characterized in that: The electronic device comprises a memory, a processor, and one or more programs stored in the memory and executable on the processor. When the one or more programs are executed by the processor, the electronic device executes the material handling control method according to any one of claims 1 to 5 and claim 7.

9. A readable storage medium, characterized in that: The readable storage medium stores a program or instruction, and when the program or instruction is executed by the processor, the steps of the material handling control method according to any one of claims 1 to 5 and claim 7 are implemented.

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