Torque sensor module

By designing sensitivity and stiffness adjustment holes on the torque sensor module and combining strain gauges and circuit boards to process signals, the problem of sensitivity and stiffness compromise in the existing technology is solved, and high-precision z-axis torque detection and control is achieved.

CN120712465APending Publication Date: 2025-09-26AL ROBOT CO LTD
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Patent Information

Application Number
CN202480015156.9
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Priority Date
2023-03-02
Filing Date
2024-01-15
Publication Date
2025-09-26

AI Technical Summary

Technical Problem

When existing torque sensor modules detect z-axis torque, there is a trade-off between sensitivity and stiffness, which makes it difficult to optimize both simultaneously, resulting in decreased accuracy when subject to external force interference.

Method used

A torque sensor module is designed. Multiple sensitivity adjustment holes and stiffness adjustment holes are formed on the main body along the circumferential direction. Strain gauges are attached on both sides of the strain measurement holes. Signal processing is combined with a circuit board to optimize the combination of stiffness and sensitivity.

Benefits of technology

The stiffness and sensitivity of the torque sensor are improved, the influence of external force interference on the measurement is reduced, and the precise detection and control of the z-axis torque is achieved.

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Abstract

A torque sensor module according to the present invention may include: a main body in which a first sensitivity adjustment hole, a strain measurement hole, a second sensitivity adjustment hole, and a stiffness adjustment hole are repeatedly formed in a circumferential direction between a center hole and an outer circumferential surface; and a pair of strain gauges attached to both side wall surfaces of the strain measurement hole, in which the center of the first sensitivity adjustment hole, the center of the second sensitivity adjustment hole, and the center of the stiffness adjustment hole are disposed at the same first distance from the center of the main body, and the center of the first sensitivity adjustment hole, the center of the second sensitivity adjustment hole, and the center of the stiffness adjustment hole are disposed at the same second distance from the center of the main body. The strain measurement hole has a trapezoid shape in which the length of a side on the center side is greater than the length of a side on the outer peripheral surface side, and the arc of the first distance crosses at least a partial region of the trapezoid shape.
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Description

Technical Field

[0001] The present invention relates to a torque sensor module, and in particular to a torque sensor module capable of improving sensitivity and rigidity in structure compared with the prior art. Background Art

[0002] Industrial robots typically use torque sensors, typically mounted on the robot's wrist, to measure the force applied by mechanisms mounted on the robot arm to manipulated objects. However, due to the complexity of dynamic analysis and the accumulation of errors associated with torque sensors mounted on robot joints, intelligent service robots have recently gained more attention than industrial robots.

[0003] When a robot arm or other parts collide with an external object or person, there is a problem of being unable to sense it and difficulty ensuring safety through dynamic response. Most current intelligent robots operate in unknown and unregulated environments, so industrial robots must operate with a higher priority on robot and human safety. For example, even when affected by crosstalk such as forces generated by human pushes or collisions (bending forces), a robot arm must detect the rotational force on the xy plane of a rectangular coordinate system, i.e., the z-axis torque (Tz), and precisely control it.

[0004] Related prior art documents include Patent Application No. 10-2009-0115343 (November 26, 2009). However, conventional torque sensor modules, such as those mounted on robotic arms to detect z-axis torque (Tz), experience a trade-off between sensitivity and stiffness. In such conventional torque sensor modules, strain gauges are attached to spokes 300, a connection that supports this stiffness. This makes optimizing stiffness and sensitivity difficult, and limits performance. Summary of the Invention

[0005] Technical issues Therefore, the present invention aims to solve the above-mentioned problems. An object of the present invention is to provide a torque sensor module installed in a robot arm, etc. to detect z-axis torque (Tz), which can simultaneously improve sensitivity and rigidity.

[0006] Technical Solution First, the features of the present invention are summarized as follows. A torque sensor module of an embodiment of the present invention for achieving the above-mentioned purpose may include: a main body, in which a first sensitivity adjustment hole, a strain measurement hole, a second sensitivity adjustment hole and a stiffness adjustment hole are repeatedly formed in a circumferential direction between a central hole and an outer peripheral surface; and a pair of strain gauges, with a strain gauge attached to each of the two side walls of the strain measurement hole, wherein the center of the first sensitivity adjustment hole, the center of the second sensitivity adjustment hole and the center of the stiffness adjustment hole are arranged at the same first distance from the center of the main body, and the strain measurement hole is a trapezoid in which the length of the side on the center side is greater than the length of the side on the outer peripheral surface side, and the arc of the first distance spans at least a portion of the area of ​​the trapezoid.

[0007] The first sensitivity adjustment hole and the second sensitivity adjustment hole may have the same shape.

[0008] Alternatively, the stiffness adjustment hole may be plural, and the plural stiffness adjustment holes may have the same shape as the first sensitivity adjustment hole and the second sensitivity adjustment hole.

[0009] Alternatively, the stiffness adjustment hole may be plural, and the plural stiffness adjustment holes may have shapes different from those of the first sensitivity adjustment hole and the second sensitivity adjustment hole.

[0010] The stiffness adjustment hole may be in plurality, and the plurality of stiffness adjustment holes may include two or more shapes different from each other.

[0011] A size of the stiffness adjustment hole may be the same as a size of the first sensitivity adjustment hole and a size of the second sensitivity adjustment hole.

[0012] The size of the stiffness adjustment hole is preferably larger than the sizes of the first sensitivity adjustment hole and the second sensitivity adjustment hole.

[0013] The torque sensor module may further include a circuit board connected to the signal lines of each strain gauge of the strain gauge pair, wherein the strain gauge pair is respectively attached to each strain measurement hole of the plurality of strain measurement holes, and the circuit board digitally processes the plurality of strain detection signals received from the plurality of signal lines to calculate the torque value at each of the strain measurement holes, and uses the torque value to calculate the torque value for a specified axis in a manner that is not affected by crosstalk.

[0014] Beneficial effects The torque sensor module of the present invention improves stiffness and minimizes displacement caused by external forces (crosstalk), enabling the measurement of pure torque. Furthermore, its increased sensitivity enhances the accuracy and resolution of strain sensor operation. In existing torque sensor modules, strain gauges are attached to spokes to support this stiffness, making it difficult to optimize stiffness and sensitivity and limiting performance.

[0015] By installing the torque sensor module of the present invention, which has both sensitivity and rigidity, on a robotic arm, it is possible to accurately provide detection information from the strain gauge, thereby achieving high performance. For example, even when affected by crosstalk such as forces generated by human push or collision (z-axis bending force), it is possible to assist in precisely controlling the rotational force on the xy plane, i.e., the z-axis torque (Tz). BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The accompanying drawings, which are provided as a part of the detailed description to help understand the present invention, provide embodiments of the present invention and, together with the detailed description, explain the technical concept of the present invention.

[0017] Figure 1 This is a schematic perspective view of a torque sensor module according to an embodiment of the present invention.

[0018] Figure 2 for Figure 1 Front view of the torque sensor module in Figure 1.

[0019] Figure 3 FIG. 4 is a front view of a torque sensor module according to another embodiment of the present invention.

[0020] Figure 4 FIG. 4 is a front view of a torque sensor module according to another embodiment of the present invention.

[0021] Figure 5 FIG. 4 is a front view of a torque sensor module according to another embodiment of the present invention.

[0022] Figure 6 This is an example of a torque calculation circuit using a strain gauge according to the present invention. DETAILED DESCRIPTION

[0023] Hereinafter, the present invention will be described in detail with reference to the accompanying drawings. At this time, in each of the accompanying drawings, the same reference numerals are used to mark the same components as much as possible. In addition, detailed descriptions of known functions and / or features are omitted. The content disclosed below focuses on the parts required to understand the operation of multiple embodiments, and omits the description of multiple elements that may confuse the main points of the description. In addition, some of the components in the drawings may be exaggerated, omitted or shown schematically. The dimensions of each component do not fully reflect the actual dimensions. Therefore, the content recorded here is not limited to the relative dimensions or spacing of the multiple components in each of the accompanying drawings.

[0024] When describing multiple embodiments of the present invention, when the specific description of the known technology related to the present invention is judged to be likely to confuse the main points of the present invention, its detailed description is omitted. In addition, multiple terms described later are multiple terms defined based on the functions considered in the present invention, which may change according to the intention or convention of the user or operator. Therefore, it should be defined according to the content of the full text of the specification of the present invention. The terms used in the detailed description are only used to record multiple embodiments of the present invention and are not restrictive. Unless clearly distinguished, the expression in the singular form includes the meaning of the plural form. In the present invention, expressions such as "including" or "having" are used to refer to certain characteristics, numbers, steps, actions, elements, a part thereof or a combination thereof, and should not be interpreted as excluding the existence or possibility of one or more other characteristics, numbers, steps, actions, elements, a part thereof or a combination thereof other than those described.

[0025] In addition, terms such as first and second are used to describe a plurality of components, but the plurality of components are not limited to these terms, and the plurality of terms are only used to distinguish one component from other components.

[0026] Figure 1 FIG. 1 is a schematic perspective view of a torque sensor module 100 according to an embodiment of the present invention.

[0027] Figure 2 for Figure 1 A front view of the torque sensor module 100 in FIG.

[0028] Reference Figure 1 and Figure 2A torque sensor module 100 according to an embodiment of the present invention may include: a circular body 110 having a specified thickness; a pair of strain gauges 121 and 122 attached to each of a plurality of strain measurement holes 112 of the body 110; and a circuit board 130 connected to signal lines, the signal lines coming from each of the strain gauges 121 and 122 of the plurality of strain gauge pairs 120, the strain gauge pairs 120 attached to each of the plurality of strain measurement holes 112.

[0029] As shown in the figure, the circuit board 130 can be manufactured in the form of a ring-shaped printed circuit board (PCB) and mounted on one of the two surfaces of the main body 110. The circuit board 130 can be manufactured so that no portion of the circuit board 130 obstructs the portion spanning the central hole 119 of the main body 110, leaving it open. The circuit board 130 is mounted on the main body 110 and detects torque (Tz) along any axis in a rectangular coordinate system (e.g., xyz), specifically the z-axis, through the central hole 119 of the main body 110. The circuit board 130 can be positioned along a predetermined axis, such as a robot arm, to be controlled. The circuit board 130 can include circuit components such as amplifiers, analog-to-digital (AD) converters, and a computing unit for digitally processing the multiple detection signals received from the multiple signal lines of the strain gauges 121 and 122 to calculate torque values.

[0030] The torque sensor module 100 of the present invention aims to increase the rigidity of the main body 110, minimizing displacement caused by external forces (crosstalk). This allows for the measurement of pure torque, while also improving sensitivity. This enhances the accuracy and resolution of strain sensor operation. In existing torque sensor modules, strain gauges are attached to spokes to support this rigidity, making it difficult to optimize rigidity and sensitivity and limiting performance.

[0031] By installing the torque sensor module 100 of the present invention, which has both sensitivity and rigidity, on a robotic arm, it is possible to accurately provide detection information from the strain gauges 121 and 122, thereby achieving high performance. For example, even if affected by crosstalk such as forces generated by human push or collision (z-axis bending force), it can assist in precisely controlling the rotational force on the xy plane, that is, the z-axis torque (Tz).

[0032] For this reason, Figure 1 and Figure 2As shown, the main body 110 is provided with a first sensitivity adjustment hole 111, a strain measurement hole 112, a second sensitivity adjustment hole 113 and a stiffness adjustment hole 114 along the circumferential direction between the central hole 119 and the outer peripheral surface, and the first sensitivity adjustment hole 111, the strain measurement hole 112, the second sensitivity adjustment hole 113 and the stiffness adjustment hole 114 are repeated in sequence to form more than two.

[0033] One stiffness adjustment hole 114 may be formed between the second sensitivity adjustment hole 113 and the first sensitivity adjustment hole 111 , or preferably, a plurality of stiffness adjustment holes 114 may be formed in an appropriate number so as to maintain the stiffness of the torque sensor module 100 and appropriately reduce the total weight.

[0034] A first sensitivity adjustment hole 111 and a second sensitivity adjustment hole 113 are formed on either side of the strain measurement hole 112 at a predetermined distance from the strain measurement hole 112. Furthermore, a plurality of stiffness adjustment holes 114 may be formed at predetermined intervals along the circumference. Each of the holes at the ends of the stiffness adjustment hole 114 may also be spaced a predetermined distance from the first sensitivity adjustment hole 111 or the second sensitivity adjustment hole 113.

[0035] The strain measurement hole 112 is a hole for attaching strain gauges 121 and 122. The strain gauges 121 and 122 are used to measure the strain exerted on the torque sensor module 100 at the position where the torque sensor module 100 is located. As shown in the figure, the strain gauge pair 120 has a strain gauge attached to each of the two side walls of the strain measurement hole 112, that is, the two side walls in the circumferential direction, facing each other.

[0036] Preferably, a first sensitivity adjustment hole 111 and a second sensitivity adjustment hole 113 symmetrically formed on both sides of the strain measuring hole 112 are located at predetermined positions separated from the strain measuring hole 112 in the circumferential direction and are formed to an appropriate size so that the strain gauges 121, 122 generate detection signals that measure appropriate deformation rates at this position.

[0037] Furthermore, when the strain measurement hole 112 is formed into a trapezoidal shape with the length of the central side longer than the peripheral side, it facilitates measuring the deformation rate of the strain gauges 121 and 122. The sensitivity of the strain gauges 121 and 122 can vary depending on their placement, the distance from the first and second sensitivity adjustment holes 111 and 113, or the hole size. Therefore, it is preferable to set the distance from the first and second sensitivity adjustment holes 111 and 113 and the hole size appropriately, depending on the intended purpose. Furthermore, the circumferential side walls of the trapezoidal shape, to which the strain gauges 121 and 122 are attached, should also be symmetrically formed with appropriate inclinations. For example, the angle θ between the extension of a line connecting the center of the trapezoid and the center O of the torque sensor module 100 and the extension of each of the two side walls of the trapezoidal shape is preferably 50 degrees or less (θ is greater than 0).

[0038] In addition, the first sensitivity adjustment hole 111, the second sensitivity adjustment hole 113 and the stiffness adjustment hole 114 are illustrated as circular, but are not limited thereto and may be formed into various shapes such as circular, elliptical or polygonal shapes such as trapezoidal, triangular, quadrilateral, pentagonal or the like.

[0039] Multiple stiffness adjustment holes 114 can be formed at predetermined intervals along the circumference. The stiffness adjustment holes 114 are appropriately sized, spaced, and numbered between the second sensitivity adjustment hole 113 and the first sensitivity adjustment hole 111 to maintain a predetermined stiffness. In a related prior art document, patent application No. 10-2009-0115343 (November 26, 2009), the measuring instrument is attached to the spokes 300, resulting in a structure that cannot guarantee stiffness and sensitivity. However, the stiffness adjustment holes 114 of the present invention are not spoke-shaped, but rather holes formed on the outer circumference of the main body 110 itself. This improves stiffness compared to a spoke-shaped design, thereby maintaining the desired shape of the torque sensor module 100.

[0040] Further, if Figure 1 and Figure 2 As shown, preferably, the centers of the first sensitivity adjustment hole 111, the second sensitivity adjustment hole 113, and the stiffness adjustment hole 114 are spaced apart from the center O of the main body 110 by the same first distance r1. This allows uniformly providing deformation rate detection information regarding deformation in any direction.

[0041] Like the first sensitivity adjustment hole 111, the second sensitivity adjustment hole 113, and the stiffness adjustment hole 114, the trapezoidal strain measurement hole 112 can be formed so that its center is located at the same first distance r1 from the center O, that is, located on the same arc relative to the center O. However, the present invention is not limited thereto. The strain measurement hole 112 can be configured so that at least a portion of its area (the space inside the hole) other than the four sides of the trapezoid is spanned by an arc spaced the first distance r1 from the center O.

[0042] Furthermore, the sensitivity of the strain gauges 121 and 122 may differ depending on their positions on the side walls of the strain measurement hole 112. For example, when the trapezoidal strain measurement hole 112 is formed such that its center is located at a position spaced the same first distance r1 from the center O, i.e., located on the same arc around the center O, as is the case with the first sensitivity adjustment hole 111, the second sensitivity adjustment hole 113, and the stiffness adjustment hole 114, the strain gauges 121 and 122 may be arranged such that the centers of their bottom surfaces are spaced the same first distance r1 from the center O. However, it is preferred that the strain gauges 121 and 122 be arranged such that the centers of their bottom surfaces are spaced apart within the trapezoidal hole by a distance less than the first distance r1.

[0043] exist Figure 1 and Figure 2 In the embodiment, not only can an appropriate number of stiffness adjustment holes 114 be formed to maintain the stiffness of the torque sensor module 100 while appropriately reducing the total weight, but an appropriate number of multiple holes 150 can also be formed on the remaining surface of the main body 110 at different second distances r2 from the center O to further reduce the weight. In addition, an appropriate number of multiple holes 160 can also be formed on the remaining surface of the main body 110 at different third distances r3 from the center O. These holes 111, 112, 113, 114, 150, and 160 can also be used to install cables for connecting to the circuit board 130, cables or components for connecting to other parts of the robot, and the like.

[0044] Figure 3 FIG. 2 is a front view of a torque sensor module 200 according to another embodiment of the present invention.

[0045] Reference Figure 3 In another embodiment of the torque sensor module 200 of the present invention, as shown in FIG. Figure 1 and Figure 2 As shown, the first sensitivity adjustment hole 111 and the second sensitivity adjustment hole 113 can be formed in the same shape (e.g., circular), and the plurality of stiffness adjustment holes 114 can also be formed in the same shape (e.g., circular) as the first sensitivity adjustment hole 111 and the second sensitivity adjustment hole 113.

[0046] exist Figure 1 and Figure 2, the (diameter) size of the stiffness adjustment hole 114 is shown to be the same as the (diameter) size of the first sensitivity adjustment hole 111 and the (diameter) size of the second sensitivity adjustment hole 113, but is not limited thereto. Figure 3 As shown, the (diameter) size of the stiffness adjustment hole 114 may be smaller than the (diameter) size of the first sensitivity adjustment hole 111 and the (diameter) size of the second sensitivity adjustment hole 113. Considering the weight of the sensor module, it is preferred that the (diameter) size of the stiffness adjustment hole 114 is larger than the (diameter) size of the first sensitivity adjustment hole 111 and the (diameter) size of the second sensitivity adjustment hole 113.

[0047] Figure 4 FIG. 4 is a front view of a torque sensor module 300 according to another embodiment of the present invention.

[0048] Reference Figure 4 In another embodiment of the torque sensor module 300 of the present invention, as shown in FIG. Figure 1 and Figure 2 As shown, the first sensitivity adjustment hole 111 and the second sensitivity adjustment hole 113 can be formed in the same shape (e.g., circular), and the plurality of stiffness adjustment holes 114 can also be formed in the same shape (e.g., circular) as the first sensitivity adjustment hole 111 and the second sensitivity adjustment hole 113.

[0049] The diameter of the first sensitivity adjustment hole 111 and the diameter of the second sensitivity adjustment hole 113 are the same as Figure 3 The diameter of the first sensitivity adjustment hole 111 and the diameter of the second sensitivity adjustment hole 113 are the same, but the diameter of the stiffness adjustment hole 114 is larger than that of the first sensitivity adjustment hole 111 and the second sensitivity adjustment hole 113. Figure 3 Therefore, although the number of the rigidity adjustment holes 114 is reduced, it is advantageous to reduce the total weight of the sensor module according to the target.

[0050] Figure 5 FIG. 4 is a front view of a torque sensor module 400 according to another embodiment of the present invention.

[0051] Reference Figure 5 In a torque sensor module 400 of another embodiment of the present invention, the first sensitivity adjustment hole 111 and the second sensitivity adjustment hole 113 may be formed in the same shape (e.g., circular), and the plurality of stiffness adjustment holes 114 may also be formed in a shape different from that of the first sensitivity adjustment hole 111 and the second sensitivity adjustment hole 113 (e.g., elliptical).

[0052] At this time, it is also preferred that the (diameter) size of the first sensitivity adjustment hole 111 is the same as the (diameter) size of the second sensitivity adjustment hole 113, and the size of the stiffness adjustment hole 114 is shown to be larger than the (diameter) size of the first sensitivity adjustment hole 111 and the (diameter) size of the second sensitivity adjustment hole 113, but depending on the situation, in terms of the passing area of ​​the hole, it is not ruled out that the size of the stiffness adjustment hole 114 may be equal to or smaller than the size of the first sensitivity adjustment hole 111 and the size of the second sensitivity adjustment hole 113.

[0053] In addition to these embodiments, multiple stiffness adjustment holes 114 can be formed to include two or more different shapes (which can be a combination of circular, elliptical, or polygonal shapes such as a trapezoid, triangle, quadrilateral, pentagon, etc.). At this time, the first sensitivity adjustment hole 111 and the second sensitivity adjustment hole 113 can also have an elliptical shape other than a circular shape or a polygonal shape such as a trapezoid, triangle, quadrilateral, pentagon, etc. in addition to a circular shape.

[0054] Figure 6 This is an example of a torque calculation circuit using a strain gauge according to the present invention.

[0055] Reference Figure 6 The circuit board 130 may include a torque calculation circuit, which includes an amplifier Amp connected to signal lines of each strain gauge 121 and 122 to calculate the torque value, an analog-to-digital converter ADC, a calculation unit, etc.

[0056] The amplifier Amp amplifies the detection signals of the strain gauges 121 and 122 in the Wheatstone bridge circuit, that is, the output signals of the Wheatstone bridge. The analog-to-digital converter ADC converts the amplified signals into digital values. The calculation unit can calculate the torque value of the position where the strain gauges 121 and 122 are attached based on the digital values.

[0057] In this way, circuit board 130 digitally processes the strain detection signals from multiple signal lines of strain gauges 121 and 122 to calculate the torque value at each strain measurement hole 112. This torque value is then used to calculate the torque value (Tz) for a specific axis without being affected by crosstalk, and can be used to control a robot, for example. While the torque sensor module measures the torque component required for control, forces or torque components on other axes can affect the torque output of the torque sensor module. This phenomenon, in which the torque output of the torque sensor module is affected by unwanted forces or torque components, is called crosstalk (mutual interference or external forces).

[0058] like Figure 6As shown, the method of calculating torque values ​​from a plurality of detection signals related to the deformation rates of the strain gauges 121 and 122 by selecting appropriate resistors R, R, and G to form a Wheatstone bridge circuit with multiple elements, is well known, and therefore a detailed description is omitted here. For information on torque value calculation, please refer to Patent Application No. 10-2009-0115343 (November 26, 2009), etc., which is a related prior art document.

[0059] As described above, the torque sensor modules 100, 200, 300, and 400 of the present invention offer enhanced stiffness, minimized displacement due to external forces (crosstalk), and the ability to measure pure torque. Furthermore, their increased sensitivity improves strain sensor operation accuracy and resolution. Conventional torque sensor modules attach strain gauges to spokes, which support this stiffness, making it difficult to optimize stiffness and sensitivity and limiting performance. By installing the torque sensor modules 100, 200, 300, and 400 of the present invention on a robotic arm, they achieve high performance by accurately providing strain gauge detection information. For example, they can assist in precisely controlling rotational forces in the xy plane, i.e., z-axis torque (Tz), even when affected by crosstalk, such as forces generated by human pushes or collisions (z-axis bending forces).

[0060] The present invention has been described above through a number of specific matters, such as specific components, and limited embodiments and drawings. However, this is only intended to provide a more complete understanding of the present invention. The present invention is not limited to the above-described embodiments, and those skilled in the art will be able to make various modifications and variations without departing from the essential characteristics of the present invention. Therefore, the concept of the present invention is not limited to the described embodiments, and the entire technical concept, including the attached claims and their equivalents, should be interpreted as falling within the scope of the present invention.

Claims

1. A torque sensor module, characterized in that: include: The main body has a first sensitivity adjustment hole, a strain measurement hole, a second sensitivity adjustment hole, and a stiffness adjustment hole repeatedly formed along the circumferential direction between the central hole and the outer peripheral surface; and A pair of strain gauges, one of which is attached to each of the two side walls of the strain measuring hole. wherein the center of the first sensitivity adjustment hole, the center of the second sensitivity adjustment hole, and the center of the stiffness adjustment hole are arranged at the same first distance from the center of the main body, The strain measurement hole has a trapezoidal shape in which a length of a side on a center side is longer than a length of a side on an outer peripheral side, and the arc of the first distance spans over at least a portion of the trapezoidal shape.

2. The torque sensor module according to claim 1, characterized in that: The first sensitivity adjustment hole and the second sensitivity adjustment hole have the same shape.

3. The torque sensor module according to claim 1, characterized in that: There are a plurality of the rigidity adjustment holes, and the plurality of the rigidity adjustment holes have the same shape as the first sensitivity adjustment hole and the second sensitivity adjustment hole.

4. The torque sensor module according to claim 1, characterized in that: There are a plurality of the rigidity adjustment holes, and the plurality of rigidity adjustment holes have shapes different from those of the first sensitivity adjustment hole and the second sensitivity adjustment hole.

5. The torque sensor module according to claim 1, wherein: There are a plurality of the stiffness adjustment holes, and the plurality of stiffness adjustment holes include two or more shapes that are different from each other.

6. The torque sensor module according to claim 1, characterized in that: The size of the stiffness adjustment hole is the same as that of the first sensitivity adjustment hole and the second sensitivity adjustment hole.

7. The torque sensor module according to claim 1, characterized in that: The size of the stiffness adjustment hole is larger than that of the first sensitivity adjustment hole and the second sensitivity adjustment hole.

8. The torque sensor module according to claim 1, characterized in that: The apparatus further comprises a circuit board connected to a signal line of each strain gauge of a strain gauge pair, wherein the strain gauge pair is attached to each strain measurement hole of the plurality of strain measurement holes, The circuit board digitally processes the strain detection signal received from the signal line to calculate the torque value of each strain measurement hole.

9. The torque sensor module according to claim 8, characterized in that: The torque value for a predetermined axis is calculated using the torque value without being affected by crosstalk.