Echo wall mode microcavity resonance frequency regulation method and system

Abstract

The present application relates to the technical field of resonant frequency control, and particularly relates to a whispering gallery mode microcavity resonant frequency regulation method and system. The present application analyzes resonant frequencies, temperature data and resonant wavelength movement amounts at different monitoring moments, and obtains coupling influence degrees at each monitoring moment; according to resonant frequency distributions in a time neighborhood range of each monitoring moment, it is judged whether the time neighborhood range needs to be extended; if so, a target function of resonant frequency change rate is constructed in combination with a corresponding preset time extension amount; according to change trends of the preset time extension amounts in the time neighborhood ranges before and after the moment, and the coupling influence degree distributions of different monitoring moments in the preset time extension amounts, a restriction condition of the target function is constructed, and the preset time extension amount is obtained; and the regulation of the microcavity resonant frequency is realized. The present application obtains a suitable heating duration in the heat reflux regulation process, and improves the accuracy of the resonant frequency regulation.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of resonance frequency regulation, and particularly relates to an echo wall mode microcavity resonance frequency regulation method and system. BACKGROUND

[0002] Temperature sensing of the echo wall mode optical microcavity is based on changes in the refractive index of the material and the size of the microcavity caused by changes in the ambient temperature, which together cause the resonant wavelength of the resonance mode to shift, thereby achieving high-precision temperature detection; the microcavity surface is subjected to controllable melting-reconstruction through laser reflow, the optical path length is directly corrected through geometric deformation, and the resonance frequency is adjusted, which is used to suppress thermal noise and improve the precision of temperature sensing.

[0003] In the prior art, the resonance frequency is regulated by a thermal reflow regulation method, and local thermal reflow regulation avoids global thermal disturbance, but in actual resonance frequency regulation, the shape change of the microcavity and the non-uniform thermal field caused by the coupling effect of thermal expansion and thermal-optical effect may cause stress accumulation problems due to environmental factors, and the regulation accuracy of the microcavity resonance frequency is poor. SUMMARY

[0004] In order to solve the technical problems of stress accumulation caused by environmental factors and poor regulation accuracy of the microcavity resonance frequency, the purpose of the present application is to provide an echo wall mode microcavity resonance frequency regulation method and system, and the technical solution adopted is as follows:

[0005] The present application provides an echo wall mode microcavity resonance frequency regulation method and system, the method comprising:

[0006] The echo wall mode microcavity is subjected to thermal reflow processing, and the resonance frequency, temperature data and resonance wavelength movement at each monitoring time are obtained;

[0007] According to the temperature data and resonance wavelength movement at different monitoring times, the thermal variation rate coefficient at each monitoring time is obtained;

[0008] According to the distribution of the thermal variation rate coefficient at different monitoring times, the mode influence coefficient at each monitoring time is obtained; and according to the mode influence coefficient at each monitoring time and the distribution of the resonance frequency at different monitoring times, the coupling influence degree at each monitoring time is obtained;

[0009] According to the resonance frequency distribution in the time neighborhood range of each monitoring time, it is judged whether the time neighborhood range needs to be extended; if so, according to the resonance frequency distribution in the time neighborhood range of each monitoring time and the corresponding preset time extension, a target function of the resonance frequency change rate is constructed; according to the change trend of the corresponding preset time extension in the time neighborhood range of the previous and subsequent time and the coupling influence degree distribution of different monitoring times in the preset time extension, a restriction condition of the target function is constructed, and the preset time extension is obtained.

[0010] According to the preset time extension, the microcavity resonance frequency is regulated.

[0011] Further, the method for obtaining the thermal variation rate coefficient comprises:

[0012] The ratio of the difference value of the temperature data between each monitoring time and the previous time and the resonance wavelength movement change amount of each monitoring time is obtained, and is normalized as the thermal variation rate coefficient of each monitoring time.

[0013] Further, the method for obtaining the mode influence coefficient comprises:

[0014] The average thermal variation rate level of the thermal variation rate coefficients of all monitoring times in the continuous time range in which each monitoring time is located is obtained as the average thermal variation rate level.

[0015] In the continuous time range in which each monitoring time is located, the other monitoring times with the same thermal variation rate coefficient value as each monitoring time are selected as target monitoring times; the difference value average between all target monitoring times and the center time in the continuous time range in which each monitoring time is located is calculated, and the absolute value of the difference value average is taken as the time variation dispersion degree.

[0016] According to the rate difference between the thermal variation rate coefficient of each monitoring time and the average thermal variation rate level, and the time variation dispersion degree, the mode influence coefficient of each monitoring time is obtained, the rate difference and the mode influence coefficient are negatively correlated, and the time variation dispersion degree and the mode influence coefficient are positively correlated.

[0017] Further, the method for obtaining the mode influence coefficient comprises:

[0018] The ratio of the rate difference and the time variation dispersion degree is obtained, and is negatively correlated to be mapped as the mode influence coefficient of each monitoring time.

[0019] Further, the method for obtaining the coupling influence degree comprises:

[0020] The resonance frequency range of all monitoring times in each continuous time range is obtained as the frequency variation range.

[0021] Obtaining the mean value of the corresponding frequency variation range in all continuous time ranges as the average variation range;

[0022] According to the mode influence coefficient of each monitoring time, and the range difference between the frequency variation range and the average variation range of each monitoring time, the coupling influence degree of each monitoring time is obtained, the mode influence coefficient is positively correlated with the coupling influence degree, and the range difference is negatively correlated with the coupling influence degree.

[0023] Further, the method further comprises:

[0024] If the difference value of the resonance frequency between the end and the beginning in the time neighborhood range of each monitoring time is greater than the preset difference threshold value, it is judged that the time neighborhood range needs to be extended.

[0025] Further, the method further comprises:

[0026] The ratio of the difference value of the resonance frequency between the end and the beginning in the time neighborhood range of each monitoring time and the preset time extension amount is obtained, and the minimum function is taken as the target function of the resonance frequency change rate.

[0027] Further, the method further comprises:

[0028] The condition that the preset time extension amount corresponding to each time neighborhood range is greater than the preset time extension amount corresponding to the previous time neighborhood range is taken as the first restriction condition.

[0029] The average coupling influence level of the coupling influence degree of all monitoring times in the preset time extension amount corresponding to each time neighborhood range is obtained as the average coupling influence level, and the condition that the average coupling influence level corresponding to each time neighborhood range is greater than the average coupling influence level corresponding to the previous time neighborhood range is taken as the second restriction condition.

[0030] Further, the preset difference threshold value is zero.

[0031] The present application further provides an echo wall mode microcavity resonance frequency regulation system, which comprises a memory, a processor and a computer program stored in the memory and capable of running on the processor, and when the processor executes the computer program, the steps of the echo wall mode microcavity resonance frequency regulation method are realized.

[0032] The present application has the following advantages:

[0033] The present application analyzes the resonance frequency, temperature data and resonance wavelength movement amount of different monitoring moments, obtains the coupling influence degree of each monitoring moment, analyzes the influence of the interaction between the thermal light effect and thermal expansion effect of the microcavity on the resonance frequency, judges whether the time neighborhood range needs to be extended according to the resonance frequency distribution in the time neighborhood range of each monitoring moment, and dynamically adjusts the time window of the analysis; if needed, a target function of the resonance frequency change rate is constructed in combination with the corresponding preset time extension amount; the change trend of the preset time extension amount in the time neighborhood range before and after the time neighborhood range, and the coupling influence degree distribution of different monitoring moments in the preset time extension amount are used to construct the constraint condition of the target function, so that the preset time extension amount is obtained, the change trend of the time neighborhood range before and after the time neighborhood range and the coupling influence degree distribution are comprehensively considered, the obtained preset time extension amount is more reasonable and accurate, and the resonance frequency change trend of the microcavity in a longer time can be more comprehensively observed and analyzed; the resonance frequency of the microcavity is regulated, and the fine regulation of the resonance frequency of the microcavity is realized by reasonably controlling the time and length of the thermal relaxation pause. The present application obtains a suitable heating time length in the heat reflux regulation processing, and improves the accuracy of the resonance frequency regulation. BRIEF DESCRIPTION OF DRAWINGS

[0034] In order to more clearly illustrate the technical solutions and advantages of the embodiments of the present application or the prior art, the drawings needed in the following embodiment or prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0035] Figure 1 A flow chart of a whispering gallery mode microcavity resonance frequency regulation method provided by an embodiment of the present application;

[0036] Figure 2 A flow chart of a mode influence coefficient acquisition method provided by an embodiment of the present application. DETAILED DESCRIPTION

[0037] In order to further illustrate the technical means and effects adopted by the present application to achieve the predetermined invention purpose, the following describes a whispering gallery mode microcavity resonance frequency regulation method and system according to the present application, its specific implementation, structure, features and effects in detail, as shown in the drawings and preferred embodiments. Different "one embodiment" or "another embodiment" in the following description do not necessarily refer to the same embodiment. In addition, the specific features, structures or characteristics in one or more embodiments can be combined in any suitable form.

[0038] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.

[0039] The echo wall mode microcavity resonant frequency regulation method and system provided by the application will be specifically described below in combination with the drawings.

[0040] Please refer to Figure 1 , which shows a method flowchart of an echo wall mode microcavity resonant frequency regulation method provided by an embodiment of the application, specifically comprising:

[0041] Step S1: heat reflow processing is performed on the echo wall mode microcavity to obtain resonant frequency, temperature data and resonant wavelength movement at each monitoring moment.

[0042] In the embodiment of the application, considering that the resonant frequency regulation process will be affected by environmental factors, which significantly affects the accuracy of control, it is necessary to analyze the overall control influencing factor performance of the reflow adjustment process. First, a tunable semiconductor laser with a wavelength of 1550 nm and a power stability of ±0.1% is used to perform thermal reflow laser regulation of the microcavity resonant frequency; a micro thermocouple array is set to have a response time of <1 ms and a detection accuracy of 50 μm level microcavity area local temperature data; a wavelength tunable scanning laser is set, and a Lorentz line fitting is performed to obtain the resonant wavelength and the resonant wavelength movement.

[0043] It should be noted that, in the embodiment of the application, in order to facilitate subsequent processing of data and avoid differences between units and magnitude orders of values between data, the data is standardized to eliminate the influence of dimensions in data operation.

[0044] Step S2: obtain the thermal variation rate coefficient at each monitoring moment according to the temperature data and the resonant wavelength movement at different monitoring moments; obtain the mode influence coefficient at each monitoring moment according to the distribution of the thermal variation rate coefficient at different monitoring moments; and obtain the coupling influence degree at each monitoring moment according to the distribution of the mode influence coefficient at different monitoring moments.

[0045] The temperature data analyzes the state of the thermal effect, and the wavelength movement can intuitively understand the change of the microcavity optical performance. In the heat reflow adjustment process, the thermal expansion effect causes the microcavity size to increase through temperature rise, leading to red shift of the resonant wavelength, while the thermo-optic effect is that the material refractive index changes due to temperature rise caused by laser irradiation, leading to wavelength movement. Therefore, the more consistent the temperature and the resonant wavelength change, the more obvious the thermo-optic effect at the monitoring moment. The thermal variation trend is analyzed through the temperature data and the resonant wavelength movement at different monitoring moments.

[0046] Preferably, the greater the temperature data change, the greater the wavelength shift affected by temperature, the greater the thermal-optical effect; in an embodiment of the present application, the method for obtaining the thermal rate coefficient comprises:

[0047] obtaining the ratio of the difference value of the temperature data between each monitoring time and the previous time and the resonance wavelength change amount of each monitoring time, and normalizing it as the thermal rate coefficient of each monitoring time.

[0048] It should be noted that in the embodiment of the present method, normalization is performed by linear normalization or normalization function, and the specific means is a technology known to those skilled in the art, which will not be described here.

[0049] Considering the distribution of the thermal rate coefficient in the continuous time range, the mode characteristic change of the microcavity under different thermal states can be more comprehensively reflected; the thermal rate coefficient reflects the coupling effect level of the thermal-optical effect and the thermal expansion effect, the greater the change of the thermal rate coefficient, the more closely the system changes, the faster the change, and the smaller the coupling effect; according to the distribution of the thermal rate coefficient at different monitoring times, the mode influence coefficient of each monitoring time is obtained.

[0050] Preferably, in an embodiment of the present application, the method for obtaining the mode influence coefficient is shown in Figure 2 , which shows a flowchart of a method for obtaining a mode influence coefficient, comprising:

[0051] Step S201: obtaining the average thermal rate coefficient of all monitoring times in the continuous time range where each monitoring time is located, as the average thermal rate level.

[0052] In order to more finely analyze locally and specifically, a plurality of continuous time ranges are obtained by dividing all monitoring times; it should be noted that in an embodiment of the present application, according to the time sequence, the monitoring times in each 300S range are divided into a continuous time range; by quantifying the overall thermal rate level in the continuous time range by averaging, reference data is provided for subsequent comparison.

[0053] Step S202: in the continuous time range where each monitoring time is located, select the same thermal rate coefficient value as each monitoring time among other monitoring times, and take the corresponding other monitoring time as the target monitoring time; calculate the difference value between all target monitoring times and the center time in the continuous time range where each monitoring time is located, and take the absolute value of the difference value as the time variation dispersion degree.

[0054] The analysis is limited to the continuous time range in which each monitoring time point is located, so that the dynamic change of the microcavity resonance frequency in the local time can be observed in detail.

[0055] The same numerical thermal variation rate coefficient in the continuous time range in which each monitoring time point is located reflects that the microcavity has consistent coupling behavior at these monitoring time points, and selecting these time points as target monitoring time points can focus on the microcavity state with the same thermal response characteristics, and exclude the interference of time points with large thermal response differences, so that the relationship between the resonance frequency change and the thermal effect can be more accurately analyzed; the difference between all target monitoring time points and the center time in the continuous time range in which each monitoring time point is located can reflect the overall deviation, and the greater the absolute value of the average difference, the less closely the time changes, and the more discrete the time changes.

[0056] Step S203: obtaining the mode influence coefficient of each monitoring time point according to the rate difference between the thermal variation rate coefficient of each monitoring time point and the average thermal variation rate level, and the time change discrete degree, the rate difference and the mode influence coefficient are negatively correlated, and the time change discrete degree and the mode influence coefficient are positively correlated.

[0057] It should be noted that the rate difference between the thermal variation rate coefficient and the average thermal variation rate level reflects the deviation of the thermal variation rate of each monitoring time point from the overall level, the greater the rate difference, the greater the deviation from the overall level, the greater the thermal dynamic nonlinearity, the smaller the mode coupling efficiency, and the smaller the influence degree; the time change discrete degree reflects the tightness of the time change, the greater the discrete degree, the smaller the tightness, the greater the mode coupling efficiency, and the greater the influence. Therefore, the rate difference and the mode influence coefficient are negatively correlated, and the time change discrete degree and the mode influence coefficient are positively correlated.

[0058] In an embodiment of the present application, the ratio of the rate difference and the time change discrete degree is obtained and negatively correlated mapping is performed as the mode influence coefficient of each monitoring time point; therefore, the correlation between the rate difference and the time change discrete degree and the mode influence coefficient is constructed based on the above basic mathematical operation, that is, the greater the rate difference, the smaller the time change discrete degree, and the smaller the mode influence coefficient.

[0059] It should be noted that in an embodiment of the present application, the natural constant is used as the base of the exponential function for negatively correlated mapping, and in other embodiments of the present application, the reciprocal can also be used for negatively correlated mapping, and the specific means are well known to those skilled in the art, which will not be described here.

[0060] The phase proportion change of the resonance frequency variation caused by the coupling of the actual thermal expansion and thermal-optical effect is regular, the random influence is smaller, the reference reliability is greater, and the coupling influence is greater. However, the resonance frequency drift is more random, the resonance frequency distribution is more uneven, and the coupling effect is smaller due to the influence of the backflow control process and the non-uniform temperature field. The mode influence coefficient reflects the coupling influence of the thermal-optical effect and the thermal expansion effect, and therefore, the coupling influence degree of each monitoring time is obtained according to the mode influence coefficient of each monitoring time and the resonance frequency distribution of different monitoring times.

[0061] Optimally, in an embodiment of the present application, the method for obtaining the coupling influence degree comprises: obtaining the range of the resonance frequency of all monitoring times in each continuous time range as the frequency variation range;

[0062] Obtaining the mean value of the frequency variation range in all continuous time ranges as the average variation range;

[0063] According to the mode influence coefficient of each monitoring time, and the range difference between the frequency variation range and the average variation range of each monitoring time, the coupling influence degree of each monitoring time is obtained. The mode influence coefficient is positively correlated with the coupling influence degree, and the range difference is negatively correlated with the coupling influence degree.

[0064] It should be noted that the frequency variation range reflects the variation of the resonance frequency, and the difference between the frequency variation range and the average variation range of each monitoring time reflects the deviation of the resonance frequency variation of each monitoring time from the overall variation. The greater the deviation, the less close to the overall variation, and the smaller the influence on the coupling effect.

[0065] In an embodiment of the present application, the ratio of the mode influence coefficient of each monitoring time and the corresponding range difference is obtained, and normalized mapping is performed as the coupling influence degree of each monitoring time. In order to avoid the denominator being 0, a threshold value such as 0.01 is artificially added at the denominator. Therefore, the correlation between the mode influence coefficient, the range difference and the coupling influence degree is constructed based on the above basic mathematical operation, that is, the greater the mode influence coefficient, the smaller the range difference, the greater the coupling influence of the thermal-optical effect and the thermal expansion effect, and the greater the reference reliability for subsequent processing.

[0066] Step S3: judging whether the time neighborhood range needs to be extended according to the resonance frequency distribution in the time neighborhood range of each monitoring time; if so, constructing a target function of resonance frequency change rate according to the resonance frequency distribution in the time neighborhood range of each monitoring time and the corresponding preset time extension amount; constructing a restriction condition of the target function according to the change trend of the preset time extension amount corresponding to the time neighborhood range of the previous and subsequent times and the distribution of the coupling influence degree, to obtain the preset time extension amount.

[0067] The microcavity shape change caused by the heat reflow laser is the coupling effect of thermal expansion and thermal light effect, which will be affected by environmental factors in the actual control process, resulting in resonance wavelength variation; for the actual microcavity resonance frequency regulation process, the resonance wavelength variation is more stable, that is, the resonance frequency is more fixed, and considering the randomness caused by the actual environmental factors, the resonance frequency changes, and the heating time regulation is more needed; according to the resonance frequency distribution in the time neighborhood range of each monitoring time, whether the time neighborhood range needs to be extended is judged.

[0068] Preferably, in an embodiment of the present application, whether the time neighborhood range needs to be extended includes:

[0069] If the difference between the resonance frequencies between the end and the beginning in the time neighborhood range of each monitoring time is greater than a preset difference threshold, it is judged that the time neighborhood range needs to be extended.

[0070] It should be noted that in an embodiment of the present application, the size of the time neighborhood range is the range formed by the monitoring time after the initial heating time with the monitoring time as the reference; in other embodiments of the present application, the initial heating time and the size of the time neighborhood range can be set according to specific circumstances, which are not limited and described here.

[0071] It should be noted that in an embodiment of the present application, the size of the preset difference threshold is 0; in other embodiments of the present application, the size of the preset difference threshold can be set according to specific circumstances, which are not limited and described here.

[0072] The regulation of the resonance frequency is to maintain the stability of the resonance wavelength variation, when there is no environmental factor, the fixed power extension heating is used in the heat reflow regulation process, but considering the randomness caused by the actual environmental factors, the target function needs to be constructed according to the resonance frequency variation and the preset time extension amount, to accurately adjust the control precision of the heating time, so that the frequency variation is naturally balanced. If so, a target function of resonance frequency change rate is constructed according to the resonance frequency distribution in the time neighborhood range of each monitoring time and the corresponding preset time extension amount.

[0073] Preferably, in one embodiment of the present application, the method for obtaining the objective function comprises:

[0074] The ratio of the difference between the resonance frequencies between the end and the beginning of the time neighborhood range at each monitoring time and the preset time extension is obtained, and the minimum value function is taken as the objective function of the resonance frequency change rate.

[0075] The time extension avoids oscillation or divergence of the heating strategy, gradually extends the heating time to meet the thermodynamic progressive characteristics, and the coupling influence degree distribution of different monitoring times is better than the previous coupling balance, which helps to improve the subsequent control accuracy; the change trend of the preset time extension corresponding to the neighborhood range of the previous and subsequent times, and the coupling influence degree distribution of different monitoring times in the preset time extension are used to construct the constraint condition of the objective function, and the preset time extension is obtained.

[0076] Preferably, in one embodiment of the present application, the method for obtaining the constraint condition comprises:

[0077] The preset time extension corresponding to each time neighborhood range is greater than the preset time extension corresponding to the previous time neighborhood range, as the first constraint condition.

[0078] The average coupling influence level of all monitoring times in the preset time extension corresponding to each time neighborhood range is obtained, as the average coupling influence level; the average coupling influence level corresponding to each time neighborhood range is greater than the average coupling influence level corresponding to the previous time neighborhood range, as the second constraint condition.

[0079] Based on this, the construction of the objective function of the resonance frequency change rate is converted into an optimization problem, and the optimal preset time extension can be found by solving the objective function under certain conditions. The objective function is solved by using an analytical method or a numerical optimization algorithm, and the first constraint condition and the second constraint condition are met at the same time, so that the objective function reaches the minimum value, and the solution value of the preset time extension is obtained; the average coupling influence level of the coupling influence degree of each monitoring time in the preset time extension is obtained by processing the obtained data of all monitoring times in the regulation process; the specific algorithm is a technical means familiar to those skilled in the art, and will not be described here.

[0080] It should be noted that the heat reflow process is processed in time sequence, and the time extension after the time neighborhood range of each monitoring time is obtained in turn.

[0081] Step S4: According to the preset time extension, the microcavity resonance frequency is regulated.

[0082] In view of the randomness caused by the actual environmental factors, a preset time extension is obtained, and a heat relaxation pause of a fixed time length is performed after the heating process in the time neighborhood range is extended, which is helpful to control the thermal state of the microcavity, so that the microcavity can be kept stable in a certain time, and the instability of the microcavity performance caused by continuous heat action can be avoided; and then the temperature field is balanced naturally by using the thermal inertia of the material, so that the resonance frequency of the whispering gallery mode microcavity is regulated, and the regulation accuracy of the resonance frequency of the microcavity is improved. It should be noted that in an embodiment of the present application, the fixed time length of the heat relaxation pause is set to 10s, and in other embodiments of the present application, the fixed time length can be set according to specific conditions, which will not be described here.

[0083] In summary, the resonance frequency, temperature data and resonance wavelength movement at different monitoring times are analyzed to obtain the coupling influence degree at each monitoring time; whether the time neighborhood range needs to be extended is judged according to the resonance frequency distribution in the time neighborhood range at each monitoring time; if so, the target function of the resonance frequency change rate is constructed in combination with the corresponding preset time extension; the change trend of the corresponding preset time extension in the time neighborhood range before and after the time, and the coupling influence degree distribution of the preset time extension at different monitoring times are used to construct the constraint condition of the target function, so as to obtain the preset time extension; and the regulation of the microcavity resonance frequency is realized. The present application improves the accuracy of the resonance frequency regulation by obtaining the appropriate heating time in the heat reflux regulation process.

[0084] The present application also provides a whispering gallery mode microcavity resonance frequency regulation system, which comprises a memory, a processor and a computer program stored in the memory and executable on the processor, and when the processor executes the computer program, the steps of any one of the whispering gallery mode microcavity resonance frequency regulation methods are realized.

[0085] It should be noted that the above-mentioned embodiment sequence of the present application is only for description, and does not represent the advantages and disadvantages of the embodiments. The processes depicted in the drawings do not necessarily require the specific order or continuous order shown to achieve the desired results. In some embodiments, multitasking and parallel processing are possible or may be advantageous.

[0086] Each embodiment in the specification is described in a progressive manner, and the same or similar parts between each embodiment can be referred to each other, and each embodiment mainly describes the difference from other embodiments.

Claims

1. A method for tuning the resonance frequency of an acoustic back- wall mode microcavity, characterized in that, The method comprises: The echo wall mode microcavity is subjected to hot reflow processing, and resonance frequency, temperature data and resonance wavelength movement amount at each monitoring moment are obtained; According to the temperature data and the resonance wavelength movement amount at different monitoring moments, a thermal variation rate coefficient at each monitoring moment is obtained; according to the distribution of the thermal variation rate coefficient at different monitoring moments, a mode influence coefficient at each monitoring moment is obtained; and according to the mode influence coefficient at each monitoring moment and the distribution of the resonance frequency at different monitoring moments, a coupling influence degree at each monitoring moment is obtained; According to the distribution of the resonance frequency in the time neighborhood range of each monitoring moment, whether the time neighborhood range needs to be extended is judged; if yes, a target function of the resonance frequency variation rate is constructed according to the distribution of the resonance frequency in the time neighborhood range of each monitoring moment and a corresponding preset time extension amount; a restriction condition of the target function is constructed according to the variation trend of the corresponding preset time extension amount in the time neighborhood range of the front and rear moments and the distribution of the coupling influence degree of different monitoring moments in the preset time extension amount, and the preset time extension amount is obtained; According to the preset time extension amount, the microcavity resonance frequency is regulated and controlled; The mode influence coefficient comprises: An average thermal variation rate level of the thermal variation rate coefficients of all monitoring moments in a continuous time range in which each monitoring moment is located is obtained, as the average thermal variation rate level; In the continuous time range in which each monitoring moment is located, other monitoring moments with the same thermal variation rate coefficient value as each monitoring moment are selected, and the corresponding other monitoring moments are taken as target monitoring moments; a difference value average between all target monitoring moments and a center moment in the continuous time range in which each monitoring moment is located is calculated, and an absolute value of the difference value average is taken as a time variation discrete degree; According to a rate difference between the thermal variation rate coefficient of each monitoring moment and the average thermal variation rate level and the time variation discrete degree, a mode influence coefficient of each monitoring moment is obtained, the rate difference and the mode influence coefficient are negatively correlated, and the time variation discrete degree and the mode influence coefficient are positively correlated; The coupling influence degree comprises: A resonance frequency range of all monitoring moments in each continuous time range is obtained, as a frequency variation range; and an average value of the corresponding frequency variation range in all continuous time ranges is obtained, as an average variation range; According to the mode influence coefficient of each monitoring moment and a range difference between the frequency variation range of each monitoring moment and the average variation range, a coupling influence degree of each monitoring moment is obtained, the mode influence coefficient and the coupling influence degree are positively correlated, and the range difference and the coupling influence degree are negatively correlated. The target function comprises: A ratio of a difference value of the resonance frequency between the end and the beginning in the time neighborhood range of each monitoring moment and the preset time extension amount is obtained, and a minimum value function is taken, as the target function of the resonance frequency variation rate.

2. The method according to claim 1, wherein the method is characterized by, The thermal variation rate coefficient comprises: A ratio of a difference value of the temperature data between each monitoring moment and a previous moment and a resonance wavelength movement change amount of each monitoring moment is obtained, and is normalized, as the thermal variation rate coefficient of each monitoring moment.

3. The method according to claim 1, wherein the method is characterized by, The mode influence coefficient obtaining method comprises: a ratio of the rate difference and the time variation dispersion degree is obtained and is negatively correlated to map as the mode influence coefficient of each monitoring moment.

4. The method according to claim 1, wherein the method is characterized by, The method for judging whether the time neighborhood range needs to be extended comprises: if the difference between the resonance frequencies between the end and the beginning in the time neighborhood range of each monitoring moment is greater than a preset difference threshold, it is judged that the time neighborhood range needs to be extended.

5. The method according to claim 1, wherein the method is characterized by: The method for obtaining the restriction condition comprises: if the preset time extension amount corresponding to each time neighborhood range is greater than the preset time extension amount corresponding to the previous time neighborhood range, it is taken as a first restriction condition; an average coupling influence level of all the monitoring moments in the preset time extension amount corresponding to each time neighborhood range is obtained as the average coupling influence level; if the average coupling influence level corresponding to each time neighborhood range is greater than the average coupling influence level corresponding to the previous time neighborhood range, it is taken as a second restriction condition.

6. The method according to claim 4, wherein the method is characterized by, The preset difference threshold is zero.

7. An acoustic whispering gallery mode microcavity resonance frequency tuning system, the system comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein, The processor executes the computer program to realize the steps of the echo wall mode microcavity resonance frequency regulation method according to any one of claims 1-6.

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