Radio frequency power regulation circuit, radio frequency power supply equipment and radio frequency power supply system

Abstract

The invention provides a radio frequency power regulation circuit, radio frequency power supply equipment and a radio frequency power supply system. The radio frequency power regulation circuit comprises N power regulation units and a control unit, each power regulation unit comprises a coupling module and a power regulation module, the radio frequency power amplification unit is used for outputting radio frequency electric energy to a load, and each power regulation module is connected with the corresponding coupling module. Each coupling module has an inductance value and an adjustable inductive reactance value, the inductance value of at least one coupling module is different from the inductance values of other coupling modules, each power regulation module has a first state and a second state, and the inductive reactance value of each coupling module is different according to the different states of the corresponding power regulation module. The control unit is used for controlling the at least one power adjusting module to be in the first state or the second state so as to adjust the inductive reactance value of the corresponding coupling module. The power value of the radio frequency electric energy transmitted to the load can be flexibly adjusted.

Description

Technical Field

[0001] The present application relates to the field of radio frequency technology, and in particular to a radio frequency power regulation circuit, a radio frequency power supply device, and a radio frequency power supply system. Background Art

[0002] The development and widespread application of RF power technology are placing increasingly stringent demands on RF power equipment. When the RF power amplifier (PA) of an RF power supply outputs RF energy, the load's power requirements can change in real time. This is particularly true for semiconductor devices, where plasma loads typically require even higher power levels when transmitting RF energy to them. Existing methods of adjusting the RF power level by adjusting the amplification factor of the RF PA can suffer from poor real-time performance and accuracy, and cannot guarantee output stability. Therefore, the challenge is to flexibly adjust the power level of the RF energy delivered to the load. Summary of the Invention

[0003] The present application provides a radio frequency power regulation circuit, a radio frequency power supply device, and a radio frequency power supply system, which can flexibly adjust the power value of the radio frequency electric energy transmitted to a load.

[0004] In a first aspect, a radio frequency power regulation circuit is provided, comprising N power regulation units and a control unit, each power regulation unit comprising a coupling module and a power regulation module, each coupling module being configured to be connected between a radio frequency power amplifier unit and a load, the radio frequency power amplifier unit being configured to output radio frequency electrical energy to the load, each power regulation module being connected to a corresponding coupling module, and the control unit being connected to each of the N power regulation modules. Each coupling module has an inductance value and an adjustable reactance value, and the inductance value of at least one coupling module is different from the inductance values ​​of the other coupling modules. Each power regulation module has a first state and a second state, and the reactance value of each coupling module varies depending on the state of the corresponding power regulation module. The control unit is configured to control at least one power regulation module to be in the first state or the second state to adjust the reactance value of the corresponding coupling module, thereby adjusting the power value of the radio frequency electrical energy transmitted to the load, wherein N ≥ 2.

[0005] In a possible implementation, the inductive reactance value of each coupling module when the corresponding power regulation module is in the first state is smaller than the inductive reactance value when the corresponding power regulation module is in the second state.

[0006] In one possible implementation, N coupling modules are connected in series between the RF power amplifier unit and the load, wherein, when the control unit controls the at least one power regulation module to switch from the first state to the second state, the inductive reactance value of the corresponding coupling module increases, and the power value of the RF power energy transmitted to the load decreases; when the control unit controls the at least one power regulation module to switch from the second state to the first state, the inductive reactance value of the corresponding coupling module decreases, and the power value of the RF power energy transmitted to the load increases.

[0007] In one possible embodiment, the RF power amplifier unit includes a positive output terminal and a negative output terminal, the load includes a positive input terminal and a negative input terminal, and the positive output terminal is connected to the positive input terminal. Each coupling module includes a first transformer, each first transformer includes a first winding and a second winding coupled to each other, each first winding is connected in series between the negative output terminal and the negative input terminal, wherein each first transformer has a leakage inductance, and the inductance value of each first transformer corresponds to the leakage inductance. Each power regulation module includes a first switch, each first switch is connected to the two ends of the corresponding second winding, wherein the control unit is used to control the conduction or disconnection of at least one first switch so that the corresponding power regulation module is in the first state or the second state respectively.

[0008] In a possible implementation, the inductance value of each coupling module is different, and the inductance value of each coupling module when the corresponding power regulation module is in the first state and the inductance value of the second state are different.

[0009] In a possible implementation, the sum of the inductive reactance values ​​of the N coupling modules is less than a first inductive reactance threshold, where the first inductive reactance threshold is related to a reflection coefficient threshold and a preset characteristic impedance value.

[0010] In one possible implementation, the RF power regulation circuit further includes a protection unit, the protection unit selectively connected to the RF power transmission path, the protection unit having an adjustable capacitive reactance value. The control unit is also connected to the protection unit and is further configured to control the protection unit to connect to the RF power transmission path when the sum of the inductive reactance values ​​of the N coupling modules is greater than or equal to a first inductive reactance threshold, control and adjust the capacitive reactance value of the protection unit to a target capacitive reactance value based on the first inductive reactance threshold, and control the protection unit to disconnect from the RF power transmission path when the sum of the inductive reactance values ​​of the N coupling modules is less than the first inductive reactance threshold.

[0011] In one possible implementation, the protection unit includes a first capacitor and a second switch, the first capacitor being connected to the second switch, the second switch being connected to the transmission path of the RF power, and the second switch being configured to be turned on or off so as to selectively connect the first capacitor to the transmission path of the RF power. The first capacitor has an adjustable capacitance value, so that the protection unit has an adjustable capacitive reactance value. The control unit is configured to control the second switch to be turned on when the sum of the inductive reactance values ​​of the N coupling modules is greater than or equal to a first inductive reactance threshold, and to control and adjust the capacitance value of the first capacitor to a target capacitance value based on the first inductive reactance threshold so that the capacitive reactance value of the protection unit is the target capacitive reactance value, and to control the second switch to be turned on and off when the sum of the inductive reactance values ​​of the N coupling modules is less than the first inductive reactance threshold.

[0012] In a second aspect, a radio frequency power supply device is also provided, comprising a radio frequency power amplifier unit and a radio frequency power regulation circuit. The radio frequency power regulation circuit comprises N power regulation units and a control unit, each power regulation unit comprising a coupling module and a power regulation module. Each coupling module is configured to be connected between the radio frequency power amplifier unit and a load, and the radio frequency power amplifier unit is configured to output radio frequency power to the load. Each power regulation module is connected to a corresponding coupling module, and the control unit is connected to each of the N power regulation modules. Each coupling module has an inductance value and an adjustable reactance value, and the inductance value of at least one coupling module is different from the inductance values ​​of the other coupling modules. Each power regulation module has a first state and a second state, and the reactance value of each coupling module varies depending on the state of the corresponding power regulation module. The control unit is configured to control at least one power regulation module to be in the first state or the second state to adjust the reactance value of the corresponding coupling module, thereby adjusting the power value of the radio frequency power transmitted to the load, wherein N ≥ 2.

[0013] In a third aspect, a radio frequency power supply system is further provided, wherein the radio frequency power supply system includes a radio frequency power supply device. The radio frequency power supply device includes a radio frequency power amplifier unit and a radio frequency power regulation circuit.

[0014] The RF power regulation circuit, RF power supply device, and RF power supply system of the present application are capable of influencing the power value of the RF power transmitted to the load by providing N coupling modules connected between the RF power amplifier unit and the load, and configuring each coupling module to have an inductance value and an adjustable inductance value. Furthermore, based on the relationship between the inductance value of each coupling module and the state of the corresponding power regulation module, by setting at least one power regulation module in a first state or a second state, the inductance value of the corresponding coupling module can be adjusted, thereby flexibly adjusting the power value of the RF power transmitted to the load, with fast adjustment speed and high adjustment accuracy, which can meet the real-time and accuracy requirements of the load and ensure the output stability of the RF power. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background technology, the drawings required for use in the embodiments of the present application or the background technology will be described below.

[0016] Figure 1 This is a block diagram of a radio frequency power regulation circuit in some embodiments of the present application.

[0017] Figure 2 Schematic diagram of a radio frequency power regulation circuit in some embodiments of the present application.

[0018] Figure 3 This is another block diagram of the radio frequency power regulation circuit in some embodiments of the present application.

[0019] Figure 4 This is another block diagram of the radio frequency power regulation circuit in some embodiments of the present application.

[0020] Figure 5 This is a block diagram of a radio frequency power supply device in some embodiments of the present application.

[0021] Figure 6 This is a block diagram of a radio frequency power supply system in some embodiments of the present application.

[0022] Explanation of the accompanying drawings: 1. RF power supply system, 1000. RF power supply equipment, PA, RF power amplifier unit, RFP, RF power, 10. RF power regulation circuit, 100. Power regulation unit, 110. Coupling module, T1, first transformer, 120. Power regulation module, S1, first switch, 200. Control unit, 300. Protection unit, S2, second switch, C1, first capacitor, GND, ground, RL, load. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0024] In the description of the embodiments of this application, it should be noted that, unless otherwise specified or limited, the terms "connected" and "connection" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; and direct connections or indirect connections through an intermediary. Those skilled in the art will understand the specific meanings of the above terms in this application based on the specific circumstances.

[0025] In the following, the terms "first," "second," etc. are used for descriptive purposes only and should not be understood to indicate or imply relative importance or implicitly specify the number of the technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of the features. In the description of the embodiments of this application, unless otherwise specified, "plurality" means two or more.

[0026] In addition, the terms "include" and "have" and any variations thereof are intended to cover a non-exclusive inclusion. For example, a process, method, system, product, or device that includes a series of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, product, or device.

[0027] See also Figure 1 , Figure 1 FIG. 1 is a block diagram of a radio frequency power regulation circuit in some embodiments of the present application. Figure 1As shown, the present application provides a radio frequency power regulation circuit 10, which includes N power regulation units 100 and a control unit 200. Each power regulation unit 100 includes a coupling module 110 and a power regulation module 120. Each coupling module 110 is used to connect between the radio frequency power amplifier unit PA and the load RL. The radio frequency power amplifier unit PA is used to output radio frequency power RFP to the load RL. Each power regulation module 120 is connected to the corresponding coupling module 110, and the control unit 200 is connected to the N power regulation modules 120. Each coupling module 110 has an inductance value and an adjustable inductance value, and the inductance value of at least one coupling module 110 is different from the inductance values ​​of other coupling modules 110. Each power regulation module 120 has a first state and a second state. The inductance value of each coupling module 110 varies depending on the state of the corresponding power regulation module 120. The control unit 200 is used to control at least one power regulation module 120 to be in the first state or the second state to adjust the inductance value of the corresponding coupling module 110, thereby adjusting the power value of the radio frequency power RFP transmitted to the load RL, wherein N≥2.

[0028] Thus, the above-mentioned RF power regulation circuit 10 in the present application, by setting N coupling modules 110 connected between the RF power amplifier unit PA and the load RL, and configuring each coupling module 110 to have an inductance value and an adjustable inductance value, can affect the power value of the RF power RFP transmitted to the load RL, and then, according to the relationship between the inductance value of each coupling module 110 and the state of the corresponding power regulation module 120, by setting at least one power regulation module 120 to be in the first state or the second state, the inductance value of the corresponding coupling module 110 can be adjusted, thereby flexibly adjusting the power value of the RF power RFP transmitted to the load RL, with a fast adjustment speed and high adjustment accuracy, which can meet the real-time and accuracy requirements of the load RL and ensure the output stability of the RF power RFP.

[0029] In some embodiments, the inductive reactance value of each coupling module 110 when the corresponding power regulation module 120 is in the first state is smaller than the inductive reactance value when the corresponding power regulation module 120 is in the second state.

[0030] Therefore, the above-mentioned RF power regulation circuit 10 in the present application can adjust the power value of the RF power RFP transmitted to the load RL according to the actual needs of the load RL by configuring the inductive reactance value of each coupling module 110 when the corresponding power regulation module 120 is in the first state to be smaller than the inductive reactance value when the corresponding power regulation module 120 is in the second state.

[0031] like Figure 1As shown, N coupling modules 110 are connected in series between the RF power amplifier unit PA and the load RL, wherein when the control unit 200 controls at least one power regulation module 120 to switch from a first state to a second state, the inductive reactance value of the corresponding coupling module 110 increases, and the power value of the RF power RFP transmitted to the load RL decreases; when the control unit 200 controls at least one power regulation module 120 to switch from the second state to the first state, the inductive reactance value of the corresponding coupling module 110 decreases, and the power value of the RF power RFP transmitted to the load RL increases.

[0032] Therefore, the above-mentioned RF power regulation circuit 10 in the present application can flexibly adjust the power value of the RF power RFP transmitted to the load RL according to the state change of the power regulation module 120, which corresponds to the change in the inductive reactance value of the coupling module 110, and then corresponds to the change in the power value of the RF power RFP transmitted to the load RL.

[0033] See also Figure 2 , Figure 2 FIG. 1 is a circuit diagram of a radio frequency power regulation circuit in some embodiments of the present application. Figure 2 As shown, the RF power amplifier unit PA includes a positive output terminal and a negative output terminal, and the load RL includes a positive input terminal and a negative input terminal, and the positive output terminal is connected to the positive input terminal. Each coupling module 110 includes a first transformer T1, each first transformer T1 includes a first winding and a second winding coupled to each other, and each first winding is connected in series between the negative output terminal and the negative input terminal, wherein each first transformer T1 has a leakage inductance, and the inductance value of each first transformer T1 corresponds to the leakage inductance. Each power regulation module 120 includes a first switch S1, each first switch S1 is connected to the two ends of the corresponding second winding, wherein the control unit 200 is used to control the conduction or disconnection of at least one first switch S1, so that the corresponding power regulation module 120 is in the first state or the second state respectively.

[0034] Therefore, the above-mentioned RF power regulation circuit 10 in the present application can further improve the output stability of the RF power RFP by configuring the first winding of each first transformer T1 to be connected in series between the negative output terminal and the negative input terminal to avoid affecting the RF power RFP transmission path between the positive output terminal and the positive input terminal, and by configuring each first switch S1 to be connected to the two ends of the corresponding second winding, it can control the conduction or disconnection of at least one first switch S1 so that the corresponding power regulation module 120 is in the first state or the second state respectively, and then configure each first transformer T1 to have a leakage inductance, and the inductance value of each first transformer T1 corresponds to the leakage inductance, and can have a corresponding inductive reactance value without setting an additional inductor.

[0035] In some embodiments, the RF power conditioning circuit 10 may further include a second transformer, the second transformer including a third winding and a fourth winding coupled to each other, the positive output terminal being connected to one end of the third winding, the positive input terminal being connected to one end of the fourth winding, and the negative input terminal being connected to the other end of the fourth winding. Each first winding may be connected in series between the negative output terminal and the other end of the third winding.

[0036] Therefore, the above-mentioned RF power regulation circuit 10 in the present application can further isolate the RF power regulation circuit 10 from the load RL to reduce interference to the load RL.

[0037] In some embodiments, the negative output terminal of the RF power amplifier unit PA may be grounded, and the negative output terminal of the load RL may also be grounded.

[0038] In some embodiments, the inductance value of each coupling module 110 is different from each other, and the inductance value of each coupling module 110 when the corresponding power regulation module 120 is in the first state and the inductance value of the second state are different from each other.

[0039] Therefore, the above-mentioned RF power regulation circuit 10 in the present application configures the inductance value of each coupling module 110 to be different from each other, so that the inductive reactance value of each coupling module 110 in the first state and the inductive reactance value of the second state of the corresponding power regulation module 120 are different from each other, which can further improve the regulation accuracy to meet the higher accuracy requirements of the load RL.

[0040] In some embodiments, the sum of the inductive reactance values ​​of the N coupling modules 110 is less than a first inductive reactance threshold, and the first inductive reactance threshold is related to a reflection coefficient threshold and a preset characteristic impedance value.

[0041] Therefore, the above-mentioned RF power regulation circuit 10 in the present application may cause a certain amount of reflected power by affecting the power value of the RF power RFP through the inductive reactance value of the coupling module 110. By configuring the sum of the inductive reactance values ​​of N coupling modules 110 to be less than the first inductive reactance threshold, it is possible to avoid generating a large reflected power, especially to avoid the reflected power reaching a level that affects the RF power amplifier unit PA or even destroys the RF power amplifier unit PA.

[0042] Furthermore, the first inductive reactance threshold may be the product of a preset characteristic impedance value and a preset coefficient, and the preset coefficient may be the ratio of the sum of a constant 1 and a reflection coefficient threshold to the difference between the constant 1 and the reflection coefficient threshold. The preset characteristic impedance value may be 50Ω, and the reflection coefficient threshold may be set as needed.

[0043] See also Figure 3 , Figure 3 FIG. 1 is another block diagram of a radio frequency power regulation circuit in some embodiments of the present application. Figure 3As shown, the RF power regulation circuit 10 further includes a protection unit 300, which is selectively connected to the transmission path of the RF power RFP and has an adjustable capacitive reactance value. The control unit 200 is also connected to the protection unit 300. The control unit 200 is further configured to control the protection unit 300 to connect to the transmission path of the RF power RFP when the sum of the inductive reactance values ​​of the N coupling modules 110 is greater than or equal to a first inductive reactance threshold, to control and adjust the capacitive reactance value of the protection unit 300 to a target capacitive reactance value based on the first inductive reactance threshold, and to disconnect the protection unit 300 from the transmission path of the RF power RFP when the sum of the inductive reactance values ​​of the N coupling modules 110 is less than the first inductive reactance threshold.

[0044] Therefore, the above-mentioned RF power regulation circuit 10 in the present application, by providing a protection unit 300, can adjust the power value of the RF power RFP transmitted to the load RL over a wider range. Specifically, the RF power amplifier unit PA can withstand different reflected powers when operating under different power, temperature and other conditions, and the corresponding first inductive reactance thresholds are also different. Therefore, the sum of the inductive reactance values ​​of the N coupling modules 110 can be greater than the first inductive reactance threshold to meet the needs of the load RL. At the same time, when the sum of the inductive reactance values ​​of the N coupling modules 110 is greater than or equal to the first inductive reactance threshold, the protection unit 300 is controlled to be connected to the transmission path of the RF power RFP, and the capacitive reactance value of the protection unit 300 is controlled and adjusted to the target capacitive reactance value according to the first inductive reactance threshold, which can avoid damage to the RF power amplifier unit PA.

[0045] In some embodiments, the first inductive reactance threshold may vary according to the power value of the radio frequency power RFP output by the radio frequency power amplifier unit PA.

[0046] See also Figure 4 , Figure 4 FIG. 1 is another block diagram of a radio frequency power regulation circuit in some embodiments of the present application. Figure 4 As shown, the protection unit 300 includes a first capacitor C1 and a second switch S2. The first capacitor C1 is connected to the second switch S2, which is connected to the transmission path of the radio frequency power RFP. The second switch S2 is configured to be turned on or off to selectively connect the first capacitor C1 to the transmission path of the radio frequency power RFP. The first capacitor C1 has an adjustable capacitance value, so that the protection unit 300 has an adjustable capacitive reactance value. The control unit 200 is configured to control the second switch S2 to be turned on when the sum of the inductive reactance values ​​of the N coupling modules 110 is greater than or equal to a first inductive reactance threshold, and to control and adjust the capacitance value of the first capacitor C1 to a target capacitance value based on the first inductive reactance threshold so that the capacitive reactance value of the protection unit 300 is the target capacitive reactance value. The control unit 200 is configured to control the second switch S2 to be turned on and off when the sum of the inductive reactance values ​​of the N coupling modules 110 is less than the first inductive reactance threshold.

[0047] Thus, the above-mentioned RF power regulation circuit 10 in the present application, by setting an adjustable first capacitor C1 and a second switch S2, can realize the conduction or disconnection of the transmission path of the RF power RFP, and when the sum of the inductive reactance values ​​of the N coupling modules 110 is greater than or equal to the first inductive reactance threshold, the capacitance value of the first capacitor C1 is controlled and adjusted to the target capacitance value according to the first inductive reactance threshold.

[0048] Among them, Figure 4 As shown, one end of the first capacitor C1 can be connected to the transmission path of the radio frequency power RFP through the second switch S2, and the other end of the first capacitor C1 can be grounded GND.

[0049] In some embodiments, the control unit 200 can be a general-purpose processor such as a central processing unit (CPU), or a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA) or other programmable logic devices, discrete gate logic devices, transistor logic devices and other logic control devices, or a microprocessor such as a micro control unit (MCU).

[0050] The RF power regulation circuit 10 of the present application, through the above-mentioned structure, can flexibly adjust the power value of the RF power RFP transmitted to the load RL, with a fast adjustment speed and high adjustment accuracy, and can meet the real-time and accuracy requirements of the load RL, and can also ensure the output stability of the RF power RFP.

[0051] See also Figure 5 , Figure 5 FIG. 1 is a block diagram of a radio frequency power supply device in some embodiments of the present application. Figure 5 As shown, the present application further provides a radio frequency power supply device 1000, which includes a radio frequency power amplifier unit PA and the radio frequency power regulation circuit 10 in any of the aforementioned embodiments.

[0052] Please refer again Figure 1 .like Figure 1As shown, the RF power regulation circuit 10 includes N power regulation units 100 and a control unit 200. Each power regulation unit 100 includes a coupling module 110 and a power regulation module 120. Each coupling module 110 is used to connect between the RF power amplifier unit PA and the load RL. The RF power amplifier unit PA is used to output RF power RFP to the load RL. Each power regulation module 120 is connected to the corresponding coupling module 110, and the control unit 200 is connected to the N power regulation modules 120. Each coupling module 110 has an inductance value and an adjustable inductance value, and the inductance value of at least one coupling module 110 is different from the inductance values ​​of other coupling modules 110. Each power regulation module 120 has a first state and a second state. The inductance value of each coupling module 110 varies depending on the state of the corresponding power regulation module 120. The control unit 200 is used to control at least one power regulation module 120 to be in the first state or the second state to adjust the inductance value of the corresponding coupling module 110, thereby adjusting the power value of the radio frequency power RFP transmitted to the load RL, wherein N≥2.

[0053] The more specific structure of the RF power regulating circuit 10 can be found in the relevant content of the RF power regulating circuit 10 in any of the aforementioned embodiments, which will not be repeated here.

[0054] In some embodiments, the RF power regulation circuit 10 may also be used to connect to a load RL, wherein the load RL may be a plasma load RL.

[0055] The RF power regulation circuit 10 and RF power supply device 1000 of the present application, through the above-mentioned structure, can flexibly adjust the power value of the RF power RFP transmitted to the load RL, with a fast adjustment speed and high adjustment accuracy, and can meet the real-time and accuracy requirements of the load RL, and can also ensure the output stability of the RF power RFP.

[0056] See also Figure 6 , Figure 6 FIG. 1 is a block diagram of a radio frequency power supply system in some embodiments of the present application. Figure 6 As shown, the present application further provides a radio frequency power supply system 1, which includes the radio frequency power supply device 1000 in any of the aforementioned embodiments.

[0057] Please refer again Figure 5 .like Figure 5 As shown, the RF power supply device 1000 includes a RF power amplifier unit PA and a RF power regulation circuit 10 .

[0058] The more specific structure of the RF power supply device 1000 can be found in the relevant content of the RF power supply device 1000 in any of the aforementioned embodiments, which will not be repeated here.

[0059] In some embodiments, the RF power supply device 1000 may be connected to a load RL, wherein the load RL may be a plasma load RL.

[0060] In some embodiments, the RF power supply system 1 may further include an impedance matcher, which may be used to perform impedance matching between the RF power supply device 1000 and the load RL.

[0061] The RF power regulation circuit 10, RF power supply device 1000 and RF power supply system 1 of the present application, through the above-mentioned structure, can flexibly adjust the power value of the RF power RFP transmitted to the load RL, with a fast adjustment speed and high adjustment accuracy, and can meet the real-time and accuracy requirements of the load RL, and can also ensure the output stability of the RF power RFP.

[0062] The above description is only a specific embodiment of the present application, but the scope of protection of the present application is not limited thereto. Any changes or substitutions that can be easily conceived by any person skilled in the art within the technical scope disclosed in this application should be included in the scope of protection of this application; the embodiments of this application and the features of the embodiments can be combined with each other unless there is a conflict. Therefore, the scope of protection of this application should be based on the scope of protection of the claims.

Claims

1. A radio frequency power regulation circuit, characterized in that: It includes N power adjustment units and a control unit, each power adjustment unit includes a coupling module and a power adjustment module, each coupling module is used to be connected between the radio frequency power amplifier unit and the load, the radio frequency power amplifier unit is used to output radio frequency power to the load, each power adjustment module is connected to the corresponding coupling module, and the control unit is connected to the N power adjustment modules; Each coupling module has an inductance value and an adjustable inductance value, and the inductance value of at least one coupling module is different from the inductance values ​​of other coupling modules. Each power regulation module has a first state and a second state. The inductance value of each coupling module varies according to the state of the corresponding power regulation module. The control unit is used to control at least one power regulation module to be in the first state or the second state to adjust the inductance value of the corresponding coupling module, thereby adjusting the power value of the radio frequency power transmitted to the load, wherein N≥2.

2. The radio frequency power regulation circuit according to claim 1, characterized in that: The inductive reactance value of each coupling module when the corresponding power regulation module is in the first state is smaller than the inductive reactance value when the corresponding power regulation module is in the second state.

3. The radio frequency power regulation circuit according to claim 2, wherein: N coupling modules are connected in series between the RF power amplifier unit and the load, wherein when the control unit controls the at least one power regulation module to switch from the first state to the second state, the inductive reactance value of the corresponding coupling module increases, and the power value of the RF power energy transmitted to the load decreases; when the control unit controls the at least one power regulation module to switch from the second state to the first state, the inductive reactance value of the corresponding coupling module decreases, and the power value of the RF power energy transmitted to the load increases.

4. The radio frequency power regulation circuit according to claim 2, wherein: The RF power amplifier unit includes a positive output terminal and a negative output terminal, the load includes a positive input terminal and a negative input terminal, and the positive output terminal is connected to the positive input terminal; Each coupling module includes a first transformer, each first transformer includes a first winding and a second winding coupled to each other, each first winding is connected in series between the negative output terminal and the negative input terminal, wherein each first transformer has a leakage inductance, and the inductance value of each first transformer corresponds to the leakage inductance; Each power regulating module includes a first switch, each first switch is connected to the two ends of the corresponding second winding, wherein the control unit is used to control the conduction or disconnection of at least one first switch so that the corresponding power regulating module is in the first state or the second state respectively.

5. The radio frequency power regulation circuit according to claim 1, wherein: The inductance value of each coupling module is different from each other, and the inductance value of each coupling module when the corresponding power regulation module is in the first state and the inductance value of the second state are different from each other.

6. The radio frequency power regulation circuit according to claim 1, characterized in that: The sum of the inductive reactance values ​​of the N coupling modules is less than a first inductive reactance threshold, where the first inductive reactance threshold is related to a reflection coefficient threshold and a preset characteristic impedance value.

7. The radio frequency power regulation circuit according to claim 1, characterized in that: The radio frequency power regulation circuit further includes a protection unit, the protection unit being selectively connected to the transmission path of the radio frequency power, and the protection unit having an adjustable capacitive reactance value; The control unit is also connected to the protection unit, and is further used to control the protection unit to be connected to the transmission path of the radio frequency power when the sum of the inductive reactance values ​​of the N coupling modules is greater than or equal to a first inductive reactance threshold, and to control the capacitive reactance value of the protection unit to be adjusted to a target capacitive reactance value according to the first inductive reactance threshold, and to control the protection unit to be disconnected from the transmission path of the radio frequency power when the sum of the inductive reactance values ​​of the N coupling modules is less than the first inductive reactance threshold.

8. The radio frequency power regulation circuit according to claim 7, characterized in that: The protection unit includes a first capacitor and a second switch, the first capacitor is connected to the second switch, the second switch is connected to the transmission path of the radio frequency power energy, and the second switch is used to be turned on or off so that the first capacitor is selectively connected to the transmission path of the radio frequency power energy; The first capacitor has an adjustable capacitance value, so that the protection unit has an adjustable capacitive reactance value. The control unit is configured to control the second switch to be turned on when the sum of the inductive reactance values ​​of the N coupling modules is greater than or equal to the first inductive reactance threshold, and to control and adjust the capacitance value of the first capacitor to a target capacitance value according to the first inductive reactance threshold so that the capacitive reactance value of the protection unit is the target capacitive reactance value, and to control the second switch to be turned on and off when the sum of the inductive reactance values ​​of the N coupling modules is less than the first inductive reactance threshold.

9. A radio frequency power supply device, characterized in that: It comprises a radio frequency power amplifier unit and a radio frequency power regulation circuit as described in any one of claims 1 to 8.

10. A radio frequency power supply system, characterized in that: Comprising the radio frequency power supply device as claimed in claim 9.

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