Sputtering ion pump module and vacuum pump

Abstract

A sputter ion pump SIP module includes a frame structure, an anode connected to the frame structure, and a shell connected to the frame structure, where the shell at least partially surrounds the frame structure and the anode, where the shell includes at least one magnet and at least one cathode element.

Description

Technical Field

[0001] The present invention relates to a sputtering ion pump (SIP) module and a vacuum pump comprising such a SIP module. In addition, the present invention relates to a method for assembling such a SIP module. Background Art

[0002] A commonly known SIP comprises one or more anodes constructed as tubes or cylindrical openings, wherein a magnetic field is oriented parallel to the central axis of the tube. The anode is surrounded by a cathode element. In particular, the cathode element is arranged relative to the cylindrical opening of the anode at a certain distance along the central axis. A strong electric field is generated between the anode and the cathode. Due to the magnetic field, the path of electrons in the anode unit is enhanced, which leads to ionization of gas atoms and molecules in the vacuum chamber. The generated ions are accelerated and collide with the cathode element. When the accelerated ions impact the cathode element, they will be buried in the cathode material or sputter the cathode material onto other surfaces of the pump. The continuously sputtered chemically active cathode material acts as a getter, which then evacuates the gas by both chemical adsorption and physical adsorption, resulting in a net pumping action.

[0003] In a typical SIP, the pumping elements (i.e., including the cathode and anode) are constructed within a vacuum chamber that can be fixed to a vacuum apparatus, and the magnetic field is provided by pole pieces and magnets located outside the SIP's vacuum chamber. This design is not transferable to a flange-mounted device and would require additional build space within the vacuum chamber, as well as an unnecessarily large flange to integrate all the functional components of the SIP within the flange's face. Furthermore, the assembly of prior art SIPs requires multiple steps and is very complex due to the need to assemble multiple parts within the vacuum chamber. Summary of the Invention

[0004] An object of the present invention is to provide a sputter ion pump (SIP) module that can be assembled more easily and provides a modular design for service and repair.

[0005] This problem is solved by a SIP module according to claim 1 , a vacuum pump according to claim 14 and a method for assembling a SIP module according to claim 19 .

[0006] The sputtering ion pump (SIP) module according to the present invention includes a frame structure, an anode connected to the frame structure, and a shell connected to the frame structure, wherein the shell at least partially surrounds the frame structure and the anode. The shell includes at least one magnet and may also include at least one cathode element that is preferably directly connected to the shell. However, the at least one cathode element may not be part of the shell or may not be directly connected to the shell. Therefore, the shell simultaneously provides the functional components of the SIP module, namely at least one magnet and preferably at least one cathode element. At the same time, the shell provides structural stability for the SIP module. Therefore, the frame structure and the shell together provide the complete structure of the SIP without the need for additional structural components. Therefore, the overall design is simplified and the number of necessary parts is reduced. At the same time, the number of assembly steps can be reduced. In addition, since the shell carries the at least one magnet, the magnet is arranged in a vacuum chamber together with the complete SIP module. Therefore, substantially no parts or at least functional components of the SIP module (except for, for example, electrical feedthroughs) are arranged externally, thereby efficiently utilizing the available space in the vacuum chamber.

[0007] Preferably, the frame structure comprises a base element and at least one or more frame side elements connected to the base element. The base element provides a foundation for the SIP module, and the other parts of the SIP module are assembled to the base element and / or the at least one or more frame side elements of the frame structure. The frame side elements can be configured as shoulder screws or posts connected to the base element. The frame structure may not provide overall structural stability for the assembled SIP module for operation. Alternatively, a shell connected to the frame structure can also contribute to the structural stability of the SIP module, and only the frame structure and the shell combined can provide a structurally stable, ready-to-operate SIP module.

[0008] Preferably, the base element may be a flange for connecting the SIP module to a vacuum device or vacuum chamber. Alternatively, the base element may be connected to a flange that is part of the SIP module, or to a vacuum pump that includes such a SIP module.

[0009] Preferably, the frame structure comprises a top element, wherein said at least one or more frame side elements extend from a base element to the top element.

[0010] Preferably, the frame structure comprises exactly two frame side elements (ie shoulder screws).

[0011] Preferably, the frame structure consists only of a base element, at least one or more frame side elements and a top element. Thus, a basic part of the SIP module is provided, which provides sufficient structural stability for assembling the other parts of the SIP module (i.e., anode and shell).

[0012] Preferably, the top element comprises an opening for receiving the at least one or more frame side elements and further comprises a fixing element for fixing the position of the top element on the frame side elements. Thus, the top element can be slidably connected to the at least one or more frame side elements, wherein the position of the top element relative to the at least one or more frame side elements or relative to the base element can be fixed by the fixing element. In particular, the fixing element is provided by a set screw that can be arranged perpendicular to the corresponding shoulder screw.

[0013] Preferably, the shell is in direct contact with the base element, and preferably also with the top element. In particular, the fixing elements allow direct contact between the top element and the shell to be achieved by adjusting the position of the top element on the at least one or more frame side elements. The fixing elements allow the top element to be positioned relative to the shell after assembly of the anode and shell, so that it directly abuts the shell. This provides structural stability, and movements / forces on one of the components of the SIP module are also transmitted to the shell, base element, and top element via direct contact.

[0014] Preferably, a non-evaporable getter (NEG) pump module is connectable to the top element. Due to the improved structural stability of the SIP module, it is possible to attach the NEG pump module directly on top of the SIP module in a stacked manner.

[0015] The shell is preferably constructed of a magnetic material and functions as a pole shoe. In other words, the SIP pole shoe is integrally constructed with the SIP module's shell. Therefore, the shell not only provides structural stability but also acts as a pole shoe, directly influencing the magnetic field within the SIP module.

[0016] Preferably, the shell includes one or more openings to allow gas to enter the pumping volume of the SIP.

[0017] Preferably, the shell comprises two or more shell elements.Thereby, assembling of the shell is facilitated due to the division of the shell into two or more shell elements.

[0018] Preferably, the shell is cylindrical, and the shell elements are semi-cylindrical or partially cylindrical. In other words, the shell can have a circular cross-section, and the shell elements can have a semi-circular or partially circular cross-section. The shell elements combine to form the overall shell shape. Thus, if there are two shell elements, each shell element can have a semi-cylindrical shape. However, other shell shapes are also possible, such as quadratic cross-sections or other shapes.

[0019] Preferably, each shell element is constructed identically or differently. By constructing each shell element identically, assembly can be simplified and the number of parts that need to be manufactured can be reduced during manufacture.

[0020] Preferably, each housing element includes at least one magnet and at least one cathode element. Thus, the at least one magnet and the at least one cathode element are directly connected to the corresponding housing element, and upon assembly of the housing elements, the at least one magnet and the at least one cathode element are also simultaneously assembled to the SIP module. This reduces the number of parts to be assembled and enables pre-assembly of the corresponding housing elements.

[0021] Preferably, each housing element is constructed of a magnetic material and functions as a pole shoe. In other words, the pole shoe is integrally formed with the SIP module housing. Therefore, the housing not only provides structural stability but also acts as a pole shoe, directly influencing the magnetic field within the SIP module.

[0022] Preferably, the shell elements are connected to each other via the magnetic force of magnets. Specifically, no additional fixing elements are required to attach the shell elements to the frame structure. The shell elements are held in place solely by the magnetic attraction of the magnets. Therefore, the magnets attached to the respective shell elements serve two purposes: first, providing a magnetic field for the SIP; second, assembling the shell elements and holding them in place. This simplifies the assembly of the SIP module and reduces the number of parts in the vacuum. In particular, tool-free assembly of the shells is possible.

[0023] Preferably, the number of frame side elements corresponds to the number of shell elements. In particular, each shell element extends between two frame side elements. If the frame structure has two frame side elements, each shell element spans a semicircle of the cylindrical shell. Thus, each shell element is directly connected to the frame structure via a corresponding pair of frame side elements of the frame structure.

[0024] Preferably, at least one shell element comprises a recess along an axial edge of the shell element for accommodating one of the frame side elements (i.e., the shoulder screw). Thus, via this recess, the shell element accommodates the shape of the corresponding frame side element, thereby defining the position of the shell element and facilitating its placement. In particular, each shell element comprises such a recess, and in particular, each shell element comprises a recess extending in the axial direction on both edges.

[0025] Another aspect of the present invention provides a vacuum pump comprising a sputtering ion pump (SIP) module as described above and a non-evaporable gas (NEG) module connected to the SIP module, preferably to a top element of the SIP module. In particular, the NEG module can be directly connected to the top element of the SIP module. Alternatively, the NEG module can be connected to the top element of the SIP module via an intermediate element to facilitate connection between the NEG module and the SIP module.

[0026] Preferably, the outer structure of the SIP module and / or the outer structure of the NEG module is cylindrical. In the case of the SIP module, the outer structure can be provided by a shell having a cylindrical shape. The outer structure can be an outer shell, which can be vacuum-tight or not. The outer shell enables the SIP module and / or NEG module to function properly and preferably provides a means for connecting a vacuum pump to a vacuum device or a vacuum chamber. Alternatively, the outer structure surrounds the elements of the SIP module and / or NEG module and is constructed to be inserted into the vacuum device or the vacuum chamber. The outer structure can include an opening to allow gas to enter the SIP module or the NEG module.

[0027] Preferably, the outer surface of the SIP module and the outer surface of the NEG module (in particular the outer surfaces of the respective outer structures) are flush with each other, thereby providing an overall cylindrical shape of the vacuum pump.

[0028] Preferably, the vacuum pump comprises a flange, wherein the SIP module is connected to the flange with its first end and preferably to the NEG module with its second end. In particular, the SIP module is directly connected to the flange via its base element, and the NEG module is connected to the SIP module via its top element. Alternatively, the base element can also be a flange for connecting the SIP / NEG module to a vacuum device or vacuum chamber.

[0029] Preferably, the SIP module and the NEG module are arranged in the flange area. Therefore, the SIP module and the NEG module can be inserted into the vacuum chamber together and fixed to the vacuum chamber via the flange.

[0030] Preferably, the NEG module and / or SIP module are completely housed within the vacuum environment. In particular, due to their small build dimensions, both the NEG module and the SIP module can be inserted into a vacuum chamber and connected to the chamber via flanges. Therefore, the vacuum chamber housing the vacuum pump does not increase the volume of the vacuum chamber. Furthermore, the present invention reduces the number of parts within the vacuum chamber compared to a standard ion pump design modified to accommodate flange mounting.

[0031] Another aspect of the present invention provides a method for assembling a SIP module. The method comprises:

[0032] Provide a framework structure;

[0033] providing anodes and securing the anodes within the frame structure;

[0034] Two or more shell elements of the shell are provided, and the shell elements are attached to the frame structure by magnetic forces.

[0035] Thus, the anode is connected to the frame structure, and then the two or more shell elements of the housing are attached to the frame structure. Specifically, the shell elements are attached to the frame structure via the magnetic attraction force of the SIP module's magnets. Specifically, no additional step of securing the shell elements to the frame structure is required. Specifically, the shell elements are attached to the frame structure solely via magnetic force.

[0036] Preferably, the frame structure comprises at least a base element and at least one frame side element connected to the base element to create the frame structure

[0037] Preferably, after the individual shell elements of the housing are attached to the frame structure, the top element of the frame structure can be aligned in position to directly contact the upper end of the housing. This way, the lower end of the housing is in direct contact with the base element, while the upper end of the housing is in direct contact with the top element. Mechanical loads along the SIP module are thus transferred directly from the base element to the top element via the housing and distributed over the entire perimeter of the pump, rather than being concentrated at the connection points of the frame side elements to the base and top elements, despite the fact that the housing elements are connected to the frame structure only through their magnetic forces. The combination of the frame structure and housing provides the SIP module with sufficient stability.

[0038] Preferably, the SIP module is further constructed according to the above features. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] The present invention will be described in more detail below with reference to the accompanying drawings.

[0040] Figure 1 is a vacuum pump according to the present invention,

[0041] Figure 2 for Figure 1 Cross-sectional view of a vacuum pump.

[0042] Figure 3 for Figure 1 The frame structure of the vacuum pump,

[0043] Figure 4A and 4B for Figure 1 The frame structure and anode of the vacuum pump,

[0044] Figures 5A-5C for Figure 1 The shell components of the vacuum pump,

[0045] Figure 6A and 6B is a cross-sectional view of a non-evaporable getter module.

[0046] Figure 7 is a connecting element according to the present invention,

[0047] Figure 8A and 8B is an insulating element according to the present invention.

[0048] Figure 9 Based on Figure 1 Cross-sectional view of the SIP module. DETAILED DESCRIPTION

[0049] refer to Figure 1 , shows a vacuum pump 10 according to the present invention. Therein, the vacuum pump 10 includes a non-evaporable getter (NEG) module 12, a sputtering ion pump (SIP) module 14 and a vacuum flange 16. The SIP module 14 is directly connected to the flange 16, and the NEG module 12 is attached to the SIP module 14 opposite to the flange 16. The vacuum pump 10, and in particular the NEG module 12 and the SIP module 14, both have a cylindrical shape. The shape of the SIP module 14 matches the shape of the NEG module 12, so that the SIP module 14 and the NEG module 12 can have a substantially similar or identical outer shape, or at least a substantially similar or identical cross-sectional area. Although in the figure below, the vacuum pump has a cylindrical shape, other shapes are also possible.

[0050] The NEG module 12 and the SIP module 14 are arranged in the region of the flange 16 and can be fully inserted into the vacuum chamber for pumping.

[0051] refer to Figure 2 The SIP module 14 is shown in cross-section and includes an anode 20. Figure 2 In the example shown, the anode has three cylindrical openings or tubes. Other numbers of tubes are also possible. A cathode 18 is provided at the axial ends of these openings. The anode 20 is maintained at a high potential by a high-voltage (HV) conductor 28, which is guided through the flange and connected to the anode via a vacuum feedthrough 26. The flange 16 also includes a connector 68, which is connected to a heating element 32 of the NEG module 12 via electrical leads 30. A NEG element 34 is arranged on the heating element 32 for reactivating the NEG material by heating.

[0052] Here and below, the axial direction of the SIP and its components is defined as along the anode from its lower side to its upper side.Here and below, the lateral direction refers to the direction perpendicular to the axial direction of the anode.

[0053] refer to Figure 3 , shows a frame structure 48 of the SIP module. The frame structure 48 includes a base element 50 that can be attached to the flange 16 by welding, brazing, soldering, screws, or any other releasable connection means. In other embodiments, the flange 16 and the base 50 are integrally constructed, or the base element 50 can be provided by the flange 16 itself. Figure 3 In the example shown, two frame side elements 24 are connected to a base element 50, which are constructed as shoulder screws or posts that extend from the base element 50 to the top element 52. The NEG module 12 can be connected to the top element 52 by welding, brazing, soldering, screws, or any other releasable connection means. During assembly, the anode 20 is fixed within the frame structure 48, and then the frame structure 48 and the anode 20 are connected together to the flange 16. This shows Figure 4A and 4B The anode 20 is connected to the frame structure 48 via a lower support element 71, which is provided by an insulating element 62 connected to the anode 20. Furthermore, an upper support element 73 is provided by an insulating element 74. The insulating elements 62 and 74 are constructed of an insulating material, such as a ceramic material. The lower insulating support 71 restricts the anode 20 from moving downward toward the flange 16 and may restrict lateral movement (i.e., movement in one or more other directions or all other directions). The upper support element 73 restricts the anode 20 from moving upward and laterally (i.e., movement in one or more other directions or all other directions). At least one or both support elements 71 and 73 may not completely restrict lateral movement, thereby allowing the anode to move slightly laterally when connecting the anode to the HV conductor 28, thereby facilitating installation of the HV conductor 28 onto the anode 20. Thus, a secure connection between the HV conductor 28 and the anode 20 is possible, and slight manufacturing deviations can be compensated for. In order to completely prevent the movement of the anode 20 and to fix the position of the anode in the frame structure, the anode 20 is connected to the HV conductor 28 extending through the opening in the base element 50, connecting the anode 20 to the HV conductor 28 of the vacuum feedthrough 26 via the conductive sleeve 49. Thus, the anode 20 is fixed in its position within the frame structure 48 of the SIP module 14 by the lower support element 71, the upper support element 73 and the connection to the HV conductor 28 of the electrical feedthrough 26.

[0054] Therefore, the steps of assembling the SIP module 14 include:

[0055] a) providing a frame structure preferably comprising a base element 50,

[0056] Connecting one or more frame side members 24 to the base member and may also include a top member 52 connected to a respective frame side member 24,

[0057] b) inserting the anode and connecting the anode to the frame structure via the lower support element 71 and the upper support element 73,

[0058] c) attaching the frame structure 48 together with the anode 20 to the flange 16 , thereby connecting the anode 20 to the electrical feedthrough 26 and simultaneously fixing the position of the anode 20 in the SIP module 14 ,

[0059] d) Attaching the shell around the frame structure 48 as explained in more detail below.

[0060] refer to Figures 5A to 5C , shows details of the housing of the vacuum pump 10. The housing of the vacuum pump 10, and in particular the housing of the SIP module 14, comprises two separate housing elements 22. In this embodiment, each housing element 22 is constructed identically, but the housing elements 22 can also be constructed / designed differently. Each housing element 22 comprises at least one magnet 78, wherein Figures 5A to 5C In the example of FIG, each shell element 22 includes two magnets 78. The magnets 78 are arranged in recesses 79 of the shell element 22 to prevent lateral movement. The size of the recess 79 is adapted to the size of the magnet so that the side walls of the recess 79 directly contact the side walls of the corresponding magnet 78. The magnets 78 are attached to the corresponding shell element 22 solely by their magnetic force. There are no additional fixing / fastening elements. Therefore, the shell element 22 serves as both the pole shoe and the external structure of the SIP module 14. The pole shoe guides the magnetic flux through the SIP module 14, and the external structure provides structural stability for the SIP module 14. Therefore, the shell element 22 is made of a magnetic material (such as mild steel). The magnets 78 are neodymium (Nd) magnets or samarium (Sa) cobalt (Co) magnets. The magnets are attached to the shell element 22 with one surface. The opposite surface of the magnets 78 is directly connected to the cathode 18. The cathode 18 is plate-shaped and covers the entire or substantially entire surface of the magnets 78. The cathode 18 can be made of titanium (Ti) or tantalum (Ta). The two shell elements 22 can include cathode elements 18 and 18' made of the same material or different materials. To secure the cathode 18 in place, a bracket or clamping element 80 is provided at the upper and lower ends of the corresponding magnet 78. The bracket element 80 is held in place by the magnetic force of the magnet 78. No additional fixing elements are required. The bracket element 80 includes a chamfered surface 84, which is chamfered toward the magnet 78. Similarly, the cathode element 18 includes a chamfered edge 82, which is chamfered away from the magnet 78 and corresponds to the chamfered surface 84 of the bracket element 80. When the bracket element 80 is attached to the side of the magnet 78, a clamping force is applied to the cathode 18 to secure the position of the cathode 18. The surface of the cathode element 18 is flush with the corresponding bracket element 80, and therefore it is possible to tightly position the cathode element 18 to the anode 20. In addition, the assembly and disassembly of the cathode element 18 can be completed without additional tools.

[0061] The two shell elements 22 have a similar shape to the outer shape of the SIP module 14. The shell elements 22 have openings 23 to allow gas molecules and particles to enter the active volume of the SIP module. The present invention is not limited by the number or shape of these openings 23. To provide sufficient stability for the shell elements, the shell elements 22 are provided with recesses 81 along the axial direction of the shell elements 22 at their axial edges. These recesses 81 accommodate the frame side elements 24 when attached to the shell elements 22. Thus, the corresponding shape of the recesses 81 determines the position of the elements 22 by the position of the frame side elements 24.

[0062] refer to Figure 6A and 6B , shows a NEG module 12 including a heater 32 with a heating wire 86. The NEG module 12 includes a base member 88 and a top member 90, wherein the NEG element 34 is positioned over the heater 32. The top member 90 and the base member 88 can be connected by NEG side members, such as shoulder screws or posts. In particular, the NEG side members are constructed from threaded rods or posts. Electrical connection to the heater 32 is provided by an electrical connector 38 having a connecting member 94. Figure 7 The connecting element 94 is shown in more detail in FIG. The connecting element 94 includes a first end 96 and a second end 98. There is a collar or protruding feature 100 between the first end 96 and the second end 98. Although Figure 7 , the first end 96 and the second end 98 may have the same diameter, but the present invention is not limited to this example, and different diameters of the first end 96 and the second end 98 will also be possible. Figure 7 The example of φ shows a circular cross section, wherein other shapes are of course also possible.

[0063] Connector 38 includes insulating elements 102 and 106, such as Figure 8A and 8B As shown. The first insulating element 102 has openings 104. The number of openings 104 corresponds to the number of connecting elements 94. The diameter of the openings 104 corresponds to the diameter of the first end 96, and the insulating element 102 is preferably made of a ceramic material. Similarly, the second insulating element 106 is made of a ceramic material. The second insulating element 106 is constructed of two halves, wherein Figure 8BOnly a single half is shown. An opening 108 is established through the two halves of the insulating element 106, wherein the diameter of the opening 108 corresponds to the diameter of the second end 98 of the connecting element 94. The connecting element 94 is crimped or otherwise attached to the heating wire 86 of the heater 32. Subsequently, the two halves of the second insulating element are inserted into the housing of the base element 88 of the NEG module 12 and placed on the shoulder 95. Wherein, due to the protruding features 100, the connecting element 94 will not fall through the opening 108 of the second insulating element 106. Subsequently, the first insulating element 102 is assembled by inserting the first end 96 of the connecting element 94 into the corresponding opening 104. Due to the protruding features 100, the connecting element 94 will not fall from the first insulating element 102. The first insulating element 102 and the second insulating element 106 are fixed in their positions by fixing elements (for example, provided by set screws). Therefore, no clamping force acts directly on the connecting element 94. Due to the protruding features 100 , the fixing element 94 is fixed in its axial position, wherein a slight lateral movement of the connecting element 94 is still allowed and helps during assembly of the NEG module 12 .

[0064] Similar to the connector 38 that connects the NEG module 12 to the SIP module 14, a connector 40 is provided to connect the SIP module to the flange 16, as shown. Figure 4A and 4B Thus, electrical leads 30 connected to the heater 32 extend from the flange 16 through the complete SIP module 14 and via the connector 38 to the NEG module 12. The electrical leads 30 may be composed of two wires 110 and 110' that are surrounded by an insulating material, such as a ceramic material.

[0065] The following will refer to Figure 9, shows a cross-sectional top view of a SIP module 14. Anode 20 has a first surface 114 and an opposing second surface 118, which correspond to the axial direction of the cylindrical opening in anode 20. First surface 114 and second surface 118 are connected by a side surface 116, along which electrical lead 30 extends. Due to the location of electrical lead 30, there is no direct line of sight 112 between cathode element 18 and electrical lead 30, thereby preventing or at least reducing the possibility of cathode 18 material splashing onto the surface of electrical lead 30 (which could create a short circuit). Thus, electrical lead 30 is protected by anode 20 itself. Accordingly, side surface 116 of the anode may include a recess 120 that accommodates electrical lead 30 and its corresponding wires 110, 110'. The low voltage power supply for the heater 32 of the NEG module 12 thus extends from the connector 68 via the connecting element 40 and the electrical leads 30, through the SIP module 14, and in particular within the pole piece of the SIP module provided by the shell element 22, towards the connector 38 at the SIP module top element 52, and then further to the connector 38 and the heater 32.

[0066] Thus, the vacuum pump according to the present invention provides a combination of a NEG module and a SIP module, both of which can be fully inserted into a vacuum chamber having a small cross-sectional area. Simultaneously, the implementation of the frame structure 48 and the housing simplifies the assembly process of the SIP module 14 and reduces the number of parts required in the vacuum environment.

[0067] Reference Signs List

[0068] 10 Vacuum pump

[0069] 12 NEG modules

[0070] 14 SIP modules

[0071] 16 Flange

[0072] 18, 18' cathode element

[0073] 20 Anode

[0074] 22 Shell Components

[0075] 23 Opening

[0076] 24 Frame side members

[0077] 26 Vacuum feedthrough

[0078] 28 HV conductor

[0079] 30 electrical leads

[0080] 32 Heating Elements

[0081] 34 NEG components

[0082] 38 connectors

[0083] 40 connectors

[0084] 48 frame structure

[0085] 49 Conductive Sleeve

[0086] 50 base element

[0087] 52 top element

[0088] 62 Insulation elements

[0089] 68 connector

[0090] 71 Lower support element

[0091] 73 Upper support element

[0092] 74 Insulation elements

[0093] 78 magnets

[0094] 79 recess

[0095] 80 bracket elements

[0096] 81 Notch

[0097] 82 Chamfered Edges

[0098] 84 Chamfered surface

[0099] 86 heating wire

[0100] 88 base element

[0101] 90 top element

[0102] 94 connecting elements

[0103] 95 Shoulders

[0104] 96 first end

[0105] 97 fixing element

[0106] 98 Second end

[0107] 100 outstanding features

[0108] 102 first insulating element

[0109] 104 Opening

[0110] 106 second insulating element

[0111] 108 Opening

[0112] 110, 110' wire

[0113] 112 Sight

[0114] 114 first surface

[0115] 116 side surface

[0116] 118 Second Surface

[0117] 120 notch

Claims

1. A sputtering ion pump SIP module, comprising frame structure, an anode connected to the frame structure, and connected to the shell of the frame structure, wherein The shell at least partially surrounds the frame structure and the anode, Therein, the housing comprises at least one magnet and preferably at least one cathode element.

2. The sputtering ion pump module according to claim 1, wherein: The frame structure comprises a base element and at least one or more frame side elements connected to the base element.

3. The sputtering ion pump module according to claim 2, wherein: The frame structure comprises a top element, wherein the at least one or more frame side elements extend from the base element to the top element.

4. The sputtering ion pump module according to claim 3, wherein: The top element comprises an opening for receiving the at least one or more frame side elements and further comprises a fixing element for fixing the position of the top element on the frame side elements.

5. The sputter ion pump module according to any one of claims 1 to 4, wherein The shell comprises two or more shell elements.

6. The sputtering ion pump module according to claim 5, wherein: The shell is cylindrical and the shell elements are semi-cylindrical or partially cylindrical.

7. The sputtering ion pump module according to claim 5 or 6, wherein: Each shell element is constructed identically.

8. The sputter ion pump module according to any one of claims 5 to 7, wherein: Each shell element includes at least one magnet and at least one cathode element.

9. The sputter ion pump module according to any one of claims 5 to 8, wherein: Each shell element is constructed from a magnetic material and serves as a pole shoe.

10. The sputter ion pump module according to any one of claims 5 to 9, wherein: The shell elements are connected to each other by the magnetic force of the magnets.

11. The sputter ion pump module according to any one of claims 5 to 10, wherein: There are no additional fixing elements for attaching the shell elements to the frame structure.

12. The sputter ion pump module according to any one of claims 5 to 11, wherein: The number of the frame side elements corresponds to the number of the shell elements.

13. The sputter ion pump module according to any one of claims 5 to 12, wherein: At least one shell element includes a recess along an axial edge of the shell element to receive one of the frame side elements.

14. A vacuum pump comprising a sputter ion pump SIP module according to any one of claims 1 to 13, and a NEG pump module preferably connected to the SIP module.

15. The vacuum pump according to claim 14, wherein The outer structure of the SIP module and / or the outer structure of the NEG module is cylindrical.

16. The vacuum pump according to any one of claims 14 or 15, wherein An outer surface of the SIP module and an outer surface of the NEG module are flush with each other.

17. A vacuum pump according to any one of claims 14 to 16, comprising a flange, wherein The SIP module is connected with its first end to the flange, and / or wherein the NEG module and the SIP module are arranged in the region of the flange.

18. The vacuum pump according to any one of claims 14 to 17, wherein The NEG module and / or the SIP module are arranged completely within a vacuum.

19. A method for assembling a SIP module, preferably the SIP module according to any one of claims 1 to 13, the method comprising: Provide a framework structure; providing an anode and securing the anode within the frame structure; as well as Two or more shell elements of a shell are provided and are attached to the frame structure by magnetic forces.

20. The method of claim 19, which does not comprise the further step of fastening the shell elements to the frame structure.

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